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Journal articles on the topic 'Optical fiber etching'

Author: Grafiati

Published: 4 June 2021

Last updated: 1 February 2022

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1

Hassan, Hafeez, Ole Bang, and Jakob Janting. "Polymer Optical Fiber Tip Mass Production Etch Mechanism to Achieve CPC Shape for Improved Biosensor Performance." Sensors 19, no. 2 (2019): 285. http://dx.doi.org/10.3390/s19020285.

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We report on a simple chemical etching method that enables nonlinear tapering of Polymer Optical Fiber (POF) tips to manufacture Compound Parabolic Concentrator (CPC) fiber tips. We show that, counter-intuitively, nonlinear tapering can be achieved by first etching the core and not the cladding. The etching mechanism is modelled and etched tips are characterized both geometrically and optically in a fluorescence glucose sensor chemistry. A Zemax model of the CPC tipped sensor predicts an optimal improvement in light capturing efficiency of a factor of 3.96 compared to the conventional sensor with a plane-cut fiber tip. A batch of eight CPC fiber tips has been manufactured by the chemical etching method. The batch average showed an increase of a factor of 3.16, which is only 20% less than the predicted value. The method is reproducible and can be up-scaled for mass production.

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2

Li, Kanglin, Jiangbing Du, Weihong Shen, Jiacheng Liu, and Zuyuan He. "Improved optical coupling based on a concave cavity lens fabricated by optical fiber facet etching." Chinese Optics Letters 19, no. 5 (2021): 050602. http://dx.doi.org/10.3788/col202119.050602.

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3

Mukhtar, Wan Maisarah, P. Susthitha Menon, and Sahbudin Shaari. "Microfabricated Fiber Probe by Combination of Electric Arc Discharge and Chemical Etching Techniques." Advanced Materials Research 462 (February 2012): 38–41. http://dx.doi.org/10.4028/www.scientific.net/amr.462.38.

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In this study, optical fiber probes were fabricated by combination of electric arc discharge and chemical etching techniques. Size of tips diameters fabricated using different etching solutions were observed. When the optical fibers were pulled and heated by the electric arc discharge using a fusion splicer, fiber tips with few microns in diameter were obtained. To minimize the tips diameter, the pulled fiber probes were etched vertically for 10 minutes using two different etching solutions namely 49% HF and HF buffer solution (49% HF and 40% NH4F) with ratio of 2:1. A thick overlayer was added on top of the HF solution to prevent dangerous vapors escape to the environment. When the tapered part of the pulled fiber (FP1) was dipped into 49% HF solution, the diameter of tip was slightly decreased from 4.41μm to 1.31μm with etching rate of 5.17x10-3 μms-1. When the pulled fiber (FP2) was etched into HF buffer solution, the etching rate was increased up to 52.35% with the etching rate of 10.85x10-3μms-1. The tip diameter was reduced from 7.01μm to 468.9 nm in diameter. Combination of “heat and pull” technique with chemical etching by using HF buffer solution produced fiber probe with small tip diameter.

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4

Huang, Yan Tang, Xiao Hua Wang, and Ri Yan Bao. "Etching Method of the Fabrication Optical Tapered Fiber and its Formula." Applied Mechanics and Materials 145 (December 2011): 520–24. http://dx.doi.org/10.4028/www.scientific.net/amm.145.520.

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Optical tapered fiber is one of the most high efficiency evanescent wave coupler for coupling light into and out the optical microcavity. We fabricated the tapered fiber with etching method in a designed groove with HF solution. This method was low cost, readily, and controllable. An etching groove had an oval in the middle and small V-shape towards both sides. HF solution was injected into the oval groove, while the deioned water was injected into the two V-grooves. Because of the solution diffusion, the etching rate was fast in the mid and decreased gradually towards both sides,the tapered fiber was fabricated. The optical power meter was monitoring the fiber transmission during the etching process. The transmission of the tapered fiber was 98%. We proposed a mathematics model to depict the etching process, containing the relationship between the diameter of tapered fiber and the concentration of the HF solution, the etching time, humidity, temperature. We supervised the optical intensity to deduce the tapered fiber diameter. Surface morphology with AFM was detected, the roughness of the tapered fiber surface is less than 1nm. As an evanescent coupler, we used the tapered fiber to transmit 980nm pump laser to couple to Er3+doped microsphere to stimulate 1557nm laser.

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5

Taguchi, Kozo, and Motohiko Takatsu. "Chemically Etched Axicon Fiber as a Sensor Probe of Optical Coherence Tomography." Key Engineering Materials 625 (August 2014): 754–58. http://dx.doi.org/10.4028/www.scientific.net/kem.625.754.

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In this paper, we investigated a high lateral resolution common-path Fourier domain OCT system with the use of a chemically etched single mode fiber. In our experiments, single mode optical fiber for 840nm was used for preparing the tapered tips. Our system used a conical microlens that was chemically etched by selective chemical etching technique using an etching solution of buffered hydrofluoric acid (BHF). From experimental results, we verified that our proposed optical coherence tomography system could operate as a common-path Fourier domain OCT (FD-OCT) system. Furthermore, we experimentally investigated the chemical etching process of silica-based optical fiber probes by controlling the etching time when applying chemical etching techniques using hydrofluoric acid. We evaluated the beam profile from fiber probe. From these investigations, it was found that etching time was important parameter for sensor probe of optical coherence tomography.

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6

Ti, Chaoyang, Yao Shen, Yiming Lei, and Yuxiang Liu. "Optical Trapping of Sub−Micrometer Particles with Fiber Tapers Fabricated by Fiber Pulling Assisted Chemical Etching." Photonics 8, no. 9 (2021): 367. http://dx.doi.org/10.3390/photonics8090367.

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Optical trapping of sub−micrometer particles in three dimensions has been attracting increasing attention in a wide variety of fields such as physics, chemistry, and biologics. Optical fibers that allow stable trapping of such particles are not readily available but beneficial in system integration and miniaturization. Here, we present a readily accessible batch fabrication method, namely fiber pulling assisted tubeless chemical etching, to obtain sharp tapered optical fibers from regular telecommunication single−mode fibers. We demonstrated the applications of such fiber tapers in two non−plasmonic optical trapping systems, namely single− and dual−fiber−taper−based trapping systems. We realized single particle trapping, multiple particle trapping, optical binding, and optical guiding with sub−micrometer silica particles. Particularly, using the dual fiber system, we observed the three−dimensional optical trapping of swarm sub−micrometer particles, which is more challenging to realize than trapping a single particle. Because of the capability of sub−micrometer particle trapping and the accessible batch fabrication method, the fiber taper−based trapping systems are highly potential tools that can find many applications in biology and physics.

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7

Liu, Quan, Jian Hong Wu, Ling Ling Fang, and Chao Ming Li. "Fabrication of Phase Mask for Optical Fiber Grating." Key Engineering Materials 364-366 (December 2007): 719–23. http://dx.doi.org/10.4028/www.scientific.net/kem.364-366.719.

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A fused silica phase mask with the period of 1069nm, and ruled area 50×50mm2 has been fabricated by a new technique, which combines holographic-ion beam etching and reactive ion beam etching. This involves several steps: coating of substrates with controlled thickness of photoresist, formation of a grating mask by holograph interference exposure and development, and finally transferring etching of this mask into the fused silica substrate to form a permanent phase mask. Experimental measurements have shown that the zero order diffraction efficiency is less than 4% and the plus and minus first-order diffraction efficiency is more than 35%. Theoretical analysis has shown that these phase masks can be used for fabricating UV written Fiber Bragg Gratings.

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8

KUMAZAKI, Hironori, Yoshihisa YAMADA, Seiki INABA, and Kazuhiro HANE. "Micromachining of Optical Fiber by Reactive Ion Etching." SHINKU 43, no. 10 (2000): 992–95. http://dx.doi.org/10.3131/jvsj.43.992.

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9

Yuan, Yinquan, Lina Wang, Liyun Ding, and Chenhui Wu. "Theory, experiment, and application of optical fiber etching." Applied Optics 51, no. 24 (2012): 5845. http://dx.doi.org/10.1364/ao.51.005845.

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10

Pallarés-Aldeiturriaga, David, Pablo Roldán-Varona, Luis Rodríguez-Cobo, and José Miguel López-Higuera. "Optical Fiber Sensors by Direct Laser Processing: A Review." Sensors 20, no. 23 (2020): 6971. http://dx.doi.org/10.3390/s20236971.

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The consolidation of laser micro/nano processing technologies has led to a continuous increase in the complexity of optical fiber sensors. This new avenue offers novel possibilities for advanced sensing in a wide set of application sectors and, especially in the industrial and medical fields. In this review, the most important transducing structures carried out by laser processing in optical fiber are shown. The work covers different types of fiber Bragg gratings with an emphasis in the direct-write technique and their most interesting inscription configurations. Along with gratings, cladding waveguide structures in optical fibers have reached notable importance in the development of new optical fiber transducers. That is why a detailed study is made of the different laser inscription configurations that can be adopted, as well as their current applications. Microcavities manufactured in optical fibers can be used as both optical transducer and hybrid structure to reach advanced soft-matter optical sensing approaches based on optofluidic concepts. These in-fiber cavities manufactured by femtosecond laser irradiation followed by chemical etching are promising tools for biophotonic devices. Finally, the enhanced Rayleigh backscattering fibers by femtosecond laser dots inscription are also discussed, as a consequence of the new sensing possibilities they enable.

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11

Pevec, Simon, Borut Lenardic, and Denis Donlagic. "Miniature, All-Silica, Fiber Optics Sensors Produced by Selective Etching of Phosphorus Doped Silica Glass." Proceedings 2, no. 13 (2018): 1095. http://dx.doi.org/10.3390/proceedings2131095.

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12

Irawan, Rudi, Tjin Swee Chuan, Tay Chia Meng, and Tan Khay Ming. "Rapid Constructions of Microstructures for Optical Fiber Sensors Using a Commercial CO2 Laser System." Open Biomedical Engineering Journal 2, no. 1 (2008): 28–35. http://dx.doi.org/10.2174/1874120700802010028.

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Exposing an optical fiber core to the measurand surrounding the fiber is often used to enhance the sensitivity of an optical fiber sensor. This paper reports on the rapid fabrication of microstructures in an optical fiber using a CO2 laser system which help exposing the optical fiber core to the measurand. The direct-write CO2 laser system used is originally designed for engraving the polymeric material. Fabrications of microstructures such as in-fiber microhole, D-shaped fiber, in-fiber microchannel, side-sliced fiber and tapered fiber were attempted. The microstructures in the fibers were examined using a SEM and an optical microscope. Quality of microstructures shown by the SEM images and promising results from fluorescence sensor tests using in-fiber microchannels of 100μm width, 210μm depth and 10mm length show the prospect of this method for use in optical fiber sensor development. The direct-write CO2 laser system is a flexible and fast machining tool for fabricating microstructures in an optical fiber, and can possibly be a replacement of the time consuming chemical etching and polishing methods used for microstructure fabrications of optical the fiber sensors reported in other literatures.

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13

ZHONG Nian-bing, 钟年丙, 王永忠 WANG Yong-zhong, 廖强 LIAO Qiang, 朱恂 ZHU Xun, and 陈蓉 CHEN Rong. "Effect of flow etching method on wet etching properties of silica optical fiber." Optics and Precision Engineering 21, no. 8 (2013): 1966–73. http://dx.doi.org/10.3788/ope.20132108.1966.

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14

Ge, Yixian, Junping Zhou, and Xiaoli Mao. "Miniature fiber pressure sensor based on fiber etching." Optik 124, no. 1 (2013): 4–7. http://dx.doi.org/10.1016/j.ijleo.2011.11.009.

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15

ZHONG Nian-bing, 钟年丙, 廖强 LIAO Qiang, 朱恂 ZHU Xun, 王永忠 WANG Yong-zhong, and 陈蓉 CHEN Rong. "Application of ultrasonic technology to etching silica optical fiber." Optics and Precision Engineering 20, no. 5 (2012): 988–95. http://dx.doi.org/10.3788/ope.20122005.0988.

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16

Chenari, Z., H. Latifi, S. Ghamari, R. S. Hashemi, and F. Doroodmand. "Adiabatic tapered optical fiber fabrication in two step etching." Optics & Laser Technology 76 (January 2016): 91–95. http://dx.doi.org/10.1016/j.optlastec.2015.05.024.

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17

Mulyanti, Budi, Faizar Abdurrahman, Roer Eka Pawinanto, Agus Heri, and Gandi Sugandi. "Fabrication of Polymer Optical Fiber as Intrinsic Optical Sensor Using Etching Technique." Advanced Science Letters 23, no. 2 (2017): 1310–13. http://dx.doi.org/10.1166/asl.2017.8384.

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18

Haque, Moez, Kenneth K. C. Lee, Stephen Ho, Luís A. Fernandes, and Peter R. Herman. "Chemical-assisted femtosecond laser writing of lab-in-fibers." Lab Chip 14, no. 19 (2014): 3817–29. http://dx.doi.org/10.1039/c4lc00648h.

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19

Schulze, Sven, Michel Wehrhold, and Carsten Hille. "Femtosecond-Pulsed Laser Written and Etched Fiber Bragg Gratings for Fiber-Optical Biosensing." Sensors 18, no. 9 (2018): 2844. http://dx.doi.org/10.3390/s18092844.

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We present the development of a label-free, highly sensitive fiber-optical biosensor for online detection and quantification of biomolecules. Here, the advantages of etched fiber Bragg gratings (eFBG) were used, since they induce a narrowband Bragg wavelength peak in the reflection operation mode. The gratings were fabricated point-by-point via a nonlinear absorption process of a highly focused femtosecond-pulsed laser, without the need of prior coating removal or specific fiber doping. The sensitivity of the Bragg wavelength peak to the surrounding refractive index (SRI), as needed for biochemical sensing, was realized by fiber cladding removal using hydrofluoric acid etching. For evaluation of biosensing capabilities, eFBG fibers were biofunctionalized with a single-stranded DNA aptamer specific for binding the C-reactive protein (CRP). Thus, the CRP-sensitive eFBG fiber-optical biosensor showed a very low limit of detection of 0.82 pg/L, with a dynamic range of CRP detection from approximately 0.8 pg/L to 1.2 µg/L. The biosensor showed a high specificity to CRP even in the presence of interfering substances. These results suggest that the proposed biosensor is capable for quantification of CRP from trace amounts of clinical samples. In addition, the adaption of this eFBG fiber-optical biosensor for detection of other relevant analytes can be easily realized.

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20

Chambers, F. A., and L. S. Wilkiel. "Cesium hydroxide etching of (100) silicon (for optical fiber attachment)." Journal of Micromechanics and Microengineering 3, no. 1 (1993): 1–3. http://dx.doi.org/10.1088/0960-1317/3/1/001.

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21

Son, Gyeongho, Youngho Jung, and Kyoungsik Yu. "Tapered Optical Fiber Couplers Fabricated by Droplet-Based Chemical Etching." IEEE Photonics Journal 9, no. 5 (2017): 1–8. http://dx.doi.org/10.1109/jphot.2017.2738661.

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22

Zelgowski, Julien, Andri Abdurrochman, Frederic Mermet, Pierre Pfeiffer, Joël Fontaine, and Sylvain Lecler. "Photonic jet subwavelength etching using a shaped optical fiber tip." Optics Letters 41, no. 9 (2016): 2073. http://dx.doi.org/10.1364/ol.41.002073.

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23

Oh, Kwang H., and Sung Ho Jeong. "Laser-Based Fe-36%Ni (Invar®) Alloy Processing with Deep Microgrooves in Aqueous Solutions." Materials Science Forum 580-582 (June 2008): 503–6. http://dx.doi.org/10.4028/www.scientific.net/msf.580-582.503.

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The micromachining technique for the fabrication of Fe-36%Ni (Invar®) microgrooves using a novel laser-induced wet etching system with an optical fiber as the light waveguide and machining tool is investigated. Microgrooves fabricated at the optimal process conditions with the proposed etching system have good surface morphology and dimensional accuracy. It is shown that the variation of etch profiles such as etch width and depth depends significantly upon the process parameters. Fiber damage, which is attributed to macrobubbles, can be dramatically reduced by adjusting the distance between the workpiece surface and the fiber terminal. The effects of process parameters such as laser power, scan speed, and threshold distance on etch width, depth, and crosssectional profiles are reported and the optimal process conditions to fabricate Invar® microgrooves with excellent shape and size are provided. Also, the applicability of the Invar® microgrooves for the manufacturing of shadow mask for an organic light emitting diode (OLED) is demonstrated.

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24

Tan, Rex, Daryl Ho, Chun Tse, et al. "Birefringent Bragg Grating in C-Shaped Optical Fiber as a Temperature-Insensitive Refractometer." Sensors 18, no. 10 (2018): 3285. http://dx.doi.org/10.3390/s18103285.

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We demonstrate a simple-to-fabricate refractometer based on the inscription of fiber Bragg gratings in a special C-shaped optical fiber. The C-shaped fiber was drawn into shape using a quarter cladding removed preform of a commercial standard single-mode fiber by simple machining. The sensor did not suffer from cross-sensitivity of the refractive index with ambient temperature fluctuations, commonly occurring with many optical fiber refractometers. A refractive index sensitivity of 1300 pm per refractive index unit (RIU) was achieved without employing any additional sensitization techniques such as tapering or etching.

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25

Taguchi, Kozo, and Masafumi Totsuka. "Chemically Etched Single Mode Fiber Tip for High Lateral Resolution Imaging in Optical Coherence Tomography." Key Engineering Materials 516 (June 2012): 585–90. http://dx.doi.org/10.4028/www.scientific.net/kem.516.585.

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In this paper, we propose a high lateral resolution common-path Fourier domain optical coherence tomography (OCT) system with the use of a chemically etched single mode fibre. In our experiments, a single mode optical fibre of 840 nm was used for preparing the tapered tips. Our system used a conical microlens that was chemically etched by a selective chemical etching technique using an etching solution of buffered hydrofluoric acid (BHF). From the experimental results, we verified that our proposed optical coherence tomography system could operate as a common-path Fourier domain OCT system and the apex angle of the chemically etched single mode fibre tip was a very important parameter for generating high-resolution OCT images.

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26

Taguchi, Kozo, Jun Okada, and Nobuyuki Watanabe. "Investigation on Dynamic Chemical Etching of Fiber Probe for Cell Isolation." Key Engineering Materials 523-524 (November 2012): 1065–69. http://dx.doi.org/10.4028/www.scientific.net/kem.523-524.1065.

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A novel single fiber optic tweezers was proposed for cell isolation. Fiber tips were fabricated by dynamic chemical etching. The mechanically cleaved bare single mode fiber was dipped into Hydrofluoric acid containing a protective layer of Toluene at the top. By moving the fiber at variable speeds, a variety of tip shapes could be created. In our experiments, tip angle could be adjusted from 7deg to 55deg. Three-dimensional optical trap of a yeast cell could be formed by the fiber tip with less than 23deg tip.

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27

Tai, Yi-Hsin, Po-Cheng Tsai, Ya-Lun Ho, Jean-Jacques Delaunay, and Pei-Kuen Wei. "Combination of an Axicon Fiber Tip and a Camera Device into a Sensitive Refractive Index Sensor." Sensors 19, no. 22 (2019): 4911. http://dx.doi.org/10.3390/s19224911.

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An axicon fiber tip combined with a camera device is developed to sensitively detect refractive indexes in solutions. The transparent axicon tips were made by etching optical fibers through a wet end-etching method at room temperature. When the axicon fiber tip was immersed in various refractive index media, the angular spectrum of the emitted light from the axicon fiber tip was changed. Using a low numerical aperture lens to collect the directly transmitted light, a high intensity sensitivity was achieved when the tip cone angle was about 35 to 40 degrees. We combined the axicon fiber tip with a laser diode and a smartphone into a portable refractometer. The front camera of the smartphone was used to collect the light emitted from the axicon fiber tip. By analyzing the selected area of the captured images, the refractive index can be distinguished for various solutions. The refractive index sensitivity was up to 56,000%/RIU, and the detection limit was 1.79 × 10−5 RIU. By measuring the refractive index change via the axicon fiber tip, the concentration of different mediums can be sensitively detected. The detection limits of the measurement for sucrose solutions, saline solutions, and diluted wine were 8.86 × 10−3 °Bx, 0.12‰, and 0.35%, respectively.

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28

Janting, Jakob, Jens K. M. Pedersen, Rune Inglev, Getinet Woyessa, Kristian Nielsen, and Ole Bang. "Effects of Solvent Etching on PMMA Microstructured Optical Fiber Bragg Grating." Journal of Lightwave Technology 37, no. 18 (2019): 4469–79. http://dx.doi.org/10.1109/jlt.2019.2902244.

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29

Liu, Dameng, Jiachen Liu, Hui Wang, and Tianmin Shao. "Laser etching of groove structures with micro-optical fiber-enhanced irradiation." Nanoscale Research Letters 7, no. 1 (2012): 318. http://dx.doi.org/10.1186/1556-276x-7-318.

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30

Kumazaki, Hironori, Yoshihisa Yamada, Takamasa Oshima, Seiki Inaba, and Kazuhiro Hane. "Micromachining of Optical Fiber Using Reactive Ion Etching and Its Application." Japanese Journal of Applied Physics 39, Part 1, No. 12B (2000): 7142–44. http://dx.doi.org/10.1143/jjap.39.7142.

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31

Taguchi, Kozo. "Two-Dimensional Cell Trapping Using Single Axicon Fiber without Physical Contact." Key Engineering Materials 523-524 (November 2012): 1070–75. http://dx.doi.org/10.4028/www.scientific.net/kem.523-524.1070.

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Chemically etched axicon fiber was proposed for two-dimensional cell trapping. We fabricated axicon micro lenses on a single-mode bare optical fiber by selective chemical etching technique. The laser beam from fiber axicon microlens was strongly focused and optical forces were sufficient to move a microorganisms and biological cells without physical contact. The apex angle of the chemically etched fiber axicon microlens was very important parameter for laser trapping. From these experimental results, it was found that our proposed method was a promising tool for the isolation of microorganisms.

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32

IRAWAN, R., G. B. SCELSI, and G. A. WOOLSEY. "OPTICAL FIBER SENSING OF SF6 DEGRADATION IN HIGH-VOLTAGE SWITCHGEAR." Journal of Nonlinear Optical Physics & Materials 10, no. 02 (2001): 181–95. http://dx.doi.org/10.1142/s021886350100053x.

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Sulphur hexafluoride ( SF 6) is used as an insulator in high-voltage systems. An electrical breakdown dissociates ( SF 6). Therefore, the insulating efficiency is degraded. If the ( SF 6) is not renewed, failure of the system can occur. A monitoring device for ( SF 6) loss is required, and an optical fiber sensor for continuous monitoring of ( SF 6) degradation in high-voltage switchgear has been developed. Dissociation products of the ( SF 6) discharge include HF and atomic F, both of which react readily with silica. This reactivity is utilized in our sensor, where etching of a glass fiber surface modifies the transmission characteristics of the fiber.

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33

Taguchi, Kozo, and Takuya Hayashi. "Experimental Investigation of Cell Cloning Efficiency after Optical Trapping." Key Engineering Materials 625 (August 2014): 695–99. http://dx.doi.org/10.4028/www.scientific.net/kem.625.695.

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In this paper, chemically etched axicon fiber was investigated for laser trapping of micro-object dispersed in liquid. We fabricated axicon micro lenses on a single-mode bare optical fiber by selective chemical etching technique. The laser beam from fiber axicon microlens was strongly focused and optical forces were sufficient to move a microorganisms and biological cells without physical contact. In our experiments, several different lasers with various wavelengths were used as light sources. From these experimental results, it was found that laser wavelength was very important parameter for cell trapping and laser wavelength should be selected to avoid absorption by cells in order to prevent thermal degradation and damage to the cells.

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34

Taguchi, Kozo, and Shinya Imanaka. "Laser Trapping Using a Fiber Axicon Microlens." Key Engineering Materials 516 (June 2012): 580–84. http://dx.doi.org/10.4028/www.scientific.net/kem.516.580.

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In this paper, chemically etched axicon fibre was proposed for laser trapping of micro-objects dispersed in liquid. We fabricated axicon microlenses on a single-mode bare optical fibre using a selective chemical etching technique. The laser beam from a fibre axicon microlens was strongly focused and optical forces were sufficient to move microorganisms and biological cells without physical contact. From the experimental results, it was found that our proposed fibre axicon microlens is a promising tool for cell trapping and the apex angle of the chemically etched fibre axicon microlens is a very important parameter for laser trapping.

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35

Mekaru, Harutaka, and Takayuki Yano. "Patterning of Spiral Structure on Optical Fiber by Focused-Ion-Beam Etching." Japanese Journal of Applied Physics 51 (June 20, 2012): 06FB01. http://dx.doi.org/10.1143/jjap.51.06fb01.

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36

Zhu, Wei, Tielin Shi, Zirong Tang, Bo Gong, Guanglan Liao, and John Tully. "Dynamic selective etching: a facile route to parabolic optical fiber nano-probe." Optics Express 21, no. 6 (2013): 6919. http://dx.doi.org/10.1364/oe.21.006919.

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37

Liu, Y. X., B. Zhang, N. Zhang, and Z. L. Liu. "Fabricating fiber probes for optical tweezers by an improved tube etching method." Applied Optics 58, no. 29 (2019): 7950. http://dx.doi.org/10.1364/ao.58.007950.

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38

Mekaru, Harutaka, and Takayuki Yano. "Patterning of Spiral Structure on Optical Fiber by Focused-Ion-Beam Etching." Japanese Journal of Applied Physics 51, no. 6S (2012): 06FB01. http://dx.doi.org/10.7567/jjap.51.06fb01.

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39

Marshall, A., and K. Hallam. "Fluorine doping and etching reactions of freon 12 in optical fiber manufacture." Journal of Lightwave Technology 4, no. 7 (1986): 746–50. http://dx.doi.org/10.1109/jlt.1986.1074829.

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40

Zheng, Yu, and Jian Duan. "Materials and Fabrication Issues of Micro V-Groove for Optoelectronics Packaging." Advanced Materials Research 295-297 (July 2011): 1330–34. http://dx.doi.org/10.4028/www.scientific.net/amr.295-297.1330.

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Micro V-groove is an important optical component in the packaging of optoelectronic devices, which holds the position of the optical fibers. The micro V-groove can be fabricated by three main techniques on different materials: wet etching, ultra precision machining and molding press. The main parameters, which determine the micro V-groove quality, include core pitch, surface roughness and cured adhesive height. In this paper, three fabrication techniques are discussed to address the future needs of the next-generation optical fiber communication technology. The advantages and disadvantages of each fabrication technique are discussed with the quality issues. The findings can be served as guides for the materials and fabrication in micro V-groove in optoelectronic packaging.

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41

WANG, XIBIN, JIAN SUN, LIN JIN, et al. "FABRICATION OF SU-8 BASED ELECTRO-OPTIC SWITCH USING ALL-WET ETCHING TECHNIQUE." Modern Physics Letters B 27, no. 04 (2013): 1350024. http://dx.doi.org/10.1142/s0217984913500243.

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Polymeric Disperse Red 1 (DR1)/SU-8 electro-optic (EO) switch incorporating inverted-rib waveguide structure is designed and fabricated by all-wet etching process. The guest-host EO material DR1/SU-8 has been successfully synthetized and its optical properties are characterized in detail. The DR1/SU-8 material presents a low processing cost, an excellent photostability and a large EO coefficient of 15.4 pm/V. The characteristic parameters of both the inverted-rib waveguide and the coplanar waveguide electrodes are carefully designed and simulated. By all-wet etching process, the optimized Mach–Zehnder interferometer switch is successfully fabricated with a lower fiber-to-fiber insertion loss of 9.6 dB. The switch rise time and fall time are 322 ns and 294 ns, respectively.

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SUN JIA-LIN, TIAN GUANG-YAN, LI QIN, et al. "FABRICATION OF LARGE CONE ANGLE OPTICAL FIBER PROBE BY DYNAMIC CHEMICAL ETCHING METHOD." Acta Physica Sinica 50, no. 12 (2001): 2382. http://dx.doi.org/10.7498/aps.50.2382.

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CHEN Ji-min, 陈继民, 何超 HE Chao, 周伟平 ZHOU Wei-ping, and 申雪飞 SHEN Xue-fei. "Fabrication of binary diffractive optical element by fiber laser induced backside dry etching." Optics and Precision Engineering 20, no. 1 (2012): 31–37. http://dx.doi.org/10.3788/ope.20122001.0031.

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Zhao, Mingfu, Lang Dai, Nianbing Zhong, et al. "Wet etching technique for fabrication of a high-quality plastic optical fiber sensor." Applied Optics 56, no. 31 (2017): 8845. http://dx.doi.org/10.1364/ao.56.008845.

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Abid, Alexandre, Shiv Mittal, and Christos Boutopoulos. "Etching-enabled extreme miniaturization of graded-index fiber-based optical coherence tomography probes." Journal of Biomedical Optics 25, no. 03 (2019): 1. http://dx.doi.org/10.1117/1.jbo.25.3.032006.

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Okayama, Toru, and Hidehiro Seki. "Fabrication and Evaluation of Silica-based Optical Fiber Probes by Chemical Etching Method." Optical Review 12, no. 1 (2005): 25–28. http://dx.doi.org/10.1007/s10043-005-0025-y.

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Micheletto, Ruggero, Masatoshi Yokokawa, Satoshi Okazakaki, and Yoichi Kawakami. "Fabrication of an Atomic Resolution Low Cost STM-SNOM Hybrid Probe." Journal of Nanoscience and Nanotechnology 6, no. 1 (2006): 72–76. http://dx.doi.org/10.1166/jnn.2006.109.

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We derived a simple method to fabricate STM-SNOM hybrid probes obtained from commercial cheap communication optical fibers. The tips are fabricated by a methodology that combines two well-known techniques: the selective attack by a buffered solution and the protected layer chemical etching, in a single new one-step technique. The tailored probes are then sputtered by metal and mounted on a STM setup. The usual difficulties of integrating the optical fiber in the STM head are solved originally with a particular home made mount described in details. We will show that the resulting probes reach atomic resolution on both vertical and horizontal scale, and that the optical imaging is free of artifacts and satisfactory with a lateral resolution in the order of λ/20, as far as we know the finest resolution obtained with a system based on a hybrid fiber probe. We believe that our methodology is very interesting for its simplicity of realization and for the good resolving power in both SNOM and STM modes.

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Chen, X., K. Zhou, L. Zhang, and I. Bennion. "Optical Chemsensors Utilizing Long-Period Fiber Gratings UV-Inscribed in D-Fiber With Enhanced Sensitivity Through Cladding Etching." IEEE Photonics Technology Letters 16, no. 5 (2004): 1352–54. http://dx.doi.org/10.1109/lpt.2004.826148.

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Liu, Yu Jin, Ying Dong, Deng Peng Yuan, and Tian Jian Li. "Design and Fabrication of a SOI Optical Waveguide Sensing Platform for Biochemical Sensor Application." Key Engineering Materials 645-646 (May 2015): 777–82. http://dx.doi.org/10.4028/www.scientific.net/kem.645-646.777.

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A micro biochemical sensor based on a SOI optical waveguide sensing platform is reported in this article. The sensing platform utilizes a Mach-Zehnder Interferometer (MZI) configuration. In order to satisfy the single-mode transmission condition of the waveguide and match the coupling size of standard single-mode fiber, a ridge waveguide structure is adopted to construct the MZI configuration. The key parameters of the waveguide are optimized by FDTD method. A process composed of contact exposure photolithography and Inductively Coupled Plasma (ICP) etching technology has been worked out for the fabrication of the optical waveguide sensing platform on SOI wafer. In the process, only one photolithographic mask is used. The mask is designed to have several patterns including an array of MZI configurations for multiple species sensing, a group of ridge waveguides with different key parameters as test references, and a group of geometric compensation schemes to test the methods of modifying the deviation which may arise during the ICP etching step. Process simulations are conducted to predict the exposure and etching results, which give strong support to the fabrication process control. Lithography problems including photoresist desquamation and line narrowing are solved to achieve the special structure.

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Sayah, A., C. Philipona, P. Lambelet, M. Pfeffer, and F. Marquis-Weible. "Fiber tips for scanning near-field optical microscopy fabricated by normal and reverse etching." Ultramicroscopy 71, no. 1-4 (1998): 59–63. http://dx.doi.org/10.1016/s0304-3991(97)00106-x.

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