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Journal articles on the topic 'Micromirrors'

Author: Grafiati

Published: 4 June 2021

Last updated: 28 January 2023

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1

Wang, Qiang, Weimin Wang, Liang Fang, Chongxi Zhou, and Bin Fan. "Study of Residual Stress Compensation in Continuous Membrane Micromirrors Based on Surface Micromachining Processes." Coatings 11, no. 3 (March 3, 2021): 289. http://dx.doi.org/10.3390/coatings11030289.

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Residual stress is one of the key factors that directly determines the optical quality of micro-optical devices. With the same residual stress, the larger the aperture is, the worse the optical quality is. Therefore, continuous micromirrors are more affected by residual stress than segmented micromirrors. However, due to the complexity of boundary conditions, the influence of residual stress in segmented micromirror arrays on the device performance has been widely investigated in theory and practical applications, but only a few research results about the influence of residual stress in the continuous micromirror arrays have been reported. In this work, the residual stress both in continuous and segmented micromirror arrays is analyzed and summarized, then an accurate model for continuous micromirrors is developed. Compared with the existing models, it combines two additional factors, layer plate and point supported boundary conditions. Based on the proposed model, the change of critical stress of continuous micromirrors induced by different thicknesses of residual stress compensated membrane is theoretically investigated. Finally, the compensating experiment has been carried out, and the results show that the optical quality of micromirror can be remarkably improved, almost two orders of magnitude, with the introduction of residual stress compensation.

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2

MOEENFARD, HAMID, ALI DARVISHIAN, HASSAN ZOHOOR, and MOHAMMAD TAGHI AHMADIAN. "INFLUENCE OF VAN DER WAALS FORCE ON STATIC BEHAVIOR OF NANO/MICROMIRRORS UNDER CAPILLARY FORCE." International Journal of Modern Physics B 26, no. 07 (March 20, 2012): 1250056. http://dx.doi.org/10.1142/s0217979212500567.

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In the current paper, the effect of van der Waals (vdW) force on the static behavior and pull-in characteristics of nano/micromirrors under capillary force is investigated. At first, the dimensionless equation governing the static behavior of nano/micromirrors is obtained. The dependence of the critical tilting angle on the physical and geometrical parameters of the nano/micromirror and its supporting torsional beams is investigated. It is found that the existence of vdW force can considerably reduce the stability limits of the nano/micromirror. It is also found that rotation angle of the mirror due to capillary force highly depends on the vdW force applied to the mirror. Finally, analytical tool Homotopy Perturbation Method (HPM) is utilized for prediction of the nano/micromirror behavior under combined capillary and vdW force. It is observed that a sixth order perturbation approximation accurately predicts the rotation angle and stability limits of the mirror. The results of this paper can be used for successful fabrication of nano/micromirrors using wet etching release process where capillary force plays a major role in the system.

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3

Moeenfard, Hamid, Ali Darvishian, Hassan Zohoor, and Mohammad Taghi Ahmadian. "Characterization of the static behavior of micromirrors under the effect of capillary force, an analytical approach." Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science 226, no. 9 (January 5, 2012): 2361–72. http://dx.doi.org/10.1177/0954406211433112.

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In this article, the static behavior of micromirrors under the effect of capillary force is studied. The dimensionless equations governing the static behavior and the pull-in state of the micromirror under capillary force are obtained, and the effects of different geometrical parameters on the pull-in angle of micromirrors are investigated. The static behavior of micromirrors is studied both numerically and analytically using the homotopy perturbation method. It is observed that with increasing the instability number defined in this article, the rotation angle of the micromirror is increased and suddenly the pull-in occurs. The results of the presented model are then verified by comparing them with the results of finite element simulations performed in the commercial finite element model software ANSYS. The agreement between the results of finite element model and those of the proposed analytical model shows that homotopy perturbation method can be used as a fast and accurate tool for predicting mirror’s behavior under capillary force.

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4

Starasotnikau, M. A. "Assessment of Temperature Effects in Interior Orientation Parameters Calibration of Optoelectronic Devices." Devices and Methods of Measurements 11, no. 2 (June 26, 2020): 122–31. http://dx.doi.org/10.21122/2220-9506-2020-11-2-122-131.

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A digital micromirror device (DMD) micromirrors periodic spatial structure is a measuring scale in interior orientation parameters calibration of optoelectronic devices problems, when using a DMD as a testobject. It is important that DMD micromirrors periodic spatial structure remains constant. Change in a DMD micromirrors spatial structure may occur due to heating. In addition to heating a DMD, an optoelectronic device photodetector is also subject to heating and, accordingly, change in its spatial structure. It is necessary to estimate change in a spatial structure of DMD micromirrors and an optoelectronic device photodetector.A DMD micromirrors spatial drift and a DMD micromirrors spatial drift together with a digital camera photodetector pixels spatial drift for operation 4 h are analyzed. The drift analysis consisted in the points array position assessing formed by a DMD and projected onto a digital camera. When analyzing only a DMD micromirrors drift, a digital camera was turned on only for shooting time for exclude digital camera influence. A digital camera did not have time to significantly heat up, during this time. After a digital camera it cooled to a room temperature.Average drift of all DMD micromirrors determines the accuracy of interior orientation parameters calibration of optoelectronic devices using a DMD in time. Maximum drift of all micromirrors after switching on is observed. Minimum DMD warm-up time is 60 min for average drift of all micromirrors less than 1 μm is necessary. Minimum DMD warm-up time is 120 min when using a DMD together with a digital camera is necessary.A DMD expansion uniformity determines the accuracy of interior orientation parameters calibration of optoelectronic devices using a DMD, because irregular expansion disturbs micromirrors periodicity. The average change in distance of neighboring points is less than 0.1 μm for every 20 min.Thus, a DMD can be used as a test-object in interior orientation parameters calibration of optoelectronic devices. The results can be used as compensation coefficients of change in DMD micromirrors spatial structure due to temperature effects during operation, if more accurate are necessary.

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5

Wang, Yi, and Yigui Li. "Design and fabrication of piezoelectrically driven deformable reflective micromirrors based on MEMS technology." Journal of Physics: Conference Series 2334, no. 1 (August 1, 2022): 012004. http://dx.doi.org/10.1088/1742-6596/2334/1/012004.

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Abstract As the core component of the adaptive optics system, the deformable mirror is developing towards miniaturization and integration through the combination of MEMS technology. In this paper, based on the inverse piezoelectric effect of piezoelectric materials, a piezoelectrically driven deformable reflective micromirror is designed and fabricated by physical vapor deposition, UV lithography, eutectic bonding, mechanical cutting, deep reactive ion etching (RIE) and other processes to complete the preparation of micromirrors. The problems related to the eutectic bonding process of PZT and Si in the fabrication of micromirrors are emphatically studied through tensile experiments. The micromirror was tested with a laser interferometer. The test results showed that the prepared micromirror could achieve a maximum deformation of 0.6 μm in the positive direction and 1.7 μm in the negative direction when a voltage of ±1.5 kV was applied.

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6

Resmi, R., V. Suresh Babu, and M. R. Baiju. "Damping Analysis in Si Torsional Micromirrors." Journal of Physics: Conference Series 2325, no. 1 (August 1, 2022): 012023. http://dx.doi.org/10.1088/1742-6596/2325/1/012023.

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Abstract Micromirrors are extensively used in MEMS/NEMS based actuators and accordingly the design of superior performance mirror structures are prime requisite in MEMS/NEMS industry. Thermal and viscous damping of a dynamic vibrating micromirror are important factors degrading its performance by inducing energy dissipation. The primary sources of energy losses are viscosity and thermal conduction near the walls of the structure in the acoustic boundary layer. Hence it is necessary to accurately assess the bounds of energy dissipation owing to thermal and viscous damping. In this paper, the depths of the thermal and viscous boundary layers corresponding to thermal conduction and viscous drag at different eigen frequencies are investigated. Both the temperature and pressure distributions surrounding the vibrating micromirror are considered for the analysis. The penetration depths communicate the extent of thermal and viscous boundary layers and clearly indicate the extent of energy loss. In micromirrors, the thickness of boundary layer is a critical parameter since the dissipated energy is mainly distributed in it. The air domain surrounding the micromirror is modelled using thermoacoustics of COMSOL Multiphysics software along with the eigen frequency analysis. In the present study, the thickness of the boundary layers and quality factor are analysed for a micromirror vibrating in torsional mode. The thermal and viscous penetration depths decrease with eigen frequency and hence to develop high quality devices with low damping, the micromirror are verified to be operated at higher frequencies.

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7

Skulavik, Tomas, Peter Schreiber, and Oliver Moravčik. "Steady State Response Simulation of a 2-D Micromirror in Simulink." Advanced Materials Research 488-489 (March 2012): 1646–50. http://dx.doi.org/10.4028/www.scientific.net/amr.488-489.1646.

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Micromirrors fabricated by MEMS technology may be important sensing components in optical tracking systems used in many industrial applications. This paper deals with the analytical model of a 2-D gimbal mounted micromirror and with the simulation of a steady state response of the micromirror in Simulink. The model of a 2-D micromirror should be further used in a simulation of its dynamical behavior.

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8

Nakamura, Fumi, Kenta Suzuki, Akihiro Noriki, and Takeru Amano. "Micromirror fabrication for co-packaged optics using 3D nanoimprint technology." Journal of Vacuum Science & Technology B 40, no. 6 (December 2022): 063203. http://dx.doi.org/10.1116/6.0002119.

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Co-packaged optics (CPO) is a key technology for addressing power bottlenecks in datacenters by integrating optical and electrical components and replacing electrical wiring with optical links. In the CPO module where silicon chips are embedded on the substrate and polymer waveguides are integrated as optical connections, a pair of 3D micromirrors can achieve low-loss and wideband optical coupling from silicon photonics to polymer waveguides. The shape of the polymer micromirror patterned by grayscale photo lithography depends on process conditions and requires high fabrication accuracy. In this study, photonanoimprint technology is adopted for stable micromirror fabrication. The imprint process for a polymer micromirror was considered from a hyperelastic analysis using the finite element method. The master mold was prepared using grayscale lithography with photosensitive polyimide as a template of a polydimethylsiloxane (PDMS) replica mold. The micromirror fabrication was demonstrated on a 4-in. silicon wafer. By imprinting into a guide groove structure with a PDMS replica mold, over 30 μm-height micromirrors were stably obtained multiple times by a step-and-repeat imprint. The linear part of the patterned mirror by the imprint process was more than 23.5 μm for four times imprinting, and the fabricated mirror shape was improved compared with grayscale lithography. The total height misalignment is 5 μm for 12 mirrors in four imprints, and 70% coupling efficiency in calculation was achieved.

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9

Pereira, C., M. Abreu, A. Cabral, and J. M. Rebordão. "Characterization of Light Diffraction by a Digital Micromirror Device." Journal of Physics: Conference Series 2407, no. 1 (December 1, 2022): 012048. http://dx.doi.org/10.1088/1742-6596/2407/1/012048.

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Abstract A Digital Micromirror Device (DMD) is a technology developed by Texas Instruments, that consists in a two-dimensional array of micromirrors, which can be individually tilted between two positions. It has been used as a digital video and image processing solution, commonly found in Digital Light Processing (DLP) video projectors. Over the years, DMDs have become popular in different fields: industrial, automotive, medical, government and home user solutions. In the astronomy field, it has been also considered in on-ground space instrumentation and it has been proposed for the development of some astrophysical space instruments. In order to evaluate the actual impact of such device in the instrument optical design, it is important to know how the light behaves when it interacts with a DMD, namely in what regards to the diffraction process when a light beam is reflected by a periodic array of micromirrors. In this study we describe how we simulate the diffraction patterns produced by a periodic array of micromirrors, for coherent and incoherent sources of light. The results from simulations are verified against laboratory experiments, described also in this study.

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10

Tang, Yue, Jianhua Li, Lixin Xu, Jeong-Bong Lee, and Huikai Xie. "Review of Electrothermal Micromirrors." Micromachines 13, no. 3 (March 10, 2022): 429. http://dx.doi.org/10.3390/mi13030429.

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Electrothermal micromirrors have become an important type of micromirrors due to their large angular scanning range and large linear motion. Typically, electrothermal micromirrors do not have a torsional bar, so they can easily generate linear motion. In this paper, electrothermal micromirrors based on different thermal actuators are reviewed, and also the mechanisms of those actuators are analyzed, including U-shape, chevron, thermo-pneumatic, thermo-capillary and thermal bimorph-based actuation. Special attention is given to bimorph based-electrothermal micromirrors due to their versatility in tip-tilt-piston motion. The exemplified applications of each type of electrothermal micromirrors are also presented. Moreover, electrothermal micromirrors integrated with electromagnetic or electrostatic actuators are introduced.

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11

Aryal, Niwit, and Arezoo Emadi. "A Method to Enhance Stroke Level of a MEMS Micromirror with Repulsive Electrostatic Force." Micromachines 11, no. 4 (April 11, 2020): 401. http://dx.doi.org/10.3390/mi11040401.

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This paper presents a method to enhance the stroke level of a MEMS micromirror that, unlike conventional micromirrors, is actuated using a repulsive electrostatic force. The designed and proposed micromirror is held by L-shaped arms suspended over a set of bottom electrodes. In this configuration, three bottom electrodes are centered below each arm and are separated with a designed gap from each other to optimize the generated repulsive force. Using this approach, the micromirror surface is forced to deflect upward compared with the conventional downward deflection. The designed micromirror is proposed to utilize the PolyMUMPs fabrication technique from MEMSCAP Inc. In this work and in an unconventional approach, an air cavity of 2.75 µm can be achieved by combining the two available oxide layers through an additional removal of a polysilicon structural layer. It is shown that this design can significantly enhance the stroke level of the proposed micromirror to 5 µm at 150 V DC.

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12

Hua, Yong, Shuangyuan Wang, Bingchu Li, Guozhen Bai, and Pengju Zhang. "Dynamic Modeling and Anti-Disturbing Control of an Electromagnetic MEMS Torsional Micromirror Considering External Vibrations in Vehicular LiDAR." Micromachines 12, no. 1 (January 9, 2021): 69. http://dx.doi.org/10.3390/mi12010069.

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Micromirrors based on micro-electro-mechanical systems (MEMS) technology are widely employed in different areas, such as optical switching and medical scan imaging. As the key component of MEMS LiDAR, electromagnetic MEMS torsional micromirrors have the advantages of small size, a simple structure, and low energy consumption. However, MEMS micromirrors face severe disturbances due to vehicular vibrations in realistic use situations. The paper deals with the precise motion control of MEMS micromirrors, considering external vibration. A dynamic model of MEMS micromirrors, considering the coupling between vibration and torsion, is proposed. The coefficients in the dynamic model were identified using the experimental method. A feedforward sliding mode control method (FSMC) is proposed in this paper. By establishing the dynamic coupling model of electromagnetic MEMS torsional micromirrors, the proposed FSMC is evaluated considering external vibrations, and compared with conventional proportion-integral-derivative (PID) controls in terms of robustness and accuracy. The simulation experiment results indicate that the FSMC controller has certain advantages over a PID controller. This paper revealed the coupling dynamic of MEMS micromirrors, which could be used for a dynamic analysis and a control algorithm design for MEMS micromirrors.

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13

Hua, Yong, Shuangyuan Wang, Bingchu Li, Guozhen Bai, and Pengju Zhang. "Dynamic Modeling and Anti-Disturbing Control of an Electromagnetic MEMS Torsional Micromirror Considering External Vibrations in Vehicular LiDAR." Micromachines 12, no. 1 (January 9, 2021): 69. http://dx.doi.org/10.3390/mi12010069.

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Micromirrors based on micro-electro-mechanical systems (MEMS) technology are widely employed in different areas, such as optical switching and medical scan imaging. As the key component of MEMS LiDAR, electromagnetic MEMS torsional micromirrors have the advantages of small size, a simple structure, and low energy consumption. However, MEMS micromirrors face severe disturbances due to vehicular vibrations in realistic use situations. The paper deals with the precise motion control of MEMS micromirrors, considering external vibration. A dynamic model of MEMS micromirrors, considering the coupling between vibration and torsion, is proposed. The coefficients in the dynamic model were identified using the experimental method. A feedforward sliding mode control method (FSMC) is proposed in this paper. By establishing the dynamic coupling model of electromagnetic MEMS torsional micromirrors, the proposed FSMC is evaluated considering external vibrations, and compared with conventional proportion-integral-derivative (PID) controls in terms of robustness and accuracy. The simulation experiment results indicate that the FSMC controller has certain advantages over a PID controller. This paper revealed the coupling dynamic of MEMS micromirrors, which could be used for a dynamic analysis and a control algorithm design for MEMS micromirrors.

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14

Hornbeck, Larry J. "The DMDTM Projection Display Chip: A MEMS-Based Technology." MRS Bulletin 26, no. 4 (April 2001): 325–27. http://dx.doi.org/10.1557/mrs2001.72.

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The possibility of an all-digital (sourceto-eye) projection display was realized in 1987 with the invention of the Digital Micromirror Device™ projection display chip at Texas Instruments (TI). The DMD™ chip is a microelectromechanical systems (MEMS) array of fast digital micromirrors, monolithically integrated onto and controlled by an underlying silicon memory chip. Digital Light Processing™ projection displays are based on the DMD chip. DLP™ projection displays present bright, seamless images to the eye that have high image fidelity, and stability.

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15

Seo, Manseung, and Haeryung Kim. "Lithography upon micromirrors." Computer-Aided Design 39, no. 3 (March 2007): 202–17. http://dx.doi.org/10.1016/j.cad.2006.05.007.

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16

SAPONARA, SERGIO, TOMMASO BALDETTI, LUCA FANUCCI, EMILIO VOLPI, and FRANCESCO D'ASCOLI. "DESIGN OF AN INTEGRATED SCANNING MICROMIRROR DRIVER IN BCD TECHNOLOGY." Journal of Circuits, Systems and Computers 20, no. 04 (June 2011): 781–99. http://dx.doi.org/10.1142/s0218126611007608.

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The paper presents the design and characterization of a smart IC driver for MEMS scanning micromirrors. The driver integrates in 0.18 μm BCD technology the cascade of the following circuits: resistor-string DAC circuitry for direct interface to a host digital processing unit, a voltage buffer between the DAC and the High-Voltage (HV) stage, and a fully-differential HV amplifier with programmable output common mode. A couple of the designed DACs permits to generate, starting from digital samples, low-voltage analog stimuli. This signal amplified up to 25 V by the HV stage provides the electrostatical actuation of the micromirror. When compared to state-of-the-art the driver offers an integrated solution with good dynamic performances.

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17

Torres, David, LaVern Starman, Harris Hall, Juan Pastrana, and Sarah Dooley. "Design, Simulation, Fabrication, and Characterization of an Electrothermal Tip-Tilt-Piston Large Angle Micromirror for High Fill Factor Segmented Optical Arrays." Micromachines 12, no. 4 (April 12, 2021): 419. http://dx.doi.org/10.3390/mi12040419.

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Micro-electromechanical system (MEMS) micromirrors have been in development for many years, but the ability to steer beams to angles larger than 20° remains a challenging endeavor. This paper details a MEMS micromirror device capable of achieving large motion for both tip/tilt angles and piston motion. The device consists of an electrothermal actuation assembly fabricated from a carefully patterned multilayer thin-film stack (SiO2/Al/SiO2) that is epoxy bonded to a 1 mm2 Au coated micromirror fabricated from an SOI wafer. The actuation assembly consists of four identical actuators, each comprised of a series of beams that use the inherent residual stresses and coefficient of thermal expansion (CTE) mismatches of the selected thin films to enable the large, upward, out-of-plane deflections necessary for large-angle beamsteering. Finite element simulations were performed (COMSOL v5.5) to capture initial elevations and tip/tilt motion displacements and achieved <10% variance in comparison to the experiment. The measured performance metrics of the micromirror include tip/tilt angles of ±23°, piston motion of 127 µm at sub-resonance, and dynamics characterization with observed resonant frequencies at ~145 Hz and ~226 Hz, for tip/tilt and piston motion, respectively. This unique single element design can readily be scaled into a full segmented micromirror array exhibiting an optical fill-factor >85%, making it suitable for optical phased array beam control applications.

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18

Zarzycki, Artur, Wiktor L. Gambin, Sylwester Bargiel, and Christophe Gorecki. "Fabrication of mems devices – a scanning micro mirror case study." TecnoLógicas 20, no. 39 (May 2, 2017): 141–55. http://dx.doi.org/10.22430/22565337.697.

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This paper presents the working principle, design, and fabrication of a silicon-based scanning micromirror with a new type of action mechanism as an example of MEMS (Micro-Electro-Mechanical Systems). Micromirrors can be found in barcode readers as well as micro-projectors, optical coherence tomography, or spectrometers’ adjustable filters. The fabrication process of the device prompted us to describe and discuss the problems related to the manufacture of MEMS. The article starts with some terminology and a brief introduction to the field of microsystems. Afterwards, the concept of a new scanning micromirror is explained. The device is operated by two pairs of thermal bimorphs. A special design enables to maintain a constant distance from the center of the mirror to the light source during the scanning process. The device was implemented in a one degree-of-freedom micromirror and a two degree-of-freedom micromirror. The fabrication process of both types is described. For each case, a different type of substrate was used. The first type of substrate was a standard silicon wafer; the second one, SOI (Silicon-On-Insulator). The process with the first one was complicated and caused many problems. Replacing this substrate with SOI solved some of the issues, but did not prevent new ones from arising. Nevertheless, the SOI substrate produces much better results and it is preferable to manufacture this type of MEMS devices.

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19

Goebl, James, Yiding Liu, Sandy Wong, Serkan Zorba, and Yadong Yin. "Magnetically tunable colloidal micromirrors." Nanoscale Horizons 1, no. 1 (2016): 64–68. http://dx.doi.org/10.1039/c5nh00035a.

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20

Bühler, J., J. Funk, O. Paul, F. P. Steiner, and H. Baltes. "Thermally actuated CMOS micromirrors." Sensors and Actuators A: Physical 47, no. 1-3 (March 1995): 572–75. http://dx.doi.org/10.1016/0924-4247(94)00964-j.

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21

Heidmann, A., O. Arcizet, T. Caniard, C. Molinelli, P. Verlot, T. Briant, and P. F. Cohadon. "Quantum optics with micromirrors." Annales de Physique 32, no. 2-3 (2007): 33–38. http://dx.doi.org/10.1051/anphys:2008003.

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22

Lee, Dongwoo, Jihye Kim, Eunjoo Song, Ji-Young Jeong, Eun-chae Jeon, Pilhan Kim, and Wonhee Lee. "Micromirror-Embedded Coverslip Assembly for Bidirectional Microscopic Imaging." Micromachines 11, no. 6 (June 10, 2020): 582. http://dx.doi.org/10.3390/mi11060582.

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3D imaging of a biological sample provides information about cellular and subcellular structures that are important in cell biology and related diseases. However, most 3D imaging systems, such as confocal and tomographic microscopy systems, are complex and expensive. Here, we developed a quasi-3D imaging tool that is compatible with most conventional microscopes by integrating micromirrors and microchannel structures on coverslips to provide bidirectional imaging. Microfabricated micromirrors had a precisely 45° reflection angle and optically clean reflective surfaces with high reflectance over 95%. The micromirrors were embedded on coverslips that could be assembled as a microchannel structure. We demonstrated that this simple disposable device allows a conventional microscope to perform bidirectional imaging with simple control of a focal plane. Images of microbeads and cells under bright-field and fluorescent microscopy show that the device can provide a quick analysis of 3D information, such as 3D positions and subcellular structures.

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Ye, Jia-Sheng, Guo-Ai Mei, Bi-Zhen Dong, and Yan Zhang. "A Monotonic-Increasing-Thickness Model for Designing Cylindrically Diffractive Focusing Micromirrors and Micromirror Arrays." Journal of Lightwave Technology 31, no. 6 (March 2013): 930–35. http://dx.doi.org/10.1109/jlt.2013.2238887.

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24

Dahl-Hansen, Runar, Jo Gjessing, Peter Mardilovich, Charalampos Fragkiadakis, and Jostein Thorstensen. "Reliable Pb(Zr,Ti)O₃-based thin film piezoelectric micromirrors for space-applications." Applied Physics Letters 121, no. 13 (September 26, 2022): 132901. http://dx.doi.org/10.1063/5.0106933.

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Although Pb(Zr,Ti)O3 (PZT) piezoelectric thin films are finding widespread applications on Earth, it is yet unclear if they are suitable for space-related applications. In space, their long-term reliability is a significant concern due to the difficulties of repairing and replacing malfunctioning devices. In this work, PZT thin film micromirrors for compact interferometric 3D imaging systems have been exposed to operating conditions encountered on a space mission and tested according to criteria set by the European Space Agency. Thermal cycling in vacuum, sinusoidal and random mechanical vibrations, and [Formula: see text]-radiation with and without bias did not degrade key functional device properties of the micromirror such as angular deflection, resonance frequency, polarization, and permittivity. Apart from [Formula: see text]-radiation, stressing the devices enhanced their large-signal angular deflection and improved their electrical lifetime compared to pristine devices. Their dielectric and ferroelectric characteristics remained comparable to that of a lab-scale environment. Simultaneously applying a 10 V field-down bias while [Formula: see text]-radiating the micromirrors changed the capacitance-field and polarization-field characteristics and enhanced the electrical imprint. After stress-testing, the median time-to-failure in moderate acceleration conditions of 150 kV/cm and 175 °C ranged from 1.95 to 2.64 h, close to 2.11 h as measured for a reference group. All actuator membranes had shorter electrical lifetimes, smaller voltage acceleration factors, and smaller activation energies, ranging from 2.56 to 2.88 V−1 and 1.03 to 1.09 eV, than simple bonding pads. This work is a device-level report covering a full set of space-relevant tests demonstrating that PZT-based thin film piezomicroelectromechanical systems technology is space-ready.

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Di Cristofaro, Daniele, Andrea Opreni, Massimiliano Cremonesi, Roberto Carminati, and Attilio Frangi . "An Arbitrary Lagrangian Eulerian Approach for Estimating Energy Dissipation in Micromirrors." Actuators 11, no. 10 (October 18, 2022): 298. http://dx.doi.org/10.3390/act11100298.

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Quantification and minimisation of energy consumption in resonant MEMS micromirrors is a key aspect for a proper structural design. In this setting, the quality factor Q of the drive mode of the device needs to be estimated and, eventually, improved. In this work, we propose a simulation strategy for the numerical computation of MEMS micromirrors quality factors. Full order Arbitrary Lagrangian Eulerian Navier-Stokes simulations have been performed using a SUPG stabilised Chorin-Themam scheme. Finally, the numerical results are compared with experimental data, highlighting the accuracy and efficiency of the proposed method.

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Chen, Shanshan, Yongyue Zhang, Xiaorong Hong, and Jiafang Li. "Technologies and applications of silicon-based micro-optical electromechanical systems: A brief review." Journal of Semiconductors 43, no. 8 (August 1, 2022): 081301. http://dx.doi.org/10.1088/1674-4926/43/8/081301.

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Abstract Micro-optical electromechanical systems (MOEMS) combine the merits of micro-electromechanical systems (MEMS) and micro-optics to enable unique optical functions for a wide range of advanced applications. Using simple external electromechanical control methods, such as electrostatic, magnetic or thermal effects, Si-based MOEMS can achieve precise dynamic optical modulation. In this paper, we will briefly review the technologies and applications of Si-based MOEMS. Their basic working principles, advantages, general materials and micromachining fabrication technologies are introduced concisely, followed by research progress of advanced Si-based MOEMS devices, including micromirrors/micromirror arrays, micro-spectrometers, and optical/photonic switches. Owing to the unique advantages of Si-based MOEMS in spatial light modulation and high-speed signal processing, they have several promising applications in optical communications, digital light processing, and optical sensing. Finally, future research and development prospects of Si-based MOEMS are discussed.

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27

Kendall, D. L., G. R. de Guel, S. Guel‐Sandoval, E. J. Garcia, and T. A. Allen. "Chemically etched micromirrors in silicon." Applied Physics Letters 52, no. 10 (March 7, 1988): 836–37. http://dx.doi.org/10.1063/1.99300.

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28

Rotich, S. K., J. G. Smith, A. G. R. Evans, and A. Brunnschweiler. "Photoresist parabolas for curved micromirrors." Journal of Micromechanics and Microengineering 8, no. 2 (June 1, 1998): 108–10. http://dx.doi.org/10.1088/0960-1317/8/2/016.

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29

Weber, Niklas, Daniel Hertkorn, Hans Zappe, and Andreas Seifert. "Polymer/Silicon Hard Magnetic Micromirrors." Journal of Microelectromechanical Systems 21, no. 5 (October 2012): 1098–106. http://dx.doi.org/10.1109/jmems.2012.2203100.

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30

Arcizet, Olivier, Chiara Molinelli, Tristan Briant, Pierre-François Cohadon, Antoine Heidmann, Jean-Marie Mackowski, Christophe Michel, Laurent Pinard, Olivier Français, and Lionel Rousseau. "Experimental optomechanics with silicon micromirrors." New Journal of Physics 10, no. 12 (December 9, 2008): 125021. http://dx.doi.org/10.1088/1367-2630/10/12/125021.

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31

Chernyavsky, D. I., and D. D. Chernyavsky. "Calculation strength of torsion bar suspension of micromirrors (MEOMS)." Omsk Scientific Bulletin, no. 177 (2021): 5–12. http://dx.doi.org/10.25206/1813-8225-2021-177-5-12.

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The paper considers the strength calculation of the torsion bar suspension of a micromirror with a reflective layer of high optical quality of the surface for deflecting the reflected laser beam. By changing the angle of inclination of the micromirror, the laser beam enters the various input channels of the optical sensor. In this case, a control signal is generated for the further operation of the microcircuit. Thus, the micromirror performs the function of a switch for input optical channels connecting certain input or output elements of the microcircuit in various combinations for further processing. In this work, the calculation of the strength parameters of the mechanical structure of a micromirror made of various materials has been carried out. Practical recommendations related to the development of micromirror torsion bar suspension are given

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32

Clark, Natalie. "A “Silicon Eye” Using Mems Micromirrors." MRS Bulletin 26, no. 4 (April 2001): 320–24. http://dx.doi.org/10.1557/mrs2001.71.

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The U.S. Air Force Research Laboratory's (AFRL) aggressive pursuit of reducing the size and weight of satellite systems for advanced space missions is providing a vital thrust to the development of “systemson-a-chip.” Adaptive optics technologies offer tremendous potential in reducing the weight and cost of space-based optical systems.

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33

Liu, Wei, and Joseph J. Talghader. "Current-controlled curvature of coated micromirrors." Optics Letters 28, no. 11 (June 1, 2003): 932. http://dx.doi.org/10.1364/ol.28.000932.

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34

Knoernschild, Caleb, Taehyun Kim, Peter Maunz, Stephen G. Crain, and Jungsang Kim. "Stable optical phase modulation with micromirrors." Optics Express 20, no. 3 (January 27, 2012): 3261. http://dx.doi.org/10.1364/oe.20.003261.

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35

Supino, R. N., and J. J. Talghader. "Average optical power monitoring in micromirrors." IEEE Journal of Selected Topics in Quantum Electronics 8, no. 1 (2002): 12–18. http://dx.doi.org/10.1109/2944.991394.

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36

Lumeau, Julien, Cihan Koc, and Thomas Begou. "Micromirrors with controlled amplitude and phase." Applied Optics 56, no. 20 (July 6, 2017): 5655. http://dx.doi.org/10.1364/ao.56.005655.

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37

Reid, J. Robert, Victor M. Bright, and J. T. Butler. "Automated assembly of flip-up micromirrors." Sensors and Actuators A: Physical 66, no. 1-3 (April 1998): 292–98. http://dx.doi.org/10.1016/s0924-4247(97)01719-6.

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38

Frangi, Attilio, Andrea Guerrieri, Roberto Carminati, and Gianluca Mendicino. "Parametric Resonance in Electrostatically Actuated Micromirrors." IEEE Transactions on Industrial Electronics 64, no. 2 (February 2017): 1544–51. http://dx.doi.org/10.1109/tie.2016.2615274.

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39

Andrew Hicks, R., Vasileios T. Nasis, and Timothy P. Kurzweg. "Programmable imaging with two-axis micromirrors." Optics Letters 32, no. 9 (April 3, 2007): 1066. http://dx.doi.org/10.1364/ol.32.001066.

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40

Liu, Wei, and Joseph J. Talghader. "Thermally invariant dielectric coatings for micromirrors." Applied Optics 41, no. 16 (June 1, 2002): 3285. http://dx.doi.org/10.1364/ao.41.003285.

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41

De Volder, Michaël F. L., Jeroen De Coster, Dominiek Reynaerts, Chris Van Hoof, and Sang-Gook Kim. "High-Damping Carbon Nanotube Hinged Micromirrors." Small 8, no. 13 (April 17, 2012): 2006–10. http://dx.doi.org/10.1002/smll.201102683.

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42

Teo, Adrian J. T., and King Ho Holden Li. "Realization of Three-Dimensionally MEMS Stacked Comb Structures for Microactuators Using Low-Temperature Multi-Wafer Bonding with Self-Alignment Techniques in CMOS-Compatible Processes." Micromachines 12, no. 12 (November 29, 2021): 1481. http://dx.doi.org/10.3390/mi12121481.

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A high-aspect-ratio three-dimensionally (3D) stacked comb structure for micromirror application is demonstrated by wafer bonding technology in CMOS-compatible processes in this work. A vertically stacked comb structure is designed to circumvent any misalignment issues that could arise from multiple wafer bonding. These out-of-plane comb drives are used for the bias actuation to achieve a larger tilt angle for micromirrors. The high-aspect-ratio mechanical structure is realized by the deep reactive ion etching of silicon, and the notching effect in silicon-on-insulator (SOI) wafers is minimized. The low-temperature bonding of two patterned wafers is achieved with fusion bonding, and a high bond strength up to 2.5 J/m2 is obtained, which sustains subsequent processing steps. Furthermore, the dependency of resonant frequency on device dimensions is studied systematically, which provides useful guidelines for future design and application. A finalized device fabricated here was also tested to have a resonant frequency of 17.57 kHz and a tilt angle of 70° under an AC bias voltage of 2 V.

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43

Korneev, V. S., and S. L. Shergin. "Optoelectronic complex for measuring of functional parameters of MEMS deflectors with electromagnetic control." Interexpo GEO-Siberia 8, no. 1 (May 18, 2022): 17–21. http://dx.doi.org/10.33764/2618-981x-2022-8-1-17-21.

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An optical-electronic complex has been developed and tested, which makes it possible to measure the dynamic parameters of MEMS deflectors with arbitrary sizes and shapes of reflecting micromirrors, and dipoles made of various ferromagnetic materials. The complex makes it possible to measure the following parameters of MEMS deflectors: current strength in the control coil, magnetic field induction in the air gap, angular size and relative intensity of the diffraction pattern maxima, as well as their movement during synchronous rotation of the micromirrors at small angles. Using the presented optical-electronic complex, dynamic parameters of MEMS were measured. Deflectors with specified dimensions of reflective elements and dipoles made of various ferromagnetic materials, while the deviation angle measurement accuracy was ± 10´´, the measurement error of the current strength in the control coil is ± 0,1 mA.

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44

Bule, Rafael Gomez, Raul Broto Cervera, Chun-Mou Hsiao, and Raquel Perez-Castillejos. "Integration of indium micromirrors for biosensing applications." Emerging Materials Research 2, no. 4 (August 2013): 181–85. http://dx.doi.org/10.1680/emr.13.00008.

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45

Cheng, Xiang, Xinglin Sun, Yan Liu, Lijun Zhu, Xiaoyang Zhang, Liang Zhou, and Huikai Xie. "Integrated Optoelectronic Position Sensor for Scanning Micromirrors." Sensors 18, no. 4 (March 26, 2018): 982. http://dx.doi.org/10.3390/s18040982.

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46

Wu, Tong, Takahiro Yamasaki, Ryohei Hokari, and Kazuhiro Hane. "Spherical silicon micromirrors bent by anodic bonding." Optics Express 19, no. 12 (June 3, 2011): 11897. http://dx.doi.org/10.1364/oe.19.011897.

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47

Trupke, M., F. Ramirez-Martinez, E. A. Curtis, J. P. Ashmore, S. Eriksson, E. A. Hinds, Z. Moktadir, et al. "Pyramidal micromirrors for microsystems and atom chips." Applied Physics Letters 88, no. 7 (February 13, 2006): 071116. http://dx.doi.org/10.1063/1.2172412.

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48

Diehl, T., W. Ehrfeld, M. Lacher, and T. Zetterer. "Electrostatically operated micromirrors for Hadamard transform spectrometer." IEEE Journal of Selected Topics in Quantum Electronics 5, no. 1 (1999): 106–10. http://dx.doi.org/10.1109/2944.748112.

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49

Ford, J. E., V. A. Aksyuk, D. J. Bishop, and J. A. Walker. "Wavelength add-drop switching using tilting micromirrors." Journal of Lightwave Technology 17, no. 5 (May 1999): 904–11. http://dx.doi.org/10.1109/50.762910.

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50

Seo, Manseung, Haeryung Kim, and Myungjoo Park. "Maskless Lithographic Pattern Generation System upon Micromirrors." Computer-Aided Design and Applications 3, no. 1-4 (January 2006): 185–92. http://dx.doi.org/10.1080/16864360.2006.10738455.

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