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Journal articles on the topic 'Microfabricatin'

Author: Grafiati

Published: 31 August 2024

Last updated: 31 July 2025

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1

De Maria, C., L. Grassi, F. Vozzi, A. Ahluwalia, and G. Vozzi. "Development of a novel micro-ablation system to realise micrometric and well-defined hydrogel structures for tissue engineering applications." Rapid Prototyping Journal 20, no. 6 (2014): 490–98. http://dx.doi.org/10.1108/rpj-03-2012-0022.

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Purpose – This paper aims to develop a novel micro-ablation system to realise micrometric and well-defined hydrogel structures. To engineer a tissue it is necessary to evaluate several aspects, such as cell-cell and cell-substrate interactions, its micro-architecture and mechanical stimuli that act on it. For this reason, it is important to fabricate a substrate which presents a microtopology similar to natural tissue and has chemical and mechanical properties able to promote cell functions. In this paper, well-defined hydrogel structures embedding cells were microfabricated using a purposely

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Du, L. Q., C. Liu, H. J. Liu, J. Qin, N. Li, and Rui Yang. "Design and Fabrication of Micro Hot Embossing Mold for Microfluidic Chip Used in Flow Cytometry." Key Engineering Materials 339 (May 2007): 246–51. http://dx.doi.org/10.4028/www.scientific.net/kem.339.246.

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Micro hot embossing mold of microfluidic chip used in flow cytometry is designed and microfabricated. After some kinds of microfabrication processes are tried, this paper presents a novel microfabrication technology of micro hot embossing metal mold. Micro metal mold is fabricated by low-cost UV-LIGA surface micro fabrication process using negative thick photoresist, SU-8. Different from other micro hot embossing molds, the micro mold with vertical sidewalls is fabricated by micro nickel electroforming directly on Nickel base. Based on the micro Nickel mold and automation fabrication system, h

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Han, Lei, Pingmei Ming, Shen Niu, Guangbin Yang, Dongdong Li, and Kuaile Cheng. "Microfabricating Mirror-like Surface Precision Micro-Sized Amorphous Alloy Structures Using Jet-ECM Process." Micromachines 15, no. 3 (2024): 375. http://dx.doi.org/10.3390/mi15030375.

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Amorphous alloy (AA) is a high-performance metal material generally with significantly excellent mechanical and corrosion resistance properties and thus is considered as a desirable material selection for micro-scale articles. However, the microfabrication of AA still faces a variety of technical challenges mainly because the materials are too hard to process and easily lose their original properties, although at moderately high temperatures. In this study, jet-electrolyte electrochemical machining (Jet-ECM) was proposed to microfabricate the Zr-based AA because it is a low-temperature materia

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Folch, A., A. Ayon, O. Hurtado, M. A. Schmidt, and M. Toner. "Molding of Deep Polydimethylsiloxane Microstructures for Microfluidics and Biological Applications." Journal of Biomechanical Engineering 121, no. 1 (1999): 28–34. http://dx.doi.org/10.1115/1.2798038.

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Here we demonstrate the microfabrication of deep (>25 μm) polymeric microstructures created by replica-molding polydimethylsiloxane (PDMS) from microfabricated Si substrates. The use of PDMS structures in microfluidics and biological applications is discussed. We investigated the feasibility of two methods for the microfabrication of the Si molds: deep plasma etch of silicon-on-insulator (SOI) wafers and photolithographic patterning of a spin-coated photoplastic layer. Although the SOI wafers can be patterned at higher resolution, we found that the inexpensive photoplastic yields similar re

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Banerjee, Arunav S., Richard Blaikie, and Wen Hui Wang. "Microfabrication Process for XYZ Stage-Needle Assembly for Cellular Delivery and Surgery." Materials Science Forum 700 (September 2011): 195–98. http://dx.doi.org/10.4028/www.scientific.net/msf.700.195.

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In this paper, we present our ongoing work on developing a microfabricated XYZ stage-needle arrayed single crystal silicon (SCS) structure for cellular delivery and surgery. We discuss the device design and working principle based on electrostatic actuation. We also briefly discuss our microfabrication process flow and show some preliminary results of fabricating arrays of microneedles that are 250 µm long and 5 µm at the tip diameter.

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PARK, W. B., J. H. CHOI, C. W. PARK, et al. "FABRICATION OF MICRO PROBE-TYPE ELECTRODES FOR MICROELECTRO-CHEMICAL MACHINING USING MICROFABRICATION." International Journal of Modern Physics B 24, no. 15n16 (2010): 2639–44. http://dx.doi.org/10.1142/s0217979210065398.

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In this study, the mass fabrication of microelectrode tools for microelectrochemical machining (MECM) was studied using microfabrication processes. The cantilever type geometry of microelectrodes was defined by photolithography processes, and metal patterns were made for electrical contacts. Various fabrication processes were studied for the fabrication of microelectrode tools, such as wet etching, lift-off, and electroforming for metal layer patterning. MECM test results showed feasibility of the fabricated electrode tools. The microfabricated electrodes can be used as micromachining tools fo

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Liu, Yue, Megan Chesnut, Amy Guitreau, et al. "Microfabrication of low-cost customisable counting chambers for standardised estimation of sperm concentration." Reproduction, Fertility and Development 32, no. 9 (2020): 873. http://dx.doi.org/10.1071/rd19154.

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Evaluation of sperm concentration is essential for research and procedures involving AI, cryopreservation and sperm quality assessment. Microfabrication technologies have shown tremendous potential for rapid prototyping and fabrication of devices to assist reproduction and fertility research, but such utility has not yet been made available for most reproduction laboratories. The aim of this study was to evaluate the feasibility of using microfabrication techniques to produce counting chambers for estimation of sperm concentration. Zebrafish (Danio rerio) spermatozoa were used as a model for e

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Alvarez-Escobar, Marta, Sidónio C. Freitas, Derek Hansford, Fernando J. Monteiro, and Alejandro Pelaez-Vargas. "Soft Lithography and Minimally Human Invasive Technique for Rapid Screening of Oral Biofilm Formation on New Microfabricated Dental Material Surfaces." International Journal of Dentistry 2018 (2018): 1–5. http://dx.doi.org/10.1155/2018/4219625.

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Introduction. Microfabrication offers opportunities to study surface concepts focused to reduce bacterial adhesion on implants using human minimally invasive rapid screening (hMIRS). Wide information is available about cell/biomaterial interactions using eukaryotic and prokaryotic cells on surfaces of dental materials with different topographies, but studies using human being are still limited. Objective. To evaluate a synergy of microfabrication and hMIRS to study the bacterial adhesion on micropatterned surfaces for dental materials. Materials and Methods. Micropatterned and flat surfaces on

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Starodubov, Andrey, Roman Torgashov, Viktor Galushka, et al. "Microfabrication, Characterization, and Cold-Test Study of the Slow-Wave Structure of a Millimeter-Band Backward-Wave Oscillator with a Sheet Electron Beam." Electronics 11, no. 18 (2022): 2858. http://dx.doi.org/10.3390/electronics11182858.

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In this paper, the results of the microfabrication, characterization, and cold-test study of the previously proposed truncated sine-waveguide interaction structure with wideband-matched output couplers for the millimeter-band backward-wave oscillator (BWO) driven by a high-current-density sheet electron beam are presented. Computer-numerical-control (CNC) micromilling was used to fabricate the designed interaction structure. The first sample was microfabricated from an aluminum alloy to test the milling process. The final sample was made from oxygen-free copper. Scanning electron microscopy (S

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Creff, Justine, Laurent Malaquin, and Arnaud Besson. "In vitro models of intestinal epithelium: Toward bioengineered systems." Journal of Tissue Engineering 12 (January 2021): 204173142098520. http://dx.doi.org/10.1177/2041731420985202.

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The intestinal epithelium, the fastest renewing tissue in human, is a complex tissue hosting multiple cell types with a dynamic and multiparametric microenvironment, making it particularly challenging to recreate in vitro. Convergence of recent advances in cellular biology and microfabrication technologies have led to the development of various bioengineered systems to model and study the intestinal epithelium. Theses microfabricated in vitro models may constitute an alternative to current approaches for studying the fundamental mechanisms governing intestinal homeostasis and pathologies, as w

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Yang, Jian Zhong, Li Chao Pan, C. L. Kang, et al. "Advance of the Micro-Magnetometer MEMSMag Research." Advanced Materials Research 60-61 (January 2009): 241–45. http://dx.doi.org/10.4028/www.scientific.net/amr.60-61.241.

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The MEMS fluxgate magnetic sensor which is characterized by its small mass, smart volume, high sensitivity and outstanding temperature stability, is often applied on the measurements of weak magnetic fields, such as the geomagnetic field. Therefore, it is widely utilized in the field of aeronautics and aerospace field, especially in Nano-/Pico- satellites. MEMSMag, a novel type of micro fluxgate magnetic sensor (MFGM), which exploits magnetic fluxgate principle, was designed and microfabricated, Based on MEMS technology. The micro sensor probe has symmetrical geometry, and is flexible for elec

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Zuchowicz, Nikolas C., Jorge A. Belgodere, Yue Liu, Ignatius Semmes, William Todd Monroe, and Terrence R. Tiersch. "Low-Cost Resin 3-D Printing for Rapid Prototyping of Microdevices: Opportunities for Supporting Aquatic Germplasm Repositories." Fishes 7, no. 1 (2022): 49. http://dx.doi.org/10.3390/fishes7010049.

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Germplasm repositories can benefit sustainable aquaculture by supporting genetic improvement, assisted reproduction, and management of valuable genetic resources. Lack of reliable quality management tools has impeded repository development in the past several decades. Microfabricated open-hardware devices have emerged as a new approach to assist repository development by providing standardized quality assessment capabilities to enable routine quality control. However, prototyping of microfabricated devices (microdevices) traditionally relies on photolithography techniques that are costly, time

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Bakajin, Olgica, Eric Fountain, Keith Morton, Stephen Y. Chou, James C. Sturm, and Robert H. Austin. "Materials Aspects in Micro- and Nanofluidic Systems Applied to Biology." MRS Bulletin 31, no. 2 (2006): 108–13. http://dx.doi.org/10.1557/mrs2006.24.

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AbstractOne of the key problems in microfabrication and especially nanofabrication applied to biology is materials selection. Proper materials must have mechanical stability and the ability to hermetically bond to other surfaces, yet not bind biological molecules. They must also be wettable by water and have good optical properties. In this article, we review some of the attempts to find materials for micro- and nanofluidic systems in biological applications that satisfy these rather conflicting constraints.We discuss the materials properties that make poly (dimethylsiloxane) or non-elastomeri

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Ahn, Jeong, and Kim. "Emerging Encapsulation Technologies for Long-Term Reliability of Microfabricated Implantable Devices." Micromachines 10, no. 8 (2019): 508. http://dx.doi.org/10.3390/mi10080508.

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The development of reliable long-term encapsulation technologies for implantable biomedical devices is of paramount importance for the safe and stable operation of implants in the body over a period of several decades. Conventional technologies based on titanium or ceramic packaging, however, are not suitable for encapsulating microfabricated devices due to their limited scalability, incompatibility with microfabrication processes, and difficulties with miniaturization. A variety of emerging materials have been proposed for encapsulation of microfabricated implants, including thin-film inorgan

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Wang, Nan, Fu Li Hsiao, Moorthi Palaniapan, et al. "A Novel Micromechanical Resonator Using Two-Dimensional Phononic Crystal Slab." Advanced Materials Research 254 (May 2011): 195–98. http://dx.doi.org/10.4028/www.scientific.net/amr.254.195.

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Two-dimensional (2-D) Silicon phononic crystal (PnC) slab of a square array of cylindrical air holes in a 10μm thick free-standing silicon plate with line defects is characterized as a cavity-mode PnC resonator. Piezoelectric aluminum nitride (AlN) film is deployed as the inter-digital transducers (IDT) to transmit and detect acoustic waves, thus making the whole microfabrication process CMOS-compatible. Both the band structure of the PnC and the transmission spectrum of the proposed PnC resonator are analyzed and optimized using finite element method (FEM). The measured quality factor (Q fact

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Vejella, Sujitha, and Sazzadur Chowdhury. "A MEMS Ultra-Wideband (UWB) Power Sensor with a Fe-Co-B Core Planar Inductor and a Vibrating Diaphragm Capacitor." Sensors 21, no. 11 (2021): 3858. http://dx.doi.org/10.3390/s21113858.

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The design of a microelectromechanical systems (MEMS) ultra-wideband (UWB) RMS power sensor is presented. The sensor incorporates a microfabricated Fe-Co-B core planar inductor and a microfabricated vibrating diaphragm variable capacitor on adhesively bonded glass wafers in a footprint area of 970 × 970 µm2 to operate in the 3.1–10.6 GHz UWB frequency range. When exposed to a far-field UWB electromagnetic radiation, the planar inductor acts as a loop antenna to generate a frequency-independent voltage across the MEMS capacitor. The voltage generates a coulombic attraction force between the dia

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Pelaez-Vargas, A., D. Gallego-Perez, N. Ferrell, M. H. Fernandes, D. Hansford, and F. J. Monteiro. "Early Spreading and Propagation of Human Bone Marrow Stem Cells on Isotropic and Anisotropic Topographies of Silica Thin Films Produced via Microstamping." Microscopy and Microanalysis 16, no. 6 (2010): 670–76. http://dx.doi.org/10.1017/s1431927610094158.

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AbstractWhile there has been rapid development of microfabrication techniques to produce high-resolution surface modifications on a variety of materials in the last decade, there is still a strong need to produce novel alternatives to induce guided tissue regeneration on dental implants. High-resolution microscopy provides qualitative and quantitative techniques to study cellular guidance in the first stages of cell-material interactions. The purposes of this work were (1) to produce and characterize the surface topography of isotropic and anisotropic microfabricated silica thin films obtained

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Herrault, Florian, M. Yajima, M. Chen, C. McGuire, and A. Margomenos. "Silicon-Embedded RF Micro-Inductors for Ultra-Compact RF Subsystems." Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT) 2015, DPC (2015): 000939–57. http://dx.doi.org/10.4071/2015dpc-tp44.

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Advances in 2.5D and 3D integration technologies are enabling ultra-compact multi-chip modules. In this abstract, we present the design, fabrication, and experimental characterization of RF inductors microfabricated inside deep silicon recesses. Because silicon is often used as a substrate of packaging material for 3D integration and microelectromechanical systems (MEMS), developing microfabrication technologies to embed passive components in the unused volume of the silicon package is a promising approach to realize ultra-compact RF subsystems. Inductors and capacitors are critical in dc-bias

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MIRSHEKARI, GHOLAMREZA, MARTIN BROUILLETTE, and LUC G. FRÉCHETTE. "THROUGH SILICON VIAS INTEGRABLE WITH THIN-FILM PIEZOELECTRIC STRUCTURES." International Journal of Nanoscience 11, no. 04 (2012): 1240015. http://dx.doi.org/10.1142/s0219581x12400157.

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This paper reports on the design and microfabrication of novel through silicon vias (TSV) that are compatible with high-temperature processing of piezoelectric structures. The present approach uses metal deposition in cavities etched in the SOI handle layer of the wafer and electrically isolated islands in the device layer. This design avoids the shortcomings of previous TSV designs, which either introduce large topologies on the wafer surface, include metals that cannot sustain high-temperature processing or use poor electrical insulators. TSVs microfabricated using this new approach exhibit

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Hagemann, Cathleen, Matthew C. D. Bailey, Eugenia Carraro, et al. "Low-cost, versatile, and highly reproducible microfabrication pipeline to generate 3D-printed customised cell culture devices with complex designs." PLOS Biology 22, no. 3 (2024): e3002503. http://dx.doi.org/10.1371/journal.pbio.3002503.

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Cell culture devices, such as microwells and microfluidic chips, are designed to increase the complexity of cell-based models while retaining control over culture conditions and have become indispensable platforms for biological systems modelling. From microtopography, microwells, plating devices, and microfluidic systems to larger constructs such as live imaging chamber slides, a wide variety of culture devices with different geometries have become indispensable in biology laboratories. However, while their application in biological projects is increasing exponentially, due to a combination o

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Zhang, Muyang, Haonan Li, Xionghui Li, et al. "Parylene-C Modified OSTE Molds for PDMS Microfluidic Chip Fabrication and Applications in Plasma Separation and Polymorphic Crystallization." Biosensors 15, no. 6 (2025): 388. https://doi.org/10.3390/bios15060388.

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This work presents a novel microfabrication process that addresses the interference of thiol groups on off-stoichiometry thiolene (OSTE) surfaces with the curing of polydimethylsiloxane (PDMS) by integrating the high-performance polymer Parylene-C. The process utilizes a Parylene-C coating to encapsulate the active thiol groups on the OSTE surface, enabling precise replication of PDMS microstructures. Based on this method, PDMS micropillar arrays and microwell arrays were successfully fabricated and applied in passive plasma separation and polymorphic crystal formation, respectively. The exper

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Kudo, Ryota, Shin Usuki, Satoru Takahashi, and Kiyoshi Takamasu. "Simulation-Based Analysis of Influence of Error on Super-Resolution Optical Inspection." International Journal of Automation Technology 5, no. 2 (2011): 167–72. http://dx.doi.org/10.20965/ijat.2011.p0167.

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Microfabricated structures such as semiconductors and MEMS continue shrinking as nanotechnology expands, demand that measures microfabricated structures has risen. Optics and electron beam have been mainly used for that purpose, but the resolving power of optics is limited by the Rayleigh limit and it is generally low for subwavelength-geometry defects, while scanning electron microscopy requires a vacuum and induces contamination in measurement. To handle these considerations, we propose optical microfabrication inspection using a standing-wave shift. This is based on a super-resolution algor

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Chen, Xing, Da Fu Cui, H. Li, H. Y. Cai, J. H. Sun, and L. L. Zhang. "Microfluidic Device for Fluorescence Immunoassays by Using Porous Matrix." Advanced Materials Research 216 (March 2011): 645–48. http://dx.doi.org/10.4028/www.scientific.net/amr.216.645.

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The present work presents the availability of using porous matrix in microfluidic devices as a solid phase matrix for immunoassays. Porous matrixes on the surface of the microchannels were microfabricated by MEMS technology and electrochemical etching technology, which were coated on the wall of the rectangular microchannel in the microdevices to provide a surface-enlarging matrix. The microfabrication process of porous matrixes was investigated and optimized. Then the surface morphology of the porous matrixes was characterized by SEM. Both direct method and dual-antibody sandwich method were

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Lee, Seung Jae, Byung Kim, Jin Sang Lee, et al. "Three-Dimensional Microfabrication System for Scaffolds in Tissue Engineering." Key Engineering Materials 326-328 (December 2006): 723–26. http://dx.doi.org/10.4028/www.scientific.net/kem.326-328.723.

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Understanding chondrocyte behavior inside complex, three-dimensional environments with controlled patterning of geometrical factors would provide significant insights into the basic biology of tissue regenerations. One of the fundamental limitations in studying such behavior has been the inability to fabricate controlled 3D structures. To overcome this problem, we have developed a three-dimensional microfabrication system. This system allows fabrication of predesigned internal architectures and pore size by stacking up the photopolymerized materials. Photopolymer SL5180 was used as the 3D micr

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Wiley, J. James, Raymond E. Ideker, William M. Smith, and Andrew E. Pollard. "Measuring surface potential components necessary for transmembrane current computation using microfabricated arrays." American Journal of Physiology-Heart and Circulatory Physiology 289, no. 6 (2005): H2468—H2477. http://dx.doi.org/10.1152/ajpheart.00570.2005.

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This study was designed to test the feasibility of using microfabricated electrodes to record surface potentials with sufficiently fine spatial resolution to measure the potential gradients necessary for improved computation of transmembrane current density. To assess that feasibility, we recorded unipolar electrograms from perfused rabbit right ventricular free wall epicardium ( n = 6) using electrode arrays that included 25-μm sensors fabricated onto a flexible substrate with 75-μm interelectrode spacing. Electrode spacing was therefore on the size scale of an individual myocyte. Signal cond

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Brunette, D. M., and B. Chehroudi. "The Effects of the Surface Topography of Micromachined Titanium Substrata on Cell Behavior in Vitro and in Vivo." Journal of Biomechanical Engineering 121, no. 1 (1999): 49–57. http://dx.doi.org/10.1115/1.2798042.

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Surface properties, including topography and chemistry, are of prime importance in establishing the response of tissues to biomaterials. Microfabrication techniques have enabled the production of precisely controlled surface topographies that have been used as substrata for cells in culture and on devices implanted in vivo. This article reviews aspects of cell behavior involved in tissue response to implants with an emphasis on the effects of topography. Microfabricated grooved surfaces produce orientation and directed locomotion of epithelial cells in vitro and can inhibit epithelial downgrow

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Chen, Da Feng, He Jun Du, Wei Hua Li, and Hai Qing Gong. "Holding Capacity of a Dielectrophoretic Barrier for Microparticles." Key Engineering Materials 326-328 (December 2006): 281–84. http://dx.doi.org/10.4028/www.scientific.net/kem.326-328.281.

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A dielectrophoretic barrier is generated with two layers of microelectrode structures so called paired electrode array (PEA) constructing face to face on the top and bottom sides of a microchannel. The barrier is designed to control the movement of particles in combination with a fluid flow. Depending on the relative strength of the DEP force and hydrodynamic force, microparticles or cells carrying by a laminar flow can either penetrate the barrier or be deflected from there. The threshold velocity at which the barrier firstly fails to hold back the particles is a significant parameter to vali

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Noori, Y. J., S. Thomas, S. Ramadan, et al. "Electrodeposited WS₂ monolayers on patterned graphene." 2D Materials 9, no. 1 (2021): 015025. http://dx.doi.org/10.1088/2053-1583/ac3dd6.

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Abstract The development of scalable techniques to make two-dimensional (2D) material heterostructures is a major obstacle that needs to be overcome before these materials can be implemented in device technologies. Electrodeposition is an industrially compatible deposition technique that offers unique advantages in scaling 2D heterostructures. In this work, we demonstrate the electrodeposition of atomic layers of WS2 over graphene electrodes using a single source precursor. Using conventional microfabrication techniques, graphene was patterned to create micro-electrodes where WS2 was site-sele

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Mujeeb-U-Rahman, Muhammad, Dvin Adalian, and Axel Scherer. "Fabrication of Patterned Integrated Electrochemical Sensors." Journal of Nanotechnology 2015 (2015): 1–13. http://dx.doi.org/10.1155/2015/467190.

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Fabrication of integrated electrochemical sensors is an important step towards realizing fully integrated and truly wireless platforms for many local, real-time sensing applications. Micro/nanoscale patterning of small area electrochemical sensor surfaces enhances the sensor performance to overcome the limitations resulting from their small surface area and thus is the key to the successful miniaturization of integrated platforms. We have demonstrated the microfabrication of electrochemical sensors utilizing top-down lithography and etching techniques on silicon and CMOS substrates. This choic

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Shetty, A., and G. Srinivasan. "MICROFABRICATED ORAL DRUG DELIVERY SYSTEMS." INDIAN DRUGS 52, no. 11 (2015): 5–13. http://dx.doi.org/10.53879/id.52.11.10393.

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Microfabrication is a collection of techniques developed to fabricate micron sized features, best suited to develop the novel drug delivery microdevices. microfabrication techniques were originally developed in the microelectronics industry to produce functional devices on the micron scale such as sensors, switches, filters and gears. Approaches like modification of drug itself to improve its permeability/ solubility characters, encapsulation techniques using micro/nanoparticles, use of protease inhibitors to curb proteolytic degradation, and use of intelligent polymers and hydrogels do not of

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Xia, Yaoqi. "Wearable Sensors for Smart Electronics." Applied and Computational Engineering 122, no. 1 (2025): 137–43. https://doi.org/10.54254/2755-2721/2025.19905.

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Wearable sensors now play an important role in our daily life. With the advances of technologies, it has become a mature solution for continuous detection. These advanced systems leverage innovations in material science, microfabrication, and integration with the Internet of Things (IoT) to deliver continuous, real-time data on a variety of physiological parameters. Also, the development of material science allows us to produce biocompatible and flexible materials which enables the sensors to be easily attached to our skin. Meanwhile, they provide accurate and reliable measurements of vital si

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De Pascali, Chiara, Luca Francioso, Lucia Giampetruzzi, et al. "Modeling, Fabrication and Integration of Wearable Smart Sensors in a Monitoring Platform for Diabetic Patients." Sensors 21, no. 5 (2021): 1847. http://dx.doi.org/10.3390/s21051847.

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The monitoring of some parameters, such as pressure loads, temperature, and glucose level in sweat on the plantar surface, is one of the most promising approaches for evaluating the health state of the diabetic foot and for preventing the onset of inflammatory events later degenerating in ulcerative lesions. This work presents the results of sensors microfabrication, experimental characterization and FEA-based thermal analysis of a 3D foot-insole model, aimed to advance in the development of a fully custom smart multisensory hardware–software monitoring platform for the diabetic foot. In this

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Shubin, Ivan, John E. Cunningham, Darko Popovic, et al. "Ferro-Electrically Enhanced Proximity Communication." International Symposium on Microelectronics 2010, no. 1 (2010): 000084–92. http://dx.doi.org/10.4071/isom-2010-ta3-paper4.

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Capacitively-coupled communication between chips, commonly known as PxC, represents a new class of I-O signaling that offers substantially improved off-chip bandwidth density. However, this form of communication presents a challenge from a packaging perspective, since tight chip alignment tolerances are required to maintain high signal fidelity and avoid cross coupling between neighboring channels. To mitigate the packaging constraints, capacitive coupling between the communication pads can be enhanced with materials that have high dielectric coefficients. Here, ferroelectrics hold promise ove

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Ollé, Enric Perarnau, Josep Farré-Lladós, and Jasmina Casals-Terré. "Advancements in Microfabricated Gas Sensors and Microanalytical Tools for the Sensitive and Selective Detection of Odors." Sensors 20, no. 19 (2020): 5478. http://dx.doi.org/10.3390/s20195478.

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In recent years, advancements in micromachining techniques and nanomaterials have enabled the fabrication of highly sensitive devices for the detection of odorous species. Recent efforts done in the miniaturization of gas sensors have contributed to obtain increasingly compact and portable devices. Besides, the implementation of new nanomaterials in the active layer of these devices is helping to optimize their performance and increase their sensitivity close to humans’ olfactory system. Nonetheless, a common concern of general-purpose gas sensors is their lack of selectivity towards multiple

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El-Beshlawy, Menna, and Hassan Arida. "Modified Screen-Printed Microchip for Potentiometric Detection of Terbinafine Drugs." Journal of Chemistry 2022 (November 22, 2022): 1–8. http://dx.doi.org/10.1155/2022/9114162.

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The development of miniaturized microchips has widespread and growing interest in manufacturing potentiometric sensors with extremely valuable modifying response characteristics. In this context, here, we demonstrate microfabrication, electrochemical evaluation, and analytical applications of disposable thin-film potentiometric microsensors responsive to terbinafine antifungal medication. Miniaturized microchips have been realized by integration of the sensitive layer membrane modified by carbon nanotubes onto the surface of the plastic screen-printed microchip support using a new approach, wh

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Erten, Ahmet Can. "Effect of Mold Materials Used During Hot Embossing on Feature Fidelity for Microfabrication in Cyclic Olefin Polymer (COP) Substrate." Afyon Kocatepe University Journal of Sciences and Engineering 24, no. 2 (2024): 457–64. http://dx.doi.org/10.35414/akufemubid.1345104.

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During the transition from research to market, the fabrication of microfluidic devices in thermoplastic substrates is inevitable. For short production runs of several hundred products, hot embossing is the typical method before moving on to a typically more expensive injection molding process for higher production volumes. In this work, we investigated the effect of mold material used during hot embossing on feature fidelity for microfabrication in cyclic olefin polymer (COP) substrate. Specifically, we designed a simple flow-focusing microfluidic device and fabricated three different molds us

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Wei, Peng, Ning Li, and Lishuang Feng. "A Type of Two-Photon Microfabrication System and Experimentations." ISRN Mechanical Engineering 2011 (January 26, 2011): 1–8. http://dx.doi.org/10.5402/2011/278095.

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After the femtosecond laser was invented, two-photon microfabrication technology has been recognized as an important method to fabricate the nanostructure and microstructure. In this paper, the two-photon microfabrication system is described, and some experiments are done. From the experiment results, it can be seen that the resolution of the two-photon microfabrication system can be improved by the expose time, the laser power, and the diffractive superresolution element (DSE). Finally, some three-dimensional (3D) microstructure models are fabricated to show the potential of the two-photon mi

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Piyasena, Menake E., and Steven W. Graves. "The intersection of flow cytometry with microfluidics and microfabrication." Lab Chip 14, no. 6 (2014): 1044–59. http://dx.doi.org/10.1039/c3lc51152a.

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Inomata, Naoki, Masaya Toda, and Takahito Ono. "Microfabricated Temperature-Sensing Devices Using a Microfluidic Chip for Biological Applications." International Journal of Automation Technology 12, no. 1 (2018): 15–23. http://dx.doi.org/10.20965/ijat.2018.p0015.

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Microelectromechanical systems (MEMS) and micrototal analysis systems (μTAS) have been developed using microfabrication technologies. As MEMS and μTAS contribute to smaller, higher-performance, less expensive, and integrated sensing techniques, they have been applied in many fields. In this paper, we focus on microfabricated thermal detection devices, including a microthermistor fabricated using vanadium oxide (VOx) and a resonant thermal sensor integrated into a microfluidic chip, and we present the research work we have done into biological applications, applications using a unique material

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Liang, Shu Hao, Chuen Horng Tsai, and Chaug Liang Hsu. "Micro Fabrication Design of a Planar Methanol Sensor." Materials Science Forum 505-507 (January 2006): 1069–74. http://dx.doi.org/10.4028/www.scientific.net/msf.505-507.1069.

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This study explains a design of the microfabricated planar methanol sensor and conducts a series of methods to achieve a real device. By utilizing the microfabrication technology, it is possible to develop the miniature planar methanol sensor to integrate with direct methanol fuel cells (DMFC). The electrochemically reactive area can be adjusted effectively to obtain adequate strength of the methanol oxidation current. The innovation of the methanol sensor design is on a matrix detecting area with the in-line monitoring functions. Each detecting holes in matrix has been connected together by a

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TANIGAWA, Hiroshi. "Semiconductor microfabrication technologies." Journal of the Japan Society for Precision Engineering 54, no. 9 (1988): 1651–55. http://dx.doi.org/10.2493/jjspe.54.1651.

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MATSUI, Shinji. "Electron beam microfabrication." Journal of the Japan Society for Precision Engineering 55, no. 2 (1989): 279–84. http://dx.doi.org/10.2493/jjspe.55.279.

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Weibel, Douglas B., Willow R. DiLuzio, and George M. Whitesides. "Microfabrication meets microbiology." Nature Reviews Microbiology 5, no. 3 (2007): 209–18. http://dx.doi.org/10.1038/nrmicro1616.

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Lutz, B. R., J. Chen, and D. T. Schwartz. "Microfluidics without microfabrication." Proceedings of the National Academy of Sciences 100, no. 8 (2003): 4395–98. http://dx.doi.org/10.1073/pnas.0831077100.

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Deckman, H. W. "Microfabrication cellular phosphors." Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 7, no. 6 (1989): 1832. http://dx.doi.org/10.1116/1.584675.

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FUJITA, Hiroyuki. "Microfabrication and Micromachines." Kobunshi 44, no. 4 (1995): 230–34. http://dx.doi.org/10.1295/kobunshi.44.230.

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Zhang, Jie, Bo-Ya Dong, Jingchun Jia, et al. "Electrochemical buckling microfabrication." Chemical Science 7, no. 1 (2016): 697–701. http://dx.doi.org/10.1039/c5sc02644j.

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Isotropic wet chemical etching can be controlled with a spatial resolution at the nanometer scale, especially for the repetitive microfabrication of hierarchical 3D μ-nanostructures on the continuously curved surface of functional materials.

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Shoji, Shuichi, and Masayoshi Esashi. "Microfabrication and microsensors." Applied Biochemistry and Biotechnology 41, no. 1-2 (1993): 21–34. http://dx.doi.org/10.1007/bf02918525.

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MORIMOTO, Mitsutaka. "Microfabrication for VLSI." Journal of the Society of Mechanical Engineers 92, no. 853 (1989): 1050–55. http://dx.doi.org/10.1299/jsmemag.92.853_1050.

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Gwozdz, P. S. "NSF Microfabrication Workshops." IEEE Transactions on Education 39, no. 2 (1996): 211–16. http://dx.doi.org/10.1109/13.502068.

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