Relevant bibliographies by topics / Micromirrors

Contents

  1. Journal articles
  2. Dissertations / Theses
  3. Books
  4. Book chapters
  5. Conference papers
  6. Reports

Academic literature on the topic 'Micromirrors'

Author: Grafiati
Published: 4 June 2021
Last updated: 28 January 2023

Create a spot-on reference in APA, MLA, Chicago, Harvard, and other styles

Select a source type:

Consult the lists of relevant articles, books, theses, conference reports, and other scholarly sources on the topic 'Micromirrors.'

Next to every source in the list of references, there is an 'Add to bibliography' button. Press on it, and we will generate automatically the bibliographic reference to the chosen work in the citation style you need: APA, MLA, Harvard, Chicago, Vancouver, etc.

You can also download the full text of the academic publication as pdf and read online its abstract whenever available in the metadata.

Journal articles on the topic "Micromirrors"

1

Wang, Qiang, Weimin Wang, Liang Fang, Chongxi Zhou, and Bin Fan. "Study of Residual Stress Compensation in Continuous Membrane Micromirrors Based on Surface Micromachining Processes." Coatings 11, no. 3 (March 3, 2021): 289. http://dx.doi.org/10.3390/coatings11030289.

Full text
Abstract:
Residual stress is one of the key factors that directly determines the optical quality of micro-optical devices. With the same residual stress, the larger the aperture is, the worse the optical quality is. Therefore, continuous micromirrors are more affected by residual stress than segmented micromirrors. However, due to the complexity of boundary conditions, the influence of residual stress in segmented micromirror arrays on the device performance has been widely investigated in theory and practical applications, but only a few research results about the influence of residual stress in the continuous micromirror arrays have been reported. In this work, the residual stress both in continuous and segmented micromirror arrays is analyzed and summarized, then an accurate model for continuous micromirrors is developed. Compared with the existing models, it combines two additional factors, layer plate and point supported boundary conditions. Based on the proposed model, the change of critical stress of continuous micromirrors induced by different thicknesses of residual stress compensated membrane is theoretically investigated. Finally, the compensating experiment has been carried out, and the results show that the optical quality of micromirror can be remarkably improved, almost two orders of magnitude, with the introduction of residual stress compensation.
APA, Harvard, Vancouver, ISO, and other styles
2

MOEENFARD, HAMID, ALI DARVISHIAN, HASSAN ZOHOOR, and MOHAMMAD TAGHI AHMADIAN. "INFLUENCE OF VAN DER WAALS FORCE ON STATIC BEHAVIOR OF NANO/MICROMIRRORS UNDER CAPILLARY FORCE." International Journal of Modern Physics B 26, no. 07 (March 20, 2012): 1250056. http://dx.doi.org/10.1142/s0217979212500567.

Full text
Abstract:
In the current paper, the effect of van der Waals (vdW) force on the static behavior and pull-in characteristics of nano/micromirrors under capillary force is investigated. At first, the dimensionless equation governing the static behavior of nano/micromirrors is obtained. The dependence of the critical tilting angle on the physical and geometrical parameters of the nano/micromirror and its supporting torsional beams is investigated. It is found that the existence of vdW force can considerably reduce the stability limits of the nano/micromirror. It is also found that rotation angle of the mirror due to capillary force highly depends on the vdW force applied to the mirror. Finally, analytical tool Homotopy Perturbation Method (HPM) is utilized for prediction of the nano/micromirror behavior under combined capillary and vdW force. It is observed that a sixth order perturbation approximation accurately predicts the rotation angle and stability limits of the mirror. The results of this paper can be used for successful fabrication of nano/micromirrors using wet etching release process where capillary force plays a major role in the system.
APA, Harvard, Vancouver, ISO, and other styles
3

Moeenfard, Hamid, Ali Darvishian, Hassan Zohoor, and Mohammad Taghi Ahmadian. "Characterization of the static behavior of micromirrors under the effect of capillary force, an analytical approach." Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science 226, no. 9 (January 5, 2012): 2361–72. http://dx.doi.org/10.1177/0954406211433112.

Full text
Abstract:
In this article, the static behavior of micromirrors under the effect of capillary force is studied. The dimensionless equations governing the static behavior and the pull-in state of the micromirror under capillary force are obtained, and the effects of different geometrical parameters on the pull-in angle of micromirrors are investigated. The static behavior of micromirrors is studied both numerically and analytically using the homotopy perturbation method. It is observed that with increasing the instability number defined in this article, the rotation angle of the micromirror is increased and suddenly the pull-in occurs. The results of the presented model are then verified by comparing them with the results of finite element simulations performed in the commercial finite element model software ANSYS. The agreement between the results of finite element model and those of the proposed analytical model shows that homotopy perturbation method can be used as a fast and accurate tool for predicting mirror’s behavior under capillary force.
APA, Harvard, Vancouver, ISO, and other styles
4

Starasotnikau, M. A. "Assessment of Temperature Effects in Interior Orientation Parameters Calibration of Optoelectronic Devices." Devices and Methods of Measurements 11, no. 2 (June 26, 2020): 122–31. http://dx.doi.org/10.21122/2220-9506-2020-11-2-122-131.

Full text
Abstract:
A digital micromirror device (DMD) micromirrors periodic spatial structure is a measuring scale in interior orientation parameters calibration of optoelectronic devices problems, when using a DMD as a testobject. It is important that DMD micromirrors periodic spatial structure remains constant. Change in a DMD micromirrors spatial structure may occur due to heating. In addition to heating a DMD, an optoelectronic device photodetector is also subject to heating and, accordingly, change in its spatial structure. It is necessary to estimate change in a spatial structure of DMD micromirrors and an optoelectronic device photodetector.A DMD micromirrors spatial drift and a DMD micromirrors spatial drift together with a digital camera photodetector pixels spatial drift for operation 4 h are analyzed. The drift analysis consisted in the points array position assessing formed by a DMD and projected onto a digital camera. When analyzing only a DMD micromirrors drift, a digital camera was turned on only for shooting time for exclude digital camera influence. A digital camera did not have time to significantly heat up, during this time. After a digital camera it cooled to a room temperature.Average drift of all DMD micromirrors determines the accuracy of interior orientation parameters calibration of optoelectronic devices using a DMD in time. Maximum drift of all micromirrors after switching on is observed. Minimum DMD warm-up time is 60 min for average drift of all micromirrors less than 1 μm is necessary. Minimum DMD warm-up time is 120 min when using a DMD together with a digital camera is necessary.A DMD expansion uniformity determines the accuracy of interior orientation parameters calibration of optoelectronic devices using a DMD, because irregular expansion disturbs micromirrors periodicity. The average change in distance of neighboring points is less than 0.1 μm for every 20 min.Thus, a DMD can be used as a test-object in interior orientation parameters calibration of optoelectronic devices. The results can be used as compensation coefficients of change in DMD micromirrors spatial structure due to temperature effects during operation, if more accurate are necessary.
APA, Harvard, Vancouver, ISO, and other styles
5

Wang, Yi, and Yigui Li. "Design and fabrication of piezoelectrically driven deformable reflective micromirrors based on MEMS technology." Journal of Physics: Conference Series 2334, no. 1 (August 1, 2022): 012004. http://dx.doi.org/10.1088/1742-6596/2334/1/012004.

Full text
Abstract:
Abstract As the core component of the adaptive optics system, the deformable mirror is developing towards miniaturization and integration through the combination of MEMS technology. In this paper, based on the inverse piezoelectric effect of piezoelectric materials, a piezoelectrically driven deformable reflective micromirror is designed and fabricated by physical vapor deposition, UV lithography, eutectic bonding, mechanical cutting, deep reactive ion etching (RIE) and other processes to complete the preparation of micromirrors. The problems related to the eutectic bonding process of PZT and Si in the fabrication of micromirrors are emphatically studied through tensile experiments. The micromirror was tested with a laser interferometer. The test results showed that the prepared micromirror could achieve a maximum deformation of 0.6 μm in the positive direction and 1.7 μm in the negative direction when a voltage of ±1.5 kV was applied.
APA, Harvard, Vancouver, ISO, and other styles
6

Resmi, R., V. Suresh Babu, and M. R. Baiju. "Damping Analysis in Si Torsional Micromirrors." Journal of Physics: Conference Series 2325, no. 1 (August 1, 2022): 012023. http://dx.doi.org/10.1088/1742-6596/2325/1/012023.

Full text
Abstract:
Abstract Micromirrors are extensively used in MEMS/NEMS based actuators and accordingly the design of superior performance mirror structures are prime requisite in MEMS/NEMS industry. Thermal and viscous damping of a dynamic vibrating micromirror are important factors degrading its performance by inducing energy dissipation. The primary sources of energy losses are viscosity and thermal conduction near the walls of the structure in the acoustic boundary layer. Hence it is necessary to accurately assess the bounds of energy dissipation owing to thermal and viscous damping. In this paper, the depths of the thermal and viscous boundary layers corresponding to thermal conduction and viscous drag at different eigen frequencies are investigated. Both the temperature and pressure distributions surrounding the vibrating micromirror are considered for the analysis. The penetration depths communicate the extent of thermal and viscous boundary layers and clearly indicate the extent of energy loss. In micromirrors, the thickness of boundary layer is a critical parameter since the dissipated energy is mainly distributed in it. The air domain surrounding the micromirror is modelled using thermoacoustics of COMSOL Multiphysics software along with the eigen frequency analysis. In the present study, the thickness of the boundary layers and quality factor are analysed for a micromirror vibrating in torsional mode. The thermal and viscous penetration depths decrease with eigen frequency and hence to develop high quality devices with low damping, the micromirror are verified to be operated at higher frequencies.
APA, Harvard, Vancouver, ISO, and other styles
7

Skulavik, Tomas, Peter Schreiber, and Oliver Moravčik. "Steady State Response Simulation of a 2-D Micromirror in Simulink." Advanced Materials Research 488-489 (March 2012): 1646–50. http://dx.doi.org/10.4028/www.scientific.net/amr.488-489.1646.

Full text
Abstract:
Micromirrors fabricated by MEMS technology may be important sensing components in optical tracking systems used in many industrial applications. This paper deals with the analytical model of a 2-D gimbal mounted micromirror and with the simulation of a steady state response of the micromirror in Simulink. The model of a 2-D micromirror should be further used in a simulation of its dynamical behavior.
APA, Harvard, Vancouver, ISO, and other styles
8

Nakamura, Fumi, Kenta Suzuki, Akihiro Noriki, and Takeru Amano. "Micromirror fabrication for co-packaged optics using 3D nanoimprint technology." Journal of Vacuum Science & Technology B 40, no. 6 (December 2022): 063203. http://dx.doi.org/10.1116/6.0002119.

Full text
Abstract:
Co-packaged optics (CPO) is a key technology for addressing power bottlenecks in datacenters by integrating optical and electrical components and replacing electrical wiring with optical links. In the CPO module where silicon chips are embedded on the substrate and polymer waveguides are integrated as optical connections, a pair of 3D micromirrors can achieve low-loss and wideband optical coupling from silicon photonics to polymer waveguides. The shape of the polymer micromirror patterned by grayscale photo lithography depends on process conditions and requires high fabrication accuracy. In this study, photonanoimprint technology is adopted for stable micromirror fabrication. The imprint process for a polymer micromirror was considered from a hyperelastic analysis using the finite element method. The master mold was prepared using grayscale lithography with photosensitive polyimide as a template of a polydimethylsiloxane (PDMS) replica mold. The micromirror fabrication was demonstrated on a 4-in. silicon wafer. By imprinting into a guide groove structure with a PDMS replica mold, over 30 μm-height micromirrors were stably obtained multiple times by a step-and-repeat imprint. The linear part of the patterned mirror by the imprint process was more than 23.5 μm for four times imprinting, and the fabricated mirror shape was improved compared with grayscale lithography. The total height misalignment is 5 μm for 12 mirrors in four imprints, and 70% coupling efficiency in calculation was achieved.
APA, Harvard, Vancouver, ISO, and other styles
9

Pereira, C., M. Abreu, A. Cabral, and J. M. Rebordão. "Characterization of Light Diffraction by a Digital Micromirror Device." Journal of Physics: Conference Series 2407, no. 1 (December 1, 2022): 012048. http://dx.doi.org/10.1088/1742-6596/2407/1/012048.

Full text
Abstract:
Abstract A Digital Micromirror Device (DMD) is a technology developed by Texas Instruments, that consists in a two-dimensional array of micromirrors, which can be individually tilted between two positions. It has been used as a digital video and image processing solution, commonly found in Digital Light Processing (DLP) video projectors. Over the years, DMDs have become popular in different fields: industrial, automotive, medical, government and home user solutions. In the astronomy field, it has been also considered in on-ground space instrumentation and it has been proposed for the development of some astrophysical space instruments. In order to evaluate the actual impact of such device in the instrument optical design, it is important to know how the light behaves when it interacts with a DMD, namely in what regards to the diffraction process when a light beam is reflected by a periodic array of micromirrors. In this study we describe how we simulate the diffraction patterns produced by a periodic array of micromirrors, for coherent and incoherent sources of light. The results from simulations are verified against laboratory experiments, described also in this study.
APA, Harvard, Vancouver, ISO, and other styles
10

Tang, Yue, Jianhua Li, Lixin Xu, Jeong-Bong Lee, and Huikai Xie. "Review of Electrothermal Micromirrors." Micromachines 13, no. 3 (March 10, 2022): 429. http://dx.doi.org/10.3390/mi13030429.

Full text
Abstract:
Electrothermal micromirrors have become an important type of micromirrors due to their large angular scanning range and large linear motion. Typically, electrothermal micromirrors do not have a torsional bar, so they can easily generate linear motion. In this paper, electrothermal micromirrors based on different thermal actuators are reviewed, and also the mechanisms of those actuators are analyzed, including U-shape, chevron, thermo-pneumatic, thermo-capillary and thermal bimorph-based actuation. Special attention is given to bimorph based-electrothermal micromirrors due to their versatility in tip-tilt-piston motion. The exemplified applications of each type of electrothermal micromirrors are also presented. Moreover, electrothermal micromirrors integrated with electromagnetic or electrostatic actuators are introduced.
APA, Harvard, Vancouver, ISO, and other styles
More sources

Dissertations / Theses on the topic "Micromirrors"

1

Kallweit, David. "Controlled tilting micromirrors micromirrors with integrated optical feedback for high accuracy tilt sensing." Tönning Lübeck Marburg Der Andere Verl, 2007. http://d-nb.info/988248638/04.

Full text
APA, Harvard, Vancouver, ISO, and other styles
2

Jia, Kemiao. "The development and applications of high fill-factor, small footprint MEMS micromirrors and micromirror arrays." [Gainesville, Fla.] : University of Florida, 2009. http://purl.fcla.edu/fcla/etd/UFE0024997.

Full text
APA, Harvard, Vancouver, ISO, and other styles
3

Li, Li. "MEMS micromirrors for imaging applications." Thesis, University of Strathclyde, 2013. http://oleg.lib.strath.ac.uk:80/R/?func=dbin-jump-full&object_id=19508.

Full text
Abstract:
Optical MEMS (microelectromechanical systems) are widely used in various applications. In this thesis, the design, simulation and characterisation of two optical MEMS devices for imaging applications, a varifocal micromirror and a 2D scanning micromirror, are introduced. Both devices have been fabricated using the commercial Silicon-on-Insulator multi-users MEMS processes (SOIMUMPs), in the 10 m thick Silicon-on-Insulator (SOI) wafer. Optical MEMS device with variable focal length is a critical component for imaging system miniaturisation. In this thesis, a thermally-actuated varifocal micromirror (VFM) with 1-mm-diameter aperture is introduced. The electrothermal actuation through Joule heating of the micromirror suspensions and the optothermal actuation using incident laser power absorption have been demonstrated as well as finite element method (FEM) simulation comparisons. Especially, the optical aberrations produced by this VFM have been statistically quantified to be negligible throughout the actuation range. A compact imaging system incorporating this VFM has been demonstrated with high quality imaging results. MEMS 2D scanners, or scanning micromirrors, are another type of optical MEMS which have been widely investigated for applications such as biomedical microscope imaging, projection, retinal display and optical switches for telecommunication network, etc. For large and fast scanning motions, the actuation scheme to scan a micromirror in two axes, the structural connections and arrangement are fundamental. The microscanner introduced utilises two types of actuators, electrothermal actuators and electrostatic comb-drives, to scan a 1.2-mm-diameter gold coated silicon micromirror in two orthogonal axes. With assistance of FEM software, CoventorWare, the structure optimisation of actuators and flexure connections are presented. The maximum optical scan angles in two axes by each type of actuator individually and by actuating the two at the same time have been characterised experimentally. By programming actuation signals, the microscanner has achieved a rectangular scan pattern with 7°x10° angular-scan-field at a line-scan rate of around 1656 Hz.
APA, Harvard, Vancouver, ISO, and other styles
4

Bauer, Ralf. "Applications of programmable MEMS micromirrors in laser systems." Thesis, University of Strathclyde, 2013. http://oleg.lib.strath.ac.uk:80/R/?func=dbin-jump-full&object_id=20837.

Full text
Abstract:
The use of optical microelectromechanical systems (MEMS) as enabling devices has been shown widely over the last decades, creating miniaturisation possibilities and added functionality for photonic systems. In the work presented in this thesis angular vertical offset comb-drive (AVC) actuated scanning micromirrors, and their use as intracavity active Q-switch elements in solid-state laser systems, are investigated. The AVC scanning micromirrors are created through a multi-user fabrication process, with theoretical and experimental investigations undertaken on the influence of the AVC initial conditions on the scanning micromirror dynamic resonant tilt movement behaviour. A novel actuator geometry is presented to experimentally investigate this influence, allowing a continuous variation of the initial AVC comb-offset angle through an integrated electrothermal actuator. The experimentally observed changes of the resonant movement with varying initial AVC offset are compared with an analytical model, simulating this varying resonant movement behaviour. In the second part of this work AVC scanning micromirrors are implemented as active intra-cavity Q-switch elements of a Nd:YAG solid-state laser system. The feasibility of achieving pulsed laser outputs with pulse durations limited by the laser cavity and not the MEMS Q-switch is shown, combined with a novel theoretical model for the Q-switch behaviour of the laser when using a bi-directional intra-cavity scanning micromirror. A detailed experimental investigation of the pulsed laser output behaviour for varying laser cavity geometries is presented, also discussing the influence of thin film coatings deposited on the mirror surfaces for further laser output power scaling. The MEMS Q-switch system is furthermore expanded using a micromirror array to create a novel Q-switched laser system with multiple individual controllable output beams using a common solid-state gain medium. Experimental results showing the simultaneous generation of two laser outputs are presented, with cavity limited pulse durations and excellent laser beam quality.
APA, Harvard, Vancouver, ISO, and other styles
5

Krishnamoorthy, Uma. "Design and fabrication of micromirrors for optical applications /." Connect to Digital dissertations. Restricted to UC campuses. Access is free to UC campus dissertations, 2002. http://uclibs.org/PID/11984.

Full text
APA, Harvard, Vancouver, ISO, and other styles
6

Marinescu, Cristina. "A surface micromachining fabrication process for aluminium MEMS micromirrors /." Thesis, McGill University, 2006. http://digitool.Library.McGill.CA:80/R/?func=dbin-jump-full&object_id=98996.

Full text
Abstract:
This thesis focuses on the implementation of a surface micromachining fabrication process for electrostatically actuated MEMS micromirrors in the McGill University's Nanotools microfabrication laboratory. The process consists in fabricating the devices out of aluminum using photoresist as a sacrificial material. To this effect simple cantilever micromirror structures were designed. They were then modeled and simulated using finite-element analyses from the commercially-available software ANSYS. Finally, in order to validate the results of the new process, the same structures were fabricated out of polysilicon using the Multi-User MEMS Processes (PolyMUMPS) technology available through the Canadian Microelectronics Corporation (CMC). The theoretical and experimental results from the PolyMUMPS micromirrors were compared. The results at low voltages were similar, but they diverged for larger voltages and deflections, with the simulations usually predicting stiffer structures. The characterization of the structures fabricated with the Nanotools process indicated that they remained stuck to the substrate after the release process. Manipulation during testing caused some of them to be partially released, at which point they could be electrostatically actuated. With a better understanding of the aluminum properties and modifications to the original designs, one can fabricate viable aluminum structures using this process. Different areas of improvement as well as future directions for MEMS fabrication in this laboratory were also identified.
APA, Harvard, Vancouver, ISO, and other styles
7

Worapattrakul, Natalie [Verfasser]. "Micromirrors for Daylight Steering Applications : Planarization of Micromirror Planes by Sub-Structure Implementation and Process Transfer to Nanoimprint Fabrication Technology / Natalie Worapattrakul." Kassel : Kassel University Press, 2017. http://d-nb.info/1129182908/34.

Full text
APA, Harvard, Vancouver, ISO, and other styles
8

Lee, Dae Sung. "Design and fabrication of SOI-based micromirrors for optical applications /." May be available electronically:, 2007. http://proquest.umi.com/login?COPT=REJTPTU1MTUmSU5UPTAmVkVSPTI=&clientId=12498.

Full text
APA, Harvard, Vancouver, ISO, and other styles
9

Mi, Bin. "Static and Electrically Actuated Shaped MEMS Mirrors." Case Western Reserve University School of Graduate Studies / OhioLINK, 2004. http://rave.ohiolink.edu/etdc/view?acc_num=case1078605638.

Full text
APA, Harvard, Vancouver, ISO, and other styles
10

Kaupmann, Philip [Verfasser], Thomas [Akademischer Betreuer] Otto, Thomas [Gutachter] Otto, and Klaus-Dieter [Gutachter] Lang. "A Novel Indirect Actuation Concept for MEMS Micromirrors / Philip Kaupmann ; Gutachter: Thomas Otto, Klaus-Dieter Lang ; Betreuer: Thomas Otto." Chemnitz : Technische Universität Chemnitz, 2021. http://d-nb.info/1233426176/34.

Full text
APA, Harvard, Vancouver, ISO, and other styles
More sources

Books on the topic "Micromirrors"

1

Gröblacher, Simon. Quantum Opto-Mechanics with Micromirrors. Berlin, Heidelberg: Springer Berlin Heidelberg, 2012. http://dx.doi.org/10.1007/978-3-642-34955-3.

Full text
APA, Harvard, Vancouver, ISO, and other styles
2

Gröblacher, Simon. Quantum Opto-Mechanics with Micromirrors: Combining Nano-Mechanics with Quantum Optics. Berlin, Heidelberg: Springer Berlin Heidelberg, 2012.

Find full text
APA, Harvard, Vancouver, ISO, and other styles
3

Douglass, Michael R., and Larry J. Hornbeck. Emerging digital micromirror device based systems and applications: 28 January 2009, San Jose, California, United States. Edited by SPIE (Society) and Texas Instruments Incorporated. Bellingham, Wash: SPIE, 2009.

Find full text
APA, Harvard, Vancouver, ISO, and other styles
4

Douglass, Michael R., and Larry J. Hornbeck. Emerging digital micromirror device based systems and applications II: 27 January 2010, San Francisco, California, United States. Bellingham, Wash: SPIE, 2010.

Find full text
APA, Harvard, Vancouver, ISO, and other styles
5

Douglass, Michael R., and Larry J. Hornbeck. Emerging digital micromirror device based systems and applications II: 27 January 2010, San Francisco, California, United States. Bellingham, Wash: SPIE, 2010.

Find full text
APA, Harvard, Vancouver, ISO, and other styles
6

Douglass, Michael R. Emerging digital micromirror device based systems and applications III: 26 January 2011, San Francisco, California, United States. Edited by SPIE (Society) and Texas Instruments Incorporated. Bellingham, Wash: SPIE, 2011.

Find full text
APA, Harvard, Vancouver, ISO, and other styles
7

Douglass, Michael R., and Patrick I. Oden. Emerging digital micromirror device based systems and applications V: 5-6 February 2013, San Francisco, California, United States. Edited by SPIE (Society). Bellingham, Washington: SPIE, 2013.

Find full text
APA, Harvard, Vancouver, ISO, and other styles
8

Gröblacher, Simon. Quantum Opto-Mechanics with Micromirrors: Combining Nano-Mechanics with Quantum Optics. Springer Berlin / Heidelberg, 2015.

Find full text
APA, Harvard, Vancouver, ISO, and other styles
9

Gröblacher, Simon. Quantum Opto-Mechanics with Micromirrors: Combining Nano-Mechanics with Quantum Optics. Springer, 2012.

Find full text
APA, Harvard, Vancouver, ISO, and other styles
10

Gmuender, Tommy. DLP Using Digital Micromirror Devices: A Primer. SPIE, 2016. http://dx.doi.org/10.1117/3.2258675.

Full text
APA, Harvard, Vancouver, ISO, and other styles
More sources

Book chapters on the topic "Micromirrors"

1

Carminati, Roberto, and Sonia Costantini. "Micromirrors." In Silicon Sensors and Actuators, 565–601. Cham: Springer International Publishing, 2022. http://dx.doi.org/10.1007/978-3-030-80135-9_18.

Full text
APA, Harvard, Vancouver, ISO, and other styles
2

Sasaki, Minoru. "High-Performance Electrostatic Micromirrors." In Next-Generation Actuators Leading Breakthroughs, 117–28. London: Springer London, 2010. http://dx.doi.org/10.1007/978-1-84882-991-6_11.

Full text
APA, Harvard, Vancouver, ISO, and other styles
3

Helmbrecht, Michael A., Uthara Srinivasan, Christian Rembe, Roger T. Howe, and Richard S. Muller. "Micromirrors for Adaptive-Optics Arrays." In Transducers ’01 Eurosensors XV, 1262–65. Berlin, Heidelberg: Springer Berlin Heidelberg, 2001. http://dx.doi.org/10.1007/978-3-642-59497-7_297.

Full text
APA, Harvard, Vancouver, ISO, and other styles
4

Milanović, Veljko, Matthew Last, and Kristofer S. J. Pister. "Torsional Micromirrors with Lateral Actuators." In Transducers ’01 Eurosensors XV, 1270–73. Berlin, Heidelberg: Springer Berlin Heidelberg, 2001. http://dx.doi.org/10.1007/978-3-642-59497-7_299.

Full text
APA, Harvard, Vancouver, ISO, and other styles
5

Gröblacher, Simon. "Preamble." In Quantum Opto-Mechanics with Micromirrors, 1–2. Berlin, Heidelberg: Springer Berlin Heidelberg, 2012. http://dx.doi.org/10.1007/978-3-642-34955-3_1.

Full text
APA, Harvard, Vancouver, ISO, and other styles
6

Gröblacher, Simon. "Introduction and Basic Theory." In Quantum Opto-Mechanics with Micromirrors, 3–34. Berlin, Heidelberg: Springer Berlin Heidelberg, 2012. http://dx.doi.org/10.1007/978-3-642-34955-3_2.

Full text
APA, Harvard, Vancouver, ISO, and other styles
7

Gröblacher, Simon. "Experimental Techniques." In Quantum Opto-Mechanics with Micromirrors, 35–79. Berlin, Heidelberg: Springer Berlin Heidelberg, 2012. http://dx.doi.org/10.1007/978-3-642-34955-3_3.

Full text
APA, Harvard, Vancouver, ISO, and other styles
8

Gröblacher, Simon. "High-Reflectivity, High-Q Mechanical Resonators." In Quantum Opto-Mechanics with Micromirrors, 81–99. Berlin, Heidelberg: Springer Berlin Heidelberg, 2012. http://dx.doi.org/10.1007/978-3-642-34955-3_4.

Full text
APA, Harvard, Vancouver, ISO, and other styles
9

Gröblacher, Simon. "Mechanical Laser Cooling in Cryogenic Cavities." In Quantum Opto-Mechanics with Micromirrors, 101–21. Berlin, Heidelberg: Springer Berlin Heidelberg, 2012. http://dx.doi.org/10.1007/978-3-642-34955-3_5.

Full text
APA, Harvard, Vancouver, ISO, and other styles
10

Gröblacher, Simon. "Opto-Mechanics in the Strong Coupling Regime." In Quantum Opto-Mechanics with Micromirrors, 123–32. Berlin, Heidelberg: Springer Berlin Heidelberg, 2012. http://dx.doi.org/10.1007/978-3-642-34955-3_6.

Full text
APA, Harvard, Vancouver, ISO, and other styles

Conference papers on the topic "Micromirrors"

1

Walraven, Jeremy A., Edward I. Cole, Danelle M. Tanner, Seethambal S. Mani, Ernest J. Garcia, and Marc A. Polosky. "Failure Analysis of Polysilicon Micromirror Arrays." In ISTFA 2002. ASM International, 2002. http://dx.doi.org/10.31399/asm.cp.istfa2002p0283.

Full text
Abstract:
Abstract Surface micromachined micromirror technologies are being employed for various commercial and government applications. One application of micromirror technologies in the commercial sector can be found in Digital Light Projection (DLP™) systems used for theater and home entertainment centers. DLP™ systems developed by Texas Instruments uses DMD™ technology (Digital Mirror Device), an array of micromirrors, to project light onto a screen [1]. This technology is also used by Infocus™ projection systems and widescreen tabletop televisions [2]. Here, the micromirrors act as individual pixels, reflecting light onto the screen with high ¡§digital¡¨ resolution. The most recent application of surface micromachined micromirror technology is optical switching [3], which uses micromirrors to switch optical signals from fiber to fiber for lightwave telecommunications [4]. Companies such as Lucent have fabricated entire optical micromirror switching systems based on their Microstar™ technology [5]. For government applications, surface micromachined micromirror arrays have been developed for potential use in a spectrometer system planned for NASA's Next Generation Space Telescope (NGST) [6]. Various processing technologies are used to fabricate surface micromachined micromirrors. The micromirror arrays developed by TI and Lucent [1,4] uses metal for their structural and reflective components. Micromirrors fabricated at Sandia National Laboratories use the SUMMiT™ (Sandia's Ultra-planar MEMS Multi-level Technology) process with metal deposited on the surface of mechanical polysilicon components to reflect light. Optical micromirror arrays designed and fabricated at Sandia for potential use in the NGST have undergone reliability testing and failure analysis. This paper will discuss the failure modes found in these micromirrors after reliability testing. Suggestions and corrective actions for improvements in device performance will also be discussed.
APA, Harvard, Vancouver, ISO, and other styles
2

Gandhi, Prasanna, Shital Kamble, and Kiran Bhole. "Novel Fabrication and Characterization of Diaphragm Micromirror Using ‘Bulk Lithography’." In ASME 2012 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 2012. http://dx.doi.org/10.1115/imece2012-87745.

Full text
Abstract:
Adaptive optics is being explored actively for several applications such as wavefront correction in biomedical imaging (retinal surgery), variable focal length lenses, and adaptive zoom micromirrors. Diaphragm micromirrors have several advantages such as continuity in image and ease of fabrication. This paper investigates, for the first time to the best of our knowledge, fabrication of diaphragm micromirror using a recently proposed novel process of ‘Bulk Lithography’. In contrast to classical microstereolithography (MSL) processes of 3D layer-by-layer micro fabrication, bulk lithography fabrication is done by scanning of laser beam over the photopolymer resin of unconstraint depth in a single layer scan. The process has capability to fabricate smoothly varying thickness diaphragms for micromirrors. However, as a first step, this paper demonstrates fabrication of uniform thickness micromirrors coated with aluminum. Micromirrors are fabricated with air trapped beneath them which contributes to enhanced stiffness and low damping. Further fabricated micromirror is characterized using laser doppler vibrometer.
APA, Harvard, Vancouver, ISO, and other styles
3

Zhang, Jianglong, and Y. C. Lee. "Micromirror With Multiple Digitized Angles for Free Space Optical Crossconnects." In ASME 2003 International Electronic Packaging Technical Conference and Exhibition. ASMEDC, 2003. http://dx.doi.org/10.1115/ipack2003-35341.

Full text
Abstract:
To eliminate or lower the power consumption and complexity of the control electronics that limit the applications of analog optical switches, beam steering devices and other micromirrors, this paper presents micromirrors with multiple digitized angles for free space optical crossconnects. Device requirements defined by a dual-lens and dual-micromirror array system are used to guide the designs of the micromirrors. The micromirrors with multiple digitized angles are designed using MUMPs, a MEMS foundry process, and simulated by full coupled-domain FEM/BEM. The effects of the design parameters on the digitized angles are analyzed. These parameters are flexure configuration, connector beam configuration, plate configuration and bottom electrode configuration. With these effects known, a micromirror is successfully designed for the desired optical system. Such a mirror’s repeatability is expected to be about 0.06°, which is obtained by a preliminary experimental study of a similar device. The repeatability of the digital levels highly depends on the initial gap between the mirror surface and the bottom electrode, flexure configuration, connector beam configuration and material properties.
APA, Harvard, Vancouver, ISO, and other styles
4

Moeenfard, Hamid, Ali Darvishian, and Mohammad Taghi Ahmadian. "Closed Form Solutions for the Statical Behavior of Micromirrors Under Capillary Forces." In ASME 2011 International Mechanical Engineering Congress and Exposition. ASMEDC, 2011. http://dx.doi.org/10.1115/imece2011-63091.

Full text
Abstract:
In this paper, the static behavior of micromirrors under the effect of capillary forces is studied. First the equation governing the static behavior of micromirrors is obtained using both Newton method and minimum potential energy principle. Then energy method is employed to investigate the static instability of micromirrors equilibrium points. It is proved that when there exist two equilibrium points, the smaller one is stable and the larger one is unstable. Furthermore a design equation is suggested for the successful fabrication process of micromirrors in the stable operatives range. Then the statical behavior of micromirrors is investigated numerically and analytically using the Homotopy Perturbation Method (HPM). It is observed that with increasing the instability number defined in the paper, the rotation angle of the micromirror is increased and suddenly the pull-in occurs. The analytical results well follow the numerical ones and so the presented analytical method can be used for a fast and accurate design tool for micromirrors fabrication.
APA, Harvard, Vancouver, ISO, and other styles
5

Mostafa, Khaled, A. J. Qureshi, and Carlo Montemagno. "Tolerance Control Using Subvoxel Gray-Scale DLP 3D Printing." In ASME 2017 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 2017. http://dx.doi.org/10.1115/imece2017-72232.

Full text
Abstract:
3D printing manufacturing technology has been utilized in various applications due to its promising manufacturing advantages. Desktop Digital Light Processing (DLP) printers provide high-resolution products with a moderate price range. DLP uses an array of micromirrors to transmit UV light from the light projector in order to perform selective curing of a prepolymer resin and turn it in to the required geometry. The CAD file is transformed into several slices according to the layer thickness. Each slice is then converted to an image of black and white pixels, in which each white pixel actuates a corresponding micromirror to transmit the UV light to cure a corresponding voxel, while a black pixel corresponds to no actuation, which means no curing for the corresponding voxel. The micromirror’s size determines the resolution of the printer. Although a theoretical voxel size can be determined as a function of the micromirror’s dimensions and layer thickness, the actual voxel volume depends on several parameters such as the layer thickness, UV exposure time, and UV exposure intensity. Controlling these three parameters would result in more accurate 3D printed parts and more control over the dimensional tolerance. In this paper, the effect of variable light intensity in terms of grayscale pixels is studied along with the exposure time and layer thickness to manipulate the voxel horizontal dimensions. This enables printing with voxel dimensions below the size of the micromirrors in the DLP, which improve the geometric dimensioning and tolerance of the printed parts.
APA, Harvard, Vancouver, ISO, and other styles
6

Gessner, Thomas, Steffen Kurth, Christian Kaufmann, Joachim Markert, Andreas Ehrlich, and Wolfram Doetzel. "Micromirrors and micromirror arrays for scanning applications." In Micromachining and Microfabrication, edited by M. Edward Motamedi and Rolf Goering. SPIE, 2000. http://dx.doi.org/10.1117/12.396505.

Full text
APA, Harvard, Vancouver, ISO, and other styles
7

Darvishian, Ali, Hamid Moeenfard, and Mohammad Taghi Ahmadian. "Coupling Effects Between Torsion and Bending in Torsional Micromirrors Under Capillary Forces." In ASME 2011 International Mechanical Engineering Congress and Exposition. ASMEDC, 2011. http://dx.doi.org/10.1115/imece2011-65121.

Full text
Abstract:
In the current paper, a general theoretical model for the problem of micromirrors under the effect of capillary forces is presented. The presented model considers the coupling effect between torsion and bending of the torsion beams supporting the micromirror. First, the energy method, the principal of minimum potential energy is utilized for finding the equations governing the micromirror rotation and its deflection. Then using the implicit functions theorem, the equations governing the pull-in angle and pull-in displacement of the micromirror is derived. The results, shows that ignoring the bending effect in micromirrors under the effect of capillary forces, can cause a significant (up to several hundred percents) underestimation of the pull-in angle. It is observed that with increasing the ratio of the bending stiffness to the torsion stiffness, the dominant instability mode changes from bending mode to the torsion mode. It is shown that when the bending stiffness of the system is relatively low, the equilibrium point of a one degree of freedom torsion model considerably deviates from that of coupled model. The presented model in this paper can be used for safe and stable design of micromirrors under capillary force.
APA, Harvard, Vancouver, ISO, and other styles
8

Moeenfard, Hamid, Mohammad Taghi Ahmadian, and Anoushiravan Farshidianfar. "Analytical Modeling of Squeeze Film Damping in Micromirrors." In ASME 2011 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference. ASMEDC, 2011. http://dx.doi.org/10.1115/detc2011-47125.

Full text
Abstract:
In the current paper, Extended Kantorovich Method (EKM) has been utilized to analytically solve the problem of squeezed film damping in micromirrors. A one term Galerkin approximation is used and following the extended Kantorovich procedure, the solution of the Reynolds equation which governs the squeezed film damping in micromirrors is reduced to solution of two uncoupled ordinary differential equation which can be solved iteratively with a rapid convergence for finding the pressure distribution underneath the micromirror. It is shown that the EKM results are independent of the initial guess function. It is also shown that since EKM is highly convergent, practically one iterate is sufficient for obtaining a precise response. Furthermore using the presented closed form solutions for the squeezed film damping torque, it is proved that when the tilting angle of the mirror is small, the damping is linear viscous one. Results of this paper can be used for accurate dynamical simulation of micromirrors under the effect of squeezed film damping.
APA, Harvard, Vancouver, ISO, and other styles
9

He, S., and R. Ben Mrad. "Novel Surface-Micromachined Micromirrors for Optical MEMS Beam Manipulators." In CANEUS 2006: MNT for Aerospace Applications. ASMEDC, 2006. http://dx.doi.org/10.1115/caneus2006-11030.

Full text
Abstract:
A novel surface-micromachined electrostatic rotation micromirror is presented. The micromirror can be used to develop high performance optical beam steering manipulators for space applications based on an array of such micromirrors which are controlled by a feedback controller to compensate for jitter and misalignment during optical metrology or communication. The rotation micromirror has a two-layer structure and uses two repulsive force electrostatic actuators which generate a force to rotate the mirror out-of-plane. The rotation angle of the micromirror is not limited by the initial gap distance between the mirror plate and the substrate. By using repulsive force actuators, the surface-micromachined rotation micromirror can achieve a large rotation angle for a large mirror size without requiring any post-release assembly to fold the mirror out or raise it up. Prototypes fabricated using MUMPs are characterized by a mirror size of 312 μm × 312 μm, a stiffness of 0.485e−8Nm/rad, a mechanical rotation of 0° ∼ 2.2° at a driving voltage of 0 ∼ 200 V.
APA, Harvard, Vancouver, ISO, and other styles
10

Moeenfard, Hamid, Mohammad Taghi Ahmadian, Ali Soroush, and Aria Alasty. "Beyond Pull-In Stabilization of Dual Axis Micromirrors Using Fuzzy Controllers." In ASME 2010 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference. ASMEDC, 2010. http://dx.doi.org/10.1115/detc2010-29177.

Full text
Abstract:
Dual axis micromirrors are actuated using strongly nonlinear electrostatic actuation and their operating range suffers from the pull-in problem. So investigation of their dynamics and control issues has become a challenge for the researchers. The current paper makes use of fuzzy controllers for the purpose of stabilizing the dual axis micromirror at the desired tilt angles beyond pull-in. At first the dynamic model of the micromirror is presented. Then for the purpose of finding the linguistic laws governing the system behavior, several step voltages are introduced to the system. The proposed fuzzy controller consists of singleton fuzzifier, product inference engine and center average defuzzifier. It was observed from the simulation results that the presented controller can effectively and immediately stabilize and control the micromirror tilt angles beyond pull-in, with a short rise time and also a short overshoot.
APA, Harvard, Vancouver, ISO, and other styles

Reports on the topic "Micromirrors"

1

Folta, J. M., J. Y. Decker, J. Kolman, C. Lee, and J. M. Brase. High density arrays of micromirrors. Office of Scientific and Technical Information (OSTI), February 1999. http://dx.doi.org/10.2172/8222.

Full text
APA, Harvard, Vancouver, ISO, and other styles
2

Michalicek, M. A., J. H. Comtois, and C. C. Barron. Design and Characterization of Next-Generation Micromirrors Fabricated in a Four-Level, Planarized Surface-Micromachined Polycrystalline Silicon Process. Office of Scientific and Technical Information (OSTI), December 1997. http://dx.doi.org/10.2172/622545.

Full text
APA, Harvard, Vancouver, ISO, and other styles
3

Gur, Ilan. Electrothermal Micromirror Adaptive Illumination. Office of Scientific and Technical Information (OSTI), April 2020. http://dx.doi.org/10.2172/1614766.

Full text
APA, Harvard, Vancouver, ISO, and other styles
4

Carr, E. J. Micromirror Arrays for Adaptive Optics. Office of Scientific and Technical Information (OSTI), August 2000. http://dx.doi.org/10.2172/793692.

Full text
APA, Harvard, Vancouver, ISO, and other styles
5

Bright, Victor M., and Y. C. Lee. Micromirror Arrays for High Energy Applications. Fort Belvoir, VA: Defense Technical Information Center, November 2000. http://dx.doi.org/10.21236/ada387741.

Full text
APA, Harvard, Vancouver, ISO, and other styles
6

Beasley, D. B., Matt Bender, Jay Crosby, Tim Messer, and Daniel A. Saylor. Advancements in the Micromirror Array Projector Technology. Fort Belvoir, VA: Defense Technical Information Center, January 2003. http://dx.doi.org/10.21236/ada461443.

Full text
APA, Harvard, Vancouver, ISO, and other styles
7

Beasley, D. B., Matt Bender, Jay Crosby, Tim Messer, and Daniel A. Saylor. Dynamic IR Scene Projector Based Upon the Digital Micromirror Device. Fort Belvoir, VA: Defense Technical Information Center, January 2001. http://dx.doi.org/10.21236/ada459086.

Full text
APA, Harvard, Vancouver, ISO, and other styles
You might also be interested in the extended bibliographies on the topic 'Micromirrors' for particular source types:
Journal articles Dissertations / Theses Books
We offer discounts on all premium plans for authors whose works are included in thematic literature selections. Contact us to get a unique promo code!

To the bibliography