Relevant bibliographies by topics / Micromechanical systems

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  1. Journal articles
  2. Dissertations / Theses
  3. Books
  4. Book chapters
  5. Conference papers
  6. Reports

Academic literature on the topic 'Micromechanical systems'

Author: Grafiati
Published: 4 June 2021
Last updated: 1 February 2022

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Journal articles on the topic "Micromechanical systems"

1

Bestugin, A. R., I. A. Kirshina, A. A. Ovodenko, B. V. Oskolkov, and O. M. Filonov. "Adhesion in micromechanical systems." Automation and Remote Control 78, no. 6 (2017): 1138–43. http://dx.doi.org/10.1134/s0005117917060133.

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Albers, Albert, Norbert Burkardt, Tobias Deigendesch, Claudia Ellmer, and Stefan Hauser. "Validation of micromechanical systems." Microsystem Technologies 14, no. 9-11 (2008): 1481–85. http://dx.doi.org/10.1007/s00542-008-0601-8.

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Trimmer, W. S. N. "Microrobots and micromechanical systems." Sensors and Actuators 19, no. 3 (1989): 267–87. http://dx.doi.org/10.1016/0250-6874(89)87079-9.

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Cui, Zheng, and Ron A. Lawes. "Low cost fabrication of micromechanical systems." Microelectronic Engineering 35, no. 1-4 (1997): 389–92. http://dx.doi.org/10.1016/s0167-9317(96)00207-9.

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SHIKIDA, Mitsuhiro, and Kazuo SATO. "Micromechanical Devices. Micromachined Fluidic Device Systems." Journal of the Japan Society for Precision Engineering 65, no. 5 (1999): 651–54. http://dx.doi.org/10.2493/jjspe.65.651.

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Venkatesh, Shalini, and Steven Novak. "Micromechanical resonators in fiber-optic systems." Optics Letters 12, no. 2 (1987): 129. http://dx.doi.org/10.1364/ol.12.000129.

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Schier, Johannes, Rainer Willig, and Klaus Miekley. "Micromechanical sensors for vehicle dynamics control systems." ATZ worldwide 107, no. 11 (2005): 16–19. http://dx.doi.org/10.1007/bf03224784.

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Michler, G. H., R. Adhikari, and S. Henning. "Micromechanical properties in lamellar heterophase polymer systems." Journal of Materials Science 39, no. 10 (2004): 3281–92. http://dx.doi.org/10.1023/b:jmsc.0000026929.30869.da.

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Schott, Walter. "Developments in Homodyne Interferometry." Key Engineering Materials 437 (May 2010): 84–88. http://dx.doi.org/10.4028/www.scientific.net/kem.437.84.

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The trend in many fields of enabling technologies, such as microelectronics, communications, microsystems, and micromechanics, toward imposing increasingly stringent demands upon precision continues. Those types of technologies allow creating micromechanical components having dimensions of a few micrometers that have to be accurately measured, positioned relative to one another, and assembled. In that conjunction, laser-interferometric metrology provides unique opportunities that combine measurements over large ranges at extraordinarily fine resolutions with traceability of measurement results
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Kota, S., G. K. Ananthasuresh, S. B. Crary, and K. D. Wise. "Design and Fabrication of Microelectromechanical Systems." Journal of Mechanical Design 116, no. 4 (1994): 1081–88. http://dx.doi.org/10.1115/1.2919490.

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An attempt has been made to summarize some of the important developments in the emerging technology of microelectromechanical systems (MEMS) from the mechanical engineering perspective. In the micro domain, design and fabrication issues are very much different from those of the macro world. The reason for this is twofold. First, the limitations of the micromachining techniques give way to new exigencies that are nonexistent in the macromachinery. One such difficulty is the virtual loss of the third dimension, since most of the microstructures are fabricated by integrated circuit based micromac
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Dissertations / Theses on the topic "Micromechanical systems"

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Tadinada, Karthik. "Ferrofluid applications in micromechanical systems." Thesis, University of Cambridge, 2008. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.612319.

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Ho, Gavin Kar-Fai. "Design and characterization of silicon micromechanical resonators." Diss., Atlanta, Ga. : Georgia Institute of Technology, 2008. http://hdl.handle.net/1853/29634.

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Thesis (Ph.D)--Electrical and Computer Engineering, Georgia Institute of Technology, 2009.<br>Committee Member: David R. Hertling; Committee Member: Farrokh Ayazi; Committee Member: Gary S. May; Committee Member: Oliver Brand; Committee Member: Paul A. Kohl. Part of the SMARTech Electronic Thesis and Dissertation Collection.
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Sivapurapu, Abhishek. "Piezoelectrically-Transduced Silicon Micromechanical Resonators." Thesis, Georgia Institute of Technology, 2005. http://hdl.handle.net/1853/7478.

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This thesis reports on the design and fabrication of micro-electro-mechanical (MEM) resonators on silicon that are piezoelectrically-transduced for operation in the very high frequency (VHF) range. These devices have a block-type or beam-type design, and are designed to resonate in their in-plane and out-of-plane bulk extensional modes. Two piezoelectric materials were taken into consideration, zinc-oxide (ZnO) and lead-zirconate-titanate (PZT). The resonators are fabricated on silicon-on-insulator (SOI) wafers and the metal/piezo/metal stack of layers forming the device is built and patterned
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Chang, Sung Pil. "Robust micromachined capacitive pressure sensors for mechanically harsh environments." Diss., Georgia Institute of Technology, 2002. http://hdl.handle.net/1853/15473.

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Sparks, Andrew William 1977. "Scanning probe microscopy with inherent disturbance suppression using micromechanical systems." Thesis, Massachusetts Institute of Technology, 2005. http://hdl.handle.net/1721.1/30249.

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Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2005.<br>Includes bibliographical references (p. 109-116).<br>All scanning probe microscopes (SPMs) are affected by disturbances, or mechanical noise, in their environments which can limit their imaging resolution. This thesis introduces a general approach for suppressing out-of-plane disturbances that is applicable to non-contact and intermittent contact SPM imaging modes. In this approach, two distinct sensors simultaneously measure the probe-sample separation: one sensor measures a spatial av
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Jia, Hao. "Multimode Resonant Micromechanical Systems in Liquid for Biophysical Studies of Cells." Case Western Reserve University School of Graduate Studies / OhioLINK, 2018. http://rave.ohiolink.edu/etdc/view?acc_num=case1523324534404429.

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Deaton, Scott Lowrey. "An integrated digital system for earthquake damage reconnaissance." Diss., Georgia Institute of Technology, 2002. http://hdl.handle.net/1853/22728.

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Hussain, Abid Sayeed. "A finite element study of micromechanical effects in fibre reinforced composites systems." Thesis, University of Manchester, 2001. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.488454.

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Walmsley, Byron Alan. "Micromechanical investigation of MEMS-based short-wave infrared tunable Fabry-Perot filters." University of Western Australia. School of Mechanical Engineering, 2008. http://theses.library.uwa.edu.au/adt-WU2008.0188.

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[Truncated abstract] This study investigates the mechanical and physical properties of low-temperature (100-300 ?C) plasma enhanced chemical vapour deposited (PECVD) silicon nitride (SiNxHy) thin films for the fabrication of short-wave infrared tunable Fabry-Perot filters with high fill factor, high cavity finesse and low actuation voltages. It has been the intensions of this work to fabricate a tunable filter that can be monolithically integrated with temperature-sensitive substrates, namely mercury cadmium telluride (Hg(1-x)CdxTe) photoconductors and photodiodes. A range of methods have been
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Quinci, Federico. "Towards a micromechanical insight into the visco-dynamic behaviour of UHMWPE for the modelling of knee joint replacement systems." Thesis, University of Southampton, 2014. https://eprints.soton.ac.uk/363765/.

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Considerable progress has been made in understanding implant wear and developing numerical models to predict certain aspects of wear for new orthopaedic devices. However, any model of wear could be improved through a more accurate representation of the biomaterial micromechanics, including time-varying dynamic and inelastic behaviour such as viscous and plastic deformation as well as any history-dependent evolution of its microstructural properties. Under in-vivo conditions, the contact surface of the UHMWPE tibial insert evolves as a result of applied loads and complex multidirectional motion
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Books on the topic "Micromechanical systems"

1

Kiihamäki, Jyrki. Fabrication of SOI micromechanical devices. VTT Technical Research Centre of Finland, 2005.

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2

1916-, Prokhorov A. M., Ramamurthy V. S, Pustovoy Vladimir, et al., eds. Indo-Russian Workshop on Micromechanical Systems: 2-4 February 1999, New Delhi, India. SPIE, 1999.

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Meeting, American Society of Mechanical Engineers Winter. Micromechanical systems, 1993: Presented at the 1993 ASME Winter Annual Meeting, New Orleans, Louisiana, November 28-December 3, 1993. The Society, 1993.

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4

Tatiana, Baidyk, Wunsch Donald C, and SpringerLink (Online service), eds. Neural Networks and Micromechanics. Springer-Verlag Berlin Heidelberg, 2010.

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Mohammed, Cherkaoui, ed. Fundamentals of micromechanics of solids. Wiley, 2006.

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6

Symposium, on Microstructures and Microfabricated Systems (1994 San Francisco Calif ). Proceedings of the Symposium on Microstructures and Microfabricated Systems. Electrochemical Society, 1994.

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International Symposium on Microstructures and Microfabricated Systems (4th 1998 Boston, Massachusetts). Proceedings of the Symposium on Microstructures and Microfabricated Systems IV. Edited by Hughes Henry G, Hesketh P. J, Bailey Wayne E, and Electrochemical Society Meeting. Electrochemical Society, 1998.

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8

Foundations of MEMS. Pearson Prentice Hall, 2005.

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D, Denton, Hesketh P. J, Hughes Henry G, et al., eds. Proceedings of the Second International Symposium on Microstructures and Microfabricated Systems. Electrochemical Society, 1995.

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Microfabricated, Systems and MEMS Symposium (5th 2000 Phoenix Ariz ). Microfabricated systems and MEMS V: Proceedings of the international symposium. Electrochemical Society, Inc., 2000.

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Book chapters on the topic "Micromechanical systems"

1

Fluitman, Jan H., Albert van den Berg, and Theo S. Lammerink. "Micromechanical Components for µTAS." In Micro Total Analysis Systems. Springer Netherlands, 1995. http://dx.doi.org/10.1007/978-94-011-0161-5_7.

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Fabian, J. H., R. Berger, H. P. Lang, et al. "Micromechanical Thermogravimetry on Single Zeolite Crystals." In Micro Total Analysis Systems ’98. Springer Netherlands, 1998. http://dx.doi.org/10.1007/978-94-011-5286-0_28.

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Pagano, N. J. "Axisymmetric Micromechanical Stress Fields in Composites." In Local Mechanics Concepts for Composite Material Systems. Springer Berlin Heidelberg, 1992. http://dx.doi.org/10.1007/978-3-642-84792-9_1.

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Roux, Jean-Noël. "Granular Materials: Micromechanical Approaches of Model Systems." In Mesoscale Models. Springer International Publishing, 2018. http://dx.doi.org/10.1007/978-3-319-94186-8_4.

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Karady, George G., Gerald T. Heydt, Esma Gel, and Norma Hubele. "Power Circuit Breaker Using Micromechanical Switches." In Operation and Control of Electric Energy Processing Systems. John Wiley & Sons, Inc., 2010. http://dx.doi.org/10.1002/9780470602782.ch4.

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Spath, D., H. Tritschler, L. Bischoff, and W. Schulz. "Micromilling — High Potential Technology for Micromechanical Parts." In AMST’02 Advanced Manufacturing Systems and Technology. Springer Vienna, 2002. http://dx.doi.org/10.1007/978-3-7091-2555-7_100.

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Bütefisch, Sebastian, Volker Seidemann, and Stephanus Büttgenbach. "A New Micro Pneumatic Actuator for Micromechanical Systems." In Transducers ’01 Eurosensors XV. Springer Berlin Heidelberg, 2001. http://dx.doi.org/10.1007/978-3-642-59497-7_172.

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Lang, H. P., F. M. Battiston, M. K. Baller, et al. "An Electronic Nose Based on A Micromechanical Cantilever Array." In Micro Total Analysis Systems ’98. Springer Netherlands, 1998. http://dx.doi.org/10.1007/978-94-011-5286-0_13.

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Meng, W. J., L. S. Stephens, and K. W. Kelly. "LIGA-Based Micromechanical Systems and Ceramic Nanocomposite Surface Coatings." In Nanotribology. Springer US, 2003. http://dx.doi.org/10.1007/978-1-4615-1023-9_22.

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Marenić, Eduard, and Adnan Ibrahimbegovic. "Multiscale Atomistic-to-Continuum Reduced Models for Micromechanical Systems." In Computational Methods in Applied Sciences. Springer International Publishing, 2016. http://dx.doi.org/10.1007/978-3-319-27996-1_9.

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Conference papers on the topic "Micromechanical systems"

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Kuryshev, Georgy L. "Micromechanical IR-systems." In 2011 12th International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM 2011). IEEE, 2011. http://dx.doi.org/10.1109/edm.2011.6006938.

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Mink, S. S., L. A. Starman, P. E. Kladitis, and K. C. Bradley. "Micromechanical cervix." In 48th Midwest Symposium on Circuits and Systems, 2005. IEEE, 2005. http://dx.doi.org/10.1109/mwscas.2005.1594343.

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Ignatyev, Mikhail B., Andrey V. Korshunov, and Evgenij N. Pyatishev. "Problems of micromechanical robotic systems." In Indo-Russian Workshop on Micromechanical Systems, edited by Vladimir I. Pustovoy and Vinoy K. Jain. SPIE, 1999. http://dx.doi.org/10.1117/12.369476.

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Ho, Gavin K., John K. C. Perng, and Farrokh Ayazi. "Process compensated micromechanical resonators." In 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, 2007. http://dx.doi.org/10.1109/memsys.2007.4432960.

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Chandorkar, S. A., H. Mehta, M. Agarwal, et al. "Non-isothermal micromechanical resonators." In 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, 2007. http://dx.doi.org/10.1109/memsys.2007.4433138.

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Gurin, Sergey A., Ekaterina A. Pecherskaya, Kseniya Yu Spitsyna, Andrey V. Fimin, Dmitriy V. Artamonov, and Anastasiya E. Shepeleva. "Thin Piezoelectric Films for Micromechanical Systems." In 2020 Moscow Workshop on Electronic and Networking Technologies (MWENT). IEEE, 2020. http://dx.doi.org/10.1109/mwent47943.2020.9067450.

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Nguyen, Clark T. C. "Integrated Micromechanical Radio Front-Ends." In 2008 International Symposium on VLSI Technology, Systems, and Applications (VLSI-TSA). IEEE, 2008. http://dx.doi.org/10.1109/vtsa.2008.4530773.

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Kim, B., Y. Lin, W. L. Huang, et al. "Micromechanical Resonant Displacement Gain Stages." In 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, 2009. http://dx.doi.org/10.1109/memsys.2009.4805308.

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Belyaev, Ya V., A. A. Belogurov, A. N. Bocharov, et al. "Design of a micromechanical accelerometer." In 2018 25th Saint Petersburg International Conference on Integrated Navigation Systems (ICINS). IEEE, 2018. http://dx.doi.org/10.23919/icins.2018.8405921.

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Saha, I., R. Islam, K. Kanakaraju, Yashwant K. Jain, and T. K. Alex. "Silicon-micromachined accelerometers for space inertial systems." In Indo-Russian Workshop on Micromechanical Systems, edited by Vladimir I. Pustovoy and Vinoy K. Jain. SPIE, 1999. http://dx.doi.org/10.1117/12.369456.

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Reports on the topic "Micromechanical systems"

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Ingber, M. S., L. A. Mondy, A. Graham, and H. Brenner. First Principle Micromechanical and Continuum Modeling of Concentrated, Multiphase Dispersed Systems. Final report. Office of Scientific and Technical Information (OSTI), 2001. http://dx.doi.org/10.2172/793641.

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Bonin, Wayne, and Jerzy T. Wyrobek. Micromechanical Measurement System for Thin Films on Polymeric Substrates. Phase 1. Defense Technical Information Center, 1995. http://dx.doi.org/10.21236/ada297326.

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Muhlstein, Christopher L. Micromechanics of Damage Accumulation in Micro- and Nano-Scale Laminates for Microelectromechanical Systems. Defense Technical Information Center, 2009. http://dx.doi.org/10.21236/ada510313.

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