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Journal articles on the topic 'Microcantilever Beam'

Author: Grafiati

Published: 6 September 2023

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1

Kim, Yun Young. "An evaluation technique for high-frequency dynamic behavior of a sandwich microcantilever beam." Journal of Sandwich Structures & Materials 21, no. 3 (2017): 1133–49. http://dx.doi.org/10.1177/1099636217708146.

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A method was developed to measure the first- and second-order vibration modes in a sandwich microcantilever beam oscillating in the megahertz frequency regime in the present study. Taking advantage of the ultrasonic frequency, a test platform was developed to induce free vibration of the microcantilever using a high-power radio frequency pulser that transmits tone burst signals to a contact transducer, and the resonant frequencies of the microcantilever were measured using a laser-optic interferometer. Results show that the microcantilever’s vibration above 8 MHz can be successfully detected,

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2

LIM, TEIK-CHENG. "ANALYSIS OF AUXETIC BEAMS AS RESONANT FREQUENCY BIOSENSORS." Journal of Mechanics in Medicine and Biology 12, no. 05 (2012): 1240027. http://dx.doi.org/10.1142/s0219519412400271.

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The mechanics of beam vibration is of fundamental importance in understanding the shift of resonant frequency of microcantilever and nanocantilever sensors. Unlike the simpler Euler–Bernoulli beam theory, the Timoshenko beam theory takes into consideration rotational inertia and shear deformation. For the case of microcantilevers and nanocantilevers, the minute size, and hence low mass, means that the topmost deviation from the Euler–Bernoulli beam theory to be expected is shear deformation. This paper considers the extent of shear deformation for varying Poisson's ratio of the beam material,

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3

Mouro, João, Rui Pinto, Paolo Paoletti, and Bruno Tiribilli. "Microcantilever: Dynamical Response for Mass Sensing and Fluid Characterization." Sensors 21, no. 1 (2020): 115. http://dx.doi.org/10.3390/s21010115.

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A microcantilever is a suspended micro-scale beam structure supported at one end which can bend and/or vibrate when subjected to a load. Microcantilevers are one of the most fundamental miniaturized devices used in microelectromechanical systems and are ubiquitous in sensing, imaging, time reference, and biological/biomedical applications. They are typically built using micro and nanofabrication techniques derived from the microelectronics industry and can involve microelectronics-related materials, polymeric materials, and biological materials. This work presents a comprehensive review of the

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4

Song, Ya Qin, and Xiao Gang Yang. "Photothermal Response in Semiconducting Microcantilevers Produced by Laser Excitation." Advanced Materials Research 705 (June 2013): 81–84. http://dx.doi.org/10.4028/www.scientific.net/amr.705.81.

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The elastic vibration of semiconducting microcantilever, which was excited with a frequency-modulated pump laser, was optically detected use another probe beam. The photothermal signals were measurement near the resonant frequency. The changes of vibration amplitude and phase with the change of modulation frequency were obtained for a set of different sized microcantilevers. The results showed that the experimental results had a good agreement with the theoretical ones.

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5

Liu, Xing Fang, Guo Guo Yan, Zhan Wei Shen, et al. "Theoretical Calculation and Simulation for Microcantilevers Based on SiC Epitaxial Layers." Materials Science Forum 954 (May 2019): 26–30. http://dx.doi.org/10.4028/www.scientific.net/msf.954.26.

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The resonant frequency and Q factor of the SiC microcantilever were theoretically analyzed and calculated based on the stereotyped basic theories of the cantilever beam, and the relationship between the vibration mode and structure geometries was also simulated. Modal analysis by means of finite element method was performed on millimeter-, micron-and nanoscale microcantilevers, and the results showed that the smaller the microstructure was, the higher the resonant frequency can be obtained. The Q factor can be extracted from hamonic spectra after modal analysis, and the amplitude of Q factor w

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6

Formica, Giovanni, Walter Lacarbonara, and Hiroshi Yabuno. "Nonlinear Dynamic Response of Nanocomposite Microbeams Array for Multiple Mass Sensing." Nanomaterials 13, no. 11 (2023): 1808. http://dx.doi.org/10.3390/nano13111808.

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A nonlinear MEMS multimass sensor is numerically investigated, designed as a single input-single output (SISO) system consisting of an array of nonlinear microcantilevers clamped to a shuttle mass which, in turn, is constrained by a linear spring and a dashpot. The microcantilevers are made of a nanostructured material, a polymeric hosting matrix reinforced by aligned carbon nanotubes (CNT). The linear as well as the nonlinear detection capabilities of the device are explored by computing the shifts of the frequency response peaks caused by the mass deposition onto one or more microcantilever

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7

Munguia Cevantes, Jacobo Esteban, Juan Vicente Méndez Méndez, Hector Francisco Mendoza León, Miguel Ángel Alemán Arce, Salvador Mendoza Acevedo, and Horacio Estrada Vázquez. "Si3N4 Young’s modulus measurement from microcantilever beams using a calibrated stylus profiler." Superficies y Vacío 30, no. 1 (2017): 10–13. http://dx.doi.org/10.47566/2017_syv30_1-010010.

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Stylus surface profiler has been widely used in order to measure Young’s modulus of silicon nitride (Si3N4) from microcantilever beams. Until now, several Si3N4 Young’s modulus values have been reported. It may be due to incomplete assessment of the microcantilever beams bending over its entire length or a lack of calibration of the stylus force system used in those works. We presented in this work an alternative method to measure the elastic modulus of MEMS thin layers in a rather accurate manner. A stylus force calibration is reported from a calibrated silicon microcantilever beam in order t

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8

Mojahedi, M., and M. Rahaeifard. "Static Deflection and Pull-In Instability of the Electrostatically Actuated Bilayer Microcantilever Beams." International Journal of Applied Mechanics 07, no. 06 (2015): 1550090. http://dx.doi.org/10.1142/s1758825115500908.

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This paper deals with the static behavior of an electrostatically actuated bilayered microswitch on the basis of the modified couple stress theory. The beam is modeled using Euler–Bernoulli beam theory and equivalent elastic modulus and length scale parameter are presented for the bilayer beam. Static deflection and pull-in voltage of the beam is calculated using numerical and analytical methods. The numerical method is based on an iterative approach while the homotopy perturbation method (HPM) is utilized for the analytical simulation. Results show that there is a very good agreement between

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9

Nsubuga, Lawrence, Lars Duggen, Tatiana Lisboa Marcondes, et al. "Gas Adsorption Response of Piezoelectrically Driven Microcantilever Beam Gas Sensors: Analytical, Numerical, and Experimental Characterizations." Sensors 23, no. 3 (2023): 1093. http://dx.doi.org/10.3390/s23031093.

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This work presents an approach for the estimation of the adsorbed mass of 1,5-diaminopentane (cadaverine) on a functionalized piezoelectrically driven microcantilever (PD-MC) sensor, using a polynomial developed from the characterization of the resonance frequency response to the known added mass. This work supplements the previous studies we carried out on the development of an electronic nose for the measurement of cadaverine in meat and fish, as a determinant of its freshness. An analytical transverse vibration analysis of a chosen microcantilever beam with given dimensions and desired reso

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10

Wong, WaiChi, HingWah Lee, Ishak A. Azid, and K. N. Seetharamu. "Creep analysis of bimaterial microcantilever beam for sensing device using artificial neural network (ANN)." ASEAN Journal on Science and Technology for Development 23, no. 1&2 (2017): 89. http://dx.doi.org/10.29037/ajstd.95.

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In this study, a feed-forward back-propagation Artificial Neural Network (ANN) is used to predict the stress relaxation and behavior of creep for bimaterial microcantilever beam for sensing device. Results obtained from ANSYS® 8.1 finite element (FE) simulations, which show good agreement with experimental work [1], is used to train the neural network. Parametric studies are carried out to analyze the effects of creep on the microcantilever beam in term of curvature and stress deve loped with time. It is shown that ANN accurately predicts the stress level for the microcantilever beam using the

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11

Liu, Xiaochen, Lihao Wang, Junyuan Zhao, Yinfang Zhu, Jinling Yang, and Fuhua Yang. "Enhanced Binding Efficiency of Microcantilever Biosensor for the Detection of Yersinia." Sensors 19, no. 15 (2019): 3326. http://dx.doi.org/10.3390/s19153326.

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A novel microcantilever sensor was batch fabricated for Yersinia detection. The microcantilever surface modification method was optimized by introducing a secondary antibody to increase the number of binding sites. A novel microfluidic platform was designed and fabricated successfully. A 30 μL solution could fully react with the microcantilever surface. Those routines enhanced the binding efficiency between the target and receptor on the microcantilever. With this novel designed microfluidic platform, the specific adsorption of 107 Yersinia on the beam surface with modified F1 antibody was sig

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12

SADER, JOHN E., THOMAS P. BURG, and SCOTT R. MANALIS. "Energy dissipation in microfluidic beam resonators." Journal of Fluid Mechanics 650 (March 22, 2010): 215–50. http://dx.doi.org/10.1017/s0022112009993521.

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The fluid–structure interaction of resonating microcantilevers immersed in fluid has been widely studied and is a cornerstone in nanomechanical sensor development. In many applications, fluid damping imposes severe limitations by strongly degrading the signal-to-noise ratio of measurements. Recently, Burg et al. (Nature, vol. 446, 2007, pp. 1066–1069) proposed an alternative type of microcantilever device whereby a microfluidic channel was embedded inside the cantilever with vacuum outside. Remarkably, it was observed that energy dissipation in these systems was almost identical when air or li

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13

Majumdar, Arun. "Bioassays Based on Molecular Nanomechanics." Disease Markers 18, no. 4 (2002): 167–74. http://dx.doi.org/10.1155/2002/856032.

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Recent experiments have shown that when specific biomolecular interactions are confined to one surface of a microcantilever beam, changes in intermolecular nanomechanical forces provide sufficient differential torque to bend the cantilever beam. This has been used to detect single base pair mismatches during DNA hybridization, as well as prostate specific antigen (PSA) at concentrations and conditions that are clinically relevant for prostate cancer diagnosis. Since cantilever motion originates from free energy change induced by specific biomolecular binding, this technique is now offering a c

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14

Hosaka, Hiroshi, and Kiyoshi Itao. "Coupled Vibration of Microcantilever Array Induced by Airflow Force." Journal of Vibration and Acoustics 124, no. 1 (2001): 26–32. http://dx.doi.org/10.1115/1.1421054.

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The coupled vibrations of microcantilevers induced by airflow were analyzed to facilitate the development of high-speed information and sensing devices that use microactuator arrays. Simple formulas, from which the vibrational coupling amplitude and damping ratio can be obtained, are derived by replacing the cantilevers with strings of spheres, solving Stokes equation, and combining this with an ordinary beam equation. The coupling amplitude was found to increase as the beam size, beam gap, internal friction, and the difference in the resonant frequencies of the beams decreased and the damping

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15

Chen, Yongzhang, Yiwen Zheng, Haibing Xiao, et al. "Optical Fiber Probe Microcantilever Sensor Based on Fabry–Perot Interferometer." Sensors 22, no. 15 (2022): 5748. http://dx.doi.org/10.3390/s22155748.

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Optical fiber Fabry–Perot sensors have long been the focus of researchers in sensing applications because of their unique advantages, including highly effective, simple light path, low cost, compact size, and easy fabrication. Microcantilever-based devices have been extensively explored in chemical and biological fields while the interrogation methods are still a challenge. The optical fiber probe microcantilever sensor is constructed with a microcantilever beam on an optical fiber, which opens the door for highly sensitive, as well as convenient readout. In this review, we summarize a wide va

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16

Hull, Katherine L., Younane N. Abousleiman, Yanhui Han, et al. "Nanomechanical Characterization of the Tensile Modulus of Rupture for Kerogen-Rich Shale." SPE Journal 22, no. 04 (2017): 1024–33. http://dx.doi.org/10.2118/177628-pa.

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Summary In the past decade, chemical, physical, and mechanical characterization of source-rock reservoirs has moved toward micro- and nanoscale testing and analyses. Nanoindentation is now widely used in many industrial and university laboratories to measure stiffness and strength as well as other mechanical properties of shales. However, to date, tensile failures of shales have not been studied at the micro- or nanoscale. In this work, a scanning electron microscope (SEM) coupled with a focused ion beam (FIB) and a special nanoindenter (NI) testing configuration (SEM-FIB-NI) is used to bring

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17

Abbasi, Mohammad, and Seyed E. Afkhami. "Resonant Frequency and Sensitivity of a Caliper Formed With Assembled Cantilever Probes Based on the Modified Strain Gradient Theory." Microscopy and Microanalysis 20, no. 6 (2014): 1672–81. http://dx.doi.org/10.1017/s1431927614013117.

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AbstractThe resonant frequency and sensitivity of an atomic force microscope (AFM) with an assembled cantilever probe (ACP) is analyzed utilizing strain gradient theory, and then the governing equation and boundary conditions are derived by a combination of the basic equations of strain gradient theory and Hamilton’s principle. The resonant frequency and sensitivity of the proposed AFM microcantilever are then obtained numerically. The proposed ACP includes a horizontal cantilever, two vertical extensions, and two tips located at the free ends of the extensions that form a caliper. As one of t

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18

Zhang, Tong-Yi, Ming-Hao Zhao, and Cai-Fu Qian. "Effect of substrate deformation on the microcantilever beam-bending test." Journal of Materials Research 15, no. 9 (2000): 1868–71. http://dx.doi.org/10.1557/jmr.2000.0270.

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With regard to substrate deformation, this work analyzed the microcantilever beam-bending test and provided a closed formula of deflection versus load. The substrate deformation was formulated using two coupled springs; the spring compliances were related to the elastic compliances of the substrate, the support angle between the substrate and the microcantilever beam, and the beam thickness. Finite element analysis was conducted to calculate the spring compliances and verify the analytic formula. The results showed that the proportionality factor of the load to the deflection was a third-order

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19

Arscott, Steve, Bernard Legrand, Lionel Buchaillot, and Alison E. Ashcroft. "A silicon beam-based microcantilever nanoelectrosprayer." Sensors and Actuators B: Chemical 125, no. 1 (2007): 72–78. http://dx.doi.org/10.1016/j.snb.2007.01.040.

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20

Abbasi, Mohammad, and Ardeshir Karami Mohammadi. "Study of the sensitivity and resonant frequency of the flexural modes of an atomic force microscopy microcantilever modeled by strain gradient elasticity theory." Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science 228, no. 8 (2013): 1299–310. http://dx.doi.org/10.1177/0954406213507918.

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In this study, the resonant frequency and sensitivity of an atomic force microscopy microcantilever are analyzed utilizing the strain gradient theory, and then the governing equation and boundary conditions are derived by a combination of the basic equations of the modified strain gradient theory and the Hamilton principle. Afterward, the resonant frequency and sensitivity of the proposed atomic force microscopy microcantilever are obtained numerically. The results of the current model are compared to those evaluated by both modified couple stress and classic beam theories. Results show that u

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21

Preethi, A. Angelin Peace, and P. Karthigaikumar. "Micro-machined silicon accelerometer with piezoresistive SCR implementation for glucolysis." International Journal of Wavelets, Multiresolution and Information Processing 18, no. 01 (2019): 1941013. http://dx.doi.org/10.1142/s0219691319410133.

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Micro-Electro-Mechanical Systems (MEMS) noted as micro generation have grown to advance greater than in previous decades. This venture reports approximately the silicon-based piezoresistive (PZR) microcantilever for glucose sensing. Elevated sensitivity, highest operation collection, extensive frequency reaction, excessive resolution, proper linearity are the majority preferred residences of the sensor. The displacement strain at specific limits, sensitivity and deformation is analyzed by means of finite element method for two exclusive structures. 3D structural modeling of three layers in mic

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22

Silveira, B. M., J. H. Belo, R. Pinto, et al. "Magnetostriction in Amorphous Co66Fe34 Microcantilevers Fabricated with Hydrogenated Amorphous Silicon." EPJ Web of Conferences 233 (2020): 05003. http://dx.doi.org/10.1051/epjconf/202023305003.

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To study the magnetostriction of Co66Fe34 thin films, amorphous silicon microcantilevers were prepared by surface micromachining, and the 136 nm-thick magnetostrictive film was deposited by electron beam physical vapor deposition and patterned on top of the microcantilever structure. The magnetostriction of the Co66Fe34 films was confirmed by measuring the deflection of the cantilevers under a varying magnetic field, reaching displacements up to 8 nm. The configuration was simulated using COMSOL software, yielding a similar deflection behavior as a function of the magnetic field, with a film w

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23

Hocheng, H., K. S. Kao, and W. Fang. "Fatigue life of a microcantilever beam in bending." Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 22, no. 6 (2004): 3143. http://dx.doi.org/10.1116/1.1821502.

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24

Kim, Seunghyun, Tim Gustafson, Danny C. Richards, Weisheng Hu, and Gregory P. Nordin. "Microcantilever deflection compensation with focused ion beam exposure." Journal of Micromechanics and Microengineering 21, no. 8 (2011): 085007. http://dx.doi.org/10.1088/0960-1317/21/8/085007.

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25

Lee, Jung A., Jae Young Yun, Seung Seob Lee, and Kwang Cheol Lee. "A Novel Microcantilever Device with Nano-Interdigitated Electrodes (Nano-IDEs) for Biosensing Applications." Key Engineering Materials 326-328 (December 2006): 1359–62. http://dx.doi.org/10.4028/www.scientific.net/kem.326-328.1359.

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We present a novel microcantilever device with nano-interdigitated electrodes (nano-IDEs) and selective functionalization of nano-IDEs for biosensing applications. The nano-IDEs play a role in precisely addressing capture molecules to a specific region on a microcantilever. This leads to a detectable surface stress due to the binding of target molecules. 70~500 nm-wide gold (Au) nano- IDEs are fabricated on a low-stress SiNx microcantilever with dimensions of 100~600 μm in length, and 15~60 μm in width, with a 0.5 μm thickness using electron beam lithography and bulk micromachining. 32~96 nm-t

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26

Wu, M. C., J. S. Chang, K. C. Wu, C. H. Lin, and C. Y. Wu. "The Effect of Flow Velocity on Microcantilever-Based Biosensors." Journal of Mechanics 23, no. 4 (2007): 353–58. http://dx.doi.org/10.1017/s1727719100001404.

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ABSTRACTThis work focuses on studying the effect of flow velocity on microcantilever-based biosensor by numerical simulation. The microcantilever sensors used in detecting biomolecules have attractive advantages like cost efficiency, real-time and ability of fabricating in array. Both rectangular and triangular shapes of a general model of microcantilever beam are considered. Several important physical phenomena are obtained. Comparing with the first order Langmuir theory, we have calculated the effect on the reactive rate, produced concentration, the distribution of concentration and deflecti

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27

Qi, Chenkun, Feng Gao, Han-Xiong Li, Xianchao Zhao, and Liming Deng. "A neural network-based distributed parameter model identification approach for microcantilever." Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science 230, no. 20 (2016): 3663–76. http://dx.doi.org/10.1177/0954406215615626.

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The microcantilever used in micro–nanomanipulator is a spatially distributed and flexible mechanical system. An accurate model of the microcantilever is essential for the accurate tip positioning and force sensing. Traditional lumped parameter model will lose the spatial dynamics. Though the nominal Euler–Bernoulli model is a distributed parameter model, in practice there are still some unknown nonlinear dynamics. In this study, a neural network-based distributed parameter model identification approach is proposed for modelling the microcantilever. First, a nominal Euler–Bernoulli beam model i

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28

Anthony, C. J., G. Torricelli, P. D. Prewett, D. Cheneler, C. Binns, and A. Sabouri. "Effect of focused ion beam milling on microcantilever loss." Journal of Micromechanics and Microengineering 21, no. 4 (2011): 045031. http://dx.doi.org/10.1088/0960-1317/21/4/045031.

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29

Liu, Yun, and Yin Zhang. "Stiction of Flexural MEMS Structures." Applied Mechanics and Materials 190-191 (July 2012): 794–800. http://dx.doi.org/10.4028/www.scientific.net/amm.190-191.794.

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A variational method using the principle of virtual work (PVW) is presented to formulate the problem of the microcantilever stiction. Compared with the Rayleigh–Ritz method using the arc-shaped or S-shaped deflection, which prescribes the boundary conditions and thus the deflection shape of a stuck cantilever beam, the new method uses the matching conditions and constraint condition derived from PVW and minimization of the system free energy to describe the boundary conditions at the contact separation point. The transition of the beam deflection from an arc-shape-like one to an S-shape-like o

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30

Voiculescu, I. R., M. E. Zaghloul, R. A. McGill, and J. F. Vignola. "Modelling and measurements of a composite microcantilever beam for chemical sensing applications." Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science 220, no. 10 (2006): 1601–8. http://dx.doi.org/10.1243/09544062jmes150.

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A resonant microcantilever beam gas sensor was designed and fabricated in Carnegie Mellon University using complementary metal oxide semiconductor (CMU-CMOS) technology. The cantilever beam modified with a suitable sorbent coating was demonstrated as a chemical transducer for monitoring hazardous vapours and gases at trace concentrations. The design of the cantilever beam included interdigitated fingers to allow electrostatic actuation of the device and a piezoresistive Wheatstone bridge design to read out the deflection signal. The cantilever beam resonant frequency was modelled using the Eul

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31

Armstrong, David E. J., Angus J. Wilkinson, and Steve G. Roberts. "Measuring anisotropy in Young’s modulus of copper using microcantilever testing." Journal of Materials Research 24, no. 11 (2009): 3268–76. http://dx.doi.org/10.1557/jmr.2009.0396.

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Focused ion beam machining was used to manufacture microcantilevers 30 μm by 3 μm by 4 μm with a triangular cross section in single crystal copper at a range of orientations between. These were imaged and tested using AFM/nanoindentation. Each cantilever was indented multiple times at a decreasing distance away from the fixed end. Variation of the beam’s behavior with loading position allowed a critical aspect ratio (loaded length:beam width) of 6 to be identified above which simple beam approximations could be used to calculate Young’s modulus. Microcantilevers were also milled within a singl

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32

Guo, Kai, Bo Jiang, Bingrui Liu, et al. "Study on the progress of piezoelectric microcantilever beam micromass sensor." IOP Conference Series: Earth and Environmental Science 651 (February 10, 2021): 022091. http://dx.doi.org/10.1088/1755-1315/651/2/022091.

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33

Lin, Y. C., H. Hocheng, W. L. Fang, and R. Chen. "Fabrication and Fatigue Testing of an Electrostatically Driven Microcantilever Beam." Materials and Manufacturing Processes 21, no. 1 (2006): 75–80. http://dx.doi.org/10.1080/amp-20006597.

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34

Manoubi, I., F. Najar, S. Choura, and A. H. Nayfeh. "Nonlinear Dynamical analysis of an AFM tapping mode microcantilever beam." MATEC Web of Conferences 1 (2012): 04002. http://dx.doi.org/10.1051/matecconf/20120104002.

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35

Hong, Hocheng, Jeng-Nan Hung, and Yunn-Horng Guu. "Various Fatigue Testing of Polycrystalline Silicon Microcantilever Beam in Bending." Japanese Journal of Applied Physics 47, no. 6 (2008): 5256–61. http://dx.doi.org/10.1143/jjap.47.5256.

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36

Schultz, Joshua A., Stephen M. Heinrich, Fabien Josse, et al. "Timoshenko beam effects in lateral‐mode microcantilever‐based sensors in liquids." Micro & Nano Letters 8, no. 11 (2013): 762–65. http://dx.doi.org/10.1049/mnl.2013.0395.

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37

Muto, Shogo, Wataru Hirata, Shinji Fujita, Kazuya Akashi, Yasuhiro Iijima, and Masanori Daibo. "Micromechanical Property Evaluation Of REBCO Coated Conductors Using Microcantilever Beam Method." IEEE Transactions on Applied Superconductivity 30, no. 4 (2020): 1–4. http://dx.doi.org/10.1109/tasc.2020.2975755.

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38

Subhashini, S., and A. Vimala Juliet. "Micro Cantilever CO₂ Gas Sensor Based on Mass." Applied Mechanics and Materials 766-767 (June 2015): 528–33. http://dx.doi.org/10.4028/www.scientific.net/amm.766-767.528.

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Sensors had gained importance in all fields of science and technology and development of real time small devices with high sensitivity for in situ measurements at low cost has gained momentum. Micromachined cantilever provides a solution to this hunt. MEMS cantilever are the simplest of all the other mechanical structures and hence is considered for the ease of fabrication. Here a chemical CO2 sensor is considered with the metal oxide layer as receptor to adsorb the CO2 molecules leading to an increase in mass and microcantilever as the transducer part converting the change in mass to change i

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39

Nagase, Masao, Hiroshi Takahashi, Yoshiharu Shirakawabe, and Hideo Namatsu. "Nano-Four-Point Probes on Microcantilever System Fabricated by Focused Ion Beam." Japanese Journal of Applied Physics 42, Part 1, No. 7B (2003): 4856–60. http://dx.doi.org/10.1143/jjap.42.4856.

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40

Nguyen, Quoc Chi, and Slava Krylov. "Nonlinear tracking control of vibration amplitude for a parametrically excited microcantilever beam." Journal of Sound and Vibration 338 (March 2015): 91–104. http://dx.doi.org/10.1016/j.jsv.2014.10.029.

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41

Bourouina, Hicham, Réda Yahiaoui, Elmar Yusifli, Mohammed El Amine Benamar, Kamal Ghoumid, and Guillaume Herlem. "Shear effect on dynamic behavior of microcantilever beam with manufacturing process defects." Microsystem Technologies 23, no. 7 (2016): 2537–42. http://dx.doi.org/10.1007/s00542-016-3078-x.

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MOJAHEDI, M., M. T. AHMADIAN, and K. FIROOZBAKHSH. "OSCILLATORY BEHAVIOR OF AN ELECTROSTATICALLY ACTUATED MICROCANTILEVER GYROSCOPE." International Journal of Structural Stability and Dynamics 13, no. 06 (2013): 1350030. http://dx.doi.org/10.1142/s0219455413500302.

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This paper is concerned with the study of the oscillatory behavior of an electrostatically actuated microcantilever gyroscope with a proof mass attached to its free end. In mathematical modeling, the effects of different nonlinearities such as electrostatic forces, fringing field, inertial terms and geometric nonlinearities are considered. The microgyroscope is subjected to bending oscillations around the static deflection coupled with base rotation. The primary oscillation is generated in drive direction of the microgyroscope by a pair of DC and AC voltages on the tip mass. The secondary osci

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Lin, Chiao-Chi, Weileun Fang, Hung-Yi Lin, Chun-Hway Hsueh, and Sanboh Lee. "Measurements of residual stresses in Al film/silicon nitride substrate microcantilever beam systems." Journal of Materials Research 26, no. 10 (2011): 1279–84. http://dx.doi.org/10.1557/jmr.2011.111.

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Abbasi, Mohammad. "Size Dependent Vibration Behavior of an AFM with Sidewall and Top-Surface Probes Based on the Strain Gradient Elasticity Theory." International Journal of Applied Mechanics 07, no. 03 (2015): 1550046. http://dx.doi.org/10.1142/s1758825115500465.

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In this paper, the size-dependent vibration behavior of an atomic force microscope with assembled cantilever probe (ACP) is analyzed utilizing the modified strain gradient elasticity theory. The proposed ACP comprises a horizontal cantilever, a vertical extension and two tips located at the free ends of the cantilever and extension. Because the vertical extension is located between the clamped and free ends of the microcantilever, the cantilever is modeled as two beams. The results of the current model are compared to those evaluated by both modified couple stress and classical beam theories.

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Heidari, Mohammad, Yaghoub Tadi Beni, and Hadi Homaei. "Estimation of Static Pull-In Instability Voltage of Geometrically Nonlinear Euler-Bernoulli Microbeam Based on Modified Couple Stress Theory by Artificial Neural Network Model." Advances in Artificial Neural Systems 2013 (December 26, 2013): 1–10. http://dx.doi.org/10.1155/2013/741896.

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In this study, the static pull-in instability of beam-type micro-electromechanical system (MEMS) is theoretically investigated. Considering the mid-plane stretching as the source of the nonlinearity in the beam behavior, a nonlinear size dependent Euler-Bernoulli beam model is used based on a modified couple stress theory, capable of capturing the size effect. Two supervised neural networks, namely, back propagation (BP) and radial basis function (RBF), have been used for modeling the static pull-in instability of microcantilever beam. These networks have four inputs of length, width, gap, and

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Mishra, Rohit, Wilfried Grange, and Martin Hegner. "Rapid and Reliable Calibration of Laser Beam Deflection System for Microcantilever-Based Sensor Setups." Journal of Sensors 2012 (2012): 1–6. http://dx.doi.org/10.1155/2012/617386.

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Cantilever array-based sensor devices widely utilise the laser-based optical deflection method for measuring static cantilever deflections mostly with home-built devices with individual geometries. In contrast to scanning probe microscopes, cantilever array devices have no additional positioning device like a piezo stage. As the cantilevers are used in more and more sensitive measurements, it is important to have a simple, rapid, and reliable calibration relating the deflection of the cantilever to the change in position measured by the position-sensitive detector. We present here a simple met

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Voiculescu, I., M. E. Zaghloul, R. A. McGill, E. J. Houser, and G. K. Fedder. "Electrostatically actuated resonant microcantilever beam in CMOS technology for the detection of chemical weapons." IEEE Sensors Journal 5, no. 4 (2005): 641–47. http://dx.doi.org/10.1109/jsen.2005.851016.

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Schultz, Joshua A., Stephen M. Heinrich, Fabien Josse, et al. "Lateral-Mode Vibration of Microcantilever-Based Sensors in Viscous Fluids Using Timoshenko Beam Theory." Journal of Microelectromechanical Systems 24, no. 4 (2015): 848–60. http://dx.doi.org/10.1109/jmems.2014.2354596.

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GHADERI, R., and M. H. KORAYEM. "SENSITIVITY ANALYSIS OF VIBRATING MOTION OF NONUNIFORM AFM PIEZOELECTRIC MICROCANTILEVER." Latin American Applied Research - An international journal 45, no. 4 (2015): 271–77. http://dx.doi.org/10.52292/j.laar.2015.408.

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Piezoelectric MCs (MCs) are a special type of MCs. Having self-actuating and selfsensing abilities, they can be used as micro-robots in AFM, sensors and actuators. This paper analyzes sensitivity of vibrating motion of a piezoelectric MC with the presence of geometrical discontinuities. As resonance amplitude and natural frequency are of paramount importance in vibrating motions and they are considered in most engineering applications such as AFM and MEMS, sensitivity analysis of these two parameters is conducted. Vibrating analysis is performed based on the nonuniform beam model and the Euler

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Tamayo, Javier, Valerio Pini, Prisicila Kosaka, Nicolas F. Martinez, Oscar Ahumada, and Montserrat Calleja. "Imaging the surface stress and vibration modes of a microcantilever by laser beam deflection microscopy." Nanotechnology 23, no. 31 (2012): 315501. http://dx.doi.org/10.1088/0957-4484/23/31/315501.

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