Relevant bibliographies by topics / Nano-positioning / Dissertations / Theses
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Dissertations / Theses on the topic 'Nano-positioning'

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Published: 4 June 2021
Last updated: 6 September 2023

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1

Cui, Le. "Robust micro/nano-positioning by visual servoing." Thesis, Rennes 1, 2016. http://www.theses.fr/2016REN1S005/document.

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Avec le développement des nanotechnologies, il est devenu possible et souhaitable de créer et d'assembler des nano-objets. Afin d'obtenir des processus automatisés robustes et fiables, la manipulation à l'échelle nanométrique est devenue, au cours des dernières années, une tâche primordiale. La vision est un moyen indispensable pour observer le monde à l'échelle micrométrique et nanométrique. Le contrôle basé sur la vision est une solution efficace pour les problèmes de contrôle de la robotique. Dans cette thèse, nous abordons la problématique du micro- et nano-positionnement par asservissemen
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2

Roushdy, Omar H. 1977. "An optical positioning system for the Nano-Walker." Thesis, Massachusetts Institute of Technology, 2000. http://hdl.handle.net/1721.1/89294.

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3

Bettahar, Houari. "High accurate 3-D photo-robotic nano-positioning for hybrid integrated optics." Thesis, Bourgogne Franche-Comté, 2019. http://www.theses.fr/2019UBFCD019/document.

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L'intégration hybride d'éléments photoniques individuels offre la promesse de fournir des performances très élevées, de proposer de nouvelles fonctionnalités et produits optiques mais aussi pour exploiter de nouveaux modes de propagation des faisceaux lumineux. Cette approche repose sur la capacité d'un positionnement multi Degré-De-Liberté (DDL) précis des éléments photoniques individuels. Ainsi, la mesure multi-DDL imprécise et le contrôle inexact des robots sont les principaux verrous à surmonter, notamment à l'échelle micrométrique Pour cela, une approche photo-robotique originale a été pr
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4

De, Tathagata. "Systems approach based solution to fundamental limitations in unraveling spatial and temporal regimes in nano-interrogation and nano-positioning." [Ames, Iowa : Iowa State University], 2008.

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5

Wu, Ze Yi. "Design and implementation of compact micro- nano-positioning stage driven by piezoelectric actuator." Thesis, University of Macau, 2018. http://umaclib3.umac.mo/record=b3950618.

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6

Tien, Szu-Chi. "High-speed nano-precision positioning : theory and application to AFM imaging of soft samples /." Thesis, Connect to this title online; UW restricted, 2007. http://hdl.handle.net/1773/7089.

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7

Hu, Tiejun. "Design and control of a 6-Degree-of-Freedom levitated positioner with high precision." Diss., Texas A&M University, 2005. http://hdl.handle.net/1969.1/2360.

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This dissertation presents a high-precision positioner with a novel superimposed concentrated-field permanent-magnet matrix. This extended-range multi-axis positioner can generate all 6-DOF (degree-of-freedom) motions with only a single moving part. It is actuated by three planar levitation motors, which are attached on the bottom of the moving part. Three aerostatic bearings are used to provide the suspension force against the gravity for the system. The dynamic model of the system is developed and analyzed. And several control techniques including SISO (single input and single output) and MI
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8

Ahmad, Irfan. "Analyse et commande d'un système de mesure à courant tunnel." Phd thesis, Université de Grenoble, 2011. http://tel.archives-ouvertes.fr/tel-00663060.

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L'objet de la thèse était la commande d'un système de nano-positionnement par couranttunnel, avec application sur la plateforme expérimentale développée au laboratoire Gipsa-lab.Cette thèse s'inscrit dans le cadre de la commande des systèmes micro et nano-mécatronique,pour des applications en microscopie en champ proche ou dans des systèmes depositionnement ultra-précis. A l'échelle nanométrique, des problèmes de bruits de différentesnatures, vibrations, non-linéarités et instabilité influencent la précision et la qualité de mesuredu système. L'objectif était donc de pouvoir faire face à ces c
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9

Volpe, Giorgio. "Nanoscale spatial control of light in optical antennas." Doctoral thesis, Universitat Politècnica de Catalunya, 2012. http://hdl.handle.net/10803/96168.

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El control dinámico y determinístico de la luz en una escala espacial por debajo de la longitud de onda es un requisito clave para ampliar los conceptos y las funcionalidades de la macro-óptica hasta la escala nanométrica. Un mayor nivel de control también tendrá implicaciones importantes en nuestra comprensión de los fenómenos ópticos en la nanoescala. Uno de los principales problemas en nano-óptica tiene como objetivo describir cómo y con qué precisión es posible controlar la distribución espacial de la luz de forma dinámica en la nanoescala. Desafortunadamente, un límite fundamental de la f
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10

Treutlein, Barbara [Verfasser], and Jens [Akademischer Betreuer] Michaelis. "Mechanisms of eukaryotic gene expression on a single molecule level : from transcription initiation to nucleosome remodeling ; a single molecule FRET and nano-positioning system study / Barbara Treutlein. Betreuer: Jens Michaelis." München : Universitätsbibliothek der Ludwig-Maximilians-Universität, 2012. http://d-nb.info/1032482613/34.

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11

Bayendang, Nganyang Paul. "Nano-satellite GPS receiver design and Implementation : a software-to-firmware approach." Thesis, Cape Peninsula University of Technology, 2015. http://hdl.handle.net/20.500.11838/1176.

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Thesis submitted in partial fulfilment of the requirements for the degree Master of Technology: Electrical Engineering in the Faculty of Engineering at the Cape Peninsula University of Technology 2015<br>Space-borne GPS receivers designed for nano-satellites are faced with various challenges. This research is undertaken to address the problems of inefficiency and high-costs associated with space-borne GPS receivers. The problem of inefficiency relates to poor performances of the GPS receiver in terms of the algorithmic models, execution speed, memory usage and errors proness. The problem o
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12

Höpfner, Sebastian. "Modulation of Cargo Transport and Sorting through Endosome Motility and Positioning." Doctoral thesis, Saechsische Landesbibliothek- Staats- und Universitaetsbibliothek Dresden, 2005. http://nbn-resolving.de/urn:nbn:de:swb:14-1132927530983-53598.

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Utilizing various systems such as cell-based assays but also multicellular organisms such as Drosophila melanogaster and C.elegans, for example, the endocytic system has been shown to consist of a network of biochemically and morphologically distinct organelles that carry out specialized tasks in the uptake, recycling and catabolism of growth factors and nutrients, serving a plethora of key biological functions (Mellman, 1996). Different classes of endosomes were found to exhibit a characteristic intracellular steady state distribution. This distribution pattern observed at steady state result
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Bafumba, Liseli Joël. "Design and control of a piezoelectric positioning systems, with high resolution, multiple degrees of freedom and an embedded measurement by self-sensing." Thesis, Bourgogne Franche-Comté, 2019. http://www.theses.fr/2019UBFCD017.

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De nos jours, les systèmes intègrent de plus en plus de fonctionnalités dans des volumes de plus en plus petits grâce aux microcomposants intégrés. L'assemblage de ces microcomposants nécessite des systèmes de manipulation précis et reproductibles. Un nombre considérable de recherches ont été menées afin de mettre au point des actionneurs et des microrobots capables d'effectuer des tâches de positionnement ou de manipulation avec des précisions microniques voire submicroniques. Les technologies piézoélectriques jouent un rôle fondamental dans les applications de positionnement à résolution nan
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14

Saxena, Shubham. "Nanolithography on thin films using heated atomic force microscope cantilevers." Thesis, Available online, Georgia Institute of Technology, 2006, 2006. http://etd.gatech.edu/theses/available/etd-08302006-223629/.

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15

Valadkhan, Sina. "Nano Positioning Control Using Magnetostrictive Actuators." Thesis, 2007. http://hdl.handle.net/10012/3043.

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The focus of this thesis is on the development of control systems for nano- positioning actuators using magnetostrictive materials. Magnetostrictive materials have large strokes and fast responses. However, they are less commonly used than other smart materials such as piezoceramics due to their highly nonlinear and hysteretic behaviour. It is necessary to arrive at an accurate model which can predict the material response at any magnetic field and load condition. Furthermore, due to the nonlinearity of the material, a closed-loop feedback system with a stabilizing controller is needed. Diff
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16

Chen, Po-Yu, and 陳柏宇. "Development of a Nano-Positioning alignment stage for the nano imprint device." Thesis, 2010. http://ndltd.ncl.edu.tw/handle/t3q9ud.

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碩士<br>國立虎尾科技大學<br>機械與機電工程研究所<br>98<br>Abstract This paper presents the design, analysis, assembly, calibration and measurement of a 3-DOF nano-positioning alignment system for the nano imprint device with dual-grating interferometer alignment system as feedback. This 3-DOF nano-positioning alignment stage integrates two major stages, one is 3-DOF stepping motor alignment stage, the other is 2-DOF piezoelectric nano stage. The 3-DOF stepping motor alignment stage which is formed the ‘U’shape from three independent stepping motor, and 3 stepping motor drives 3 precision ball screw to push the VR
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17

Wang, Shi-xian, and 王世賢. "Controller Design of Long-Range Nano Positioning System." Thesis, 2005. http://ndltd.ncl.edu.tw/handle/98719348679098249297.

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碩士<br>國立臺灣科技大學<br>機械工程系<br>93<br>Due to the rapid development of semiconductor industry and biochemical technology, the submicron manufacturing facilities have become the important developing objects. The manufacturing accuracy of some products has required the nanometer precision. The precision stage is the important tool for precision manufacturing, precision measurement, and the inspect technique. Usually, the piezoelectric-actuator is chosen to design precision positioning system for achieving the micro or nano position. However, their motion range is only 100 micrometers. Hence, how to de
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18

Kuo, Feng-Shuo, and 郭峯碩. "The Control of Nano-Positioning Stage and Reliability Test." Thesis, 2014. http://ndltd.ncl.edu.tw/handle/2n9k23.

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碩士<br>國立虎尾科技大學<br>自動化工程研究所<br>102<br>This thesis uses a anti-integral PID controller to control a nano-positioning stage and conducts a reliability test of it. This study is divided into two parts. The PID controller to control the linear motor stage and piezo stage is ompared with an sliding mode controller, an axis of PID controller in order to control the step accuracy within ±10nm and siding mode controller step accuracy within ±50nm. The PID controller significantly improved the stage step accuracy, using Xenus drives improves the past some oscillation on the X-axis speed of tracing error
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19

Chen, Shao-Lun, and 陳劭侖. "Design and Development of Biaxial Nano-scale Positioning System." Thesis, 2010. http://ndltd.ncl.edu.tw/handle/91376545140826024420.

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碩士<br>國立臺灣大學<br>機械工程學研究所<br>98<br>A biaxial long-stroke positioning system applied to the sample delivery in scanning probe microscopy (SPM) is designed and developed in this thesis. The biaxial nano-scale positioning system is built up by three subsystems, which include two linear actuators, two displacement sensors, and one positioning controller. In order to achieve long-stroke and nano-scale positioning function, each linear actuator is driven by four shear motion mode (SMM) piezoelements on the inertial driving principle. And the flat-circular spring is applied to realize a frictionless r
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20

Hsu, Tsung-yi, and 許從宜. "Sub-pixel Registration and Its Application in Nano-Positioning." Thesis, 2007. http://ndltd.ncl.edu.tw/handle/27104354632421936860.

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21

Kuo, Feng-Shuo, and 郭?碩. "The Control of Nano-Positioning Stage and Reliability Test." Thesis, 2014. http://ndltd.ncl.edu.tw/handle/78k998.

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碩士<br>國立虎尾科技大學<br>自動化工程研究所<br>102<br>This thesis uses a anti-integral PID controller to control a nano-positioning stage and conducts a reliability test of it. This study is divided into two parts. The PID controller to control the linear motor stage and piezo stage is ompared with an sliding mode controller, an axis of PID controller in order to control the step accuracy within ±10nm and siding mode controller step accuracy within ±50nm. The PID controller significantly improved the stage step accuracy, using Xenus drives improves the past some oscillation on the X-axis speed of tracing error
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22

Fan, Sheng-Hao, and 范盛豪. "Development of Nano-positioning Stage and Optical Displacement Measurement System." Thesis, 2004. http://ndltd.ncl.edu.tw/handle/98504814187806945273.

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碩士<br>南台科技大學<br>機械工程系<br>92<br>Abstract With the development of precision industry, miniaturization and precision have become the trends of the times. Due to developments in this direction, there are increasing demands for micrometer and even sub-micrometer positioning systems. In the past, the lateral offset error produced during the displacement enlargement of positioning devices affected the accuracy of positioning, and the high sensitivity sensing devices used by measurement systems are expensive. Therefore, this article, using an existing piezo-element as actuator and based on
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Li, Yi-Tsung, and 李羿宗. "Design and Control of a Long-Stroke-Nano-Positioning Stage." Thesis, 2007. http://ndltd.ncl.edu.tw/handle/9t8x95.

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碩士<br>國立虎尾科技大學<br>機械與機電工程研究所<br>95<br>A dual-axis long-stroke-nano-positioning stage was developed in this project. A traditional ball screw and linear guided way, provided by the PMI Co. Taiwan, was employed with a 3-DOF piezo-stage, 3-DOF measurement system and a PID closed-loop countroller for this stage. The working range of the stage can be up to 300 mm × 300mm with a resolution of 10 nm in each linear axis and 1 arcsec in the rotary axis.
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Chian, Hsun-Fu, and 江洵甫. "Structural Design and Improvement of a Nano-Positioning Planar Motion Stage." Thesis, 2013. http://ndltd.ncl.edu.tw/handle/24206697747127253939.

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碩士<br>國立臺灣大學<br>機械工程學研究所<br>101<br>This thesis studies the structural design and tilt compensation mechanism of a high-precision nano-positioning planar motion stage. First, a high-precision planar motion stage is designed, and structural characteristics of the stage are obtained through finite element analyses and verified with experiment measurements. Structural responses of the stage, such as the deformation of carriage, can be acquired through analyses. Moreover, steady-state temperature distribution of the stage can also be obtained through temperature distribution experiment. With the te
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Su, Yu-Yi, and 蘇余益. "Nano-positioning Control of a Dual-stage and Long-range System." Thesis, 2001. http://ndltd.ncl.edu.tw/handle/85994023293780128379.

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碩士<br>國立中興大學<br>機械工程學系<br>89<br>In this thesis, precision micro-stages with nanometer accuracy with two different structures were studied. The first one was a dual-stage system, which was composed by a coarse-stage with micrometer accuracy, and a fine-stage with nanometer accuracy. The other was a single stage with lever mechanism to achieve long travel range requirement and had three degree of freedom (x, y,θz). This research was focusing on the real-time closed-loop feedback control strategy. In which, laser interferometer, due to its high resolution and traceability, was used as
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Hong, Rong Jun, and 洪榮君. "Optimal Control of a Nano-Positioning Stage Using Hierarchical Genetic Algorithms." Thesis, 2007. http://ndltd.ncl.edu.tw/handle/67379116943546912919.

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碩士<br>國立宜蘭大學<br>電機工程學系碩士班<br>95<br>In recent years, the industry of the precision machinery, optical fiber communication, and semi-conductor has been blooming; hence the control error has approached the request of nanometer. However, the traditional servo-mechanism doesn’t approach the precision of nanometer. Hence, this paper adopted the piezoelectric actuator that has characteristic of more hardness, responds quickly, and producing large force, for nano-positioning control. However, the piezoelectric actuator is due to the materials behavior that has hysteresis phenomena, and does not approa
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Lin, W. B., and 林文彬. "Design of Nano-Positioning Control Systems Based on Particle Swarm Optimization." Thesis, 2007. http://ndltd.ncl.edu.tw/handle/10870621690802054664.

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碩士<br>國立宜蘭大學<br>電機工程學系碩士班<br>95<br>This paper presents the particle swarm optimization (PSO) based approach to design fuzzy control system is proposed for nano-positioning system. First, the Bouc-Wen model describes the non-linear hysteresis curve of a piezoelectric actuator. Then, the Takagi-Sugeno (T-S) fuzzy model is applied to approximate the non-linear nano-positioning system. Last, the parallel distributed compensation (PDC) is designed to control the piezoelectric actuator, and use linear matrix inequality (LMI) approach to check the stability of fuzzy controller. The parameters of the
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Chien, Wen-Sheng, and 簡汶昇. "Research on the Accurate Positioning of a Long Travel Air-Bearing Nano-Positioning Stage Using the Linear Motors." Thesis, 2011. http://ndltd.ncl.edu.tw/handle/n6w3h5.

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碩士<br>國立臺灣科技大學<br>機械工程系<br>99<br>The objective of this research is to develop a PC-based closed-loop nano-positioning system using the dual-frame two-axis drive single mobile independent framework. The stage body was supported by an air bearing on a granite base to reduce the frictional force. The developed stage was driven by the PC-Based interface of ANCA 5DX CNC controller the ANCA 5DX Digital Servo drive, for the precision motion control of the linear motors. The laser scales were used as the feedback sensors so that the closed loop control of the developed system was possible. Based on t
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Polit, Sebastian. "Development of a high throughput nano-positioning system with applications in micro-manufacturing." 2010. http://www.lib.ncsu.edu/resolver/1840.16/5979.

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Lai, Zi-Fa, and 賴子發. "Research and development of an intelligent nano-positioning control on ultrasonic motor system." Thesis, 2006. http://ndltd.ncl.edu.tw/handle/90942334927324376353.

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碩士<br>國立臺灣大學<br>機械工程學研究所<br>94<br>The research proposed a positioning system with nano resolution. Utilize ultrasonic motor as the actuator, and develop orthogonal signal decoding method for LDGI (Laser Diffraction Grating Interferometer) as displacement feedback with high accuracy. Based on FCMAC (Fuzzy Cerebellar Model Articulation Controller) control algorithm for controlling and predicting the variation of ultrasonic motor friction driving, establishing PC-Based positioning integral system in with BCB (Borland C++ Builder) software and National Instrument DAQ (Data Acquisition) Device, to
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Wu, Ru-Chang, and 吳儒昌. "Design and Control of an Integrated Multiple-Axis Long-Stroke Nano-positioning Stage." Thesis, 2014. http://ndltd.ncl.edu.tw/handle/19891508607237584259.

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碩士<br>國立臺灣大學<br>機械工程學研究所<br>102<br>This thesis develops a long-travel, nano-positioning stage. We develop a three-dimensional piezoelectric (PZT) stage, and integrate a compensated three-dimensional stage to achieve six-dimensional nano-positioning. Then we combine the PZT stages with a stepper stage to accomplish a long-stroke precision-positioning stage. As technology develops, precision positioning is increasingly important. Because traditional mechanical structures cannot satisfy the nano-positioning requirements, piezoelectric materials are normally applied to drive the precision stages b
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Tsai, I.-Haur, and 蔡一豪. "Inverse Bouc-Wen model Roubst loop-shaping control for a nano-positioning stage." Thesis, 2014. http://ndltd.ncl.edu.tw/handle/03028547403935805822.

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碩士<br>國立臺灣師範大學<br>機電科技學系<br>102<br>This thesis is dedicated in hysteresis effect’s compensation and loop-shaping robust controller design of one axis piezoelectric stage, evading its nonlinear hysteresis, and achieves precise positioning. As semiconductor technology advances, the demand for the accuracy of positioning systems also increases. Traditional mechanical transmission systems may not be able to satisfy these demands. Piezoelectric actuators are characterized by high resolution, high accuracy, and large driving force; hence, they are applicable in position control platforms. In this fo
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Hsin-Ting, Liu, and 劉信廷. "Design and Development of a 3-axes Close-looped Nano-scale Positioning System." Thesis, 2008. http://ndltd.ncl.edu.tw/handle/63657062282174958741.

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碩士<br>國立臺灣大學<br>機械工程學研究所<br>96<br>High-resolution position stage is the footstone of the precision technology. A nano-level resolution positioning stage plays a important role in the development of nanotechnology. This paper proposes a 3-axis positioning stage built up by piezoelectric actuators as the actuating system and HOE-DVD pickup head as the displacement measurement system. Piezoelectric units are often used in micro-level actuator; by using the precise voltage control piezoelectric units can also fulfill a nano-level actuation. In order to increase the stroke of piezoelectric actuator
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Jhong, Ren-jhih, and 鐘仁志. "Investigation on nano-positioning control in long traveling range by bidirectional power amplifier." Thesis, 2007. http://ndltd.ncl.edu.tw/handle/77715059717585535362.

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碩士<br>國立雲林科技大學<br>機械工程系碩士班<br>95<br>In this study, a nano-positioning stage with a long traveling range has been realized by the most commonly used traditional PID control and the roller guideway. Here the laser interferometer with high resolution is applied as positioning sensor. In order to drive the stage directly by the voice coil motor for bidirectional actuation, customization power amplifier is adopted. It can output the bidirectional current and meets the requirement of voice coil motor. By Ziegler and Nichols PID parameter adjustment method and trying error methods, the parameter in d
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Xie, Ming-Cun, and 謝明村. "Design and Realization of Dual-Stage Nano-Positioning Stage for Long Range Travel." Thesis, 2018. http://ndltd.ncl.edu.tw/handle/9t8kae.

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碩士<br>龍華科技大學<br>機械工程系碩士班<br>106<br>This thesis is aims to study research of large-travel nano-scale positioning system. Due to the rapid development of high exact machining technology, the demand of machining precision is higher and higher and to increase the length of motion to achieve the demand of large-travel and nano-scale positioning and the large-travel. Thus, we develop the large-travel nano-scale position system driven by single axis robot coupled with piezoelectricity based on the conception of two-phase combination drive. This system uses servo motor to drive the large-travel precis
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Hsu, Fu-Ya, and 許富雅. "Research on the Nano-Positioning of a Micro-Milling Machine Using the Ultrasonic Motors." Thesis, 2010. http://ndltd.ncl.edu.tw/handle/16858005431829303901.

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碩士<br>國立臺灣科技大學<br>機械工程系<br>98<br>The objective of this research is to develop an X-Y co-planar positioning stage with nanometer resolution using low-cost components and ultrasonic motors controlled by a PC–based CNC ELC 2200 controller. The development stage was integrated with a micro-milling machine that can perform the micro-milling or a diamond tool shaping. The PC–based CNC ELC 2200 controller was applied to develop the closed loop control program programmed with Borland C 3.1 language, to generate the control commands transmitted to the drivers of ultrasonic motors and to perform the pos
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蘇志宏. "Micro/Nano Particle Positioning Control Using Atomic Force Microscope and Precision Three-Axis Stage." Thesis, 2003. http://ndltd.ncl.edu.tw/handle/33763236306179353496.

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碩士<br>國立中興大學<br>機械工程學系<br>91<br>This thesis is considers nano positioning control for micro/nano particle using an atomic force microscope (AFM) and a precision XYZ stage. By setting the AFM as a stopper by letting the particle be pressed by the AFM’s tip, the particle can be positioned on a XYZ stage via the 3-axis precision control of the stage. The mathematical model of the whole nano system is first developed including the interaction forces and the friction force of the tip-particle contact and particle-substrate contact . Then , by defining a suitable stable manifold erroe system and sel
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Wu, Chia-Tai, and 吳佳泰. "Positioning Control of the Nano Scanning Stage by the Feedback of the Laser Interferometer." Thesis, 2009. http://ndltd.ncl.edu.tw/handle/23py28.

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碩士<br>國立虎尾科技大學<br>機械與機電工程研究所<br>97<br>With the diversity of industries and the need of high position accuracy of the measurement equipment, the precise positioning stage with high-speed and high-accuracy have been applied at various industries. The main purpose of this research is to complete high position accuracy control of the long-stroke and high-speed dual-axis nano scanning stage by the optical signal feedback from the dual-frequency laser interferometer. As for the control application of the linear motion of stages, linear motor has better operation characteristics such as direct drivi
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Dong, Jingyan. "System characterization, control and optimal feed-rate scheduling for high-speed machining and nano positioning /." 2006. http://gateway.proquest.com/openurl?url_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:dissertation&res_dat=xri:pqdiss&rft_dat=xri:pqdiss:3242837.

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Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2006.<br>Source: Dissertation Abstracts International, Volume: 67-11, Section: B, page: 6691. Advisers: Placid M. Ferreira; James A. Stori. Includes bibliographical references (leaves 188-202) Available on microfilm from Pro Quest Information and Learning.
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Choi, Yeong-jun. "Development of a large displacement flexure based nano-precision XY positioning stage for vacuum environments." Thesis, 2003. http://hdl.handle.net/2152/506.

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Chang, Po-huai, and 張博懷. "Design of A Closed-Loop Short Travel Micro-Nano-Positioning System by Finite Element Method." Thesis, 2006. http://ndltd.ncl.edu.tw/handle/9zz52r.

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碩士<br>國立臺灣科技大學<br>機械工程系<br>94<br>The objective of this research is to develop a PC-based closed loop short travel micro-nano-positioning system. The developed system mainly consists of a piezoelectric actuator, a displacement enlarged mechanism, a micro-nano-positioning stage analyzed by the finite element method software - ANSYS, an optical fiber interferometer system, and a PC. A set of software programmed with the LabView programming language was developed to conduct the PID control of the positioning system. The designed micro-nano-positioning stage was constrained by four sets of double c
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42

Liao, Shu-chung, and 廖述鐘. "Design of a Closed-Loop Micro-/Nano- Positioning Stage with Bridge Displace-ment Amplification Mechanism." Thesis, 2008. http://ndltd.ncl.edu.tw/handle/66186187071220138864.

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碩士<br>國立臺灣科技大學<br>機械工程系<br>96<br>The objective of this research is to develop a PC-based closed loop micro-/nano-positioning system. The developed system mainly consists of a piezoelectric actuator, a bridge mechanism for displacement magnification, a micro-/nano-positioning stage body analyzed by the FEM software ANSYS, an optical fiber interferometer system, and a PC. A set of software written with the LabView programming language was developed to construct the PID closed-loop control of the developed positioning system. A bridge displacement amplification mechanism has been de-signed to
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Hsu, Yi-Lung, and 許逸隆. "System Identification and Dual-Stage Control of a Micro/Nano-Meter XY Precision Positioning Table." Thesis, 2007. http://ndltd.ncl.edu.tw/handle/68560201173408886447.

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碩士<br>國立高雄第一科技大學<br>機械與自動化工程所<br>95<br>The purpose of this study is to develop a dual-stage control (DSC) for a micro/nano-meter XY precision positioning table, in which the coarse positioning and fine positioning are dependent on the permanent magnet (PM) synchronous servo motor and piezoelectric actuator (PA), respectively. The main contribution is to solve the cross-coupling phenomena of the XY table and hysteresis phenomenon of the PA. Therefore, position the motion control of the dual-stage controller (DSC) included a micro-meter precision positioning by using the PM and the nano-meter co
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Li, Shie-Tsan, and 李協燦. "Design and Control of a Ballscrew-Piezoelectric Hybrid Drive for Long Stroke Nano-positioning System." Thesis, 2014. http://ndltd.ncl.edu.tw/handle/94238332537489056513.

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碩士<br>龍華科技大學<br>機械工程系碩士班<br>102<br>This thesis focuses on the large-travel nano-scale positioning system, and developes a large-travel nano-scale position system driven by ball screw coupled with piezoelectricity based on the structural design concept of two-phase combination drive. According to the production and design cooperation program of Ministry of Science and Technology (MOST) - “Design and Motion Control Implementation of ARM-based Embedded Platform for Long Stroke Precision Servo System with High Speed”. The proposed system intends to satisfy demands for large-travel and high-precisi
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Choi, Yeong-jun Sreenivasan S. V. "Development of a large displacement flexure based nano-precision XY positioning stage for vacuum environments." 2003. http://wwwlib.umi.com/cr/utexas/fullcit?p3117892.

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Jurasek, Nicholas J. "Design and analysis of a secondary mirror adaptive nano-platform with structural nano-positioning for a space based laser communications smart composite telescope." Thesis, 2008. http://hdl.handle.net/10125/20685.

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Chen, Yu-may, and 陳玉美. "The Study of Two-DimensionalMicro/Nano -Positioning-Stage with a Novel Compliant Linear-Motion--Guiding Mechanism." Thesis, 2005. http://ndltd.ncl.edu.tw/handle/22586207532541626937.

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碩士<br>逢甲大學<br>機械工程學所<br>93<br>Along with the fast growing of the semiconductor, photonics, biotechnology and nanotechnology industry, ultra-precision positioning stages are becoming more and more necessary. In recent years, the technology of ultra-precision positioning stages had increasingly progressed with this demand. Flexure mechanisms have been commonly used in the design of ultra-precision positioning stages as bearings to provide smooth and guided motion. Ultra-precision positioning stages with high displacement resolution and long traveling range are becoming increasingly popular in in
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Chang, Ming-Shaung, and 張銘祥. "A Research on Machine Vision Based Dual-stage Servo Control for Micro-Nano Precision Positioning Systems." Thesis, 2003. http://ndltd.ncl.edu.tw/handle/55491649918818281365.

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碩士<br>國立高雄第一科技大學<br>機械與自動化工程所<br>91<br>Ultra-precision positioning and miniaturization have been the unavoidable trend in precision engineering and micro-system packaging. Positioning platform with nano-to-micro accuracy has so been highly demanded. For this demand, a micro-vision based dual-stage servo system architecture was proposed mainly for the precision positioning in micro-system packaging. In the industrial practice, however, not only precision is required, but also long range stroke, say 200 mm, is often necessary. Meanwhile, there is usually no precise mechanical alignment plane or
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Kao, Ya-Pei, and 高雅蓓. "Design and Development of a 3-Axis Long Travel and High-speed Nano-scale Positioning System." Thesis, 2013. http://ndltd.ncl.edu.tw/handle/89527443539001867783.

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碩士<br>國立臺灣大學<br>機械工程學研究所<br>101<br>The scanning probe microscopy has been successfully used in many technological areas. For fulfilling diverse technological requirements, the high-speed and long-travel scanning function becomes an important development trend to investigate the sample surface variation in a large detecting range. The purpose of this thesis is to develop a three-axis positioning system for enhancing the high-speed and long-travel scanning function of the scanning probe microscopy (SPM). The piezoelectric stack is chosen as the actuator for achieving nano-scale actuation resolut
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Huang, Jyun-Da, and 黃俊達. "Research of the Closed-Loop Micro-/Nano-Z-Axis Positioning Stage Using the Real-Time Control System." Thesis, 2010. http://ndltd.ncl.edu.tw/handle/50976878095658698564.

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碩士<br>國立臺灣科技大學<br>機械工程系<br>98<br>The objective of this research is to develop a NI cRIO based closed loop micro-/nano-positioning system for z-axis scanning. The developed system mainly consists of a piezoelectric actuator, a lever mechanism for displacement magnification, a micro-/nano-positioning stage body analyzed by the FEM software ANSYS, a capacitive sensor system, NI cRIO Real-Time control interface, and a PC. A set of software written with the Labview programming language was developed to construct the PID closed-loop control of the developed positioning system. A lever displacement m
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