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Dissertations / Theses on the topic 'Micro-electro-mechanical sensors'

Author: Grafiati

Published: 30 May 2022

Last updated: 19 July 2025

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1

Dinh, Toan Khac. "Thermoresistive Effect for Advanced Thermal-Based Sensors." Thesis, Griffith University, 2017. http://hdl.handle.net/10072/365574.

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Thermoresistive effects in semiconductors (e.g. silicon) and metals (e.g. platinum) have been widely utilized to develop MEMS (Micro Electro-Mechanical Systems) thermal-based sensors. Thanks to their simplicity in design and implementation using conventional MEMS technologies, these sensors have been found in a wide range of applications, including temperature sensing, flow monitoring and acceleration measurement. However, their material cost, inflexibility, inadequate sensitivity and, especially, their lack of ability to work in harsh environments impede these devices in many applications, pa

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2

Saha, Tanmoy. "Design, fabrication, and complementary metal-oxide- semiconductor (CMOS) integration of micro-electro- mechanical systems (MEMS) humidity sensors." Thesis, McGill University, 2013. http://digitool.Library.McGill.CA:80/R/?func=dbin-jump-full&object_id=114228.

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The design, microfabrication, and CMOS integration of micro-electro-mechanical systems (MEMS) capacitive humidity sensors are presented in this work. Theoretical analysis and simulations were done to understand how sensor performance can be optimized. While CoventorWare was used for steady-state simulations, a MATLAB simulation model, based on the mathematics of moisture adsorption and diffusion, was developed for dynamic simulations. The sensors were fabricated using a process flow that has a low thermal budget (≤ 300 ○C), as well as material and chemical compatibility with IC fabrication, al

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3

Kedia, Sunny. "Optical Communication Using Hybrid Micro Electro Mechanical Structures (MEMS) and Commercial Corner Cube Retroreflector (CCR)." Scholar Commons, 2015. http://scholarcommons.usf.edu/etd/5969.

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This dissertation presents a free-space, long-range, passive optical communication system that uses electrostatically modulated microelectromechanical systems (MEMS) structures coupled with a glass total internal reflection (TIR)-type corner cube retroreflector (CCR) as a non-emitting data transmitter. A CCR consists of three mirrors orthogonal to each other, so that the incident beam is reflected back to the incident beam, source. The operational concept is to have a MEMS modulator fusion with TIR CCR, such that the modulators are working periodically to disrupt the evanescent waves at the ai

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4

Sadi, Fazle. "Jump parameter estimation with low cost micro-electro-mechanical system sensors and global positioning system for action sports goggles." Thesis, University of British Columbia, 2011. http://hdl.handle.net/2429/41971.

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Algorithms to detect athletic jumps and to determine in real-time performance parameters such as jump air time (AT), horizontal distance, height and drop, are developed in this work. These algorithms are customized to be implemented onboard action sports goggles developed by Recon Instruments Ltd. These goggles are equipped with low cost micro-electro-mechanical inertial sensors and a single point GPS receiver which feed raw data to the algorithms. The micro-LCD display system in the goggles displays jump statistics to the user wearing the goggles. Two novel methods, namely WMCM (Windowed Mean

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5

Lazarevskiy, Alexander, and Олександр Андрійович Лазаревський. "Navigation dead reckoning system based on a mobile phone." Thesis, National Aviation University, 2021. https://er.nau.edu.ua/handle/NAU/50760.

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1. S. Beauregard and H. Haas, “Pedestrian dead reckoning: A basis for personal positioning,” in Proceedings of the 3rd Workshop on Positioning, Navigation and Communication, March 2006, pp. 27–35. 2. A. R. Jimenez, F. Seco, C. Prieto, and J. Guevara, “A comparison of pedestrian dead-reckoning algorithms using a low-cost MEMS IMU,” in 2009 IEEE International Symposium on Intelligent Signal Processing, August 2009, pp. 37–42. 3. P. Kasebzadeh, C. Fritsche, G. Hendeby, F. Gunnarsson, and F. Gustafsson, “Improved pedestrian dead reckoning positioning with gait parameter learning” in 2016 19th

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6

Mylonas, Christos, and Samir Đulić. "Smarttelefon-sensorernas möjligheter - En studie om barometer-, GPS- och accelerometersensorer. The smartphone sensor possibilities - A case study featuring the barometer, GPS and accelerometer sensors." Thesis, Malmö högskola, Fakulteten för kultur och samhälle (KS), 2014. http://urn.kb.se/resolve?urn=urn:nbn:se:mau:diva-20469.

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Denna rapport sammanfattar resultat av ett examensarbete på en högskoleingenjörsutbildningsom utfördes av två studenter på Malmö högskola.Arbetets syfte var att genomföra en mängd olika experiment med accelerometer, barometeroch GPS i en modern smarttelefon. Ett antal scenarier för en tänkbar sensoranvändning i applikationerformulerades för att vägleda olika experiment. Experimentdata dokumenterades noggrantoch analyserades med avsikten att skapa en databank med information för framtida studier.Analys av data inkluderar höjdbestämning i naturen och i byggnader med hjälp av barometersensor,geog

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7

Zhao, Li. "Micro-electro-mechanical Tilt Sensor Design and Fabrications." Thesis, Imperial College London, 2009. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.506035.

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8

Nguyen, Van-Nghi. "Principes alternatifs pour la détection de masse ultime via la dynamique non linéaire de capteurs résonants M/NEMS." Thesis, Lyon, INSA, 2013. http://www.theses.fr/2013ISAL0160/document.

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Les capteurs résonants de type M/NEMS sont largement utilisés dans l’environnement biologique pour la mesure de masse de biomolécules en raison de leur grande précision combinée à une taille réduite. Classiquement, la détection et la quantification se basent sur le décalage fréquentiel induit par la masse ajoutée. Toutefois, ce décalage devient très faible et difficile à distinguer du bruit de mesure lorsque les masses considérées sont très petites. Il est théoriquement possible de gagner encore un ou plusieurs ordres de grandeur en résolution avec ces méthodes fréquentielles en diminuant enco

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9

Pekárek, Jan. "Výzkum a vývoj moderních emisních senzorů typu MEMS." Doctoral thesis, Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií, 2014. http://www.nusl.cz/ntk/nusl-233623.

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The dissertation thesis is focused on research and development of modern emission MEMS sensors. The emission sensor based on the field emission from nanostructured materials represents innovative approach to pressure sensing. The nanostructures serve as electron emitter in an electric field between the cathode and anode in the pressure sensor. This electric field is constant and the change in ambient pressure causes the change of distance between electrodes, thereby the electric field is increasing. This intensity is proportional to the emission from the cathode made of nanostructured material

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10

Pekárek, Jan. "Katodové nanostruktury v MEMS aplikacích." Master's thesis, Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií, 2008. http://www.nusl.cz/ntk/nusl-217244.

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The main goal of this work is to introduce new carbon structures - carbon nanotubes. The main objective of this work is to take advantage of the unique characteristic of carbon nanotubes to emit electrons at very low supply voltage.

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11

Berlemont, Samuel. "Automatic non linear metric learning : Application to gesture recognition." Thesis, Lyon, 2016. http://www.theses.fr/2016LYSEI014/document.

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Cette thèse explore la reconnaissance de gestes à partir de capteurs inertiels pour Smartphone. Ces gestes consistent en la réalisation d'un tracé dans l'espace présentant une valeur sémantique, avec l'appareil en main. Notre étude porte en particulier sur l'apprentissage de métrique entre signatures gestuelles grâce à l'architecture "Siamoise" (réseau de neurones siamois, SNN), qui a pour but de modéliser les relations sémantiques entre classes afin d'extraire des caractéristiques discriminantes. Cette architecture est appliquée au perceptron multicouche (MultiLayer Perceptron). Les stratégie

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12

Dai, Ching-Liang, and 戴慶良. "Fabrication of Micro Electro Mechanical sensors Using the standard IC Process." Thesis, 1997. http://ndltd.ncl.edu.tw/handle/zufuyp.

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13

Pattnaik, Prasant Kumar. "Analysis And Design Of Micro-Opto-Electro-Mechanical Systems (MOEMS) Based Pressure And Vibration Sensors." Thesis, 2005. https://etd.iisc.ac.in/handle/2005/1414.

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14

Pattnaik, Prasant Kumar. "Analysis And Design Of Micro-Opto-Electro-Mechanical Systems (MOEMS) Based Pressure And Vibration Sensors." Thesis, 2005. http://etd.iisc.ernet.in/handle/2005/1414.

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15

He, Zhi-Jie, and 何志傑. "A study of high performance sensors with micro-electro-mechanical system (MEMS) technology." Thesis, 1998. http://ndltd.ncl.edu.tw/handle/80396636386333120075.

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16

Khater, Mahmoud Elsayed. "Use of Instabilities in Electrostatic Micro-Electro-Mechanical Systems for Actuation and Sensing." Thesis, 2011. http://hdl.handle.net/10012/6398.

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This thesis develops methods to exploit static and dynamic instabilities in electrostatic MEMS to develop new MEMS devices, namely dynamically actuated micro switches and binary micro gas sensors. Models are developed for the devices under consideration where the structures are treated as elastic continua. The electrostatic force is treated as a nonlinear function of displacement derived under the assumption of parallel-plate theorem. The Galerkin method is used to discretize the distributed-parameter models, thus reducing the governing partial differential equations into sets of nonlinear ord

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17

Chu, C. W., and 朱俊威. "The Study and Fabrication of High-sensitivity PvTiO3 Infrared Sensors with the Technology of Micro-electro-mechanical Systems." Thesis, 1997. http://ndltd.ncl.edu.tw/handle/61943194629297279941.

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碩士<br>國立成功大學<br>電機工程學系<br>85<br>The Micro-electro-mechanical System (MEMS) is a new technology process to prepare a compact structure. And the PbTiO3 thin film has a good pyroelectric properties. Hence in this thesis, we utilize the MEMS technology to fabricate a high sensitivity PbTiO3 IR detector. First, the MEMS technology is introduced. Then, the preparation processes of the device are described in detailed, Comparing with a conventional infrared sensor, the cantilever type is quite different in both fabrication process and sensing performance. Although a wet etching process will b

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18

Chung-Hsien, Yang, and 楊忠憲. "The Study and Fabrication of Advanced Piezoresistive Pressure and Shear-Stress Sensors by Micro-Electro-Mechanical System(MEMS) Technologies." Thesis, 2000. http://ndltd.ncl.edu.tw/handle/51715769660576297106.

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碩士<br>國立成功大學<br>電機工程學系<br>88<br>Based on computer finite element analysis ANSYS5.3 and micro-electro-mechanical system(MEMS) technologies, monolithic silicon micro pressure and shear-stress sensors have been designed and fabricated. The sensors employ one or two four-terminal shear-stress sensitive piezoresistive transverse voltage strain gauge in place of the conventional Wheatstone bridge construction. In the developed pressure sensor, a square diaphragm with 3000X3000X100 um3 is formed by bulk micromachining of an n-type <100> monolithic silicon in KOH solution. The gauge, which

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19

"MEMS Harsh Environment Sensors for Earth and Space Exploration." Doctoral diss., 2013. http://hdl.handle.net/2286/R.I.17740.

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abstract: Harsh environments have conditions that make collecting scientific data difficult with existing commercial-off-the-shelf technology. Micro Electro Mechanical Systems (MEMS) technology is ideally suited for harsh environment characterization and operation due to the wide range of materials available and an incredible array of different sensing techniques while providing small device size, low power consumption, and robustness. There were two main objectives of the research conducted. The first objective was to design, fabricate, and test novel sensors that measure the amount of exposu

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20

Ram, S. N. "Measurement Of Static Pressure Over Bodies In Hypersonic Shock Tunnel Using MEMS-Based Pressure Sensor Array." Thesis, 2010. https://etd.iisc.ac.in/handle/2005/2265.

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Hypersonic flow is both fascinating and intriguing mainly because of presence of strong entropy and viscous interactions in the flow field. Notwithstanding the tremendous advancements in numerical modeling in the last decade separated hypersonic flow still remains an area where considerable differences are observed between experiments and numerical results. Lack of reliable data base of surface static pressures with good spatial resolution in hypersonic separated flow field is one of the main motivations for the present study. The experiments in hypersonic shock tunnels has an advantage com

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21

Ram, S. N. "Measurement Of Static Pressure Over Bodies In Hypersonic Shock Tunnel Using MEMS-Based Pressure Sensor Array." Thesis, 2010. http://hdl.handle.net/2005/2265.

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Hypersonic flow is both fascinating and intriguing mainly because of presence of strong entropy and viscous interactions in the flow field. Notwithstanding the tremendous advancements in numerical modeling in the last decade separated hypersonic flow still remains an area where considerable differences are observed between experiments and numerical results. Lack of reliable data base of surface static pressures with good spatial resolution in hypersonic separated flow field is one of the main motivations for the present study. The experiments in hypersonic shock tunnels has an advantage comp

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22

Wahab, Yufridin. "Design and implementation of MEMS biomechanical sensors for real-life measurements of gait parameters." Thesis, 2009. https://vuir.vu.edu.au/15499/.

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Foot clearance above the ground during walking is an important clinical and rehabilitation gait analysis parameter. Current bulky and laboratory environment based instruments are not suitable for measurement in the natural environment such as in the outdoors. This research analyses three promising distance measurement techniques (capacitive, electric field and ultrasound) that may be suitable for MEMS realization of foot clearance measurement. The study suggests that ultrasoundbased technique is very suitable for this application and thus a model is proposed in this research. The ultrasonic

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23

Pan, Tai-Tou, and 潘泰斗. "Multi-Function Thermocouple-Based Micro-Sensor Capable of Being Monolithically Integrated with Micro Electro-Mechanical Devices." Thesis, 2011. http://ndltd.ncl.edu.tw/handle/45513200734651056768.

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碩士<br>國立臺灣大學<br>光電工程學研究所<br>99<br>Pressure sensor, accelerometer and flowmeter are common micro electro-mechanical devices. Along with the progress of micro electro-mechanical technique, micro-sensor becomes multi-functional and smaller. Thermocouple is created basic on Seebeck effect. Hong (2009) designed four types of thermocouple devices: overlap thermocouple, non-overlap thermocouple, longer non-overlap thermocouple and symmetric thermocouple. This study proceeded basic efficiency experiment, fixed temperature to adjust pressure experiment, fixed pressure to adjust temperature experimen

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24

Huang, Chu-Rong, and 黃俊榮. "Design and Fabrication of Micro-electro-mechanical System Pressure Sensor for Rehabilitation Applications." Thesis, 1998. http://ndltd.ncl.edu.tw/handle/42845874511959979511.

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25

Hsieh, Ming-Chun, and 謝明君. "The Study of Micro-Electro-Mechanical System (MEMS) Technology for Sensor and RF Inductor Applications." Thesis, 2004. http://ndltd.ncl.edu.tw/handle/67463795207585154449.

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博士<br>國立成功大學<br>電機工程學系碩博士班<br>92<br>In this dissertation, we report the study of Micro-electro-mechanical system (MEMS) technology for sensors, including, shear-stress sensor, far infrared sensor and RF inductor applications. The Finite Element Method (FEM) package ANSYS has been employed for the thermal isolation, stress distribution, impact force and temperature distribution analysis. 　　Firstly, we study the preparation of prototype contact type micro piezoresistive shear-stress sensor that can be utilized to measure the shear stress between skin of stump and socket of Above-Knee (AK) prosth

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26

Viannie, Leema Rose. "Design, Fabrication and Development of Polymer Microcantilever for Flow Rate Measurement and Thermal Actuation." Thesis, 2017. http://etd.iisc.ac.in/handle/2005/4294.

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Design, fabrication and development of polymer microcantilever for flow rate measurement and thermal actuation Research Supervisors: Prof. K. Rajanna and Dr. G. R. Jayanth Microcantilevers are sensitive micromechanical platforms used to detect small forces and surface stresses arising due to changes in physical environment. They are popularly used as mechanical probes in scanning probe microscopy to obtain 3D surface topography of samples upto atomic scale resolution. These microcantilevers find applications in biosensing, environment monitoring, air flow measurement, microbolometry, Atomic F

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27

Mitschke, Christian. "Inertialsensoren in der biomechanischen Gang- und Laufanalyse – Anforderungen an Sensoren und Algorithmik." 2018. https://monarch.qucosa.de/id/qucosa%3A21483.

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Im Fokus dieser kumulativ angefertigten Dissertation stehen vier methodenorientierte biomechanische Studien, in welchen die potentiellen Fehlerquellen analysiert werden, die beim Einsatz von Inertialsensoren in der biomechanischen Gang- und Laufanalyse auftreten können. In den einzelnen Beiträgen werden die Einflüsse der Inertialsensoraufnahmefrequenz (Studie I) und des Messbereichs der Beschleunigungssensoren (Studie II) auf die kinematischen, kinetischen und räumlich-zeitlichen Parameter systematisch untersucht. Des Weiteren wird sich kritisch mit der Genauigkeit verschiedener Detektionsmeth

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