Journal articles: 'Micro Electromechanical Systems (MEMS) accelerometers'

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Polla, D. L., and L. F. Francis. "Ferroelectric Thin Films in Micro-electromechanical Systems Applications." MRS Bulletin 21, no. 7 (July 1996): 59–65. http://dx.doi.org/10.1557/s0883769400035934.

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Ferroelectric ceramic thin films fit naturally into the burgeoning field of microelectromechanical systems (MEMS). Microelectromechanical systems combine traditional Si integrated-circuit (IC) electronics with micromechanical sensing and actuating components. The term MEMS has become synonymous with many types of microfabricated devices such as accelerometers, infrared detectors, flow meters, pumps, motors, and mechanical components. These devices have lateral dimensions in the range of 10 μm–10 mm. The ultimate goal of MEMS is a self-contained system of interrelated sensing and actuating devices together with signal processing and control electronics on a common substrate, most often Si. Since fabrication involves methods common to the IC industry, MEMS can be mass-produced. Commercial applications for MEMS already span biomedical (e.g., blood-pressure sensors), manufacturing (e.g., microflow controllers), information processing (e.g., displays), and automotive (e.g., accelerometers) industries. More applications are projected in consumer electronics, manufacturing control, communications, and aerospace. Materials for MEMS include traditional microelectronic materials (e.g., Si, SiO2, Si3N4, polyimide, Pt, Al) as well as nontraditional ones (e.g., ferroelectric ceramics, shapememory alloys, chemical-sensing materials). The superior piezoelectric and pyroelectric properties of ferroelectric ceramics make them ideal materials for microactuators and microsensors.

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Yin, Chong, Xiang Ming Zheng, and Peng Wang. "The Angle Measurement of Folding Wing Craft Based on MEMS." Applied Mechanics and Materials 303-306 (February 2013): 411–15. http://dx.doi.org/10.4028/www.scientific.net/amm.303-306.411.

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The unmanned folding wing aircraft has the advantage on expanding the flight envelope. The angle measurement algorithm of folding wing craft which based on MEMS (micro-electromechanical systems) accelerometers was studied. Collected the acceleration values from the accelerometers, and built the motion parameter model .Used the analyze data and the redundant acceleration; multiple sensors were used to do the error correction. With the experiment of folding wing, the validity and accuracy of the algorithm was verified.

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Chiu, Liu, and Hong. "A Robust Fully-Integrated Digital-Output Inductive CMOS-MEMS Accelerometer with Improved Inductor Quality Factor." Micromachines 10, no. 11 (November 18, 2019): 792. http://dx.doi.org/10.3390/mi10110792.

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This paper presents the design, fabrication, and characterization of an inductive complementary metal oxide semiconductor micro-electromechanical systems (CMOS-MEMS) accelerometer with on-chip digital output based on LC oscillators. While most MEMS accelerometers employ capacitive detection schemes, the proposed inductive detection scheme is less susceptible to the stress-induced structural curling and deformation that are commonly seen in CMOS-MEMS devices. Oscillator-based frequency readout does not need analog to digital conversion and thus can simplify the overall system design. In this paper, a high-Q CMOS inductor was connected in series with the low-Q MEMS sensing inductor to improve its quality factor. Measurement results showed the proposed device had an offset frequency of 85.5 MHz, sensitivity of 41.6 kHz/g, noise floor of 8.2 mg/Hz, bias instability of 0.94 kHz (11 ppm) at an average time of 2.16 s, and nonlinearity of 1.5% full-scale.

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Chen, Dongliang, Liang Yin, Qiang Fu, Wenbo Zhang, Yihang Wang, Guorui Zhang, Yufeng Zhang, and Xiaowei Liu. "A Straightforward Approach for Synthesizing Electromechanical Sigma-Delta MEMS Accelerometers." Sensors 20, no. 1 (December 22, 2019): 91. http://dx.doi.org/10.3390/s20010091.

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The EM- Σ Δ (electromechanical sigma-delta) approach is a concise and efficient way to realize the digital interface for micro-electromechanical systems (MEMS) accelerometers. However, including a fixed MEMS element makes the synthesizing of the EM- Σ Δ loop an intricate problem. The loop parameters of EM- Σ Δ can not be directly mapped from existing electrical Σ Δ modulator, and the synthesizing problem relies an experience-dependent trail-and-error procedure. In this paper, we provide a new point of view to consider the EM- Σ Δ loop. The EM- Σ Δ loop is analyzed in detail from aspects of the signal loop, displacement modulation path and digital quantization loop. By taking a separate consideration of the signal loop and quantization noise loop, the design strategy is made clear and straightforward. On this basis, a discrete-time PID (proportional integral differential) loop compensator is introduced which enhances the in-band loop gain and suppresses the displacement modulation path, and hence, achieves better performance in system linearity and stability. A fifth-order EM- Σ Δ accelerometer system was designed and fabricated using 0.35 μ m CMOS-BCD technology. Based on proposed architecture and synthesizing procedure, the design effort was saved, and the in-band performance, linearity and stability were improved. A noise floor of 1 μ g / Hz , with a bandwidth 1 kHz and a dynamic range of 140 dB was achieved.

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Miller, Brandon J., and Fadi A. Fathallah. "Body-fixed Orientation Sensors for Trunk Motion Sensing." Proceedings of the Human Factors and Ergonomics Society Annual Meeting 51, no. 15 (October 2007): 933–37. http://dx.doi.org/10.1177/154193120705101514.

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Awkward trunk postures and dynamic trunk movements are associated with increased risk of low back disorders (LBDs). Recent advancements in computing and micro-electromechanical systems (MEMS) technology have resulted in high precision, compact, and relatively inexpensive commercial orientation sensors that address the workplace usage limitations of the most common kinematics measurement methods (video analysis, magnetic field sensors, and electrogoniometers). The purpose of this study is to review the available body-fixed orientation sensing technology for its use in ergonomics research and practice. A laboratory study of a custom MEMS accelerometer-based inclinometer highlights issues of axial orientation, vibration, and non-gravitational acceleration that affect orientation results from basic inclinometers. Techniques are presented for correcting for such issues in advanced sensors using computational methods and combinations of MEMS accelerometers, gyroscopes, and/or magnetometers. Body-fixed orientation sensors provide enhanced opportunities to identify and reduce harmful work postures that may reduce the prevalence and severity of work-related musculoskeletal disorders (WMSDs).

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Chen, Yin Jun, Qing Hua Chen, Yan Mei Li, and Wen Gang Wu. "Coupled-Field Finite Element Analysis of MEMS Compound Electrostatic Actuator by Using the ANSYS Software." Applied Mechanics and Materials 214 (November 2012): 929–34. http://dx.doi.org/10.4028/www.scientific.net/amm.214.929.

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MEMS (Microelectromechanical Systems) electrostatic actuators have been successfully applied in a number of areas, including accelerometers, gyroscopes, pressure sensors, and optical devices. In this paper, the actuator optimization of a silicon bulk-micro machined MEMS compound electrostatic actuator of an optical device is discussed. The actuator uses folded-beam structure to enhance the electromechanical performance. The movable block is connected to the compound electrostatic actuator through unequal-height folded-beam springs. The lower-height springs connect the block with parallel plates, and can convert the descending motion of the plates into out-of-plane tilting motion of the block efficiently Additionally, the block is capable of in-plane motion by applying the driving force of the comb-drive actuator through structural connection. ANSYS FEM simulation is used to extract the device electromechanical performance and resonant frequency of the device. By gradually varying the design parameters in ANSYS simulation, the relationship between the actuator electromechanical performance and various design parameters is derived. The curves of actuator electromechanical performance versus beam length and beam height are derived and they are in good agreement with theoretical prediction. From the analysis it is concluded that the actuator behavior strongly depends upon various actuator parameters. By adjusting design parameters, desired electromechanical performance can be obtained. Based on the simulation results, a set of optimized design parameters for the compound electrostatic actuator is decided. The above-proposed MEMS compound electrostatic actuator may be used for many applications, such as optical device and micro-operating.

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Hong, Lei, Ming Jian Li, and Ning Han. "MEMS/GPS Integrated Navigation System Based on EKF." Applied Mechanics and Materials 482 (December 2013): 367–74. http://dx.doi.org/10.4028/www.scientific.net/amm.482.367.

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MEMS (Micro-electromechanical Systems) sensors have many advantages including fast response, low cost, small size and low power consumption. However, MEMS sensors suffer low accuracy and poor stability due to the limitations of the manufacturing process. the MEMS/GPS integrated navigation system based on EKF make up for these shortcomings. The system using a low-cost MEMS sensor system consists of tri-axis gyroscopes and accelerometers which also incorporates a tri-axis magnetometer, and it can provide a complete measurement of orientation relative to the direction of gravity and the earths magnetic field.Extended kalman filter is used to fuse informations from MEMS and GPSof UAV. Mathematical models of GPS and MEMS sensor system are constructed based on matlab/simulink. The experimental results indicate that the average attitude angle error obtained is less than 0.15° in simulation experiments while position error is less than 7m and the velocity error is less than 0.4m.

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Rafiee, Peyman, Golta Khatibi, and Francesco Solazzi. "Optically-detected nonlinear oscillations of single crystal silicon MEMS accelerometers." Microelectronics International 33, no. 2 (May 3, 2016): 107–15. http://dx.doi.org/10.1108/mi-04-2015-0042.

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Purpose The purpose of this study is to address the nonlinear oscillations of single-crystal silicon micro-electromechanical systems (MEMS) accelerometers subjected to mechanical excitation. Methodology/approach The nonlinear behavior was detected and analyzed by using experimental, analytical and numerical approaches. Piezoelectric shaker as a source of mechanical excitation and differential laser Doppler vibrometer in combination with a micro system analyzer were used in the experimental effort. Two types of devices considered included nonencapsulated samples and samples encapsulated in nitrogen gas compressed between two glasses. Numerical and analytical investigations were conducted to analyze the nonlinear response. A novel method has been suggested to calculate the nonlinear parameters. The obtained experimental, numerical and analytical results are in good agreement. Findings It has been found that the nonlinearity leads to a shift in frequencies and generates higher harmonics, but, most importantly, reveals new phenomena, such as the jump and instability of the vibration amplitudes and phases. Originality/value It has been shown that under the constant excitation force, the MEMS device can work in both linear and nonlinear regions. The role of the beat phenomenon has been also addressed and discussed. It has been found that the attributes of the nonlinear response are strongly dependent on the level and duration of the excitation. It is concluded that the nonlinear response of the systems is strongly dependent on the level of the excitation energy. It has been also concluded that larger quality factors are able to enhance dramatically the nonlinear effects and vice versa.

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Malik, M. Rizwan, Tie Lin Shi, Zi Rong Tang, and M. Haseeb. "A Boost-Up Method of MEMS-Bulk-Micromachining towards C-MEMS Fabrication for Sensing and Manipulating Bioparticles." Defect and Diffusion Forum 316-317 (May 2011): 59–67. http://dx.doi.org/10.4028/www.scientific.net/ddf.316-317.59.

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Much of the recent ongoing advanced research into the quest for improved etching techniques has brought forth a broad concept for the fabrication of micro/nano-electromechanical systems (MEMS/NEMS) having high accuracy, precision, efficiency, compatibility and through-put of metallic- as well as carbon-composition structural phases. This in turn leads towards a thorough understanding of the sensing, trapping, separating, controlling, positioning, directing, concentrating and manipulating of micro-nano-sized particles - predominantly biological particles - in the emerging MEMS/NEMS technological field. This paper focuses its attention on the easiest means of wet-etching {100}-type silicon wafer surfaces by guiding the choice of [<100> or <010>] orientation (at 45° to the normal orientation). This anisotropic etching is performed in KOH solution. Here, consideration is not concerned to a large extent with process parameters as in anodic oxidation, an intensely doped boron etching stops and silicon wafer surface back-etching. The main concern of the present practical application route involves a passivating material (silicon dioxide, SiO2) and two masking stages (for a two-step etching process). As a example of this method, silicon cantilever beams having vertical edges are produced. It is concluded that the method presented will be helpful in the comprehensive study of resonators, pressure/temperature sensors, three-dimensional carbon micro-electrodes, actuators and accelerometers for bioparticle applications.

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Li, Qin, and Tao Wang. "Low-Frequency Wireless Accelerometer to Bridge Health Monitoring." Applied Mechanics and Materials 241-244 (December 2012): 858–62. http://dx.doi.org/10.4028/www.scientific.net/amm.241-244.858.

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According to the requirements and characteristics of the long-span bridge vibration monitoring, this paper presents one kind of low-frequency wireless accelerometer monitoring system based on PIC and MEMS (Micro-electromechanical Systems) acceleration sensor. The system was composed of sensor module, data acquisition and processing module, micro-processing module, wireless transmitting and receiving module, and a computer system. Model 1221 was the sensor chip, the measure data processed by MCU, and transmitted by wireless transmitting module based on Zigbee networks. As the date was received by the wireless receiving module, re process the sensing data by computer, to get the vibration parameter and assess the vibration. The system was validated with standard vibrator.

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Huang, Zhiliang, Jiaqi Xu, Tongguang Yang, Fangyi Li, and Shuguang Deng. "Evidence-Theory-Based Robust Optimization and Its Application in Micro-Electromechanical Systems." Applied Sciences 9, no. 7 (April 7, 2019): 1457. http://dx.doi.org/10.3390/app9071457.

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The conventional engineering robustness optimization approach considering uncertainties is generally based on a probabilistic model. However, a probabilistic model faces obstacles when handling problems with epistemic uncertainty. This paper presents an evidence-theory-based robustness optimization (EBRO) model and a corresponding algorithm, which provide a potential computational tool for engineering problems with multi-source uncertainty. An EBRO model with the twin objectives of performance and robustness is formulated by introducing the performance threshold. After providing multiple target belief measures (Bel), the original model is transformed into a series of sub-problems, which are solved by the proposed iterative strategy driving the robustness analysis and the deterministic optimization alternately. The proposed method is applied to three problems of micro-electromechanical systems (MEMS), including a micro-force sensor, an image sensor, and a capacitive accelerometer. In the applications, finite element simulation models and surrogate models are both given. Numerical results show that the proposed method has good engineering practicality due to comprehensive performance in terms of efficiency, accuracy, and convergence.

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Lukyanov, Dmitry P., Alexander M. Boronakhin, Sergey Yu Shevchenko, Mariya A. Khivrich, and Temurmalik A. Amirov. "Microaccelerometer on Surface Acoustic Waves with a Ring Resonator on Anisotropic Material." Journal of the Russian Universities. Radioelectronics 22, no. 5 (December 4, 2019): 116–29. http://dx.doi.org/10.32603/1993-8985-2019-22-5-116-129.

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Introduction. Diagnostic systems are designed to monitor the condition of operational components (for example, on the railway). It is imperative that micro-electromechanical systems (MEMS) equipped with acceleration sensors (accelerometers) be used as part of measuring diagnostic systems. It is known that accelerometers are operated under increased vibration and repeated shock loads. This imposes a limitation both on the accelerometer design and the properties of materials from which these devices are produced.Aim. To develop a micromechanical accelerometer (MMA) for surface acoustic waves (SAW), capable of measuring shock effects.Materials and methods. The theoretical part of the study was carried out using the mathematical theory of differential equations, theoretical mechanics, finite element analysis and elements of SAW theory. In the course of the work, the following methods of mathematical processing were applied: MATLAB, Mathcad, Maple, COMSOL Multiphysics, OOFELIE: Multiphysics, Bluehill3 software, CorelDRAW. Experimental studies were also conducted using the INSTRON 5985 floor automated test system.Results. An original design of MMA on a SAW capable of measuring shock effects in hundreds of g was proposed. A sensing element (SE) of the sensor was developed. An analysis of the plate materials for their use as part of the SAW-based MMA design showed that SE from the quartz ST-cut material has a wider range of measured accelerations and a higher sensitivity threshold than SE from the YX-128˚ cut-off lithium niobate material. Requirements were developed to increase the SE sensitivity threshold. Design requirements were developed, and an interdigital transducer (IDT) topology in the form of a ring resonator was proposed. The following output characteristics were assessed: sensitivity threshold, dynamic range and scale factor. In addition, a procedure was developed for calculating MMA on a SAW with a ring resonator on an anisotropic material. It was found that the developed SE is characterized by a high sensitivity threshold, a wide dynamic range and a low transverse sensitivity.Conclusion. The technique proposed for designing a sensing element for use in solid-state linear acceleration sensors facilitates, depending on technical requirements, selection of construction materials and sensor design. Due to the originality of the design and engineering solutions, the proposed accelerometer allows measurements to be carried out across a wide range of impact loads.

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Moreno, Vidal, Belén Curto, Juan Garcia-Esteban, Felipe Hernández Zaballos, Pablo Alonso Hernández, and F. Serrano. "HUSP: A Smart Haptic Probe for Reliable Training in Musculoskeletal Evaluation Using Motion Sensors." Sensors 19, no. 1 (December 29, 2018): 101. http://dx.doi.org/10.3390/s19010101.

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As a consequence of the huge development of IMU (Inertial Measurement Unit) sensors based on MEMS (Micro-Electromechanical Systems), innovative applications related to the analysis of human motion are now possible. In this paper, we present one of these applications: a portable platform for training in Ultrasound Imaging-based musculoskeletal (MSK) exploration in rehabilitation settings. Ultrasound Imaging (USI) in the diagnostic and treatment of MSK pathologies offers various advantages, but it is a strongly operator-dependent technique, so training and experience become of fundamental relevance for rehabilitation specialists. The key element of our platform is a replica of a real transducer (HUSP—Haptic US Probe), equipped with MEMS based IMU sensors, an embedded computing board to calculate its 3D orientation and a mouse board to obtain its relative position in the 2D plane. The sensor fusion algorithm used to resolve in real-time the 3D orientation (roll, pitch and yaw angles) of the probe from accelerometer, gyroscope and magnetometer data will be presented. Thanks to the results obtained, the integration of the probe into the learning platform allows a haptic sensation to be recreated in the rehabilitation trainee, with an attractive performance/cost ratio.

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Jia, Yu, Xueyong Wei, Jie Pu, Pengheng Xie, Tao Wen, Congsi Wang, Peiyuan Lian, Song Xue, and Yu Shi. "A Numerical Feasibility Study of Kinetic Energy Harvesting from Lower Limb Prosthetics." Energies 12, no. 20 (October 10, 2019): 3824. http://dx.doi.org/10.3390/en12203824.

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With the advancement trend of lower limb prosthetics headed towards bionics (active ankle and knee) and smart prosthetics (gait and condition monitoring), there is an increasing integration of various sensors (micro-electromechanical system (MEMS) accelerometers, gyroscopes, magnetometers, strain gauges, pressure sensors, etc.), microcontrollers and wireless systems, and power drives including motors and actuators. All of these active elements require electrical power. However, inclusion of a heavy and bulky battery risks to undo the lightweight advancements achieved by the strong and flexible composite materials in the past decades. Kinetic energy harvesting holds the promise to recharge a small on-board battery in order to sustain the active systems without sacrificing weight and size. However, careful design is required in order not to over-burden the user from parasitic effects. This paper presents a feasibility study using measured gait data and numerical simulation in order to predict the available recoverable power. The numerical simulations suggest that, depending on the axis, up to 10s mW average electrical power is recoverable for a walking gait and up to 100s mW average electrical power is achievable during a running gait. This takes into account parasitic losses and only capturing a fraction of the gait cycle to not adversely burden the user. The predicted recoverable power levels are ample to self-sustain wireless communication and smart sensing functionalities to support smart prosthetics, as well as extend the battery life for active actuators in bionic systems. The results here serve as a theoretical foundation to design and develop towards regenerative smart bionic prosthetics.

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Wang, Ying, Xiaofeng Zhao, and Dianzhong Wen. "Fabrication and Characteristics of a Three-Axis Accelerometer with Double L-Shaped Beams." Sensors 20, no. 6 (March 24, 2020): 1780. http://dx.doi.org/10.3390/s20061780.

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A three-axis accelerometer with a double L-shaped beams structure was designed and fabricated in this paper, consisting of a supporting body, four double L-shaped beams and intermediate double beams connected to two mass blocks. When applying acceleration to the accelerometer chip, according to the output voltage changes of three Wheatstone bridges constituted by twelve piezoresistors on the roots of the beams, the corresponding acceleration along three axes can be measured based on the elastic force theory and piezoresistive effect. To improve the characteristics of the three-axis accelerometer, we simulated how the width of the intermediate double beams affected the characteristics. Through optimizing the structure size, six chips with different widths of intermediate double beams were fabricated on silicon-on-insulator (SOI) wafers using micro-electromechanical systems (MEMS) technology and were packaged on printed circuit boards (PCB) by using an electrostatic bonding process and inner lead bonding technology. At room temperature and VDD = 5.0 V, the resulting accelerometer with an optimized size (w = 500 μm) realized sensitivities of 0.302 mV/g, 0.235 mV/g and 0.347 mV/g along three axes, with a low cross-axis sensitivity. This result provides a new strategy to further improve the characteristics of the three-axis accelerometer.

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Fan, Qigao, Biwen Sun, Yan Sun, Yaheng Wu, and Xiangpeng Zhuang. "Data Fusion for Indoor Mobile Robot Positioning Based on Tightly Coupled INS/UWB." Journal of Navigation 70, no. 5 (April 17, 2017): 1079–97. http://dx.doi.org/10.1017/s0373463317000194.

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This paper proposes a novel sensor fusion approach using Ultra Wide Band (UWB) wireless radio and an Inertial Navigation System (INS), which aims to reduce the accumulated error of low-cost Micro-Electromechanical Systems (MEMS) Inertial Navigation Systems used for real-time navigation and tracking of mobile robots in a closed environment. A tightly-coupled model of INS/UWB is established within the integrated positioning system. A two-dimensional kinematic model of the mobile robot based on kinematics analysis is then established, and an Auto-Regressive (AR) algorithm is used to establish third-order error equations of the gyroscope and the accelerometer. An Improved Adaptive Kalman Filter (IAKF) algorithm is proposed. The orthogonality judgment method of innovation is used to identify the “outliers”, and a covariance matching technique is introduced to judge the filter state. The simulation results show that the IAKF algorithm has a higher positioning accuracy than the KF algorithm and the UWB system. Finally, static and dynamic experiments are performed using an indoor experimental platform. The results show that the INS/UWB integrated navigation system can achieve a positioning accuracy of within 0·24 m, which meets the requirements for practical conditions and is superior to other independent subsystems.

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Jiang, Zhuangde. "Special issue: Micro-electromechanical systems (MEMS)." Frontiers of Mechanical Engineering 12, no. 4 (October 17, 2017): 457–58. http://dx.doi.org/10.1007/s11465-017-0492-4.

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Kartunov, Stefan. "Micro-Electromechanical Systems In The Ecology." Environment. Technology. Resources. Proceedings of the International Scientific and Practical Conference 2 (August 5, 2015): 163. http://dx.doi.org/10.17770/etr2011vol2.981.

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In the present paper a definition, a model for building of MEMS (micro-electromechanical systems), types, their advantages and disadvantages have been given. The elements and the components, from which they are built, the development and the prediction of market about them have been considered as well more important firms, that manufacture them. A classification of MEMS is made on the basis of their designation and the region, where they operate. A special place is separated on the application of MEMS in the ecology as well as concrete examples are indicated – developments of firms and own ones.

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McClure, S. S., L. D. Edmonds, R. Mihailovich, A. H. Johnston, P. Alonzo, J. DeNatale, J. Lehman, and C. Yui. "Radiation effects in micro-electromechanical systems (MEMS): RF relays." IEEE Transactions on Nuclear Science 49, no. 6 (December 2002): 3197–202. http://dx.doi.org/10.1109/tns.2002.805406.

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Rasras, Mahmoud, Ibrahim (Abe) M. Elfadel, and Ha Duong Ngo. "Editorial for the Special Issue on MEMS Accelerometers." Micromachines 10, no. 5 (April 29, 2019): 290. http://dx.doi.org/10.3390/mi10050290.

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Gyimesi, M., I. Avdeev, and D. Ostergaard. "Finite-Element Simulation of Micro-Electromechanical Systems (MEMS) by Strongly Coupled Electromechanical Transducers." IEEE Transactions on Magnetics 40, no. 2 (March 2004): 557–60. http://dx.doi.org/10.1109/tmag.2004.824592.

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Rivers, Montgomery C., Alexander A. Trusov, Sergei A. Zotov, and Andrei M. Shkel. "Micro IMU Utilizing Folded MEMS Approach." Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT) 2010, DPC (January 1, 2010): 001360–78. http://dx.doi.org/10.4071/2010dpc-wa23.

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In this paper, we propose a novel wafer-level approach for fabrication and 3-D integration of MEMS devices in miniature multi-axis assemblies of inertial, acoustic, and optical sensors. The approach is based on simultaneous fabrication of all sensors on the same substrate connected by flexible electrical interconnects, mechanical hinges and latches. A multi-axis sensor system is then obtained by folding the fabricated structures into 3-D cubes, pyramids, or other rigid shapes, and subsequently micro-welded. In the current work, we demonstrate feasibility of the folded cube approach for creation of miniature MEMS IMU with <1 cm3 volume. Design of the IMU consists of a folded cube or pyramid backbone structure with micromachined accelerometers and gyroscopes on its sidewalls. Silicon-on-insulator (SOI) wafers are used as a substrate for fabrication of both the inertial sensors and the folded backbone structure. Fabrication of the sensors consists of lithography, deep reactive ion etching (DRIE), and HF acid release of the inertial proof masses. Flexible polymer hinges connecting faces of the folded structures are defined on the same substrate and incorporate electrical interconnects. To provide rigidity to the assembled 3-D structure, interlocking silicon latches are fabricated along the edges of each sidewall, which are silicon-to-silicon welded after assembly. The approach allows for creating miniature multi-axis sensor systems without compromising performance of individual sensors. Gyroscopes integrated in the current folded cube IMU have experimentally demonstrated 3-dB bandwidth of 250 Hz and angle random walk (ARW) below 0.1 (deg/s)/rt-Hz in atmospheric pressure. Measured uncompensated temperature coefficients of gyroscope bias and scale factor were 313 (deg/h)/degC and 351ppm/degC, respectively. Accelerometers on the cube have been characterized, yielding a noise floor of 570μG/√Hz. Sensitivity of the accelerometers is measured at 40mV/G with a bandwidth of 100 Hz.

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Kranz, Michael, Tracy Hudson, Brian Grantham, and Michael Whitley. "Optical Cavity Interrogation for MEMS Accelerometers." Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT) 2015, DPC (January 1, 2015): 001649–70. http://dx.doi.org/10.4071/2015dpc-wp34.

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MEMS accelerometers utilizing electrostatic, piezoelectric, and magnetic proof mass displacement readout approaches have achieved success in both commercial- and defense-related applications. However, there is a desire for improved acceleration resolution suitable for navigation-grade applications. Optical readout of mechanical displacements has demonstrated high levels of resolution in macro-scale applications including precision movement and placement systems. In addition, optical techniques are common in high performance inertial sensors such as fiber optic gyros and ring laser gyros. Incorporating optical readout approaches into MEMS acceleration devices may yield sufficient resolution to achieve navigation-grade performance. Therefore, the U.S. Army AMRDEC is developing MEMS accelerometers based on optical cavity resonance readout. In the device, an optical cavity is formed between a MEMS proof mass and a reference reflector. A tunable laser excites the cavity on the edge of its resonance peak. Small displacements of the cavity from its rest position are detected by frequency shifts of the resonance, leading to high-resolution proof mass displacement detection and therefore high acceleration resolutions. This paper will present modeling associated with the design concept, as well predictions of device geometries and performance with the goal of achieving less than 1 micro-g bias instability and a velocity random walk of better than 0.2 micro-g/rt.Hz.

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Ashraf, Muhammad Waseem, Shahzadi Tayyaba, and Nitin Afzulpurkar. "Micro Electromechanical Systems (MEMS) Based Microfluidic Devices for Biomedical Applications." International Journal of Molecular Sciences 12, no. 6 (June 7, 2011): 3648–704. http://dx.doi.org/10.3390/ijms12063648.

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Ceylan, Halil, Kasthurirangan Gopalakrishnan, Sunghwan Kim, Peter C. Taylor, Maxim Prokudin, and Ashley F. Buss. "HIGHWAY INFRASTRUCTURE HEALTH MONITORING USING MICRO-ELECTROMECHANICAL SENSORS AND SYSTEMS (MEMS)." Journal of Civil Engineering and Management 19, Supplement_1 (January 9, 2014): S188—S201. http://dx.doi.org/10.3846/13923730.2013.801894.

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The development of novel “smart” structures by embedding sensing capabilities directly into the construction material during the manufacturing and deployment process has attracted significant attention in autonomous structural health monitoring (SHM). Micro-electromechanical systems (MEMS) provide vast improvements over existing sensing methods in the context of SHM of highway infrastructure systems, including improved system reliability, improved longevity and enhanced system performance, improved safety against natural hazards and vibrations, and a reduction in life cycle cost in both operating and maintaining the infrastructure. Advancements in MEMS technology and wireless sensor networks provide opportunities for long-term, continuous, real-time structural health monitoring of pavements and bridges at low cost within the context of sustainable infrastructure systems. Based on a comprehensive review of literature and vendor survey, the latest information available on off-the-shelf MEMS devices, as well as research prototypes, for bridge, pavement, and traffic applications are synthesized in this paper. In addition, the paper discusses the results of a laboratory study as well as a small-scale field study on the use of a wireless concrete monitoring system based on radio-frequency identification (RFID) technology and off-the-shelf MEMS-based temperature and humidity sensors.

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Li, Xiangyu, Jianping Hu, and Xiaowei Liu. "A High-Performance Digital Interface Circuit for a High-Q Micro-Electromechanical System Accelerometer." Micromachines 9, no. 12 (December 19, 2018): 675. http://dx.doi.org/10.3390/mi9120675.

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Micro-electromechanical system (MEMS) accelerometers are widely used in the inertial navigation and nanosatellites field. A high-performance digital interface circuit for a high-Q MEMS micro-accelerometer is presented in this work. The mechanical noise of the MEMS accelerometer is decreased by the application of a vacuum-packaged sensitive element. The quantization noise in the baseband of the interface circuit is greatly suppressed by a 4th-order loop shaping. The digital output is attained by the interface circuit based on a low-noise front-end charge-amplifier and a 4th-order Sigma-Delta (ΣΔ) modulator. The stability of high-order ΣΔ was studied by the root locus method. The gain of the integrators was reduced by using the proportional scaling technique. The low-noise front-end detection circuit was proposed with the correlated double sampling (CDS) technique to eliminate the 1/f noise and offset. The digital interface circuit was implemented by 0.35 μm complementary metal-oxide-semiconductor (CMOS) technology. The high-performance digital accelerometer system was implemented by double chip integration and the active interface circuit area was about 3.3 mm × 3.5 mm. The high-Q MEMS accelerometer system consumed 10 mW from a single 5 V supply at a sampling frequency of 250 kHz. The micro-accelerometer system could achieve a third harmonic distortion of −98 dB and an average noise floor in low-frequency range of less than −140 dBV; a resolution of 0.48 μg/Hz1/2 (@300 Hz); a bias stability of 18 μg by the Allen variance program in MATLAB.

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Jiang, Cheng Yu, Yang He, and Wei Zheng Yuan. "MEMS R&D Trends." Materials Science Forum 532-533 (December 2006): 181–84. http://dx.doi.org/10.4028/www.scientific.net/msf.532-533.181.

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Micro-Electromechanical Systems (MEMS) has been regarded as one of the most promising technologies for the 21st Century. Recently, some highlight areas attract great attention including Inertial MEMS, Optic MEMS, RF MEMS, BioMEMS, Power MEMS, and NEMS. The state of arts on MEMS research in China is briefly introduced and research activities in Northwestern Polytechnical University such as MEMS CAD tool, inertial MEMS devices, flexible substrate for MEMS integration, micro mirror, micro battery and three dimension measurement are demonstrated.

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Mahmoud, M. A., Mosab A. Alrahmani, and Hameed A. Alawadi. "Resonance patterns in cantilevered plates with micro electromechanical systems (MEMS) applications." Microsystem Technologies 25, no. 3 (July 28, 2018): 997–1016. http://dx.doi.org/10.1007/s00542-018-4052-6.

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Dorey, R. A. "Challenges in Integration of Piezoelectric Ceramics in Micro Electromechanical Systems." Materials Science Forum 606 (October 2008): 43–50. http://dx.doi.org/10.4028/www.scientific.net/msf.606.43.

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Lead zirconate titanate (PZT) thick films, a few tens of micrometres thick, are of technological interest for integration with microsystems to create micro electromechanical systems (MEMS) with high sensitivity and power output. This paper examines the challenges faced in integrating thick film PZT with other materials to create functional micro devices. Thermal, chemical and mechanical challenges associated with integration will be examined and potential solutions explored.

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Teslyuk, V. M., P. Yu Denysyuk, and T. V. Teslyuk. "DEVELOPMENT OF THE BASIC CAPACITIVE ACCELEROMETERS MODELS BASED ON THE VHDL-AMS LANGUAGE FOR THE CIRCUIT LEVEL OF COMPUTER-AIDED DESIGN." Ukrainian Journal of Information Technology 2, no. 1 (2020): 15–20. http://dx.doi.org/10.23939/ujit2020.02.015.

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In the article, the basic VHDL-AMS models of MEMS-based capacitive accelerometers were developed. The models were designed for two basic types of capacitive accelerometers, namely lamellar and counter-pivotal. The developed models allow us to determine the source of electrical capacitive accelerometers depending on the incoming mechanical and structural parameters and were constructed for MEMS CAD at the circuit level. The circuit level of MEMS development requires an analysis of the total integrated device electric circuits. For this purpose, all the MEMS components should be written in the specific software systems, which would be understandable for the software system. Taking into account that MEMS devices operate on different physical principles, certain difficulties may arise during the electrical analysis, that is, the work of mechanical or other devices need to be described with the help of electric parameters. In the general case, the method for building the VHDL-AMS model of the MEMS-based capacitive accelerometer is needed construction of the simplified mechanical model, and then a simplified electrical model. On the basis of the simplified models, the VHDL-AMS model of electromechanical MEMS devices has been developed. In the article, the method of automated synthesis and mathematical models using the VHDL-AMS language, which is based on the method of electrical analogies were described. They use systems of ordinary differential equations and partial differential equations to determine the relationships between input and output parameters. The sequence and quantity of used differential equations are determined by the physical principles of operation of the MEMS element and the number of energy transformations, which allows increasing the level of automation of synthesis operations compared to existing methods. The results of the basic lamellar and counter-pivotal capacitive accelerometers are also shown. This enables to conduct research and analysis of its parameters and investigate the output electric parameters dependence on the input mechanical ones.

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Altintas, Zeynep. "Editorial for the Special Issue on Biosensors and MEMS-Based Diagnostic Applications." Micromachines 12, no. 3 (February 25, 2021): 229. http://dx.doi.org/10.3390/mi12030229.

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Feng, Xian Zhang, Liang Ji Chen, and Jun Wei Cheng. "Application and Prospects of Packaging Technology of MEMS." Key Engineering Materials 460-461 (January 2011): 274–79. http://dx.doi.org/10.4028/www.scientific.net/kem.460-461.274.

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Micro-electromechanical systems is called MEMS for short, it is the product of mutual integration for the micro-electronics and micro-mechanics, which covers mechanical, electrical, physical, biological and other modern technology. MEMS packaging is a key technology that has been developed based on electronic package technology. In order to strengthen the development of packaging process of MEMS, in particular, which are low cost, materials and packaging technology and has an ideal effect. The characteristics of MEMS packaging technology based on MEMS technologies are introduced, and the future development tendency and application of MEMS device packaging are previewed in this dissertation.

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Jayne, Rachael K., Thomas J. Stark, Jeremy B. Reeves, David J. Bishop, and Alice E. White. "Dynamic Actuation of Soft 3D Micromechanical Structures Using Micro-Electromechanical Systems (MEMS)." Advanced Materials Technologies 3, no. 3 (January 22, 2018): 1700293. http://dx.doi.org/10.1002/admt.201700293.

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Quang, Khanh Duong, Huong Vuong Thi, and Anh Luu Van. "Identification of Vibration Parameters of Mechanical System Utilizing Low-Cost MEMS Accelerometers." Applied Mechanics and Materials 894 (September 2019): 1–8. http://dx.doi.org/10.4028/www.scientific.net/amm.894.1.

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Multi-axial mechanical systems commonly encounter the problem of vibration while attempting to drive machining systems at high speed. Many effective methods based on feed-forward and feedback control have been proposed and applied for vibration reduction. In order to design controllers all methods require the exact knowledge of system parameters: vibration frequency and damping ratio. In recent years, low-cost Micro Electro Mechanical Systems (MEMS) accelerometers have been used for many applications in industry. This paper presents the advantage of low cost MEMS accelerometer to identify vibration parameters of mechanical systems in comparison to conventional expensive devices.

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Zhang, Ping, Chun Lei Sun, and Qing’en Li. "Study and Simulation of Electro-Mechanical Sensor." Advanced Materials Research 282-283 (July 2011): 440–43. http://dx.doi.org/10.4028/www.scientific.net/amr.282-283.440.

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The relevant introduction development of the micro electromechanical systems (MEMS) is carried out in this paper. The pressure sensor is an important component of micro electromechanical systems (MEMS). Many aspects of the pressure sensor are studied，simulated and analyzed by us. The principle of work of the pressure sensor is elaborated in details and the material selection is studied also. The correlative performance indexes, such as precision and the repeatability of pressure sensor, are explored. In the following part of this paper, through the finite element simulation software, the analytic study of some performance parameters of the sensor chip is carried out in detail. Through the analysis, we find that the sensor designed here has many advantages.

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Takinoue, Masahiro, and Ryuji Kawano. "Editorial on the Special Issue on Recent Advances of Molecular Machines and Molecular Robots." Micromachines 11, no. 12 (November 24, 2020): 1031. http://dx.doi.org/10.3390/mi11121031.

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Molecular machines and molecular robots are a highly interdisciplinary research field including material science, chemistry, biotechnology, biophysics, soft matter physics, micro-electromechanical systems (MEMS), and computer science [...]

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Chernyavsky, D. I., and D. D. Chernyavsky. "Kinematic calculation of micro mirror elements in micro electro-mechanical systems (MEMS)." Omsk Scientific Bulletin, no. 175 (2021): 5–11. http://dx.doi.org/10.25206/1813-8225-2021-175-5-11.

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Currently, the development and application of micro machines is an important direction in the development of microelectromechanical systems (MEMS) technologies. In these devices, electromechanical energy conversion occurs, as a result of which forces arise that carry out mechanical work within the dimensions of the microcircuit case. The paper considers the kinematic calculation of the design of a micromirror with a reflective layer of high optical quality of the surface for deflecting the reflected laser beam. By changing the angle of inclination of the micromirror, the laser beam enters the various input channels of the optical sensor. In this case, a control signal is generated for the further operation of the microcircuit. Thus, the micromirror performs the function of a switch of input optical channels, connecting in various combinations certain input or output elements of the microcircuit for further processing. The article presents the calculation of the kinematic parameters of the mechanical structure of the micro mirror. Practical recommendations are given for choosing the optimal range of variation of the micro mirror tilt angles in order to increase the strength of its structure, as well as to reduce the power of the mechanical drive of the micro machine required to change the micro mirror tilt angles

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Liu, Bendong, Xinrui Li, Jiahui Yang, and Guohua Gao. "Recent Advances in MEMS-Based Microthrusters." Micromachines 10, no. 12 (November 26, 2019): 818. http://dx.doi.org/10.3390/mi10120818.

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With the development of micro/nano satellites and formation flying, more advanced spatial propulsion technology is required. In this paper, a review of microthrusters developments that based on micro electromechanical systems (MEMS) technology adopted in microthrusters is summarized. The microthrusters in previous research are classified and summarized according to the types of propellants and the working principles they utilized. The structure and the performance including the thrust, the impulse and the specific impulse of various microthrusters are compared. In addition, the advantages and the disadvantages of these microthrusters presented in the paper are discussed.

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Auciello, Orlando, and Dean M. Aslam. "Review on advances in microcrystalline, nanocrystalline and ultrananocrystalline diamond films-based micro/nano-electromechanical systems technologies." Journal of Materials Science 56, no. 12 (January 25, 2021): 7171–230. http://dx.doi.org/10.1007/s10853-020-05699-9.

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AbstractA comprehensive review is presented on the advances achieved in past years on fundamental and applied materials science of diamond films and engineering to integrate them into new generations of microelectromechanical system (MEMS) and nanoelectromechanical systems (NEMS). Specifically, the review focuses on describing the fundamental science performed to develop thin film synthesis processes and the characterization of chemical, mechanical, tribological and electronic properties of microcrystalline diamond, nanocrystalline diamond and ultrananocrystalline diamond films technologies, and the research and development focused on the integration of the diamond films with other film-based materials. The review includes both theoretical and experimental work focused on optimizing the films synthesis and the resulting properties to achieve the best possible MEMS/NEMS devices performance to produce new generation of MEMS/NEMS external environmental sensors and energy generation devices, human body implantable biosensors and energy generation devices, electron field emission devices and many more MEMS/NEMS devices, to produce transformational positive impact on the way and quality of life of people worldwide.

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Cho, Chong Du, and Byung Ha Lee. "Analysis of Electro-Statically Driven Micro-Electro-Mechanical Systems." Key Engineering Materials 306-308 (March 2006): 1247–52. http://dx.doi.org/10.4028/www.scientific.net/kem.306-308.1247.

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In this paper, a methodology of modeling and simulating the electro-statically driven micro-electromechanical systems (MEMS) is presented, utilizing topography data with an arbitrary structure. In the methodology, the mask layout and process recipe of a device are first generated and the model then discretized by an auto-mesh generation for the finite element analysis. Finally the analysis is performed to solve the Laplace and the dynamic equation at a time. The methodology is applied to an electro-statically driven comb-drive as a test vehicle for verification.

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Han, Ke, Xubing Guo, Stewart Smith, Zhongliang Deng, and Wuyu Li. "Novel High-Capacitance-Ratio MEMS Switch: Design, Analysis and Performance Verification." Micromachines 9, no. 8 (August 6, 2018): 390. http://dx.doi.org/10.3390/mi9080390.

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This paper proposes a novel high-capacitance-ratio radio frequency micro-electromechanical systems (RF MEMS) switch. The proposed RF MEMS mainly consists of serpentine flexure MEMS metallic beam, comprised of coplanar waveguide (CPW) transmission line, dielectric and metal-insulator-metal (MIM) floating metallic membrane. Comparing the proposed high-capacitance-ratio MEMS switch with the ones in available literature, an acceptable insertion loss insulation, acceptable response time and high capacitance ratio (383.8) are achieved.

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Chen, Z. "Geometric nonlinearity and mechanical anisotropy in strained helical nanoribbons." Nanoscale 6, no. 16 (2014): 9443–47. http://dx.doi.org/10.1039/c4nr00336e.

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Fabrication and synthesis of helical nanoribbons have received increasing attention because of the broad applications of helical nanostructures in nano-elecromechanical/micro-electromechanical systems (NEMS/MEMS), sensors, active materials, drug delivery,etc.

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Chalmers, Peggy. "Relay Races." Mechanical Engineering 123, no. 01 (January 1, 2001): 66–68. http://dx.doi.org/10.1115/1.2001-jan-6.

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This article illustrates that micro-electro-mechanical systems (MEMS) promises relief to designers seeking a smaller electromechanical option. A MEMS relay could offer the true ON/OFF characteristics of its conventional electromechanical equivalent in a device small enough to be integrated on the same die with semiconductor circuits. Raytheon Co.’s radio and terminal business in Fort Wayne, Ind., a unit of the Command, Control and Communication Systems division, believes MEMS will help produce highly efficient, software-controlled, digital radios for the military. The MEMS devices would replace solid-state switches and their associated components used to switch frequencies in communications systems. With fewer components, size, weight, and power consumption will shrink. The pursuit of a MEMS relay has developers experimenting with various actuating mechanisms and researching the materials and fabrication challenges associated with those mechanisms. Radant Technology plans to incorporate the Analog Devices design in a balloon-borne radar antenna that will scan for incoming cruise missiles from a height of 15,000 feet.

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Bedon, Chiara, Enrico Bergamo, Matteo Izzi, and Salvatore Noè. "Prototyping and Validation of MEMS Accelerometers for Structural Health Monitoring—The Case Study of the Pietratagliata Cable-Stayed Bridge." Journal of Sensor and Actuator Networks 7, no. 3 (July 27, 2018): 30. http://dx.doi.org/10.3390/jsan7030030.

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In recent years, thanks to the simple and yet efficient design, Micro Electro-Mechanical Systems (MEMS) accelerometers have proven to offer a suitable solution for Structural Health Monitoring (SHM) in civil engineering applications. Such devices are typically characterised by high portability and durability, as well as limited cost, hence resulting in ideal tools for applications in buildings and infrastructure. In this paper, original self-made MEMS sensor prototypes are presented and validated on the basis of preliminary laboratory tests (shaking table experiments and noise level measurements). Based on the well promising preliminary outcomes, their possible application for the dynamic identification of existing, full-scale structural assemblies is then discussed, giving evidence of their potential via comparative calculations towards past literature results, inclusive of both on-site, Experimental Modal Analysis (EMA) and Finite Element Analytical estimations (FEA). The full-scale experimental validation of MEMS accelerometers, in particular, is performed using, as a case study, the cable-stayed bridge in Pietratagliata (Italy). Dynamic results summarised in the paper demonstrate the high capability of MEMS accelerometers, with evidence of rather stable and reliable predictions, and suggest their feasibility and potential for SHM purposes.

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DeGaspari, John. "MEMS' Rocky Road." Mechanical Engineering 124, no. 06 (June 1, 2002): 38–41. http://dx.doi.org/10.1115/1.2002-jun-1.

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This article highlights that there is potential demand for microelectromechanical systems (MEMS) devices across a range of industries. In 2002, the five leading applications of MEMS will use 21.5 million disposable blood pressure sensors, 28.7 million manifold absolute pressure sensors for engines, 85 million packaged airbag accelerometers, 425 million inkjet printer heads, and a whopping 1.58 billion read/write magnetic heads for computer hard drives. In MEMS, process is driven by design, so it is important for companies seeking to commercialize a micro device to evaluate the capabilities of a foundry. Industry groups are starting to recognize standardization as an issue, and are focusing on fabrication. The MEMS Industry Group, a trade association based in Pittsburgh, identified standardization as a key challenge in its 2001 annual report. The Group plans to issue a report on foundries and fabrication sooner.

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Ruszaj, Adam. "Additive methods in micro and nano manufacturing technologies." Mechanik 92, no. 5-6 (May 27, 2019): 386–90. http://dx.doi.org/10.17814/mechanik.2019.5-6.43.

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In 1959 R.P. Feynman has presented the concept and strategy of micro- and nanotechnology development. Their introduction to the practice took place after working out the scanning tunneling microscopy (1981) and atomic force microscopy (1985). In the further development of micro- and nanotechnology the micro and nano electromechanical systems (MEMS, NEMS) have been worked. MEMS and NEMS are widely applied in majority of modern equipment and the production of the equipment increases about 17÷20% per year since 1990s. MEMS and NEMS manufacture usually is a difficult technological problem because of small dimensions and complex outside and inside structures. In such cases the application of additive manufacturing processes can be very promising. In the paper the possibilities of additive manufacturing processes applications, mainly in microtechnologies, is presented.

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Sasaki, Tomohiro, Koichi Kajiwara, Takuzo Yamashita, and Takuya Toyoshi. "Study on Performance Evaluation of MEMS Sensors and Data Integration Methods for Expected Use to Determine Damage Degrees of Existing Structures." Journal of Disaster Research 12, no. 5 (September 27, 2017): 858–67. http://dx.doi.org/10.20965/jdr.2017.p0858.

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The shake table test of small-scaled steel frame structure was conducted using large-scale earthquake simulator at the National Research Institute for Earth Science and Disaster Resilience (NIED) in Tsukuba, Ibaragi. This paper presents the performance evaluation of Micro Electro Mechanical Systems (MEMS) type accelerometers, which are recently being used in various fields, comparing with the conventional servo type accelerometers. In addition, this paper discussed the integration method of the measured acceleration into displacements, which is suitable for structural damage evaluation due to strong earthquakes.

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Asadnia, Mohsen, Ajay Giri Prakash Kottapalli, Jianmin Miao, Majid Ebrahimi Warkiani, and Michael S. Triantafyllou. "Artificial fish skin of self-powered micro-electromechanical systems hair cells for sensing hydrodynamic flow phenomena." Journal of The Royal Society Interface 12, no. 111 (October 2015): 20150322. http://dx.doi.org/10.1098/rsif.2015.0322.

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Using biological sensors, aquatic animals like fishes are capable of performing impressive behaviours such as super-manoeuvrability, hydrodynamic flow ‘vision’ and object localization with a success unmatched by human-engineered technologies. Inspired by the multiple functionalities of the ubiquitous lateral-line sensors of fishes, we developed flexible and surface-mountable arrays of micro-electromechanical systems (MEMS) artificial hair cell flow sensors. This paper reports the development of the MEMS artificial versions of superficial and canal neuromasts and experimental characterization of their unique flow-sensing roles. Our MEMS flow sensors feature a stereolithographically fabricated polymer hair cell mounted on Pb(Zr 0.52 Ti 0.48 )O 3 micro-diaphragm with floating bottom electrode. Canal-inspired versions are developed by mounting a polymer canal with pores that guide external flows to the hair cells embedded in the canal. Experimental results conducted employing our MEMS artificial superficial neuromasts (SNs) demonstrated a high sensitivity and very low threshold detection limit of 22 mV/(mm s −1 ) and 8.2 µm s −1 , respectively, for an oscillating dipole stimulus vibrating at 35 Hz. Flexible arrays of such superficial sensors were demonstrated to localize an underwater dipole stimulus. Comparative experimental studies revealed a high-pass filtering nature of the canal encapsulated sensors with a cut-off frequency of 10 Hz and a flat frequency response of artificial SNs. Flexible arrays of self-powered, miniaturized, light-weight, low-cost and robust artificial lateral-line systems could enhance the capabilities of underwater vehicles.

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D’Alessandro, Antonino, Salvatore Scudero, and Giovanni Vitale. "A Review of the Capacitive MEMS for Seismology." Sensors 19, no. 14 (July 12, 2019): 3093. http://dx.doi.org/10.3390/s19143093.

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MEMS (Micro Electro-Mechanical Systems) sensors enable a vast range of applications: among others, the use of MEMS accelerometers for seismology related applications has been emerging considerably in the last decade. In this paper, we provide a comprehensive review of the capacitive MEMS accelerometers: from the physical functioning principles, to the details of the technical precautions, and to the manufacturing procedures. We introduce the applications within seismology and earth sciences related disciplines, namely: earthquake observation and seismological studies, seismic surveying and imaging, structural health monitoring of buildings. Moreover, we describe how the use of the miniaturized technologies is revolutionizing these fields and we present some cutting edge applications that, in the very last years, are taking advantage from the use of MEMS sensors, such as rotational seismology and gravity measurements. In a ten-year outlook, the capability of MEMS sensors will certainly improve through the optimization of existing technologies, the development of new materials, and the implementation of innovative production processes. In particular, the next generation of MEMS seismometers could be capable of reaching a noise floor under the lower seismic noise (few tenths of ng/ H z ) and expanding the bandwidth towards lower frequencies (∼0.01 Hz).

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Maniatis, Georgios, Trevor Hoey, Rebecca Hodge, Dieter Rickenmann, and Alexandre Badoux. "Inertial drag and lift forces for coarse grains on rough alluvial beds measured using in-grain accelerometers." Earth Surface Dynamics 8, no. 4 (December 21, 2020): 1067–99. http://dx.doi.org/10.5194/esurf-8-1067-2020.

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Abstract. Quantifying the force regime that controls the movement of a single grain during fluvial transport has historically proven to be difficult. Inertial micro-electromechanical system (MEMS) sensors (sensor assemblies that mainly comprise micro-accelerometers and gyroscopes) can used to address this problem using a “smart pebble”: a mobile inertial measurement unit (IMU) enclosed in a stone-like assembly that can measure directly the forces on a particle during sediment transport. Previous research has demonstrated that measurements using MEMS sensors can be used to calculate the dynamics of single grains over short time periods, despite limitations in the accuracy of the MEMS sensors that have been used to date. This paper develops a theoretical framework for calculating drag and lift forces on grains based on IMU measurements. IMUs were embedded a spherical and an ellipsoidal grain and used in flume experiments in which flow was increased until the grain moved. Acceleration measurements along three orthogonal directions were then processed to calculate the threshold force for entrainment, resulting in a statistical approximation of inertial impulse thresholds for both the lift and drag components of grain inertial dynamics. The ellipsoid IMU was also deployed in a series of experiments in a steep stream (Erlenbach, Switzerland). The inertial dynamics from both sets of experiments provide direct measurement of the resultant forces on sediment particles during transport, which quantifies (a) the effect of grain shape and (b) the effect of varied-intensity hydraulic forcing on the motion of coarse sediment grains during bedload transport. Lift impulses exert a significant control on the motion of the ellipsoid across hydraulic regimes, despite the occurrence of higher-magnitude and longer-duration drag impulses. The first-order statistical generalisation of the results suggests that the kinetics of the ellipsoid are characterised by low- or no-mobility states and that the majority of mobility states are controlled by lift impulses.

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Journal articles on the topic 'Micro Electromechanical Systems (MEMS) accelerometers'

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