Journal articles: 'Micro-electro-mechanical-sensor'

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JIANG, Zhuangde. "Special Micro-electro-mechanical Systems Pressure Sensor." Journal of Mechanical Engineering 49, no. 06 (2013): 187. http://dx.doi.org/10.3901/jme.2013.06.187.

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Fang, Susu, Zengcai Wang, and Lei Zhao. "Research on the automotive sensor–aided low-cost inertial navigation system for land vehicles." Advances in Mechanical Engineering 11, no. 1 (January 2019): 168781401882287. http://dx.doi.org/10.1177/1687814018822876.

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When a low-cost micro-electro-mechanical system inertial measurement unit is used for a vehicle navigation system, errors will quickly accumulate because of the large micro-electro-mechanical system sensor measurement noise. To solve this problem, an automotive sensor–aided low-cost inertial navigation system is proposed in this article. The error-state model of the strapdown inertial navigation system has been derived, and the measurements from the wheel speed sensor and steer angle sensor are used as the new observation vector. Then, the micro-electro-mechanical system inertial measurement unit/wheel speed sensor/steer angle sensor–integrated system is established based on adaptive Kalman filtering. The experimental results show that the positioning error of micro-electro-mechanical system inertial measurement unit/wheel speed sensor/steer angle sensor is 94.67%, 98.88%, and 97.88% less than the values using pure strapdown inertial navigation system in the east, north, and down directions, respectively. The yaw angle error is reduced to less than 1°, and the vehicle velocity estimation of micro-electro-mechanical system inertial measurement unit/wheel speed sensor/steer angle sensor–integrated navigation system is closer to the reference value. These results show the precision of the integrated navigation solution.

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Jin, Ren Cheng, Ming Liang Shao, Li Sha Meng, Zhe Nan Tang, and Jia Qi Wang. "Coupled Electro-Thermal-Mechanical Micro-Hotplate-Based for Micro Gas Pressure Sensor." Advanced Materials Research 204-210 (February 2011): 1086–89. http://dx.doi.org/10.4028/www.scientific.net/amr.204-210.1086.

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In this paper, electro-thermal-mechanical theoretical analysis of micro-hotplate-based micro gas pressure sensor is carried out, which is on basis of the classical heat transfer theory and rarefied gas dynamics. Combined with micro-hotplate (MHP) theory analysis of heat transfer and thermal-mechanical finite element modeling, electro-thermal-mechanical coupled analysis of theoretical models with regard to the MHP-based micro gas pressure sensor is built. Then, through the ANSYS-one of the finite element analysis software-the simulation analysis of MHP went well. The simulation results show that MHP generates a smaller deformation because of adding the thermal conductivity, and MHP provides a more feasible analysis method in the theoretical study of micro hotplate.

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Zou, Xudong, Pradyumna Thiruvenkatanathan, and Ashwin A. Seshia. "A high-resolution micro-electro-mechanical resonant tilt sensor." Sensors and Actuators A: Physical 220 (December 2014): 168–77. http://dx.doi.org/10.1016/j.sna.2014.10.004.

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Allen, J. J., R. D. Kinney, J. Sarsfield, M. R. Daily, J. R. Ellis, J. H. Smith, S. Montague, et al. "Integrated micro-electro-mechanical sensor development for inertial applications." IEEE Aerospace and Electronic Systems Magazine 13, no. 11 (1998): 36–40. http://dx.doi.org/10.1109/62.730622.

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Uchiyama, Jimii, Kakuji Ogawara, and Kazuyuki Minami. "706 Micro Flow Sensor and PSJA using Micro Electro Mechanical System Technology." Proceedings of Conference of Chugoku-Shikoku Branch 2008.46 (2008): 243–44. http://dx.doi.org/10.1299/jsmecs.2008.46.243.

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Jin, Ren Cheng, Wu Jin Zhang, Zhe Nan Tang, Jia Qi Wang, and Ming Liang Shao. "Analysis of Coupled Electro-Thermal-Mechanical of Micro Gas Pressure Sensor Based on Micro-Hotplate Technology." Advanced Materials Research 60-61 (January 2009): 119–24. http://dx.doi.org/10.4028/www.scientific.net/amr.60-61.119.

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The effect of micro-hotplate (MHP) thermal deformation on the signal output of the MHP-based micro gas pressure sensor is investigated. Combining electro-thermal theoretical analysis and thermal-mechanical finite element modeling, different electro-thermal-mechanical analysis models of the sensors are built and solved at constant current condition and constant temperature condition respectively. The calculated results show that the MHP thermal deformation has little effect on the sensor signal output over the entire pressure range at constant current condition, I=0.7mA. While at constant temperature condition, Ts=400K, thermal deformation has little effect on the sensor signal output at low gas pressure, but at high pressure the effect are great. Moreover, according to the thermal-mechanical analysis, we find that optimizing thickness distribution of thin films in the MHP suspended structure can reduce thermal deformation effectively at higher temperature when the lateral dimension is same, which presents a practicable method to improve the sensor stability.

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Gatzen, H. H. "Magnetic Micro Electro-mechanical Systems for Sensor and Actuator Applications." ECS Transactions 16, no. 45 (December 18, 2019): 235–53. http://dx.doi.org/10.1149/1.3140026.

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Yang, Zhen, Huanhuan Wang, Xinwei Dong, Hailong Yan, Chong Lei, and Yongsong Luo. "Giant magnetoimpedance based immunoassay for cardiac biomarker myoglobin." Analytical Methods 9, no. 24 (2017): 3636–42. http://dx.doi.org/10.1039/c7ay00981j.

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Huang, Jingli, Guorong Zhao, and Xiangyu Zhang. "MEMS gyroscope/TAM-integrated attitude estimation based on moving horizon estimation." Proceedings of the Institution of Mechanical Engineers, Part G: Journal of Aerospace Engineering 231, no. 8 (June 13, 2016): 1451–59. http://dx.doi.org/10.1177/0954410016652920.

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To improve the accuracy of the attitude sensor micro electro mechanical system gyroscope in low cost satellite, a nonlinear moving horizon estimation algorithm based on micro-electro mechanical system gyroscope/three-axis magnetometer is proposed in this paper. First, a quaternion micro-electro mechanical system gyroscope/three-axis magnetometer-integrated attitude estimation model is established so as to improve the accuracy of micro-electro mechanical system gyroscope. Thanks to the concealment and autonomy, these two low cost sensors have great potential in the military area. Second, taking advantage of optimal problem in coping with constraints, a real time moving horizon estimation algorithm with equality constraint is designed to deal with the disability of solving quaternion normalization analytically in the frame work of Kalman. In this algorithm, Gauss–Newton iterative method is used to obtain the optimal state estimation in the “window”. Meanwhile, strong tracking filter of arrival cost is designed outside of the “window” to enhance system robustness for that three-axis magnetometer is vulnerable to external interference. Third, the proposed MHE is applied in the micro-electro mechanical system gyroscope/three-axis magnetometer attitude estimation system. The simulation results show that the method has higher accuracy and robustness.

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Milovancevic, Milos, and Edvard Tijan. "Analyzing of micro-electro-mechanical systems (MEMS) sensor for pumping aggregates." Sensor Review 38, no. 2 (March 19, 2018): 194–98. http://dx.doi.org/10.1108/sr-07-2017-0146.

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Purpose The purpose of this research paper is to develop and analyze micro-electro-mechanical systems sensor for vibration monitoring of pumping aggregate. Design/methodology/approach The system is based on smart sensor and smart mobile phone. Findings The numerous measurements on a wide range of turbo aggregates were performed to establish the operating condition of pumping aggregates. Originality/value Afterwards, the influence of vibration at different positions on the output vibration of the pumping aggregate was analyzed by adaptive neuro fuzzy inference system method.

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Choi, Ju Chan, and Seong Ho Kong. "Fabrication and Characteristics of Micro-Electro-Mechanical-System-Based Tilt Sensor." Japanese Journal of Applied Physics 48, no. 6 (June 22, 2009): 06FG05. http://dx.doi.org/10.1143/jjap.48.06fg05.

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Liang, Jinxing, Fusao Kohsaka, Takahiro Matsuo, Xuefeng Li, Ken Kunitomo, and Toshitsugu Ueda. "Development of Highly Integrated Quartz Micro-Electro-Mechanical System Tilt Sensor." Japanese Journal of Applied Physics 48, no. 6 (June 22, 2009): 06FK10. http://dx.doi.org/10.1143/jjap.48.06fk10.

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Subrahmanyam, V., P. S. S. Narayana Rao, D. V. Ramamurthy, and P. C. Krishnamachary. "Nano/Micro-Electro-Mechanical Systems for Sensor Applications: A Brief Review." IETE Journal of Education 51, no. 1 (January 2010): 23–31. http://dx.doi.org/10.1080/09747338.2010.10876065.

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Lei, Jian, Tao Wang, Chong Lei, and Yong Zhou. "Detection of Dynabeads using a micro-electro-mechanical-systems fluxgate sensor." Applied Physics Letters 102, no. 2 (January 14, 2013): 022413. http://dx.doi.org/10.1063/1.4776665.

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Harťanský, René, Martin Mierka, Mikuláš Bittera, Jozef Hallon, Ján Halgoš, Jaroslav Hricko, Robert Andok, and Michal Rafaj. "Novel Method of Contactless Sensing of Mechanical Quantities." Measurement Science Review 20, no. 3 (June 1, 2020): 150–56. http://dx.doi.org/10.2478/msr-2020-0018.

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AbstractThis article addresses the method of sensing mechanical quantities, in particular force and pressure, without the electrical connection of the sensing element and the electronics. The information about the mechanical quantity is transmitted only by evaluating the changes in the electromagnetic field created around the sensor. The sensor is designed on the basis of a flexible micro-electro-mechanical element (MEMS), the resonance of which carries the information about the measured quantity.

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Li, Tao, Guo Jing Ren, Li Feng Qi, and Zhi Min Liu. "The Electricity Design of Pressure Sensor." Applied Mechanics and Materials 438-439 (October 2013): 539–42. http://dx.doi.org/10.4028/www.scientific.net/amm.438-439.539.

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The relative discussion and research of Micro-Electro-Mechanical System (MEMS) and pressure sensor is carried out in this paper. The working principle of pressure sensor is analyzed, and the cantilever piezoresistive pressure sensor is studied in details. The electricity design of pressure sensor is researched. The open loop Wheatstone-bridge design is adopted in this paper, which adds the freedom of disposing circuit.

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Choi, Ju-Chan, June-Kyoo Lee, and Seong-Ho Kong. "Fabrication and Characteristics of Micro-Electro-Mechanical-System-Based Gas Flow Sensor." Journal of Sensor Science and Technology 20, no. 6 (November 30, 2011): 363–67. http://dx.doi.org/10.5369/jsst.2011.20.6.363.

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Lei, Chong, Xue-Cheng Sun, and Yong Zhou. "Noise analysis and improvement of a micro-electro-mechanical-systems fluxgate sensor." Measurement 122 (July 2018): 1–5. http://dx.doi.org/10.1016/j.measurement.2018.03.007.

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Zhao, Yulong, Cun Li, Mengmeng Hao, Rongjun Cheng, Xiaole Fan, and Pei Chen. "Optical micro‐electro‐mechanical‐system pressure sensor based on light intensity modulation." Micro & Nano Letters 10, no. 10 (October 2015): 491–95. http://dx.doi.org/10.1049/mnl.2015.0189.

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UM, DUGAN, BAHRAM ASIABANPOUR, and JESUS JIMENEZ. "A FLEXIBLE MICRO MANUFACTURING SYSTEM FOR MICRO PARTS ASSEMBLY VIA MICRO VISUAL SENSING AND EAP BASED GRASPING." Journal of Advanced Manufacturing Systems 08, no. 02 (December 2009): 137–52. http://dx.doi.org/10.1142/s0219686709001730.

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In this paper, we developed a flexible micro workcell for micro part assembly and bio materials handling. The primary focus of the research is on the flexible manufacturing system that can handle parts in the size of 100 to 500 μm for various applications. Flexibility in micro assembly, though important, has not been examined in depth due to the complexity of micro operations of small parts. Micro gears, micro glass fibers or fragile bio materials require flexibility in gripping and haptic feedback control for further operation. To that end, we design grippers made out of electro active polymer, controlled by high precision micro manipulator for a novel micro assembly process, namely flexible micro assembly system (FMAS). The areas of research include micro/nano electro-mechanical system (MEMS) material and structure, micro sensor/actuator system, visual feedback control system, micro-robotic arm motion control and flexible micro-gripper system. In order to verify the functional aspect of the FMAS, we made micro mechanical gears fabricated via bulk micromachining technology for 3D micro vision capability and handling precision of micro robotic manipulator.

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Ghadim, Mohammad Abbasgholipour, Musa Mailah, Behzad Mohammadi-Alasti, and Mehdi Abbasgholipour Ghadim. "Simulation of MEMS Capacitive Thermal Sensor Based on Tip Deflection of a Functionally Graded Micro-Beam." Advanced Materials Research 845 (December 2013): 340–44. http://dx.doi.org/10.4028/www.scientific.net/amr.845.340.

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This work presents a simulation study on a novel micro thermal sensor to evaluate a different range of temperature. Micro Electro Mechanical Systems (MEMS) technology is an interesting field in mechanics andmetrology. In this work, a capacitive micro thermal sensor based on tip deflection of Functionally Graded Micro-beam (FGM) was designed. The thermo-electric mechanical equations based on Euler-Bernoulli beam theory were derived and solved using step-by-step linearization method. The increase in temperature was expressed with respect to the changes in the capacitance. The beam deflections were compared with the existing results showing good conformity with the highest error obtained as 4.3% at 65°C.

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Liu, Hai Peng, Shi Qiao Gao, and Lei Jin. "Analysis on the Detection Capacitance of Comb Micro-Machined Gyroscope." Applied Mechanics and Materials 121-126 (October 2011): 33–37. http://dx.doi.org/10.4028/www.scientific.net/amm.121-126.33.

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The micro-machined gyroscope is a kind of typical micro-electro-mechanical sensor, its typical working mode is electrostatic drive and comb capacitive detection. As for as the transverse detection capacitance structure now commonly used, we find out that the relationship between capacitance variation and displacement is nonlinear through analyzing its detection capacitance. This nonlinearity will greatly affect the dynamic performance of micro-machined gyroscope.

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Chen, Jun, and Tao Zhou. "Vibration parameters measuring system of rotate mechanical based on MEMS sensor." MATEC Web of Conferences 189 (2018): 11004. http://dx.doi.org/10.1051/matecconf/201818911004.

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In this work, a novel vibration parameter measure instrument of rotate machine using a accelerometer is proposed. The ADXL203 micro accelerometer is used as the sensor of the instrument based on the MEMS (Micro Electro Mechanical System) technology. The mathematical modeling of the vibration is finished by the simple harmonic vibration theory. The noise of the system is disposed by the differential noise reduction circuit. The experiments such as differential noise reduction, frequency and vibration amplitude measurement are finished on the platform. The results indicate that the instrument is useful and effective.

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Folkmer, B., A. Siber, W. Großse Bley, H. Sandmaier, and W. Lang. "Improved simulation for strongly coupled micro-electro-mechanical systems: resonant vacuum sensor optimization." Sensors and Actuators A: Physical 74, no. 1-3 (April 1999): 190–92. http://dx.doi.org/10.1016/s0924-4247(98)00336-7.

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Kang, Ik-Su, Ho Jung, Chang Jin Kim, Byong Jo Kwon, Woo-Jeong Kim, Sie-Young Choi, Jong-Hyun Lee, Jang-Kyoo Shin, and Seong Ho Kong. "Design and Fabrication of a Micro Electro Mechanical Systems-Based Electrolytic Tilt Sensor." Japanese Journal of Applied Physics 45, no. 6B (June 20, 2006): 5626–30. http://dx.doi.org/10.1143/jjap.45.5626.

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Hunt, S., A. Rudge, M. Carey, M. Parfitt, J. Geoffrey Chase, and Ian Huntsman. "Micro-electro-mechanical-systems direct fluid shear stress sensor arrays for flow control." Smart Materials and Structures 11, no. 4 (July 25, 2002): 617–21. http://dx.doi.org/10.1088/0964-1726/11/4/401.

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Maity, Reshmi, Kalpana Gogoi, and N. P. Maity. "Micro-electro-mechanical-system based capacitive ultrasonic transducer as an efficient immersion sensor." Microsystem Technologies 25, no. 12 (March 12, 2019): 4663–70. http://dx.doi.org/10.1007/s00542-019-04384-5.

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Karyotis, Konstantinos, Theodora Angelopoulou, Nikolaos Tziolas, Evgenia Palaiologou, Nikiforos Samarinas, and George Zalidis. "Evaluation of a Micro-Electro Mechanical Systems Spectral Sensor for Soil Properties Estimation." Land 10, no. 1 (January 13, 2021): 63. http://dx.doi.org/10.3390/land10010063.

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Soil properties estimation with the use of reflectance spectroscopy has met major advances over the last decades. Their non-destructive nature and their high accuracy capacity enabled a breakthrough in the efficiency of performing soil analysis against conventional laboratory techniques. As the need for rapid, low cost, and accurate soil properties’ estimations increases, micro electro mechanical systems (MEMS) have been introduced and are becoming applicable for informed decision making in various domains. This work presents the assessment of a MEMS sensor (1750–2150 nm) in estimating clay and soil organic carbon (SOC) contents. The sensor was first tested under various experimental setups (different working distances and light intensities) through its similarity assessment (Spectral Angle Mapper) to the measurements of a spectroradiometer of the full 350–2500 nm range that was used as reference. MEMS performance was evaluated over spectra measured from 102 samples in laboratory conditions. Models’ calibrations were performed using random forest (RF) and partial least squares regression (PLSR). The results provide insights that MEMS could be employed for soil properties estimation, since the RF model demonstrated solid performance over both clay (R2 = 0.85) and SOC (R2 = 0.80). These findings pave the way for supporting daily agriculture applications and land related policies through the exploration of a wider set of soil properties.

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Yao, Yuan, Debin Pan, Jianbo Wang, Tingting Dong, Jie Guo, Chensheng Wang, Anbing Geng, Weidong Fang, and Qianbo Lu. "Design and Modification of a High-Resolution Optical Interferometer Accelerometer." Sensors 21, no. 6 (March 16, 2021): 2070. http://dx.doi.org/10.3390/s21062070.

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The Micro-Opto-Electro-Mechanical Systems (MOEMS) accelerometer is a new type of accelerometer that combines the merits of optical measurement and Micro-Electro-Mechanical Systems (MEMS) to enable high precision, small volume, and anti-electromagnetism disturbance measurement of acceleration, which makes it a promising candidate for inertial navigation and seismic monitoring. This paper proposes a modified micro-grating-based accelerometer and introduces a new design method to characterize the grating interferometer. A MEMS sensor chip with high sensitivity was designed and fabricated, and the processing circuit was modified. The micro-grating interference measurement system was modeled, and the response sensitivity was analyzed. The accelerometer was then built and benchmarked with a commercial seismometer in detail. Compared to the previous prototype in the experiment, the results indicate that the noise floor has an ultra-low self-noise of 15 ng/Hz1/2.

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En, De, Ning Bo Zhang, Jie Yu Feng, Xiao Bin Wang, and Ning Ning Wang. "Research of Micro-Accelerometer Based on MOEMS." Applied Mechanics and Materials 143-144 (December 2011): 553–57. http://dx.doi.org/10.4028/www.scientific.net/amm.143-144.553.

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Micro-Opto-Electro-Mechanical System (MOEMS) has the advantages of small size, light weight, little energy consumption, high reliability, high-volume production and so on. Micro-sensor is a new generation of sensor being developed, improved and expanded, and it will have a huge effect on the measurement area of still adopted traditional sensors. The characteristics and MOEMS manufacturing technologies are introduced. The concept and advantages of micro-sensors are described. The working principle of micro-accelerometer is analyzed.Micro-accelerometer will play an increasingly key role in the new monitoring and control equipments.Pole coupling is the key issue of micro-accelerometer to be resolved, but the rapid developing signal processing technology can provide new solutions to it.

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Xu, Zhi Xiang, and Feng Juan Jiang. "Design and Fabrication of Micro-Coil Sensor Array by Using UV-LIGA Process." Applied Mechanics and Materials 300-301 (February 2013): 585–88. http://dx.doi.org/10.4028/www.scientific.net/amm.300-301.585.

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A micro-coil array is designed and fabricated in this contribution by MEMS (Micro Electro Mechanical Systems) approach. The array’s width is from a dozen microns to several tens of microns. UV-LIGA process is used to fabricate the array by means of sputtering, lithography and electroforming. The sensor array is based on 300μm thick silicon wafer, and is composed of single excitation Cu coils, two serial detection coils. Detection coils are sized from 10μm×10μm, 20μm×15μm to 30μm×15μm respectively, with 10 turns. Successful fabrication of the micro-coil sensor demonstrates the feasibility of UV-LIGA process for miniaturization of micro-coils.

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Lee, Chi Yuan, Shuo Jen Lee, Ching Liang Dai, Chin Hua Wu, and Ming Der Ger. "Integration of Micro Temperature Sensor and Heater in a Stainless Steel-Based Micro Reformer." Key Engineering Materials 364-366 (December 2007): 843–48. http://dx.doi.org/10.4028/www.scientific.net/kem.364-366.843.

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With advances in micro fuel cell development, the production of hydrogen for micro reformer has become increasingly important. However, some problems regarding the micro reformer are yet to be resolved. These include reducing the size, reducing the quantity of CO and combining the fuel cell, among others. Accordingly, in this investigation, a micro temperature sensor and a heater are combined inside a stainless steel-based micro reformer to measure and control the temperature and thus improve performance and minimize the concentration of CO. In this work, micro-electro-mechanical-systems (MEMS) of the micro channel type are fabricated on a stainless steel substrate to enhance the methanol conversion ratio. The micro temperature sensor and heater are made of gold and placed inside the micro reformer. Although the micro temperature sensor and heater have already been used to measure and control temperature in numerous fields, they have not been employed in micro reformer and commercial products. Therefore, this study presents a new approach for integrating a micro temperature sensor and heater in a stainless steel-based micro reformer to minimize the size and improve performance.

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Ding, Guang-Hui, Bing-He Ma, Jin-Jun Deng, Wei-Zheng Yuan, and Kang Liu. "Accurate Measurements of Wall Shear Stress on a Plate with Elliptic Leading Edge." Sensors 18, no. 8 (August 15, 2018): 2682. http://dx.doi.org/10.3390/s18082682.

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A micro-floating element wall shear stress sensor with backside connections has been developed for accurate measurements of wall shear stress under the turbulent boundary layer. The micro-sensor was designed and fabricated on a 10.16 cm SOI (Silicon on Insulator) wafer by MEMS (Micro-Electro-Mechanical System) processing technology. Then, it was calibrated by a wind tunnel setup over a range of 0 Pa to 65 Pa. The measurements of wall shear stress on a smooth plate were carried out in a 0.6 m × 0.6 m transonic wind tunnel. Flow speed ranges from 0.4 Ma to 0.8 Ma, with a corresponding Reynold number of 1.05 × 106~1.55 × 106 at the micro-sensor location. Wall shear stress measured by the micro-sensor has a range of about 34 Pa to 93 Pa, which is consistent with theoretical values. For comparisons, a Preston tube was also used to measure wall shear stress at the same time. The results show that wall shear stress obtained by three methods (the micro-sensor, a Preston tube, and theoretical results) are well agreed with each other.

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Lee, Chi-Yuan, Chia-Hung Chen, Chao-Yuan Chiu, Kuan-Lin Yu, and Lung-Jieh Yang. "Application of Flexible Four-In-One Microsensor to Internal Real-Time Monitoring of Proton Exchange Membrane Fuel Cell." Sensors 18, no. 7 (July 13, 2018): 2269. http://dx.doi.org/10.3390/s18072269.

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In recent years, the development of green energy sources, such as fuel cell, biomass energy, solar energy, and tidal energy, has become a popular research subject. This study aims at a flexible four-in-one microsensor, which can be embedded in the proton exchange membrane fuel cell (PEMFC) for real-time microscopic diagnosis so as to assist in developing and improving the technology of the fuel cell. Therefore, this study uses micro-electro-mechanical systems (MEMS) technology to integrate a micro humidity sensor, micro pH sensor, micro temperature sensor, and micro voltage sensor into a flexible four-in-one microsensor. This flexible four-in-one microsensor has four functions and is favorably characterized by small size, good acid resistance and temperature resistance, quick response, and real-time measurement. The goal was to be able to put the four-in-one microsensor in any place for measurement without affecting the performance of the fuel cell.

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En, De, Chang Sheng Zhou, Huang He Wei, Na Na Wei, and Xiao Long Shi. "Research of MOEMS Pressure Sensor." Applied Mechanics and Materials 273 (January 2013): 524–27. http://dx.doi.org/10.4028/www.scientific.net/amm.273.524.

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In recent years, with the development of optical communication by leaps and bounds, promote the Micro-opto-electro-mechanical system (MOEMS) development. As a new technology, the MOEMS have been widely used in optical communication, optical switching, data storage, optical sensing and etc.. Compared with the traditional pressure sensors, the optical pressure sensor based on MOEMS has some unique advantages. In this paper, the structures, operation principles and fabrication processes of various MOEMS pressure sensors are described mainly. Finally, the structure and Key technology of a MOEMS pressure sensor array is presented in brief.

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Zhong Shaolong, 钟少龙, 龙亮 Long Liang, 李明 Li Ming, and 吴亚明 Wu Yaming. "Torsion-Sensitive Micro-Electro Mechanical Systems Accelerometer Sensor Based on Optical Fiber Detection Technology." Chinese Journal of Lasers 41, no. 3 (2014): 0305002. http://dx.doi.org/10.3788/cjl201441.0305002.

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Trigona, Carlo, Ammar Al-Hamry, Olfa Kanoun, and Salvatore Baglio. "Hybrid Micro Electro Mechanical Sensor Based on Graphene Oxide/Polyvinyl Alcohol for Humidity Measurements." Proceedings 2, no. 13 (December 19, 2018): 1011. http://dx.doi.org/10.3390/proceedings2131011.

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In this paper, we present a redundant micromachined sensor based on Bulk and Etch. Silicon-on-Insulator (BESOI) process for measurements of relative humidity (RH) by using Graphene-Oxide/Polyvinyl-Alcohol (GO/PVA) composite. The microsensor is a mechanical oscillator composed of a proof mass with multilayer of nanomaterials (GO/PVA) and suspended by four crab leg springs. The realized redundant approach concerns the possibility to use different readout strategies in order to estimate the same measurand: RH. This is an intriguing solution to realize a “robust measurement system”, with multiple outputs by using the GO/PVA as functional material. In presence of RH variation: (1) it changes its mass and; as consequence; a variation of the natural frequency of the oscillator can be observed in the frequency domain; (2) it also varies the conductivity which can be measured by using two integrated electrodes. The sensor has been designed; studied; modeled and experimental results demonstrate the effectiveness of our implementation.

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Huang, J. B., F. K. Jiang, Y. C. Tai, and C. M. Ho. "A micro-electro-mechanical-system-based thermal shear-stress sensor with self-frequency compensation." Measurement Science and Technology 10, no. 8 (July 23, 1999): 687–96. http://dx.doi.org/10.1088/0957-0233/10/8/303.

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Ohtake, Hiroyasu, Shingo Kobayashi, Nozomi Nagashima, Hisashi Sakurai, Takato Sato, and Yasuo Koizumi. "10601 Development of Surface Temperature Sensor by using Technology of Micro Electro Mechanical Systems." Proceedings of Conference of Kanto Branch 2009.15 (2009): 119–20. http://dx.doi.org/10.1299/jsmekanto.2009.15.119.

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Kumar, Ashish, Mahanth Prasad, Vijay Janyani, and R. P. Yadav. "Fabrication and Simulation of Piezoelectric Aluminium Nitride Based Micro Electro Mechanical System Acoustic Sensor." Journal of Nanoelectronics and Optoelectronics 14, no. 9 (September 1, 2019): 1267–74. http://dx.doi.org/10.1166/jno.2019.2637.

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Firdaus, S. M., I. A. Azid, O. Sidek, K. Ibrahim, and M. Hussien. "Enhancing the sensitivity of a mass-based piezoresistive micro-electro-mechanical systems cantilever sensor." Micro & Nano Letters 5, no. 2 (2010): 85. http://dx.doi.org/10.1049/mnl.2009.0105.

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Lopes, António M., J. A. Tenreiro Machado, and Alexandra M. Galhano. "Towards fractional sensors." Journal of Vibration and Control 25, no. 1 (April 24, 2018): 52–60. http://dx.doi.org/10.1177/1077546318769163.

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This paper proposes a new sensor architecture inspired on the classical accelerometer and the fractional calculus. The fractional sensor (FS) adopts a modular construction with [Formula: see text] stages, where each stage consists of an association of mass–spring–damper elements. A proper selection of the elements in the global mechanical structure yields fractional-order characteristics. The frequency and time responses of the proposed apparatus are studied and compared with those exhibited by an ideal fractional order device. The FS can be implemented by means of modern fabrication techniques used with micro electro-mechanical systems.

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Suja, K. J., Bhanu Pratap Chaudhary, and Rama Komaragiri. "Design and Simulation of Pressure Sensor for Ocean Depth Measurements." Applied Mechanics and Materials 313-314 (March 2013): 666–70. http://dx.doi.org/10.4028/www.scientific.net/amm.313-314.666.

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MEMS (Micro Electro Mechanical System) are usually defined as highly miniaturized devices combining both electrical and mechanical components that are fabricated using integrated circuit batch processing techniques. Pressure sensors are usually manufactured using square or circular diaphragms of constant thickness in the order of few microns. In this work, a comparison between circular diaphragm and square diaphragm indicates that square diaphragm has better perspectives. A new method for designing diaphragm of the Piezoresistive pressure sensor for linearity over a wide pressure range (approximately double) is designed, simulated and compared with existing single diaphragm design with respect to diaphragm deflection and sensor output voltage.

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Ouakad, Hassen M. "The response of a micro-electro-mechanical system (MEMS) cantilever-paddle gas sensor to mechanical shock loads." Journal of Vibration and Control 21, no. 14 (December 20, 2013): 2739–54. http://dx.doi.org/10.1177/1077546313514763.

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Fujiyoshi, Motohiro, Yutaka Nonomura, Fumihito Arai, and Toshio Fukuda. "Analysis and Design of A New Micro Jerk Sensor with Viscous Coupling." Journal of Robotics and Mechatronics 15, no. 6 (December 20, 2003): 582–87. http://dx.doi.org/10.20965/jrm.2003.p0582.

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A new method for jerk detection (derivative of acceleration) is proposed. By using a 2 degrees of freedom (DOF) model with viscous coupling, we measure jerk directly as a position change in mass without differential circuit. Analysis by numerical formulas show the principle of the proposed jerk detection and simulation results show suitable parameters such as viscosity, mass ratio, and spring coefficient ratio for jerk detection. We also propose a micro jerk sensor based on the micro electro mechanical system (MEMS). Results of analysis show that the microstructure is suitable for the proposed viscous coupling.

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Wang, Xian Wei, and Jun Hai Jiang. "A Low-Cost MEMS Implementation Based on Sensor Fusion Algorithms." Applied Mechanics and Materials 738-739 (March 2015): 42–45. http://dx.doi.org/10.4028/www.scientific.net/amm.738-739.42.

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In this paper a low-cost Micro-Electro-Mechanical System (MEMS) inertial measurement unit is designed, a 3-axis accelerometer and 3-axis gyroscope simulated 6 degrees of freedom orientation sensing through sensor fusion. By analyzing a simple complimentary filter and a more complex Kalman filter, the outputs of each sensor were combined and took advantage of the benefits of both sensors to improved results. The experimental results demonstrate that the output signal can be corrected suitability by means of the proposed method.

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Wang, Xian Wei, and Fu Cheng Cao. "Research on Data Fusion Technology of Body Posture Detection Based on Kalman Filter." Applied Mechanics and Materials 668-669 (October 2014): 1003–6. http://dx.doi.org/10.4028/www.scientific.net/amm.668-669.1003.

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This paper discusses the body posture detection problem using low cost Micro-Electro-Mechanical System (MEMS) inertial sensors, for which a complementary sensor fusion solution is proposed. Considering the impact from the noise and bias drifts, through Kalman filter to complete the multi-sensor information fusion, achieved an accurate attitude determination. The experimental results show that, after using Kalman filtering algorithm to fuse acceleration sensor and signal gyroscope, it can effectively eliminate the accumulative error and significantly better dynamic characteristics of attitude angle measurement, Improving the reliability and accuracy of body posture estimation.

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Dong, Xianshan, Qinwen Huang, Yun Huang, Wei Su, and Ping Lai. "Stiffness Measurement of Micro-Cantilever Based on Negative Electrostatic Stiffness." Nanoscience and Nanotechnology Letters 12, no. 1 (January 1, 2020): 96–100. http://dx.doi.org/10.1166/nnl.2020.3075.

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Micro-cantilever is basic structure of Micro-Electro-Mechanical-Systems (MEMS) sensor, and mechanical stiffness is the most important parameter of micro-cantilever. The mechanical stiffness can be affected by shape, size and material, and it should be experimentally measured for fabrication variation. Yet, the micro scale of MEMS cantilever makes the measurement difficult, and the traditional method isn't suitable for the micro-cantilever. This study proposes a new method for measuring the mechanical stiffness of micro-cantilever, and measurement of MEMS accelerometer was also experimentally carried out. The proposed method exploits the feature that the voltage applied on cantilever can lead to negative electrostatic stiffness, and this stiffness can change the deformation of cantilever. The mechanical stiffness can be obtained through analyzing the change of output. Results from this study coincided with our theoretical model, and the difference between results obtained by this method and SEM was 2.2%. This work provides a new way to precisely obtain mechanical stiffness of micro-cantilever using non-destructive method, making it helpful for researchers to design micro-cantilever and MEMS devices.

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Zhao, Li Bo, En Ze Huang, Gui Ming Zhang, Yu Long Zhao, Xiao Po Wang, Zhuang De Jiang, and Zhi Gang Liu. "A MEMS Fluid Density Sensor Based on Trapezoidal Cantilever." Key Engineering Materials 483 (June 2011): 374–77. http://dx.doi.org/10.4028/www.scientific.net/kem.483.374.

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A kind of fluid density sensor based on MEMS (Micro-Electro-Mechanical-System) technology is introduced with trapezoidal cantilever structure. The rectangular cantilever and trapezoidal cantilever, based on the same parameters, are analyzed. The simulation results show that the sensitivity of trapezoidal cantilever is higher than that of rectangular cantilever. Four different sizes of trapezoidal cantilever are analyzed by modal and harmonic simulation with ANSYS Software, the optimum solution will be obtained from simulation results.

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Journal articles on the topic 'Micro-electro-mechanical-sensor'

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