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Dissertations / Theses on the topic 'Microelectromechanical System (MEMS)'

Author: Grafiati

Published: 4 June 2021

Last updated: 7 February 2022

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1

Kim, Seong Jin Dean Robert Neal. "An evaluation system for mechanical and electrical characterization of MEMS devices." Auburn, Ala, 2009. http://hdl.handle.net/10415/1592.

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2

Xu, Wenjun. "Carbon material based microelectromechanical system (MEMS): fabrication and devices." Diss., Georgia Institute of Technology, 2011. http://hdl.handle.net/1853/39554.

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This PhD dissertation presents the exploration and development of two carbon materials, carbon nanotubes (CNTs) and carbon fiber (CF), as either key functional components or unconventional substrates for a variety of MEMS applications. Their performances in three different types of MEMS devices, namely, strain/stress sensors, vibration-powered generators and fiber solar cells, were evaluated and the working mechanisms of these two non-traditional materials in these systems were discussed. The work may potentially enable the development of new types of carbon-MEMS devices. Firstly,

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3

Wang, Limin. "Modeling and real-time feedback control of MEMS device." Morgantown, W. Va. : [West Virginia University Libraries], 2004. https://etd.wvu.edu/etd/controller.jsp?moduleName=documentdata&jsp%5FetdId=3711.

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Thesis (Ph. D.)--West Virginia University, 2004.<br>Title from document title page. Document formatted into pages; contains v, 132 p. : ill. (some col.). Includes abstract. Includes bibliographical references (p. 128-132).

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4

Machiraju, Harita. "Thermal analysis and design of a MEMS-based safety and arming system." Diss., Online access via UMI:, 2007.

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5

Black, Richard Allyn. "A flush mounted microelectromechanical system (MEMS) pressure and flow sensor based air data system /." Thesis, Connect to this title online; UW restricted, 1999. http://hdl.handle.net/1773/10012.

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6

He, Huiqi. "Miniaturized electroporation system for gene transfer using bio-MEMS technology /." View abstract or full-text, 2007. http://library.ust.hk/cgi/db/thesis.pl?BIEN%202007%20HE.

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7

Aten, Quentin Theodore. "Design and Testing of a Pumpless Microelectromechanical System Nanoinjector." BYU ScholarsArchive, 2008. https://scholarsarchive.byu.edu/etd/1926.

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A deeper understanding of human development and disease is made possible partly through the study of genetically modified model organisms, such as the common mouse (Mus musculus). By genetically modifying such model organisms, scientists can activate, deactivate, or highlight particular characteristics. A genetically modified animal is generated by adding exogenous (foreign) genetic material to one or more embryonic cells at their earliest stages of development. Frequently, this exogenous genetic material consists of specially engineered DNA, which is introduced into a fertilized egg cell (zyg

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8

Madgwick, Sebastian O. H. "AHRS algorithms and calibration solutions to facilitate new applications using low-cost MEMS." Thesis, University of Bristol, 2014. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.681552.

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Microelectromechanical System (MEMS) technology is advancing rapidly. Gyroscopes, accelerometers and magnetometers, also referred to as an Inertial Measurement Unit (IMU), has traditionally been associated with aerospace and industrial robotics but is now within every smart phone. The proliferation of these low-cost devices has facilitated countless new applications with many more still unrealised. This dissertation presents work towards this end. A significant contribution of this work was the development of novel Attitude and Heading Reference System (AHRS) algorithms that fuse together sens

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9

Klempner, Adam R. "Development of a modular interferometric microscopy system for characterization of MEMS." Link to electronic thesis, 2007. http://www.wpi.edu/Pubs/ETD/Available/etd-010407-173332/.

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Thesis (M.S.)--Worcester Polytechnic Institute.<br>Keywords: vacuum; shape and deformation measurement; MEMS; vibrometry; scanning white light; Interferometry; thermal; vibration. Includes bibliographical references (136-139 leaves ).

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10

Shah, Urvi. "Development of MEMS power inductors with submicron laminations using an automated electroplating system." Thesis, Atlanta, Ga. : Georgia Institute of Technology, 2007. http://hdl.handle.net/1853/19715.

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Thesis (M. S.)--Electrical and Computer Engineering, Georgia Institute of Technology, 2008.<br>Committee Chair: Allen, Mark G.; Committee Member: Divan, Deepakraj M.; Committee Member: Taylor, David G.

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11

Argueta, Díaz Victor. "Proof of feasibility of a free-space optical cross-connect system using digital mems." Connect to this title online, 2005. http://rave.ohiolink.edu/etdc/view?acc%5Fnum=osu1109795698.

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Thesis (Ph. D.)--Ohio State University, 2005.<br>Title from first page of PDF file. Document formatted into pages; contains xvii, 176 p.; also includes graphics (some col.). Includes bibliographical references (p. 171-176). Available online via OhioLINK's ETD Center

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12

Teichert, Gregory Herlin. "Design and Testing of a Biological Microelectromechanical System for the Injection of Thousands of Cells Simultaneously." BYU ScholarsArchive, 2012. https://scholarsarchive.byu.edu/etd/3366.

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The ability to inject DNA and other foreign particles into cells, both germ cells (e.g. to produce transgenic animals) and somatic cells (e.g. for gene therapy), is a powerful tool in genetic research. Nanoinjection is a method of DNA delivery that combines mechanical and electrical methods. It has proven to have higher cell viability than traditional microinjection, resulting in higher integration per injected embryo. The nanoinjection process can be performed on thousands of cells simultaneously using an array of microneedles that is inserted into a monolayer of cells. This thesis describes

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13

Kok, Wing Hang (Ronald). "Development of a wireless MEMS inertial system for health monitoring of structures." Link to electronic thesis, 2004. http://www.wpi.edu/Pubs/ETD/Available/etd-11244-122741/.

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Thesis (M.S.)--Worcester Polytechnic Institute.<br>Keywords: angular rate; cantilever; wireless; RF; microcontroller; tilt and rotation; health monitoring; inertial sensors; MEMS. Includes bibliographical references (p. 139-145).

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14

Holst, Gregory L. "Modeling, Design, and Testing of an Underwater Microactuation System Using a Standard MEMS Foundry Process." BYU ScholarsArchive, 2011. https://scholarsarchive.byu.edu/etd/2626.

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This work presents the modeling, design, and testing of an underwater microactuation system. It is composed of several thermomechanical in-plane microactuators (TIM) integrated with a ratchet system to provide long displacements and high forces to underwater microelectromechanical systems (MEMS). It is capable of actuating a 200µN load 110µm. It is a two-layer silicon MEMS device fabricated with a MEMS fabrication process, PolyMUMPS. This work also shows the development of an elliptic integral model to analyze the compliant fixed-guided beams in the TIM and gives new insight into the buckling

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15

XIONG, XINGGUO. "BUILT-IN SELF-TEST AND SELF-REPAIR FOR CAPACITIVE MEMS DEVICES." University of Cincinnati / OhioLINK, 2005. http://rave.ohiolink.edu/etdc/view?acc_num=ucin1123038236.

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16

Li, Weizhuo. "Wavelength Multiplexing of MEMS Pressure and Temperature Sensors Using Fiber Bragg Gratings and Arrayed Waveguide Gratings." University of Cincinnati / OhioLINK, 2005. http://rave.ohiolink.edu/etdc/view?acc_num=ucin1123972586.

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17

Berglund, Martin. "Optical measuring system using a camera and laser fan-out for narrow mounting on a miniaturized submarine." Thesis, Uppsala University, Ångström Space Technology Centre, ÅSTC, 2009. http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-112681.

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<p>The aim was to develop, manufacture and evaluate diffractive lenses, or diffractive optical elements (DOE), for use in correlation with a camera to add perspective in pictures. The application is a miniaturized submarine developed in order to perform distant exploration and analysis in harsh and narrow environments. The idea is to project a laser pattern upon the observed structure and thereby add geometrical information to pictures acquired with an onboard CMOS camera. The design of the DOE-structures was simulated using the optimal rotational angle method (ORA). A set of prototype DOEs we

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18

Gugel, Denis. "Ordnungsreduktion in der Mikrosystemtechnik." Doctoral thesis, Universitätsbibliothek Chemnitz, 2010. http://nbn-resolving.de/urn:nbn:de:bsz:ch1-201001091.

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Die vorliegende Arbeit befasst sich mit der Methode der modalen Superposition als Ordnungsreduktionsverfahren in der Mikrosystemtechnik. Typische Anwendungsgebiete sind Inertialsensoren und dabei im Besonderen Drehratensensoren, für die die Simulation von zeitabhängigen Phänomenen von entscheidender Bedeutung ist. Im Rahmen der Weiterentwicklung der Ordnungsreduktion nach der Methode der modalen Superposition ist es gelungen für typische lineare Kräfte eine auf analytischen Gleichungen basierende Beschreibung im reduzierten Raum zu finden. Für die Beschreibung von nichtlinearen Kräften ist im

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19

Lee, Jin-Hwan. "MEMS Needle-Type Multi-Analyte Microelectrode Array Sensors for In Situ Biological Applications." University of Cincinnati / OhioLINK, 2008. http://rave.ohiolink.edu/etdc/view?acc_num=ucin1212146149.

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20

Manekiya, Mohammedhusen Hanifbhai. "Microwave and RF system for Industrial and Biomedical Applications." Doctoral thesis, Università degli studi di Trento, 2021. http://hdl.handle.net/11572/306624.

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Modern smartphone technology has created a myriad of opportunities in the field of RF and Microwave. Specifically, Chipless RFID sensor, compact microwave filter, antenna based on a microstrip structure, and many more. In this thesis, innovative ideas for the industrial and biomedical device has been explored. The work presents the reconfigurable filter design, Switch-beam antenna, Microwave interferometer, X-band Rotman Lens antenna, Ultra-wideband antenna based on SIW resonator, L-band Stepped Frequency Continuous Wave antenna, development of a wireless sensor system for environmental monito

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21

Schnell, Andrew Robert. "Use of decision-centric templates in the design of a separation column for a microscale gas chromatography system." Thesis, Available online, Georgia Institute of Technology, 2006, 2006. http://etd.gatech.edu/theses/available/etd-07102006-081530/.

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Thesis (M. S.)--Mechanical Engineering, Georgia Institute of Technology, 2007.<br>Dr. Martha Gallivan, Committee Member ; Dr. Chris Paredis, Committee Member ; Dr. Janet K. Allen, Committee Member ; Dr. Peter Hesketh, Committee Co-Chair ; Dr. Farrokh Mistree, Committee Co-Chair.

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22

Then, Alan M. (Alan Michael) 1965. "Commercialization of microelectromechanical systems (MEMS)." Thesis, Massachusetts Institute of Technology, 2001. http://hdl.handle.net/1721.1/8920.

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Thesis (S.M.M.O.T.)--Massachusetts Institute of Technology, Sloan School of Management, Management of Technology Program, 2001.<br>Includes bibliographical references (leaves 69-72).<br>Microelectromechanical systems (MEMS), at their core are a set of technologies that employ the processes developed in the integrated circuit (IC) and semiconductor industries to construct electro- mechanical devices. In the case of Microopticelectromechanical systems (MOEMS), optical elements are also integrated into these devices. MEMS technology holds the promise of significantly miniaturizing, reducing the c

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23

Bowman, Amy Catherine. "A selective encapsulation solution for packaging an optical micro electro mechanical system." Link to electronic thesis, 2002. http://www.wpi.edu/Pubs/ETD/Available/etd-0108102-140953.

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Thesis (M.S.)--Worcester Polytechnic Institute.<br>Keywords: packaging; micro electro mechanical systems; MEMS; electronics; die warpage; die bow; encapsulant; encapsulate; electrochemical migration; corrosion; wirebonds. Includes bibliographical references (p. 94-99).

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24

Nguyen, Hugo. "Microsystem Interfaces for Space." Doctoral thesis, Uppsala : Acta Universitatis Upsaliensis : Universitetsbiblioteket [distributör], 2006. http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-6954.

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25

Chung, David. "Development of system level integration of compact RF components on multilayer liquid crystal polymer (LCP)." Diss., Georgia Institute of Technology, 2011. http://hdl.handle.net/1853/42763.

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A system packaging level approach on liquid crystal polymer (LCP) was proposed for low cost, lightweight, and compact wireless communication systems. Via technology was explored for V-band W-band transitions and an active cooling system that are essential for compact multilayer integration. RF MEMS switches were fabricated and integrated at the component level to enable multi-functional devices with optimal performance. A pattern reconfigurable antenna for MIMO applications and 3D phase shifters for phased array antennas that use RF MEMS switches were presented. In addition, a lightweight expa

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26

Cragun, Rebecca. "Thermal Microactuators for Microelectromechanical Systems (MEMS)." BYU ScholarsArchive, 2003. https://scholarsarchive.byu.edu/etd/54.

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Microactuators are needed to convert energy into mechanical work at the microscale. Thermal microactuators can be used to produce this needed mechanical work. The purpose of this research was to design, fabricate, and test thermal microactuators for use at the microscale in microelectromechanical systems (MEMS). The microactuators developed were tested to determine the magnitude of their deflection and estimate their force. Five groups of thermal microactuators were designed and tested. All of the groups used the geometrically constrained expansion of various segments to produce their deflecti

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27

Robinson, Gary Neil 1960. "The commercialization of microelectromechanical systems (MEMS)." Thesis, Massachusetts Institute of Technology, 1999. http://hdl.handle.net/1721.1/9534.

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Thesis (S.M.M.O.T.)--Massachusetts Institute of Technology, Sloan School of Management, Management of Technology Program, 1999.<br>Includes bibliographical references (leaf 80).<br>Microelectromechanical systems (MEMS) comprise a set of technologies for the micromachining and electromechanical integration of sensors and actuators. MEMS allow for the radical miniaturization of such devices, as well as for significant improvements in performance and cost over conventionally fabricated mechanical and electrical components. In this thesis, I attempt to assess the value inherent in MEMS innovations

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28

Ghassemiparvin, Behnam. "Paraffin-Based RF Microsystems for Millimeter Wave Reconfigurable Antennas." The Ohio State University, 2020. http://rave.ohiolink.edu/etdc/view?acc_num=osu157685881599312.

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29

Latif, Rhonira. "Microelectromechanical systems for biomimetical application." Thesis, University of Edinburgh, 2013. http://hdl.handle.net/1842/7955.

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The application of adaptive micro-electro-mechanical systems (MEMS) device in biologically-inspired cochlear model (cochlear biomodel) has been seen as a preferable approach to mimic closely the human cochlear response. The thesis focuses on the design and fabrication of resonant gate transistor (RGT) device applied towards the development of RGT cochlear biomodel. An array of RGT devices can mimic the cochlea by filtering the sound input signals into multiple electrical outputs. The RGT device consists of two main components; a) the MEMS bridge gate structure that transduces the sound input i

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30

Chua, D. H. C. "Diamond-like carbon for microelectromechanical systems (MEMS) applications." Thesis, University of Cambridge, 2005. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.597675.

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This work investigates Diamond-like Carbon thick and thin films for applications in Microelectromechanical systems (MEMS). As such, this work intends to combine 2 highly specialized but independent research issues. In the field of diamond and related materials, there are many types of diamond-like carbon films. In this work, nonhydrogenated tetrahedral amorphous carbon (ta-C) and amorphous Carbon (a-C) types of diamond-like carbon films were investigated. High density ta-C films have been deposited with Young's modulus of ~750GPa, density of 3.4 g/cm<sup>3</sup> and optical gap of 3.9eV. After

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31

Gugel, Denis. "Ordnungsreduktion in der Mikrosystemtechnik." Doctoral thesis, Der Andere Verlag, Tönning, 2008. https://monarch.qucosa.de/id/qucosa%3A19359.

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Die vorliegende Arbeit befasst sich mit der Methode der modalen Superposition als Ordnungsreduktionsverfahren in der Mikrosystemtechnik. Typische Anwendungsgebiete sind Inertialsensoren und dabei im Besonderen Drehratensensoren, für die die Simulation von zeitabhängigen Phänomenen von entscheidender Bedeutung ist. Im Rahmen der Weiterentwicklung der Ordnungsreduktion nach der Methode der modalen Superposition ist es gelungen für typische lineare Kräfte eine auf analytischen Gleichungen basierende Beschreibung im reduzierten Raum zu finden. Für die Beschreibung von nichtlinearen Kräften ist im

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32

Giner, de Haro Joan Josep. "Development of microelectromechanical systems for RF signal processing." Doctoral thesis, Universitat Autònoma de Barcelona, 2012. http://hdl.handle.net/10803/96241.

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El objectiu d’aquesta tesis ha sigut l’estudi de ressonadors CMOS-MEMS monolíticament integrats per a la seva aplicació en transceptors de radio freqüència. En concret s’ha treballat sobre filtre y ressonadors de RF així com la seva caracterització. En el camp del filtres s’han investigat dos tipus de conceptes: el filtres series i els filtres paral·lels. Els filtre sèrie desenvolupats en aquesta tesi consten de dos tipus d’acoblament: acoblament mecànic, dintre dels quals s’han estudiat dos tipus d’acobladors (en forma de U i en forma de V) i l’acoblament electrostàtic. En els filtres mecàni

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33

Dawson, Jeremy M. "Through-wafer interrogation of MEMS device motion." Morgantown, W. Va. : [West Virginia University Libraries], 1999. http://etd.wvu.edu/templates/showETD.cfm?recnum=856.

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Thesis (M.S.)--West Virginia University, 1999.<br>Title from document title page. Document formatted into pages; contains xii, 122 p. : ill. (some col.) Includes abstract. Includes bibliographical references (p. 119-122).

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34

Tse, Laam Angela. "MEMS packaging with stereolithography." Thesis, Georgia Institute of Technology, 2002. http://hdl.handle.net/1853/17025.

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35

Dieme, Robert. "Characterization of noise in MEMS piezoresistive microphones." [Gainesville, Fla.] : University of Florida, 2005. http://purl.fcla.edu/fcla/etd/UFE0010508.

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36

Mustafa, Haithem Ali Babiker. "Development of a noncontact current sensor based on MEMS technology." Thesis, Cape Peninsula University of Technology, 2007. http://hdl.handle.net/20.500.11838/1082.

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Thesis (MTech (Technology))--Cape Peninsula University of Technology, 2007<br>Most ofMEMS sensors are based on the micro-cantilever technology, which use wide range of different design materials and structures. The benefit ofMEMS technology is in developing devices having lower cost, lower power consumption, higher performance, and integration. A free-end cantileverbeam made of magnetic material (PerrnaIloy) and a movable mass attached to the free-end has been designed using MEMS software tools. The magnetic material was used to improve the sensitivity of the cantilever-beam to an ex

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37

Willis, Oral R. "Characterizing fluoropolymeric materials for microelectronics and MEMS packaging." Diss., Online access via UMI:, 2007.

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38

Wang, Kerwin. "Micro-optical components for a MEMS integrated display /." Thesis, Connect to this title online; UW restricted, 2004. http://hdl.handle.net/1773/6047.

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39

Medipalli, Raghuveer R. "MEMS parallel-plate electrostatic actuator modeling, simulation and characterization /." Morgantown, W. Va. : [West Virginia University Libraries], 2004. https://etd.wvu.edu/etd/controller.jsp?moduleName=documentdata&jsp%5FetdId=3411.

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Thesis (M.S.)--West Virginia University, 2004.<br>Title from document title page. Document formatted into pages; contains ix, 96 p. : ill. (some col.). Includes abstract. Includes bibliographical references (p. 94-96).

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40

Lee, Wook. "Diffraction-based integrated optical readout for micromachined optomechanical sensors." Diss., Available online, Georgia Institute of Technology, 2006, 2006. http://etd.gatech.edu/theses/available/etd-09292006-115918/.

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Thesis (Ph. D.)--Electrical and Computer Engineering, Georgia Institute of Technology, 2006.<br>F. Levent Degertekin, Committee Chair ; David S. Citrin, Committee Member ; Paul E. Hasler, Committee Member ; Peter J. Hesketh, Committee Member ; Zhiping Zhou, Committee Member.

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41

Albahri, Shehab. "Mechanical characterization of MEMS devices." Diss., Online access via UMI:, 2007.

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42

Milne, Stuart Brian. "Thin-film silicon based MEMS actuators and materials." Thesis, University of Cambridge, 2011. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.609898.

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43

Deutsch, Erik R. (Erik Robertson) 1974. "Achieving large stable vertical displacement in surface-micromachined microelectromechanical systems (MEMS)." Thesis, Massachusetts Institute of Technology, 2002. http://hdl.handle.net/1721.1/8118.

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Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2002.<br>Includes bibliographical references (p. 77-80).<br>This thesis describes electrostatic actuation techniques and mechanical design features for realizing large planar analog vertical travel in an electrostatically actuated diffractive mid-infrared optical device, which is robust, both to manufacture, and against pull-in during use. This device, called the Polychromator, is fabricated by polysilicon surface-micromachining and consists of many parallel elements, each 20 microns w

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44

Jacobson, Carl P. "Code Division Multiplexing of Fiber Optic and Microelectromechanical Systems (MEMS) Sensors." Diss., Virginia Tech, 2000. http://hdl.handle.net/10919/27486.

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Multiplexing has evolved over the years from Emile Baudot's method of transmitting six simultaneous telegraph signals over one wire to the high-speed mixed-signal communications systems that are now commonplace. The evolution started with multiplexing identical information sources, such as plain old telephone service (POTS) devices. Recently, however, methods to combine signals from different information sources, such as telephone and video signals for example, have required new approaches to the development of software and hardware, and fundamental changes in the way we envision the basic blo

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45

Agrawal, Deepak Kumar. "Nonlinear effects and synchronization in MEMs oscillators." Thesis, University of Cambridge, 2013. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.648280.

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46

Mohd, Azmi Mohd Azraie Bin. "Integrated silicon nanowire biosensor and MEMS based delivery systems." Thesis, Swansea University, 2014. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.678641.

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47

Roberts, Robert Christopher. "Jet Printed Au Nanoparticle Films For Microelectromechanical Systems." Case Western Reserve University School of Graduate Studies / OhioLINK, 2012. http://rave.ohiolink.edu/etdc/view?acc_num=case1342809712.

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48

Lusk, Craig P. "Ortho-Planar Mechanisms for Microelectromechanical Systems." Diss., CLICK HERE for online access, 2005. http://contentdm.lib.byu.edu/ETD/image/etd902.pdf.

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49

Singh, Abhyudai. "A mechanistic approach to tuning of MEMS resonators." Diss., Connect to online resource - MSU authorized users, 2006.

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50

Shao, Yuhe. "Mems 3-D scan mirror for an endoscopic confocal microscope." Diss., Montana State University, 2005. http://etd.lib.montana.edu/etd/2005/shao/ShaoY1205.pdf.

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