Relevant bibliographies by topics / Micro-electro-mechanical-sensor

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  1. Journal articles
  2. Dissertations / Theses
  3. Book chapters
  4. Conference papers

Academic literature on the topic 'Micro-electro-mechanical-sensor'

Author: Grafiati
Published: 4 June 2021
Last updated: 1 February 2022

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Journal articles on the topic "Micro-electro-mechanical-sensor"

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JIANG, Zhuangde. "Special Micro-electro-mechanical Systems Pressure Sensor." Journal of Mechanical Engineering 49, no. 06 (2013): 187. http://dx.doi.org/10.3901/jme.2013.06.187.

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Fang, Susu, Zengcai Wang, and Lei Zhao. "Research on the automotive sensor–aided low-cost inertial navigation system for land vehicles." Advances in Mechanical Engineering 11, no. 1 (January 2019): 168781401882287. http://dx.doi.org/10.1177/1687814018822876.

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When a low-cost micro-electro-mechanical system inertial measurement unit is used for a vehicle navigation system, errors will quickly accumulate because of the large micro-electro-mechanical system sensor measurement noise. To solve this problem, an automotive sensor–aided low-cost inertial navigation system is proposed in this article. The error-state model of the strapdown inertial navigation system has been derived, and the measurements from the wheel speed sensor and steer angle sensor are used as the new observation vector. Then, the micro-electro-mechanical system inertial measurement unit/wheel speed sensor/steer angle sensor–integrated system is established based on adaptive Kalman filtering. The experimental results show that the positioning error of micro-electro-mechanical system inertial measurement unit/wheel speed sensor/steer angle sensor is 94.67%, 98.88%, and 97.88% less than the values using pure strapdown inertial navigation system in the east, north, and down directions, respectively. The yaw angle error is reduced to less than 1°, and the vehicle velocity estimation of micro-electro-mechanical system inertial measurement unit/wheel speed sensor/steer angle sensor–integrated navigation system is closer to the reference value. These results show the precision of the integrated navigation solution.
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Jin, Ren Cheng, Ming Liang Shao, Li Sha Meng, Zhe Nan Tang, and Jia Qi Wang. "Coupled Electro-Thermal-Mechanical Micro-Hotplate-Based for Micro Gas Pressure Sensor." Advanced Materials Research 204-210 (February 2011): 1086–89. http://dx.doi.org/10.4028/www.scientific.net/amr.204-210.1086.

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In this paper, electro-thermal-mechanical theoretical analysis of micro-hotplate-based micro gas pressure sensor is carried out, which is on basis of the classical heat transfer theory and rarefied gas dynamics. Combined with micro-hotplate (MHP) theory analysis of heat transfer and thermal-mechanical finite element modeling, electro-thermal-mechanical coupled analysis of theoretical models with regard to the MHP-based micro gas pressure sensor is built. Then, through the ANSYS-one of the finite element analysis software-the simulation analysis of MHP went well. The simulation results show that MHP generates a smaller deformation because of adding the thermal conductivity, and MHP provides a more feasible analysis method in the theoretical study of micro hotplate.
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Zou, Xudong, Pradyumna Thiruvenkatanathan, and Ashwin A. Seshia. "A high-resolution micro-electro-mechanical resonant tilt sensor." Sensors and Actuators A: Physical 220 (December 2014): 168–77. http://dx.doi.org/10.1016/j.sna.2014.10.004.

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Allen, J. J., R. D. Kinney, J. Sarsfield, M. R. Daily, J. R. Ellis, J. H. Smith, S. Montague, et al. "Integrated micro-electro-mechanical sensor development for inertial applications." IEEE Aerospace and Electronic Systems Magazine 13, no. 11 (1998): 36–40. http://dx.doi.org/10.1109/62.730622.

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Uchiyama, Jimii, Kakuji Ogawara, and Kazuyuki Minami. "706 Micro Flow Sensor and PSJA using Micro Electro Mechanical System Technology." Proceedings of Conference of Chugoku-Shikoku Branch 2008.46 (2008): 243–44. http://dx.doi.org/10.1299/jsmecs.2008.46.243.

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Jin, Ren Cheng, Wu Jin Zhang, Zhe Nan Tang, Jia Qi Wang, and Ming Liang Shao. "Analysis of Coupled Electro-Thermal-Mechanical of Micro Gas Pressure Sensor Based on Micro-Hotplate Technology." Advanced Materials Research 60-61 (January 2009): 119–24. http://dx.doi.org/10.4028/www.scientific.net/amr.60-61.119.

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The effect of micro-hotplate (MHP) thermal deformation on the signal output of the MHP-based micro gas pressure sensor is investigated. Combining electro-thermal theoretical analysis and thermal-mechanical finite element modeling, different electro-thermal-mechanical analysis models of the sensors are built and solved at constant current condition and constant temperature condition respectively. The calculated results show that the MHP thermal deformation has little effect on the sensor signal output over the entire pressure range at constant current condition, I=0.7mA. While at constant temperature condition, Ts=400K, thermal deformation has little effect on the sensor signal output at low gas pressure, but at high pressure the effect are great. Moreover, according to the thermal-mechanical analysis, we find that optimizing thickness distribution of thin films in the MHP suspended structure can reduce thermal deformation effectively at higher temperature when the lateral dimension is same, which presents a practicable method to improve the sensor stability.
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Gatzen, H. H. "Magnetic Micro Electro-mechanical Systems for Sensor and Actuator Applications." ECS Transactions 16, no. 45 (December 18, 2019): 235–53. http://dx.doi.org/10.1149/1.3140026.

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Yang, Zhen, Huanhuan Wang, Xinwei Dong, Hailong Yan, Chong Lei, and Yongsong Luo. "Giant magnetoimpedance based immunoassay for cardiac biomarker myoglobin." Analytical Methods 9, no. 24 (2017): 3636–42. http://dx.doi.org/10.1039/c7ay00981j.

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Huang, Jingli, Guorong Zhao, and Xiangyu Zhang. "MEMS gyroscope/TAM-integrated attitude estimation based on moving horizon estimation." Proceedings of the Institution of Mechanical Engineers, Part G: Journal of Aerospace Engineering 231, no. 8 (June 13, 2016): 1451–59. http://dx.doi.org/10.1177/0954410016652920.

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To improve the accuracy of the attitude sensor micro electro mechanical system gyroscope in low cost satellite, a nonlinear moving horizon estimation algorithm based on micro-electro mechanical system gyroscope/three-axis magnetometer is proposed in this paper. First, a quaternion micro-electro mechanical system gyroscope/three-axis magnetometer-integrated attitude estimation model is established so as to improve the accuracy of micro-electro mechanical system gyroscope. Thanks to the concealment and autonomy, these two low cost sensors have great potential in the military area. Second, taking advantage of optimal problem in coping with constraints, a real time moving horizon estimation algorithm with equality constraint is designed to deal with the disability of solving quaternion normalization analytically in the frame work of Kalman. In this algorithm, Gauss–Newton iterative method is used to obtain the optimal state estimation in the “window”. Meanwhile, strong tracking filter of arrival cost is designed outside of the “window” to enhance system robustness for that three-axis magnetometer is vulnerable to external interference. Third, the proposed MHE is applied in the micro-electro mechanical system gyroscope/three-axis magnetometer attitude estimation system. The simulation results show that the method has higher accuracy and robustness.
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Dissertations / Theses on the topic "Micro-electro-mechanical-sensor"

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Zhao, Li. "Micro-electro-mechanical Tilt Sensor Design and Fabrications." Thesis, Imperial College London, 2009. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.506035.

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Nguyen, Van-Nghi. "Principes alternatifs pour la détection de masse ultime via la dynamique non linéaire de capteurs résonants M/NEMS." Thesis, Lyon, INSA, 2013. http://www.theses.fr/2013ISAL0160/document.

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Les capteurs résonants de type M/NEMS sont largement utilisés dans l’environnement biologique pour la mesure de masse de biomolécules en raison de leur grande précision combinée à une taille réduite. Classiquement, la détection et la quantification se basent sur le décalage fréquentiel induit par la masse ajoutée. Toutefois, ce décalage devient très faible et difficile à distinguer du bruit de mesure lorsque les masses considérées sont très petites. Il est théoriquement possible de gagner encore un ou plusieurs ordres de grandeur en résolution avec ces méthodes fréquentielles en diminuant encore les tailles et/ou en augmentant le rapport signal sur bruit, c’est-à-dire en actionnant de manière plus importante les résonateurs. Mais, dans ces conditions, les nanorésonateurs ont un comportement très fortement non-linéaire, source d’instabilités et de mixage de bruit basses et hautes fréquences susceptibles de dégrader la fiabilité et la précision des mesures. C’est pourquoi cette thèse a pour objectif de définir des principes de détection alternatifs basés sur l’exploitation des phénomènes non-linéaires, tels que les comportements hystérétiques et les bifurcations des courbes de réponse en fréquence. Pour cela, un modèle réduit de micro/nano-poutre résonante avec actionnement électrostatique est considéré. Les résultats numériques montrent que les brusques sauts d’amplitude à proximité des points de bifurcation permettent la détection de masses très faibles. Contrairement à la détection fréquentielle, ces sauts sont d’autant plus grands que la masse additionnelle est petite, ce qui rend cette technique particulièrement intéressante. De plus, le seuil de détection peut être ajusté avec la valeur de la fréquence de fonctionnement. Un mécanisme de réinitialisation est toutefois indispensable pour rendre la détection à nouveau possible après un saut d’amplitude. Afin d’automatiser la réinitialisation et ainsi permettre la détection en temps réel, un concept totalement innovant de détection de masse par balayage en fréquence des cycles d’hystérésis est proposé, qui permet de détecter, quantifier et localiser la masse ajoutée sur la poutre résonante. La mise en réseau de plusieurs poutres résonantes est également traitée et constitue un premier pas vers la mise en oeuvre de réseaux de milliers de capteurs. Pour cela, des architectures efficaces sont proposées et les modèles numériques sont adaptés en conséquence. Sur des configurations symétriques, l’exploitation des bifurcations de type brisure de symétrie permet là-encore d’améliorer la détection de masse
Resonant M/NEMS mass sensors are widely used in biological environment for measuring the mass of biomolecules due to their high accuracy combined with a reduced size. Usually, the detection and the quantification are based on the frequency shift induced by an added mass. However, this shift becomes very small and difficult to distinguish from the noise of measurement as the considered masses are tiny. It is theoretically possible to increase further one or several orders of magnitude in resolution with these frequency methods by further reducing size and/or by increasing the signal-to-noise ratio, that is to say by operating more importantly the resonators. But in these conditions, the nanoresonators have a strongly nonlinear behavior, a source of instability and noise mix of low and high frequencies likely to degrade the reliability and the accuracy of measurements. Therefore, the thesis’s objective is to define alternative principles of detection based on exploiting the nonlinear phenomena, such as the hysteretic behavior and the bifurcations of frequency-response curves. To this end, a reduced model of resonant micro/nano-beam with electrostatic actuation is considered. The numerical results show that the sudden jumps in amplitude close to bifurcation points allow the detection of very small masses. Unlike the frequency detection, the smaller the added mass, the larger the increase of the jump, which makes this technique particularly interesting. In addition, the detection threshold can be adjusted with the value of the operating frequency. However, a mechanism of reinitialization is mandatory to make the detection possible again after a jump in amplitude. In order to automate the reinitialization and allow the detection in real-time, a completely innovative concept of mass detection by the frequency sweep of the hysteretic cycles is proposed to detect, quantify and locate the added mass on the resonant beam. An array of several resonant beams is also considered and constitutes a first step toward the implementation of arrays of thousands of sensors. Efficient architectures are proposed for this purpose and the numerical models are adapted accordingly. On symmetric configurations, exploiting the bifurcations of symmetry-breaking type allows here again to improve the mass detection
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Pekárek, Jan. "Výzkum a vývoj moderních emisních senzorů typu MEMS." Doctoral thesis, Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií, 2014. http://www.nusl.cz/ntk/nusl-233623.

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The dissertation thesis is focused on research and development of modern emission MEMS sensors. The emission sensor based on the field emission from nanostructured materials represents innovative approach to pressure sensing. The nanostructures serve as electron emitter in an electric field between the cathode and anode in the pressure sensor. This electric field is constant and the change in ambient pressure causes the change of distance between electrodes, thereby the electric field is increasing. This intensity is proportional to the emission from the cathode made of nanostructured material. Changing the distance between the electrodes is caused by the deflection of the deformation element - the membrane, which operates the measured pressure. In the current state of the art an extensive research is carried out to find new nanostructured materials with good emission properties. Four nanostructured materials have been chosen and then experimentally prepared and characterized inside the vacuum chamber. For the simulation of diaphragm bending, the chamber is equipped with linear nano-motion drive SmarAct that enables precise changes of the distance between two electrodes inside the vacuum chamber. The computer model to predict the deformation of diaphragm was prepared in the simulation program CoventorWare. The behavior of diaphragm in a wide range of dimensions of the membrane, its thickness and the applied pressure are possible to predict. The dependencies of the current density on the electric field are plotted from the measured emission characteristics of nanostructured materials and thus characterized nanostructured materials can be compared. The dependencies are further converted by Fowler-Nordheimovy theory on the curve (ln(J/E2) vs. 1/E), whose advantage is linear shape. Basic parameters describing the emission properties of characterized nanostructured materials are deducted. Two methods for vacuum packaging of the sensor electrodes are designed. Anodic bonding technology and encapsulating using glass frit bonding are tested. To evaluate the bonding strength, the bonded substrates are tested for tensile strength.
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Mylonas, Christos, and Samir Đulić. "Smarttelefon-sensorernas möjligheter - En studie om barometer-, GPS- och accelerometersensorer. The smartphone sensor possibilities - A case study featuring the barometer, GPS and accelerometer sensors." Thesis, Malmö högskola, Fakulteten för kultur och samhälle (KS), 2014. http://urn.kb.se/resolve?urn=urn:nbn:se:mau:diva-20469.

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Denna rapport sammanfattar resultat av ett examensarbete på en högskoleingenjörsutbildningsom utfördes av två studenter på Malmö högskola.Arbetets syfte var att genomföra en mängd olika experiment med accelerometer, barometeroch GPS i en modern smarttelefon. Ett antal scenarier för en tänkbar sensoranvändning i applikationerformulerades för att vägleda olika experiment. Experimentdata dokumenterades noggrantoch analyserades med avsikten att skapa en databank med information för framtida studier.Analys av data inkluderar höjdbestämning i naturen och i byggnader med hjälp av barometersensor,geografisk position med hjälp av GPS, hastighet och acceleration under en hissfärdmed hjälp av accelerometer.Rapporten innehåller en omfattande litteraturstudie om användning av sensorer vid inomhuspositionering.Från analys av mätdata, kom vi fram till slutsatsen att är möjligt att beräkna höjdenfrån barometerdata med bra noggrannhet under optimala omständigheter. GPS höjdenfrån mätningarna har stor felmarginal jämfört med den verkliga höjden samt när den jämförsmed den beräknade höjden från barometern.Genom att utföra en numerisk integration på accelerometer-data kom vi fram till att det är möjligtatt beräkna ungefär hur långt man har färdats med en hiss, dock att vissa detaljer måste tasi beaktning.
This report summarizes the results of a degree Bachelor of engineering in Computer Scienceconducted by two students at Malmo University.Work aim was to conduct a variety of experiments with accelerometer, barometer and GPS in amodern smartphone. A number of scenarios for a possible sensor use in applications formulatedto guided experiments. Data is carefully documented and analyzed, with the intention tocreate a database of information for future studies. Analysis of the data includes the altitudedetermination in nature and in buildings using barometric sensor, geographic location usingGPS, speed and acceleration during an elevator journey with the help of accelerometer.The report contains a comprehensive literature review on the use of sensors for indoorpositioning.From our analysis of the measurement data, we conclude that it is possible to calculate thealtitude from barometric- information but good accuracy if there are optimum circumstances.GPS altitude from our measurements show faulty height by a large margin compared with theactual height and when it is compared with the calculated height of the barometer the barometricheight is closer to the actual height.By performing a numerical integration of the accelerometer data, the results show that it ispossible to calculate approximately how far you have traveled in meters in an elevator, howeverthere are some things that must be taken into consideration.
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Pekárek, Jan. "Katodové nanostruktury v MEMS aplikacích." Master's thesis, Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií, 2008. http://www.nusl.cz/ntk/nusl-217244.

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The main goal of this work is to introduce new carbon structures - carbon nanotubes. The main objective of this work is to take advantage of the unique characteristic of carbon nanotubes to emit electrons at very low supply voltage.
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Berlemont, Samuel. "Automatic non linear metric learning : Application to gesture recognition." Thesis, Lyon, 2016. http://www.theses.fr/2016LYSEI014/document.

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Cette thèse explore la reconnaissance de gestes à partir de capteurs inertiels pour Smartphone. Ces gestes consistent en la réalisation d'un tracé dans l'espace présentant une valeur sémantique, avec l'appareil en main. Notre étude porte en particulier sur l'apprentissage de métrique entre signatures gestuelles grâce à l'architecture "Siamoise" (réseau de neurones siamois, SNN), qui a pour but de modéliser les relations sémantiques entre classes afin d'extraire des caractéristiques discriminantes. Cette architecture est appliquée au perceptron multicouche (MultiLayer Perceptron). Les stratégies classiques de formation d'ensembles d'apprentissage sont essentiellement basées sur des paires similaires et dissimilaires, ou des triplets formés d'une référence et de deux échantillons respectivement similaires et dissimilaires à cette référence. Ainsi, nous proposons une généralisation de ces approches dans un cadre de classification, où chaque ensemble d'apprentissage est composé d’une référence, un exemple positif, et un exemple négatif pour chaque classe dissimilaire. Par ailleurs, nous appliquons une régularisation sur les sorties du réseau au cours de l'apprentissage afin de limiter les variations de la norme moyenne des vecteurs caractéristiques obtenus. Enfin, nous proposons une redéfinition du problème angulaire par une adaptation de la notion de « sinus polaire », aboutissant à une analyse en composantes indépendantes non-linéaire supervisée. A l'aide de deux bases de données inertielles, la base MHAD (Multimodal Human Activity Dataset) ainsi que la base Orange, composée de gestes symboliques inertiels réalisés avec un Smartphone, les performances de chaque contribution sont caractérisées. Ainsi, des protocoles modélisant un monde ouvert, qui comprend des gestes inconnus par le système, mettent en évidence les meilleures capacités de détection et rejet de nouveauté du SNN. En résumé, le SNN proposé permet de réaliser un apprentissage supervisé de métrique de similarité non-linéaire, qui extrait des vecteurs caractéristiques discriminants, améliorant conjointement la classification et le rejet de gestes inertiels
As consumer devices become more and more ubiquitous, new interaction solutions are required. In this thesis, we explore inertial-based gesture recognition on Smartphones, where gestures holding a semantic value are drawn in the air with the device in hand. In our research, speed and delay constraints required by an application are critical, leading us to the choice of neural-based models. Thus, our work focuses on metric learning between gesture sample signatures using the "Siamese" architecture (Siamese Neural Network, SNN), which aims at modelling semantic relations between classes to extract discriminative features, applied to the MultiLayer Perceptron. Contrary to some popular versions of this algorithm, we opt for a strategy that does not require additional parameter fine tuning, namely a set threshold on dissimilar outputs, during training. Indeed, after a preprocessing step where the data is filtered and normalised spatially and temporally, the SNN is trained from sets of samples, composed of similar and dissimilar examples, to compute a higher-level representation of the gesture, where features are collinear for similar gestures, and orthogonal for dissimilar ones. While the original model already works for classification, multiple mathematical problems which can impair its learning capabilities are identified. Consequently, as opposed to the classical similar or dissimilar pair; or reference, similar and dissimilar sample triplet input set selection strategies, we propose to include samples from every available dissimilar classes, resulting in a better structuring of the output space. Moreover, we apply a regularisation on the outputs to better determine the objective function. Furthermore, the notion of polar sine enables a redefinition of the angular problem by maximising a normalised volume induced by the outputs of the reference and dissimilar samples, which effectively results in a Supervised Non-Linear Independent Component Analysis. Finally, we assess the unexplored potential of the Siamese network and its higher-level representation for novelty and error detection and rejection. With the help of two real-world inertial datasets, the Multimodal Human Activity Dataset as well as the Orange Dataset, specifically gathered for the Smartphone inertial symbolic gesture interaction paradigm, we characterise the performance of each contribution, and prove the higher novelty detection and rejection rate of our model, with protocols aiming at modelling unknown gestures and open world configurations. To summarise, the proposed SNN allows for supervised non-linear similarity metric learning, which extracts discriminative features, improving both inertial gesture classification and rejection
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Pan, Tai-Tou, and 潘泰斗. "Multi-Function Thermocouple-Based Micro-Sensor Capable of Being Monolithically Integrated with Micro Electro-Mechanical Devices." Thesis, 2011. http://ndltd.ncl.edu.tw/handle/45513200734651056768.

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碩士
國立臺灣大學
光電工程學研究所
99
Pressure sensor, accelerometer and flowmeter are common micro electro-mechanical devices. Along with the progress of micro electro-mechanical technique, micro-sensor becomes multi-functional and smaller. Thermocouple is created basic on Seebeck effect. Hong (2009) designed four types of thermocouple devices: overlap thermocouple, non-overlap thermocouple, longer non-overlap thermocouple and symmetric thermocouple. This study proceeded basic efficiency experiment, fixed temperature to adjust pressure experiment, fixed pressure to adjust temperature experiment, and experiment of changing gas of the environment, to test thermocouple devices. According to the result of experiments, the output voltage of thermocouple devices and heating current are positive correlation. Fixed heating current and environmental temperature, the output voltage of overlap and longer non-overlap thermocouple are increased when the environmental vacuum degree rises. Fixed heating current and environmental pressure, the output voltage of overlap and longer non-overlap thermocouple are increased when the environmental temperature rises. According to the achievement of this study, the thermocouple devices can be used as multi-functional micro-sensor to sense the variation of environmental temperature and pressure, and are capable of being monolithically integrated with other micro electro-mechanical devices, such as gyroscope.
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Huang, Chu-Rong, and 黃俊榮. "Design and Fabrication of Micro-electro-mechanical System Pressure Sensor for Rehabilitation Applications." Thesis, 1998. http://ndltd.ncl.edu.tw/handle/42845874511959979511.

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Hsieh, Ming-Chun, and 謝明君. "The Study of Micro-Electro-Mechanical System (MEMS) Technology for Sensor and RF Inductor Applications." Thesis, 2004. http://ndltd.ncl.edu.tw/handle/67463795207585154449.

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博士
國立成功大學
電機工程學系碩博士班
92
In this dissertation, we report the study of Micro-electro-mechanical system (MEMS) technology for sensors, including, shear-stress sensor, far infrared sensor and RF inductor applications. The Finite Element Method (FEM) package ANSYS has been employed for the thermal isolation, stress distribution, impact force and temperature distribution analysis. 　　Firstly, we study the preparation of prototype contact type micro piezoresistive shear-stress sensor that can be utilized to measure the shear stress between skin of stump and socket of Above-Knee (AK) prosthesis. MEMS technology has been chosen for the design because of the low cost, small size and adaptability to this application. The Finite Element Method (FEM) package ANSYS has been employed for the stress analysis of the micro shear-stress sensors. The sensor contains two transducers that will transform the stresses into an output voltage. The piezoresistive strain gauges were implanted with boron ions. Static characteristics of the shear sensor were determined through a series of calibration tests. In addition, the results simulated by FEM are validated by comparison with experimental investigations. 　　Next, we report the design, fabrication and performance of a novel crystal SiGeC infrared sensor with wavelength 8-14mm for portable far infrared ray (FIR) in rehabilitation system application. The operation principle of the sensor is based on the change of thermistor’s resistance under the irradiation FIR light. The thermistor in the IR detector is made of Si0.68Ge0.31C0.01 thin films for its large activation energy and the temperature coefficient. Finite Element Method (FEM) package ANSYS has been employed for analyze of the thermal isolation and stress distribution in the IR detector. In addition, a comparison between the detectors both with and without the micro-bridge structure has been made in order to verify the improvement of the thermal isolation and lowering of the thermal conductance owing to the micro-bridge structure. The complete process and measured thermal conductance, thermal time constant and the heat capacity of developed FIR sensor have been described in detail. 　　Finally, we study the design, fabrication and comparison various geometry of deep sub-micron high Q suspended spiral on chip inductors. In the design, finite element program, ANSYS, were used for electrical-characteristics, maximum endurable impact force and thermal conduction simulations, respectively. Based on the design, suspended 10-turns spiral inductor with different air cavity structures, i.e., diamond opening, circle opening, triangle opening and full suspended with pillar supports were developed for different applications. Among these structures, the suspended inductor with pillar support possesses the highest Qmax (maximum of quality factor) of 6.6 at 2 GHz, the least effective dielectric constant of 1.06, and the lowest endurable impact force 0.184 Newton. On the other hand, the spiral inductor with diamond opening has a lowest Qmax of 4.3, the largest effective dielectric constant of 3.44 and highest endurable impact force 4 Newton. The former is suitable for station telecommunication applications in which the mechanical vibration is not a serious concern, while the latter can be used for mobile telecommunication applications subject to strong mechanical vibrations. Additionally, the conventional on-chip spiral inductor embraced by SiO2 with a dielectric constant of 4 was prepared for comparison and found its Qmax is 3.8 at 1.2 GHz. 　　Moreover, the impact force, the maximum allowable operating current of inductors with various structures, including planar spiral inductor, square solenoid inductor, inclined solenoid inductor, and stacked spiral inductors have been simulated and compared.
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Pattnaik, Prasant Kumar. "Analysis And Design Of Micro-Opto-Electro-Mechanical Systems (MOEMS) Based Pressure And Vibration Sensors." Thesis, 2005. http://etd.iisc.ernet.in/handle/2005/1414.

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Book chapters on the topic "Micro-electro-mechanical-sensor"

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Yu, Zhengyu, Zenon Chaczko, and Jiajia Shi. "Low Cost Wireless Micro-Electro-Mechanical-Systems Accelerometers Linear Sensor Model." In Smart Innovations in Engineering and Technology, 156–65. Cham: Springer International Publishing, 2019. http://dx.doi.org/10.1007/978-3-030-32861-0_11.

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Patkar, Rajul S., Manoj Kandpal, Neena Gilda, Prasenjit Ray, and V. Ramgopal Rao. "Polymer-Based Micro/Nano Cantilever Electro-Mechanical Sensor Systems for Bio/Chemical Sensing Applications." In Springer Tracts in Mechanical Engineering, 403–22. New Delhi: Springer India, 2014. http://dx.doi.org/10.1007/978-81-322-1913-2_24.

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Otmani, Radouane, and Nasreddine Benmoussa. "Micro Electro Mechanical Systems Modeling by VHDL-AMS: Application to a Piezoresistive Pressure Sensor." In Lecture Notes in Mechanical Engineering, 31–41. Cham: Springer International Publishing, 2020. http://dx.doi.org/10.1007/978-3-030-46729-6_4.

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Li, Mochen, H. Henry Zhang, Li Tan, and Wangling Yu. "Self-Powered Height Sensor With ZigBee Networks for Intelligent Systems." In Handbook of Research on Biomimetics and Biomedical Robotics, 410–41. IGI Global, 2018. http://dx.doi.org/10.4018/978-1-5225-2993-4.ch018.

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With the development of micro-electro-mechanical systems (MEMS), wireless communication technology, and embedded systems, wireless sensor network (WSN) has been a focus for research among various fields. Wireless sensor technology inspires many innovations for industrial applications and medical robots, and breaks many limitations and inconvenience for such sensing devices. A self-powered height sensing system with ZigBee technology is presented. It specifically targets to replace an original wired system with an integrated wireless sensor that is comprised of all necessary parts: sensing module, processing module, RF transceiver, and power supply. First, the authors present the system framework design including the layout of a wireless sensor node based on ZigBee. Second, with the vibration environment, a self-powered generator was developed through the comparison between piezoelectric and electromagnetic generation. Then several experiments are conducted to test and analyze the feasibility of the whole system. Finally, a future upgraded design is proposed to improve system performance.
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Jain, P. C. "Application of Wireless Sensor Networks in Industrial Settings." In Handbook of Research on Industrial Informatics and Manufacturing Intelligence, 315–32. IGI Global, 2012. http://dx.doi.org/10.4018/978-1-4666-0294-6.ch014.

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Recent advances in computing and communication have caused a significant shift in wireless sensor network (WSN) research and brought it close to achieving its original vision. WSNs have gained much attention in both public and research committees, because they are expected to bring the interaction between humans, environment, and machines to a new paradigm. The development of WSN requires technology from three different research areas: sensing, communication, and computing (including hardware, software, and algorithms). Combined and separate advancements in each of these areas have driven research in WSN. Small and inexpensive sensors based on Micro-electro mechanical system (MEMS) technology, wireless networks, and inexpensive low power processors allow the deployment of wireless ad-hoc networks for various applications. This chapter discusses about WSN, industrial WSN, and technical challenges. One of the major challenges is reduction in power consumption. The chapter also discusses some of the major industrial applications and two case-studies of fire-fighting and home healthcare.
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Charry, Edgar, and Daniel T. H. Lai. "Methods for Improving Foot Displacement Measurements Calculated from Inertial Sensors." In Biomedical Engineering and Information Systems, 93–116. IGI Global, 2011. http://dx.doi.org/10.4018/978-1-61692-004-3.ch005.

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The use of inertial sensors to measure human movement has recently gained momentum with the advent of low cost micro-electro-mechanical systems (MEMS) technology. These sensors comprise accelerometer and gyroscopes which measure accelerations and angular velocities respectively. Secondary quantities such as displacement can be obtained by integration of these quantities, a method which presents challenging issues due to the problem of accumulative sensor errors. This chapter investigates the spectral evaluation of individual sensor errors and looks at the effectiveness of minimizing these errors using static digital filters. The primary focus is on the derivation of foot displacement data from inertial sensor measurements. The importance of foot, in particular toe displacement measurements is evident in the context of tripping and falling which are serious health concerns for the elderly. The Minimum Toe Clearance (MTC) as an important gait variable for falls-risk prediction and assessment, and therefore the measurement variable of interest. A brief sketch of the current devices employing accelerometers and gyroscopes is presented, highlighting the problems and difficulties reported in literature to achieve good precision. These have been mainly due to the presence of sensor errors and the error accumulative process employed in obtaining displacement measurements. The investigation first proceeds to identify the location of these sensor errors in the frequency domain using the Fast Fourier Transform (FFT) on raw inertial sensor data. The frequency content of velocity and displacement measurements obtained from integrating the inertial data using a well known strap-down method is then explored. These investigations revealed that large sensor errors occurred mainly in the low frequency spectrum while white noise exists in all frequency spectra. The efficacy of employing a band-pass filter to remove a large portion of these errors and their effect on the derived displacements is elaborated on. The cross-correlation of the FFT power spectra from a highly accurate optical measurement system and processed sensor data is used as a metric to evaluate the performance of the band-pass filter at several stages of the processing stage. The motivation is that a more fundamental method would require less computational demand and could lead to more efficient implementations in low-power and systems with limited resources, so that portable sensor based motion measurement system would provide a good degree of measurement accuracy.
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Ozevin, D. "Micro-electro-mechanical-systems (MEMS) for assessing and monitoring civil infrastructures." In Sensor Technologies for Civil Infrastructures, 265–302. Elsevier, 2014. http://dx.doi.org/10.1533/9780857099136.265.

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Conference papers on the topic "Micro-electro-mechanical-sensor"

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Zou, Xudong, Pradyumna Thiruvenkatanathan, and Ashwin A. Seshia. "Micro-electro-mechanical resonant tilt sensor." In 2012 IEEE International Frequency Control Symposium (FCS). IEEE, 2012. http://dx.doi.org/10.1109/fcs.2012.6243702.

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Selvarajan, Ananth, Prasant K. Pattnaik, Vishwa M. Gupta, and Talabuttala Srinivas. "Micro-opto-electro-mechanical (MOEM) vibration sensor." In SPIE's 7th Annual International Symposium on Smart Structures and Materials, edited by Vijay K. Varadan. SPIE, 2000. http://dx.doi.org/10.1117/12.388925.

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Maxwell, P. W., B. Cain, and S. L. Roche. "Field test of a micro‐machined, electro‐mechanical, digital seismic sensor." In SEG Technical Program Expanded Abstracts 1999. Society of Exploration Geophysicists, 1999. http://dx.doi.org/10.1190/1.1821099.

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Zou, Xudong, Pradyumna Thiruvenkatanathan, and Ashwin A. Seshia. "Micro-electro-mechanical resonant tilt sensor with 250 nano-radian resolution." In 2013 Joint European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC). IEEE, 2013. http://dx.doi.org/10.1109/eftf-ifc.2013.6702229.

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Solomon, Latasha, and Leng Sim. "Transient detection via micro-electro-mechanical systems based acoustic particle velocity sensor." In 166th Meeting of the Acoustical Society of America. Acoustical Society of America, 2014. http://dx.doi.org/10.1121/1.4874297.

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Srinivas, Talabuttala, Prasant K. Pattnaik, T. Badri Narayana, and Ananth Selvarajan. "Analysis of Mach-Zehnder interferometric micro-opto-electro-mechanical (MOEM) pressure sensor." In International Symposium on Photonics and Applications, edited by Robert A. Lieberman, Anand K. Asundi, and Hiroshi Asanuma. SPIE, 1999. http://dx.doi.org/10.1117/12.369328.

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Wang, Ming, and Shouping Nie. "Position sensor in micro-electro-mechanical systems using a self-mixing laser diode." In International Symposium on Optoelectonics and Microelectronics, edited by Norman C. Tien and Qing-An Huang. SPIE, 2001. http://dx.doi.org/10.1117/12.444733.

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Udono, Ken, and Renate Sitte. "Sensor modeling for virtual reality micro-electro-mechanical systems (MEMS) software design tools." In International Symposium on Microelectronics and MEMS, edited by Neil W. Bergmann, Derek Abbott, Alex Hariz, and Vijay K. Varadan. SPIE, 2001. http://dx.doi.org/10.1117/12.449144.

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Zhang, Sean Z., Guoda Xu, Wei Qiu, Freddie S. Lin, Robert C. Testa, and Michael S. Mattice. "Micro-electro-mechanical system (MEMS)-based fiber optic sensor and sensor network for improving weapon stabilization and fire control." In AeroSense 2000, edited by Raja Suresh and Homer H. Pien. SPIE, 2000. http://dx.doi.org/10.1117/12.395029.

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Ho, Jyh-Jier, Yuen Keun Fang, M. C. Hsieh, Chin-Ying Chen, S. F. Ting, S. M. Lin, and K. H. Wu. "Development of a pyroelectric thin film infrared sensor by micro-opto-electro-mechanical system (MOEMS) technology." In International Symposium on Photonics and Applications, edited by Robert A. Lieberman, Anand K. Asundi, and Hiroshi Asanuma. SPIE, 1999. http://dx.doi.org/10.1117/12.369329.

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