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Journal articles on the topic 'Micromachined waveguide'

Author: Grafiati

Published: 4 June 2021

Last updated: 1 February 2022

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1

Gomez-Torrent, Adrian, and Joachim Oberhammer. "Micromachined Waveguide Interposer for the Characterization of Multi-port Sub-THz Devices." Journal of Infrared, Millimeter, and Terahertz Waves 41, no. 3 (2020): 245–57. http://dx.doi.org/10.1007/s10762-019-00663-4.

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AbstractThis paper reports for the first time on a micromachined interposer platform for characterizing highly miniaturized multi-port sub-THz waveguide components. The reduced size of such devices does often not allow to connect them to conventional waveguide flanges. We demonstrate the micromachined interposer concept by characterizing a miniaturized, three-port, 220–330-GHz turnstile orthomode transducer. The interposer contains low-loss micromachined waveguides for routing the ports of the device under test to standard waveguide flanges and integrated micromachined matched loads for terminating the unused ports. In addition to the interposer, the measurement setup consists of a micromachined square-to-rectangular waveguide transition. These two devices enable the characterization of such a complex microwave component in four different configurations with a standard two-port measurement setup. In addition, the design of the interposer allows for independent characterization of its sub-components and, thus, for accurate de-embedding from the measured data, as demonstrated in this paper. The measurement setup can be custom-designed for each silicon micromachined device under test and co-fabricated in the same wafer due to the batch nature of this process. The solution presented here avoids the need of CNC-milled test-fixtures or waveguide pieces that deteriorate the performance of the device under test and reduce the measurement accuracy.

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2

Ermolov, Vladimir, Antti Lamminen, Jaakko Saarilahti, Ben Wälchli, Mikko Kantanen, and Pekka Pursula. "Micromachining integration platform for sub-terahertz and terahertz systems." International Journal of Microwave and Wireless Technologies 10, no. 5-6 (2018): 651–59. http://dx.doi.org/10.1017/s175907871800048x.

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AbstractWe demonstrate a sub-terahertz (THz) and THz integration platform based on micromachined waveguides on silicon. The demonstrated components in the frequency range 225–325 GHz include waveguides, filters, waveguide vias, and low-loss transitions between the waveguide and the monolithic integrated circuits. The developed process relies on microelectromechanical systems manufacturing methods and silicon wafer substrates, promising a scalable and cost-efficient system integration method for future sub-THz and THz communication and sensing applications. Low-temperature Au/In thermo-compression and Au–Au laser bonding processes are parts of the integration platform enabling integration of millimeter-wave monolithic integrated circuits.

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3

Sun, Xiaofeng, Guifu Ding, Donghua Gu, Binhong Li, and Minyi Shen. "New micromachined interdigital coplanar waveguide." Microwave and Optical Technology Letters 49, no. 5 (2007): 1007–10. http://dx.doi.org/10.1002/mop.22336.

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4

Bowen, J. W., S. Hadjiloucas, B. M. Towlson, et al. "Micromachined waveguide antennas for 1.6 THz." Electronics Letters 42, no. 15 (2006): 842. http://dx.doi.org/10.1049/el:20061766.

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5

Weikle, Robert M., H. Li, A. Arsenovic, et al. "Micromachined Interfaces for Metrology and Packaging Applications in the Submillimeter-Wave Band." Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT) 2017, DPC (2017): 1–36. http://dx.doi.org/10.4071/2017dpc-tha3_presentation2.

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The continued emergence of new terahertz devices has created a need for improved approaches to packaging, integration, and measurement tools for diagnostics and characterization in this portion of the spectrum. Rectangular waveguide has for many years been the primary transmission medium for terahertz and submillimeter-wave systems operating from 300 GHz to 1 THz, with the UG-387 flange the most common interface for mating waveguide components over this frequency range. Alignment of UG-387 flanges is accomplished with pins and alignment holes that are placed around the flange perimeter and, under the standard MIL SPECS tolerances, misalignments of up to 6 mils (150 microns) are possible as a result of practical milling tolerances. With the emergence of vector network analyzers operating beyond 1 THz, such misalignment of waveguide mating flanges is not negligible and is recognized as a fundamental issue limiting calibration and measurement precision at frequencies greater than 300 GHz. In response to this issue, a number of new waveguide flange concepts have been investigated to reduce flange misalignment and the P1785 IEEE Standard was recently issued to recommend designs for waveguide interfaces at frequencies above 110 GHz. Among the new flange concepts being proposed is a modified UG-387 that utilizes tighter machining tolerances and the ring-centered flange where alignment is accomplished using a precision coupling ring that fits over raised bosses that are centered on each waveguide. This paper discusses the new interface concepts that are being developed to address waveguide flange misalignment as well as emerging micromachined interconnects, calibration standards and heterogeneous integration methods that are being applied to implement low-loss and high-performance circuit architectures for the terahertz frequency range. Among the technologies that will be described are (1) design and characterization methods for the new ring-centered waveguide standard, (2) micromachined waveguide components and calibration standards for the terahertz band, (3) silicon-based micromachined probe structures for direct-contact interfacing and metrology, and (4) epitaxial transfer of III-V semiconductor material onto high-resistivity silicon to realize a low-loss platform for integration of terahertz components. Details of the processing methods used to realize these components as well as measurement techniques for assessing their performance will be described.

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6

Lin, Chih-Peng, and Christina F. Jou. "New CMOS-Compatible Micromachined Embedded Coplanar Waveguide." IEEE Transactions on Microwave Theory and Techniques 58, no. 9 (2010): 2511–16. http://dx.doi.org/10.1109/tmtt.2010.2058552.

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7

Zhao, X. H., J. F. Bao, G. C. Shan, et al. "D-Band Micromachined Silicon Rectangular Waveguide Filter." IEEE Microwave and Wireless Components Letters 22, no. 5 (2012): 230–32. http://dx.doi.org/10.1109/lmwc.2012.2193121.

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8

Lihan Chen, A. Arsenovic, J. R. Stanec, et al. "A Micromachined Terahertz Waveguide 90$^{\circ}$ Twist." IEEE Microwave and Wireless Components Letters 21, no. 5 (2011): 234–36. http://dx.doi.org/10.1109/lmwc.2011.2127467.

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9

Chen, Zhang, Yingbin Zheng, Xiaoke Kang, Bin Lu, and Bohua Cui. "WR-2.8 Band Micromachined Rectangular Waveguide Filter." Journal of Infrared, Millimeter, and Terahertz Waves 34, no. 12 (2013): 847–55. http://dx.doi.org/10.1007/s10762-013-0028-x.

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10

Liu, Shuang, Jiang Hu, Yong Zhang, et al. "1 THz Micromachined Waveguide Band-Pass Filter." Journal of Infrared, Millimeter, and Terahertz Waves 37, no. 5 (2015): 435–47. http://dx.doi.org/10.1007/s10762-015-0229-6.

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11

Aliakbarian, H., S. Radiom, V. Tavakol, et al. "Fully micromachined W-band rectangular waveguide to grounded coplanar waveguide transition." IET Microwaves, Antennas & Propagation 6, no. 5 (2012): 533. http://dx.doi.org/10.1049/iet-map.2011.0301.

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12

Baghchehsaraei, Zargham, Umer Shah, Jan Åberg, Göran Stemme, and Joachim Oberhammer. "MEMS reconfigurable millimeter-wave surface for V-band rectangular-waveguide switch." International Journal of Microwave and Wireless Technologies 5, no. 3 (2013): 341–49. http://dx.doi.org/10.1017/s1759078713000378.

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This paper presents for the first time a novel concept of a microelectromechanical systems (MEMS) waveguide switch based on a reconfigurable surface, whose working principle is to block the wave propagation by short-circuiting the electrical field lines of the TE10 mode of a WR-12 rectangular waveguide. The reconfigurable surface is only 30 µm thick and consists of up to 1260 micromachined cantilevers and 660 contact points in the waveguide cross-section, which are moved simultaneously by integrated MEMS comb-drive actuators. Measurements of fabricated prototypes show that the devices are blocking wave propagation in the OFF-state with over 30 dB isolation for all designs, and allow for transmission of less than 0.65 dB insertion loss for the best design in the ON-state for 60–70 GHz. Furthermore, the paper investigates the integration of such microchips into WR-12 waveguides, which is facilitated by tailor-made waveguide flanges and compliant, conductive-polymer interposer sheets. It is demonstrated by reference measurements where the measured insertion loss of the switches is mainly attributed to the chip-to-waveguide assembly. For the first prototypes of this novel MEMS microwave device concept, the comb-drive actuators did not function properly due to poor fabrication yield. Therefore, for measuring the OFF-state, the devices were fixated mechanically.

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13

Vahidpour, Mehrnoosh, and Kamal Sarabandi. "2.5D Micromachined 240 GHz Cavity-Backed Coplanar Waveguide to Rectangular Waveguide Transition." IEEE Transactions on Terahertz Science and Technology 2, no. 3 (2012): 315–22. http://dx.doi.org/10.1109/tthz.2012.2191150.

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14

Shang, Xiaobang, Yingtao Tian, Michael J. Lancaster, and Suren Singh. "A SU8 Micromachined WR-1.5 Band Waveguide Filter." IEEE Microwave and Wireless Components Letters 23, no. 6 (2013): 300–302. http://dx.doi.org/10.1109/lmwc.2013.2260733.

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15

Becker, J. P., J. R. East, and L. P. B. Katehi. "Performance of silicon micromachined waveguide at W-band." Electronics Letters 38, no. 13 (2002): 638. http://dx.doi.org/10.1049/el:20020457.

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16

Sammoura, Firas, Yiin-Kuen Fuh, and Liwei Lin. "Micromachined 95 GHz waveguide-fed plastic horn antennas." Journal of Micromechanics and Microengineering 18, no. 5 (2008): 055009. http://dx.doi.org/10.1088/0960-1317/18/5/055009.

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17

Shang, X., M. L. Ke, Y. Wang, and M. J. Lancaster. "Micromachined WR-3 waveguide filter with embedded bends." Electronics Letters 47, no. 9 (2011): 545. http://dx.doi.org/10.1049/el.2011.0525.

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18

Campion, James, and Joachim Oberhammer. "Silicon Micromachined Waveguide Calibration Standards for Terahertz Metrology." IEEE Transactions on Microwave Theory and Techniques 69, no. 8 (2021): 3927–42. http://dx.doi.org/10.1109/tmtt.2021.3091720.

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19

Nocella, Valeria, Luca Pelliccia, Paola Farinelli, et al. "E-band cavity diplexer based on micromachined technology." International Journal of Microwave and Wireless Technologies 8, no. 2 (2015): 179–84. http://dx.doi.org/10.1017/s175907871400155x.

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A robust and tuneless micromachined waveguide diplexer operating in the frequency range 71–86 GHz is here presented. The diplexer is based on multiple coupled cavities and it is manufactured using micromachining technology on two staked silicon layers. The diplexer consists of two filters combined to a common waveguide port via an E-plane T-junction. The two eight-order band-pass filters are centered at 73.5 and 83.5 GHz. The fractional bandwidths for two bands are 8.8 and 7.8% at higher- and lower-band, respectively. The measured insertion loss is below 0.7 dB for both the filters and the diplexer isolation is better than 55 dB, as required. The proposed technology allows for a very compact device (<20 × 20 × 1.5 mm) and the first prototypes were proved to be very robust to manufacturing tolerances and environmental tests, thus leading to an excellent tuneless manufacturing yield in future production. The diplexer will be employed in next generation terrestrial radio-link communications front-ends.

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20

Wang, Wei-Chih, Mark Fauver, Joe Nhut Ho, Eric J. Seibel, and Per G. Reinhall. "Micromachined optical waveguide cantilever as a resonant optical scanner." Sensors and Actuators A: Physical 102, no. 1-2 (2002): 165–75. http://dx.doi.org/10.1016/s0924-4247(02)00303-5.

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21

Hu, Jiang, Shanyi Xie, and Yong Zhang. "Micromachined Terahertz Rectangular Waveguide Bandpass Filter on Silicon-Substrate." IEEE Microwave and Wireless Components Letters 22, no. 12 (2012): 636–38. http://dx.doi.org/10.1109/lmwc.2012.2228179.

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22

Jia, Yuechen, Javier R. Vázquez de Aldana, Shavkat Akhmadaliev, Shengqiang Zhou, and Feng Chen. "Femtosecond laser micromachined ridge waveguide lasers in Nd:YAG ceramics." Optical Materials 36, no. 2 (2013): 228–31. http://dx.doi.org/10.1016/j.optmat.2013.08.031.

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23

Kirby, P. L., D. Pukala, H. Manohara, I. Mehdi, and J. Papapolymerou. "Characterization of micromachined silicon rectangular waveguide at 400 GHz." IEEE Microwave and Wireless Components Letters 16, no. 6 (2006): 366–68. http://dx.doi.org/10.1109/lmwc.2006.875593.

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24

Kraiczek, K. G., J. Mannion, S. Post, et al. "Micromachined Fused Silica Liquid Core Waveguide Capillary Flow Cell." Analytical Chemistry 88, no. 2 (2015): 1100–1105. http://dx.doi.org/10.1021/acs.analchem.5b03219.

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25

White, Robert, Niranjan Deo, and Karl Grosh. "Fluid–structure waves in a micromachined variable impedance waveguide." Journal of the Acoustical Society of America 116, no. 4 (2004): 2543–44. http://dx.doi.org/10.1121/1.4785148.

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26

Yi Wang, Maolong Ke, Michael J. Lancaster, and Jian Chen. "Micromachined 300-GHz SU-8-Based Slotted Waveguide Antenna." IEEE Antennas and Wireless Propagation Letters 10 (2011): 573–76. http://dx.doi.org/10.1109/lawp.2011.2158285.

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27

Onodera, K., T. Akeyoshi, and M. Tokumitsu. "Micromachined coplanar waveguide on GaAs for optoelectronic IC applications." Electronics Letters 40, no. 1 (2004): 68. http://dx.doi.org/10.1049/el:20040035.

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28

Veidt, B., D. Routledge, M. J. Brett, J. F. Vaneldik, and K. Kornelsen. "Diagonal horn integrated with micromachined waveguide for submillimetre applications." Electronics Letters 31, no. 16 (1995): 1307–9. http://dx.doi.org/10.1049/el:19950903.

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29

Zhao, Xinghai, Umer Shah, Oleksandr Glubokov, and Joachim Oberhammer. "Micromachined Subterahertz Waveguide-Integrated Phase Shifter Utilizing Supermode Propagation." IEEE Transactions on Microwave Theory and Techniques 69, no. 7 (2021): 3219–27. http://dx.doi.org/10.1109/tmtt.2021.3076079.

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30

Duan, Jun-ping, Xin-xin Shen, Hong Xiao, Bin-zhen Zhang, and Qiong Bai. "Micromachined W-band dual-band quasi-elliptic waveguide filter." Microelectronics Journal 115 (September 2021): 105200. http://dx.doi.org/10.1016/j.mejo.2021.105200.

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31

Liu, Hui Liang, Chen Xu Zhao, Ling Li, and Ze Wen Liu. "Micromachined W-Band Waveguide Duplexer Design Based on MEMS Technology." Key Engineering Materials 562-565 (July 2013): 1098–102. http://dx.doi.org/10.4028/www.scientific.net/kem.562-565.1098.

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This paper presents a novel high performance W-band MEMS duplexer for digital signal transceiver applications. The design of duplexer filters follows the insertion loss method with a Chebyshev polynomial to meet the desired spectral responses. The insertion loss and return loss of the optimized duplexer are -0.3dB and -18dB respectively, while the isolation between two pass bands is -55dB. A micro-fabrication process is designed based on MEMS technology. The deep reactive ion etching (DRIE) is used for high-aspect-ratio filter cavity mold structure. Micro-electroforming, plastic embossing, and electroplating techniques are used for low-cost and high-precision mass production program for the duplexer. Fabrication error tolerance is analyzed and it is reasonable to control the shift of frequency and return loss in the range of 0.05GHz and 2dB respectively with the designed fabrication process based on MEMS technology. It proves that the proposed micromachining fabrication technique is suitable for high performance W-band waveguide filter and duplexer design in terms of stability of RF performance.

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32

Rahiminejad, S., A. U. Zaman, E. Pucci, et al. "Micromachined ridge gap waveguide and resonator for millimeter-wave applications." Sensors and Actuators A: Physical 186 (October 2012): 264–69. http://dx.doi.org/10.1016/j.sna.2012.02.036.

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33

Leong, Kevin M. K. H., Kelly Hennig, Chunbo Zhang, et al. "WR1.5 Silicon Micromachined Waveguide Components and Active Circuit Integration Methodology." IEEE Transactions on Microwave Theory and Techniques 60, no. 4 (2012): 998–1005. http://dx.doi.org/10.1109/tmtt.2012.2184296.

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34

Sun, Xiao-Feng, Gui-Fu Ding, Dong-Hua Gu, Bin-Hong Li, and Min-Yi Shen. "Design and fabrication of a new micromachined interdigital coplanar waveguide." Microelectronics Journal 37, no. 11 (2006): 1379–83. http://dx.doi.org/10.1016/j.mejo.2006.06.007.

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35

Becker, J. P., Y. Lee, J. R. East, and L. P. B. Katehi. "A finite ground coplanar line-to-silicon micromachined waveguide transition." IEEE Transactions on Microwave Theory and Techniques 49, no. 10 (2001): 1671–76. http://dx.doi.org/10.1109/22.954770.

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36

Reck, Theodore J., Cecile Jung-Kubiak, John Gill, and Goutam Chattopadhyay. "Measurement of Silicon Micromachined Waveguide Components at 500–750 GHz." IEEE Transactions on Terahertz Science and Technology 4, no. 1 (2014): 33–38. http://dx.doi.org/10.1109/tthz.2013.2282534.

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37

Davis, Kristina K., Jenna L. Kloosterman, Christopher Groppi, Jonathan H. Kawamura, and Matthew Underhill. "Micromachined Integrated Waveguide Transformers in THz Pickett–Potter Feedhorn Blocks." IEEE Transactions on Terahertz Science and Technology 7, no. 6 (2017): 649–56. http://dx.doi.org/10.1109/tthz.2017.2760103.

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38

Liu, Shuang, Jiang Hu, Yong Zhang, et al. "Silicon Micromachined Waveguide Quadrature-Hybrid Coupler at Terahertz Frequency Band." Journal of Infrared, Millimeter, and Terahertz Waves 36, no. 8 (2015): 709–19. http://dx.doi.org/10.1007/s10762-015-0168-2.

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39

Zhao, Xinghai, and Joachim Oberhammer. "HF Under-Etching Prevention for Advanced THz Micromachined Waveguide Devices." Journal of Microelectromechanical Systems 30, no. 3 (2021): 334–36. http://dx.doi.org/10.1109/jmems.2021.3069962.

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40

Moallem, Meysam, Jack East, and Kamal Sarabandi. "A Broadband, Micromachined Rectangular Waveguide to Cavity-Backed Coplanar Waveguide Transition Using Impedance-Taper Technique." IEEE Transactions on Terahertz Science and Technology 4, no. 1 (2014): 49–55. http://dx.doi.org/10.1109/tthz.2013.2293876.

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41

Zhao, Qiang, Michael Lukitsch, Jie Xu, Gregory Auner, Ratna Niak, and Pao-Kuang Kuo. "Development of Wide Bandgap Semiconductor Photonic Device Structures by Excimer Laser Micromachining." MRS Internet Journal of Nitride Semiconductor Research 5, S1 (2000): 852–58. http://dx.doi.org/10.1557/s1092578300005172.

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Excimer laser ablation rates of Si (111) and AlN films grown on Si (111) and r-plane sapphire substrates were determined. Linear dependence of ablation rate of Si (111) substrate, sapphire and AlN thin films were observed. Excimer laser micromachining of the AlN thin films on silicon (111) and SiC substrates were micromachined to fabricate a waveguide structure and a pixilated structure. This technique resulted in clean precise machining of AlN with high aspect ratios and straight walls.

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42

Sang-Shin Lee, Jong-Uk Bu, Seung-Yeob Lee, Ki-Chang Song, Chil-Geun Park, and Tae-Sik Kim. "Low-power consumption polymeric attenuator using a micromachined membrane-type waveguide." IEEE Photonics Technology Letters 12, no. 4 (2000): 407–9. http://dx.doi.org/10.1109/68.839034.

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43

Nordquist, C. D., M. C. Wanke, A. M. Rowen, C. L. Arrington, A. D. Grine, and C. T. Fuller. "Properties of Surface Metal Micromachined Rectangular Waveguide Operating Near 3 THz." IEEE Journal of Selected Topics in Quantum Electronics 17, no. 1 (2011): 130–37. http://dx.doi.org/10.1109/jstqe.2010.2049095.

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44

Lu, Hongda, Xin Lv, Kai Zhou, and Yong Liu. "Experimental realisation of micromachined terahertz waveguide‐fed antipodal tapered slot antenna." Electronics Letters 50, no. 8 (2014): 615–17. http://dx.doi.org/10.1049/el.2014.0327.

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45

Lu, Hongda, Xin Lv, Liming Si, Yuming Wu, and Yong Liu. "Experimental realisation of micromachined terahertz electromagnetic crystal (EMXT) waveguide bandpass filter." Electronics Letters 50, no. 25 (2014): 1952–53. http://dx.doi.org/10.1049/el.2014.1354.

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46

Beuerle, Bernhard, James Campion, Umer Shah, and Joachim Oberhammer. "A Very Low Loss 220–325 GHz Silicon Micromachined Waveguide Technology." IEEE Transactions on Terahertz Science and Technology 8, no. 2 (2018): 248–50. http://dx.doi.org/10.1109/tthz.2018.2791841.

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47

Hyeon, I. J., W. Y. Park, S. Lim, and C. W. Baek. "Fully micromachined, silicon-compatible substrate integrated waveguide for millimetre-wave applications." Electronics Letters 47, no. 5 (2011): 328. http://dx.doi.org/10.1049/el.2011.0064.

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48

Butt, Muhammad Ali, and Nikolai Lvovich Kazansky. "SOI Suspended membrane waveguide at 3.39 µm for gas sensing application." Photonics Letters of Poland 12, no. 2 (2020): 67. http://dx.doi.org/10.4302/plp.v12i2.1034.

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In this letter, we present a numerical study on the designing of silicon-on-insulator (SOI) suspended membrane waveguide (SMW). The waveguide geometry is optimized at 3.39 µm TE-polarized light which is the absorption line of methane gas by utilizing a 3D finite element method (FEM). The transmission loss (TL) and evanescent field ratio (EFR) of the waveguide are calculated for different geometric parameters such as the width of core, the height of core and period of the cladding. We found out that TL is directly related to EFR. Therefore, a waveguide geometry can be designed which can offer high EFR at the cost of high TL or low EFR with low TL, as desired. Based on the geometric parameters used in this paper, we have obtained a TL and EFR which lies in the range of 1.54 dB-3.37 dB and 0.26-0.505, respectively. Full Text: PDF ReferencesL. Vivien et al., "High speed silicon-based optoelectronic devices on 300mm platform", 2014 16th International conference on transparent optical networks (ICTON), Graz, 2014, pp. 1-4, CrossRef Y. Zou, S. Chakravarty, "Mid-infrared silicon photonic waveguides and devices [Invited]", Photonic Research, 6(4), 254-276 (2018). CrossRef J.S. Penades et al., "Suspended SOI waveguide with sub-wavelength grating cladding for mid-infrared", Optics letters, 39(19), 5661-5664 (2014). CrossRef T. Baehr-Jones, A. Spott, R. Ilic, A. Spott, B. Penkov, W. Asher, and M. Hochberg, "Silicon-on-sapphire integrated waveguides for the mid-infrared", Opt. Express, 18(12),12127-12135 (2010). CrossRef J. Mu, R. Soref, L. C. Kimerling, and J. Michel, "Silicon-on-nitride structures for mid-infrared gap-plasmon waveguiding", Appl. Phys. Lett., 104(3), 031115 (2014). CrossRef J.S. Penades et al., "Suspended silicon waveguides for long-wave infrared wavelengths", Optics letters, 43 (4), 795-798 (2018). CrossRef J.S. Penades et al., "Suspended silicon mid-infrared waveguide devices with subwavelength grating metamaterial cladding", Optics Express, 24, (20), 22908-22916 (2016). CrossRef M.A. Butt, S.N. Khonina, N.L. Kazanskiy, "Modelling of Rib channel waveguides based on silicon-on-sapphire at 4.67 μm wavelength for evanescent field gas absorption sensor", Optik, 168, 692-697 (2018). CrossRef S.N. Khonina, N.L. Kazanskiy, M.A. Butt, "Evanescent field ratio enhancement of a modified ridge waveguide structure for methane gas sensing application", IEEE Sensors Journal CrossRef M.A. Butt, S.A. Degtyarev, S.N. Khonina, N.L. Kazanskiy, "An evanescent field absorption gas sensor at mid-IR 3.39 μm wavelength", Journal of Modern Optics, 64(18), 1892-1897 (2017). CrossRef S. Zampolli et al., "Selectivity enhancement of metal oxide gas sensors using a micromachined gas chromatographic column", Sensors and Actuators B Chemical, 105 (2), 400-406 (2005). CrossRef N. Dossi, R. Toniolo, A. Pizzariello, E. Carrilho, E. Piccin, S. Battiston, G. Bontempelli, "An electrochemical gas sensor based on paper supported room temperature ionic liquids", Lab Chip, 12 (1), 153-158 (2011). CrossRef V. Avetisov, O. Bjoroey, J. Wang, P. Geiser, K. G. Paulsen, "Hydrogen Sensor Based on Tunable Diode Laser Absorption Spectroscopy", Sensors, 19 (23), 5313 (2019). CrossRef M.A. Butt, S.N. Khonina, N.L. Kazanskiy, "Silicon on silicon dioxide slot waveguide evanescent field gas absorption sensor", Journal of Modern Optics, 65(2), 174-178 (2018). CrossRef Nikolay Lvovich Kazanskiy, Svetlana Nikolaevna Khonina, Muhammad Ali Butt, "Subwavelength Grating Double Slot Waveguide Racetrack Ring Resonator for Refractive Index Sensing Application", Sensors, 20, 3416 (2020). CrossRef H. Tai, H. Tanaka, T. Yoshino, "Fiber-optic evanescent-wave methane-gas sensor using optical absorption for the 3.392-μm line of a He–Ne laser", Opt. Lett., 12, 437-439 (1987). CrossRef M.A. Butt, S.N. Khonina, N.L. Kazanskiy, "Hybrid plasmonic waveguide-assisted Metal–Insulator–Metal ring resonator for refractive index sensing", Journal of Modern Optics, 65(9), 1135-1140 (2018). CrossRef S.A. Degtyarev, M.A. Butt, S.N. Khonina, R.V. Skidanov, "Modelling of TiO2 based slot waveguides with high optical confinement in sharp bends", 2016 International Conference on Computing, Electronic and Electrical Engineering, ICE Cube, Quetta, 2016, 10-13 CrossRef

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Oguchi, T., M. Hayase, and T. Hatsuzawa. "Micromachined Display Device Using Sheet Waveguide and Multicantilevers Driven by Electrostatic Force." IEEE Transactions on Industrial Electronics 52, no. 4 (2005): 984–91. http://dx.doi.org/10.1109/tie.2005.851653.

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Shang, X., M. Ke, Y. Wang, and M. J. Lancaster. "Micromachined W-band waveguide and filter with two embedded H-plane bends." IET Microwaves, Antennas & Propagation 5, no. 3 (2011): 334. http://dx.doi.org/10.1049/iet-map.2010.0272.

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