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Journal articles on the topic 'Microheaters'

Author: Grafiati

Published: 4 June 2021

Last updated: 6 September 2023

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1

Kharbanda, D. K., N. Suri, and P. K. Khanna. "Design, Fabrication and Characterization of Inter-Layer Microheaters Using LTCC Technology." ECS Journal of Solid State Science and Technology 11, no. 3 (March 1, 2022): 037002. http://dx.doi.org/10.1149/2162-8777/ac5a70.

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This paper presents design, fabrication and characterization of novel inter-layer microheaters based on low temperature co-fired ceramics (LTCC) technology. LTCC microheater structures (S1 to S3) with three different heater configurations has been presented. Microheater structure S1 has a heater pattern generated only on the top LTCC layer while S2 and S3 structures have inter-layer heater patterns. These structures have been simulated using COMSOL software to depict the temperature distribution over the active area. LTCC being a multilayer technology, heater patterns are generated in two different layers of LTCC tapes and connected through vias (3D interconnections) to fabricate inter-layer microheaters. By distributing the heater pattern of S1 equally in two LTCC tape layers (as in S3), this method allows possibility to develop miniature LTCC microheaters using conventional screen-printing process. The developed microheaters are characterized and the results are compared. At an input power of ∼1 W, structure S3 reaches a peak temperature of 316 °C as compared to 272 °C achieved with S1 configuration. Thermal imaging results shows better temperature uniformity in the active area for inter-layer microheaters as compared to microheater having heater pattern only on the top LTCC layer.

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2

Li, Dezhao, Yangtao Ruan, Chuangang Chen, Wenfeng He, Cheng Chi, and Qiang Lin. "Design and Thermal Analysis of Flexible Microheaters." Micromachines 13, no. 7 (June 29, 2022): 1037. http://dx.doi.org/10.3390/mi13071037.

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With the development of flexible electronics, flexible microheaters have been applied in many areas. Low power consumption and fast response microheaters have attracted much attention. In this work, systematic thermal and mechanical analyses were conducted for a kind of flexible microheater with two different wire structures. The microheater consisted of polyethylene terephthalate (PET) substrate and copper electric wire with graphene thin film as the middle layer. The steady-state average temperature and heating efficiency for the two structures were compared and it was shown that the S-shaped wire structure was better for voltage-controlled microheater other than circular-shaped structure. In addition, the maximum thermal stress for both structures was from the boundary of microheaters, which indicated that not only the wire structure but also the shape of micro heaters should be considered to reduce the damage caused by thermal stress. The influence resulting from the thickness of graphene thin film also has been discussed. In all, the heating efficiency for flexible microheaters can be up to 135 °C/W. With the proposed PID voltage control system, the response time for the designed microheater was less than 10 s. Moreover, a feasible fabrication process flow for these proposed structures combing thermal analysis results in this work can provide some clues for flexible microheaters design and fabrication in other application areas.

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3

Zhang, Lunjia, Pan Zhang, Ronghang Wang, Renchang Zhang, Zhenming Li, Wei Liu, Qifu Wang, Meng Gao, and Lin Gui. "A Performance-Enhanced Liquid Metal-Based Microheater with Parallel Ventilating Side-Channels." Micromachines 11, no. 2 (January 24, 2020): 133. http://dx.doi.org/10.3390/mi11020133.

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Gallium-based liquid metal can be used as a material for microheaters because it can be easily filled into microchannels and electrified to generate Joule heat, but the liquid metal-based microheater will suffer breakage induced by voids forming within the liquid metal when the temperature normally gets higher than 100 °C. To resolve this problem, a novel liquid metal-based microheater with parallel ventilating side-channels is presented. It consists of a liquid-metal heating channel and two parallel ventilating side-channels. The heating channel is connected with the side-channels by small gaps between polydimethylsiloxane (PDMS) posts. Experimental results show that this novel microheater can be heated up to 200 °C without damage. To explain its excellent performance, an experiment is performed to discover the development of the voids within the liquid-metal heating channel, and two reasons are put forward in this work on the basis of the experiment. Afterward pressing and bending tests are conducted to explore the mechanical stability of the novel microheaters. Finally, the microheaters are applied to warm water to show their good flexibility on non-flat surfaces. In consequence, the novel liquid metal-based microheater is believed to be widely applicable to soft micro-electro-mechanical system(MEMS) heating devices.

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4

Yang, Tzu-Sen, and Jin-Chern Chiou. "A High-Efficiency Driver Circuit for a Gas-Sensor Microheater Based on a Switch-Mode DC-to-DC Converter." Sensors 20, no. 18 (September 19, 2020): 5367. http://dx.doi.org/10.3390/s20185367.

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Low power consumption is one of the critical factors for successful Internet of Things (IoT) applications. In such applications, gas sensors have become a main source of power consumption because energy conversion efficiency of the microheater is relative over a wide range of operating temperatures. To improve the energy-conversion efficiency of gas-sensor microheaters, this paper proposes integrated switch-mode DC-to-DC power converter technology which we compare with traditional driving methods such as pulse-width modulation and the linear mode. The results indicate that energy conversion efficiency with this proposed method remains over 90% from 150 °C to 400 °C when using a 3.0, 4.2 and 5.0 V power supply. Energy-conversion efficiency increases by 1–74% compared with results obtained using the traditional driving methods, and the sensing film still detects alcohol and toluene at 200 °C and 280 °C, respectively, with high energy conversion efficiency. These results show that the proposed method is useful and should be further developed to drive gas-sensor microheaters, and then integrated into the circuits of the complementary metal-oxide-semiconductor micro electro mechanical systems (CMOS-MEMS).

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5

Partridge, P. G., G. Meaden, E. D. Nicholson, J. A. Nicholson, and M. N. R. Ashfold. "Diamond fibre microheaters." Materials Science and Technology 13, no. 7 (July 1997): 551–54. http://dx.doi.org/10.1179/mst.1997.13.7.551.

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6

Singh, Surinder, Alok Jejusaria, Jaspreet Singh, Munish Vashishath, and Dinesh Kumar. "Comparative study of titanium, platinum, and titanium nitride thin films for micro-elecrto mechanical systems (MEMS) based micro-heaters." AIP Advances 12, no. 9 (September 1, 2022): 095202. http://dx.doi.org/10.1063/6.0001892.

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This paper presents a comparative study of titanium (Ti), platinum (Pt), and titanium nitride (TiN) micro-electro mechanical systems based micro-heaters. In the present study, a common geometry and thin film thicknesses were selected to achieve comparable base resistances for all three microheater materials. Titanium, platinum, and titanium nitride thin films are deposited using DC magnetron sputtering, E-beam evaporation, and reactive DC magnetron sputtering techniques, respectively, and deposited thicknesses were verified using scanning electron microscopy. Mechanical properties such as Young’s modulus and hardness were also evaluated using nano-indentation. Later, the micro-heaters were fabricated, packaged, and characterized. The thermal coefficient of resistance (TCR) was found to be 4146, 2641, and 487 ppm/°C for Ti, Pt, and TiN micro-heaters, respectively. Power–temperature (P–T) characterization showed that the power required to reach the set temperature is comparable for all the above micro-heater materials. The TiN micro-heater exhibits a linear voltage–current (V–I) characteristic compared to platinum and titanium micro-heaters. The temperatures measured using infra-red imaging were comparable to those calculated by TCR measurements. Furthermore, thermal stability studies have been performed on all micro-heaters for 110 h. TiN microheaters were found to be more stable and resilient to external environmental conditions than Ti and Pt microheaters because of their lower TCR values.

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7

Gaiardo, Andrea, David Novel, Elia Scattolo, Michele Crivellari, Antonino Picciotto, Francesco Ficorella, Erica Iacob, et al. "Optimization of a Low-Power Chemoresistive Gas Sensor: Predictive Thermal Modelling and Mechanical Failure Analysis." Sensors 21, no. 3 (January 25, 2021): 783. http://dx.doi.org/10.3390/s21030783.

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The substrate plays a key role in chemoresistive gas sensors. It acts as mechanical support for the sensing material, hosts the heating element and, also, aids the sensing material in signal transduction. In recent years, a significant improvement in the substrate production process has been achieved, thanks to the advances in micro- and nanofabrication for micro-electro-mechanical system (MEMS) technologies. In addition, the use of innovative materials and smaller low-power consumption silicon microheaters led to the development of high-performance gas sensors. Various heater layouts were investigated to optimize the temperature distribution on the membrane, and a suspended membrane configuration was exploited to avoid heat loss by conduction through the silicon bulk. However, there is a lack of comprehensive studies focused on predictive models for the optimization of the thermal and mechanical properties of a microheater. In this work, three microheater layouts in three membrane sizes were developed using the microfabrication process. The performance of these devices was evaluated to predict their thermal and mechanical behaviors by using both experimental and theoretical approaches. Finally, a statistical method was employed to cross-correlate the thermal predictive model and the mechanical failure analysis, aiming at microheater design optimization for gas-sensing applications.

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8

Xu, Ruijia, and Yu-Sheng Lin. "Tunable Infrared Metamaterial Emitter for Gas Sensing Application." Nanomaterials 10, no. 8 (July 24, 2020): 1442. http://dx.doi.org/10.3390/nano10081442.

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We present an on-chip tunable infrared (IR) metamaterial emitter for gas sensing applications. The proposed emitter exhibits high electrical-thermal-optical efficiency, which can be realized by the integration of microelectromechanical system (MEMS) microheaters and IR metamaterials. According to the blackbody radiation law, high-efficiency IR radiation can be generated by driving a Direct Current (DC) bias voltage on a microheater. The MEMS microheater has a Peano-shaped microstructure, which exhibits great heating uniformity and high energy conversion efficiency. The implantation of a top metamaterial layer can narrow the bandwidth of the radiation spectrum from the microheater to perform wavelength-selective and narrow-band IR emission. A linear relationship between emission wavelengths and deformation ratios provides an effective approach to meet the requirement at different IR wavelengths by tailoring the suitable metamaterial pattern. The maximum radiated power of the proposed IR emitter is 85.0 µW. Furthermore, a tunable emission is achieved at a wavelength around 2.44 µm with a full-width at half-maximum of 0.38 µm, which is suitable for high-sensitivity gas sensing applications. This work provides a strategy for electro-thermal-optical devices to be used as sensors, emitters, and switches in the IR wavelength range.

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9

Zhao, Yiyuan, Henk-Willem Veltkamp, Thomas V. P. Schut, Remco G. P. Sanders, Bogdan Breazu, Jarno Groenesteijn, Meint J. de Boer, Remco J. Wiegerink, and Joost C. Lötters. "Heavily-Doped Bulk Silicon Sidewall Electrodes Embedded between Free-Hanging Microfluidic Channels by Modified Surface Channel Technology." Micromachines 11, no. 6 (May 31, 2020): 561. http://dx.doi.org/10.3390/mi11060561.

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Surface Channel Technology is known as the fabrication platform to make free-hanging microchannels for various microfluidic sensors and actuators. In this technology, thin film metal electrodes, such as platinum or gold, are often used for electrical sensing and actuation purposes. As a result that they are located at the top surface of the microfluidic channels, only topside sensing and actuation is possible. Moreover, in microreactor applications, high temperature degradation of thin film metal layers limits their performance as robust microheaters. In this paper, we report on an innovative idea to make microfluidic devices with integrated silicon sidewall electrodes, and we demonstrate their use as microheaters. This is achieved by modifying the original Surface Channel Technology with optimized mask designs. The modified technology allows to embed heavily-doped bulk silicon electrodes in between the sidewalls of two adjacent free-hanging microfluidic channels. The bulk silicon electrodes have the same electrical properties as the extrinsic silicon substrate. Their cross-sectional geometry and overall dimensions can be designed by optimizing the mask design, hence the resulting resistance of each silicon electrode can be customized. Furthermore, each silicon electrode can be electrically insulated from the silicon substrate. They can be designed with large cross-sectional areas and allow for high power dissipation when used as microheater. A demonstrator device is presented which reached 119.4 ∘ C at a power of 206.9 m W , limited by thermal conduction through the surrounding air. Other potential applications are sensors using the silicon sidewall electrodes as resistive or capacitive readout.

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10

Kalinin, Ivan A., Ilya V. Roslyakov, Dmitry N. Khmelenin, and Kirill S. Napolskii. "Long-Term Operational Stability of Ta/Pt Thin-Film Microheaters: Impact of the Ta Adhesion Layer." Nanomaterials 13, no. 1 (December 25, 2022): 94. http://dx.doi.org/10.3390/nano13010094.

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Microheaters with long-term stability are crucial for the development of a variety of microelectronic devices operated at high temperatures. Structured Ta/Pt bilayers, in which the Ta sublayer ensures high adhesion of the Pt resistive layer, are widely used to create microheaters. Herein, a comprehensive study of the microstructure of Ta/Pt films using high-resolution transmission electron microscopy with local elemental analysis reveals the twofold nature of Ta after annealing. The main fraction of Ta persists in the form of tantalum oxide between the Pt resistive layer and the alumina substrate. Such a sublayer hampers Pt recrystallization and grain growth in bilayered Ta/Pt films in comparison with pure Pt films. Tantalum is also observed inside the Pt grains as individual Ta nanoparticles, but their volume fraction is only about 2%. Microheaters based on the 10 nm Ta/90 nm Pt bilayers after pre-annealing exhibit long-term stability with low resistance drift at 500 °C (less than 3%/month).

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11

Chen, Tailian, and Jacob N. Chung. "An Experimental Study of Miniature-Scale Pool Boiling." Journal of Heat Transfer 125, no. 6 (November 19, 2003): 1074–86. http://dx.doi.org/10.1115/1.1603773.

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By generating single bubbles on a micro-heater at different wall superheats, an experimental study of miniature-scale pool boiling heat transfer has been performed to provide a fundamental understanding of the heater size effect. In this study, the constant-temperature microheater is set at different temperatures by an electronic feedback control system. The heat transfer history during the lifetime of a single bubble which includes nucleation, growth, detachment and departure has been measured. The boiling curve obtained from the microheater is composed of two regimes which are separated by a peak heat flux. It is suggested that in the lower superheat regime, the boiling is dominated by liquid rewetting and micro-layer evaporation, while in the higher superheat regime, conduction through the vapor film and micro-convection plays the key heat transfer role as the heater is covered by vapor all the time. In general, boiling on microheaters is characterized by larger bubble departure sizes, smaller bubble growth rates due to the dryout of microlayer as the bubble grows, and higher bubble incipience superheat. As the heater size decreases, the boiling curve shifts towards higher heat fluxes with corresponding higher superheats.

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12

Erickson, John R., Nicholas A. Nobile, Daniel Vaz, Gouri Vinod, Carlos A. Ríos Ocampo, Yifei Zhang, Juejun Hu, Steven A. Vitale, Feng Xiong, and Nathan Youngblood. "Comparing the thermal performance and endurance of resistive and PIN silicon microheaters for phase-change photonic applications." Optical Materials Express 13, no. 6 (May 17, 2023): 1677. http://dx.doi.org/10.1364/ome.488564.

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Optical phase-change materials have enabled nonvolatile programmability in integrated photonic circuits by leveraging a reversible phase transition between amorphous and crystalline states. To control these materials in a scalable manner on-chip, heating the waveguide itself via electrical currents is an attractive option which has been recently explored using various approaches. Here, we compare the heating efficiency, fabrication variability, and endurance of two promising heater designs which can be easily integrated into silicon waveguides—a resistive microheater using n-doped silicon and one using a silicon p-type/intrinsic/n-type (PIN) junction. Raman thermometry is used to characterize the heating efficiencies of these microheaters, showing that both devices can achieve similar peak temperatures but revealing damage in the PIN devices. Subsequent endurance testing and characterization of both device types provide further insights into the reliability and potential damage mechanisms that can arise in electrically programmable phase-change photonic devices.

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13

Hintermüller, Marcus A., Christina Offenzeller, Marcel Knoll, Andreas Tröls, and Bernhard Jakoby. "Parallel Droplet Deposition via a Superhydrophobic Plate with Integrated Heater and Temperature Sensors." Micromachines 11, no. 4 (March 28, 2020): 354. http://dx.doi.org/10.3390/mi11040354.

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A simple setup, which is suitable for parallel deposition of homogenous liquids with a precise volume (dosage), is presented. First, liquid is dispensed as an array of droplets onto a superhydrophobic dosage plate, featuring a 3 × 3 array of holes. The droplets rest on these holes and evaporate with time until they are small enough to pass through them to be used on the final target, where a precise amount of liquid is required. The system can be fabricated easily and operates in a highly parallel manner. The design of the superhydrophobic dosage plate can be adjusted, in terms of the hole positions and sizes, in order to meet different specifications. This makes the proposed system extremely flexible. The initial dispensed droplet mass is not significant, as the dosing takes place during the evaporation process, where the dosage is determined by the hole diameter. In order to speed up the evaporation process, microheaters are screen printed on the back side of the dosage plate. To characterize the temperature distribution caused by the microheaters, temperature sensors are screen printed on the top side of the dosage plate as well. Experimental data regarding the temperature sensors, the microheaters, and the performance of the setup are presented, and the improvement due to the heating of the dosage plate is assessed. A significant reduction of the total evaporation time due to the microheaters was observed. The improvement caused by the temperature increase was found to follow a power law. At a substrate temperature of 80 °C, the total evaporation time was reduced by about 79%.

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14

Shen, Yigang, Yaxiaer Yalikun, Yusufu Aishan, Nobuyuki Tanaka, Asako Sato, and Yo Tanaka. "Area cooling enables thermal positioning and manipulation of single cells." Lab on a Chip 20, no. 20 (2020): 3733–43. http://dx.doi.org/10.1039/d0lc00523a.

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15

Byers, Kristin M., Li-Kai Lin, Taylor J. Moehling, Lia Stanciu, and Jacqueline C. Linnes. "Versatile printed microheaters to enable low-power thermal control in paper diagnostics." Analyst 145, no. 1 (2020): 184–96. http://dx.doi.org/10.1039/c9an01546a.

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16

Liu, Liyu, Suili Peng, Xize Niu, and Weijia Wen. "Microheaters fabricated from a conducting composite." Applied Physics Letters 89, no. 22 (November 27, 2006): 223521. http://dx.doi.org/10.1063/1.2400065.

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17

Singh, Avneet, Anjali Sharma, Nidhi Dhull, Anil Arora, Monika Tomar, and Vinay Gupta. "MEMS-based microheaters integrated gas sensors." Integrated Ferroelectrics 193, no. 1 (October 13, 2018): 72–87. http://dx.doi.org/10.1080/10584587.2018.1514877.

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18

Khan, Usman, Tae-Ho Kim, Kang Hyuck Lee, Ju-Hyuck Lee, Hong-Joon Yoon, Ravi Bhatia, Ivaturi Sameera, et al. "Self-powered transparent flexible graphene microheaters." Nano Energy 17 (October 2015): 356–65. http://dx.doi.org/10.1016/j.nanoen.2015.09.007.

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19

Venediktov, I. O., M. S. Elezov, A. I. Prokhodtsov, V. V. Kovalyuk, P. P. An, A. D. Golikov, M. L. Shcherbatenko, D. V. Sych, and G. N. Goltsman. "Performance of microheaters for tunable on-chip interferometer." Journal of Physics: Conference Series 2086, no. 1 (December 1, 2021): 012173. http://dx.doi.org/10.1088/1742-6596/2086/1/012173.

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Abstract Mach-Zehnder interferometer (MZI) is a valuable practical tool in many optical science areas. In particular, high-contrast MZI are required for experimental realization of displacement-based quantum receivers that can discriminate weak coherent states of light with the minimum error rate. In this work we study phase modulators of tunable on-chip interferometer on silicon nitride (Si3N4) platform for telecom wavelength (1550 nm) consisting of several MZI. Phase modulators on one of the arms of MZI consists of microheaters and waveguide. Microheaters heat waveguides changing its refractive index due to thermo-optical effect providing a phase shift. We measure the bandwidth of phase modulators and study their operation in pulse mode.

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20

Volkov, Ivan A., Nikolay P. Simonenko, Alexey A. Efimov, Tatiana L. Simonenko, Ivan S. Vlasov, Vladislav I. Borisov, Pavel V. Arsenov, et al. "Platinum Based Nanoparticles Produced by a Pulsed Spark Discharge as a Promising Material for Gas Sensors." Applied Sciences 11, no. 2 (January 7, 2021): 526. http://dx.doi.org/10.3390/app11020526.

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We have applied spark ablation technology for producing nanoparticles from platinum ingots (purity of 99.97 wt. %) as a feed material by using air as a carrier gas. A maximum production rate of about 400 mg/h was achieved with an energy per pulse of 0.5 J and a pulse repetition rate of 250 Hz. The synthesized nanomaterial, composed of an amorphous platinum oxide PtO (83 wt. %) and a crystalline metallic platinum (17 wt. %), was used for formulating functional colloidal ink. Annealing of the deposited ink at 750 °C resulted in the formation of a polycrystalline material comprising 99.7 wt. % of platinum. To demonstrate the possibility of application of the formulated ink in printed electronics, we have patterned conductive lines and microheaters on alumina substrates and 20 μm thick low-temperature co-fired ceramic (LTCC) membranes with the use of aerosol jet printing technology. The power consumption of microheaters fabricated on LTCC membranes was found to be about 140 mW at a temperature of the hot part of 500 °C, thus allowing one to consider these structures as promising micro-hotplates for metal oxide semiconductor (MOS) gas sensors. The catalytic activity of the synthesized nanoparticles was demonstrated by measuring the resistance transients of the non-sintered microheaters upon exposure to 2500 ppm of hydrogen.

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21

Volkov, Ivan A., Nikolay P. Simonenko, Alexey A. Efimov, Tatiana L. Simonenko, Ivan S. Vlasov, Vladislav I. Borisov, Pavel V. Arsenov, et al. "Platinum Based Nanoparticles Produced by a Pulsed Spark Discharge as a Promising Material for Gas Sensors." Applied Sciences 11, no. 2 (January 7, 2021): 526. http://dx.doi.org/10.3390/app11020526.

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We have applied spark ablation technology for producing nanoparticles from platinum ingots (purity of 99.97 wt. %) as a feed material by using air as a carrier gas. A maximum production rate of about 400 mg/h was achieved with an energy per pulse of 0.5 J and a pulse repetition rate of 250 Hz. The synthesized nanomaterial, composed of an amorphous platinum oxide PtO (83 wt. %) and a crystalline metallic platinum (17 wt. %), was used for formulating functional colloidal ink. Annealing of the deposited ink at 750 °C resulted in the formation of a polycrystalline material comprising 99.7 wt. % of platinum. To demonstrate the possibility of application of the formulated ink in printed electronics, we have patterned conductive lines and microheaters on alumina substrates and 20 μm thick low-temperature co-fired ceramic (LTCC) membranes with the use of aerosol jet printing technology. The power consumption of microheaters fabricated on LTCC membranes was found to be about 140 mW at a temperature of the hot part of 500 °C, thus allowing one to consider these structures as promising micro-hotplates for metal oxide semiconductor (MOS) gas sensors. The catalytic activity of the synthesized nanoparticles was demonstrated by measuring the resistance transients of the non-sintered microheaters upon exposure to 2500 ppm of hydrogen.

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22

Cardiel, Joshua J., Ya Zhao, Pablo De La Iglesia, Lilo D. Pozzo, and Amy Q. Shen. "Turning up the heat on wormlike micelles with a hydrotopic salt in microfluidics." Soft Matter 10, no. 46 (2014): 9300–9312. http://dx.doi.org/10.1039/c4sm01920b.

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By integrating gold-etched microheaters with the micropost design in a microfluidic device, we investigate the localized temperature effect of wormlike micellar networks containing a cationic surfactant and hydrotropic organic salt.

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23

Chen, Tao, Zhangqi Dang, Zeyu Deng, Zhenming Ding, and Ziyang Zhang. "Micro Light Flow Controller on a Programmable Waveguide Engine." Micromachines 13, no. 11 (November 16, 2022): 1990. http://dx.doi.org/10.3390/mi13111990.

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A light flow controller that can regulate the three-port optical power in both lossless and lossy modus is realized on a programmable multimode waveguide engine. The microheaters on the waveguide chip mimic the tunable “pixels” that can continuously adjust the local refractive index. Compared to the conventional method where the tuning takes place only on single-mode waveguides, the proposed structure is more compact and requires less electrodes. The local index changes in a multimode waveguide can alter the mode numbers, field distribution, and propagation constants of each individual mode, all of which can alter the multimode interference pattern significantly. However, these changes are mostly complex and not governed by analytical equations as in the single-mode case. Though numerical simulations can be performed to predict the device response, the thermal and electromagnetic computing involved is mostly time-consuming. Here, a multi-level search program is developed based on experiments only. It can reach a target output in real time by adjusting the microheaters collectively and iteratively. It can also jump over local optima and further improve the cost function on a global level. With only a simple waveguide structure and four microheaters, light can be routed freely into any of the three output ports with arbitrary power ratios, with and without extra attenuation. This work may trigger new ideas in developing compact and efficient photonic integrated devices for applications in optical communication and computing.

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24

Chen, Jyh Jian, Tsung Sheng Sheu, and Yuan Jyun Wang. "Continuous-Flow DNA Amplification Device Employing Microheaters." Defect and Diffusion Forum 366 (April 2016): 17–30. http://dx.doi.org/10.4028/www.scientific.net/ddf.366.17.

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Since polymerase chain reaction (PCR) was invented, it has become one of the most significant approaches for generic identification during the last few decades. PCR is a useful procedure to magnify the number of copies of a specific DNA template exponentially. Integrated microfluidic DNA amplification devices that employ a serpentine polydimethylsiloxane microchannel, a glass cover with micro heaters and sensors, and a cooling polymethylmethacrylate channel are demonstrated in the present study. With the aid of commercial computational fluid dynamics software, we design the continuous-flow DNA amplification device. The influences of various chip materials, water cooling conditions and geometric parameters on the temperatures of the chip are expressed. Using the MEMS process, two micro aluminum heaters and sensors are fabricated. This device represents the first demonstration of Al heaters and sensors integrated in continuous-flow PCR microfluidics. The LabVIEW control module is used to manage the temperatures of the micro-domain heating. One important feature of this system is the temperature of the annealing zone is controlled by the flow rate of the fluid inside a water channel under the glass chip. The cooling channel cannot only provide great thermal insulation between two temperature zones at the opposite sides of the chip, but also improve the temperature uniformity at the chip center temperature zone. By utilizing an IR thermometer, the images of the surface temperature distributions are captured to show the effects of the employed microheaters and the cooling channel on the thermal field of the PCR device. Finally, we find the temperature regions generated in the present device are suitable for completing the PCR process.

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25

Swart, N. R., and A. Nathan. "Coupled electrothermal modeling of microheaters using SPICE." IEEE Transactions on Electron Devices 41, no. 6 (June 1994): 920–25. http://dx.doi.org/10.1109/16.293302.

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26

Abel, Mark R., Samuel Graham, Justin R. Serrano, Sean P. Kearney, and Leslie M. Phinney. "Raman Thermometry of Polysilicon Microelectro-mechanical Systems in the Presence of an Evolving Stress." Journal of Heat Transfer 129, no. 3 (May 31, 2006): 329–34. http://dx.doi.org/10.1115/1.2409996.

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In this work, the use of Raman Stokes peak location and linewidth broadening methods were evaluated for thermometry applications of polysilicon microheaters subjected to evolving thermal stresses. Calibrations were performed using the temperature dependence of each spectral characteristic separately, and the uncertainty of each method quantified. It was determined that the Stokes linewidth was independent of stress variation allowing for temperature determination, irrespective of stress state. However, the linewidth method is subject to greater uncertainty than the Stokes shift determination. The uncertainties for each method are observed to decrease with decreasing temperature and increasing integration times. The techniques were applied to mechanically constrained electrically active polysilicon microheaters. Results revealed temperatures in excess of 500°C could be achieved in these devices. Using the peak location method resulted in an underprediction of temperature due to the development of a relative compressive thermal stress with increasing power dissipation.

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27

Falco, Aniello, Francisco J. Romero, Florin C. Loghin, Alina Lyuleeva, Markus Becherer, Paolo Lugli, Diego P. Morales, Noel Rodriguez, Jose F. Salmerón, and Almudena Rivadeneyra. "Printed and Flexible Microheaters Based on Carbon Nanotubes." Nanomaterials 10, no. 9 (September 19, 2020): 1879. http://dx.doi.org/10.3390/nano10091879.

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This work demonstrates a cost-effective manufacturing method of flexible and fully printed microheaters, using carbon nanotubes (CNTs) as the heating element. Two different structures with different number of CNT layers have been characterized in detail. The benchmarking has been carried out in terms of maximum operating temperature, as well as nominal resistance and input power for different applied voltages. Their performances have been compared with previous reports for similar devices, fabricated with other technologies. The results have shown that the heaters presented can achieve high temperatures in a small area at lower voltages and lower input power. In particular, the fully printed heaters fabricated on a flexible substrate covering an area of 3.2 mm2 and operating at 9.5 V exhibit a maximum temperature point above 70 °C with a power consumption below 200 mW. Therefore, we have demonstrated that this technology paves the way for a cost-effective large-scale fabrication of flexible microheaters aimed to be integrated in flexible sensors.

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Chen, Tailian, and J. N. Chung. "Coalescence of bubbles in nucleate boiling on microheaters." International Journal of Heat and Mass Transfer 45, no. 11 (May 2002): 2329–41. http://dx.doi.org/10.1016/s0017-9310(01)00334-9.

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Jinsol Je and Jungchul Lee. "Design, Fabrication, and Characterization of Liquid Metal Microheaters." Journal of Microelectromechanical Systems 23, no. 5 (October 2014): 1156–63. http://dx.doi.org/10.1109/jmems.2014.2307358.

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Jayaraman, Balaji, Navakanta Bhat, and Rudra Pratap. "Thermal characterization of microheaters from the dynamic response." Journal of Micromechanics and Microengineering 19, no. 8 (July 9, 2009): 085006. http://dx.doi.org/10.1088/0960-1317/19/8/085006.

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31

Visvanathan, Karthik, and Yogesh B. Gianchandani. "Microheaters based on ultrasonic actuation of piezoceramic elements." Journal of Micromechanics and Microengineering 21, no. 8 (July 19, 2011): 085030. http://dx.doi.org/10.1088/0960-1317/21/8/085030.

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32

Filipovic, Lado. "Theoretical examination of thermo-migration in novel platinum microheaters." Microelectronics Reliability 123 (August 2021): 114219. http://dx.doi.org/10.1016/j.microrel.2021.114219.

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33

Lu, Jingyu, Ting Xu, and Jianmin Miao. "Temperature Control of Microheaters for Localized Carbon Nanotube Synthesis." Journal of Nanoscience and Nanotechnology 11, no. 12 (December 1, 2011): 10498–502. http://dx.doi.org/10.1166/jnn.2011.4024.

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34

Armstrong, Philip R., Merlin L. Mah, Kyle D. Olson, Lucas N. Taylor, and Joseph J. Talghader. "Reduction of thermal emission background in high temperature microheaters." Journal of Micromechanics and Microengineering 26, no. 5 (April 5, 2016): 055004. http://dx.doi.org/10.1088/0960-1317/26/5/055004.

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35

Tian, W. C., and S. W. Pang. "Freestanding microheaters in Si with high aspect ratio microstructures." Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 20, no. 3 (2002): 1008. http://dx.doi.org/10.1116/1.1479363.

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Tian, W. C., and S. W. Pang. "Thick and thermally isolated Si microheaters for microfabricated preconcentrators." Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 21, no. 1 (2003): 274. http://dx.doi.org/10.1116/1.1539065.

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37

Jia, Qiannan, Weiwei Tang, Wei Yan, and Min Qiu. "Fibre tapering using plasmonic microheaters and deformation-induced pull." Light: Advanced Manufacturing 4, no. 1 (2023): 1. http://dx.doi.org/10.37188/lam.2023.005.

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38

Roy, Avisek, Mehdi Azadmehr, Bao Q. Ta, Philipp Häfliger, and Knut E. Aasmundtveit. "Design and Fabrication of CMOS Microstructures to Locally Synthesize Carbon Nanotubes for Gas Sensing." Sensors 19, no. 19 (October 8, 2019): 4340. http://dx.doi.org/10.3390/s19194340.

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Carbon nanotubes (CNTs) can be grown locally on custom-designed CMOS microstructures to use them as a sensing material for manufacturing low-cost gas sensors, where CMOS readout circuits are directly integrated. Such a local CNT synthesis process using thermal chemical vapor deposition (CVD) requires temperatures near 900 °C, which is destructive for CMOS circuits. Therefore, it is necessary to ensure a high thermal gradient around the CNT growth structures to maintain CMOS-compatible temperature (below 300 °C) on the bulk part of the chip, where readout circuits are placed. This paper presents several promising designs of CNT growth microstructures and their thermomechanical analyses (by ANSYS Multiphysics software) to check the feasibility of local CNT synthesis in CMOS. Standard CMOS processes have several conductive interconnecting metal and polysilicon layers, both being suitable to serve as microheaters for local resistive heating to achieve the CNT growth temperature. Most of these microheaters need to be partially or fully suspended to produce the required thermal isolation for CMOS compatibility. Necessary CMOS post-processing steps to realize CNT growth structures are discussed. Layout designs of the microstructures, along with some of the microstructures fabricated in a standard AMS 350 nm CMOS process, are also presented in this paper.

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Cheng, Ping, Hui-Ying Wu, and Fang-Jun Hong. "Phase-Change Heat Transfer in Microsystems." Journal of Heat Transfer 129, no. 2 (September 20, 2006): 101–8. http://dx.doi.org/10.1115/1.2410008.

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Recent work on miscroscale phase-change heat transfer, including flow boiling and flow condensation in microchannnels (with applications to microchannel heat sinks and microheat exchangers) as well as bubble growth and collapse on microheaters under pulse heating (with applications to micropumps and thermal inkjet printerheads), is reviewed. It has been found that isolated bubbles, confined elongated bubbles, annular flow, and mist flow can exist in microchannels during flow boiling. Stable and unstable flow boiling modes may occur in microchannels, depending on the heat to mass flux ratio and inlet subcooling of the liquid. Heat transfer and pressure drop data in flow boiling in microchannels are shown to deviate greatly from correlations for flow boiling in macrochannels. For flow condensation in microchannels, mist flow, annular flow, injection flow, plug-slug flow, and bubbly flows can exist in the microchannels, depending on mass flux and quality. Effects of the dimensionless condensation heat flux and the Reynolds number of saturated steam on transition from annular two-phase flow to slug/plug flow during condensation in microchannels are discussed. Heat transfer and pressured drop data in condensation flow in microchannels, at low mass flux are shown to be higher and lower than those predicted by correlations for condensation flow in macrochannels, respectively. Effects of pulse heating width and heater size on microbubble growth and collapse and its nucleation temperature on a microheater under pulse heating are summarized.

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Kociubiński, Andrzej, Dawid Zarzeczny, Mariusz Duk, and Tomasz Bieniek. "Analysis of Heat Flow for In Vitro Culture Monitored by Impedance Measurement." Energies 15, no. 21 (November 4, 2022): 8231. http://dx.doi.org/10.3390/en15218231.

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The paper proposes an innovative method of using microheaters for research on cells in vitro. A method of local heating of a single culture well, compatible with an Electric Cell-substrate Impedance (ECIS) system is presented. A microheater and culture well system for cell culture was modelled. Electrical and thermal simulation of the system under operating conditions was carried out. Correct distribution of heat was observed at the site of the cell culture suspension in the medium, while not affecting the conditions in adjacent wells. As part of the experiment, a heating element of nichrome (NiCr) was created using the magnetron sputtering process. Electrical and thermal measurements of the manufactured device were carried out. It has been shown that it is possible to establish the desired temperature over the long term. In addition, the structures made were characterised by work stability, precision in maintaining the right temperature, and the possibility of being controlled with high accuracy. There is a problem with the precise and reproducible carrying out of a cell culture experiment that differs only in the process temperature. In this work, a technique for increasing the temperature locally, in a single culture well, in a medium containing eight such wells was proposed and analyzed. The use of this method will allow avoidance of the impact of potential changes in parameters other than temperature on the culture. That may occur when comparing cells grown at different temperatures by means of the ECIS (Electric Cell-substrate Impedance) method.

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Jithin, M. A., K. L. Ganapathi, M. Ambresh, Pavan Nukala, N. K. Udayashankar, and S. Mohan. "Development of titanium nitride thin film microheaters using laser micromachining." Vacuum 197 (March 2022): 110795. http://dx.doi.org/10.1016/j.vacuum.2021.110795.

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Soo Kim, Min, Bang Weon Lee, Yong Soo Lee, Dong Sik Shim, and Keon Kuk. "Effects of Thin Film Layers on Actuating Performance of Microheaters." Journal of Imaging Science and Technology 51, no. 5 (2007): 445. http://dx.doi.org/10.2352/j.imagingsci.technol.(2007)51:5(445).

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43

Lin, Wei-Chih, Yu-Ching Lin, Masayoshi Esashi, and Ashwin A. Seshia. "In-Situ Hydrothermal Synthesis of Zinc Oxide Nanostructures Using Microheaters." IEEE Transactions on Nanotechnology 14, no. 6 (November 2015): 1046–53. http://dx.doi.org/10.1109/tnano.2015.2468076.

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44

Atabaki, A. H., E. Shah Hosseini, A. A. Eftekhar, S. Yegnanarayanan, and A. Adibi. "Optimization of metallic microheaters for high-speed reconfigurable silicon photonics." Optics Express 18, no. 17 (August 11, 2010): 18312. http://dx.doi.org/10.1364/oe.18.018312.

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45

Pimentel-Domínguez, Reinher, Paola Moreno-Álvarez, Mathieu Hautefeuille, Anahí Chavarría, and Juan Hernández-Cordero. "Photothermal lesions in soft tissue induced by optical fiber microheaters." Biomedical Optics Express 7, no. 4 (March 3, 2016): 1138. http://dx.doi.org/10.1364/boe.7.001138.

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46

Bi, Jingliang, Xipeng Lin, David M. Christopher, and Xuefang Li. "Analysis of coalescence phenomena on microheaters at two surface superheats." International Journal of Heat and Mass Transfer 67 (December 2013): 798–809. http://dx.doi.org/10.1016/j.ijheatmasstransfer.2013.08.082.

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47

Vasiliev, Alexey A., Vitaliy P. Kim, Sergey V. Tkachev, Denis Yu Kornilov, Sergey P. Gubin, Ivan S. Vlasov, Igor E. Jahatspanian, and Alexy S. Sizov. "Platinum Based Material for Additive Technology of Gas Sensors." Proceedings 2, no. 13 (December 20, 2018): 738. http://dx.doi.org/10.3390/proceedings2130738.

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We prepared platinum nanoparticle ink usable for the fabrication of MEMS microheatersof high-temperature gas sensors and thermoresistors operating up to 450 °C and present somepreliminary results on the application of the ink in sensor microheater manufacturing. The inkconsists of platinum particles (3–8 nm) suspended in ethylene glycol solution of polyvinylpyrrolidone.The ink is usable in both InkJet and AerosolJet printers. The annealing at temperature of about 600 °Cleads to the formation of uniform microheater structure. The experiments on microheater agingconfirm the stability of the printed microstructure at 450 °C for at least one year of operation. Thesubstrates used for printing were thin alumina and LTCC ceramics with thickness of 12–20 μm.

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48

Shin, Sanghun, Heewon Lee, and Hongyun So. "Photocurrents Recovery in GaN UV Sensors Using Microheaters at Low Temperatures." IEEE Access 9 (2021): 54184–89. http://dx.doi.org/10.1109/access.2021.3070916.

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49

Lin, Wei-Chih, Chin-Jui Shih, Ching-Chen Wu, and Ashwin A. Seshia. "Synthesis of Zinc Oxide Nanostructures by Microheaters in the Ambient Environment." IEEE Transactions on Nanotechnology 12, no. 1 (January 2013): 21–28. http://dx.doi.org/10.1109/tnano.2012.2225070.

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Zhou, Qin, Allen Sussman, Jiyoung Chang, Jeffrey Dong, Alex Zettl, and William Mickelson. "Fast response integrated MEMS microheaters for ultra low power gas detection." Sensors and Actuators A: Physical 223 (March 2015): 67–75. http://dx.doi.org/10.1016/j.sna.2014.12.005.

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