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Journal articles on the topic 'Micro-measurement'

Author: Grafiati

Published: 4 June 2021

Last updated: 1 February 2022

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1

AOKI, Jun, Wei GAO, and Satoshi KIYONO. "High-Speed Measurement of Large Area Micro-Structured Surfaces(Nano/micro measurement and intelligent instrument)." Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21 2005.2 (2005): 381–84. http://dx.doi.org/10.1299/jsmelem.2005.2.381.

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2

GOTO, Shigeaki, Takemi Asai, Yoshikazu Arai, and Wei Gao. "D33 Profile Measurement of Micro-structured Surfaces by Using SPMs(Nano/micro measurement and intelligent instruments)." Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21 2009.5 (2009): 787–90. http://dx.doi.org/10.1299/jsmelem.2009.5.787.

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3

KHAJORNRUNGRUANG, Panart, Takashi MIYOSHI, Yasuhiro TAKAYA, Takashi HARADA, and Soichiro ISAGO. "On-Machine Tool Measurement for Cutting-Edge Profile of Micro Endmill using Laser Diffraction(Nano/micro measurement and intelligent instrument)." Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21 2005.2 (2005): 351–56. http://dx.doi.org/10.1299/jsmelem.2005.2.351.

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4

Hinagawa, Hideaki, Makoto Tagawa, Yuki Tsutsumi, et al. "H4 Micro Satellite for Micro Debris' Measurement." Proceedings of the Space Engineering Conference 2010.19 (2011): _H4–1_—_H4–3_. http://dx.doi.org/10.1299/jsmesec.2010.19._h4-1_.

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5

Li, Yonghong, Wendong Zhang, Haifeng Dong, Jijun Xiong, Jun Liu, and Tao Guo. "Micro storage measurement unit." Microelectronic Engineering 61-62 (July 2002): 1039–47. http://dx.doi.org/10.1016/s0167-9317(02)00587-7.

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6

Moronuki, Nobuyuki. "Micro Physics. Dynamic Measurement of Micro-mechanical-systems." Journal of the Robotics Society of Japan 14, no. 8 (1996): 1109–12. http://dx.doi.org/10.7210/jrsj.14.1109.

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7

Shinada, Hiroyuki. "Dynamic Micro-Magnetic Field Measurement." IEEJ Transactions on Fundamentals and Materials 112, no. 2 (1992): 87–90. http://dx.doi.org/10.1541/ieejfms1990.112.2_87.

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8

Zhao, Bing, and Anand Asundi. "Micro-measurement using grating microscopy." Sensors and Actuators A: Physical 80, no. 3 (2000): 256–64. http://dx.doi.org/10.1016/s0924-4247(99)00289-7.

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9

Yabusaki, Hitoshi, Masamichi Oishi, Haruyuki Kinoshita, and Marie Oshima. "P-05 QUANTITATIVE MEASUREMENT OF DISTRIBUTION OF RED BLOOD CELLS IN MICRO FLOW USING MICRO PTV." Proceedings of the Asian Pacific Conference on Biomechanics : emerging science and technology in biomechanics 2007.3 (2007): S93. http://dx.doi.org/10.1299/jsmeapbio.2007.3.s93.

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10

Ito, So, Hirotaka Kikuchi, Yuanliu Chen, et al. "A Micro-Coordinate Measurement Machine (CMM) for Large-Scale Dimensional Measurement of Micro-Slits." Applied Sciences 6, no. 5 (2016): 156. http://dx.doi.org/10.3390/app6050156.

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11

Ogura, Ichiro, and Yuichi Okazaki. "Development of Micro Probe System for Micro Measurement Center." International Journal of Automation Technology 3, no. 4 (2009): 471–77. http://dx.doi.org/10.20965/ijat.2009.p0471.

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We developed two types of contact probe for micromeasurement. The first type -a dynamic motion probe with a probe ball 200μm in diameter- is driven in a circle by piezoelectric (PZT) actuators at a radius of 3μm and frequency of 10 Hz. The signal noise ratio indicates that the probe’s angle resolution is 1° and contact detection resolution of 50 nm. The second type of contact probe is static and developed for compact design. In addition to having a structure similar to earlier probes developed with a crossbeam plate, this one has a measurement ball glued to the front and back of the center pla

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12

TAKEISHI, Toshiki, Xu BIN, Yuki SHIMIZU, and Wei GAO. "3389 Wavelet analysis for precision measurement of a micro-part." Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21 2011.6 (2011): _3389–1_—_3389–4_. http://dx.doi.org/10.1299/jsmelem.2011.6._3389-1_.

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13

SHIBUYA, Atsushi, Yoshikazu ARAI, Wei GAO, and Satoshi KIYONO. "Testing of a Probe for Profile Measurement of Aspherical Surface(Nano/micro measurement and intelligent instrument)." Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21 2005.2 (2005): 331–34. http://dx.doi.org/10.1299/jsmelem.2005.2.331.

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14

MURAKAMI, Hiroshi, Akio KATSUKI, Hiromichi ONIKURA, et al. "D28 Development of a Measuring System for Micro Hole Accuracy Using an Optical Fiber Probe : Evaluation of Measurement Repeatability(Nano/micro measurement and intelligent instruments)." Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21 2009.5 (2009): 763–68. http://dx.doi.org/10.1299/jsmelem.2009.5.763.

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15

NAKAJIMA, Akihei, Yuji FURUKAWA, and Tadashi MORIYA. "Development of a New Traveling Wave Ultrasonic Micro Motor : Application to Catheter in Micro Blood Vessels(Nano/micro measurement and intelligent instrument)." Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21 2005.2 (2005): 371–74. http://dx.doi.org/10.1299/jsmelem.2005.2.371.

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16

Di, Yan Bin, and Ying Miao. "Micro Flow Sensor Based on Frequency Measurement of Micro Whistles." Advanced Materials Research 468-471 (February 2012): 2061–64. http://dx.doi.org/10.4028/www.scientific.net/amr.468-471.2061.

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In this work, several millimeter sized micro whistles have been tested as potential frequency analog gas flow sensors. The characteristic curves of the whistles were systematically investigated as a function of geometrical dimensions, the kind of gas applied, and temperature. Both a micro¬phone and a PVDF foil were employed to record the frequencies. The relation be¬tween oscillation frequency and volume flow rate only shows a weak function of fluid properties and temperature. At a given flow rate, the difference of argon and nitrogen is 120 Hz on average, which is corresponding to 1.4 %. For

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17

Huh, Yong Hak, Dong Iel Kim, and Chang Doo Kee. "Measurement of Continuous Micro-Tensile Strain Using Micro-ESPI Technique." Key Engineering Materials 297-300 (November 2005): 53–58. http://dx.doi.org/10.4028/www.scientific.net/kem.297-300.53.

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To determine the micro-mechanical properties for micro/nano materials, it may be essential to measure the strain/deformation during micro-mechanical testing. Therefore, in this study, continuous measurement of in-plane tensile strain in micro-sized specimens of thin film materials was introduced using the micro-ESPI technique. TiN and Au thin films 1 and 0.47µm thick, respectively, were deposited on the silicon wafer and fabricated into the micro-sized tensile specimens by the electromachining process. The micro-tensile loading system and micro-ESPI system were developed to measure the tensile

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18

Garvey, Julie, David Newport, Fereydoun Lakestani, Maurice Whelan, and Shiju Joseph. "Full field measurement at the micro-scale using micro-interferometry." Microfluidics and Nanofluidics 5, no. 1 (2007): 77–87. http://dx.doi.org/10.1007/s10404-007-0228-6.

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19

KOMORI, Masaharu, Aizoh KUBO, Yoshihiro ODA, and Yukihiro MATSUOKA. "Noncontact Measuring Method of Pitch(Nano/micro measurement and intelligent instrument)." Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21 2005.2 (2005): 335–38. http://dx.doi.org/10.1299/jsmelem.2005.2.335.

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20

KHAJORNRUNGRUANG, Panart, Keiichi KIMURA, Hiroshi SUZUKI, and Keisuke SUZUKI. "1516 Non-Contact Micro Cutting Tool Diameter Measurement using Laser Diffraction." Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21 2015.8 (2015): _1516–1_—_1516–4_. http://dx.doi.org/10.1299/jsmelem.2015.8._1516-1_.

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21

Jian-Gang, Lu, Liu Yu-Cong, Ye Xin-Xin, Shi Ying-zi, Gao Hua, and Yang Jiang. "Image Based Micro Flow Measurement Technology." Information Technology Journal 12, no. 19 (2013): 4901–5. http://dx.doi.org/10.3923/itj.2013.4901.4905.

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22

ANDO, Yasuhisa, and Naoki SHIRAISHI. "Friction force Measurement using Micro Dvices." Proceedings of the JSME annual meeting 2004.4 (2004): 113–14. http://dx.doi.org/10.1299/jsmemecjo.2004.4.0_113.

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23

Helmli, F., R. Danzl, and S. Scherer. "Optical Measurement of Micro Cutting Tools." Journal of Physics: Conference Series 311 (August 19, 2011): 012003. http://dx.doi.org/10.1088/1742-6596/311/1/012003.

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24

Fan, Kuang-Chao, Jhih-Yuan Chen, Ching-Hua Wang, and Wen-Chueh Pan. "Precisionin situvolume measurement of micro droplets." Journal of Optics A: Pure and Applied Optics 11, no. 1 (2008): 015503. http://dx.doi.org/10.1088/1464-4258/11/1/015503.

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25

SAKAI, Keiji. "Micro-rheology Measurement of Soft Materials." Journal of the Japan Society for Precision Engineering 73, no. 8 (2007): 871–74. http://dx.doi.org/10.2493/jjspe.73.871.

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26

MURAKAMI, Hiroshi, Akio KATSUKI, Hiromichi ONIKURA, and Takao SAJIMA. "Precise Measurement of Micro Hole Accuracy." Journal of the Japan Society for Precision Engineering 78, no. 6 (2012): 465–68. http://dx.doi.org/10.2493/jjspe.78.465.

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27

HAN Bao-zhang, 韩宝章, and 李亦军 LI Yi-jun. "Laser micro angular deviation measurement system." Chinese Optics 10, no. 2 (2017): 234–40. http://dx.doi.org/10.3788/co.20171002.0234.

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28

Haifeng Dong and Wendong Zhang. "Micro inertial measurement system from China." IEEE Instrumentation & Measurement Magazine 5, no. 1 (2002): 16–19. http://dx.doi.org/10.1109/5289.988733.

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29

Arai, Yasuhiko, Masaki Ando, Sho Kanameishi, and Shunsuke Yokozeki. "Micro 3D measurement method using SEM." MAPAN 26, no. 1 (2011): 69–78. http://dx.doi.org/10.1007/s12647-011-0007-4.

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30

Li, Qingrun, Shudong Wang, Yun Chen, Hao Wang, and Shen Liu. "Design of micro resistance measurement system." Journal of Physics: Conference Series 1750 (January 2021): 012072. http://dx.doi.org/10.1088/1742-6596/1750/1/012072.

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31

NOMURA, Mitsuyoshi, Atsushi KATAOKA, Takahiro KAWASHIMA, et al. "A35 Study on Micro End Milling Using Precise Cutting Force Measurement(M4 processes and micro-manufacturing for science)." Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21 2009.5 (2009): 639–42. http://dx.doi.org/10.1299/jsmelem.2009.5.639.

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32

TANIGUCHI, Nobuyuki. "Measurement and Evaluation of Micromechanisms. Flow Measurement for Micro-engineering." Journal of the Japan Society for Precision Engineering 63, no. 3 (1997): 341–44. http://dx.doi.org/10.2493/jjspe.63.341.

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33

Huh, Yong Hak, Dong Iel Kim, Dong Jin Kim, Philip Park, Chang Doo Kee, and Jun Hyub Park. "Application of Micro-ESPI Technique for Measurement of Micro-Tensile Properties." Key Engineering Materials 270-273 (August 2004): 744–49. http://dx.doi.org/10.4028/www.scientific.net/kem.270-273.744.

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34

Jeong, S. R., T. D. Dang, J. H. Choi, G. M. Kim, and C. W. Park. "Experimental Study on Micro PIV Measurement using a Micro Liquid Lens." Journal of the Korean Society of Visualization 8, no. 3 (2010): 22–28. http://dx.doi.org/10.5407/jksv.2010.8.3.022.

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35

Deng, Jiang Hai, Wen Jun Yan, and Qiang Yang. "A Micro-Resistance Measurement Based Design Approach of Digital Micro-Ohmmeter." Advanced Materials Research 339 (September 2011): 36–42. http://dx.doi.org/10.4028/www.scientific.net/amr.339.36.

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This paper presents a novel design solution of digital micro-ohmmeter based on the micro-resistance measurements. Through the system analysis, two key factors which have impacts on the measurement accuracy are identified: constant-current source circuit and A/D converter. Therefore, we suggest a design approach to improve the common constant-current source circuit to obtain enhanced system linearity, stability, precision and robustness and use high resolution A/D converter to ensure converting accurately. The proposed design approach is assessed and demonstrates that the load disturbance can b

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36

Lee, Jeou Long, Y. Lin, and Y. K. Shen. "Warpage Measurement of a Micro Electrical Fan on Micro-Injection Molding." Applied Mechanics and Materials 184-185 (June 2012): 1651–54. http://dx.doi.org/10.4028/www.scientific.net/amm.184-185.1651.

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This study characterizes warpage of a micro-injection molded micro electrical fan using the Michelson interference method. This study conducts experiments to analyze different polymers-polypropylene (PP), polyamide (PA), acrylonitrile-butadiene styrene (ABS), ABS+ polycarbonate (PC), and polyoxymethylene (POM)-process parameters, such as mold temperature, injection temperature, injection pressure, injection time, packing time, and packing pressure, for a micro electrical fan. To obtain the optimum result (minimum warpage), this study assesses the effect (warpage) of each material on micro-inje

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37

Pan, C. T., H. S. Chuang, C. Y. Cheng, and C. T. Yang. "Micro-flow measurement with a laser diode micro-particle image velocimetry." Sensors and Actuators A: Physical 116, no. 1 (2004): 51–58. http://dx.doi.org/10.1016/j.sna.2004.03.033.

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38

Kujawińska, M. "Modern optical measurement station for micro-materials and micro-elements studies." Sensors and Actuators A: Physical 99, no. 1-2 (2002): 144–53. http://dx.doi.org/10.1016/s0924-4247(01)00911-6.

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39

KOBAYASHI, Mitsutoshi, Terutake HAYASHI, and Yasuhiro TAKAYA. "D31 Evaluation of Unstable Behavior in Micro-probe Trapped by Optical Radiation Pressure(Nano/micro measurement and intelligent instruments)." Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21 2009.5 (2009): 777–80. http://dx.doi.org/10.1299/jsmelem.2009.5.777.

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40

CHOI, Je-Eun, and Masahiro TAKEI. "21420 The concept of fabrication of Micro-channel and Measurement of flow." Proceedings of Conference of Kanto Branch 2008.14 (2008): 419–20. http://dx.doi.org/10.1299/jsmekanto.2008.14.419.

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41

Fan, Yan Bin, Qing Hua Lu, and Xian Min Zhang. "Micro-Displacement Measurement with High Accuracy for Micro-Motion Stage Based on Computer Microvision." Key Engineering Materials 455 (December 2010): 76–80. http://dx.doi.org/10.4028/www.scientific.net/kem.455.76.

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The micro-motion stages are critically important in modern manufacturing technology. In this paper, an integrated approach for measuring micro-displacement of micro-motion stage that incorporates micro-motion measurement algorithm into the computer microvision is proposed. At first, the basic principle of the computer microvision measurement is analyzed. Then, an algorithm for micro-motion measurement is proposed. Finally, the micro-displacement of the micro-motion stage is measured using the integrated approach. The maximal bias of this proposed combined approach reached 12.5 nm. Experimental

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42

MATSUO, Tomohiro. "Measurement and Evaluation of Micromechanisms. Development of Micro Torque Measurement Technology." Journal of the Japan Society for Precision Engineering 63, no. 3 (1997): 349–52. http://dx.doi.org/10.2493/jjspe.63.349.

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43

Attanasio, Aldo. "Tool Run-Out Measurement in Micro Milling." Micromachines 8, no. 7 (2017): 221. http://dx.doi.org/10.3390/mi8070221.

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44

XU, Yi, Masato IMAMURA, and Takeo NAKAGAWA. "Micro-hardness measurement of photopolymer in stereolithography." Journal of Photopolymer Science and Technology 10, no. 2 (1997): 181–86. http://dx.doi.org/10.2494/photopolymer.10.181.

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45

Manago, Takashi, Kenji Kasahara, Kazuhiro Nishimura, and Ichiro Shibasaki. "Micro-magnetic Field Measurement using Hall Element." IEEJ Transactions on Sensors and Micromachines 138, no. 3 (2018): 117–22. http://dx.doi.org/10.1541/ieejsmas.138.117.

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46

CHU Jin-kui, 褚金奎, 李双亮 LI Shuang-liang, and 张然 ZHANG Ran. "Micro-measurement of SU-8 photoelastic performance." Optics and Precision Engineering 24, no. 3 (2016): 547–52. http://dx.doi.org/10.3788/ope.20162403.0547.

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47

Shanmugapriya, T. "Marine Measurement based on Micro System Technology." Research Journal of Pharmacy and Technology 10, no. 9 (2017): 2989. http://dx.doi.org/10.5958/0974-360x.2017.00529.7.

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48

Ashry, A. H., H. El-Sammane, M. Abou-leila, et al. "A nuclear tester for micro-hardness measurement." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 290 (November 2012): 39–42. http://dx.doi.org/10.1016/j.nimb.2012.08.021.

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49

AKITA, Yusuke, Taisuke MASUDA, Hisataka MARUYAMA, and Fumihito ARAI. "Micro environmental sensor for biological tissue measurement." Proceedings of the Bioengineering Conference Annual Meeting of BED/JSME 2018.30 (2018): 1G02. http://dx.doi.org/10.1299/jsmebio.2018.30.1g02.

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50

Latter, T. D. T. "Measurement of Coating Thickness via Micro‐resistance." Circuit World 20, no. 1 (1993): 29–30. http://dx.doi.org/10.1108/eb046237.

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