Books on the topic 'Micro and nano electromechanical systems and devices'

Nano- and micro-electromechanical systems: Fundamentals of nano- and microengineering. 2nd ed. CRC Press, 2005.

Lyshevski, Sergey Edward. Nano- and microelectromechanical systems: Fundamentals of nano- and microenginering. CRC Press, 2000.

Lyshevski, Sergey Edward. Nano- and microelectromechanical systems: Fundamentals of nano- and microengineering. CRC Press, 2001.

IEEE Workshop on Micro Electro Mechanical Systems (7th 1994 Oiso, Japan). Proceedings: IEEE Micro Electro Mechanical Systems, an investigations of micro structures, sensors, actuators, machines and robotic systems, Oiso, Japan, January 25-28, 1994. IEEE Service Center, 1994.

IEEE Workshop on Micro Electro Mechanical Systems (6th 1993 Fort Lauderdale, Fla.). Proceedings: IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems, Fort Lauderdale, Florida, February 7-10, 1993. IEEE, 1993.

L, Garfunkel Eric, Dideikin Arthur, and SpringerLink (Online service), eds. Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators. Springer Science+Business Media B.V., 2010.

IEEE Workshop on Micro Electro Mechanical Systems (9th 1996 San Diego, Calif.). IEEE the Ninth Annual International Workshop on Micro Electro Mechanical Systems: An investigation of micro structures, sensors, actuators, machines, and systems : proceedings, San Diego, California, USA, February 11-15, 1996. Institute of Electrical and Electronics Engineers, 1996.

IEEE Workshop on Micro Electro Mechanical Systems (3rd 1990 Napa Valley, Calif.). Proceedings: IEEE micro electro mechanical systems : an investigation of micro structures, sensors, actuators, machines and robots : Napa Valley, California, 11-14 February 1990. Institute of Electrical and Electronics Engineers, 1990.

Jalili, Nader. Piezoelectric-based vibration-control: From macro to micro/nano scale systems. Springer, 2010.

IEEE Workshop on Micro Electro Mechanical Systems (9th 1996 San Diego, Calif.). The Ninth Annual International Workshop on Micro Electro Mechanical Systems: An investigation of micro structures, sensors, actuators, machines and systems : San Diego, California, USA, February 11-15, 1996. IEEE Service Center, 1996.

International Conference on Micro Nano Devices, Structure and Computing Systems (1st 2010 Singapore). Micro nano devices, structure and computing systems: Selected, peer reviewed papers from the 2010 International Conference on Micro Nano Devices, Structure and Computing Systems (MNDSCS 2010), Singapore, November 6-7, 2010. Trans Tech Publications, 2010.

IEEE Workshop on Micro Electro Mechanical Systems (4th 1991 Nara, Japan.). Proceedings: IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and robots : Nara, Japan, 30 January-2 February 1991. Institute of Electrical and Electronics Engineers, 1991.

ASME International Mechanical Engineering Congress and Exposition (2001 New York, N.Y.). Micro-electro-mechanical systems: MEMS -- 2001 : presented at the 2000 [i.e. 2001] ASME International Mechanical Engineering Congress and Exposition, November 11-16, 2001, New York, New York. American Society of Mechanical Engineers, 2001.

Dong, Lixin. Optomechatronic micro/nano devices and components III: 8-10 October 2007, Lausanne, Switzerland. Edited by École polytechnique fédérale de Lausanne, France. Commissariat à l'énergie atomique. Laboratoire d'intégration des systèmes et des technologies, Fondation suisse pour la recherche en microtechnique, and Society of Photo-optical Instrumentation Engineers. SPIE, 2007.

IEEE Workshop on Micro Electro Mechanical Systems (5th 1992 Travemünde, Germany). Proceedings: IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and robots : Travemünde, Germany, 4 February - 7 February 1992. IEEE, 1992.

IEEE Workshop on Micro Electro Mechanical Systems (11th 1998 Heidelberg, Germany). IEEE, the Eleventh Annual International Workshop on Micro Electro Mechanical Systems: Proceedings : an investigation of micro structures, sensors, actuators, machines and systems, January 25-29, 1998, Heidelberg, Germany. Institute of Electrical and Electronics Engineers, 1998.

Tadigadapa, Srinivas A. MEMS/MOEMS components and their applications V: Special focus topics : transducers at the micro-nano interface : 21-22 January 2008, San Jose, California, USA. Edited by Society of Photo-optical Instrumentation Engineers and Boston University Photonics Center. SPIE, 2008.

Sen, Han, Kameyama Masaomi, Luo Xiangang, et al., eds. Design, manufacturing, and testing of micro- and nano-optical devices and systems: 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies : 19-21 November 2008, Chengdu, China. SPIE, 2009.

International Symposium on Advanced Optical Manufacturing and Testing Technologies (5th 2010 Dalian Shi, China). Design, manufacturing, and testing of micro-and nano-optical devices and systems: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 26-29 April 2010, Dalian, China. Edited by Ye Tianchun, Zhongguo guang xue xue hui, Society of Photo-optical Instrumentation Engineers, Zhongguo ke xue yuan. Guang dian ji shu yan jiu suo, China. Guo jia ke xue ji shu bu, and Fraunhofer Institute for Applied Optics and Precision Engineering. SPIE, 2010.

Sen, Han, Zhongguo guang xue xue hui., SPIE (Society), et al., eds. Design, manufacturing, and testing of micro- and nano-optical devices and systems: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies : 8-12 July 2007, Chengdu, China. SPIE, 2007.

KATAGIRI, Yoshitada. Optomechatronic Micro/Nano Devices and Components. Society of Photo Optical, 2006.

(Editor), Robert E. Geer, Norbert Meyendor (Editor), George Y. Baaklini (Editor), and Bernd Michel (Editor), eds. Testing, Reliability, And Application Of Micro-And Nano-Material Systems III (Proceedings of Spie). SPIE-International Society for Optical Engine, 2005.

Optomechatronic micro/nano components, devices, and systems: 27-28 October, 2004, Philadelphia, Pennsylvania, USA. SPIE, 2005.

Yoshitada, Katagiri, Society of Photo-optical Instrumentation Engineers., Denshi Jōhō Tsūshin Gakkai (Japan). Tsūshin Sosaieti., Denshi Jōhō Tsūshin Gakkai (Japan). Erekutoronikusu Sosaieti., and Nihon Oputomekatoronikusu Kyōkai, eds. Optomechatronic micro/nano components, devices, and systems: 27-28 October 2004, Philadelphia, Pennsylvania, USA. SPIE, 2004.

KATAGIRI, Yoshitada. Optomechatronic Micro Nano Devices and Components: 5-7 December, 2005, Sapporo, Japan. SPIE-International Society for Optical Engine, 2006.

Yoshitada, Katagiri, and Society of Photo-optical Instrumentation Engineers., eds. Optomechatronic micro/nano devices and components II: 3-4 October, 2006, Boston, Massachusetts. SPIE, 2006.

(Editor), Eric G. Johnson, Gregory P. Nordin (Editor), and Thomas J. Suleski (Editor), eds. Micromachining Technology for Micro-optics and Nano-optics IV (Proceedings of SPIE). SPIE-International Society for Optical Engine, 2006.

Norbert, Meyendorf, Baaklini George Y, Michel Bernd 1949-, and Society of Photo-optical Instrumentation Engineers., eds. Testing, reliability, and application of micro- and nano-material systems II: 15-17 March, 2004, San Diego, California, USA. SPIE, 2004.

G, Johnson Eric, Nordin Gregory P, Suleski Thomas J. 1969-, et al., eds. Micromachining technology for micro-optics and nano-optics III: 25-27 January 2005, San Jose, California, USA. SPIE, 2005.

Lyshevski, Sergey Edward. Nano- and Micro-Electromechanical Systems. CRC Press, 2018. http://dx.doi.org/10.1201/9781315219288.

Lyshevski, Sergey Edward, and Sergey E. Lyshevski. Nano- and Micro-Electromechanical Systems: Fundamentals of Nano- and Microengineering. CRC, 2000.

Friend, James. Micro/Nano Materials, Devices, and Systems. SPIE, 2014.

Eggleton, B. J. Micro+Nano Materials, Devices, and Systems. SPIE, 2016.

Solutions Manual for Nano- And Micro-Electromechanical Systems. 2nd ed. CRC Press, 2005.

Takahata, Kenichi, ed. Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies. InTech, 2013. http://dx.doi.org/10.5772/46117.

Modeling and Control for Micro/Nano Devices and Systems. Taylor & Francis Group, 2013.

Modeling and Control for Micro/Nano Devices and Systems. Taylor & Francis Group, 2017.

Micro electro mechanical systems: An investigation of micro structures, sensors, actuators, machines, and systems : proceedings. Institute of Electrical and Electronics Engineers, 1993.

Micro electro mechanical systems: An investigation of micro structures, sensors, actuators, machines, and systems : Proceedings. IEEE Service Center, 1993.

Micro electro mechanical systems: An investigation of micro structures, sensors, actuators, machines, and systems : Proceedings. IEEE Service Center, 1993.

Koochi, Ali, and Mohamadreza Abadyan. Nonlinear Differential Equations in Micro/nano Mechanics: Application in Micro/nanostructures and Electromechanical Systems. Elsevier, 2020.

Micro and Nano Mechanical Testing of Materials and Devices. Springer, 2008.

Yang, Fuqian, and James C. M. Li. Micro and Nano Mechanical Testing of Materials and Devices. Springer, 2009.

Yang, Fuqian, and James C. M. Li. Micro and Nano Mechanical Testing of Materials and Devices. Springer, 2010.

Micromixers: Fundamentals, Design, and Fabrication (Micro & Nano Technologies). William Andrew Publishing, 2007.

Optical Nano And Micro Actuator Technology. CRC Press, 2012.

Micro electro mechanical systems: An investigation of micro structures, sensors, actuators, machines and robots : proceedings. Institute of Electrical and Electronics Engineers, 1989.

Micro electro mechanical systems: An investigation of micro structures, sensors, actuators, machines, and robots : proceedings. IEEE, 1990.

IEEE Robotics and Automation Society., American Society of Mechanical Engineers. Dynamic Systems and Control Division., Micromachine Center (Japan), and IEEE Workshop on Micro Electro Mechanical Systems (1994 : Ōiso-machi, Japan), eds. IEEE micro electro mechanical systems: An investigations [sic] of micro structures, sensors, actuators, machines, and robotic systems : proceedings, Oiso, Japan, January 25-28, 1994. Institute of Electrical and Electronics Engineers], 1994.

Lyshevski, Sergey E. Nano- and Micro-Electromechanical Systems: Fundamentals of Nano- and Microengineering, Second Edition (Nano- and Microscience, Engineering, Technology, and Medicine Series). 2nd ed. CRC, 2005.