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Journal articles on the topic 'Microscale fabrication process'

Author: Grafiati

Published: 7 July 2024

Last updated: 31 July 2025

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1

Ghaznavi, Amirreza, Jie Xu, and Seth A. Hara. "A Non-Sacrificial 3D Printing Process for Fabricating Integrated Micro/Mesoscale Molds." Micromachines 14, no. 7 (2023): 1363. http://dx.doi.org/10.3390/mi14071363.

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Three-dimensional printing technology has been implemented in microfluidic mold fabrication due to its freedom of design, speed, and low-cost fabrication. To facilitate mold fabrication processes and avoid the complexities of the soft lithography technique, we offer a non-sacrificial approach to fabricate microscale features along with mesoscale features using Stereolithography (SLA) printers to assemble a modular microfluidic mold. This helps with addressing an existing limitation with fabricating complex and time-consuming micro/mesoscale devices. The process flow, optimization of print time

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2

Bley, P. "The Liga Process for Fabrication of Three-Dimensional Microscale Structures." Interdisciplinary Science Reviews 18, no. 3 (1993): 267–72. http://dx.doi.org/10.1179/isr.1993.18.3.267.

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3

Bunea, Ada-Ioana, Nuria del Castillo Iniesta, Ariadni Droumpali, Alexandre Emmanuel Wetzel, Einstom Engay, and Rafael Taboryski. "Micro 3D Printing by Two-Photon Polymerization: Configurations and Parameters for the Nanoscribe System." Micro 1, no. 2 (2021): 164–80. http://dx.doi.org/10.3390/micro1020013.

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3D printing by two-photon polymerization enables the fabrication of microstructures with complex shapes and critical dimensions of a few hundreds of nanometers. On state-of-the art commercial two-photon polymerization systems, an immense 3D design freedom can be put into practice by direct laser writing using a precise fabrication technology, which makes this approach highly attractive for different applications on the microscale, such as microrobotics, micro-optics, or biosensing. However, navigating the different possible configurations and selecting the optimal parameters for the fabricatio

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Sugimoto, Ryota, Ju Hun Lee, Ju-Hyuck Lee, Hyo-Eon Jin, So Young Yoo, and Seung-Wuk Lee. "Bacteriophage nanofiber fabrication using near field electrospinning." RSC Advances 9, no. 67 (2019): 39111–18. http://dx.doi.org/10.1039/c9ra07510k.

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Using liquid crystalline suspension of the phage, we successfully fabricated nano- and microscale pure phage fibers. Through a near field electrospinning process, we fabricated the desired phage fiber pattern with tunable direction and spacing.

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Kim, Kangil, Jae Keun Lee, Seung Ju Han, and Sangmin Lee. "A Novel Top-Down Fabrication Process for Vertically-Stacked Silicon-Nanowire Array." Applied Sciences 10, no. 3 (2020): 1146. http://dx.doi.org/10.3390/app10031146.

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Silicon nanowires are widely used for sensing applications due to their outstanding mechanical, electrical, and optical properties. However, one of the major challenges involves introducing silicon-nanowire arrays to a specific layout location with reproducible and controllable dimensions. Indeed, for integration with microscale structures and circuits, a monolithic wafer-level process based on a top-down silicon-nanowire array fabrication method is essential. For sensors in various electromechanical and photoelectric applications, the need for silicon nanowires (as a functional building block

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Choi, Jinwoong, Myeonghyeon Cho, and Bumjoo Kim. "Fabrication of Nonconductive Microscale Patterns on Ion Exchange Membrane by Laser Process." Korean Journal of Materials Research 33, no. 2 (2023): 71–76. http://dx.doi.org/10.3740/mrsk.2023.33.2.71.

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Yang, Zhuo Qing, Hong Wang, Zheng Jie Zhang, Gui Fu Ding, Xiao Lin Zhao, and Chun Yan Jiang. "Fabrication and Mechanical Characterization of a Microscale Electrophoretic Polymer Based on MEMS Technology." Advanced Materials Research 422 (December 2011): 375–78. http://dx.doi.org/10.4028/www.scientific.net/amr.422.375.

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Microscale polyurethane modified epoxy resin film has been fabricated using MEMS tehnologies in the present paper. The effect of different process conditions on the thickness of fabricated film was discussed. The microscale film shows smooth and uniform surface morphology. The tensile test of the film by DMA indicates its tensile strength and Young's modulus are approximately 55MPa and 1.8GPa, respectively. The fracture section of the film was characterized by SEM. In addition, the interface bonding strength of the fabricated film between Ni substrate is much higher than Parylene-C and SU-8. T

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Tang, Min Jin, Hui Min Xie, Jian Guo Zhu, Peng Wan Chen, Qing Ming Zhang, and Xiao Jun Li. "A New Moiré Grating Fabrication Technique Using Hot Embossing Lithography." Applied Mechanics and Materials 83 (July 2011): 7–12. http://dx.doi.org/10.4028/www.scientific.net/amm.83.7.

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Moiré grating is a basic optical component, and can be used in various moiré methods. The conventional grating fabrication technology is based on photolithography and holographic interferometry, however, it requires complex optical components and is very difficult to put into practice. In this study, nanoimprint lithography (NIL), or rather, hot embossing lithography (HEL), is proposed for producing high frequency grating. Compared with silicon mold, holographic moiré grating mold costs less and is not easy to break, thus is chosen to be the mold in HEL. Using this mold and the hot embossing s

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Herrera-Loya, Maite R., L. Mariana Cervantes-Herrera, Sofia Gutierrez-Vallejo, and Jorge G. Ibanez. "Leaded or unleaded? Homemade microscale tin electroplating." Chemistry Teacher International 4, no. 1 (2022): 97–102. http://dx.doi.org/10.1515/cti-2021-0024.

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Abstract Social distancing measures due to the SARS-CoV-2 virus have profoundly challenged the educational experimental work. We have sought to remediate this issue by designing a series of low cost, low risk, quick, and qualitative electrochemistry and corrosion experiments to be performed in the student’s homes at the microscale with a kit provided by the teacher. One such experience is the electroplating of Sn from an aqueous chloride solution using readily available soldering wires (e.g., Sn–Pb alloy, or Sn–Ag–Cu alloy). This process catches students’ attention due to its simplicity and va

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Kadekar, Vinay, Weiya Fang, and Frank Liou. "Deposition Technologies For Micromanufacturing: A Review." Journal of Manufacturing Science and Engineering 126, no. 4 (2004): 787–95. http://dx.doi.org/10.1115/1.1811118.

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This paper discusses the microdeposition technologies used in the fabrication of meso- and microscale structures. The ability to process a wide range of materials and the flexibility to build functional and geometrically complex structures in meso- and microscale gives the microdeposition method some advantages over micromachining or lithography methods investigated extensively in the past. In this paper, work on deposition technology is reviewed, including material, supply of material, powder flow rate, and manipulation of particles and microdeposition technologies. The advantages and disadva

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Park, Seorin, Da Young Lee, and Sunghun Cho. "Development of Light-Scribing Process Using L-Ascorbic Acid for Graphene Micro-Supercapacitor." Micromachines 15, no. 7 (2024): 858. http://dx.doi.org/10.3390/mi15070858.

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The rapid development of smart technologies is accelerating the growing demand for microscale energy storage devices. This work reports a facile and practical approach to fabricating interdigitated graphene micro-patterns through the LSC process accompanied by the l-ascorbic acid (L-AA) and preheating treatment. Our work offered a higher degree of GO reduction than the conventional microfabrication. It significantly shortened the overall processing time to obtain the micro-patterns with improved electrical and electrochemical performances. The interdigitated MSC composed of 16 electrodes exhib

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Wang, Dazhi, Kuipeng Zhao, Yuheng Yuan, et al. "Fabrication and Characterization of a Microscale Piezoelectric Vibrator Based on Electrohydrodynamic Jet Printed PZT Thick Film." Micromachines 12, no. 5 (2021): 524. http://dx.doi.org/10.3390/mi12050524.

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This paper proposes a novel way of preparing a PZT thick film micro vibrator using the electrohydrodynamic jet (E-Jet) printing technique. Initially, a micro piezoelectric vibrator was simulated and designed for obtaining optimized structure, which has a total thickness of less than 600 µm. Subsequently, the PZT thick film element was directly printed on the elastic body using the E-Jet printing. This method avoids the glue fabrication process involved in the bulk piezoelectric fabrication, thus avoiding the limits of voltage drops, isolating and absorbing amplitude usually occurred in the vib

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Yang, Jung Ho, Zhi Jun Zhao, and Sang Hu Park. "Fabrication of Microscale Wrinkles on a Curved Surface Using Weak-Polymerization and Thermal Curing Process." Journal of the Korean Society for Precision Engineering 33, no. 10 (2016): 875–80. http://dx.doi.org/10.7736/kspe.2016.33.10.875.

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Chen, M., X. Ding, L. Que, and X. Liang. "Fabrication of microstructures on curved hydrogel substrates." Journal of Vacuum Science & Technology B 40, no. 5 (2022): 052804. http://dx.doi.org/10.1116/6.0002071.

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Emerging wearable devices are very attractive and promising in biomedical and healthcare fields because of their biocompatibility for monitoring in situ biomarker-associated signals and external stimulus. Many such devices or systems demand microscale sensors fabricated on curved and flexible hydrogel substrates. However, fabrication of microstructures on such substrates is still challenging because the traditional planar lithography process is not compatible with curved, flexible, and hydrated substrates. Here, we present a shadow-mask-assisted deposition process capable of directly generatin

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Zhang, Bing, Shikang Li, M. Shafin H. Qureshi, Ukil Mia, Zhenghui Ge, and Aiping Song. "In-Situ Assembly of MoS2 Nanostructures on EHD-Printed Microscale PVDF Fibrous Films for Potential Energy Storage Applications." Polymers 14, no. 23 (2022): 5250. http://dx.doi.org/10.3390/polym14235250.

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Three-dimensional (3D) printing has been widely utilized to fabricate free-standing electrodes in energy-related fields. In terms of fabrication, the two most challenging limitations of 3D printed electrodes are the poor printing resolution and simple structural dimension. Here we proposed a novel process to fabricate molybdenum disulfide-polyvinylidene fluoride (MoS2-PVDF) hierarchical electrodes for energy storage applications. The 20-layer microscale PVDF films with a stable fiber width of 8.3 ± 1.2 μm were fabricated by using electrohydrodynamic (EHD) printing. MoS2 nanostructures were syn

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Oliveira, Cristiana, José A. Teixeira, Nelson Oliveira, Sónia Ferreira, and Cláudia M. Botelho. "Microneedles’ Device: Design, Fabrication, and Applications." Macromol 4, no. 2 (2024): 320–55. http://dx.doi.org/10.3390/macromol4020019.

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The delivery of therapeutical molecules through the skin, particularly to its deeper layers, is impaired due to the stratum corneum layer, which acts as a barrier to foreign substances. Thus, for the past years, scientists have focused on the development of more efficient methods to deliver molecules to skin distinct layers. Microneedles, as a new class of biomedical devices, consist of an array of microscale needles. This particular biomedical device has been drawing attention due to its ability to breach the stratum corneum, forming micro-conduits to facilitate the passage of therapeutical m

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Horade, M., K. Yamada, T. Yamawaki, and M. Yashima. "Research on fabrication method for floating structures using general photolithography with high versatility." Journal of Micromechanics and Microengineering 31, no. 12 (2021): 125004. http://dx.doi.org/10.1088/1361-6439/ac2d9b.

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Abstract This research reports a micro-fabrication method for plastic microscale structures. Although a stepped shape, such as a cantilever, can be fabricated by micro electro mechanical systems (MEMS) deep etching technology, its disadvantages include the complicated fabrication process and its limited utilization with silicon only. Therefore, in this study, with an aim to address the aforementioned problems, we have realized the fabrication of a multi-stage structure using just a general photolithography process with high versatility. Specifically, it can be manufactured using only SU-8 resi

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Liu, Xin, Stephan Prinz, Heino Besser, et al. "Organic semiconductor distributed feedback laser pixels for lab-on-a-chip applications fabricated by laser-assisted replication." Faraday Discuss. 174 (2014): 153–64. http://dx.doi.org/10.1039/c4fd00077c.

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The integration of organic semiconductor distributed feedback (DFB) laser sources into all-polymer chips is promising for biomedical or chemical analysis. However, the fabrication of DFB corrugations is often expensive and time-consuming. Here, we apply the method of laser-assisted replication using a near-infrared diode laser beam to efficiently fabricate inexpensive poly(methyl methacrylate) (PMMA) chips with spatially localized organic DFB laser pixels. This time-saving fabrication process enables a pre-defined positioning of nanoscale corrugations on the chip and a simultaneous generation

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Herrera-Granados, German, Kiwamu Ashida, Ichiro Ogura, et al. "Development of a Non-RigidMicro-Scale Cutting Mechanism Measuring the Cutting Force Using an Optical Lever." International Journal of Automation Technology 8, no. 6 (2014): 903–11. http://dx.doi.org/10.20965/ijat.2014.p0903.

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A new cutting mechanism for the fabrication of microscale grooves is presented in this study. Based on the control principle of the nano-cutting mechanism using an Atomic Force Microscope (AFM), in the newly developed system, a single crystal diamond tool is mounted at the free edge of a cantilever beam and is used for the removal of material. During the cutting process, the cantilever undergoes a deformation that is required for the implementation of a machining force feedback control. It was experimentally observed that the use of this mechanism enables to maintain the cutting depth of the m

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Sharma, Vyom, and C. Chandraprakash. "Quasi-superhydrophobic microscale two-dimensional phononic crystals of stainless steel 304." Journal of Applied Physics 131, no. 18 (2022): 184901. http://dx.doi.org/10.1063/5.0079375.

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Fabrication of metallic phononic and photonic crystals of characteristic size between 10 and [Formula: see text]m remains a challenge in precision using the conventional machining processes or too tedious for the cleanroom-based processes. We report the fabrication and elastodynamic bandgaps of two-dimensional phononic crystals (PhCs) machined on stainless steel 304 (SS304) substrates using the wire-electrochemical micromachining (wire-ECMM) process. Square arrays of pillars of length [Formula: see text]m and cross section either [Formula: see text] or [Formula: see text] with periods 650 and

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21

Li, Jing Feng, Song Zhe Jin, and Yong Li. "Fabrication of Si₃N₄ Micro-Components by a Combined Microfabrication Process." Key Engineering Materials 287 (June 2005): 28–32. http://dx.doi.org/10.4028/www.scientific.net/kem.287.28.

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Si-based high-temperature ceramics are attractive materials for power microelectromechanical systems (power MEMS), such as microscale gas turbines, micro-combustors and micro-reactors. This presentation introduces a novel process for the microfabrication of Si3N4 ceramics, which mainly consists of pre-sintering of Si powder compacts, micromachining of pre-sintered Si preforms and reaction sintering of the micromachined Si preforms. The present process has its high potential for Si3N4 3-dimensional microfabrication because it combines the machinablity of pre-sintered Si powder compacts and near

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22

Chen, Jianqiu, Liao Gan, Zhipeng Pan, et al. "A Strategy toward Realizing Ultrashort Channels and Microstructures Array by Piezoelectric Inkjet Printing." Nanomaterials 9, no. 11 (2019): 1515. http://dx.doi.org/10.3390/nano9111515.

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Inkjet printing has been proved to be a powerful tool in the cost-effective ambient deposition of functional materials for the fabrication of electronic devices in the past decades. However, restricted by equipment and inks, the feature size of printed dots or lines with conventional inkjet printing is usually limited to several tens of micrometers, which could not fit the requirements for the fabrication of large-area, high-resolution microscale, even nanoscale, structures. Therefore, various technical means were developed for breaking the equipment limits. Here, we report a strategy for real

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Jung, Jaehan. "Continuous manufacturing of 3D patterned hybrid film via a roll-to-roll process with UV curing." Modern Physics Letters B 34, no. 07n09 (2020): 2040039. http://dx.doi.org/10.1142/s0217984920400394.

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A strategy for continuous fabrication of a microscale 3D-patterned hybrid composite film composed of alumina and acrylate resin was developed using roll-to-roll production. Conventional thermal curing was replaced with a UV curing procedure to facilitate rapid and economical processing. A seamless engraved soft urethane mold was first produced using a patterned metal roll. Subsequently, alumina and acrylate resin were cured on the engraved mold via UV irradiation to produce patterned hybrid films. The dispersion of alumina particles in acylate resin was enhanced by utilizing amine acrylate. Ph

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Boonhaijaroen, Narit, Pitchaya Sitthi-amorn, Werayut Srituravanich, Kwanrat Suanpong, Sanong Ekgasit, and Somchai Pengprecha. "Alignment Control of Ferrite-Decorated Nanocarbon Material for 3D Printing." Micromachines 15, no. 6 (2024): 763. http://dx.doi.org/10.3390/mi15060763.

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This paper demonstrates the potential of anisotropic 3D printing for alignable carbon nanomaterials. The ferrite-decorated nanocarbon material was synthesized via a sodium solvation process using epichlorohydrin as the coupling agent. Employing a one-pot synthesis approach, the novel material was incorporated into a 3D photopolymer, manipulated, and printed using a low-cost microscale 3D printer, equipped with digital micromirror lithography, monitoring optics, and magnetic actuators. This technique highlights the ability to control the microstructure of 3D-printed objects with sub-micron prec

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Liu, Wendong, Xiaojing Wang, Siyuan Xiang, Yuechang Lian, and Shengyang Tao. "Stretchable Superhydrophobic Surfaces: From Basic Fabrication Strategies to Applications." Processes 12, no. 1 (2024): 124. http://dx.doi.org/10.3390/pr12010124.

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Superhydrophobic surfaces find extensive applications in various fields, including self-cleaning, liquid manipulation, anti-icing, and water harvesting. To achieve superhydrophobicity, the surfaces are designed with hierarchical nano- and/or microscale protrusions. These structures result in a static contact angle above 150° and a sliding/rolling-off angle below 10° when water droplets deposit on the surface. The combination of hierarchical structures and low-surface energy materials contributes to this unique liquid-repellent property. In addition to liquid repellency, the durability of these

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Mohammed, Muneer, Usama Umer, Ateekh Rehman, Abdulrahman Al-Ahmari, and Abdulaziz El-Tamimi. "Microchannels Fabrication in Alumina Ceramic Using Direct Nd:YAG Laser Writing." Micromachines 9, no. 8 (2018): 371. http://dx.doi.org/10.3390/mi9080371.

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Ceramic microchannels have important applications in different microscale systems like microreactors, microfluidic devices and microchemical systems. However, ceramics are considered difficult to manufacture owing to their wear and heat resistance capabilities. In this study, microchannels are developed in alumina ceramic using direct Nd:YAG laser writing. The laser beam with a characteristic pulse width of 10 µs and a beam spot diameter of 30 µm is used to make 200 µm width microchannels with different depths. The effects of laser beam intensity and pulse overlaps on dimensional accuracy and

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Jiang, J., W. J. Meng, G. B. Sinclair, and E. Lara-Curzio. "Further experiments and modeling for microscale compression molding of metals at elevated temperatures." Journal of Materials Research 22, no. 7 (2007): 1839–48. http://dx.doi.org/10.1557/jmr.2007.0252.

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Replication of metallic high-aspect-ratio microscale structures (HARMS) by compression molding has been demonstrated recently. Molding replication of metallic HARMS can potentially lead to low-cost fabrication of a wide variety of metal-based microdevices. Understanding the mechanics of metal micromolding is critical for assessing the capabilities and limitations of this replication technique. This paper presents results of instrumented micromolding of Al. Measured molding response was rationalized with companion high-temperature tensile testing of Al using a simple mechanics model of the micr

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Snetkov, Petr P., Kseniia S. Zakharova, Maria I. Tyanutova, Svetlana N. Morozkina, Roman O. Olekhnovich, and Mayya V. Uspenskaya. "THE STUDY OF THE PHYSICAL PROPERTIES OF AQUEOUS-ORGANIC HYALURONAN ELECTROSPINNING SOLUTIONS." Bulletin of the Saint Petersburg State Institute of Technology (Technical University) 55 (2020): 16–21. http://dx.doi.org/10.36807/1998-9849-2020-55-81-16-21.

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Hyaluronic acid (HA) is a naturally occurring polymer that is found in variety of tissues and biological fluids. Due to its unique properties such as biodegradability and biocompatibility, HA can be applied in fabrication of nanofibers for tissue engineering and wound healing. Electrospinning as one of the methods of creating such structures allows to obtain fibers and particles with nano- and microscale from polymer solutions utilizing the high voltage power supply. However, the electrospinning process directly depends upon different parameters, including physical characteristics of the polym

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Liu, Ze, Jinkui Chu, Ran Zhang, Chuanlong Guan, and Yuanyi Fan. "Preparation of an Integrated Polarization Navigation Sensor via a Nanoimprint Photolithography Process." Photonics 9, no. 11 (2022): 806. http://dx.doi.org/10.3390/photonics9110806.

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Based on the navigation strategy of insects utilizing the polarized skylight, an integrated polarization sensor for autonomous navigation is presented. The polarization sensor is fabricated using the proposed nanoimprint photolithography (NIPL) process by integrating a nanograting polarizer and an image chip. The NIPL process uses a UV-transparent variant template with nanoscale patterns and a microscale metal light-blocking layer. During the NIPL process, part of the resist material is pressed to fill into the nanofeatures of the variant template and is cured under UV exposure. At the same ti

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Hsiao, Alexander P., and Michael J. Heller. "Electric-Field-Directed Self-Assembly of Active Enzyme-Nanoparticle Structures." Journal of Biomedicine and Biotechnology 2012 (2012): 1–9. http://dx.doi.org/10.1155/2012/178487.

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A method is presented for the electric-field-directed self-assembly of higher-order structures composed of alternating layers of biotin nanoparticles and streptavidin-/avidin-conjugated enzymes carried out on a microelectrode array device. Enzymes included in the study were glucose oxidase (GOx), horseradish peroxidase (HRP), and alkaline phosphatase (AP); all of which could be used to form a light-emitting microscale glucose sensor. Directed assembly included fabricating multilayer structures with 200 nm or 40 nm GOx-avidin-biotin nanoparticles, with AP-streptavidin-biotin nanoparticles, and

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Hashimoto, Masaaki, and Yoshihiro Taguchi. "Design and Fabrication of a Kirigami-Inspired Electrothermal MEMS Scanner with Large Displacement." Micromachines 11, no. 4 (2020): 362. http://dx.doi.org/10.3390/mi11040362.

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Large-displacement microelectromechanical system (MEMS) scanners are in high demand for a wide variety of optical applications. Kirigami, a traditional Japanese art of paper cutting and folding, is a promising engineering method for creating out-of-plane structures. This paper explores the feasibility and potential of a kirigami-inspired electrothermal MEMS scanner, which achieves large vertical displacement by out-of-plane film actuation. The proposed scanner is composed of film materials suitable for electrothermal self-reconfigurable folding and unfolding, and microscale film cuttings are s

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Peng, Zilong, Nairui Gou, Zilong Wei та ін. "Fabrication of a Large-Area, Fused Polymer Micromold Based on Electric-Field-Driven (EFD) μ-3D Printing". Polymers 11, № 11 (2019): 1902. http://dx.doi.org/10.3390/polym11111902.

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An electric-field-driven (EFD), μ-3D printed, fused polymer technique has been developed for the fabrication of large-area microscale prototype molds using typical polymer materials, including microcrystalline wax (MC-wax), polycaprolactone (PCL), and polymathic methacrylate (PMMA). This work proposes an alternative for large area microscale modes and overcomes the limitation of high cost in the traditional mold manufacturing industry. The EFD principle enables printing of fused polymers materials more than one order of magnitude lower than the nozzle diameter, contributing to the necking effe

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Wang, Wei, Wei Guo Liu, Jin Long Zou, and Peng Fei Huo. "A MEMS Safe and Arm Device for Spin Stabilized Ammunition Fuze." Advanced Materials Research 403-408 (November 2011): 4593–97. http://dx.doi.org/10.4028/www.scientific.net/amr.403-408.4593.

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In order to realize the miniaturization of fuze safety mechanism, a novel MEMS safe and arm is proposed through concept, analysis, design and initial prototyping. A microscale inertial mechanical logic for mechanical safe and arm functions in the form of sliders, springs, and locks that interact on a planar substrate in response to setback acceleration and centrifugal force to thereby arm the fuze, and the bulk fabrication process were analyzed. The safety criteria, design principles, modeling and simulation methods for arming slider, setback lock, and arming lock are introduced. Air gun testi

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Liu, Yuqi, Zhihao Zhang, Yang Li, and Chao Bian. "Microsensing electrode chip based on interdigitated array structure for ammonia nitrogen detection in water." Journal of Physics: Conference Series 2982, no. 1 (2025): 012044. https://doi.org/10.1088/1742-6596/2982/1/012044.

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Abstract A high-sensitivity ultramicro interdigitated array electrode (UIAE) was developed for electrochemical detection of ammonia nitrogen (NH3-N), and corresponding manufacturing process was designed based on Micro-Electro Mechanism System (MEMS) fabrication technology. The electrode chip, with a feature size of 4 μm and an effective area of 0.8 mm2, exhibited a linear detection range of 0.15-2.0 mg/L (calculated as N), a sensitivity of 0.7525 μA·L·mg−1, and a relative standard deviation of 4.4% in current response across six electrodes. These results contribute to improving the performance

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Kranz, Michael, Mark Allen, and Tracy Hudson. "In-Situ Wafer-Level Polarization of Electret Films in MEMS Acoustic Sensor Arrays." Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT) 2011, DPC (2011): 001732–60. http://dx.doi.org/10.4071/2011dpc-wp24.

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MEMS-based electret and polymer piezoelectric transduction techniques have been reported for both acoustic sensors and energy harvesters. Common techniques employed in MEMS polymer polarization include corona discharge and backlighted thyratron. This paper reports a method for post-fabrication in-situ polarization of polymer films embedded within the MEMS device itself. The method utilizes microplasma discharges with self-aligned charging grids integrated within the device to charge fluoropolymer films in a fashion similar to the common corona discharge technique. This in-situ approach enables

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Li, Chunling, Yingying He, Sven Ingebrandt, and Xuan Thang Vu. "Microscale Sensor Arrays for the Detection of Dopamine Using PEDOT:PSS Organic Electrochemical Transistors." Sensors 24, no. 16 (2024): 5244. http://dx.doi.org/10.3390/s24165244.

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We present a sensor array of microscale organic electrochemical transistors (OECTs) using poly (3,4−ethylenedioxythiophene):poly(styrenesulfonic acid) (PEDOT:PSS) as the channel material. The devices show high sensitivity and selectivity to detect dopamine (DA) with platinum (Pt) as a pseudo−reference gate electrode. First, we describe the wafer−scale fabrication process for manufacturing the PEDOT:PSS OECTs, and then we introduce a dilution method to adjust the thickness of the PEDOT:PSS film. Next, we investigate the effect of the film thickness on the sensitivity of DA detection. Reducing t

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De Pasquale, Giorgio. "Additive Manufacturing of Micro-Electro-Mechanical Systems (MEMS)." Micromachines 12, no. 11 (2021): 1374. http://dx.doi.org/10.3390/mi12111374.

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Recently, additive manufacturing (AM) processes applied to the micrometer range are subjected to intense development motivated by the influence of the consolidated methods for the macroscale and by the attraction for digital design and freeform fabrication. The integration of AM with the other steps of conventional micro-electro-mechanical systems (MEMS) fabrication processes is still in progress and, furthermore, the development of dedicated design methods for this field is under development. The large variety of AM processes and materials is leading to an abundance of documentation about pro

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Hu, Yanlei, Zhaoxin Lao, Benjamin P. Cumming, et al. "Laser printing hierarchical structures with the aid of controlled capillary-driven self-assembly." Proceedings of the National Academy of Sciences 112, no. 22 (2015): 6876–81. http://dx.doi.org/10.1073/pnas.1503861112.

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Capillary force is often regarded as detrimental because it may cause undesired distortion or even destruction to micro/nanostructures during a fabrication process, and thus many efforts have been made to eliminate its negative effects. From a different perspective, capillary force can be artfully used to construct specific complex architectures. Here, we propose a laser printing capillary-assisted self-assembly strategy for fabricating regular periodic structures. Microscale pillars are first produced by localized femtosecond laser polymerization and are subsequently assembled into periodic h

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Joshi-Imre, Alexandra, and Sven Bauerdick. "Direct-Write Ion Beam Lithography." Journal of Nanotechnology 2014 (2014): 1–26. http://dx.doi.org/10.1155/2014/170415.

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Patterning with a focused ion beam (FIB) is an extremely versatile fabrication process that can be used to create microscale and nanoscale designs on the surface of practically any solid sample material. Based on the type of ion-sample interaction utilized, FIB-based manufacturing can be both subtractive and additive, even in the same processing step. Indeed, the capability of easily creating three-dimensional patterns and shaping objects by milling and deposition is probably the most recognized feature of ion beam lithography (IBL) and micromachining. However, there exist several other techni

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Liu, Yuxia, Kai Jiang, and Shuting Yang. "Integrated Anode Electrode Composited Cu–Sn Alloy and Separator for Microscale Lithium Ion Batteries." Materials 12, no. 4 (2019): 603. http://dx.doi.org/10.3390/ma12040603.

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A novel integrated electrode structure was designed and synthesized by direct electrodepositing of Cu–Sn alloy anode materials on the Celgard 2400 separator (Cel-CS electrode). The integrated structure of the Cel-CS electrode not only greatly simplifies the battery fabrication process and increases the energy density of the whole electrode, but also buffers the mechanical stress caused by volume expansion of Cu–Sn alloy active material; thus, effectively preventing active material falling off from the substrate and improving the cycle stability of the electrode. The Cel-CS electrode exhibits e

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Chi, Xiang, Xinyu Zhang, Zongan Li, et al. "Fabrication of Microfluidic Chips Based on an EHD-Assisted Direct Printing Method." Sensors 20, no. 6 (2020): 1559. http://dx.doi.org/10.3390/s20061559.

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Microfluidic chips have been widely used in many areas such as biology, environmental monitoring, and micromixing. With the increasing popularity and complexity of microfluidic systems, rapid and convenient approaches for fabricating microfluidic chips are necessary. In this study, a method based on EHD (electrohydrodynamic)-assisted direct printing is proposed. Firstly, the principle of EHD-assisted direct printing was analyzed. The influence of the operating voltage and moving speed of the work table on the width of a paraffin wax model was studied. Then, two kinds of paraffin wax molds for

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Zhang, Jianrui, Yabin Yan, and Bo Li. "Selective Laser Melting (SLM) Additively Manufactured CoCrFeNiMn High-Entropy Alloy: Process Optimization, Microscale Mechanical Mechanism, and High-Cycle Fatigue Behavior." Materials 15, no. 23 (2022): 8560. http://dx.doi.org/10.3390/ma15238560.

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The equiatomic CoCrFeNiMn high-entropy alloy (HEA) possesses excellent properties including exceptional strength–ductility synergy, high corrosion resistance, and good thermal stability. Selective laser melting (SLM) additive manufacturing facilitates the convenient fabrication of the CoCrFeNiMn HEA parts with complex geometries. Here, the SLM process optimization was conducted to achieve a high relative density of as-built CoCrFeNiMn HEA bulks. The mechanisms of process-induced defects and process control were elucidated. The microscale mechanical behaviors were analyzed through in situ scann

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Han, Seungkyu, Matthew Zielewski, David Martinez Holguin, Monica Michel Parra, and Namsoo Kim. "Optimization of AZ91D Process and Corrosion Resistance Using Wire Arc Additive Manufacturing." Applied Sciences 8, no. 8 (2018): 1306. http://dx.doi.org/10.3390/app8081306.

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Progress on Additive Manufacturing (AM) techniques focusing on ceramics and polymers evolves, as metals continue to be a challenging material to manipulate when fabricating products. Current methods, such as Selective Laser Sintering (SLS) and Electron Beam Melting (EBM), face many intrinsic limitations due to the nature of their processes. Material selection, elevated cost, and low deposition rates are some of the barriers to consider when one of these methods is to be used for the fabrication of engineering products. The research presented demonstrates the use of a Wire and Arc Additive Manu

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Sheriff B. Lamidi, Sheriff B. Lamidi, Yakub O. Bankole Yakub O. Bankole, Idris O. Olayiwola Idris O. Olayiwola, et al. "Overview of Micro-Machining and MicroElectromechanical Systems (MEMS)." International Journal of Advances in Engineering and Management 7, no. 1 (2025): 295–307. https://doi.org/10.35629/5252-0701295307.

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The quest for technological advancement for parts and systems with lightweight, low energy consumption, greater mobility, as well as higher efficiency and reliability, has birthed an era of miniaturized (micro-size) components and microsystems. These systems have found applications in inkjet printers, computer disk drives, accelerometers, projection display chips, blood pressure sensors, optical switches, microvalves, and biosensors, among others. Micromachining is a process that uses specialized tools and techniques to create small parts and components with precise dimensions and tolerances.

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Jain, Vivek, Apurbba Kumar Sharma, and Pradeep Kumar. "Recent Developments and Research Issues in Microultrasonic Machining." ISRN Mechanical Engineering 2011 (April 4, 2011): 1–15. http://dx.doi.org/10.5402/2011/413231.

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Demand for micromachining has been on the rise in recent years owing to increasing miniaturization. Production of parts in microscale, especially with brittle materials, is challenging. Ultrasonic micromachining has been gaining popularity as a new alternative in fabrication of such parts. The process gives a machining option for geometrically challenging and/or brittle material parts that are difficult to machine by conventional processes. In the recent years, possibilities have been explored to improve the “Unit Removal” in microultrasonic machining (micro-USM). However, the research in the

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Xu, Jiushuai, Klass Strempel, Hao Zhou, et al. "Area-Selective Growth of Aligned ZnO Nanorod Arrays for MEMS Device Applications." Proceedings 2, no. 13 (2018): 887. http://dx.doi.org/10.3390/proceedings2130887.

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ZnO nanorods (NRs) arrays with good vertical alignment were selectively grown on microscale patterned surfaces by a MEMS-compatible, low-temperature chemical-bath deposition method (CBD). The direct-current (DC) sputtered and subsequently annealed ZnO seed-layer was found to have a crucial effect on the ZnO NRs growth. Depending on the pre-annealing temperature between 200 °C and 700 °C, which is compatible with our microcantilever fabrication process, diameters and area densities of the NRs of 60–99 nm and 17–27 µm−2 were observed, respectively, with the best alignment at 600 °C. A surface-ar

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Pereira, G. S., C. P. Oliveira, and J. A. Souza. "COMPARISON BETWEEN TWO WAYS OF MODELING THE FLOW RESISTANCE IN A POROUS MEDIUM." Revista de Engenharia Térmica 22, no. 1 (2023): 40. http://dx.doi.org/10.5380/reterm.v22i1.90974.

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Pieces manufactured from polymeric composites are known for their good mechanical properties and low specific weight. However, controlling their fabrication process requires precise knowledge of the reinforcement and resin physical properties. This is needed to ensure that defective composites are not manufactured. Investigations into these materials physical properties are generally carried out experimentally, which makes it difficult to observe what happens on microscale level. Present work aims to analyze, and compare, flow behavior in a porous medium using two approaches: a) flow resistanc

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Huan, Junjun, Vamsy P. Chodavarapu, George Xereas, and Charles Allan. "Microfabrication and Packaging Process for a Single-Chip Position, Navigation, and Timing System." International Symposium on Microelectronics 2017, no. 1 (2017): 000208–14. http://dx.doi.org/10.4071/isom-2017-wa25_143.

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Abstract The Global Positioning System (GPS) is the primary means of Positioning, Navigation, and Timing (PNT) for most civilian and military systems and applications. The rapid growth in autonomous systems has created a widespread interest in self-contained Inertial Navigation System (INS) for precise navigation and guidance in the absence of GPS. The microscale PNT systems need both specialized and low cost fabrication technologies to cost effectively bring these technologies to market. We describe an ultra-clean (low leak rate) wafer-level vacuum encapsulation microfabrication process of Mi

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Gao, Kuan, Xin Zhang, Baoxi Liu, et al. "The Deformation Characteristics, Fracture Behavior and Strengthening-Toughening Mechanisms of Laminated Metal Composites: A Review." Metals 10, no. 1 (2019): 4. http://dx.doi.org/10.3390/met10010004.

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Multilayer metal composites have great application prospects in automobiles, ships, aircraft and other manufacturing industries, which reveal their superior strength, toughness, ductility, fatigue lifetime, superplasticity and formability. This paper presents the various mechanical properties, deformation characteristics and strengthening–toughening mechanisms of laminated metal matrix composites during the loading and deformation process, and that super-high mechanical properties can be obtained by adjusting the fabrication process and structure parameters. In the macroscale, the interface bo

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Sulaiman H., A. J., M. H. Aiman, M. Ishak, M. M. Quazi, T. Zaharinie, and T. Ariga. "Vacuum brazing of titanium alloy to stainless steel enhance by fiber laser surface texturing." Journal of Mechanical Engineering and Sciences 15, no. 4 (2021): 8601–7. http://dx.doi.org/10.15282/jmes.15.4.2021.12.0678.

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A method for improving the brazing joining strength of Titanium alloy/Stainless steel fabricated through fibre laser surface texturing is introduced because it is a simple process that does not require the fabrication of complicated interlayers. However, previous research shows that a milimeter scale was fabricated by surface modification for dissimilar brazing join, yielding insignificant results and limiting the application and degree of enhancement. Fiber laser ablation was used in this study to create microscale periodic patterns (grooves) on a stainless steel surface. No defect or damage

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