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1

Huang, Qing-An, ed. Micro Electro Mechanical Systems. Springer Singapore, 2018. http://dx.doi.org/10.1007/978-981-10-5945-2.

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Huang, Qing-An, ed. Micro Electro Mechanical Systems. Springer Singapore, 2018. http://dx.doi.org/10.1007/978-981-10-2798-7.

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3

Micro electro mechanical system design. Taylor & Francis, 2005.

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4

Micro electro mechanical system design. Taylor & Francis, 2005.

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5

Micro mechanical transducers: Pressure sensors, accelerometers, and gyroscopes. Elsevier Science B.V., 2000.

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6

Tsai, Kun Chao. Investigation of micro-mechanical applications of amorphous carbon films. The Author], 2003.

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7

Yang, Fuqian, and James C. M. Li, eds. Micro and Nano Mechanical Testing of Materials and Devices. Springer US, 2008. http://dx.doi.org/10.1007/978-0-387-78701-5.

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8

Zhang, G. Q., L. J. Ernst, and O. de Saint Leger, eds. Benefiting from Thermal and Mechanical Simulation in Micro-Electronics. Springer US, 2000. http://dx.doi.org/10.1007/978-1-4757-3159-0.

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9

Ekwall, Britt, and Mikkel Cronquist. Micro electro mechanical systems (MEMS): Technology, fabrication processes, and applications. Edited by Ekwall Britt and Cronquist Mikkel. Nova Science Publishers, 2009.

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10

Mendelson, Mel I. Learning bio-micro-nanotechnology. CRC Press, 2013.

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11

Patterson, James D. Micro-mechanical voltage tunable Fabry-Perot filters formed in (111) silicon. National Aeronautics and Space Administration, Langley Research Center, 1997.

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12

Patterson, James D. Micro-mechanical voltage tunable Fabry-Perot filters formed in (111) silicon. National Aeronautics and Space Administration, 1997.

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13

Patterson, James D. Micro-mechanical voltage tunable Fabry-Perot filters formed in (111) silicon. National Aeronautics and Space Administration, Langley Research Center, 1997.

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14

André, Pineau, Zaoui André, and SpringerLink (Online service), eds. Mechanical Behaviour of Materials: Volume 1: Micro- and Macroscopic Constitutive Behaviour. Springer Netherlands, 2012.

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15

Bai, Y. L., Q. S. Zheng, and Y. G. Wei, eds. IUTAM Symposium on Mechanical Behavior and Micro-Mechanics of Nanostructured Materials. Springer Netherlands, 2007. http://dx.doi.org/10.1007/978-1-4020-5624-6.

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16

IEEE Robotics and Automation Council. IEEE Micro Electro Mechanical Systems: An investigation of micro structures, sensors, actuators, machines and robots, Salt Lake City, Utah, February 20-22, 1989 ; proceedings. Institute of Electrical Electronics Engineers, 1989.

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17

International, Conference on Micro Electro Opto Mechanic Systems and Components (6th 1998 Potsdam Germany). Micro system technologies 98: 6th International Conference on Micro, Electro, Opto, Mechanical Systems and Components, Potsdam, December 1-3, 1998. VDE-Verlag, 1998.

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18

International, Conference on Micro Electro Opto Mechanical Systems and Components (5th 1996 Potsdam Germany). Micro systems technologies '96: 5th International Conference on Micro Electro, Opto, Mechanical Systems and Components, Potsdam, September 17-19, 1996. VDE-Verlag, 1996.

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19

International Conference on Micro Electro, Opto, Mechanical Systems and Components (4th 1994 Berlin, Germany). Micro system technologies '94: 4th International Conference on Micro Electro, Opto, Mechanical Systems and Components, Berlin, October 19-21, 1994. Edited by Reichl H, Heuberger A, Ausstellungs-Messe-Kongress-GmbH, MESAGO Messe & Kongress GmbH., and Fraunhofer-Einrichtung für Zuverlässigkeit und Mikrointegration. vde-Verlag, 1994.

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20

Zhang, Yongkang. Laser Shock Processing of FCC Metals: Mechanical Properties and Micro-structural Strengthening Mechanism. Springer Berlin Heidelberg, 2013.

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21

Plasticity and high temperature strength of materials: Combined micro- and macro-mechanical approaches. Elsevier Applied Science, 1988.

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22

IEEE Workshop on Micro Electro Mechanical Systems (6th 1993 Fort Lauderdale, Fla.). Proceedings: IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems, Fort Lauderdale, Florida, February 7-10, 1993. IEEE, 1993.

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23

IEEE Workshop on Micro Electro Mechanical Systems (4th 1991 Nara, Japan.). Proceedings: IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and robots : Nara, Japan, 30 January-2 February 1991. Institute of Electrical and Electronics Engineers, 1991.

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24

EuroSimE, 2007 (2007 London England). Proceedings of the 8th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems: EuroSimE 2007. IEEE, 2007.

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25

IEEE Workshop on Micro Electro Mechanical Systems (3rd 1990 Napa Valley, Calif.). Proceedings: IEEE micro electro mechanical systems : an investigation of micro structures, sensors, actuators, machines and robots : Napa Valley, California, 11-14 February 1990. Institute of Electrical and Electronics Engineers, 1990.

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26

IEEE Workshop on Micro Electro Mechanical Systems (7th 1994 Oiso, Japan). Proceedings: IEEE Micro Electro Mechanical Systems, an investigations of micro structures, sensors, actuators, machines and robotic systems, Oiso, Japan, January 25-28, 1994. IEEE Service Center, 1994.

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27

IEEE Workshop on Micro Electro Mechanical Systems (5th 1992 Travemünde, Germany). Proceedings: IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and robots : Travemünde, Germany, 4 February - 7 February 1992. IEEE, 1992.

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28

Bao, Min-hang. Micro Mechanical Transducers. Elsevier Science, 2000.

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29

Huang, Qing-An. Micro Electro Mechanical Systems. Springer, 2018.

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30

Huang, Qing-An. Micro Electro Mechanical Systems. Springer, 2018.

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31

Allen, James J. Micro Electro Mechanical System Design (Mechanical Engineering). CRC, 2005.

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32

Azar, Massood Tabib. Micro-Opto-Electro-Mechanical Devices. Marcel Dekker Inc, 2006.

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33

Takahata, Kenichi, ed. Micro Electronic and Mechanical Systems. InTech, 2009. http://dx.doi.org/10.5772/121.

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34

Micro Electronic and Mechanical Systems. InTech, 2010.

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35

IEEE International Conference on Micro Electro Mechanical Systems. 2000 IEEE Micro Electro Mechanical Systems. Institute of Electrical & Electronics Enginee, 2000.

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36

1948-, Fukuda T., and Menz W, eds. Micro mechanical systems: Principles and technology. Elsevier, 1998.

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37

Micro Mechanical Systems - Principles and Technology. Elsevier, 1998. http://dx.doi.org/10.1016/s1386-2766(98)x8001-1.

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38

1997 IEEE 10th Micro Electro Mechanical. Ieee, 1997.

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39

Motamedi, Manouchehr E., ed. MOEMS: Micro-Opto-Electro-Mechanical Systems. SPIE, 2005. http://dx.doi.org/10.1117/3.2265061.

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40

MOEMS: Micro-opto-electro-mechanical systems. SPIE Press, 2005.

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41

MEMS/NEMS: Micro electro mechanical systems/nano electro mechanical systems. Springer, 2005.

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42

Bang, Lee Ki, ed. Principles of micro electro mechanical systems (MEMS). WILEY, 2010.

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43

Artificial Cochlea Design Using Micro-Electro-Mechanical Systems. Storming Media, 1996.

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44

Micro Mechanical Transducers - Pressure Sensors, Accelerometers and Gyroscopes. Elsevier, 2000. http://dx.doi.org/10.1016/s1386-2766(00)x8001-2.

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45

Design and Fabrication of Micro-Electro-Mechanical Structures for Tunable Micro-Optical Devices. Storming Media, 2002.

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46

Micro and Nano Mechanical Testing of Materials and Devices. Springer, 2008.

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47

Netherlands), EuroSimE (2000 Eindhoven. Benefiting from thermal and mechanical simulation in micro-electronics. 2000.

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48

(Editor), G. Q. Zhang, L. J. Ernst (Editor), and O. de Saint Leger (Editor), eds. Benefiting from Thermal and Mechanical Simulation in Micro-Electronics. Springer, 2000.

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49

Yang, Fuqian, and James C. M. Li. Micro and Nano Mechanical Testing of Materials and Devices. Springer, 2009.

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50

J, Ernst L., Zhang G. Q, and Saint Leger O. de, eds. Benefiting from thermal and mechanical simulation in micro-electronics. Kluwer Academic Publishers, 2000.

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