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Relevant bibliographies by topics / Microfabricatin

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Academic literature on the topic 'Microfabricatin'

Author: Grafiati

Published: 31 August 2024

Last updated: 31 July 2025

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Journal articles on the topic "Microfabricatin"

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De Maria, C., L. Grassi, F. Vozzi, A. Ahluwalia, and G. Vozzi. "Development of a novel micro-ablation system to realise micrometric and well-defined hydrogel structures for tissue engineering applications." Rapid Prototyping Journal 20, no. 6 (2014): 490–98. http://dx.doi.org/10.1108/rpj-03-2012-0022.

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Purpose – This paper aims to develop a novel micro-ablation system to realise micrometric and well-defined hydrogel structures. To engineer a tissue it is necessary to evaluate several aspects, such as cell-cell and cell-substrate interactions, its micro-architecture and mechanical stimuli that act on it. For this reason, it is important to fabricate a substrate which presents a microtopology similar to natural tissue and has chemical and mechanical properties able to promote cell functions. In this paper, well-defined hydrogel structures embedding cells were microfabricated using a purposely

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Du, L. Q., C. Liu, H. J. Liu, J. Qin, N. Li, and Rui Yang. "Design and Fabrication of Micro Hot Embossing Mold for Microfluidic Chip Used in Flow Cytometry." Key Engineering Materials 339 (May 2007): 246–51. http://dx.doi.org/10.4028/www.scientific.net/kem.339.246.

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Micro hot embossing mold of microfluidic chip used in flow cytometry is designed and microfabricated. After some kinds of microfabrication processes are tried, this paper presents a novel microfabrication technology of micro hot embossing metal mold. Micro metal mold is fabricated by low-cost UV-LIGA surface micro fabrication process using negative thick photoresist, SU-8. Different from other micro hot embossing molds, the micro mold with vertical sidewalls is fabricated by micro nickel electroforming directly on Nickel base. Based on the micro Nickel mold and automation fabrication system, h

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Han, Lei, Pingmei Ming, Shen Niu, Guangbin Yang, Dongdong Li, and Kuaile Cheng. "Microfabricating Mirror-like Surface Precision Micro-Sized Amorphous Alloy Structures Using Jet-ECM Process." Micromachines 15, no. 3 (2024): 375. http://dx.doi.org/10.3390/mi15030375.

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Amorphous alloy (AA) is a high-performance metal material generally with significantly excellent mechanical and corrosion resistance properties and thus is considered as a desirable material selection for micro-scale articles. However, the microfabrication of AA still faces a variety of technical challenges mainly because the materials are too hard to process and easily lose their original properties, although at moderately high temperatures. In this study, jet-electrolyte electrochemical machining (Jet-ECM) was proposed to microfabricate the Zr-based AA because it is a low-temperature materia

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Folch, A., A. Ayon, O. Hurtado, M. A. Schmidt, and M. Toner. "Molding of Deep Polydimethylsiloxane Microstructures for Microfluidics and Biological Applications." Journal of Biomechanical Engineering 121, no. 1 (1999): 28–34. http://dx.doi.org/10.1115/1.2798038.

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Here we demonstrate the microfabrication of deep (>25 μm) polymeric microstructures created by replica-molding polydimethylsiloxane (PDMS) from microfabricated Si substrates. The use of PDMS structures in microfluidics and biological applications is discussed. We investigated the feasibility of two methods for the microfabrication of the Si molds: deep plasma etch of silicon-on-insulator (SOI) wafers and photolithographic patterning of a spin-coated photoplastic layer. Although the SOI wafers can be patterned at higher resolution, we found that the inexpensive photoplastic yields similar re

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Banerjee, Arunav S., Richard Blaikie, and Wen Hui Wang. "Microfabrication Process for XYZ Stage-Needle Assembly for Cellular Delivery and Surgery." Materials Science Forum 700 (September 2011): 195–98. http://dx.doi.org/10.4028/www.scientific.net/msf.700.195.

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In this paper, we present our ongoing work on developing a microfabricated XYZ stage-needle arrayed single crystal silicon (SCS) structure for cellular delivery and surgery. We discuss the device design and working principle based on electrostatic actuation. We also briefly discuss our microfabrication process flow and show some preliminary results of fabricating arrays of microneedles that are 250 µm long and 5 µm at the tip diameter.

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PARK, W. B., J. H. CHOI, C. W. PARK, et al. "FABRICATION OF MICRO PROBE-TYPE ELECTRODES FOR MICROELECTRO-CHEMICAL MACHINING USING MICROFABRICATION." International Journal of Modern Physics B 24, no. 15n16 (2010): 2639–44. http://dx.doi.org/10.1142/s0217979210065398.

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In this study, the mass fabrication of microelectrode tools for microelectrochemical machining (MECM) was studied using microfabrication processes. The cantilever type geometry of microelectrodes was defined by photolithography processes, and metal patterns were made for electrical contacts. Various fabrication processes were studied for the fabrication of microelectrode tools, such as wet etching, lift-off, and electroforming for metal layer patterning. MECM test results showed feasibility of the fabricated electrode tools. The microfabricated electrodes can be used as micromachining tools fo

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Liu, Yue, Megan Chesnut, Amy Guitreau, et al. "Microfabrication of low-cost customisable counting chambers for standardised estimation of sperm concentration." Reproduction, Fertility and Development 32, no. 9 (2020): 873. http://dx.doi.org/10.1071/rd19154.

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Evaluation of sperm concentration is essential for research and procedures involving AI, cryopreservation and sperm quality assessment. Microfabrication technologies have shown tremendous potential for rapid prototyping and fabrication of devices to assist reproduction and fertility research, but such utility has not yet been made available for most reproduction laboratories. The aim of this study was to evaluate the feasibility of using microfabrication techniques to produce counting chambers for estimation of sperm concentration. Zebrafish (Danio rerio) spermatozoa were used as a model for e

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Alvarez-Escobar, Marta, Sidónio C. Freitas, Derek Hansford, Fernando J. Monteiro, and Alejandro Pelaez-Vargas. "Soft Lithography and Minimally Human Invasive Technique for Rapid Screening of Oral Biofilm Formation on New Microfabricated Dental Material Surfaces." International Journal of Dentistry 2018 (2018): 1–5. http://dx.doi.org/10.1155/2018/4219625.

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Introduction. Microfabrication offers opportunities to study surface concepts focused to reduce bacterial adhesion on implants using human minimally invasive rapid screening (hMIRS). Wide information is available about cell/biomaterial interactions using eukaryotic and prokaryotic cells on surfaces of dental materials with different topographies, but studies using human being are still limited. Objective. To evaluate a synergy of microfabrication and hMIRS to study the bacterial adhesion on micropatterned surfaces for dental materials. Materials and Methods. Micropatterned and flat surfaces on

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Starodubov, Andrey, Roman Torgashov, Viktor Galushka, et al. "Microfabrication, Characterization, and Cold-Test Study of the Slow-Wave Structure of a Millimeter-Band Backward-Wave Oscillator with a Sheet Electron Beam." Electronics 11, no. 18 (2022): 2858. http://dx.doi.org/10.3390/electronics11182858.

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In this paper, the results of the microfabrication, characterization, and cold-test study of the previously proposed truncated sine-waveguide interaction structure with wideband-matched output couplers for the millimeter-band backward-wave oscillator (BWO) driven by a high-current-density sheet electron beam are presented. Computer-numerical-control (CNC) micromilling was used to fabricate the designed interaction structure. The first sample was microfabricated from an aluminum alloy to test the milling process. The final sample was made from oxygen-free copper. Scanning electron microscopy (S

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Creff, Justine, Laurent Malaquin, and Arnaud Besson. "In vitro models of intestinal epithelium: Toward bioengineered systems." Journal of Tissue Engineering 12 (January 2021): 204173142098520. http://dx.doi.org/10.1177/2041731420985202.

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The intestinal epithelium, the fastest renewing tissue in human, is a complex tissue hosting multiple cell types with a dynamic and multiparametric microenvironment, making it particularly challenging to recreate in vitro. Convergence of recent advances in cellular biology and microfabrication technologies have led to the development of various bioengineered systems to model and study the intestinal epithelium. Theses microfabricated in vitro models may constitute an alternative to current approaches for studying the fundamental mechanisms governing intestinal homeostasis and pathologies, as w

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Dissertations / Theses on the topic "Microfabricatin"

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Feng, Chunhua. "Microfabrication-compatible synthesis strategies for nanoscale electrocatalysts in microfabricated fuel cell applications /." View abstract or full-text, 2007. http://library.ust.hk/cgi/db/thesis.pl?CENG%202007%20FENG.

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Grebille, Bénédicte. "Photopolymérisation radicalaire contrôlée par ATRP : études mécanistiques, applications en sciences des matériaux et perspectives en microfabrication." Electronic Thesis or Diss., Lyon, École normale supérieure, 2024. http://www.theses.fr/2024ENSL0017.

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Au début du XXème siècle, Giacomo Luigi Ciamician, physico-chimiste, a mis en évidence l'intérêt de recourir à la lumière comme source d'énergie renouvelable pour des réactions chimiques. À la fin du siècle, la découverte de la polymérisation radicalaire contrôlée, notamment l'ATRP (« Atom Transfer Radical Polymerization »), a marqué une avancée majeure dans la chimie des polymères. Cette technique a été largement développée et utilisée dans divers domaines, notamment pour la fonctionnalisation de surfaces à travers l'ATRP amorcée sur surface (« Surface Initiated ATRP », SI-ATRP), offrant ains

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Altay, Gizem. "Towards the development of biomimetic in vitro models of intestinal epithelium derived from intestinal organoids." Doctoral thesis, Universitat de Barcelona, 2018. http://hdl.handle.net/10803/664864.

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Intestinal epithelium is highly specialized tissue organized into crypt-villus units relevant for their effective barrier function and nutrient absorption. In the crypt units reside the proliferative intestinal stem cells (ISCs) that divide and differentiate while migrating along the villi to generate the epithelium. The proliferation, migration and differentiation of ISCs is governed by the tightly controlled spatio-chemical gradients of ISC niche factors; bone morphogenic protein (BMP), wingless/Int (Wnt) and epidermal growth factor (EGF) pathway modulators. In vitro models of the intestinal

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Caballero, Lucas Francesc. "Z-scan methods for ultrashort pulsed laser microprocessing of transparent materials." Doctoral thesis, Universitat de Barcelona, 2019. http://hdl.handle.net/10803/668185.

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The use of femtosecond lasers has recently gained attention as a result of the recognition to Gérard Mourou and Donna Strickland with the award of the Nobel Prize in Physics 2018 "for their method of generating high-intensity, ultra-short optical pulses". The innumerable areas of application of ultrashort laser pulses have not yet been completely explored, but their possibilities for accessing the microworld are considered highly valuable. Following this spirit, the objective of this thesis consisted in proposing and implementing feasible solutions to the challenges involved in the microfab

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Cannon, Andrew Hampton. "Unconventional Microfabrication Using Polymers." Thesis, Georgia Institute of Technology, 2006. http://hdl.handle.net/1853/19845.

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Current microfabrication materials include silicon, a wide variety of metals, dielectrics, and some polymers. Because of the low cost and high processing flexibility that polymers generally have, expanding the use of polymers in microfabrication would benefit the microfabrication community, enabling new routes towards goals such as low-cost 3D microfabrication. This work describes two main unconventional uses of polymers in microfabrication. The first unconventional use is as a carrier material in the self-assembly (SA) of millimeter-scale parts in which functional electronic components a

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Florian, Baron Camilo. "Laser direct-writing for microfabrication." Doctoral thesis, Universitat de Barcelona, 2016. http://hdl.handle.net/10803/400403.

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Digital manufacturing constitutes a real industrial revolution that is transforming the production processes from the early stages of research and development to mass production and marketing. The biggest difference in comparison with old fabrication methods is the possibility to perform changes in the pattern design just by using mouse clicks instead of modifying an already fabricated prototype, which results in faster, cheaper and more efficient fabrication processes. For example, new technologies enabling the production of printed electronic devices on flexible substrates and compatible wit

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Wang, Weihua. "Tools for flexible electrochemical microfabrication /." Thesis, Connect to this title online; UW restricted, 2002. http://hdl.handle.net/1773/9854.

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Barham, Oliver M. "Microfabricated Bulk Piezoelectric Transformers." Thesis, University of Maryland, College Park, 2017. http://pqdtopen.proquest.com/#viewpdf?dispub=10615552.

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<p> Piezoelectric voltage transformers (PTs) can be used to transform an input voltage into a different, required output voltage needed in electronic and electro- mechanical systems, among other varied uses. On the macro scale, they have been commercialized in electronics powering consumer laptop liquid crystal displays, and compete with an older, more prevalent technology, inductive electromagnetic volt- age transformers (EMTs). The present work investigates PTs on smaller size scales that are currently in the academic research sphere, with an eye towards applications including micro-robotics

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Mehregany, Mehran. "Microfabricated silicon electric mechanisms." Thesis, Massachusetts Institute of Technology, 1990. http://hdl.handle.net/1721.1/14042.

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Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1990.<br>Includes bibliographical references (leaves 151-156).<br>by Mehran Mehregany.<br>Ph.D.

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Griffith, Alun Wyn. "Applications of microfabrication in biosensor technology." Thesis, University of Glasgow, 1996. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.361768.

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Books on the topic "Microfabricatin"

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Franssila, Sami. Introduction to Microfabrication. John Wiley & Sons, Ltd, 2010. http://dx.doi.org/10.1002/9781119990413.

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Sugioka, Koji, Michel Meunier, and Alberto Piqué, eds. Laser Precision Microfabrication. Springer Berlin Heidelberg, 2010. http://dx.doi.org/10.1007/978-3-642-10523-4.

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Chakraborty, Suman, ed. Microfluidics and Microfabrication. Springer US, 2010. http://dx.doi.org/10.1007/978-1-4419-1543-6.

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Michel, Meunier, Piqué Alberto, and SpringerLink (Online service), eds. Laser Precision Microfabrication. Springer-Verlag Berlin Heidelberg, 2010.

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Narayanan, Sundararajan, ed. Microfabrication for microfluidics. Artech House, 2010.

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Franssila, Sami. Introduction to Microfabrication. John Wiley & Sons, Ltd., 2005.

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Chakraborty, Suman. Microfluidics and Microfabrication. Springer Science+Business Media, LLC, 2010.

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J, Jackson Mark, ed. Microfabrication and nanomanufacturing. Taylor & Francis, 2005.

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Kordal, Richard, Arthur Usmani, and Wai Tak Law, eds. Microfabricated Sensors. American Chemical Society, 2002. http://dx.doi.org/10.1021/bk-2002-0815.

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Nassar, Raja. Modelling of Microfabrication Systems. Springer Berlin Heidelberg, 2003.

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Book chapters on the topic "Microfabricatin"

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Adams, Thomas M., and Richard A. Layton. "Microfabrication laboratories." In Introductory MEMS. Springer US, 2009. http://dx.doi.org/10.1007/978-0-387-09511-0_13.

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Leitão, Diana C., José Pedro Amaral, Susana Cardoso, and Càndid Reig. "Microfabrication Techniques." In Giant Magnetoresistance (GMR) Sensors. Springer Berlin Heidelberg, 2013. http://dx.doi.org/10.1007/978-3-642-37172-1_2.

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Shoji, Satoru, and Kyoko Masui. "Nano-/Microfabrication." In Encyclopedia of Polymeric Nanomaterials. Springer Berlin Heidelberg, 2013. http://dx.doi.org/10.1007/978-3-642-36199-9_108-2.

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Joye, Colin D., Alan M. Cook, and Diana Gamzina. "Microfabrication Technologies." In Advances in Terahertz Source Technologies. Jenny Stanford Publishing, 2024. http://dx.doi.org/10.1201/9781003459675-26.

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Johnstone, Robert W., and M. Parameswaran. "Microfabrication Processes." In An Introduction to Surface-Micromachining. Springer US, 2004. http://dx.doi.org/10.1007/978-1-4020-8021-0_2.

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Shoji, Satoru, and Kyoko Masui. "Nano-/Microfabrication." In Encyclopedia of Polymeric Nanomaterials. Springer Berlin Heidelberg, 2015. http://dx.doi.org/10.1007/978-3-642-29648-2_108.

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Ono, Takahito, and Masayoshi Esashi. "Microfabricated Probe Technology." In Encyclopedia of Nanotechnology. Springer Netherlands, 2016. http://dx.doi.org/10.1007/978-94-017-9780-1_247.

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Juarez-Martinez, Gabriela, Alessandro Chiolerio, Paolo Allia, et al. "Microfabricated Probe Technology." In Encyclopedia of Nanotechnology. Springer Netherlands, 2012. http://dx.doi.org/10.1007/978-90-481-9751-4_247.

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Baborowski, J. "Microfabrication of Piezoelectric MEMS." In Electroceramic-Based MEMS. Springer US, 2005. http://dx.doi.org/10.1007/0-387-23319-9_13.

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Qin, Dong, Younan Xia, John A. Rogers, Rebecca J. Jackman, Xiao-Mei Zhao, and George M. Whitesides. "Microfabrication, Microstructures and Microsystems." In Topics in Current Chemistry. Springer Berlin Heidelberg, 1998. http://dx.doi.org/10.1007/3-540-69544-3_1.

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Conference papers on the topic "Microfabricatin"

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Bhatia, Sangeeta N., Martin L. Yarmush, and Mehmet Toner. "Engineered Substrates for Controlling Cell-Cell Interactions." In ASME 1997 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 1997. http://dx.doi.org/10.1115/imece1997-1319.

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Abstract Biomaterials have been previously engineered to serve a variety of different functions: precise degradation in vivo (Kimura, 1993), modulation of cell physiology via binding to specific ligands (Hubbell et al, 1992), and selective permeability of certain solutes (Lysaght et al, 1994). However, in complex tissues, where cell-cell interactions strongly influence tissue function, biomaterials which modulate this fundamental parameter have not been available. In this study, we describe a technique which allows control over cell-cell interactions by using semiconductor-based microfabricati

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Adams, Tyler, Jordyn Palmer, and Aaron R. Hawkins. "Microfabrication on a Suspended Polymer." In 2025 Intermountain Engineering, Technology and Computing (IETC). IEEE, 2025. https://doi.org/10.1109/ietc64455.2025.11039437.

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Levitan, Jeremy A., Dan Good, Michael J. Sinclair, and Joseph M. Jacobson. "Creation of Nanometer-Sized Features in Polysilicon Using Fusing." In ASME 2001 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 2001. http://dx.doi.org/10.1115/imece2001/mems-23858.

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Abstract Current microfabrication systems can achieve resolutions of approximately 0.1μm. We present physical methods for creating structures with length scales and characteristic dimensions significantly below current fabrication resolutions. These structures, themselves fabricated in conventional, gross-resolution (greater than 2μm) semiconductor facilities, undergo structural change to create features below the lithography limits of the fabrication process. These devices — dog-boned microfabricated polysilicon fuses — are heated just below melting, and a small perturbation current heats a n

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Park, Daniel S., Saade Bou-Mikael, Sean King, Karsten E. Thompson, Clinton S. Willson, and Dimitris E. Nikitopoulos. "Design and Fabrication of Rock-Based Micromodel." In ASME 2012 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 2012. http://dx.doi.org/10.1115/imece2012-88501.

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A rock-based micromodel was designed using depth averaging with Boise rock digital images obtained from the X-ray micro-computed tomography. Design optimization of 2.5D micromodels was carried out using computational fluid dynamics (CFD) simulations through error analysis of dynamic flow parameters (velocities and permeability), which showed the close dynamic flow match between the actual 3D rock and the optimized 2.5D micromodel. Multiple numbers of polymer micromodels were microfabricated via micromilling of a brass mold insert and hot embossing in polymethylmethacrylate (PMMA). The design o

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Kandra, Deepak, and Ram V. Devireddy. "On the Possible Application of a Microscale Thermocouple to Measure Intercellular Ice Formation in Cells Embedded in an Extracellular Matrix." In ASME 2004 International Mechanical Engineering Congress and Exposition. ASMEDC, 2004. http://dx.doi.org/10.1115/imece2004-60728.

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To optimize a freezing protocol for tissue systems, knowledge of intercellular ice formation and water transport is essential. Water transport during freezing can be measured using low temperature microscopy technique [1] and/or by differential scanning calorimetry method [2]. To study the formation of intracellular ice in cells embedded in an extracellular matrix we propose to design and develop an array of microscale thermocouples using microfabrication techniques [3]. The microfabricated thermocouples will be required to accurately measure the small temperature fluctuations in an embedded c

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Demiri, S., and S. Boedo. "Clearance Effects on the Impact Behavior of Large Aspect Ratio Silicon Journal Microbearings." In STLE/ASME 2010 International Joint Tribology Conference. ASMEDC, 2010. http://dx.doi.org/10.1115/ijtc2010-41189.

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This paper investigates the effect of bearing clearance on the impact behavior of microfabricated silicon journal bearings. The design of a novel test apparatus to assess microbearing wear behavior is presented. Microbearing designs, microfabrication processes, and metrology characterization techniques are discussed. A dynamic impact model of the bearing system based on classical impulse-momentum relations is formulated in order to assess the effect of clearance on rotor speed. Coefficient of restitution values obtained over the range of kinematically allowable radial clearance specifications

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Carretero, J. A., and K. S. Breuer. "Measurement and Modeling of the Flow Characteristics of Micro Disc Valves." In ASME 2000 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 2000. http://dx.doi.org/10.1115/imece2000-1120.

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Abstract The head losses in microfluidic systems such as micropumps are dominated by losses in microvalves, where microfabrication constraints limit significantly possible microvalve designs. This makes them quite different from conventional valves. In particular, flow characteristics in the laminar and low-Reynolds turbulent regimes are not understood clearly, and detailed information about the flow losses is lacking. This paper addresses this issue by using a scaled-up (10:1) valve experiment to measure pressure losses in typical microfabricated valve geometries. The macroscale model is full

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Hsu, C. P., N. E. Jewell-Larsen, A. C. Rollins, et al. "Miniaturization of Electrostatic Fluid Accelerators." In ASME 2006 International Mechanical Engineering Congress and Exposition. ASMEDC, 2006. http://dx.doi.org/10.1115/imece2006-13990.

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Existing thermal management methods for electronics do not meet technology needs and remain a major bottleneck in the evolution of computing, sensing, and information technology. The decreasing size of microelectronics components and the resulting increasing thermal output density require novel cooling solutions. Electrohydrodynamic ionic wind pumps, also known as electrostatic fluid accelerators (EFA), have the potential of becoming a critical element of electronic thermal management solutions. In order to take full advantage of EFA-based thermal management, it is essential to miniaturize EFA

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Wang, Yaqiang, and Massood Tabib-Azar. "Fabrication and Characterization of Evanescent Microwave Probes Compatible With Atomic Force Microscope for Scanning Near-Field Microscopy." In ASME 2002 International Mechanical Engineering Congress and Exposition. ASMEDC, 2002. http://dx.doi.org/10.1115/imece2002-33291.

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The design and microfabrication of silicon co-axial evanescent microwave probes (EMP) compatible with atomic force microscope (AFM) imaging was discussed. Scanning EMP (SEMP) imaging is suitable for nondestructive surface and subsurface characterization of materials over a wide frequency range-between 0.1 GHz and 140 GHz. The microfabricated EMP consists of a silicon V-shaped cantilever beam, a co-axial tip, and aluminum co-planar waveguides. The coaxial tip has an apex radius of ∼80 Å. The tip itself is oxidation-sharpened heavily-doped silicon surrounded by an oxide layer that acts as insula

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Ko, Jong Soo, Young-Ho Cho, Byung Man Kwak, and Kwanhum Park. "Design and Fabrication of Piezoresistive Cantilever Microaccelerometer Arrays With a Symmetrically Bonded Proof-Mass." In ASME 1998 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 1998. http://dx.doi.org/10.1115/imece1998-1267.

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Abstract This paper presents the production-oriented design and microfabrication process of a piezoresistive cantilever-beam microaccelerometer with a symmetrically bonded proof-mass. The symmetrically bonded proof-mass structure is devised not only for improving the production yield, but also for reducing the transverse sensitivity of the accelerometer. The accelerometers are batch fabricated in arrays, from which individual devices are obtained by wafer sawing process. The microfabricated accelerometer shows a resonant frequency of 2.15kHz and a sensitivity of 34μV/g/V within a nonlinearity

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Reports on the topic "Microfabricatin"

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Woodard, David W. Microfabrication Technology for Photonics. Defense Technical Information Center, 1990. http://dx.doi.org/10.21236/ada225428.

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Jau, Yuan-Yu. Microfabricated Waveguide Atom Traps. Office of Scientific and Technical Information (OSTI), 2017. http://dx.doi.org/10.2172/1396077.

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Cowan, Benjamin M. Microfabrication of Laser-Driven Accelerator Structures. Office of Scientific and Technical Information (OSTI), 2003. http://dx.doi.org/10.2172/812999.

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James C. Lund. Microfabricated Solid State Neutron Generators. Office of Scientific and Technical Information (OSTI), 2000. http://dx.doi.org/10.2172/791322.

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James C. Lund. Microfabricated Solid State Neutron Generators. Office of Scientific and Technical Information (OSTI), 2001. http://dx.doi.org/10.2172/791324.

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Bauer, Todd, Adam Jones, Tony Lentine, John Mudrick, Murat Okandan, and Arun Rodrigues. Trends in Microfabrication Capabilities & Device Architectures. Office of Scientific and Technical Information (OSTI), 2015. http://dx.doi.org/10.2172/1184366.

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Bauer, Todd, Adam Jones, Anthony L. Lentine, John Mudrick, Murat Okandan, and Arun F. Rodrigues. Trends in Microfabrication Capabilities & Device Architectures. Office of Scientific and Technical Information (OSTI), 2015. http://dx.doi.org/10.2172/1192538.

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Joye, Colin D., Alan M. Cook, Jeffrey P. Calame, et al. Microfabrication Techniques for Millimeter Wave Vacuum Electronics. Defense Technical Information Center, 2015. http://dx.doi.org/10.21236/ad1004171.

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Mastrangelo, C. H. Microfabrication Techniques for Plastic Microelectromechanical Systems (MEMS). Defense Technical Information Center, 2003. http://dx.doi.org/10.21236/ada420836.

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Lawandy, N. M. Laser Microfabrication in Glasses: Mechanisms and Applications. Defense Technical Information Center, 1997. http://dx.doi.org/10.21236/ada376443.

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