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Dissertations / Theses on the topic 'Nanopositioners'

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Published: 4 June 2021

Last updated: 2 February 2022

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1

Hubbard, Neal B. "Dual-stage Thermally Actuated Surface-Micromachined Nanopositioners." Diss., CLICK HERE for online access, 2005. http://contentdm.lib.byu.edu/ETD/image/etd743.pdf.

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2

Shi, Hongliang. "Modeling and Analysis of Compliant Mechanisms for Designing Nanopositioners." The Ohio State University, 2013. http://rave.ohiolink.edu/etdc/view?acc_num=osu1385484917.

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3

King, Ryan N. (Ryan Nicholas). "Design of a novel six-axis metrology system for meso-scale nanopositioners." Thesis, Massachusetts Institute of Technology, 2009. http://hdl.handle.net/1721.1/54500.

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Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2009.<br>Cataloged from PDF version of thesis.<br>Includes bibliographical references (p. 55).<br>The purpose of this research is to develop the best possible means and methods of building a six axis metrology system given cost and space constraints. Six axis measurements are a crucial part of precision engineering and characterizing machine performance, however commercially available sensors are not cost-efficient and are difficult to incorporate into meso-scale machines. The novel approach presented here uses three pairs of laser diodes and quadrant photodiodes to achieve six axis measurements. This paper presents a general parametric model that can predict the output of the photodiodes due to translations and rotations of the target for any geometry of the system. The device has performance characteristics of translational resolution in the range of microns depending on the geometry of the system, a bandwidth of 17.5 MHz, and dominant noise in the sensor of ±1.6 nm. This device will be useful in a variety of applications including nanomanufacturing, bio instrumentation, Dip Pen Nanolithography, AFM, and many more.<br>by Ryan N. King.<br>S.B.

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4

Golda, Dariusz 1979. "Design of a high-speed, meso-scale nanopositioners driven by electromagnetic actuators." Thesis, Massachusetts Institute of Technology, 2008. http://hdl.handle.net/1721.1/43145.

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Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2008.<br>Includes bibliographical references (p. 218-230).<br>The purpose of this thesis is to generate the design and fabrication knowledge that is required to engineer high-speed, six-axis, meso-scale nanopositioners that are driven by electromagnetic actuators. When compared to macro-scale nanopositioners, meso-scale nanopositioners enable a combination of greater bandwidth, improved thermal stability, portability, and capacity for massively parallel operation. Meso-scale nanopositioners are envisioned to impact emerging applications in data storage and nanomanufacturing, which will benefit from low-cost, portable, multi-axis nanopositioners that may position samples with nanometer-level precision at bandwidth of 100s of Hz and over a working envelope greater than 10x10x10 micrometers3 This thesis forms the foundation of design and fabrication knowledge required to engineer mesoscale systems to meet these needs.The design combines a planar silicon flexure bearing and unique moving-coil microactuators that employ millimeter-scale permanent magnets and stacked, planar-spiral micro-coils. The new moving-coil actuator outperforms previous coil designs as it enables orthogonal and linear force capability in two axes while minimizing parasitic forces. The system performance was modeled in the structural, thermal, electrical, and magnetic domains with analytical and finite-element techniques. A new method was created to model the three-dimensional permanent magnet fields of finite magnet arrays. The models were used to optimize the actuator coil and flexure geometry in order to achieve the desired motions, stiffness, and operating temperature, and to reduce thermal error motions.A new microfabrication process and design-for-manufacturing rules were generated to integrate multilayer actuator coils and silicon flexure bearings. The process combines electroplating for the copper coils, a silicon dioxide interlayer dielectric, and deep reactive-ion etching for the silicon flexures and alignment features.<br>(cont.) Microfabrication experiments were used to formulate coil geometry design rules that minimized the delamination and cracking of the materials that comprise the coil structure. Experiments were also used to measure the previously-unreported breakdown strength of the unannealed, PECVD silicon dioxide interlayer dielectric. The results of this research were used to design and fabricate a meso-scale nanopositioner system. The nanopositioner was measured to have a range of motion of 10 micrometers in the lateral directions, a range of 2 micrometers in the out-of-plane direction, an angular range of 0.5 degrees, and a first mode resonant frequency at 900 Hz. Open-loop calibration has been shown to minimize parasitic in-plane motion to less than 100 nm over the range of motion.<br>by Dariusz S. Golda.<br>Ph.D.

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5

Carbonari, Ronny Calixto. "Projeto de atuadores piezelétricos flextensionais usando o método de otimização topológica." Universidade de São Paulo, 2003. http://www.teses.usp.br/teses/disponiveis/3/3132/tde-08082003-124007/.

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Atuadores Piezelétricos Flextensionais consistem de uma estrutura flexível atuada por cerâmicas piezelétricas (ou “pilhas” de cerâmicas). A estrutura flexível conectada a piezocerâmica deve gerar deslocamentos e forças em diferentes pontos específicos do domínio, para uma direção especificada. Estes atuadores são usados em aplicações de mecânica de precisão, tal como, sistemas microeletromecânicos (MEMS), manipulador de células, interferometria laser, equipamentos de nanotecnologia, equipamentos de microcirurgias, nanoposicionadores, sonda de varredura microscópica, e etc. Porém, devido ao fato destes atuadores consistirem principalmente de um mecanismo flexível, seu projeto é complexo. A estrutura flexível comporta-se como um transformador mecânico pela amplificação para converter, direcionar e amplificar os pequenos deslocamentos gerados pela piezocerâmica (ordem de nanômetros). A estrutura flexível é projetada distribuindo-se flexibilidade e rigidez no domínio de projeto, o que pode ser obtido usando a otimização topológica. Portanto, o objetivo deste trabalho é implementar um método sistemático baseado no método de otimização topológica para projetar atuadores piezelétricos flextensionais. Essencialmente, o método de otimização topológica consiste em encontrar a distribuição ótima de material perfurando o domínio de projeto com infinitos microfuros. O material em cada ponto pode alterar de vazio a total presença de material, também assumindo material intermediário (ou compósito). A implementação do método de otimização topológica é baseado no modelo de material SIMP (Simple Isotropic Material with Penalization). O problema de otimização é posto como a maximização dos deslocamentos gerados (ou força de blocagem) em diferentes pontos e direções especificadas do domínio. Considerando o comportamento linear da piezocerâmica. Alterando a flexibilidade e a rigidez da estrutura flexível conectada a piezocerâmica obtém-se diferentes tipos de atuadores piezelétricos flextensionais, que podem ser projetados para determinadas aplicações. Para ilustrar o método, os exemplos mostrados são modelos bidimensionais (2D), uma vez que a maior parte das aplicações envolve dispositivos planos. Estes atuadores são fabricados usando corrosão química em chapas de cobre abaixo de 200 μm de espessura através do método de litografia. Técnica de corrosão química tem um baixo custo e permite-nos fabricar diversos protótipos para testes. Esta técnica pode ser facilmente utilizada no LNLS (Laboratório Nacional de Luz Síncrotron – Campinas). Análise experimental destes protótipos são procedidas para medição de deslocamentos usando uma Probe Station. Como trabalho futuro, estes protótipos serão construídos em escala de MEMS.<br>Flextensional Piezoelectric Actuators consist of a flexible structure actuated by piezoelectric ceramics (or a stack of piezoceramics). The flexible structure connected to the piezoceramic must generate displacements and forces in different specified points of the domain, according to a specific direction. These actuators are applied to precision mechanic applications such as microelectromechanical systems (MEMS), cell manipulators, laser interferometers, nanotechnology equipment, microsurgery equipment, nanopositioners, scanning probe microscopy, etc. However, due to the fact these actuators essentially consist of a compliant mechanism their design is complex. The compliant structure behaves as a mechanical transform by amplifying and changing the direction of small output displacements generated by piezoceramics (order of nanometer). The flexible structure is designed by distributing flexibility and stiffness in the design domain, which can be archieved by using topology optimization. Therefore, the objective of this work is to implement a systematic method based on topology optimization method to design flextensional piezoelectric actuators. Essentially, the topology optimization method consists of finding the optimal material distribution in a perforated design domain with infinite microvoids. The material in each point can change from void to full material, also assuming intermediate (or composite) material. The implemented topology optimization method is based on the SIMP (Simple Isotropic Material with Penalization) material model. The optimization problem is posed as maximization of output displacements (or grabbing forces) in different specified directions and points of the domain. A linear behavior of piezoceramic is considered. By changing the flexibility and stiffness of flexible structure connected to the piezoceramics different types of flextensional piezoelectric actuators can be designed for a desired application. To illustrate the method, examples presented herein are limited to two-dimensional (2D) models once in most part of applications of these actuators they are planar devices. These actuators are manufactured by using chemical corrosion on a 200 um thickness copper plate through lithography method. Chemical corrosion technique has a low cost and it allow us to manufacture several prototypes for testing. For this technique, facilities of the micromachining laboratory of National Sincroton Light Laboratory (LNLS - Campinas) are used. Experimental analysis of these prototypes are conducted by measuring displacements using a probe station. As a future work, these prototypes will be built in a MEMS scale.

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Cuff, David P. (David Preston). "Electromagnetic nanopositioner." Thesis, Massachusetts Institute of Technology, 2006. http://hdl.handle.net/1721.1/38712.

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Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2006.<br>Includes bibliographical references (p. 195-200).<br>This thesis presents the analysis, design, and control of a new class of magnetic nanopositioner. Applications for this class of positioner include sample positioning for scanning microscopy and interferometry, nanofabrication, vibration cancellation, biological cell tracking/positioning, and beam focusing/steering. The nanometer-resolution positioning required in these applications is often provided using piezoelectric ceramic actuators. The drawbacks to using piezoelectric actuators include high hysteretic heating, lightly damped structural resonances, the need for preload on the actuator stack, as well as the requirement for a high voltage amplifier. This thesis demonstrates an electromagnetically driven nanopositioner that is suspended on rubber bearings as a promising, low cost alternative to the piezoelectric nanopositioners. Several key features of the electromagnetic nanopositioner are the flux-steering actuator that applies a force linear in both coil current and displacement, replacement of the conventional metal flexures with rubber bearings, as well as power and sense electronics that can be easily integrated into a compact package. A prototype of this class of nanopositioner with 100,pm of travel and a maximum force output of 460 N was built and tested.<br>(cont.) A closed-loop bandwidth of 580 Hz was obtained using capacitance distance sensor feedback. The feasibility and procedure for casting rubber bearings was investigated. Several room-temperature vulcanizing (RTV) rubbers were considered for low volume, in-lab production of test specimens. A compression specimen was cast from a two-part RTV silicone rubber that was found to be suitable. A compression fixture that was previously used to test bonded rubber pads was modified to accept the cast rubber bearings. The cast rubber bearing was found to have the predicted DC stiffness and the stiffness increased with frequency as expected. Casting of rubber bearings was demonstrated as a feasible method for putting rubber bearings into devices such as nanopositioners.<br>by David P. Cuff.<br>S.M.

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7

Harris, Corey G. (Corey Gabriel). "Design of a shim for a nanopositioner." Thesis, Massachusetts Institute of Technology, 2010. http://hdl.handle.net/1721.1/59928.

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Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2010.<br>Cataloged from PDF version of thesis.<br>Includes bibliographical references (p. 37).<br>The purpose of this thesis is to assist in the development of a low cost nanopositioner by designing a specific component - a shim that is located in the scan tip assembly of the nanopositioner. Nanopositioners must maximize precision to successfully produce features of fewer than 100 nm. The kinematic coupling used to place the tool tip is capable of producing a high level of precision across tool changes, assuming the groove mount is held in place. It is therefore very important to secure the groove mount to prevent dislocation and enhance the viability of nano-scale device fabrication. The shim developed within this thesis serves to secure the groove mount of the kinematic coupling, which was previously held in place solely with magnetic attraction. The shim secures the groove mount by applying a force to the side of the groove mount in addition to increasing the magnetic attraction between the groove mount and universal mount of the nanopositioner. It was first modeled with solid and magnetic modeling software before being manufactured and tested. With the addition of the shim, the vertical force required to displace the groove mount increased by a factor of 9.4, from 0.14 N to 1.29 N. Similarly the lateral force increased by a factor of 27.9, from 0.09 N to 2.45 N. As a result, the nanopositioner is significantly better suited to perform its function. The nanopositioner will be used to produce nano-scale devices including carbon nanotubes, molecular actuators, and transistors, with applications across several disciplines. Future work includes developing a tool to bend the shim tabs and simplify the manufacturing process.<br>by Corey G. Harris.<br>S.B.

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8

DiBiasio, Christopher M. (Christopher Michael). "Design of a digitally actuated, micro-scale Cartesian nanopositioner." Thesis, Massachusetts Institute of Technology, 2005. http://hdl.handle.net/1721.1/32864.

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Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2005.<br>Includes bibliographical references (p. 55).<br>The purpose of this research is to generate the design knowledge required to produce a small-scale, low-cost precision positioning device. Accurate motion manipulation on the nanometer level is one of the main challenges facing precision engineers today. With more developed nations' economies being driven in part by the growing telecommunications, photonics, and integrated circuit industries, the need for inexpensive and accurate solutions for precision motion manipulation is clear. Unfortunately, current technology requires costly sensors and feedback control to achieve the necessary accuracy to complete even the simplest precision manipulation tasks. This feedback control can represent up to 50% of the total packaging cost of these systems. These systems could be much more affordable if the feedback and controls could be eliminated from devices such as Cartesian nanopositioners. This thesis presents a novel MEMS Cartesian nanopositioner referred to as DNAT) that is digitally actuated and requires no sensors or feedback (control, yet still provides the accuracy and resolution offered by today's state of the art systems. The modeling, design, and fabrication of this device is covered within this thesis. A prototype was designed and fabricated for use as a proof-of-concept, and a verification of the modeling techniques developed as a result of this research. The result is a conceptual model and design knowledge that may change the way many important fine motion tasks are carried out.<br>by Christopher M. DiBiasio.<br>S.B.

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9

Frank, Sebastian. "Entwurf einer modularen Steuerung für Nanopositionier- und Nanomessmaschinen." Ilmenau : Univ.-Verl. [u.a.], 2007. http://d-nb.info/987968130/34.

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10

Labuz, James (James R. ). "Design, fabrication, and testing of a three-dimensional monolithic compliant six-axis nanopositioner." Thesis, Massachusetts Institute of Technology, 2006. http://hdl.handle.net/1721.1/36741.

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Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2006.<br>Includes bibliographical references (leaf 36).<br>The purpose of this research was to demonstrate the feasibility for creating a three-dimensional monolithic compliant six-axis nanopositioner. Much of this work was based off of the original two-dimensional HexFlex manipulator created by Prof. Martin Culpepper and a three-dimensional design by Samuel Korb. The compliant mechanism was manufactured from a single sheet of 1/8 inch 5052 Aluminum. The mechanism was designed to be fabricated on the non-precision, abrasive water-jet and to be formed using bending processes. The fabrication process was successful. The entire machining process was on the order of one hour. The forming process was repeated multiple times without failure of the mechanism in all cases. The formed mechanism was tested to characterize its ability to manipulate the positioning stage both in- and out-of-plane. The transmission ratio for in-plane was measured at 6.4 while the out out-of-plane ratio was 6.3. The input deflection vs. output deflection curves display a linear relationship, but there was .0003 inches of hysteresis seen in the out-of-plane data after a max deflection of .0009 inches. This amount of hysteresis is undesirable and leaves further testing to determine its causes.<br>by James Labuz.<br>S.B.

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Frank, Sebastian [Verfasser]. "Entwurf einer modularen Steuerung für Nanopositionier- und Nanomessmaschinen / von Sebastian Frank." Ilmenau : Univ.-Verl, 2007. http://d-nb.info/987968130/34.

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Lin, Kevin S. M. Massachusetts Institute of Technology. "Multi-axis compliant mechanism-based nanopositioner for multi-mode mechanical testing of carbon nanotubes." Thesis, Massachusetts Institute of Technology, 2006. http://hdl.handle.net/1721.1/35667.

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Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2006.<br>Includes bibliographical references (p. 116-118).<br>This thesis documents the design of a multi-axis nanopositioner that addresses a need for carbon nanotube (CNT) instrumentation that is capable of multiple modes of mechanical testing. This nanopositioner is a solution to the need to quantify the mechanical properties of CNTs with the appropriate modes of testing, such as simultaneous bending and tensile loading. This information is important as it is required to test and better understand the properties of CNTs before and after they are used in micro/nano-structures. The multi-axis nanopositioner will be integrated as one of the core components in a new CNT instrument that is presented in this thesis. The nanopositioner is a compliant mechanism-based device designed that is to induce precise nanometer-level deformations in CNTs within a scanning electron microscope (SEM). The design presented in this thesis is a 4-axis prototype of a 6-axis version. The 4-axis nanopositioner was able to demonstrate over one micron range of motion in multiple axes with 10 nm resolution and repeatability. The nanopositioner was specifically designed to fit inside an SEM like an ordinary sample.<br>by Kevin Lin.<br>S.M.

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Amthor, Arvid [Verfasser], Christoph [Akademischer Betreuer] Ament, Sven [Akademischer Betreuer] Lambeck, and Oliver [Akademischer Betreuer] Sawodny. "Modellbasierte Regelung von Nanopositionier- und Nanomessmaschinen / Arvid Amthor. Christoph Ament. Sven Lambeck. Oliver Sawodny." Ilmenau : Universitätsbibliothek Ilmenau, 2010. http://d-nb.info/1008427144/34.

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Zschäck, Stephan [Verfasser], Christoph [Akademischer Betreuer] Ament, Eberhard [Akademischer Betreuer] Manske, and Oliver [Akademischer Betreuer] Sawodny. "Mehrgrößenregelung von Nanopositionier- und Nanomessmaschinen mit großen Bewegungsbereichen / Stephan Zschäck. Betreuer: Christoph Ament. Gutachter: Eberhard Manske ; Oliver Sawodny." Ilmenau : Universitätsbibliothek Ilmenau, 2016. http://d-nb.info/1081935340/34.

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Schienbein, Ralf [Verfasser], Roland [Akademischer Betreuer] Füßl, Svjatoslav M. [Akademischer Betreuer] Latyev, and René [Gutachter] Theska. "Grundlegende Untersuchungen zum konstruktiven Aufbau von Fünfachs-Nanopositionier- und Nanomessmaschinen / Ralf Schienbein ; Gutachter: René Theska ; Roland Füßl, Svjatoslav M. Latyev." Ilmenau : Universitätsverlag Ilmenau, 2020. http://d-nb.info/1219520284/34.

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Sparrer, Erik [Verfasser], Eberhard [Akademischer Betreuer] Manske, Mathias [Akademischer Betreuer] Weiß, and Tino [Akademischer Betreuer] Hausotte. "Ein holistisches Konzept zur Entwicklung einer innovativen, umfassenden und multisensoriellen Steuerung für Nanopositionier- und Nanomessmaschinen / Erik Sparrer. Betreuer: Eberhard Manske. Gutachter: Mathias Weiß ; Tino Hausotte." Ilmenau : Universitätsbibliothek Ilmenau, 2016. http://d-nb.info/1081935359/34.

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Sparrer, Erik Verfasser], Eberhard [Akademischer Betreuer] [Manske, Mathias [Akademischer Betreuer] Weiß, and Tino [Akademischer Betreuer] Hausotte. "Ein holistisches Konzept zur Entwicklung einer innovativen, umfassenden und multisensoriellen Steuerung für Nanopositionier- und Nanomessmaschinen / Erik Sparrer. Betreuer: Eberhard Manske. Gutachter: Mathias Weiß ; Tino Hausotte." Ilmenau : Universitätsbibliothek Ilmenau, 2016. http://nbn-resolving.de/urn:nbn:de:gbv:ilm1-2015000516.

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Kokeš, Ondřej. "Zařízení pro ovládání mikroposuvu." Master's thesis, Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií, 2010. http://www.nusl.cz/ntk/nusl-218681.

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Presented thesis analyses a function of the particular type of the nanopositioner with aim to suggest and construct an electronic device suitable for control of the nanopositioner slider. In presented material there is a description of the control signals and possibility of their generating in the respect of slider movement accuracy. The main goal of the thesis is to describe electronic units ranging from power supply, control processor unit part to end part that directly joint nanopositioner. There is also programme equipment for microcontroller and computer, communication description, movement measuring and calibration and draft for the close-up of the control loop for additional increase of the movement accuracy.

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Mastylo, Rostyslav [Verfasser], Gerd Akademischer Betreuer] Jäger, Gerhard [Akademischer Betreuer] [Linß, and Uwe [Akademischer Betreuer] Bahrs. "Optische und taktile Nanosensoren auf der Grundlage des Fokusverfahrens für die Anwendung in Nanopositionier- und Nanomessmaschinen / Rostyslav Mastylo. Gutachter: Gerhard Linß ; Uwe Bahrs. Betreuer: Gerd Jäger." Ilmenau : Universitätsbibliothek Ilmenau, 2012. http://d-nb.info/1022376519/34.

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Kirchner, Johannes [Verfasser], Eberhard [Akademischer Betreuer] Manske, Tino [Gutachter] Hausotte, and Peter [Gutachter] Lehmann. "Grundlegende Entwicklungen und Untersuchungen zur Mikro- und Nanostrukturierung durch Direct Laser Writing in Nanopositionier- und Nanomessmaschinen / Johannes Kirchner ; Gutachter: Tino Hausotte, Peter Lehmann ; Betreuer: Eberhard Manske." Ilmenau : TU Ilmenau, 2020. http://d-nb.info/1216951055/34.

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Langlotz, Enrico Jäger Gerd. "Metrologische Untersuchungen an der Nanopositionier- und Nanomessmaschine /." 2007. http://www.gbv.de/dms/ilmenau/abs/555770451langl.txt.

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陳慶韓. "Adaptive control and mechatronics implementation for three-axis nanopositioner." Thesis, 2004. http://ndltd.ncl.edu.tw/handle/57492885915519926382.

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Frank, Sebastian Weiß Mathias. "Entwurf einer modularen Steuerung für Nanopositionier- und Nanomessmaschinen /." 2007. http://www.gbv.de/dms/ilmenau/toc/548609888.PDF.

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Cheng, Chiao Hua, and 鄭喬華. "A Piezoelectric Two-Degree-of-Freedom Nanopositioner with Parallel Design." Thesis, 2018. http://ndltd.ncl.edu.tw/handle/73z47s.

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博士<br>國立交通大學<br>機械工程系所<br>106<br>This dissertation proposes a parallel design for a piezoelectric 2-degree-of-freedom nano-stepping motor, which performs translation or rotation while its two piezoelectric elements are driven in-phase or out-of-phase electrically. Compared to serial mechanism, parallel design are more compact, stiffer, and have better dynamical characteristics. Experimental results show that this device works stably. The stepping resolution/stroke values of translation and rotation are 100 nm/6 mm and 0.04°/infinite, respectively. Furthermore, flexure springs are designed to improve the operation stability, and a 2-degree-of-freedom motion sensor is integrated to solve the cross-talk problem. Experimental results show that pure translation and rotation can be achieved. The positioning resolution values of translation and rotation are 176 nm and 0.05°, respectively.

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Nguyen, Tran Trung Hausotte Tino. "Untersuchungen zur Regelung der Positioniersysteme der Nanopositionier- und Nanomessmaschine /." 2008. http://www.gbv.de/dms/ilmenau/abs/568762088nguye.txt.

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Yang, Jhih-Sheng, and 楊智盛. "Common-path Laser Encoder and Its Application in Nanopositioner with Compound Stage." Thesis, 2012. http://ndltd.ncl.edu.tw/handle/13193925983684842149.

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碩士<br>淡江大學<br>機械與機電工程學系碩士班<br>100<br>Commonly used laser encoders are in non-common path. The non-common path configuration between the measurement and reference beams are subject to environmental disturbances. These disturbances directly make measured signals noisy and cannot be essentially slashed. Accordingly, the accuracies of the conventional laser encoders are spoiled. In this thesis, a novel common-path laser encoder is proposed. It can effectively slash the environmental disturbances. It has promising potential for nanotechnology applications. The main purpose of this thesis is to build up the nanopositioner of our team for the verification of the laser encoder and the micro coordinate measuring machine. The nanopositioner is composed of three subsystems: a large-range stepper motor, a piezoelectric nanopositioner, and a position feedback subsystem of a common-path laser encoder developed by our team. These three subsystems are integrated through NI LabVIEW program. Experimental results show that for common disturbed environments, the measurement stability of the laser encoder during three hours is less than 3.95 nm, and displacement measurement resolution is estimated to be about the 0.6 nm, In the measurement of 1 um range under each step movement of 100 nm, the overall standard deviation of errors is 0.8 nm

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Kreutzer, Philipp Füßl Roland. "Monte Carlo Simulation für metrologische Modelle von Nanopositionier- und Nanomessmaschinen /." 2006. http://www.gbv.de/dms/ilmenau/abs/508963516kreut.txt.

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28

Hsuan-Han, Huang. "Design and Implementation of a New 3-DOF Electromagnetic-Nanopositioner Utilizing Flexure Mechanism." 2005. http://www.cetd.com.tw/ec/thesisdetail.aspx?etdun=U0001-2107200517271200.

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Huang, Hsuan-Han, and 黃宣翰. "Design and Implementation of a New 3-DOF Electromagnetic-Nanopositioner Utilizing Flexure Mechanism." Thesis, 2005. http://ndltd.ncl.edu.tw/handle/50264942316536656866.

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碩士<br>國立臺灣大學<br>電機工程學研究所<br>93<br>A novel, compact and three degree-of-freedom (DOF) nanopositioner with large travel ranges is presented, which can be integrated with atomic force microscope (AFM) for precise positioning. The design of the nanopositioner utilizes the monolithic parallel flexure mechanism with the built-in electromagnetic actuators and the fiber interferometers to achieve the 3-DOF motion. The whole control architecture takes the three configuration parameters measured by the three fiber interferometers and endeavors to control the 3-DOF motion through regulating the current in the electromagnetic actuators. To let the compact system be more robust and stabler in positioning, we propose an adaptive sliding-mode controller. The so developed robust control architecture consists of three components: 1) sliding mode controller, 2) adaptive law, and 3) force allocation. From the provided experimental results, satisfactory performances of the hereby developed system, including stiffness and precision, have been successfully demonstrated.

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Niebelschütz, Merten [Verfasser]. "Multifunktionale Nanoanalytik für eine Nanopositionier- und Messmaschine / vorgelegt von Merten Niebelschütz." 2009. http://d-nb.info/99803424X/34.

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Percle, Brandon Hausotte Tino. "Piezo LEGS-Antrieb und sein Einsatz in der Nanopositionier- und Nanomessmaschine /." 2007. http://www.gbv.de/dms/ilmenau/abs/525238336percl.txt.

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Chang, Po-Yi, and 張柏翌. "Stable Adaptive Control for a Three-axis Nanopositioner : Implemention using ALTERA DSP Development Board." Thesis, 2005. http://ndltd.ncl.edu.tw/handle/06772047039220460338.

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Abstract:

碩士<br>國立中興大學<br>機械工程學系<br>93<br>This thesis first considers the dynamic model, including the hysteresis effect, for a three-axis nanopositioner, and based on input-output data pairs, the unknown parameters of the system are identified via genetic algorithms. Then using the backstepping method, an adaptive controller with an observer for the dynamic hysteresis variables is designed via Lyapunov stability theory. In the stable adaptive controller, a fuzzy function approximator is also included to compensate for the identification inaccuracy, model uncertainty, and flexure coupling effect. Finally, controller implemention studies using an ALTERA DSP development board are presented to illustrate the effectiveness of the suggested control strategy.

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Li, Hao-Chen, and 李浩誠. "Discrete-time Adaptive Control and Embedded ARM-Microcontroller Implementation for a Three-axis Nanopositioner." Thesis, 2006. http://ndltd.ncl.edu.tw/handle/32156359091306396863.

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Kiesel, Felix Jäger Gerd. "Untersuchungen zur Gewichtskraftkompensation des Positioniersystems der z-Achse der Nanopositionier- und Nanomessmaschine /." 2006. http://www.gbv.de/dms/ilmenau/abs/519558553kiese.txt.

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Schmidt, Ingomar [Verfasser]. "Beiträge zur Verringerung der Positionierunsicherheit in der Nanopositionier- und Nanomessmaschine / von Ingomar Schmidt." 2008. http://d-nb.info/992922143/34.

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Orlob, Matthias Jäger Gerd. "Analyse und Vergleich der Topographie der Spiegelecken verschiedener Nanopositionier- und Nanomessmaschinen mit dem Kalibrierinterferometer /." 2007. http://www.gbv.de/dms/ilmenau/abs/555468216orlob.txt.

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Richwien, Thomas Machleidt Torsten. "Untersuchung von Methoden zum Einmessen des Sensorsystems unter Anwendung von Mikro- und Nanostrukturen am Beispiel einer Nanopositionier- und Messmaschine /." 2007. http://www.gbv.de/dms/ilmenau/abs/524074917richw.txt.

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