Relevant bibliographies by topics / Micro-electro-mechanical sensors / Journal articles

To see the other types of publications on this topic, follow the link: Micro-electro-mechanical sensors.

Journal articles on the topic 'Micro-electro-mechanical sensors'

Author: Grafiati

Published: 30 May 2022

Last updated: 31 May 2022

Create a spot-on reference in APA, MLA, Chicago, Harvard, and other styles

Select a source type:

Consult the top 50 journal articles for your research on the topic 'Micro-electro-mechanical sensors.'

Next to every source in the list of references, there is an 'Add to bibliography' button. Press on it, and we will generate automatically the bibliographic reference to the chosen work in the citation style you need: APA, MLA, Harvard, Chicago, Vancouver, etc.

You can also download the full text of the academic publication as pdf and read online its abstract whenever available in the metadata.

Browse journal articles on a wide variety of disciplines and organise your bibliography correctly.

Jena, Sudarsana, and Ankur Gupta. "Review on pressure sensors: a perspective from mechanical to micro-electro-mechanical systems." Sensor Review 41, no. 3 (2021): 320–29. http://dx.doi.org/10.1108/sr-03-2021-0106.

Full text

Abstract:

Purpose Considering its vast utility in industries, this paper aims to present a detailed review on fundamentals, classification and progresses in pressure sensors, along with its wide area of applications, its design aspects and challenges, to provide state-of-the-art gist to the researchers of the similar domain at one place. Design/methodology/approach Swiftly emerging research prospects in the micro-electro-mechanical system (MEMS) enable to build complex and sophisticated micro-structures on a substrate containing moving masses, cantilevers, flexures, levers, linkages, dampers, gears, detectors, actuators and many more on a single chip. One of the MEMS initial products that emerged into the micro-system technology is MEMS pressure sensor. Because of their high performance, low cost and compact in size, these sensors are extensively being adopted in numerous applications, namely, aerospace, automobile and bio-medical domain, etc. These application requirements drive and impose tremendous conditions on sensor design to overcome the tedious design and fabrication procedure before its reality. MEMS-based pressure sensors enable a wide range of pressure measurement as per the application requirements. Findings The paper provides a detailed review on fundamentals, classification and progresses in pressure sensors, along with its wide area of applications, its design aspects and challenges, to provide state of the art gist to the researchers of the similar domain at one place. Originality/value The present paper discusses the basics of MEMS pressure sensors, their working principles, different design aspects, classification, type of sensing diaphragm used and illustration of various transduction mechanisms. Moreover, this paper presents a comprehensive review on present trend of research on MEMS-based pressure sensors, its applications and the research gap observed till date along with the scope for future work, which has not been discussed in earlier reviews.

APA, Harvard, Vancouver, ISO, and other styles

Pruessner, Marcel W., Todd H. Stievater, Mike S. Ferraro, William S. Rabinovich, Jennifer L. Stepnowski, and R. Andrew McGill. "Waveguide micro-opto-electro-mechanical resonant chemical sensors." Lab on a Chip 10, no. 6 (2010): 762. http://dx.doi.org/10.1039/b920463f.

Full text

APA, Harvard, Vancouver, ISO, and other styles

Huang, Jingli, Guorong Zhao, and Xiangyu Zhang. "MEMS gyroscope/TAM-integrated attitude estimation based on moving horizon estimation." Proceedings of the Institution of Mechanical Engineers, Part G: Journal of Aerospace Engineering 231, no. 8 (2016): 1451–59. http://dx.doi.org/10.1177/0954410016652920.

Full text

Abstract:

To improve the accuracy of the attitude sensor micro electro mechanical system gyroscope in low cost satellite, a nonlinear moving horizon estimation algorithm based on micro-electro mechanical system gyroscope/three-axis magnetometer is proposed in this paper. First, a quaternion micro-electro mechanical system gyroscope/three-axis magnetometer-integrated attitude estimation model is established so as to improve the accuracy of micro-electro mechanical system gyroscope. Thanks to the concealment and autonomy, these two low cost sensors have great potential in the military area. Second, taking advantage of optimal problem in coping with constraints, a real time moving horizon estimation algorithm with equality constraint is designed to deal with the disability of solving quaternion normalization analytically in the frame work of Kalman. In this algorithm, Gauss–Newton iterative method is used to obtain the optimal state estimation in the “window”. Meanwhile, strong tracking filter of arrival cost is designed outside of the “window” to enhance system robustness for that three-axis magnetometer is vulnerable to external interference. Third, the proposed MHE is applied in the micro-electro mechanical system gyroscope/three-axis magnetometer attitude estimation system. The simulation results show that the method has higher accuracy and robustness.

APA, Harvard, Vancouver, ISO, and other styles

Jin, Ren Cheng, Wu Jin Zhang, Zhe Nan Tang, Jia Qi Wang, and Ming Liang Shao. "Analysis of Coupled Electro-Thermal-Mechanical of Micro Gas Pressure Sensor Based on Micro-Hotplate Technology." Advanced Materials Research 60-61 (January 2009): 119–24. http://dx.doi.org/10.4028/www.scientific.net/amr.60-61.119.

Full text

Abstract:

The effect of micro-hotplate (MHP) thermal deformation on the signal output of the MHP-based micro gas pressure sensor is investigated. Combining electro-thermal theoretical analysis and thermal-mechanical finite element modeling, different electro-thermal-mechanical analysis models of the sensors are built and solved at constant current condition and constant temperature condition respectively. The calculated results show that the MHP thermal deformation has little effect on the sensor signal output over the entire pressure range at constant current condition, I=0.7mA. While at constant temperature condition, Ts=400K, thermal deformation has little effect on the sensor signal output at low gas pressure, but at high pressure the effect are great. Moreover, according to the thermal-mechanical analysis, we find that optimizing thickness distribution of thin films in the MHP suspended structure can reduce thermal deformation effectively at higher temperature when the lateral dimension is same, which presents a practicable method to improve the sensor stability.

APA, Harvard, Vancouver, ISO, and other styles

En, De, Ning Bo Zhang, Jie Yu Feng, Xiao Bin Wang, and Ning Ning Wang. "Research of Micro-Accelerometer Based on MOEMS." Applied Mechanics and Materials 143-144 (December 2011): 553–57. http://dx.doi.org/10.4028/www.scientific.net/amm.143-144.553.

Full text

Abstract:

Micro-Opto-Electro-Mechanical System (MOEMS) has the advantages of small size, light weight, little energy consumption, high reliability, high-volume production and so on. Micro-sensor is a new generation of sensor being developed, improved and expanded, and it will have a huge effect on the measurement area of still adopted traditional sensors. The characteristics and MOEMS manufacturing technologies are introduced. The concept and advantages of micro-sensors are described. The working principle of micro-accelerometer is analyzed.Micro-accelerometer will play an increasingly key role in the new monitoring and control equipments.Pole coupling is the key issue of micro-accelerometer to be resolved, but the rapid developing signal processing technology can provide new solutions to it.

APA, Harvard, Vancouver, ISO, and other styles

Zhai, Yanxin, Haiwang Li, Zhi Tao, et al. "Simulation Analysis and Fabrication of a Silicon Carbide-Based Piezoresistive Accelerometer." Journal of Physics: Conference Series 2246, no. 1 (2022): 012007. http://dx.doi.org/10.1088/1742-6596/2246/1/012007.

Full text

Abstract:

Abstract This paper proposes a Micro Electro Mechanical Systems piezoresistive accelerometer based on a whole SiC substrate. Compared with Si-based sensors, SiC-based sensors have stronger mechanical advantages and unique advantages for applications in ultra-high temperature environments. The characteristics of the accelerometer are designed and numerically simulated, and the accelerometer is evaluated in terms of stress load and working frequency band. An innovative design is carried out to eliminate the stress concentration phenomenon in the corner area of the sensor, which guarantees the working safety of the fragile structure of SiC. After fabrication, packaging and vibration experiment, it is found that the sensor’s working sensitivity can reach 0.21mv/g, and its linearity can reach 98%.

APA, Harvard, Vancouver, ISO, and other styles

Wang, Yuelin, Tie Li, and Heng Yang. "Nanofabrication, effects and sensors based on micro-electro-mechanical systems technology." Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences 371, no. 2000 (2013): 20120315. http://dx.doi.org/10.1098/rsta.2012.0315.

Full text

Abstract:

In this paper, our investigation of nanofabrication, effects and sensors based on the traditional micro-electro-mechanical systems (MEMS) technology has been reviewed. Thanks to high selectivity in anisotropic etching and sacrificial layer processes, nanostructures such as nanobeams and nanowires have been fabricated in top-down batch process, in which beams with thickness of only 20 nm and nanowires whose width and thickness is only 20 nm were achieved. With the help of MEMS chip, the scale effect of Young's modulus in silicon has been studied and confirmed directly in a tensile experiment using electron microscopy. Because of their high surface-to-volume ratio and small size, silicon nanowire (SiNW)-based field-effect transistors (FETs) have been shown as one of the most promising electronic devices and ultrasensitive detectors in biological applications. We demonstrated that an SiNW–FET sensor can reveal ultrahigh sensitivity for rapid and reliable detection of 0.1 fM of target DNA with high specificity. All these indicate that the MEMS technology can pave the way to nanoapplications with its advantages of batch production, low cost and high performance.

APA, Harvard, Vancouver, ISO, and other styles

Stavrov, Vladimir, Dimitar Chakarov, Assen Shulev, and Mihail Tsveov. "Mechatronic Scanning System with Integrated Micro Electro Mechanical System Position Sensors." Journal of Theoretical and Applied Mechanics 46, no. 2 (2016): 37–50. http://dx.doi.org/10.1515/jtam-2016-0009.

Full text

Abstract:

Abstract In this paper, a study of a mechatronic scanning system for application in the microbiology, microelectronics research, chemistry, etc. is presented. Integrated silicon micro electro mechanical system (MEMS) position sensor is used for monitoring the displacement of the scanning system. The utilized silicon MEMS sensors with sidewall embedded piezoresistors possess a number of key advantages such as high sensitivity, low noise and extremely low temperature dependence. Design of 2D scanning system with a travel range of 22 × 22 μm2 has been presented in present work. This system includes a Compliant Transmission Mechanism, (CTM) designed as a complex elastic mechanism, comprising four parallelograms. Computer aided desigh (CAD) model and finite element analysis (FEA) of the Compliant Transmission Mechanism mechanisms have been carried out. A prototype of the scanning system is fabricated, based on CAD model. An experimental set-up of an optical system and a correlation technique for digital image processing have been used for testing the scanning system prototype. Results of the experimental investigations of the prototyped scanning system are also presented.

APA, Harvard, Vancouver, ISO, and other styles

Legrand, Bernard, Jean-Paul Salvetat, Benjamin Walter, Marc Faucher, Didier Théron, and Jean-Pierre Aimé. "Multi-MHz micro-electro-mechanical sensors for atomic force microscopy." Ultramicroscopy 175 (April 2017): 46–57. http://dx.doi.org/10.1016/j.ultramic.2017.01.005.

Full text

APA, Harvard, Vancouver, ISO, and other styles

Ghaffari, A., A. Khodayari, S. Nosoudi, and S. Arefnezhad. "Calibration of a micro-electro mechanical system-based accelerometer for vehicle navigation." Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science 233, no. 2 (2018): 554–60. http://dx.doi.org/10.1177/0954406218757809.

Full text

Abstract:

Micro-electro mechanical system-based inertial sensors have broad applications in moving objects including in vehicles for navigation purposes. The low-cost micro-electro mechanical system sensors are normally subject to high dynamic errors such as linear or nonlinear bias, misalignment errors and random noises. In the class of low cost sensors, keeping the accuracy at a reasonable range has always been challenging for engineers. In this paper, a novel method for calibrating low-cost micro-electro mechanical system accelerometers is presented based on soft computing approaches. The method consists of two steps. In the first step, a preliminary model for error sources is presented based on fuzzy subtractive clustering algorithm. This model is then improved using adaptive neuro-fuzzy systems. A Kalman filter is also used to calculate the vehicle velocity and its position based on calibrated measured acceleration. The performance of the presented approach has been validated in the simulated and real experimental driving scenarios. The results show that this method can improve the accuracy of the accelerometer output, measured velocity and position of the vehicle by 79.11%, 97.63% and 99.28%, in the experimental test, respectively. The presented procedure can be used in collision avoidance and emergency brake assist systems.

APA, Harvard, Vancouver, ISO, and other styles

Du, Binhan, Jinlong Song, and Zhiyong Shi. "An Anomaly Diagnosis Method for Redundant Inertial Measurement Unit and Its Application with Micro-Electro-Mechanical System Sensors." Applied Sciences 9, no. 8 (2019): 1606. http://dx.doi.org/10.3390/app9081606.

Full text

Abstract:

The application of the micro-electro-mechanical system inertial measurement unit has become a new research hotspot in the field of inertial navigation. In order to solve the problems of the poor accuracy and stability of micro-electro-mechanical system sensors, redundant design is an effective method under the restriction of current technology. Redundant data processing is the most important part in the micro-electro-mechanical system redundant inertial navigation system, which includes the processing of anomaly data and the fusion estimation of redundant data. To further improve the reliability of the micro-electro-mechanical system redundant inertial measurement unit, an anomaly detection, isolation, and recognition method for data anomalies is proposed. The relationship between the parity space method detection function and the deterioration degree of anomaly data is mathematically deduced. The parity space method detection functions of different anomalies are analyzed, and five indicators are designed to quantitatively analyze the detection function values. According to these indicators, the detection and recognition method are proposed. The new method is tested by a series of simulation experiments.

APA, Harvard, Vancouver, ISO, and other styles

Faudzi, Ahmad Athif Mohd, Yaser Sabzehmeidani, and Koichi Suzumori. "Application of Micro-Electro-Mechanical Systems (MEMS) as Sensors: A Review." Journal of Robotics and Mechatronics 32, no. 2 (2020): 281–88. http://dx.doi.org/10.20965/jrm.2020.p0281.

Full text

Abstract:

This paper presents a review of the current applications of Micro-Electro-Mechanical Systems (MEMS) in the robotics and industrial applications. MEMS are widely used as actuators or sensors in numerous respects of our daily life as well as automation lines and industrial applications. Intersection of founding new polymers and composites such as silicon and micro manufacturing technologies performing micro-machining and micro-assembly brings about remarkable growth of application and efficacy of MEMS devices. MEMS indicated huge improvement in size reduction, higher reliability, multi-functionality, customized design, and power usage. Demonstration of various devices and technologies utilized in robotics and industrial applications are illustrated in this article along with the use and the role of silicon in the development of the sensors. Some future trends and its perspectives are also discussed.

APA, Harvard, Vancouver, ISO, and other styles

Padron, Ivan, Anthony T. Fiory, and Nuggehalli M. Ravindra. "Novel MEMS Fabry-Perot Interferometric Pressure Sensors." Materials Science Forum 638-642 (January 2010): 1009–14. http://dx.doi.org/10.4028/www.scientific.net/msf.638-642.1009.

Full text

Abstract:

A novel design for a Fabry-Perot Interferometric Sensor (FPIS) consisting of a Fabry-Perot cavity formed between two bonded surfaces is discussed. The Fabry-Perot cavity and the optical fiber to which it is coupled are used as the sensing element and interconnect, respectively. The Fabry-Perot cavity is fabricated using the Micro Electro Mechanical Systems (MEMS) technology. The introduction of a center rigid body diaphragm gives this sensor considerable advantage when compared with previous Fabry-Perot cavity based sensors.

APA, Harvard, Vancouver, ISO, and other styles

Lee, Chi Yuan, Shuo Jen Lee, Ching Liang Dai, Chin Hua Wu, and Guan Wei Wu. "Monitoring of Temperature Distribution within a Silicon-Based Micro Reformer Using Array Micro Sensors." Key Engineering Materials 364-366 (December 2007): 816–21. http://dx.doi.org/10.4028/www.scientific.net/kem.364-366.816.

Full text

Abstract:

With advances in micro fuel cell development, the production of hydrogen for micro reformer has become increasingly important. However, some problems regarding the micro reformer are yet to be resolved. These include reducing the size, reducing the quantity of CO and combining the fuel cell, among others. Accordingly, in this investigation, array micro temperature sensors and heaters were combined within a silicon-based micro reformer to measure and control the temperature and thus improve performance and minimize the concentration of CO. In this work, micro-electro-mechanical-systems (MEMS) of the micro channel type were fabricated on a silicon substrate to enhance the methanol conversion ratio. Array micro temperature sensors and heaters were made of platinum and placed inside the micro reformer. Although the micro temperature sensor and heater have already been used to measure and control temperature in numerous fields, they have not been employed in micro reformer and commercial products. Therefore, this study presents a new approach for combining array micro temperature sensors and heaters within a silicon-based micro reformer to minimize the size and improve performance.

APA, Harvard, Vancouver, ISO, and other styles

Lopes, António M., J. A. Tenreiro Machado, and Alexandra M. Galhano. "Towards fractional sensors." Journal of Vibration and Control 25, no. 1 (2018): 52–60. http://dx.doi.org/10.1177/1077546318769163.

Full text

Abstract:

This paper proposes a new sensor architecture inspired on the classical accelerometer and the fractional calculus. The fractional sensor (FS) adopts a modular construction with [Formula: see text] stages, where each stage consists of an association of mass–spring–damper elements. A proper selection of the elements in the global mechanical structure yields fractional-order characteristics. The frequency and time responses of the proposed apparatus are studied and compared with those exhibited by an ideal fractional order device. The FS can be implemented by means of modern fabrication techniques used with micro electro-mechanical systems.

APA, Harvard, Vancouver, ISO, and other styles

Ham, Suyun, and John Popovics. "Application of Micro-Electro-Mechanical Sensors Contactless NDT of Concrete Structures." Sensors 15, no. 4 (2015): 9078–96. http://dx.doi.org/10.3390/s150409078.

Full text

APA, Harvard, Vancouver, ISO, and other styles

Valentine, Jane E., Todd M. Przybycien, and Steinar Hauan. "Design of acoustic wave biochemical sensors using micro-electro-mechanical systems." Journal of Applied Physics 101, no. 6 (2007): 064508. http://dx.doi.org/10.1063/1.2711392.

Full text

APA, Harvard, Vancouver, ISO, and other styles

En, De, Chang Sheng Zhou, Huang He Wei, Na Na Wei, and Xiao Long Shi. "Research of MOEMS Pressure Sensor." Applied Mechanics and Materials 273 (January 2013): 524–27. http://dx.doi.org/10.4028/www.scientific.net/amm.273.524.

Full text

Abstract:

In recent years, with the development of optical communication by leaps and bounds, promote the Micro-opto-electro-mechanical system (MOEMS) development. As a new technology, the MOEMS have been widely used in optical communication, optical switching, data storage, optical sensing and etc.. Compared with the traditional pressure sensors, the optical pressure sensor based on MOEMS has some unique advantages. In this paper, the structures, operation principles and fabrication processes of various MOEMS pressure sensors are described mainly. Finally, the structure and Key technology of a MOEMS pressure sensor array is presented in brief.

APA, Harvard, Vancouver, ISO, and other styles

Lee, Chi Yuan, Shuo Jen Lee, Ching Liang Dai, Chi Lieh Hsieh, and Yu Ming Lee. "Metal Bipolar Plate with Micro Sensors." Key Engineering Materials 364-366 (December 2007): 861–66. http://dx.doi.org/10.4028/www.scientific.net/kem.364-366.861.

Full text

Abstract:

The fuel cell has the potential to become an indispensable source of electric power. However, some problems have not yet been resolved. Measuring the temperature and humidity inside the fuel cells is currently difficult. Accordingly, in this study, micro sensors were fabricated within the fuel cell, in which the temperature and humidity distributions were measured. The substrate of the fuel cell was made of stainless steel (SS-304) and etching was employed to fabricate the channel on the stainless steel substrate. Then micro-electro-mechanical-systems (MEMS) technology was used to fabricate the array micro temperature and humidity sensors on the rib of channel of stainless steel. The advantages of array micro temperature sensors are their small volume, their high accuracy, their short response time, the simplicity of their fabrication, their mass production and their ability to measure the temperature at a precise location more effectively than the traditional thermocouple. The micro humidity sensors were made from gold and titanium as down and up electrodes in the channel. The performance curve of the single cell was operating at 41.54 °C and gas flow rates of H2/O2 at 200/200ml/min. The max power density of the bipolar with micro sensor was 56 mW/cm2.

APA, Harvard, Vancouver, ISO, and other styles

Nagao, Mituo, Hiroshi Okabe, Kazuya Oyoshi, and Susumu Sakano. "Production of Micro-Optical Lenses Using Micro-Jet Drop-On-Demand." Key Engineering Materials 364-366 (December 2007): 30–34. http://dx.doi.org/10.4028/www.scientific.net/kem.364-366.30.

Full text

Abstract:

MEM (Micro-Electro-Mechanical System) is the integration system of mechanical elements, sensors, actuators, and electronics on a silicon substrate using the micro fabrication technology, in general. A new MEMS formation technology is proposed in this paper. The improved drop-on-demand ink jet was used and the MEMS was formed on the plastics and silicon substrate. The plastics resins were injected from the drop-on-demand head on the substrate and the dropped resins were cured using ultraviolet rays. Thus micro lenses were formed.

APA, Harvard, Vancouver, ISO, and other styles

de Conde, Kevin Eduardo, and Fábio Roberto Chavarette. "Control Instability Applied to a Micro Electro Mechanical Actuator System (MEMS)." Advanced Materials Research 1025-1026 (September 2014): 1164–67. http://dx.doi.org/10.4028/www.scientific.net/amr.1025-1026.1164.

Full text

Abstract:

MicroElectroMechanical Systems (MEMS) are devices what have been considered the technology of the future, being used in too many areas. MEMS are a combination of microstructures, micro sensors and micro actuators. The purpose of this work is to reduce the chaotic movement of the micro-actuator electrostatic to a small periodic orbit using the linear optimal control technique. The simulation results show that this technical is very effective.

APA, Harvard, Vancouver, ISO, and other styles

Mehmood, Zahid, Ibraheem Haneef, and Florin Udrea. "Material selection for optimum design of MEMS pressure sensors." Microsystem Technologies 26, no. 9 (2019): 2751–66. http://dx.doi.org/10.1007/s00542-019-04601-1.

Full text

Abstract:

Abstract Choice of the most suitable material out of the universe of engineering materials available to the designers is a complex task. It often requires a compromise, involving conflicts between different design objectives. Materials selection for optimum design of a Micro-Electro-Mechanical-Systems (MEMS) pressure sensor is one such case. For optimum performance, simultaneous maximization of deflection of a MEMS pressure sensor diaphragm and maximization of its resonance frequency are two key but totally conflicting requirements. Another limitation in material selection of MEMS/Microsystems is the lack of availability of data containing accurate micro-scale properties of MEMS materials. This paper therefore, presents a material selection case study addressing these two challenges in optimum design of MEMS pressure sensors, individually as well as simultaneously, using Ashby’s method. First, data pertaining to micro-scale properties of MEMS materials has been consolidated and then the Performance and Material Indices that address the MEMS pressure sensor’s conflicting design requirements are formulated. Subsequently, by using the micro-scale materials properties data, candidate materials for optimum performance of MEMS pressure sensors have been determined. Manufacturability of pressure sensor diaphragm using the candidate materials, pointed out by this study, has been discussed with reference to the reported devices. Supported by the previous literature, our analysis re-emphasizes that silicon with 110 crystal orientation [Si (110)], which has been extensively used in a number of micro-scale devices and applications, is also a promising material for MEMS pressure sensor diaphragm. This paper hence identifies an unexplored opportunity to use Si (110) diaphragm to improve the performance of diaphragm based MEMS pressure sensors.

APA, Harvard, Vancouver, ISO, and other styles

Xu, Xiang-Yuan, Hao Ge, Jing Zhao, et al. "A monolithic three-dimensional thermal convective acoustic vector sensor with acoustic-transparent heat sink." JASA Express Letters 2, no. 4 (2022): 044001. http://dx.doi.org/10.1121/10.0010275.

Full text

Abstract:

An acoustic vector sensor can directly detect acoustic particle velocity based on the measured temperature difference between closely spaced heated wires. For the detection of velocity in three dimensions, an integrated three-dimensional (3 D) sensor is desired, but it remains challenging in MEMS (Micro-Electro-Mechanical System) manufacturing. Here, a novel monolithic 3 D acoustic vector sensor is proposed, which is constructed using in-plane distributed wires assembled with acoustically transparent heat sink. The planar MEMS structure of the proposed sensor makes it easy to be fabricated and packaged. This work offers a new method for the design of acoustic vector sensors and other thermal convection-based MEMS sensors.

APA, Harvard, Vancouver, ISO, and other styles

Bhardwaj, Renu, Neelesh Kumar, and Vipan Kumar. "Errors in micro-electro-mechanical systems inertial measurement and a review on present practices of error modelling." Transactions of the Institute of Measurement and Control 40, no. 9 (2017): 2843–54. http://dx.doi.org/10.1177/0142331217708237.

Full text

Abstract:

Micro-electro-mechanical systems (MEMS) technology-based accelerometers and gyroscopes are small size, mass produced, low cost inertial sensors, which are now being used in aerospace, underwater vehicles, automotive, robotics, mobiles, gaming consoles, prosthetic devices and many other applications. MEMS inertial sensors are available in many grades in market and selecting the appropriate grade sensor is very important. Owing to interaction of different types of energies, different noises are generated in MEMS devices; these noises cause significant change in output and the first section of this paper illustrates that. In application, where MEMS inertial sensors are used, the accuracy, repeatability and reproducibility of inertia measurement is probed primarily by complex testing, using extensive range of physical stimuli. Noises in inertial measurement are generally dealt by designing a unit measurement model. Noises are treated as additive error in linear unit model and are modelled using various techniques so that errors can be compensated to improve the accuracy. This paper reviews the theory, framework and methodology used in the error model of a MEMS inertial sensor and stochastic modelling of measurement. Experimental results from the most commonly used Allan variance techniques are discussed. Error modelling methodology, consisting of testing and calibration methods, designing thermal model, stochastic modelling and parameter estimation techniques, is illustrated. Figures and tables under each section summarize features, merits, limitation and future research scope. This paper should serve as a single reference for researchers and engineers working on application specific system design and instrumentation using MEMS inertial sensors. Conclusion from the study should help in selecting the appropriate grade of sensor as well as the best error modelling as per the trade-off existing between accuracy and development cost of error modelling.

APA, Harvard, Vancouver, ISO, and other styles

Esashi, Masayoshi, and Shuji Tanaka. "Integrated Microsystems." Advances in Science and Technology 81 (September 2012): 55–64. http://dx.doi.org/10.4028/www.scientific.net/ast.81.55.

Full text

Abstract:

Technology called MEMS (Micro Electro Mechanical Systems) or microsystems are heterogeneous integration on silicon chips and play important roles as sensors. MEMS as switches and resonators fabricated on LSI are needed for future multi-band wireless systems. MEMS for safety systems as event driven tactile sensor network for nursing robot are developed. Wafer level packaging for MEMS and open collaboration to reduce the cost for the development are discussed.

APA, Harvard, Vancouver, ISO, and other styles

Ozevin, Didem. "MEMS Acoustic Emission Sensors." Applied Sciences 10, no. 24 (2020): 8966. http://dx.doi.org/10.3390/app10248966.

Full text

Abstract:

This paper presents a review of state-of-the-art micro-electro-mechanical-systems (MEMS) acoustic emission (AE) sensors. MEMS AE sensors are designed to detect active defects in materials with the transduction mechanisms of piezoresistivity, capacitance or piezoelectricity. The majority of MEMS AE sensors are designed as resonators to improve the signal-to-noise ratio. The fundamental design variables of MEMS AE sensors include resonant frequency, bandwidth/quality factor and sensitivity. Micromachining methods have the flexibility to tune the sensor frequency to a particular range, which is important, as the frequency of AE signal depends on defect modes, constitutive properties and structural composition. This paper summarizes the properties of MEMS AE sensors, their design specifications and applications for detecting the simulated and real AE sources and discusses the future outlook.

APA, Harvard, Vancouver, ISO, and other styles

Samotaev, Nikolay, Konstantin Oblov, Denis Veselov, et al. "Technology of SMD MOX Gas Sensors Rapid Prototyping." Materials Science Forum 977 (February 2020): 231–37. http://dx.doi.org/10.4028/www.scientific.net/msf.977.231.

Full text

Abstract:

This work discusses the design of flexible laser micromilling technology for fast prototyping of metal oxide based (MOX) gas sensors in SMD packages as an alternative to traditional silicon clean room technologies. By laser micromilling technology it is possible to fabricate custom Micro Electro Mechanical System (MEMS) microhotplate platform and also packages for MOX sensor, that gives complete solution for its integration in devices using IoT conception. The tests described in the work show the attainability of the stated results for the fabrication of microhotplates.

APA, Harvard, Vancouver, ISO, and other styles

H. S. Kumar, H. S. Kumar. "Use of Micro-Electro Mechanical Sensors in Bearing Condition Monitoring, A Review." International Journal of Mechanical and Production Engineering Research and Development 10, no. 3 (2020): 11773–80. http://dx.doi.org/10.24247/ijmperdjun20201124.

Full text

APA, Harvard, Vancouver, ISO, and other styles

Wang, Xian Wei, and Jun Hai Jiang. "A Low-Cost MEMS Implementation Based on Sensor Fusion Algorithms." Applied Mechanics and Materials 738-739 (March 2015): 42–45. http://dx.doi.org/10.4028/www.scientific.net/amm.738-739.42.

Full text

Abstract:

In this paper a low-cost Micro-Electro-Mechanical System (MEMS) inertial measurement unit is designed, a 3-axis accelerometer and 3-axis gyroscope simulated 6 degrees of freedom orientation sensing through sensor fusion. By analyzing a simple complimentary filter and a more complex Kalman filter, the outputs of each sensor were combined and took advantage of the benefits of both sensors to improved results. The experimental results demonstrate that the output signal can be corrected suitability by means of the proposed method.

APA, Harvard, Vancouver, ISO, and other styles

Suja, K. J., Bhanu Pratap Chaudhary, and Rama Komaragiri. "Design and Simulation of Pressure Sensor for Ocean Depth Measurements." Applied Mechanics and Materials 313-314 (March 2013): 666–70. http://dx.doi.org/10.4028/www.scientific.net/amm.313-314.666.

Full text

Abstract:

MEMS (Micro Electro Mechanical System) are usually defined as highly miniaturized devices combining both electrical and mechanical components that are fabricated using integrated circuit batch processing techniques. Pressure sensors are usually manufactured using square or circular diaphragms of constant thickness in the order of few microns. In this work, a comparison between circular diaphragm and square diaphragm indicates that square diaphragm has better perspectives. A new method for designing diaphragm of the Piezoresistive pressure sensor for linearity over a wide pressure range (approximately double) is designed, simulated and compared with existing single diaphragm design with respect to diaphragm deflection and sensor output voltage.

APA, Harvard, Vancouver, ISO, and other styles

Wang, Xian Wei, and Fu Cheng Cao. "Research on Data Fusion Technology of Body Posture Detection Based on Kalman Filter." Applied Mechanics and Materials 668-669 (October 2014): 1003–6. http://dx.doi.org/10.4028/www.scientific.net/amm.668-669.1003.

Full text

Abstract:

This paper discusses the body posture detection problem using low cost Micro-Electro-Mechanical System (MEMS) inertial sensors, for which a complementary sensor fusion solution is proposed. Considering the impact from the noise and bias drifts, through Kalman filter to complete the multi-sensor information fusion, achieved an accurate attitude determination. The experimental results show that, after using Kalman filtering algorithm to fuse acceleration sensor and signal gyroscope, it can effectively eliminate the accumulative error and significantly better dynamic characteristics of attitude angle measurement, Improving the reliability and accuracy of body posture estimation.

APA, Harvard, Vancouver, ISO, and other styles

Lee, Chi Yuan, Shuo Jen Lee, Yen Ting Cheng, and Yu Ming Chang. "Micro Pressure, Temperature and Flow Sensors for Integration in Micro Methanol Reformer." Applied Mechanics and Materials 284-287 (January 2013): 1872–76. http://dx.doi.org/10.4028/www.scientific.net/amm.284-287.1872.

Full text

Abstract:

In recent years, the development of fuel cells has proceeded rapidly, and so the reforming of methanol to produce hydrogen has become a serious problem. Supplying hydrogen from a micro methanol reformer to fuel cells is an important topic. The structure of a micro flow channel must support the transfer of external heat to the reform reaction, facilitating the diffusion of methanol vapor into the catalyst layer, increasing the rate of transfer of hydrogen. In this investigation, the micro-electro-mechanical systems (MEMS) technique is utilized to fabricate micro pressure, temperature and flow sensors. Polyimide film (PI) exhibits high temperature resistance and stress corrosion resistance, and is adopted herein as a flexible substrate. In future work, such micro sensors will be embedded in a micro methanol reformer for in-situ diagnosis.

APA, Harvard, Vancouver, ISO, and other styles

Seong, Ki, Ha Mun, Dong Shin, et al. "A Vibro-Acoustic Hybrid Implantable Microphone for Middle Ear Hearing Aids and Cochlear Implants." Sensors 19, no. 5 (2019): 1117. http://dx.doi.org/10.3390/s19051117.

Full text

Abstract:

To develop totally implantable middle ear and cochlear implants, a miniature microphone that is surgically easy to implant and has a high sensitivity in a sufficient range of audio frequencies is needed. Of the various implantable acoustic sensors under development, only micro electro-mechanical system-type acoustic sensors, which attach to the umbo of the tympanic membrane, meet these requirements. We describe a new vibro-acoustic hybrid implantable microphone (VAHIM) that combines acceleration and sound pressure sensors. Each sensor can collect the vibration of the umbo and sound pressure of the middle ear cavity. The fabricated sensor was implanted into a human temporal bone and the noise level and sensitivity were measured. From the experimental results, it is shown that the proposed method is able to provide a wider-frequency band than conventional implantable acoustic sensors.

APA, Harvard, Vancouver, ISO, and other styles

Reiner, Philip, Arthur Jenkins, Sharon Sanchez, Tracy D. Hudson, and Michael Kranz. "MEMS Based Transducer Designs for Monitoring High Speed Impacts." Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT) 2012, DPC (2012): 000616–32. http://dx.doi.org/10.4071/2012dpc-ta33.

Full text

Abstract:

MEMS based technologies provide a unique opportunity to develop micro-machined mechanical transducers for a variety of sensing applications. The micro-machining techniques that have been widely used for MEMS sensors provide a viable path for developing miniature sensors required for monitoring stress and strain for high speed impacts. Moreover, this technology allows sensors to be tailored to respond to specific vibrational modes and mode types. In particular, the electro-mechnical properties must be able to support very short response times without compromising signal strength. In this paper, we present the design and fabrication of micro-miniature PNZT based transducers for short duration mechanical impacts. Comparisons of their performance with conventional PZT transducers are presented. A discussion is also given of key performance parameters and the effects of post-fabrication processing and packaging on transducer performance.

APA, Harvard, Vancouver, ISO, and other styles

Djakov, Tatjana, Ivanka Popovic, and Ljubinka Rajakovic. "Micro-electro-mechanical systems (MEMS): Technology for the 21st century." Chemical Industry 68, no. 5 (2014): 629–41. http://dx.doi.org/10.2298/hemind131008091d.

Full text

Abstract:

Micro-electro-mechanical systems (MEMS) are miniturized devices that can sense the environment, process and analyze information, and respond with a variety of mechanical and electrical actuators. MEMS consists of mechanical elements, sensors, actuators, electrical and electronics devices on a common silicon substrate. Micro-electro-mechanical systems are becoming a vital technology for modern society. Some of the advantages of MEMS devices are: very small size, very low power consumption, low cost, easy to integrate into systems or modify, small thermal constant, high resistance to vibration, shock and radiation, batch fabricated in large arrays, improved thermal expansion tolerance. MEMS technology is increasingly penetrating into our lives and improving quality of life, similar to what we experienced in the microelectronics revolution. Commercial opportunities for MEMS are rapidly growing in broad application areas, including biomedical, telecommunication, security, entertainment, aerospace, and more in both the consumer and industrial sectors on a global scale. As a breakthrough technology, MEMS is building synergy between previously unrelated fields such as biology and microelectronics. Many new MEMS and nanotechnology applications will emerge, expanding beyond that which is currently identified or known. MEMS are definitely technology for 21st century.

APA, Harvard, Vancouver, ISO, and other styles

Phua, Wee Kee, Sarbudeen Mohamed Rabeek, Beibei Han, et al. "AIN-Based MEMS (Micro-Electro-Mechanical System) Hydrophone Sensors for IoT Water Leakage Detection System." Water 12, no. 11 (2020): 2966. http://dx.doi.org/10.3390/w12112966.

Full text

Abstract:

There is an urgent need for industrial Internet of things (IoT) solutions to deploy a smart hydrophone sensor grid to monitor pipeline health and to provide an accurate prediction in the event of any leakage. One solution is to develop an IoT water leakage detection system consisting of an interface to capture acoustic signals from aluminum nitride (AlN)-based micro-machined infrasonic hydrophone sensors that are fed as inputs and predict an approximate leak location as a form of output. Micro-electro-mechanical systems (MEMS) are particularly useful for IoT applications with low power consumption and small device footprint. Data analytics including characterization, pre/post processing are applied to determine the leaks. In this work, we have developed the process flow and algorithm to detect pipe leakage occurrence and pinpoint the location accurately. Our approach can be implemented to detect leaks for different pipe lengths, diameters and materials.

APA, Harvard, Vancouver, ISO, and other styles

Xu, Tao, Bin Wang, and Xue Yun Wang. "Research on Rotating Modulated Strap-Down Inertial Navigation System Based on Micro-Electro-Mechanical Systems (MEMS) Sensors (RMSINS)." Applied Mechanics and Materials 148-149 (December 2011): 192–97. http://dx.doi.org/10.4028/www.scientific.net/amm.148-149.192.

Full text

Abstract:

Advanced development of an Inertial Navigation System (INS) using rotating modulated technique based on Micro-Electro-Mechanical Systems (MEMS) sensors is described. The system architecture and the mechanical structure are detailed. Alignment and navigation algorithms apposite to the RMSINS system are derived. Preliminary system static navigation experiment results are presented. Performance results show that rotating modulated technology, with appropriate navigation algorithm, makes it possible to use the MEMS sensors in SINS system, with the benefit of reducing system costs as well as improving accuracy.

APA, Harvard, Vancouver, ISO, and other styles

Lee, Yong-Chan, Henzeh Leeghim, and Chang-Yull Lee. "Micropatterning of Metal-Grid Micro Electro Mechanical Systems (MEMS) Sensor for Crack Detection Using Electrohydrodynamic Printing System." Journal of Nanoscience and Nanotechnology 20, no. 7 (2020): 4385–89. http://dx.doi.org/10.1166/jnn.2020.17601.

Full text

Abstract:

In this paper, a mechanism of sensors for micro crack detection is proposed according to circuit disconnection. In order to detect micro cracks, sensitive sensors based on micropatterning using a electrohydrodynamic (EHD) technology are necessary. For EHD printing, it is essential to find an optimum condition between ink materials and environmental parameters. Therefore, the distribution of the jetting mode between the flow rate and the voltage is confirmed through experiments. Metal-grid was patterned and resistance of each circuit by crack occurrence was measured. The resistance changes are occurred at the position where the crack is generated, and the crack position can be estimated with grid type sensors. The resistance in the cracked circuits are relatively larger than it in non-cracked circuits. It was confirmed that micro cracks were well detected by using the proposed crack sensors and mechanisms.

APA, Harvard, Vancouver, ISO, and other styles

Amendoeira Esteves, Rui, Chen Wang, and Michael Kraft. "Python-Based Open-Source Electro-Mechanical Co-Optimization System for MEMS Inertial Sensors." Micromachines 13, no. 1 (2021): 1. http://dx.doi.org/10.3390/mi13010001.

Full text

Abstract:

The surge in fabrication techniques for micro- and nanodevices gave room to rapid growth in these technologies and a never-ending range of possible applications emerged. These new products significantly improve human life, however, the evolution in the design, simulation and optimization process of said products did not observe a similarly rapid growth. It became thus clear that the performance of micro- and nanodevices would benefit from significant improvements in this area. This work presents a novel methodology for electro-mechanical co-optimization of micro-electromechanical systems (MEMS) inertial sensors. The developed software tool comprises geometry design, finite element method (FEM) analysis, damping calculation, electronic domain simulation, and a genetic algorithm (GA) optimization process. It allows for a facilitated system-level MEMS design flow, in which electrical and mechanical domains communicate with each other to achieve an optimized system performance. To demonstrate the efficacy of the methodology, an open-loop capacitive MEMS accelerometer and an open-loop Coriolis vibratory MEMS gyroscope were simulated and optimized—these devices saw a sensitivity improvement of 193.77% and 420.9%, respectively, in comparison to their original state.

APA, Harvard, Vancouver, ISO, and other styles

Ho, Chih-Ming, and Yu-Chong Tai. "REVIEW: MEMS and Its Applications for Flow Control." Journal of Fluids Engineering 118, no. 3 (1996): 437–47. http://dx.doi.org/10.1115/1.2817778.

Full text

Abstract:

Emerging micromachining technology enables us to fabricate mechanical parts on the order of micron size. It provides us with micro-sensors and micro-actuators which facilitate the exploration of all areas of science. Furthermore, these miniature transducers can be integrated with microelectronics. With an integrated system, it then becomes possible to complete the loop of sensing, information processing, and actuation. This type of system enables us to perform real-time control of time varying events which are common in fluid dynamics. In this review paper, we will first briefly introduce Micro-Electro-Mechanical-Systems (MEMS) technology. Then, the applications of MEMS to flow control will be discussed.

APA, Harvard, Vancouver, ISO, and other styles

Zhou, Liming, Ming Li, Guangwei Meng, and Hongwei Zhao. "An effective cell-based smoothed finite element model for the transient responses of magneto-electro-elastic structures." Journal of Intelligent Material Systems and Structures 29, no. 14 (2018): 3006–22. http://dx.doi.org/10.1177/1045389x18781258.

Full text

Abstract:

To overcome the over-stiffness and the imprecise magneto-electro-elastic coupling effects of finite element model, we presented a cell-based smoothed finite element model to more accurately simulate the transient responses of magneto-electro-elastic structures. In the cell-based smoothed finite element model, the gradient smoothing technique was introduced into a magneto-electro-elastic multi-physical-field finite element model. The cell-based smoothed finite element model can achieve a close-to-exact stiffness of the continuum structures which could automatically discrete elements for complicated regions more readily and thus remarkably reduced the numerical errors. In addition, the modified Wilson- θ method was presented for solving the motion equation of magneto-electro-elastic structures. Several numerical examples were investigated and exhibited that the cell-based smoothed finite element model could receive more accurate and reliable simulation results than the standard finite element model. Besides, the cell-based smoothed finite element model was employed to calculate transient responses of magneto-electro-elastic sensor and typical micro-electro-mechanical systems–based magneto-electro-elastic energy harvester. Therefore, the cell-based smoothed finite element model can be adopted to tackle the practical magneto-electro-elastic problems such as smart vibration transducers, magnetic field sensors, and energy harvester devices in intelligent magneto-electro-elastic structures systems.

APA, Harvard, Vancouver, ISO, and other styles

Lee, Chi Yuan, Shuo Jen Lee, and Guan Wei Wu. "Integration of Micro Array Sensors in the MEA on Diagnosis of Micro Fuel Cells." Key Engineering Materials 364-366 (December 2007): 855–60. http://dx.doi.org/10.4028/www.scientific.net/kem.364-366.855.

Full text

Abstract:

The temperature and humidity conditions of a membrane electrode assembly (MEA) determine the performance of fuel cells. The volume of traditional temperature and humidity sensors is too large to allow them to be used to measure the distribution of temperature and humidity in the MEA of fuel cells. Measurements cannot necessarily be made where required. They measure only the temperature and humidity distribution outside the fuel cells and yield results with errors that exceed those of measurements made in MEA. Therefore, in this study, micro-electro-mechanical-systems (MEMS) fabrication technology was employed to fabricate an array of micro sensors to monitor in situ the temperature and humidity distributions within the MEA of fuel cells. In this investigation, an array of micro temperature and humidity sensors was made from gold on the MEA. The advantages of array micro gold temperature and humidity sensors are their small volume, which enable them to be placed on MEA and their high sensitivity and accuracy. The dimensions of the temperature and humidity sensors are 180μm × 180μm and 180μm × 220μm, respectively. The experiment involves temperatures from 30 to 100 °C. The resistance varied from 23.084 to 28.196 /. The experimental results reveal that the temperature is almost linearly related to the resistance and the accuracy and sensitivity are less than 0.3 °C and 3.2×10-3/°C, respectively. The humidity sensor showed that the capacitance changed from 15.76 to 17.95 pF, the relative humidity from 20 to 95 %RH, and the accuracy and sensitivity were less than 0.25 %RH and 0.03 pF/%RH.

APA, Harvard, Vancouver, ISO, and other styles

Himawan, Helmy Mukti. "SIMULATION AND ANALYSIS OF MICRO ELECTRO MECHANICAL SYSTEMS PIEZO CERAMIC TUBE FOR ULTRASONIC FLOW MEASUREMENT." INVOTEK: Jurnal Inovasi Vokasional dan Teknologi 17, no. 1 (2017): 41–48. http://dx.doi.org/10.24036/invotek.v17i1.27.

Full text

Abstract:

Tube piezoceramic used for the laying of a variety of sensors with a relatively small diameter to the size of a few micrometer to a few milli meters. Materials used in Piezoceramic Tube specially formulated standards for cylinders, so many different kinds of sensors which has a cylindrical shape for use as a place Piezoceramic. Use of Piezoceramic Tube one to measure ultrasonic flow. In the ultrasonic flow rate measurement distinction is made between two different measurement principles, namely the Doppler effect and timing analysis wave. In both cases Piezoceramic transducer placed on the walls of the tube produces ultrasonic waves, which are then transmitted into the liquid diagonal to the direction of flow.

APA, Harvard, Vancouver, ISO, and other styles

Yu, Jui-Ming, Tzong-Shyng Leu, Jiun-Jih Miau, and Shih-Jiun Chen. "MEMS flexible thermal flow sensor for measurement of boundary layer separation." Modern Physics Letters B 30, no. 15 (2016): 1650177. http://dx.doi.org/10.1142/s0217984916501773.

Full text

Abstract:

Micro-electro-mechanical systems (MEMS) thermal flow sensors featured with high spatial resolutions, fast frequency response and minimal interference with fluid flow have been applied widely in boundary-layer studies and aerodynamic flow sensing and control due to the inherent outstanding performances. In this study, MEMS thermal flow sensors were designed and fabricated on a flexible skin using the MEMS technology. The dimension of a single sensing element was 200 [Formula: see text]m × 260 [Formula: see text]m, which had a resistance of about 200 [Formula: see text] after annealing. By configuring thermal flow sensors in either a single thermal flow sensor and a thermal tuft sensor, separation points of a two-dimensional (2D) LS(1) 0417 airfoil at various angles of attack could be precisely detected. The experimental results show good agreement with the hot wire sensor and particle traced flow visualization in detecting the separation point on the suction surface of the airfoil.

APA, Harvard, Vancouver, ISO, and other styles

Jiang, Hongchuan, Xiaoyu Tian, Xinwu Deng, et al. "Low Concentration Response Hydrogen Sensors Based on Wheatstone Bridge." Sensors 19, no. 5 (2019): 1096. http://dx.doi.org/10.3390/s19051096.

Full text

Abstract:

The PdNi film hydrogen sensors with Wheatstone bridge structure were designed and fabricated with the micro-electro-mechanical system (MEMS) technology. The integrated sensors consisted of four PdNi alloy film resistors. The internal two were shielded with silicon nitride film and used as reference resistors, while the others were used for hydrogen sensing. The PdNi alloy films and SiN films were deposited by magnetron sputtering. The morphology and microstructure of the PdNi films were characterized with X-ray diffraction (XRD). For efficient data acquisition, the output signal was converted from resistance to voltage. Hydrogen (H2) sensing properties of PdNi film hydrogen sensors with Wheatstone bridge structure were investigated under different temperatures (30 °C, 50 °C and 70 °C) and H2 concentrations (from 10 ppm to 0.4%). The hydrogen sensor demonstrated distinct response at different hydrogen concentrations and high repeatability in cycle testing under 0.4% H2 concentration. Towards 10 ppm hydrogen, the PdNi film hydrogen sensor had evident and collectable output voltage of 600 μV.

APA, Harvard, Vancouver, ISO, and other styles

Wu, Jing, Xiaofeng Zhao, Yibo Liu, and Dianzhong Wen. "The simulation, fabrication technology and characteristic research of micro-pressure sensor with isosceles trapezoidal beam-membrane." Modern Physics Letters B 34, no. 29 (2020): 2050285. http://dx.doi.org/10.1142/s0217984920503285.

Full text

Abstract:

A micro-pressure sensor with an isosceles trapezoidal beam-membrane (ITBM) is proposed in this paper, consisting of a square silicon membrane, four isosceles trapezoidal beams (ITBs) and four piezoresistors. To investigate how the elastic silicon membrane affects pressure sensitive characteristics, simulation models based on ANSYS 15.0 software were used to analyze the effect of structural dimension on the characteristics of pressure sensor. According to that, the chips of micro-pressure sensors were fabricated by micro-electro-mechanical system (MEMS) technology on a silicon wafer with [Formula: see text] orientation. The experimental results show that the proposed sensor achieves a better sensitivity of 9.64 mV/kPa and an excellent linearity of 0.09%F.S. in the range of 0–3.0 kPa at room temperature and a supply voltage of 5.0 V, with a super temperature coefficient of sensitivity (TCS) about - 2180 ppm/[Formula: see text] from −40[Formula: see text] to 85[Formula: see text] and low pressure measurement less than 3.0 kPa.

APA, Harvard, Vancouver, ISO, and other styles

Lee, Chi-Yuan, Shuo-Jen Lee, Chia-Chieh Shen, et al. "Fabrication of flexible micro-sensors and flow field of stainless steel-based micro-reformer by micro-electro-mechanical-systems process." Journal of Power Sources 193, no. 1 (2009): 150–54. http://dx.doi.org/10.1016/j.jpowsour.2009.02.065.

Full text

APA, Harvard, Vancouver, ISO, and other styles

K.P. Rao, Venkatesh. "Fertilizer monitoring using micromachined cantilever." Agricultural Science and Technology 11, no. 3 (2019): 217–20. http://dx.doi.org/10.15547/ast.2019.03.037.

Full text

Abstract:

Abstract. In this study, we will create a grid of micro electro-mechanical (MEMS) sensors, which will measure the contents of soil, especially urea. This will inform the farmers about the condition of soil in real time, and thus allowing them to know how much fertilizer they need to add. MEMS sensor is placed in the soil to measure the soil content by chemical reaction with the fertilizers; its accuracy can be improved if these sensors are placed on multiple points, i.e., they are placed in a grid. In the present study, we designed micro-cantilever based gas detectors, to detect ammonia present in the fertilizers. Several designs were proposed to find the best fit for this purpose. Numerical studies have been carried out on the proposed designs, to evaluate the displacement sensitivity and the voltage developed in the piezoelectric layer, and the triangular cantilever was found to be the most sensitive cantilever for that purpose.

APA, Harvard, Vancouver, ISO, and other styles

Veroli, Andrea, Alessio Buzzin, Fabrizio Frezza, et al. "An Approach to the Extreme Miniaturization of Rotary Comb Drives." Actuators 7, no. 4 (2018): 70. http://dx.doi.org/10.3390/act7040070.

Full text

Abstract:

The evolution of microelectronic technologies is giving constant impulse to advanced micro-scaled systems which perform complex operations. In fact, the actual micro and nano Electro-Mechanical Systems (MEMS/NEMS) easily integrate information-gathering and decision-making electronics together with all sorts of sensors and actuators. Mechanical manipulation can be obtained through microactuators, taking advantage of magnetostrictive, thermal, piezoelectric or electrostatic forces. Electrostatic actuation, more precisely the comb-drive approach, is often employed due to its high versatility and low power consumption. Moreover, the device design and fabrication process flow can be simplified by compliant mechanisms, avoiding complex elements and unorthodox materials. A nano-scaled rotary comb drive is herein introduced and obtained using NEMS technology, with an innovative design which takes advantages of the compliant mechanism characteristics. A theoretical and numerical study is also introduced to inspect the electro-mechanical behavior of the device and to describe a new technological procedure for its fabrication.

APA, Harvard, Vancouver, ISO, and other styles

Liu, Haotian, Li Zhang, King Li, and Ooi Tan. "Microhotplates for Metal Oxide Semiconductor Gas Sensor Applications—Towards the CMOS-MEMS Monolithic Approach." Micromachines 9, no. 11 (2018): 557. http://dx.doi.org/10.3390/mi9110557.

Full text

Abstract:

The recent development of the Internet of Things (IoT) in healthcare and indoor air quality monitoring expands the market for miniaturized gas sensors. Metal oxide gas sensors based on microhotplates fabricated with micro-electro-mechanical system (MEMS) technology dominate the market due to their balance in performance and cost. Integrating sensors with signal conditioning circuits on a single chip can significantly reduce the noise and package size. However, the fabrication process of MEMS sensors must be compatible with the complementary metal oxide semiconductor (CMOS) circuits, which imposes restrictions on the materials and design. In this paper, the sensing mechanism, design and operation of these sensors are reviewed, with focuses on the approaches towards performance improvement and CMOS compatibility.

APA, Harvard, Vancouver, ISO, and other styles

We offer discounts on all premium plans for authors whose works are included in thematic literature selections. Contact us to get a unique promo code!