Relevant bibliographies by topics / Optical method ellipsometry

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  1. Journal articles
  2. Dissertations / Theses
  3. Books
  4. Book chapters
  5. Conference papers

Academic literature on the topic 'Optical method ellipsometry'

Author: Grafiati
Published: 28 May 2022
Last updated: 31 July 2025

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Journal articles on the topic "Optical method ellipsometry"

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Jin, Lianhua, Sota Mogi, Tsutomu Muranaka, Eiichi Kondoh, and Bernard Gelloz. "Characterization of thin films from reflection and transmission ellipsometric parameters." Japanese Journal of Applied Physics 61, no. 1 (2022): 018004. http://dx.doi.org/10.35848/1347-4065/ac42af.

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Abstract Spectroscopic ellipsometry is a powerful tool for the characterization of thin films/surfaces. To simultaneously extract optical constant and film thickness from ellipsometric parameters ψ and Δ, dispersion models of material’s refractive index and spectroscopic ellipsometry measurement have been often required. In this work, we propose an extraction method of optical parameters of thin films from the reflection and transmission ellipsometric parameters. This method necessitates neither spectroscopic information of ψ and Δ, nor dispersion models. Verification measurements were carried
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Zereay, Berhane Nugusse, Sándor Kálvin, György Juhász, et al. "Optical Calibration of a Multi-Color Ellipsometric Mapping Tool Fabricated Using Cheap Parts." Photonics 11, no. 11 (2024): 1036. http://dx.doi.org/10.3390/photonics11111036.

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We developed and applied a new calibration method to make more accurate measurements with our multi-color ellipsometric mapping tool made from cheap parts. Ellipsometry is an optical technique that measures the relative change in the polarization state of the measurement beam induced by reflection from or transmission through a sample. During conventional ellipsometric measurement, the data collection is relatively slow and measures one spot at a time, so mapping needs a long time compared with our new optical mapping equipment made by an ordinary color LED monitor and a polarization-sensitive
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Svitasheva, Svetlana. "Ellipsometry as Testing Method of Properties of Nano-Scale Films." Applied Mechanics and Materials 749 (April 2015): 146–54. http://dx.doi.org/10.4028/www.scientific.net/amm.749.146.

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Ellipsometry is power instrument for testing several properties of thin films. Advantage and attractiveness of these optical studies consist in that they are non-destructive and non-disturbing. High sensitivity to surface state allows us to monitoring properties of films beginning from atomic scale as in-situ and as ex situ. Ellipsometry give us information about film thickness, and film composition, and its surface morphology. From analysis of ellipsometric spectra it is possible get data about zone structure of semiconductor materials, such as energy of critical points, absorption edge locat
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Jahangirli Z. A., Mamedova I. A., Huseynova Sh. T., et al. "Ab initio calculations and experimental study of the electronic properties of CdGa-=SUB=-2-=/SUB=-S-=SUB=-4-=/SUB=- single crystals by spectral ellipsometry." Physics of the Solid State 64, no. 3 (2022): 339. http://dx.doi.org/10.21883/pss.2022.03.53190.211.

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The electronic properties of CdGa2S4 single crystals have been studied experimentally using spectral ellipsometry and theoretically from first principles using density functional theory (DFT). Using ellipsometric studies in the energy range of 0.7-6.5 eV, the imaginary and real parts of the dielectric function along and perpendicular to the optical axis, the dispersion of the refractive, extinction, and absorption coefficients are determined. The width of the direct band gap is estimated. The band structure, the origin of the energy states, the optical functions, and the partial densities of s
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Chen, Chia-Wei, Matthias Hartrumpf, Thomas Längle, and Jürgen Beyerer. "Measurement of ellipsometric data and surface orientations by modulated circular polarized light / Messung von ellipsometrischen Daten und Oberflächenorientierungen durch moduliertes zirkular polarisiertes Licht." tm - Technisches Messen 86, s1 (2019): 32–36. http://dx.doi.org/10.1515/teme-2019-0047.

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AbstractEllipsometry is a widely used optical method for the characterization of materials and thin films. However, only flat or nearly flat surfaces can be measured since small deviations of the angle of incidence might lead to significant experimental errors. In order to overcome the geometrical limitations of ellipsometry, the retroreflex ellipsometry developed at Fraunhofer IOSB is used. Based on this configuration, a new illumination method is proposed. When the sample is illuminated by modulated circular polarized light (LCP and RCP), the ellipsometric parameters (Ψ, Δ) and the tilted an
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Bednarski, Henryk, Barbara Hajduk, Paweł Jarka, and Pallavi Kumari. "Temperature Coefficient of Electronic Polarizability in Thin Polymer Films Deposited on Si and SiO2 Substrates Determined via Spectroscopic Ellipsometry." Coatings 14, no. 2 (2024): 166. http://dx.doi.org/10.3390/coatings14020166.

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Ellipsometry is widely used to determine the thermo-optical properties of thin polymer films. However, if the thermo-optic coefficient (TOC) and the linear thermal expansion coefficient (LTEC) are to be used to determine the temperature coefficient of electronic polarizability (TCEP) in thin polymer films, their values must be determined with the greatest possible accuracy, as both have the opposite effect. In this article, we analyze changes in ellipsometric parameters resulting from changes in the thin film temperature in order to develop a data analysis method for temperature-dependent spec
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Ibrahimova, L. N., Kh N. Ahmadova, M. E. Aliyev, and Y. I. Aliyev. "Study of CdSe thin films using the spectroscopic ellipsometry method." Chalcogenide Letters 21, no. 12 (2024): 1035–39. https://doi.org/10.15251/cl.2024.2112.1035.

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In this research, we investigated the optical properties of CdSe thin films on glass substrates using spectroscopic ellipsometry. The samples were analysed using an M-2000 rotation compensator spectroscopic ellipsometer at room temperature, covering a photon energy range of 1.5-7.0 eV. We used an appropriate dispersion model to obtain the spectral dispersion of the optical constants. We calculated the thickness, dielectric permittivity (real and imaginary parts), refraction, and extinction coefficients of the thin layers. The results showed high transparency that varied with the size of the Cd
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Plikusienė, Ieva, Ernesta Bužavaitė-Vertelienė, Vincentas Mačiulis, Audrius Valavičius, Almira Ramanavičienė, and Zigmas Balevičius. "Application of Tamm Plasmon Polaritons and Cavity Modes for Biosensing in the Combined Spectroscopic Ellipsometry and Quartz Crystal Microbalance Method." Biosensors 11, no. 12 (2021): 501. http://dx.doi.org/10.3390/bios11120501.

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Low-cost 1D plasmonic photonic structures supporting Tamm plasmon polaritons and cavity modes were employed for optical signal enhancement, modifying the commercially available quartz crystal microbalance with dissipation (QCM-D) sensor chip in a combinatorial spectroscopic ellipsometry and quartz microbalance method. The Tamm plasmon optical state and cavity mode (CM) for the modified mQCM-D sample obtained sensitivity of ellipsometric parameters to RIU of ΨTPP = 126.78 RIU−1 and ΔTPP = 325 RIU−1, and ΨCM = 264 RIU−1 and ΔCM = 645 RIU−1, respectively. This study shows that Tamm plasmon and ca
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Bazarov, Valerii V., V. F. Valeev, V. I. Nuzhdin, Yu N. Osin, G. G. Gumarov, and Andrey L. Stepanov. "Spectral Ellipsometry of Cobalt-Ions Implanted Silicon Surface." Solid State Phenomena 233-234 (July 2015): 526–29. http://dx.doi.org/10.4028/www.scientific.net/ssp.233-234.526.

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Monocrystalline silicon wafers implanted by cobalt ions with energy of 40 keV at a fluence range from 6.6×1012 to 2.5×1017 Co+-ion/cm2 were investigated by optical spectroscopic ellipsometry. By comparison of experimental data with modeling it is shown that the ellipsometric measurements are accurate and reliable method for monitoring of a low-dose ion implantation process.
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Pacheco, F., R. Palomino, G. Martínez, A. Mendoza-Galván, R. Rodriguez, and V. M. Castaño. "Optical Properties of Titania-Cobalt Nitrate Composite Thin Films." Advanced Composites Letters 5, no. 6 (1996): 096369359600500. http://dx.doi.org/10.1177/096369359600500603.

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Optical properties of titania thin films supported on silica plates and compounded with varying amounts of Co(II) from cobalt nitrate are reported. The ellipsometric characterization allows to model the spatial micro-structure of these thin film composites. The titania films were produced by the sol-gel method at room temperature and their thicknesses can be controlled by modifying the experimental conditions. The refractive index of the doped titania films was also determined by using ellipsometry.
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Dissertations / Theses on the topic "Optical method ellipsometry"

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Костенко, Максим Володимирович, Максим Володимирович Костенко, Maksym Volodymyrovych Kostenko, Максим Геннадійович Демиденко, Максим Геннадьевич Демиденко та Maksym Hennadiiovych Demydenko. "Оптичні властивості одношарових плівок Co, Fe і Cu". Thesis, Сумський державний університет, 2015. http://essuir.sumdu.edu.ua/handle/123456789/40922.

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При досліджені фізичних властивостей нанорозмірних багатошарових плівкових структур важливо знати товщини окремих шарів. Зазвичай їх визначають в процесі конденсації методом кварцового резонатора. Після завершення конденсації можна легко визначити загальну товщину плівкової системи, а такий структурний параметр як товщина окремого шару можна визначити руйнівними методами або неруйнівними методами рентгенівської рефлектометрії або еліпсометрії.
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Helms, Daniel Lynn. "Feasibility of Ellipsometric Sensor Development for Use During PECVD SiOx Coated Polymer Product Manufacturing." DigitalCommons@CalPoly, 2009. https://digitalcommons.calpoly.edu/theses/162.

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Polymeric materials have provided pathways to products that could not be manufactured otherwise. A new technology which merges the benefits of ceramics into these polymer products has created materials ideally suited to many different industries, like food packaging. Nano Scale Surface Systems, Inc. (NS3), a company which coats polymers with ceramic oxides like SiO2 through a process known as plasma enhanced chemical vapor deposition (PECVD), was interested in the feasibility of an in line measurement system for monitoring the deposited films on various polymer products. This project examin
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Pufall, Matthew R. "Investigation and development of magneto-optical methods of ellipsometry and vector magnetometry of structures with one and two magnetic layers /." Diss., Connect to a 24 p. preview or request complete full text in PDF format. Access restricted to UC IP addresses, 2000. http://wwwlib.umi.com/cr/ucsd/fullcit?p9956465.

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Miklíková, Zdeňka. "Studium optoelektrických vlastností tenkých vrstev organických polovodičů na bázi ftalocyaninů." Master's thesis, Vysoké učení technické v Brně. Fakulta chemická, 2015. http://www.nusl.cz/ntk/nusl-217103.

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Diploma thesis is focused on the study of optoelectric properties of thin layers of organic materials based on phthalocyanines, which can be used as an active layer of photovoltaic cells. Especially are studied the properties of the thin active layers of PdPc and PdPc + IL on the glass or ceramic substrates with aluminium contact, which are prepared by material printing here. On the prepared samples were first measured current-voltage characteristics in the dark and in the light and then were measured impedance spectrums in the dark. The received results will be used to improve the properties
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Books on the topic "Optical method ellipsometry"

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Krishnan, Kannan M. Principles of Materials Characterization and Metrology. Oxford University Press, 2021. http://dx.doi.org/10.1093/oso/9780198830252.001.0001.

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Characterization enables a microscopic understanding of the fundamental properties of materials (Science) to predict their macroscopic behavior (Engineering). With this focus, the book presents a comprehensive discussion of the principles of materials characterization and metrology. Characterization techniques are introduced through elementary concepts of bonding, electronic structure of molecules and solids, and the arrangement of atoms in crystals. Then, the range of electrons, photons, ions, neutrons and scanning probes, used in characterization, including their generation and related beam-
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Book chapters on the topic "Optical method ellipsometry"

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Krishnan, Kannan M. "Optics, Optical Methods, and Microscopy." In Principles of Materials Characterization and Metrology. Oxford University Press, 2021. http://dx.doi.org/10.1093/oso/9780198830252.003.0006.

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Propagation of light is described as the simple harmonic motion of transverse waves. Combining waves that propagate on orthogonal planes give rise to linear, elliptical, or spherical polarization, depending on their amplitudes and phase differences. Classical experiments of Huygens and Young demonstrated the principle of optical interference and diffraction. Generalization of Fraunhofer diffraction to scattering by a three-dimensional arrangement of atoms in crystals forms the basis of diffraction methods. Fresnel diffraction finds application in the design of zone plates for X-ray microscopy.
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Fuller, Gerald G. "Reflection and Refraction of Light: Ellipsometry." In Optical Rheometry of Complex Fluids. Oxford University PressNew York, NY, 1995. http://dx.doi.org/10.1093/oso/9780195097184.003.0003.

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Abstract Light reflected or refracted from a planar interface will be altered in its phase and amplitude. Measurement of the transfonnation of light following such an interaction can be used to characterize physical properties of the interface. If a thin film is contained at the surface between two media, for example, its refractive index and thickness can be determined. Polarimetry methods used to measure the electric vector emitted in the process of reflection or refraction are commonly referred to as ellipsometry, although, in principle, this term can be used interchangeably with polarimetr
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Starostina, Nataliya. "Elements of Electron Microscopy Designing Laboratory Course: Examples and Applications." In Electron Microscopes and Their Applications [Working Title]. IntechOpen, 2023. http://dx.doi.org/10.5772/intechopen.1002788.

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This chapter provides guidance on designing laboratory practices for material characterization using electron microscopy, with a focus on the advantages of using backscattered electrons (BSE), secondary electrons (SE), and energy-dispersive spectroscopy (EDS). The approach includes insights into using other microscopy techniques such as atomic force microscopy (AFM), ellipsometry, and optical profilometry as complementary methods to validate results from electron microscopy. Examples of applications include eutectic alloys, thermal oxides, and nanoparticles in various industries. Successful sy
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Conference papers on the topic "Optical method ellipsometry"

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Noh, Hanaul. "Microscopic characterization of complex permittivity and film thickness using imaging spectroscopic ellipsometry." In Novel Optical Systems, Methods, and Applications XXVII, edited by Cornelius F. Hahlweg and Joseph R. Mulley. SPIE, 2024. http://dx.doi.org/10.1117/12.3027739.

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Chen, Zeling, Shu Yang, Zetao Xie, et al. "Broadband Measurement of Feibelman d-parameters." In CLEO: Fundamental Science. Optica Publishing Group, 2024. http://dx.doi.org/10.1364/cleo_fs.2024.ff3c.7.

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We introduce a general broadband ellipsometric method to measure the quantum optical surface response functions known as Feibelman d-parameters, and demonstrate it using a gold–air interface in the visible–ultraviolet regimes under ambient conditions.
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Enami, Yasufumi. "Highly accurate measurements of electro-optic coefficients based on transmission Teng and Man ellipsometric method." In CLEO: Applications and Technology. Optica Publishing Group, 2024. http://dx.doi.org/10.1364/cleo_at.2024.af1d.1.

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We measure highly accurate electro-optic (EO) coefficient for EO polymers using a transmission method, overcoming the limitations of the Teng and Man reflection ellipsometric method and enhancing reliability and accuracy in EO research.
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Yen, Y., and K. Q. Zhang. "Method of Determining Optical Constants of Thin Films Using an Infrared Ellipsometer." In Optical Interference Coatings. Optica Publishing Group, 1988. http://dx.doi.org/10.1364/oic.1988.wc12.

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In infrared region, some high refractive index materials for optical coatings, such as PbTe and Ge, are generally weakly absorbed. Their extinction coefficient k varies from 0.001 to 0.02 with different deposition condition. To determine optical constants of weakly absorbed thin films the most often used method is R,T method [1],[2], but it is not adequate for very thin films, for example, in such a case that optical thickness is less than half of the wavelength. To determine the optical constants of these coatings one of the methods is ellipsometry, but it is usually used for strong absorbed
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Kravets, Vasyliy G., Vladislav I. Zimenko, V. I. Indutny, Vasily V. Motuz, and N. E. Yanchyk. "Multilevel optical memory with ellipsometry-based readout method." In International Conference on Optical Storage, edited by Viacheslav V. Petrov and Sergei V. Svechnikov. SPIE, 1997. http://dx.doi.org/10.1117/12.267705.

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Bulykina, Anastasiia B., Victoria A. Ryzhova, and Valery V. Korotaev. "In vivo skin surface study by scattered ellipsometry method." In Optical Methods for Inspection, Characterization, and Imaging of Biomaterials IV, edited by Pietro Ferraro, Monika Ritsch-Marte, Simonetta Grilli, and Christoph K. Hitzenberger. SPIE, 2019. http://dx.doi.org/10.1117/12.2527625.

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Li, Weiqi, Chuanwei Zhang, Hao Jiang, Xiuguo Chen, Honggang Gu, and Shiyuan Liu. "Correction of depolarization effect in Mueller matrix ellipsometry with polar decomposition method." In SPIE Optical Metrology, edited by Bernd Bodermann, Karsten Frenner, and Richard M. Silver. SPIE, 2015. http://dx.doi.org/10.1117/12.2184786.

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Dembele, Vamara, Inho Choi, Saeid Kheiryzadehkhanghah, and Daesuk Kim. "Speed enhancement of interferometric snapshot ellipsometry using a direct filtering phase method." In Modeling Aspects in Optical Metrology VIII, edited by Bryan M. Barnes, Bernd Bodermann, and Karsten Frenner. SPIE, 2021. http://dx.doi.org/10.1117/12.2592650.

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Lazo-Wasem, J. E., L. D. LaFleur, R. P. Grosso, and D. E. Dunn. "Automated Rugate Deposition Control through Multiple Monitoring Techniques." In Optical Interference Coatings. Optica Publishing Group, 1988. http://dx.doi.org/10.1364/oic.1988.pdp3.

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A design for automation of the coating deposition process for the manufacture of rugate filters is presented. Three monitoring techniques, photometry, interferometry, and ellipsometry, are being evaluated for use in the deposition control loop. A design for each is summarized. The system design for process control, sensor fusion, and long-term analysis is outlined. The task objective is to provide a cost-effective, accurate, reproducible, and time-efficient method of producing rugate filters.
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Nash, Leigh, Jennifer Klettlinger, and Subith Vasu. "Thermal Stability Analysis of Gevo Jet Fuel Using Ellipsometry." In ASME Turbo Expo 2018: Turbomachinery Technical Conference and Exposition. American Society of Mechanical Engineers, 2018. http://dx.doi.org/10.1115/gt2018-76209.

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Thermal stability is an important characteristic of alternative fuels that must be evaluated before they can be used in aviation engines. This characteristic is of great importance to the effectiveness of the fuel as a coolant and to the engine’s combustion performance. In this work, the thermal stability of Gevo fuel, an alcohol to jet fuel made from plant derived feedstock, was studied. This analysis was used to comment on the effectiveness of the current thermal stability test standard. This work was performed using a spectroscopic ellipsometer to measure the thickness of deposits left on a
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