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Dissertations / Theses on the topic 'Microelectromechanical system sensors'

Author: Grafiati

Published: 6 September 2023

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1

Xu, Wenjun. "Carbon material based microelectromechanical system (MEMS): fabrication and devices." Diss., Georgia Institute of Technology, 2011. http://hdl.handle.net/1853/39554.

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This PhD dissertation presents the exploration and development of two carbon materials, carbon nanotubes (CNTs) and carbon fiber (CF), as either key functional components or unconventional substrates for a variety of MEMS applications. Their performances in three different types of MEMS devices, namely, strain/stress sensors, vibration-powered generators and fiber solar cells, were evaluated and the working mechanisms of these two non-traditional materials in these systems were discussed. The work may potentially enable the development of new types of carbon-MEMS devices. Firstly,

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2

Li, Weizhuo. "Wavelength Multiplexing of MEMS Pressure and Temperature Sensors Using Fiber Bragg Gratings and Arrayed Waveguide Gratings." University of Cincinnati / OhioLINK, 2005. http://rave.ohiolink.edu/etdc/view?acc_num=ucin1123972586.

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3

Kok, Wing Hang (Ronald). "Development of a wireless MEMS inertial system for health monitoring of structures." Link to electronic thesis, 2004. http://www.wpi.edu/Pubs/ETD/Available/etd-11244-122741/.

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Thesis (M.S.)--Worcester Polytechnic Institute.<br>Keywords: angular rate; cantilever; wireless; RF; microcontroller; tilt and rotation; health monitoring; inertial sensors; MEMS. Includes bibliographical references (p. 139-145).

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4

Lee, Jin-Hwan. "MEMS Needle-Type Multi-Analyte Microelectrode Array Sensors for In Situ Biological Applications." University of Cincinnati / OhioLINK, 2008. http://rave.ohiolink.edu/etdc/view?acc_num=ucin1212146149.

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5

Mangels, John Donald III, Syed Ammar Raza, Kevin Mueller, et al. "Micro-Air Vehicle Control Using Microelectromechanical Systems Sensors." Thesis, The University of Arizona, 2017. http://hdl.handle.net/10150/625078.

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Micro Air Vehicles (MAV) are small unmanned aircraft that are highly sensitive to environmental disturbances causing dynamic changes in attitude and flight stability compared to more traditional unmanned air vehicles. Controlling the stability of an MAV is difficult and a significant research issue. The goal of this project is to perform a proof of concept study based on literature to demonstrate that Microelectromechanical Systems (MEMS) sensors can control the longitudinal stability of an MAV. MEMS sensors, specifically flow sensors used in this project, predict perturbations and aerody

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6

Raza, Syed Ammar, Kevin Mueller, Daniel Brauer, et al. "Micro-Air Vehicle Control Using Microelectromechanical Systems Sensors." Thesis, The University of Arizona, 2017. http://hdl.handle.net/10150/625128.

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Micro Air Vehicles (MAV) are small unmanned aircraft that are highly sensitive to environmental disturbances causing dynamic changes in attitude and flight stability compared to more traditional unmanned air vehicles. Controlling the stability of an MAV is difficult and a significant research issue. The goal of this project is to perform a proof of concept study based on literature to demonstrate that Microelectromechanical Systems (MEMS) sensors can control the longitudinal stability of an MAV. MEMS sensors, specifically flow sensors used in this project, predict perturbations and aerodynamic

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7

Neelisetti, Raghu Kisore Lim Alvin S. "Improving reliability of wireless sensor networks for target tracking using wireless acoustic sensors." Auburn, Ala., 2009. http://hdl.handle.net/10415/1931.

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8

Lee, Wook. "Diffraction-based integrated optical readout for micromachined optomechanical sensors." Diss., Available online, Georgia Institute of Technology, 2006, 2006. http://etd.gatech.edu/theses/available/etd-09292006-115918/.

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Thesis (Ph. D.)--Electrical and Computer Engineering, Georgia Institute of Technology, 2006.<br>F. Levent Degertekin, Committee Chair ; David S. Citrin, Committee Member ; Paul E. Hasler, Committee Member ; Peter J. Hesketh, Committee Member ; Zhiping Zhou, Committee Member.

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9

Jacobson, Carl P. "Code Division Multiplexing of Fiber Optic and Microelectromechanical Systems (MEMS) Sensors." Diss., Virginia Tech, 2000. http://hdl.handle.net/10919/27486.

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Multiplexing has evolved over the years from Emile Baudot's method of transmitting six simultaneous telegraph signals over one wire to the high-speed mixed-signal communications systems that are now commonplace. The evolution started with multiplexing identical information sources, such as plain old telephone service (POTS) devices. Recently, however, methods to combine signals from different information sources, such as telephone and video signals for example, have required new approaches to the development of software and hardware, and fundamental changes in the way we envision the basic blo

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10

Mendonça, Lucas Gonçalves Dias. "Desenvolvimento de um micro-transdutor acústico capacitivo." Universidade de São Paulo, 2013. http://www.teses.usp.br/teses/disponiveis/3/3152/tde-17102014-113303/.

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Neste trabalho é proposto um dispositivo MEMS do tipo micro-transdutor acústico capacitivo, CMUT (sigla em inglês - Capacitive Micromachined Ultrasonic Transducer). Em vez de usar piezoeletricidade, o CMUT tem um array de capacitores, onde cada capacitor possui um eletrodo inferior fixo, uma cavidade e o eletrodo superior composto de uma placa flexível. Quando submetida a uma tensão CC adequada, a placa se deflete se aproximando do eletrodo inferior devido à força eletrostática. Assim a placa fica tensionada podendo vibrar quando excitada por uma tensão CA. Neste caso o CMUT opera como emissor

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11

Mustafa, Haithem Ali Babiker. "Development of a noncontact current sensor based on MEMS technology." Thesis, Cape Peninsula University of Technology, 2007. http://hdl.handle.net/20.500.11838/1082.

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Thesis (MTech (Technology))--Cape Peninsula University of Technology, 2007<br>Most ofMEMS sensors are based on the micro-cantilever technology, which use wide range of different design materials and structures. The benefit ofMEMS technology is in developing devices having lower cost, lower power consumption, higher performance, and integration. A free-end cantileverbeam made of magnetic material (PerrnaIloy) and a movable mass attached to the free-end has been designed using MEMS software tools. The magnetic material was used to improve the sensitivity of the cantilever-beam to an ex

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12

Black, Richard Allyn. "A flush mounted microelectromechanical system (MEMS) pressure and flow sensor based air data system /." Thesis, Connect to this title online; UW restricted, 1999. http://hdl.handle.net/1773/10012.

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13

Leichle, Thierry C. "A micromachined resonant magnetic field sensor." Thesis, Georgia Institute of Technology, 2002. http://hdl.handle.net/1853/13833.

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14

Yi, Yudan. "On improving the accuracy and reliability of GPS/INS-based direct sensor georeferencing." Columbus, Ohio : Ohio State University, 2007. http://rave.ohiolink.edu/etdc/view?acc%5Fnum=osu1186671990.

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15

Yoo, Seung-jin. "Micromachined wavelength selective microbolometer sensors operating at room temperature /." Full text (PDF) from UMI/Dissertation Abstracts International, 2000. http://wwwlib.umi.com/cr/utexas/fullcit?p3004406.

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16

Toh, Edwin. "Implementation of an optical readout system for high-sensitivity terahertz microelectromechanical sensor array." Thesis, Monterey, California: Naval Postgraduate School, 2014. http://hdl.handle.net/10945/44019.

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Approved for public release; distribution is unlimited<br>In this thesis, an optical readout scheme was successfully developed based on the Fourier 4F optical configuration and integrated with a custom-fabricated microelectromechanical system (MEMS)-based, terahertz (THz), detector array. The MEMS THz detector array and 4F Fourier optics were able to transduce the THz scene into an optical signal that was captured by a commercial charged coupled device (CCD) camera for generating images. A quantum cascade laser (QCL) provided the THz illumination for generating images while post-image processi

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17

Zhang, Qiliang Lec Ryszard. "Characterization of the interfacial interactions between microparticles and surfaces using piezoelectric sensors /." Philadelphia, Pa. : Drexel University, 2006. http://hdl.handle.net/1860/1778.

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18

Cookson, Jeremy L. "A method for testing the dynamic accuracy of Microelectro-Mechanical Systems (MEMS) Magnetic, Angular Rate, and Gravity (MARG) sensors for Inertial Navigation Systems (INS) and human motion tracking applications." Thesis, Monterey, California : Naval Postgraduate School, 2010. http://edocs.nps.edu/npspubs/scholarly/theses/2010/Jun/10Jun%5FCookson.pdf.

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Thesis (M.S. in Electrical Engineering)--Naval Postgraduate School, June 2010.<br>Thesis Advisor(s): Yun, Xiaoping ; Second Reader: Romano, Marcello. "June 2010." Description based on title screen as viewed on July 14, 2010. Author(s) subject terms: micro-electro-mechanical systems, MEMS, magnetic, angular rate, gravity sensor, MARG sensors, inertial navigation system, INS, inertial test, MicroStrain, 3DM-GX1, 3DMGX3, CompactRIO, MATLAB GUI, dynamic accuracy test. Includes bibliographical references (p. 187-189). Also available in print.

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19

Arecco, Daniel. "Analysis and preliminary characterization of a MEMS cantilever-type chemical sensor." Link to electronic thesis, 2003. http://www.wpi.edu/Pubs/ETD/Available/etd-0511104-150948.

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Thesis (M.S.)--Worcester Polytechnic Institute.<br>Keywords: frequency; vibration; vibrometry; detection; resonance; micromechanical; polymer; absorption; AFM; SEM; holography; optoelectronic; silicon; hydrogen; palladium. Includes bibliographical references (p. 151-161).

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20

Sohn, Young-Soo. "MEMS based microfluidic structure for biological and chemical sensor array /." Full text (PDF) from UMI/Dissertation Abstracts International, 2001. http://wwwlib.umi.com/cr/utexas/fullcit?p3008446.

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21

Haneef, Ibraheem. "SOI CMOS MEMS flow sensors." Thesis, University of Cambridge, 2009. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.611843.

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22

Zhang, Peng. "Design and fabrication of chemiresistor type micro/nano hydrogen gas sensors using interdigitated electrodes." Orlando, Fla. : University of Central Florida, 2008. http://purl.fcla.edu/fcla/etd/CFE0002478.

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23

Tulabandula, Sridhar. "Localization of wireless sensor networks using multidimensional scaling." Diss., Columbia, Mo. : University of Missouri-Columbia, 2007. http://hdl.handle.net/10355/4986.

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Thesis (M.S.)--University of Missouri-Columbia, 2007.<br>The entire dissertation/thesis text is included in the research.pdf file; the official abstract appears in the short.pdf file (which also appears in the research.pdf); a non-technical general description, or public abstract, appears in the public.pdf file. Title from title screen of research.pdf file (viewed on April 17, 2008) Includes bibliographical references.

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24

Kulkarni, Vinod Dilip. "Integration of micromachined thermal shear stress sensors with microchannels : design, fabrication and testing /." Online version of thesis, 2005. http://hdl.handle.net/1850/5201.

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25

Jeedigunta, Sathyaharish. "Growth and characterization of nanocrystalline diamond films for microelectronics and microelectromechanical systems." [Tampa, Fla] : University of South Florida, 2008. http://purl.fcla.edu/usf/dc/et/SFE0002532.

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26

Liu, Ting-Hung. "Testing and Packaging for MEMS Acoustic Emission Sensors." Scholar Commons, 2018. https://scholarcommons.usf.edu/etd/7692.

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The goal of this research is to improve the structure and dimension of the MEMS acoustic emission sensor. Acoustic emission sensor (AE sensor) based on the piezoelectric transducer is a well-developed technology in non-destructive testing that is widely used to determine permanent damage such as cracks and corrosions in buildings and structures. The AE sensor can be used to monitor cracks in structures and to check leakage in pressurized systems. The location of cracks in a structure or system leakage causes a high-frequency surface vibration while

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27

Alsaleem, Fadi M. "Dynamics of hybrid MEMS sensors and switches for mass and acceleration detection." Diss., Online access via UMI:, 2009.

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Thesis (Ph. D.)--State University of New York at Binghamton, Thomas J. Watson School of Engineering and Applied Science, Department of Mechanical Engineering, 2009.<br>Includes bibliographical references.

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28

Ghassemi, Parham. "Multi-Constriction Microfluidic Sensors for Single-Cell Biophysical Characterization." Thesis, Virginia Tech, 2017. http://hdl.handle.net/10919/89947.

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Cancer is a major health issue that has been associated with over 80 million deaths worldwide in the last decade. Recently, significant improvements have been made in terms of treatment and diagnosis. However, despite these advancements there is still a demand for low-cost, high-accuracy, and easy-to-use technologies capable of classifying cells. Analysis of cell behavior in microfluidic deformability assays provides a label-free method of observing cell response to physical and chemical stimuli. This body of work shows advancements made toward reaching our goal of a robust and cost-effecti

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29

Beardslee, Luke Armitage. "Liquid-phase operation of mems resonators for biochemical sensing in point of care and embedded applications." Diss., Georgia Institute of Technology, 2011. http://hdl.handle.net/1853/44924.

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The purpose of this work is the development of MEMS-based resonant sensors for liquid-phase biochemical sensing applications. Specifically, the sensors developed here are aimed at embedded or point-of-sampling applications: (1) when there is not enough time to send a sample to a lab for analysis, (2) in resource-poor settings, (3) when collecting analyte and shipping it to a lab would damage the sample, or (4) for in-situ monitoring. To this end, a bulk micromachined resonant cantilever sensor and a surface micromachined sensor based on the spring-softening effect are investigated as transduce

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30

Avila, Gomez Adrian Enrique. "Development MEMS Acoustic Emission Sensors." Scholar Commons, 2017. https://scholarcommons.usf.edu/etd/7392.

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The purpose of this research is to develop MEMS based acoustic emission sensors for structural health monitoring. Acoustic emission (AE) is a well-established nondestructive testing technique that is typically used to monitor for fatigue cracks in structures, leaks in pressurized systems, damages in composite materials or impacts. This technology can offer a precise evaluation of structural conditions and allow identification of imminent failures or minor failures that can be addressed by planned maintenances routines. AE causes a burst of ultrasonic energy that is measured as high frequency s

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31

Park, Jong-Jin. "Design of a new arrayed temperature sensor system and thermal interface materials /." Thesis, Connect to this title online; UW restricted, 2004. http://hdl.handle.net/1773/7062.

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32

Shakir, Ali M. "A prototype multifunction differential pressure-flow sensor for medical and industrial applications." Diss., Online access via UMI:, 2009.

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Thesis (Ph. D.)--State University of New York at Binghamton, Thomas J. Watson School of Engineering and Applied Science, Department of Systems Science and Industrial Engineering, 2009..<br>Includes bibliographical references.

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33

Fonseca, Michael Agapito. "Polymer/Ceramic Wireless MEMS Pressure Sensors for Harsh Environments: High Temperature and Biomedical Applications." Diss., Atlanta, Ga. : Georgia Institute of Technology, 2007. http://hdl.handle.net/1853/19789.

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Thesis (Ph.D)--Electrical and Computer Engineering, Georgia Institute of Technology, 2008.<br>Committee Chair: Dr. Mark G. Allen; Committee Co-Chair: Dr. Oliver Brand; Committee Member: Dr. Andrew Peterson; Committee Member: Dr. Elliot Chaikof; Committee Member: Dr. Gregory Durgin; Committee Member: Dr. Robert Butera.

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34

Reiman, Stephen E. "Exploitation of Nonlinear Behavior to Improve the Performance of a Magnetic Sensor." Thesis, Georgia Institute of Technology, 2004. http://hdl.handle.net/1853/5244.

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While nonlinear behavior in mechanical systems typically degrades the behavior and performance the devices, the presence of system nonlinearities can sometimes improve the quality of the system. A reason for avoiding nonlinearities within a device is the difficulty in controlling the device due to the effects of the nonlinearities on system behavior. However, careful analysis of nonlinear systems can allow for one to take advantage of the nonlinear behavior to improve system performance. The objective of this thesis is to exploit the use of nonlinearities to enhance system performance, sp

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35

Teves, André da Costa. "Otimização de acelerômetros MEMS eletroestáticos de alto desempenho." Universidade de São Paulo, 2013. http://www.teses.usp.br/teses/disponiveis/3/3152/tde-01082013-144527/.

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Microssistemas eletromecânicos ou Micro-Electro-Mechanical Systems (MEMS), representam uma classe de dispositivos que combinam funções mecânicas e eletrônicas em escala micrométrica. Através do uso de técnicas de microfabricação, adaptadas da indústria de semicondutores, é realizada a integração entre estruturas móveis, sensores, atuadores e eletrônica, tornando possível a implementação de sistemas completos miniaturizados. Acelerômetros eletrostáticos estão entre os dispositivos MEMS mais comercializados hoje em dia, com venda anual em todo o mundo superior a 100 milhões de unidades e crescen

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36

Palasagaram, Jithendra N. Riggs Lloyd Stephen. "Efforts towards the design and development of an electromagnetic induction sensor optimized for detection and discrimination of unexploded ordnance." Auburn, Ala., 2006. http://repo.lib.auburn.edu/2006%20Spring/master's/PALASAGARAM_NAGASANJEEVA_44.pdf.

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37

Lee, Jung Chul. "Fabrication, characterization, and application of multifunctional." Diss., Atlanta, Ga. : Georgia Institute of Technology, 2007. http://hdl.handle.net/1853/22697.

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Thesis (Ph. D.)--Mechanical Engineering, Georgia Institute of Technology, 2007.<br>Committee Chair: King, William; Committee Member: Allen, Mark; Committee Member: Brand, Oliver; Committee Member: Glezer, Ari; Committee Member: Joshi, Yogendra.

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38

Ellern, Ilya. "Metal organic frameworks based microcantilever gas sensors for detection of volatile organic compounds." Thesis, Georgia Institute of Technology, 2013. http://hdl.handle.net/1853/49127.

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Metal Organic Frameworks (MOFs) are a new class of nanoporous materials with high surface area, thermal/chemical stability and a taylorable pore size. These properties make MOFs ideal for storage and gas separation applications. Piezoresistive microcantilever sensors are microfabricated devices that are highly sensitive to surface strain due to doped single crystal silicon regions. Changes in resistance generated by surface strain can be measured with a high degree of accuracy using a Wheatstone bridge and basic instrumentation. This thesis will discuss the use of piezoresistive microca

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39

Davis, Bradford S., and T. Gordon Brown. "COMBINING SENSORS WITH AIRBORNE TELEMETRY INSTRUMENTATION TO MAKE RANGE MEASUREMENTS AND OBTAIN AERODYNAMICS." International Foundation for Telemetering, 1999. http://hdl.handle.net/10150/608710.

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International Telemetering Conference Proceedings / October 25-28, 1999 / Riviera Hotel and Convention Center, Las Vegas, Nevada<br>Obtaining a projectile’s free-flight motion profile and its aerodynamic coefficients is typically accomplished at indoor test ranges using photographic techniques synchronized to timing stations. Since these ranges are relatively short, many discrete tests are necessary to compile a complete understanding of the projectile’s behavior. When Time Space Position Information (TSPI) is requested over long-range flights, it has been gathered with expensive video, laser,

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Enriquez, Karla Cecilia. "Development of an ultra-low power sensor for highway health monitoring." To access this resource online via ProQuest Dissertations and Theses @ UTEP, 2009. http://0-proquest.umi.com.lib.utep.edu/login?COPT=REJTPTU0YmImSU5UPTAmVkVSPTI=&clientId=2515.

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41

Mendonça, Lucas Gonçalves Dias. "Micro-sensor capacitivo para avaliação da qualidade de combustíveis automotivos." Universidade de São Paulo, 2008. http://www.teses.usp.br/teses/disponiveis/3/3152/tde-30092008-173401/.

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Neste trabalho é proposto um sensor capacitivo do tipo eletrodos interdigitados para avaliação da qualidade de combustíveis automotivos. Os eletrodos interdigitados apresentam algumas características adequadas ao sensor em questão. Entre elas o fato de elevar significativamente a capacitância por apresentar grande quantidade de capacitores em paralelo e de ser uma estrutura possível de se fabricar por processos convencionais de microfabricação. Além disso, esses eletrodos permitem que o combustível preencha seus espaçamentos funcionando como seu dielétrico. Foram feitas modelagens e simulações

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42

FENG, Zhifu. "Electron Beam Lithography and Focused Ion Beam Techniques for the Development of Low Power Consumption Microelectromechanical Systems-based Chemiresistive Gas Sensors." Doctoral thesis, Università degli studi di Ferrara, 2023. https://hdl.handle.net/11392/2502108.

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I sensori di gas sono ampiamente utilizzati per rilevare gas tossici per la protezione ambientale, il monitoraggio industriale, la sicurezza domestica, l'analisi del respiro e il deterioramento degli alimenti. A parte i sensori di gas elettrochimici, che hanno una breve durata, e i sensori di gas ottici di grandi dimensioni con un costo elevato, i sensori di gas chemiresistivi basati su ossidi metallici semiconduttori (OMS) risultano essere una soluzione tecnologica estremamente interessante, grazie alla sua bassa produzione costo, proprietà fisiche stabili e versatilità chimica. Tuttavia, per

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Swafford, Robert D. "Development of a new generation of electric current sensors through advances in manufacturing techniques and material design." Diss., Georgia Institute of Technology, 2013. http://hdl.handle.net/1853/50306.

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Electrical systems have become ubiquitous, and with them come the need to accurately monitor electric current. The aerospace industry is no exception. Modern aircraft may contain more than one hundred current sensors, each one critical to a properly functioning vehicle. While these sensors function acceptably, several areas have been identified for improvement: size, weight, and cost. Each sensor is bulky, taking up valuable space. They are also costly to manufacture. The existing design is based on the Hall effect, and has remained fundamentally unchanged for decades. With the recent progress

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44

Patil, Nishad. "Design And Analysis Of MEMS Angular Rate Sensors." Thesis, Indian Institute of Science, 2006. http://hdl.handle.net/2005/291.

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Design and analysis of polysilicon and single crystal silicon gyroscopes have been carried out. Variations in suspension design have been explored. Designs that utilize in-plane and out-of-plane sensing are studied. Damping plays an important role in determining the sense response. Reduction in damping directly affects sensor performance. The various damping mechanisms that are prevalent in gyroscopes are studied. Perforations on the proof mass are observed to significantly reduce the damping in the device when operated in air. The effects of perforation geometry and density have been analyz

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45

Kranz, Michael S. "Micro-mechanical sensor for the spectral decomposition of acoustic signals." Diss., Georgia Institute of Technology, 2011. http://hdl.handle.net/1853/39496.

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An array of electret-biased frequency-selective resonant microelectromechanical system (MEMS) acoustic sensors was proposed to perform analysis of stress pulses created during an impact between two materials. This analysis allowed classification of the stiffness of the materials involved in the impact without applying post-impact signal processing. Arrays of resonant MEMS sensors provided filtering of the incident stress pulse and subsequent binning of time-domain waveforms into frequency-based spectra. Results indicated that different impact conditions and materials yielded different spectral

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46

Choi, Seungkeun. "A micromachined magnetic field sensor for low power electronic compass applications." Diss., Available online, Georgia Institute of Technology, 2007, 2007. http://etd.gatech.edu/theses/available/etd-04092007-105302/.

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Thesis (Ph. D.)--Electrical and Computer Engineering, Georgia Institute of Technology, 2007.<br>Allen, Mark, Committee Chair ; Brand, Oliver, Committee Member ; Kenney, James, Committee Member ; Hesketh, Peter, Committee Member ; Michaels, Jennifer, Committee Member.

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47

Jalil, Jubayer. "Micromachined Vibrating-reed Electrometer in Silicon-on-Glass Technology." Thesis, Griffith University, 2019. http://hdl.handle.net/10072/389082.

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Charge sensors (also known as charge electrometers) have a broad range of applications, such as those involving the measurement of ionization radiation, detection of bio-analyte and aerosol particles, mass spectrometry, scanning tunneling microscopy, and quantum computation. Designing charge sensors for electrometry is deemed significant because of the sensitivity and resolution issues in the range of micro-scales. A microelectromechanical systems (MEMS) vibrating-reed electrometer has been developed based on micromechanical variable capacitors. An electrostatically actuated MEMS resonator is

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48

Deng, Kangfa, Gerald Gerlach, and Margarita Guenther. "Force-compensated hydrogel-based pH sensor." SPIE, 2015. https://tud.qucosa.de/id/qucosa%3A35185.

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This paper presents the design, simulation, assembly and testing of a force-compensated hydrogel-based pH sensor. In the conventional deflection method, a piezoresistive pressure sensor is used as a chemical-mechanical-electronic transducer to measure the volume change of a pH-sensitive hydrogel. In this compensation method, the pH-sensitive hydrogel keeps its volume constant during the whole measuring process, independent of applied pH value. In order to maintain a balanced state, an additional thermal actuator is integrated into the close-loop sensor system with higher precision and faster d

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49

Waterfall, Tyler Lane. "Design of Piezoresistive MEMS Force and Displacement Sensors." Diss., CLICK HERE for online access, 2006. http://contentdm.lib.byu.edu/ETD/image/etd1549.pdf.

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Aiyar, Avishek R. "Microfabrication of a MEMS piezoresistive flow sensor - materials and processes." Thesis, Atlanta, Ga. : Georgia Institute of Technology, 2008. http://hdl.handle.net/1853/24696.

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