Relevant bibliographies by topics / Nano-force mechanical actuator

Contents

  1. Journal articles
  2. Dissertations / Theses
  3. Book chapters
  4. Conference papers

Academic literature on the topic 'Nano-force mechanical actuator'

Author: Grafiati
Published: 4 June 2021
Last updated: 9 February 2022

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Journal articles on the topic "Nano-force mechanical actuator"

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Cai, H., K. J. Xu, A. Q. Liu, Q. Fang, M. B. Yu, G. Q. Lo, and D. L. Kwong. "Nano-opto-mechanical actuator driven by gradient optical force." Applied Physics Letters 100, no. 1 (January 2, 2012): 013108. http://dx.doi.org/10.1063/1.3673854.

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CHEN, SHENG-JUI, SHEAU-SHI PAN, YU-SHAN YEH, and YI-CHING LIN. "MEASUREMENT OF CANTILEVER'S SPRING CONSTANT WITH CMS ELECTROSTATIC FORCE STANDARD." International Journal of Modern Physics: Conference Series 24 (January 2013): 1360021. http://dx.doi.org/10.1142/s2010194513600215.

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The mechanical property is one of the important parameters for evaluating micro/nano-scale materials. The measurement of micro/nano-mechanical property usually involves measurements of small displacement and force. To provide a traceable force standard in micro/nano-newton level, we have developed a force measurement system based on electrostatic sensing and actuation techniques. The system mainly consists of a monolithic flexure stage, a three-electrode capacitor and a digital controller. The three-electrode capacitor is utilized as a position sensor, and at the same time an electrostatic force actuator. The force under measurement is balanced by a compensation electrostatic force which is traceable to electrical and length standards. A commercial cantilever-type micro-force probe was used in this calibration experiment. The force probe was brought to contact with and press into the load button (a ruby sphere) of the force measurement system by a closed-loop controlled z-scanner. The spring constant was obtained from the average slope determined from measured force-displacement curves and was found to be (2.26 ± 0.01) N/m where the given uncertainty is one standard deviation. We have successfully demonstrated the calibration of the microforce probe using our self-developed electrostatic sensing and actuating force measurement system. The measured spring constant is consistent with the manufacturer's specification, and the relative standard deviation is less than 0.5%. Note from Publisher: This article contains the abstract only.
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KOOCHI, ALI, HOSSEIN HOSSEINI-TOUDESHKY, HAMID REZA OVESY, and MOHAMADREZA ABADYAN. "MODELING THE INFLUENCE OF SURFACE EFFECT ON INSTABILITY OF NANO-CANTILEVER IN PRESENCE OF VAN DER WAALS FORCE." International Journal of Structural Stability and Dynamics 13, no. 04 (May 2013): 1250072. http://dx.doi.org/10.1142/s0219455412500721.

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Surface effect often plays a significant role in the pull-in performance of nano-electromechanical systems (NEMS) but limited works have been conducted for taking this effect into account. Herein, the influence of surface effect has been investigated on instability behavior of cantilever nano-actuator in the presence of van der Waals force (vdW). Three different methods, i.e. an analytical modified Adomian decomposition (MAD), Lumped parameter model (LPM) and numerical solution have been applied to solve the governing equation of the system. The results demonstrate that surface effect reduces the pull-in voltage of the system. Moreover, surface energy causes the cantilever nano-actuator with the assigned parameter to deflect as a softer structure. It is found that while surface effect becomes important for low values of the cantilever nano-actuator thickness, vdW attraction is significant for low initial gap values. Surprisingly, the increase in the initial gap, enhances the contribution of surface effect in pull-in instability of the system while reduces the contribution of vdW attraction. Furthermore, the minimum initial gap and the detachment length of the cantilever nano-actuator that does not stick to the substrate due to vdW force and surface effect has been approximated. A good agreement has been observed between the values of instability parameters predicted via these three methods. Whilst compared to the instability voltage predicted by numerical solution, the pull-in voltage obtained by MAD series and LPM method is overestimated and underestimated, respectively.
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Lin, M. X., S. Y. Lee, and C. K. Chen. "Nonlocal Effect on the Pull-in Instability Analysis of Graphene Sheet Nanobeam Actuator." Journal of Mechanics 35, no. 5 (August 8, 2019): 767–78. http://dx.doi.org/10.1017/jmech.2018.41.

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ABSTRACTIn this study, the pull-in phenomenon of a Nano-actuator is investigated employing a nonlocal Bernoulli-Euler beam model with clamped-clamped conditions. The model accounts for viscous damping, residual stresses, the van der Waals (vdW) force and electrostatic forces with nonlocal effects. The hybrid differential transformation/finite difference method (HDTFDM) is used to analyze the nonlocal effects on a graphene sheet nanobeam, which is electrostatically actuated under the influence of the coupling effect, the von Kármán nonlinear strains and the fringing field effect. The pull-in voltage as calculated by the presented model deviates by no more than 0.29% from previous literature, verifying the validity of the HDTFDM. Furthermore, the nonlocal nonlinear behavior of the electrostatically actuated nanobeam is investigated, and the effects of viscous damping, residual stresses, and length-gap ratio are examined in detail. Overall, the results reveal that small scale effects significantly influence the characteristics of the graphene sheet nanobeam actuator.
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Shahabi, Pouyan, Hamed Ghafarirad, and Afshin Taghvaeipour. "High-frequency robust position control of a nonlinear piezoelectric bending actuator." Journal of Vibration and Control 26, no. 17-18 (January 16, 2020): 1560–73. http://dx.doi.org/10.1177/1077546319900851.

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Piezoelectric bending actuators have been widely used in a variety of micro- and nano-applications, including atomic force microscopy, micro assembly, cell manipulation, and in general, micro electromechanical systems. However, their control algorithms at low frequencies suffer from nonlinearities such as hysteresis in high voltages and creep in long-time static applications. Also, in high-frequency applications, especially near the actuator natural frequencies, the actuator dynamic is greatly affected by the material nonlinearity. Therefore, the control approaches based on the linear dynamic modeling cannot be effective at high frequencies. Thus, the position control of the foregoing actuators become challenging, and it has been of researchers’ interests in the last decade. In this article, the robust position control of a bimorph piezoelectric bending actuators is investigated. In this regard, based on the nonlinear constitutive equations and the Euler–Bernoulli beam theory, a nonlinear dynamic model is presented. Then, to track a desired motion trajectory, an observer-based robust position control algorithm is proposed. The proposed control methodology is able to accommodate parametric uncertainties and other un-modeled dynamics. Also, it ensures the elimination of the position tracking error in the presence of the estimated states. Finally, the tracking ability of the controller is demonstrated in an experimental study. The experimental results show that the identification of the system is properly conducted with the average error of 5.5%. Also, the efficiency of the robust controller is proved with the error of 3.7% and 4.9% in the position tracking of the actuator inside and outside of the identified region, respectively.
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van den Brink, Bram, Farbod Alijani, and Murali Ghatkesar. "Experimental Setup for Dynamic Analysis of Micro- and Nano-Mechanical Systems in Vacuum, Gas, and Liquid." Micromachines 10, no. 3 (February 26, 2019): 162. http://dx.doi.org/10.3390/mi10030162.

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An experimental setup to perform dynamic analysis of a micro- and nano-mechanical system in vacuum, gas, and liquid is presented. The setup mainly consists of a piezoelectric excitation part and the chamber that can be either evacuated for vacuum, or filled with gas or water. The design of the piezoelectric actuator was based on a Langevin transducer. The chamber is made out of materials that can sustain: vacuum, variety of gases and different types of liquids (mild acids, alkalies, common alcohols and oils). All the experiments were performed on commercial cantilevers used for contact and tapping mode Atomic Force Microscopy (AFM) with stiffness 0.2 N/m and 48 N/m, respectively, in vacuum, air and water. The performance of the setup was evaluated by comparing the measured actuator response to a finite element model. The frequency responses of the two AFM cantilevers measured were compared to analytical equations. A vacuum level of 0.6 mbar was obtained. The setup has a bandwidth of 10–550 kHz in vacuum and air, and a bandwidth of 50–550 kHz in liquid. The dynamic responses of the cantilevers show good agreement with theory in all media.
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Baek, Dong Cheon, Tae Sang Park, and Soon Bok Lee. "Measurement of Mechanical Properties of Electroplated Nickel Thin Film." Key Engineering Materials 261-263 (April 2004): 417–22. http://dx.doi.org/10.4028/www.scientific.net/kem.261-263.417.

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Electroplated nickel manufactured via the LIGA process, offers the possibility of stronger structure and connectors in a micro electro mechanical systems (MEMS). In this study, the mechanical properties of electroplated Nickel thin film were characterized using two methods; tension test and nano-indentation test. In tension test, a linear guided motor was used as actuator and the applied force was measured using a load cell. Strain was measured with a dual microscope that obtains the displacement of two separated zone by the tracking process of the image captured with CCD camera. In indentation test, elastic modulus was measured using a CSM(continuous stiffness measurement) module. Two types of specimen were prepared in the same wafer and tested after four months of aging, which reduces the variation of properties caused by fabrication condition and aging effect. The tension specimen is 15 µm thick and 300 µm wide. The indentation specimen is also 15 µm thick. Young's modulus were measured by two different testing methods and compared quantitatively.
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Schaude, Janik, Maxim Fimushkin, and Tino Hausotte. "Redesigned Sensor Holder for an Atomic Force Microscope with an Adjustable Probe Direction." International Journal of Precision Engineering and Manufacturing 22, no. 9 (July 14, 2021): 1563–71. http://dx.doi.org/10.1007/s12541-021-00561-7.

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AbstractThe article presents a redesigned sensor holder for an atomic force microscope (AFM) with an adjustable probe direction, which is integrated into a nano measuring machine (NMM-1). The AFM, consisting of a commercial piezoresistive cantilever operated in closed-loop intermitted contact-mode, is based on two rotational axes, which enable the adjustment of the probe direction to cover a complete hemisphere. The axes greatly enlarge the metrology frame of the measuring system by materials with a comparatively high coefficient of thermal expansion. The AFM is therefore operated within a thermostating housing with a long-term temperature stability of 17 mK. The sensor holder, connecting the rotational axes and the cantilever, inserted one adhesive bond, a soldered connection and a geometrically undefined clamping into the metrology circle, which might also be a source of measurement error. It has therefore been redesigned to a clamped senor holder, which is presented, evaluated and compared to the previous glued sensor holder within this paper. As will be shown, there are no significant differences between the two sensor holders. This leads to the conclusion, that the three aforementioned connections do not deteriorate the measurement precision, significantly. As only a minor portion of the positioning range of the piezoelectric actuator is needed to stimulate the cantilever near its resonance frequency, a high-speed closed-loop control that keeps the cantilever within its operating range using this piezoelectric actuator further on as actuator was implemented and is presented within this article.
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Singh, Ramachandra Arvind, Nalam Satyanarayana, and Sujeet Kumar Sinha. "Bio-Inspired Advanced Materials for Reducing Friction & Wear in MEMS Devices." Advanced Materials Research 545 (July 2012): 359–63. http://dx.doi.org/10.4028/www.scientific.net/amr.545.359.

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Micro-Electro-Mechanical-Systems (MEMS) are miniaturized devices built at micro/nano-scales. At these scales, friction force is extremely strong as it resists the smooth operation and reduces the useful operating lifetimes of MEMS actuator devices. In order to reduce friction and wear in MEMS devices, we have undertaken a bio-inspired approach by applying the underlying principle of the “Lotus Effect”. Lotus leaf surfaces have small-scale protuberances and wax covered on them, which make the surfaces water-repellent in nature. By creating textured surfaces that mimic these bio-surfaces, surface energy and contact area can be reduced. This in turn reduces friction force and eventually increases the wear durability of surfaces. In our work, we have fabricated bio-inspired surfaces that resemble the texture on lotus leaf. The method includes oxygen plasma treatment of polymeric thin/thick films and application of a nanolubricant namely, perfluoropolyether (PFPE). When this method was applied to SU8 polymer thin/thick films spin coated on silicon wafers, friction reduced considerably, and simultaneously the wear durability increased by >1000 times. The method is time and cost effective, and is commercially viable.
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Moeenfard, Hamid, Ali Darvishian, and Mohammad Taghi Ahmadian. "A coupled bending-torsion model for electrostatically actuated torsional nano/micro-actuators with considering influence of van der Waals force." Acta Mechanica 224, no. 8 (March 23, 2013): 1791–800. http://dx.doi.org/10.1007/s00707-013-0832-3.

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Dissertations / Theses on the topic "Nano-force mechanical actuator"

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Accadia, Timothée. "Vérification de la reconstruction du signal d'onde gravitationnelle de Virgo à l'aide d'un dispositif d'étalonnage utilisant la pression de radiation laser." Thesis, Grenoble, 2012. http://www.theses.fr/2012GRENY060/document.

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Les ondes gravitationnelles sont des solutions aux équations gourvenant la dynamique de la gravitation prédite en 1918 à partir de la théorie de la Relativité Générale d'Einstein. Elles représentent la propagation d'une oscillation de l'espace-temps induisant d'infimes variations de distance sur leur passage entre des masses libres. Depuis deux décennies, un réseau d'interféromètres de Michelson kilométriques a été développé et mis en opération à travers le monde afin de prouver l'existence des ondes gravitationnelles en détectant leur passage sur Terre. Leur signature est recherchée dans un canal de détection étalonné, obtenu à partir des mesures fournies par le détecteur et reconstruisant le signal absolu d'une onde gravitationnelle le traversant. La vérification de la procédure est nécessaire pour déceler d'éventuelles erreurs systématiques d'étalonnage biaisant l'exploitation du canal par les analyses des données. Depuis plusieurs années, une nouvelle technique d'étalonnage est développée à cette fin dans les différents interféromètres du réseau et repose sur la pression de radiation d'un laser modulé en puissance afin d'induire un déplacement étalonné de l'un de ses miroirs. Le dispositif, appelé étalonneur laser, permet de reproduire le passage d'une onde gravitationnelle connue et d'en vérifier la reconstruction dans le canal de détection. Le travail de cette thèse a concerné la mise en \oe uvre de cette technique pour l'interféromètre franco-italien Virgo afin de vérifier la reconstruction de son signal d'onde gravitationnelle. Le principe de fonctionnement de l'étalonneur laser installé sur le site est d'abord détaillé et son étalonnage est ensuite décrit avec les campagnes de mesures réalisées. Enfin, les vérifications faites durant les deux périodes de prises de données de Virgo qui se sont déroulées entre 2010 et 2011 seront présentées. Les résultats ont permis de valider la reconstruction du signal d'onde gravitationnelle de Virgo et ses incertitudes confirmant leur impact négligeable sur l'analyse des données
Gravitational waves are solutions to equations governing the dynamics of gravitation predicted from Einstein's theory of General Relativity in 1918. Gravitational waves describe ripples of space-time producing weak variations of distance between free masses along their propagation. Over the past two decades, an international array of ground-based, kilometer-scale Michelson interferometers has been developed to detect gravitational waves going through Earth and is now in operation. The gravitational wave signature is sought in a calibrated stream obtained from detector output measurements and giving the absolute signal of a gravitational waves going through it. A check of the procedure is required to avoid potential systematic calibration errors leading to an incorrect data stream and bias in its use by data analysis. Since severals years, a new calibration technique is developed for that purpose for each network's interferometer and uses the radiation pressure of a power-modulated laser to induce calibrated displacements of their mirrors. The associated setup, called Photon Calibrator, allows to mimic a gravitational waves passing the detector in order to verify its reconstruction in the detection channel. The scope of this thesis is the implementation of this technique for the French-Italian interferometer Virgo to check its gravitational wave signal reconstruction procedure. The operating principle of the setup installed is first described and its calibration is then detailed with measurement campaigns performed. Finally verifications performed for the two Virgo Science runs performed between 2010 and 2011 are presented. The conclusion of this study allowed to the validate the Virgo gravitational wave signal reconstruction with its uncertainties and has confirmed their negligeable impact on data analysis
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Book chapters on the topic "Nano-force mechanical actuator"

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DU, H. J. "DEVELOPMENT OF ZnO THIN FILM MICRO-SENSOR AND MICRO-ACTUATOR FOR SMART SLIDERS: FORCE SENSING AND NANO-ACTUATION." In Frontiers in Applied Mechanics, 15–16. IMPERIAL COLLEGE PRESS, 2015. http://dx.doi.org/10.1142/9781783266852_0008.

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Conference papers on the topic "Nano-force mechanical actuator"

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Cai, H., K. J. Xu, J. M. Tsai, G. Q. Lo, D. L. Kwong, and A. Q. Liu. "Nano-opto-mechanical linear actuator utilizing gradient optical force." In TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference. IEEE, 2011. http://dx.doi.org/10.1109/transducers.2011.5969615.

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Zhao, X., J. M. Tsai, H. Cai, X. M. Ji, J. Zhou, M. H. Bao, Y. P. Huang, D. L. Kwang, and A. Q. Liu. "Nano-opto-mechanical actuator driven by optical radiation force." In TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference. IEEE, 2011. http://dx.doi.org/10.1109/transducers.2011.5969628.

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Zhang, Meng, Zhigang Liu, Mingfan Bu, and Yu Zhu. "Pretension Analysis for Piezoelectric Stack Actuator in Nano-Positioning Stage." In ASME 2017 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 2017. http://dx.doi.org/10.1115/imece2017-70508.

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Taking advantages of high stiffness, fast response, high-bandwidth as well as large pushing force capability, piezoelectric stack actuators have been widely used in the fields of high speed nano-positioning stages and precision systems. An inevitable disadvantage of piezoelectric actuators is that they are highly intolerant to shear and tensile forces. During high speed scanning operations, the inertial forces due to the effective mass of the stage may cause the actuators to withstand excessive shear or tension forces. To protect the actuators, preload is often applied to compensate for these forces. Flexures have been used to supply preload to the piezoelectric stack actuators in many high-speed nano-positioning stages. Nevertheless, for nano-positioning stages with stiff flexures, it is a difficult job to displace the flexures and slide the actuators in place to preload them. This paper proposed a novel preloading nano-positioning stage which allows the piezoelectric stack actuator to be preloaded and mounted easily without obviously reducing the stiffness and speed of the nano-positioning stage. A preloading nano-positioning stage is designed and the flexible hinge and piezoelectric stack actuator of the stage are analyzed. The stiffness and resonance frequency of flexible hinge and optimal preload for the proposed stage is obtained by kinetics analysis. In order to verify the effectiveness of preloading nano-positioning stage, an online test system is established. The system mainly composed by a force sensor module, a capacitive sensor module and the preloading nano-positioning stage. A force sensor is applied between piezoelectric actuator and flexible hinge which can directly measure the preload in real time. The displacement of the flexible hinge is measured by a capacitive sensor to evaluate the positioning accuracy. Experiments are conducted, and the results demonstrate the effectiveness of the proposed approach.
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Tao, J. F., J. Wu, H. Cai, Q. X. Zhang, X. Kun, J. M. Tsai, D. L. Kwong, and A. Q. Liu. "A nano-actuator via cavity-enhanced optical dipole force." In 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, 2012. http://dx.doi.org/10.1109/memsys.2012.6170360.

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Abbasi, Ali A., and M. T. Ahmadian. "Force Controlled Manipulation of Biological Cells Using a Monolithic MEMS Based Nano-Micro Gripper." In ASME 2012 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 2012. http://dx.doi.org/10.1115/imece2012-85019.

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Nano-micro grippers are able to pick-transport-place the micro or nanometer–sized materials, such as manipulation of biological cells or DNA molecules in a liquid medium. This paper proposes a novel monolithic nano-micro gripper structure with two axis piezoresistive force sensor which its resolution is under nanoNewton. The results of the study have been obtained by the simulation of the proposed gripper structure in Matlab software. Motion of the gripper arm is produced by a voice coil actuator. The behavior of the cell has been derived using the assumptions in the literatures. Moreover, two simple PID controllers, one for control of the gripper motion and another for control of the force during manipulation of a biologic cell, have been implemented. Although the proposed gripper has not been fabricated, since the geometrical dimensions of the proposed gripper is the same as previously developed electrothermally actuated micro-nano gripper, the results of force control have been also compared with it. The simulated results with the very simple PID force controller which has a more rapid response than previously developed electrothermally actuated micro-nano gripper show that the designed gripper has the potential to be considered and fabricated for manipulation of biological cells in the future.
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Bashash, Saeid, and Nader Jalili. "A New Hysteresis Model for Piezoelectric Actuators With Application to Precision Trajectory Control." In ASME 2005 International Mechanical Engineering Congress and Exposition. ASMEDC, 2005. http://dx.doi.org/10.1115/imece2005-81602.

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Piezoelectric actuators with their sub-nanometer resolution and fast frequency response are becoming increasingly important in today’s micro-and nano-positioning technology. Along this line, this paper undertakes the development of a nonlinear modeling, system identification and control framework for piezoelectric actuators used in such positioning systems. More specifically, a general nonlinear modeling framework for a single piezoelectric actuator combined with a novel method for describing its hysteretic nonlinearity is proposed. For the actuator generated force, a polynomial form of the nonlinearity is assumed, and the time-varying history-dependent parameters of this polynomial are identified through the observed hysteretic characteristics of the actuator. Experimental results demonstrates the validity of the proposed the modeling and identification framework for an in-house high resolution piezoelectric-based stager with capacitive position sensor. Utilizing Lyapunov method and the sliding mode control strategy, the control force acting on the actuator is then designed such that the high frequency tracking control and the asymptotic stability of the system are attained. Simulation results indicate that controller suppresses the high frequency tracking error significantly, noticeably improving the tracking performance.
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Kaul, Pankaj, Vikas Prakash, and Alexis Abramson. "Mechanical Behavior of Individual Micro/Nano-Fibers Using a Novel Characterization Device." In ASME 2006 International Mechanical Engineering Congress and Exposition. ASMEDC, 2006. http://dx.doi.org/10.1115/imece2006-15424.

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The present paper reports the development of a novel mechanical testing device that enables highly reliable mechanical tensile testing on individual micro-/nano-structures. The device features independent measurement of both force and displacement histories in the specimen with nanoNewton force and sub-picometer displacement resolutions, respectively. Moreover, the device is well suited for in-situ testing of micro-/nano- structures within a high resolution scanning electron microscope (SEM), which permits continuous high resolution imaging of the specimen during straining. The device comprises of two main parts: (a) a three-plate capacitive transducer that doubles up both as an actuator and a force sensor, and (b) a commercially available nano-manipulator that facilitates transportation and positioning of nanoscale structures with nano-precision. In order to conduct the mechanical tests, the two ends of the specimen are attached to the probe tips at the nanomanipulator and the transducer ends, using either electron-beam or ion-beam induced deposition (EBID/IBID). The working and capabilities of the testing device are illustrated by presenting results of nanomechanical tensile tests on electrospun polyaniline microwires. The engineering stress versus engineering strain curves exhibit two very distinct Young's moduli during the loading or the unloading segments of the applied displacement. Failure at the probe/sample weld junction occurred at ~ 67 MPa, suggesting that polyaniline microfibers exhibit a yield stress higher than most comparable bulk polymers.
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Salehi-Khojin, Amin, and Nader Jalili. "An Analytical Modeling Framework for Piezoelectric-Based Microcantilever Actuator/Sensor With Thermal Effects Consideration." In ASME 2007 International Mechanical Engineering Congress and Exposition. ASMEDC, 2007. http://dx.doi.org/10.1115/imece2007-42528.

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In many surface science applications, piezoelctrically-actuated based micro-machines offer outstanding opportunity to detect topography of substrate in the scale of nano-meter. As the tip scan the surface of the sample, the laser beam deflected from the end of cantilever provide information related to nanoscale surface texture. However, application of laser beam to detect deflection of microcantilever beam will raise the local temperature of cantilever. This results in the resonance frequency shift due to the change in the effective stiffness of micro-beam. Therefore, studying the thermal effects on the microbeam is crucial when designing and employing microcantilever. In this study, a new modeling framework is presented for piezoelectrically driven atomic force microscopy (AFM). The piezoelectric layers are used as actuator and sensor attached on the top and bottom side of the cantilever. In our model, the local thermal effect due to laser beam has been also taken into account. The Hamilton’s principle is used to derive the governing equations.
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Kim, Won-Jong, and Shobhit Verma. "Multi-Axis Maglev Positioner With High Resolution Over Large Travel Range." In ASME 2005 International Mechanical Engineering Congress and Exposition. ASMEDC, 2005. http://dx.doi.org/10.1115/imece2005-80050.

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This paper presents a novel multi-axis positioner that operates on the magnetic-levitation (maglev) principle. This maglev stage is capable of positioning at the resolution of a few nanometers over a planar travel range of several millimeters. A novel actuation scheme was developed for the compact design of this stage that enables 6-axis force generation with just 3 permanent magnets. We calculated the forces with electromagnetic analysis over the whole travel range and experimentally verified them with a unit actuator. The single moving part, namely the platen, is modeled as a pure mass due to the negligible effect of magnetic spring and damping. There are 3 laser interferometers and 3 capacitance sensors to sense the 6-axis position/rotation of the platen. A lead-lag compensator was designed and implemented to control each axis. A nonlinear model of the force was developed by electromagnetic analysis, and feedback linearization was applied to cancel the nonlinearity of the actuators over the large travel range. Various experiments were conducted to test positioning, loading, and vibration-isolation capabilities. This maglev stage has a moving mass of 0.267 kg. Its position resolution is 4 nm over a travel range of 5 × 5 mm in the x-y plane. It can carry and precisely position an additional payload of 2 kg. Its potential applications include semiconductor manufacturing, micro-fabrication and assembly, nanoscale profiling, and nano-indentation.
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McKay, B., D. Iamratanakul, K. Oh, J. H. Chung, J. Riley, and S. Devasia. "Added-Mass Effect in Modeling of Cilia-Based (Vibrating Cantilever-Type) Devices for Microfluidic Systems." In ASME 2007 International Mechanical Engineering Congress and Exposition. ASMEDC, 2007. http://dx.doi.org/10.1115/imece2007-42160.

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This article shows that the added mass due to fluid structure interaction significantly affects the vibrational dynamics of cilia-based (vibrating cantilever-type) devices for handling micro/nano-scale fluid flows. Commonly, the hydrodynamic interaction between the cilia-based actuator and fluid is modeled as a Stokes drag force that is proportional to the velocity. Our main contribution is to show that such a drag effect cannot explain the substantial reduction in the resonant frequency of the cilia actuator operating in liquid when compared to the natural frequency of the cilia in air. It is shown that an added-mass approach can explain this reduction in the resonant frequency when operating cantilever-type devices in fluid. Thus, this article shows the need to model the added-mass effect, both, theoretically and by using experimental results.
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