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Academic literature on the topic 'Micro and nano electromechanical systems and devices'
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Books on the topic "Micro and nano electromechanical systems and devices"
Nano- and micro-electromechanical systems: Fundamentals of nano- and microengineering. 2nd ed. CRC Press, 2005.
Find full textLyshevski, Sergey Edward. Nano- and microelectromechanical systems: Fundamentals of nano- and microenginering. CRC Press, 2000.
Find full textLyshevski, Sergey Edward. Nano- and microelectromechanical systems: Fundamentals of nano- and microengineering. CRC Press, 2001.
Find full textIEEE Workshop on Micro Electro Mechanical Systems (7th 1994 Oiso, Japan). Proceedings: IEEE Micro Electro Mechanical Systems, an investigations of micro structures, sensors, actuators, machines and robotic systems, Oiso, Japan, January 25-28, 1994. IEEE Service Center, 1994.
Find full textIEEE Workshop on Micro Electro Mechanical Systems (6th 1993 Fort Lauderdale, Fla.). Proceedings: IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems, Fort Lauderdale, Florida, February 7-10, 1993. IEEE, 1993.
Find full textL, Garfunkel Eric, Dideikin Arthur, and SpringerLink (Online service), eds. Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators. Springer Science+Business Media B.V., 2010.
Find full textIEEE Workshop on Micro Electro Mechanical Systems (9th 1996 San Diego, Calif.). IEEE the Ninth Annual International Workshop on Micro Electro Mechanical Systems: An investigation of micro structures, sensors, actuators, machines, and systems : proceedings, San Diego, California, USA, February 11-15, 1996. Institute of Electrical and Electronics Engineers, 1996.
Find full textIEEE Workshop on Micro Electro Mechanical Systems (3rd 1990 Napa Valley, Calif.). Proceedings: IEEE micro electro mechanical systems : an investigation of micro structures, sensors, actuators, machines and robots : Napa Valley, California, 11-14 February 1990. Institute of Electrical and Electronics Engineers, 1990.
Find full textJalili, Nader. Piezoelectric-based vibration-control: From macro to micro/nano scale systems. Springer, 2010.
Find full textIEEE Workshop on Micro Electro Mechanical Systems (9th 1996 San Diego, Calif.). The Ninth Annual International Workshop on Micro Electro Mechanical Systems: An investigation of micro structures, sensors, actuators, machines and systems : San Diego, California, USA, February 11-15, 1996. IEEE Service Center, 1996.
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