Relevant bibliographies by topics / Piezo-positioning

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  1. Journal articles
  2. Dissertations / Theses
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  5. Conference papers

Academic literature on the topic 'Piezo-positioning'

Author: Grafiati
Published: 5 June 2025
Last updated: 16 July 2025

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Journal articles on the topic "Piezo-positioning"

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Lin, Chih Jer, and Shu Yin Chen. "Precision Positioning of Piezo-Actuated Stages Based on Feedback Control with GA Modeling." Materials Science Forum 505-507 (January 2006): 487–92. http://dx.doi.org/10.4028/www.scientific.net/msf.505-507.487.

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The piezo-actuated stages are composed of the piezo-electric actuator and the positioning mechanism. The positioning accuracy of the piezo-actuated stage is limited due to hysteretic nonlinearity of the PEA and friction behavior of the positioning mechanism. To compensate this nonlinearity of piezoelectric actuator, a PI feedback control associated with feedforward compensating based on the hysteresis observer is proposed in this paper. Identifying its parameters is very important; so the genetic algorithm is studied to find the optimal parameters. To verify the feasibility of the proposed met
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Chen, Yuansheng, Pengcheng Zhao, Hao Wang, Jinhao Qiu, and Guowen Yang. "A piezo driver for piezoelectric bimorph actuators in micro-positioning application." International Journal of Applied Electromagnetics and Mechanics 64, no. 1-4 (2020): 615–20. http://dx.doi.org/10.3233/jae-209371.

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Piezo driver for piezoelectric bimorph actuators is the key component for micro-positioning application. Hysteresis nonlinearity of piezoelectric bimorph actuators limits the performance of micro-positioning systems. A novel piezo driver was developed with Prandtl-Ishlinskii (P-I) model and correction network. The combination of P-I model and correction network can describe the rate-dependent hysteresis. Experiments were performed to validate the proposed piezo driver. The results show that the piezo driver can compensate the hysteresis of the piezoelectric bimorph actuator in the frequency ra
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Lin, Chih Jer, Chih Keng Chen, and Chun Ta Chen. "Iterative Learning Control of a Piezo-Actuated Positioning Stage for Micro/Nano Manipulation." Applied Mechanics and Materials 284-287 (January 2013): 2080–84. http://dx.doi.org/10.4028/www.scientific.net/amm.284-287.2080.

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The main objective of this investigation is to improve the tracking accuracy of a piezo-actuated positioning stage using an iterative learning control. First, to compensate for the tracking error of the piezo-actuated positioning stage that is caused by nonlinear hysteresis, the dynamics of the hysteresis is modeled using the Bouc-Wen model. The particle swarm optimization (PSO) is used to determine the parameters of the inverse-hysteresis model. Second, the design of an iterative learning control is presented. Based on the simulation, the appropriate value of the learning rate is determined.
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HO, Shine-Tzong. "552 Dynamic Modeling and Control of a Piezo-Actuated Positioning Stage." Proceedings of the Dynamics & Design Conference 2004 (2004): _552–1_—_552–5_. http://dx.doi.org/10.1299/jsmedmc.2004._552-1_.

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Jang, Min Gyu, Chul Hee Lee, and Seung Bok Choi. "Precision Motion Control of a Smart Structure Using an Enhanced Stick-Slip Model." Advances in Science and Technology 56 (September 2008): 98–103. http://dx.doi.org/10.4028/www.scientific.net/ast.56.98.

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In this paper, a smart structure for the micro position control is proposed using the piezo stack actuator. The smart structure is comprised with PZT based stack actuator, mechanical displacement amplifier and positioning devices. Based on the bridge-type flexural hinge mechanism, a displacement amplifier is designed and integrated with a piezo stack actuator to produce a desirable positioning stroke of the device. In order to achieve the high precision control performance in a positioning device, a stick-slip phenomenon should be suppressed in contacting surfaces of the device, which is gener
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Zhang, Chao, Fei Hu Zhang, and Qiang Zhang. "Design and Test of Piezoelectric Tool Actuator on Ultra-Precision Machine Tool for KDP Crystals." Advanced Materials Research 1027 (October 2014): 16–19. http://dx.doi.org/10.4028/www.scientific.net/amr.1027.16.

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In order to improve the positioning resolution of the tool adapter on ultra-precision machine tool for KDP crystals, this paper presents a new piezo tool actuator. First, a new flexible membrane structure is designed after considering the characteristics of the machine tool for KDP crystals. Then, its detailed structural dimension is determined by finite element method. Finally, the piezo tool actuator is machined based on designs and its performance data is obtained by experiments. Experimental results indicate that its positioning resolution is superior to 0.5μm and its stroke reaches 4.7μm,
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LIU, Yung-Tien, and Toshiro HIGUCHI. "Precision Positioning Device Utilizing Combined Piezo-VCM Actuator." Journal of the Japan Society for Precision Engineering 67, no. 1 (2001): 70–75. http://dx.doi.org/10.2493/jjspe.67.70.

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Hoffmeister, Hans Werner, Kingliana Loeis, and Bernd Christian Schuller. "Piezo Actuator and its Hysteresis Compensation for an Active Clamping System in Wood Machining." Key Engineering Materials 447-448 (September 2010): 498–502. http://dx.doi.org/10.4028/www.scientific.net/kem.447-448.498.

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The modeling and compensation of hysteresis in piezoelectrically driven systems are very important for positioning and noise and vibration reduction applications. An active vacuum clamping system for a stationary wood machining center with piezo actuators for the purpose of vibration control has been developed. This active system is intended to reduce workpiece vibrations, which are excited during machining. However, the piezo actuators have an inherent hysteresis effect between input voltage and output position of the vacuum plate. The Bouc-Wen and the Classical Preisach methods are studied i
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Liu, Yung-Tien, Kuo-Ming Chang, and Wen-Zen Li. "Model reference adaptive control for a piezo-positioning system." Precision Engineering 34, no. 1 (2010): 62–69. http://dx.doi.org/10.1016/j.precisioneng.2009.03.006.

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Dinh, To Xuan, Nguyen Phi Luan, and Kyoung Kwan Ahn. "A novel inverse modeling control for piezo positioning stage." Journal of Mechanical Science and Technology 32, no. 12 (2018): 5875–88. http://dx.doi.org/10.1007/s12206-018-1136-2.

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Dissertations / Theses on the topic "Piezo-positioning"

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Read, Sebastian E. A. "The development of a robotic coarse-to-fine positioning system." Thesis, Stellenbosch : Stellenbosch University, 2013. http://hdl.handle.net/10019.1/80394.

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Thesis (MScEng)--Stellenbosch University, 2013.<br>ENGLISH ABSTRACT: There is a need for a coarse-to-fine positioning system as per a case study presented by the project collaboration partner, the Technical University of Chemnitz. The case study involves the picking and placing of piezo-ceramic micro parts into milled micro cavities. The focus of the project is the creation and development of a systematic approach for the design and the implementation of a coarse-to-fine positioning system for micro material handling. A second focus is to determine the applicability of the system for hig
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謝宏麟. "Controller Design for a Piezo Actuator Positioning." Thesis, 2004. http://ndltd.ncl.edu.tw/handle/77463042189496006795.

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碩士<br>國立彰化師範大學<br>機電工程學系<br>92<br>The aim of this paper is to improve the regulation problem of piezoelectric actuator (PEA) in precision motion control . Based on a simple PEA model, two kinds of controllers for error compensation were designed. The first one is the Phase-Lead compensator, the other one is H∞controller. Numerical results are verified and demonstrate the feasibility on the ultra-precision application. Simulation results indicate the developed controller has the potential in precise positioning.
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Yang, Sheng-Ren, and 楊森任. "The High Precision Positioning Control of the Piezo-actuated Positioning Stage." Thesis, 2004. http://ndltd.ncl.edu.tw/handle/64231195855649584530.

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碩士<br>大葉大學<br>機械工程研究所碩士班<br>92<br>In this paper, the ultra-high-precision positioning with piezoactuators is studied in positioning application. The hysteretic effect and creep effects of the Piezo-actuators degrade the positioning precision. To perform ultra-high-precision positioning, the hysteresis effect should be compensated by the controller. In this paper, the hysteresis nonlinearity of the PZT actuator is modeled in the feedforward loop by using the polynomial method and Bouc-Wen model. To improve the positioning precision of the PZT positioning stage, a PI feedback control scheme with
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Wu, Jia-En, and 吳佳恩. "A Study of Piezo-actuated Precision Positioning Stage." Thesis, 2005. http://ndltd.ncl.edu.tw/handle/42293721568818266658.

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碩士<br>國立高雄應用科技大學<br>機械與精密工程研究所<br>93<br>ABSTRACT This thesis’s primary objective is to develop a piezo-actuated precision positioning stage with a high displacement resolution and wide motion range. The piezoelectric actuators are used in the device due to their many advantages, such as small volume, fast response, high resolution in displacement and high stiffness. In the mechanism design, two analytical models and the finite element method were used to predict the static and dynamic characteristics of the stage. Based on the analyzed results, the positioning stage was made for experi
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Chen, Shu-Yin, and 陳書胤. "Modeling and Positioning Control of Piezo-actuated Stage with Genetic Algorithm." Thesis, 2005. http://ndltd.ncl.edu.tw/handle/90907127231152674277.

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碩士<br>大葉大學<br>機電自動化研究所碩士班<br>93<br>In this thesis, the positioning and tracking task of the piezo-actuated stage is studied. For the piezo-actuators, its precision usually degrades due to hysteresis and creep effects. Therefore, the hysteresis nonlinearity should be modeled and compensated by the feedforward control. On the other hand, the creep effect is usually can be eliminated by the feedback control. In this paper, the hysteresis nonlinearity is modeled by using Bouc-Wen model and the parameters of hysteresis model are identified by applying the Genetic Algorithm, which is utilized to fin
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Huang, Po-Yuan, and 黃柏元. "Development of a Piezo-Driven Precision Positioning Device with Long Stroke." Thesis, 2017. http://ndltd.ncl.edu.tw/handle/85851492708958652383.

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碩士<br>國立高雄應用科技大學<br>機械工程系<br>105<br>In this paper, a piezo-driven precision positioning device is proposed. The positioning device is mainly composed of a slider, a stator and a preload mechanism. The preload mechanism is constituted by a spring, a stop screw and a stator holder, which functions to control the preload force between the stator and the slider. The fan-shaped stator is composed of two piezoelectric actuators and an elastic metal, which functions to drive the slider. In addition, the stator is designed by finite element software ANSYS, then static analysis, mode analysis and h
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Li, Bo-Jheng, and 利柏正. "Precision Positioning Device Using the Combined Piezo-VCM Actuator with Frictional Constraint." Thesis, 2009. http://ndltd.ncl.edu.tw/handle/77037344631310568056.

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碩士<br>國立高雄第一科技大學<br>機械與自動化工程所<br>97<br>In this research, characteristic studies on a precision positioning stage using a combined piezo-VCM (voice-coil motor) actuator were performed. The sliding stage having heavy load and bi-direction motion abilities were experimentally verified. The main characteristics of the hybrid actuator can be given as the drawback of tiny displacement of PZT element can be overcome by the long stroke of the VCM; in addition, since the PZT impact force can actuate a sliding table subjected to a heavy load to undergo micron/nano step motions, the weakness of the VCM w
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Lin, Ruei-Ching, and 林瑞慶. "A Study on Hysteresis Modeling and Identification for Piezo-Driven Precision Positioning." Thesis, 2006. http://ndltd.ncl.edu.tw/handle/11707100869141417001.

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碩士<br>國立高雄第一科技大學<br>系統與控制工程研究所<br>94<br>Abstract Micro-nano precision posititoning has been required in the varions automated machinery. For such high precision positioning, piezo-actuator is most commonly used due to its merits of high resolution, and high stiffness. However, piezo is not an ideal actuator. It exhibits some nonlinearities such as hysteresis, saturation, and creep. These nonlinearities will cause significant inaccuracy and/or stability problem in an open/closed loop control system. An accurate and simple model for modeling these nonlinearities is then required for better contr
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Chih-Hao-Cheng and 鄭智豪. "Robust Tracking Control of a Piezo Driven Monolithic Stage for Precision Positioning." Thesis, 2003. http://ndltd.ncl.edu.tw/handle/14151756856777117510.

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碩士<br>國立彰化師範大學<br>機電工程學系<br>91<br>This thesis is intended to design the tracking control of a piezoedriven monolithic stage for precision positioning. The nonlinear hysteresis is improved by the Internal Model Control (IMC) design based on approximate transfer function (TF) model for feedback controller. Application of Iterative Learning Controller (ILC) and Disturbance observer is devised to reject the repetitive hysteresis loop error and system noise. A low-order filter design based on TF model is proposed and shows the robustness under the excitation of repeatable disturbance and non-repeat
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Shin, Wen-Kai, and 施文凱. "Implementation of Pneumatic-Piezo Hybird Precision Positioning System Using Genetic-Fuzzy Control." Thesis, 2001. http://ndltd.ncl.edu.tw/handle/76441425896467637305.

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碩士<br>國立臺灣科技大學<br>工程技術研究所自動化及控制學程<br>89<br>The objective of the research is to develop a pneumatic-piezo hybrid precision positioning system which is a dual-input / single-output (DISO) system. It contains two actuators acting in parallel. The pneumatic cylinder serves as a low-bandwidth large -stroke (coarse position) actuator and the piezo actuator works for high - bandwidth short - stroke (fine position). The control strategies for such a DISO system are designed by Fuzzy control with Genetic Algorithm. In the Fuzzy control methods, experience and control knowledge are necessary
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Books on the topic "Piezo-positioning"

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Payam, Amir Farrokh. A Robust Motion Tracking Control of Piezo-Positioning Mechanism with Hysteresis Estimation. INTECH Open Access Publisher, 2012.

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Book chapters on the topic "Piezo-positioning"

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Lin, Chih Jer, and Shu Yin Chen. "Precision Positioning of Piezo-Actuated Stages Based on Feedback Control with GA Modeling." In Materials Science Forum. Trans Tech Publications Ltd., 2006. http://dx.doi.org/10.4028/0-87849-990-3.487.

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Li, Ruijie, Jiapeng Li, Yitong Li, Wanjiang Chen, and Zhao Feng. "A Modified K-Means GMM-GMR Hysteresis Model for Piezo-Actuated Positioning System." In Lecture Notes in Computer Science. Springer Nature Singapore, 2025. https://doi.org/10.1007/978-981-96-0777-8_1.

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Talukder, Aparajita, and Sri Ram Shankar Rajadurai. "Design and Analysis of a Piezo-Flexure Amplifying Mechanism for Out-of-Plane Nano-Positioning." In Lecture Notes in Mechanical Engineering. Springer Nature Singapore, 2025. https://doi.org/10.1007/978-981-96-3445-3_2.

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Lai, Jianhao, Xianmin Zhang, Lei Yuan, et al. "Design of a Novel Compact Piezo-Actuated 2-DOF Nano-positioning Stage Using the Five-Bar Displacement Amplification Mechanism." In Advances in Mechanism and Machine Science. Springer Nature Switzerland, 2023. http://dx.doi.org/10.1007/978-3-031-45705-0_46.

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Farrokh, Amir, Mohammad Javad, and Morteza Fathipour. "A Robust Motion Tracking Control of Piezo-Positioning Mechanism with Hysteresis Estimation." In Applications of Nonlinear Control. InTech, 2012. http://dx.doi.org/10.5772/38244.

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Conference papers on the topic "Piezo-positioning"

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Wei, Huaxian, Yang Luo, Junqiang Chen, Zhaoyin Cai, and Tao Wu. "Positive Motion Control of a Piezo-Driven Flexure Micro-Positioning Stage for Chip Peeling." In 2024 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO). IEEE, 2024. https://doi.org/10.1109/3m-nano61605.2024.10769632.

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Zhakypov, Zhenishbek, Edin Golubovic, Tarik Uzunovic, and Asif Sabanovic. "Nanometric positioning of a piezo walker." In IECON 2013 - 39th Annual Conference of the IEEE Industrial Electronics Society. IEEE, 2013. http://dx.doi.org/10.1109/iecon.2013.6699814.

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Chen, X. B., Q. S. Zhang, and D. Kang. "Modeling of Piezo-Actuated Positioning Systems." In 2007 International Conference on Mechatronics and Automation. IEEE, 2007. http://dx.doi.org/10.1109/icma.2007.4303765.

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Edardar, Mohamed, and Ahmed Abougarair. "Lyapunov Redesign of Piezo-Actuator for Positioning Control." In 2021 9th International Conference on Systems and Control (ICSC). IEEE, 2021. http://dx.doi.org/10.1109/icsc50472.2021.9666594.

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Chen, Xinkai, Shengjun Wen, and Aihui Wang. "Adaptive control for piezo-actuated micro/nano positioning system." In 2017 12th IEEE Conference on Industrial Electronics and Applications (ICIEA). IEEE, 2017. http://dx.doi.org/10.1109/iciea.2017.8283030.

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Guangsheng, Xue, Zhang Guilin, Liu Haotian, and Wang Hui. "Modeling and Internal Model Control of Piezo-Positioning Actuator." In 2023 42nd Chinese Control Conference (CCC). IEEE, 2023. http://dx.doi.org/10.23919/ccc58697.2023.10240492.

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Adriaens, Han J. M. T. A., Willem L. de Koning, and Reinder Banning. "Feedback-linearization control of a piezo-actuated positioning mechanism." In 1999 European Control Conference (ECC). IEEE, 1999. http://dx.doi.org/10.23919/ecc.1999.7099608.

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Liu, Haotian, Xue Han, Fengying Shang, and Guilin Zhang. "Modeling of dynamic hysteresis nonlinearity for piezo-positioning actuators." In 2022 34th Chinese Control and Decision Conference (CCDC). IEEE, 2022. http://dx.doi.org/10.1109/ccdc55256.2022.10033595.

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Li, Zhibin, Yuanze Xin, Jianqiang Zhang, Wanchen Feng, Yanfeng Zhang, and Jianan Pan. "System Identification and Hysteresis Compensation of Piezo-Positioning System." In 2023 China Automation Congress (CAC). IEEE, 2023. http://dx.doi.org/10.1109/cac59555.2023.10451808.

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Hwang, Donghyun, Moon G. Lee, Hyun-Uk Kim, Soo-Hun Lee, and Jaehwa Jeong. "Precision XY Positioning Stage With Coupled Flexures and Piezo Actuators for Avoiding Parasitic Tilt Error." In ASME 2009 International Manufacturing Science and Engineering Conference. ASMEDC, 2009. http://dx.doi.org/10.1115/msec2009-84094.

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In the field of scanning probe microscopes (SPMs), a precision positioning stage has become an important component as the requirement of the SPMs has been extended from high resolution to high accuracy. The stages used in SPMs plays a role of transferring a specimen or a probe in multiple directions. The stage should satisfy the requirements for small parasitic motion and compactness. Therefore a coupled flexure leaf spring is used as a guide mechanism at recently developed multi-directional nano positioning stage with piezo actuator. Using the coupled flexure leaf spring mechanism, a compact
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