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Journal articles on the topic 'Piezoelectric accelerometer'

Author: Grafiati

Published: 4 June 2021

Last updated: 21 February 2023

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1

Yu, Run Xiang, Geng Chen Shi, and Dan Hu. "Study on a Novel Piezoelectric Accelerometer with Switch Characteristic." Applied Mechanics and Materials 329 (June 2013): 329–33. http://dx.doi.org/10.4028/www.scientific.net/amm.329.329.

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A novel piezoelectric accelerometer with switch characteristic was introduced. The accelerometer is composed of top head, cross elastic beam, base core, insulation cylinder, mass block, piezoelectric elements, and the base etc. The accelerometers structure and operating principle were presented and its mathematic model was established. Test results show that the accelerometer can filter out high frequency vibration signal, which the out signal is smooth compared with the conventional piezoelectric accelerometer, furthermore with good linearity. It can be used in the smart fuze to take the place of conventional piezoelectric accelerometer in order to recognize the target accurately.

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2

Walter, Patrick L. "Review: Fifty Years Plus of Accelerometer History for Shock and Vibration (1940–1996)." Shock and Vibration 6, no. 4 (1999): 197–207. http://dx.doi.org/10.1155/1999/281718.

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This article summarizes the history of accelerometer development and the subsequent evolution of the commercial accelerometer industry. The focus is primarily on piezoelectric and piezoresistive accelerometers, although early resistance-bridge-type accelerometers are also described. The pioneer accelerometer manufacturing companies are identified and a chronology of technology development through today is presented.

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3

Berberoğlu, Halil, Mehmet Tiken, Kemal Efe Eseller, Elif Orhan, and Can Candan. "Performance evaluation of self-mixing interferometer with the ceramic type piezoelectric accelerometers." Open Physics 20, no. 1 (January 1, 2022): 78–86. http://dx.doi.org/10.1515/phys-2022-0011.

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Abstract In this article, reconstructed displacement from the self-mixing signal is compared with the displacement obtained by the ceramic shear mode design piezoelectric accelerometer. Piezoelectric accelerometers are widely accepted due to the low output noise and wide frequency range, but nevertheless it is not contact-free. Self-mixing interferometric signals due to the vibrating target on which an accelerometer is attached are acquired by an external silicon type photodetector. The laser light hits directly the accelerometer as a target which is driven by the sum of two different sinusoidal frequencies of 150 and 300 Hz with different voltage levels.

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4

Ghiurea, Florin C. V. "Piezoelectric transducer accelerometer." Journal of the Acoustical Society of America 77, no. 3 (March 1985): 1284. http://dx.doi.org/10.1121/1.392126.

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5

Liu, Yan, Bohao Hu, Yao Cai, Wenjuan Liu, Alexander Tovstopyat, and Chengliang Sun. "A Novel Tri-Axial Piezoelectric MEMS Accelerometer with Folded Beams." Sensors 21, no. 2 (January 11, 2021): 453. http://dx.doi.org/10.3390/s21020453.

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Microelectromechanical (MEMS) piezoelectric accelerometers are diversely used in consumer electronics and handheld devices due to their low power consumption as well as simple reading circuit and good dynamic performance. In this paper, a tri-axial piezoelectric accelerometer with folded beams is presented. The four beam suspensions are located at two sides of the mass aligned with edges of the mass, and the thickness of the beams is the same as the thickness of the mass block. In order to realize the multi-axis detection, a total of 16 sensing elements are distributed at the end of the folded beams. The structural deformations, stress distribution, and output characteristics due to the acceleration in x-, y-, and z-axis directions are theoretically analyzed and simulated. The proposed accelerometer is fabricated by MEMS processes to form Mo/AlN/ScAlN/Mo piezoelectric stacks as the sensing layer. Experiments show that the charge sensitivity along the x-, y-, and z-axes could reach up to ~1.07 pC/g, ~0.66 pC/g, and ~3.35 pC/g. The new structure can provide inspiration for the design of tri-axial piezoelectric accelerometers with great sensitivity and linearity.

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6

Liu, Yan, Bohao Hu, Yao Cai, Wenjuan Liu, Alexander Tovstopyat, and Chengliang Sun. "A Novel Tri-Axial Piezoelectric MEMS Accelerometer with Folded Beams." Sensors 21, no. 2 (January 11, 2021): 453. http://dx.doi.org/10.3390/s21020453.

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Microelectromechanical (MEMS) piezoelectric accelerometers are diversely used in consumer electronics and handheld devices due to their low power consumption as well as simple reading circuit and good dynamic performance. In this paper, a tri-axial piezoelectric accelerometer with folded beams is presented. The four beam suspensions are located at two sides of the mass aligned with edges of the mass, and the thickness of the beams is the same as the thickness of the mass block. In order to realize the multi-axis detection, a total of 16 sensing elements are distributed at the end of the folded beams. The structural deformations, stress distribution, and output characteristics due to the acceleration in x-, y-, and z-axis directions are theoretically analyzed and simulated. The proposed accelerometer is fabricated by MEMS processes to form Mo/AlN/ScAlN/Mo piezoelectric stacks as the sensing layer. Experiments show that the charge sensitivity along the x-, y-, and z-axes could reach up to ~1.07 pC/g, ~0.66 pC/g, and ~3.35 pC/g. The new structure can provide inspiration for the design of tri-axial piezoelectric accelerometers with great sensitivity and linearity.

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7

Song, Sangho, Hyun Chan Kim, Jung Woong Kim, Debora Kim, and Jaehwan Kim. "Performance improvement of miniaturized ZnO nanowire accelerometer fabricated by refresh hydrothermal synthesis." Royal Society Open Science 4, no. 9 (September 2017): 170557. http://dx.doi.org/10.1098/rsos.170557.

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Miniaturized accelerometers are necessary for evaluating the performance of small devices, such as haptics, robotics and simulators. In this study, we fabricated miniaturized accelerometers using well-aligned ZnO nanowires. The layer of ZnO nanowires is used for active piezoelectric layer of the accelerometer, and copper was chosen as a head mass. Seedless and refresh hydrothermal synthesis methods were conducted to grow ZnO nanowires on the copper substrate and the effect of ZnO nanowire length on the accelerometer performance was investigated. The refresh hydrothermal synthesis exhibits longer ZnO nanowires, 12 µm, than the seedless hydrothermal synthesis, 6 µm. Performance of the fabricated accelerometers was verified by comparing with a commercial accelerometer. The sensitivity of the fabricated accelerometer by the refresh hydrothermal synthesis is shown to be 37.7 pA g −1 , which is about 30 times larger than the previous result.

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8

Yang, Jian, Meng Zhang, Yurong He, Yan Su, Guowei Han, Chaowei Si, Jin Ning, Fuhua Yang, and Xiaodong Wang. "A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer." Micromachines 10, no. 9 (September 6, 2019): 589. http://dx.doi.org/10.3390/mi10090589.

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In this paper, we report a novel aluminum nitride (AlN) thin-film piezoelectric resonant accelerometer. Different from the ordinary MEMS (micro-electro-mechanical systems) resonant accelerometers, the entire structure of the accelerometer, including the mass and the springs, is excited to resonate in-plane, and the resonance frequency is sensitive to the out-plane acceleration. The structure is centrosymmetrical with serpentine electrodes laid on supporting beams for driving and sensing. The stiffness of the supporting beams changes when an out-plane inertial force is applied on the structure. Therefore, the resonance frequency of the accelerometer will also change under the inertial force. The working principle is analyzed and the properties are simulated in the paper. The proposed AlN accelerometer is fabricated by the MEMS technology, and the structure is released by an ICP isotropic etching. The resonance frequency is 24.66 kHz at a static state. The quality factor is 1868. The relative sensitivity of this accelerometer, defined as the shift in the resonance frequency per gravity unit (1 g = 9.8 m/s2) is 346 ppm/g. The linearity of the accelerometer is 0.9988. The temperature coefficient of frequency (TCF) of this accelerometer is −2.628 Hz/°C (i.e., −106 ppm/°C), tested from −40 °C to 85 °C.

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9

Schmid, Felix. "Accelerometer with piezoelectric element." Journal of the Acoustical Society of America 92, no. 4 (October 1992): 2279–80. http://dx.doi.org/10.1121/1.405193.

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10

Scheeper, Patrick, Jens Ole Gulløv, and Lars Munch Kofoed. "A piezoelectric triaxial accelerometer." Journal of Micromechanics and Microengineering 6, no. 1 (March 1, 1996): 131–33. http://dx.doi.org/10.1088/0960-1317/6/1/032.

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11

Ohtsuki, Yasunori, and Tetsuo Yoshida. "Piezoelectric-Ceramic Biaxial Accelerometer." Japanese Journal of Applied Physics 32, Part 1, No. 5B (May 30, 1993): 2396–98. http://dx.doi.org/10.1143/jjap.32.2396.

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12

Yang, Chaoxiang, Bohao Hu, Liangyu Lu, Zekai Wang, Wenjuan Liu, and Chengliang Sun. "A Miniaturized Piezoelectric MEMS Accelerometer with Polygon Topological Cantilever Structure." Micromachines 13, no. 10 (September 27, 2022): 1608. http://dx.doi.org/10.3390/mi13101608.

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This work proposes a miniaturized piezoelectric MEMS accelerometer based on polygonal topology with an area of only 868 × 833 μm2. The device consists of six trapezoidal cantilever beams with shorter fixed sides. Meanwhile, a device with larger fixed sides is also designed for comparison. The theoretical and finite element models are established to analyze the effect of the beam′s effective stiffness on the output voltage and natural frequency. As the stiffness of the device decreases, the natural frequency of the device decreases while the output signal increases. The proposed polygonal topology with shorter fixed sides has higher voltage sensitivity than the larger fixed one based on finite element simulations. The piezoelectric accelerometers are fabricated using Cavity-SOI substrates with a core piezoelectric film of aluminum nitride (AlN) of about 928 nm. The fabricated piezoelectric MEMS accelerometers have good linearity (0.99996) at accelerations less than 2 g. The measured natural frequency of the accelerometer with shorter fixed sides is 98 kHz, and the sensitivity, resolution, and minimum detectable signal at 400 Hz are 1.553 mV/g, 1 mg, and 2 mg, respectively. Compared with the traditional trapezoidal cantilever with the same diaphragm area, its output voltage sensitivity is increased by 22.48%.

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13

Wróbel, Radosław, Monika Andrych-Zalewska, Wojciech Ambroszko, and Szymon Fryda. "Practical application of wavelets in the engine's vibroacoustic analysis." AUTOBUSY – Technika, Eksploatacja, Systemy Transportowe 19, no. 12 (December 31, 2018): 282–84. http://dx.doi.org/10.24136/atest.2018.399.

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Vibrations are most often measured using ceramic piezoelectric sensors - accelerometers. The accelerometer uses a piezoelectric effect to measure the dynamic acceleration of its housing. They are mounted directly on the measuring system (moving or rotating, such as gearboxes, rotating blades, turbine engines or bearings). This is not their only use, because they can also be used in shock measurements, such as NCAP in the field of automotive safety or diagnostics (unfortunately they have lower accuracy than low-frequency LDV). The main advantage of using a piezoelectric accelerometer is its linearity in a wide range frequency and a huge range of work dynamics. Engine vibration measurements are usually made at different points of the engine to be independent of each other. The engine block is a characteristic measuring point because it is best available. Accelerometers are assembled by glue, screwing or magnetic connection. The obtained vibroacoustic signal is most often analyzed using Fourier analysis. The following article presents another possibility of on-line analysis: short-term wavelet analysis "on-line".

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14

Lee, Min-Ku, Byung-Hoon Kim, and Gyoung-Ja Lee. "Lead-Free Piezoelectric Acceleration Sensor Built Using a (K,Na)NbO3 Bulk Ceramic Modified by Bi-Based Perovskites." Sensors 23, no. 2 (January 16, 2023): 1029. http://dx.doi.org/10.3390/s23021029.

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Piezoelectric accelerometers using a lead-free (K,Na)NbO3 (KNN) piezoceramic modified by a mixture of two Bi-based perovskites, Bi(Na,K,Li)ZrO3 (BNKLZ) and BiScO3 (BS), were designed, fabricated and characterized. Ring-shaped ceramics were prepared using a conventional solid-state reaction method for integration into a compression-mode accelerometer. A beneficial rhombohedral–tetragonal (R–T) phase boundary structure, especially enriched with T phase, was produced by modifying intrinsic phase transition temperatures, yielding a large piezoelectric charge coefficient d33 (310 pC/N) and a high Curie temperature Tc (331 °C). Using finite element analyses with metamodeling techniques, four optimum accelerometer designs were obtained with high magnitudes of charge sensitivity Sq and resonant frequency fr, as evidenced by two key performance indicators having a trade-off relation. Finally, accelerometer sensor prototypes based on the proposed designs were fabricated using the KNN-BNKLZ-BS ceramic rings, which exhibited high levels of Sq (55.1 to 223.8 pC/g) and mounted fr (14.1 to 28.4 kHz). Perfect charge-to-acceleration linearity as well as broad flat frequency ranges were achieved with excellent reliability. These outstanding sensing performances confirm the potential application of the modified-KNN ceramic in piezoelectric sensors.

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15

Korobiichuk, Igor. "Analysis of Errors of Piezoelectric Sensors used in Weapon Stabilizers." Metrology and Measurement Systems 24, no. 1 (March 1, 2017): 91–100. http://dx.doi.org/10.1515/mms-2017-0001.

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Abstract Effectiveness of operation of a weapon stabilization system is largely dependent on the choice of a sensor, i.e. an accelerometer. The paper identifies and examines fundamental errors of piezoelectric accelerometers and offers measures for their reduction. Errors of a weapon stabilizer piezoelectric sensor have been calculated. The instrumental measurement error does not exceed 0.1 × 10−5 m/s2. The errors caused by the method of attachment to the base, different noise sources and zero point drift can be mitigated by the design features of piezoelectric sensors used in weapon stabilizers.

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16

Perederko, A. L. "ADAPTIVE MECHANICAL FILTER FOR PIEZOELECTRIC ACCELEROMETER." Collection of scientific works of the Military Institute of Kyiv National Taras Shevchenko University, no. 70 (2021): 60–68. http://dx.doi.org/10.17721/2519-481x/2021/70-06.

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When conducting dynamic tests, when simulating shock effects, the measurement system - from the sensor to the data acquisition unit is subject to significant overloads. In this circuit, the accelerometer is the most vulnerable link. Therefore, piezoelectric accelerometers have become widely used in measuring shocks as more reliable and durable, but they also have a number of disadvantages. Thus, under broadband vibration effects, excitation in the region of mechanical resonance is observed. That is, the material of the sensor crystal may not have an excessive mechanical load, but generate a large amount of output charge due to the resonance of the sensor. This increases the electrical signal and can lead to saturation or, in many cases, damage to the signal shapers and amplifiers following the sensor. The result of such modes of operation is the loss of data due to the displacement of direct current over time. There is often a shift of the zero level of the output signal. When piezoelectric elements are in resonance, there may be a relative displacement of the sensing element. This state of overload leads to the appearance of parasitic output charges, which leads to a change in the generated charge in a short period of time. Due to mechanical overload, under the action of high-intensity shocks, physical destruction of the sensor is also possible. In many cases, the use of mechanical filters made of viscoelastic materials, which are placed between the object of measurement and the piezoelectric accelerometer (sensor), prevents the undesirable consequences of these shortcomings and improves the process of measuring shocks. The use of mechanical filters made of viscoelastic materials makes it possible to significantly reduce the amplitude of oscillations of the piezoelectric accelerometer (over -12 dB) and shift its resonant frequency towards higher frequencies. That is, the use of mechanical filters significantly reduces the mechanical load on the sensor, which makes the process of measuring vibration (especially shock) more predictable.

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17

Wang, Yu-Hsuan, Pengfei Song, Xiao Li, Changhai Ru, Giovanni Ferrari, Prabakaran Balasubramanian, Marco Amabili, Yu Sun, and Xinyu Liu. "A Paper-Based Piezoelectric Accelerometer." Micromachines 9, no. 1 (January 2, 2018): 19. http://dx.doi.org/10.3390/mi9010019.

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18

Kerr, James D., and Howard Thompson. "Piezoelectric force‐balance accelerometer system." Journal of the Acoustical Society of America 78, no. 2 (August 1985): 820. http://dx.doi.org/10.1121/1.393072.

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19

Cho, Yohan, Yub Je, and Weui-Bong Jeong. "A miniaturized acoustic vector sensor with PIN-PMN-PT single crystal cantilever beam accelerometers." Acta Acustica 4, no. 5 (2020): 17. http://dx.doi.org/10.1051/aacus/2020017.

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Directional sound detection using vector sensors rather than large hydrophone arrays is highly advantageous for target detection in SONAR. However, developing highly sensitive and compact vector sensors for use in a system whose size is limited has been a challenging issue. In this paper, we describe a miniaturized acoustic vector sensor with piezoelectric single crystal accelerometers for the application in towed line arrays. A mass-loaded cantilever beam accelerometer with a [011] poled PIN-PMN-PT single crystal shows a better signal-to-noise ratio compared to accelerometers with other piezoelectric materials because of its superior piezoelectric properties in the 32 direction. We suggested a sufficiently compact vector sensor by using a cylindrical hydrophone with 10 mm in diameter as a housing of the single crystal accelerometers. Two single crystal accelerometers were orthogonally mounted inside the cylindrical hydrophone to detect direction of sound in the transverse plane of the line array. The receiving voltage sensitivity of the accelerometers and hydrophone was −199 and −196 dB, respectively, at 3 kHz. The directional cardioid beams generated by summing the omnidirectional beam from the hydrophone and the dipole beam from the accelerometers were validated over the entire operating frequency.

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20

Mansurov, Tofig M., and Chingiz P. Aliyev. "THREE-DIMENSIONAL PIEZOELECTRIC ACCELEROMETER FOR MEASURING DYNAMIC PARAMETERS OF MOVING OBJECTS." SYNCHROINFO JOURNAL 6, no. 6 (2020): 10–16. http://dx.doi.org/10.36724/2664-066x-2020-6-6-10-16.

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Analysis of structural construction of existing three-dimensional accelerometers is carried out, in which due to the opposite direction of sensitivity vectors and direction of measured inertial force, they allow to measure only linear inertia and accelerations varying in relatively small limits. On the other hand, due to the presence of elements in them that create electromagnetic fields, their construction is somewhat complicated. In addition, in known accel-erometers, due to the absence of a measurement object position sensor and an electronic control circuit, the func-tionality of the accelerometer is limited, Due to lack of integrator for acceleration integration, speed measurement is not provided, Due to rigid attachment of piezoelectric sensing elements through their bases, during measurement they generate interference signals, The amplitude of which exceeds the amplitude of the useful signal, which does not ensure reliability of the measured acceleration or speed and due to the presence of sensitive piezoelectric ele-ments, Having higher rigidity and requiring relatively large mechanical forces for generation of signals during mo-tion of acceleration and speed measurement object in automatic mode, which reduces sensitivity of accelerometer. Invention proposes new design and control scheme of three-dimensional piezoelectric accelerometer for measure-ment of dynamic parameters of moving objects in automatic mode. Wherein providing the position sensor of the moving measurement object with a three-axis signal detection unit to determine a direction of motion with meas-urement of acceleration or linear velocity when the measurement object moves along the coordinate axis; With the help of differential operational amplifiers through pulse generators and integrators, Speed measurement is provided by damping piezoelectric elements when the measurement object moves along one of the coordinate axes; Across the other two axes, the generated interference signals by amplitude are significantly reduced by their redemption; Having a piezoelectric element in the structure in the form of two-layer flat plates with an excitation section and a sensor section; Which generates signals at fast-changing acceleration and speed of moving object, amplitude of signal and sensitivity increases in 4-5 due to generation of signal by sensitive elements in vibration excitation mode created in accelerometer. Mathematical basis for accelerometer control circuits, mathematical model of its functioning is developed, applica-tion of which increases sensitivity of measurement of linear accelerations and speeds of moving objects and expands functional capabilities.

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21

So Gulmatico, Joshua. "Tracking Utilizing Accelerometer and Piezoelectric Sensor." International Journal of Emerging Trends in Engineering Research 8, no. 2 (February 15, 2020): 515–19. http://dx.doi.org/10.30534/ijeter/2020/39822020.

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22

Huang, Peng-Sheng, Tian-Ling Ren, Qi-Wei Lou, Jian-She Liu, Li-Tian Liu, and Zhi-Jian Li. "Design of a Triaxial Piezoelectric Accelerometer." Integrated Ferroelectrics 56, no. 1 (June 2003): 1115–22. http://dx.doi.org/10.1080/10584580390259722.

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23

Levinzon, F. A. "Fundamental Noise Limit of Piezoelectric Accelerometer." IEEE Sensors Journal 4, no. 1 (February 2004): 108–11. http://dx.doi.org/10.1109/jsen.2003.820366.

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24

Wang, Jian Yan, Ting Ting Wang, and Hang Guo. "A New Design of a Piezoelectric Triaxial Micro-Accelerometer." Key Engineering Materials 645-646 (May 2015): 841–46. http://dx.doi.org/10.4028/www.scientific.net/kem.645-646.841.

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Accelerometer in MEMS always is made by capacitive or piezoresistive, whose dynamic response is not good, the operating frequency is narrow, and the cross-axis sensitivity is low. A new type of piezoelectric micro-accelerometer is designed, and its structure is “x” type. The sensing unit is piezoelectric PZT films, which is achieved by sol-gel method. The accelerometer is a triaxial accelerometer. The theoretical and simulation analysis is used to achieve the charge sensitivity and response frequency, and also get the optimal structural parameters. A new circuit connection is proposed to improve the sensitivity and avoid the cross-axis sensitivity. The design achieves the z-axis sensitivity with more than 40 pC/g, x, y-axis sensitivity with more than 8pC/g, and the response frequency is about 3000Hz.

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25

Rajgopal, Srihari, Daniel Zula, Steven Garverick, and Mehran Mehregany. "A Silicon Carbide Accelerometer for Extreme Environment Applications." Materials Science Forum 600-603 (September 2008): 859–62. http://dx.doi.org/10.4028/www.scientific.net/msf.600-603.859.

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A polycrystalline silicon carbide (poly-SiC) surface-micromachined capacitive accelerometer is designed, fabricated and tested. Leveraging the superior thermo-mechanical and chemical resistance properties of SiC, the device is a first step toward cost-effective implementation of a new class of extreme environment accelerometers, for example for high temperature vibration and shock measurements, even thought this initial work is at room temperature. The accelerometer described herein is designed for a range of 5000 g and a bandwidth of 18 kHz, specifications consistent with commercially available piezoelectric devices for high-level mechanical impact measurements. Test results demonstrate the sensor achieving a resolution of 350 mg/√Hz at 1kHz with a sensitivity of 12 μV/g and a bandwidth of 10 kHz at room temperature.

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26

Reus, Roger de, Jens Ole Gulløv, and Patrick R. Scheeper. "Fabrication and characterization of a piezoelectric accelerometer." Journal of Micromechanics and Microengineering 9, no. 2 (January 1, 1999): 123–26. http://dx.doi.org/10.1088/0960-1317/9/2/005.

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27

Nemirovsky, Y., A. Nemirovsky, P. Muralt, and N. Setter. "Design of novel thin-film piezoelectric accelerometer." Sensors and Actuators A: Physical 56, no. 3 (September 1996): 239–49. http://dx.doi.org/10.1016/s0924-4247(96)01324-6.

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Ohtsuki, Yasunori, Yoshiaki Fuda, and Tetsuo Yoshida. "High-Sensitivity Accelerometer Using Multilayer Piezoelectric Ceramics." Japanese Journal of Applied Physics 32, Part 1, No. 9B (September 30, 1993): 4209–11. http://dx.doi.org/10.1143/jjap.32.4209.

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29

Bong, Yu Jing, and Swee Leong Kok. "Characterization on Piezoelectric Cantilever for its Linear Response at Low Frequency for Measuring Acceleration Level of Vibration." Applied Mechanics and Materials 761 (May 2015): 579–83. http://dx.doi.org/10.4028/www.scientific.net/amm.761.579.

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The output response of the piezoelectric cantilever has excellent linearity over a very wide dynamic range. This paper demonstrates the potential of piezoelectric cantilever to be a self-powered accelerometer. Three different-sized piezoelectric cantilevers were tested under a vibration source at 50 Hz, 100 Hz, and 150 Hz. It is proven that the piezoelectric cantilevers can be used as an accelerometer since the output voltage generated by the cantilever is linear and proportional to the vibration acceleration level far before reaching its resonance. Three piezoelectric cantilevers with similar length of 28.6 mm, but different width of 3.2 mm, 6.3 mm and 12.7 mm were used in the experiment in order to observe the linearity of the output voltage from different-sized piezoelectric cantilevers with the same resonance frequency. The length of piezoelectric may affect the resonance frequency of the cantilever, while the width of the piezoelectric will not. Hence, cantilevers with different width are chosen as the subject of the experiment. The linearity of the experiment results show the maximum error percentage obtained is between 5 to 15% when excited at a vibration magnitude in the range of 1 to 5-g.

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Yeo, Hong Goo, Junhee Choi, Changzhu Jin, Seonghun Pyo, Yongrae Roh, and Hongsoo Choi. "The Design and Optimization of a Compressive-Type Vector Sensor Utilizing a PMN-28PT Piezoelectric Single-Crystal." Sensors 19, no. 23 (November 25, 2019): 5155. http://dx.doi.org/10.3390/s19235155.

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Underwater sensors that detect the distance and direction of acoustic sources are critical for surveillance monitoring and target detection in the water. Here, we propose an axial vector sensor that utilizes a small (~1 cm3) compressive-type piezoelectric accelerometer using piezoelectric single crystals. Initially, finite element analysis (FEA) was used to optimize the structure that comprised piezoelectric Pb(Mb1/3Nb2/3)O3-28%PbTiO3 single crystals on a tungsten seismic mass. The receiving voltage sensitivity (RVS) was enhanced through geometric optimization of the thickness and sensing area of the piezoelectric material and the seismic mass. The estimated maximum RVS of the optimized vector sensor was −212 dB. FEA simulations and practical measurements were used to verify the directivity of the vector sensor design, which exhibited a dipole pattern. The dipole beam pattern was used to obtain cardioid patterns using the simulated and measured results for comparison. The results clearly showed the feasibility of using the proposed piezoelectric single-crystal accelerometer for a compressive-type vector sensor.

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FARYŃSKI, Andrzej, Zbigniew ZIÓŁKOWSKI, Mirosław WIJASZKA, and Roman KAMIŃSKI. "DISPOSABLE PIEZOELECTRIC SENSOR OF ACCELERATIONS (ACCELEROMETER) FOR DESTRUCTIVE TESTS." PROBLEMY TECHNIKI UZBROJENIA 159 (May 16, 2022): 73–86. http://dx.doi.org/10.5604/01.3001.0015.8556.

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The paper presents designing specifications and structure of cheap piezoelectric accelerometers on the range up to ca. 4000g developed and made in the AFIT (Air Force Institute of Technology) for destructive tests. Piezoelectric 455 kHz resonating plates were used for the units. Their calibration was described and sensitivity determined on 0.37 - 0.72 mV/g at accuracy < 10%.

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32

Bhaskaran, Prathish Raaja, Joseph Daniel Rathnam, Sumangala Koilmani, and Kavitha Subramanian. "Multiresonant Frequency Piezoelectric Energy Harvesters Integrated with High Sensitivity Piezoelectric Accelerometer for Bridge Health Monitoring Applications." Smart Materials Research 2017 (January 29, 2017): 1–23. http://dx.doi.org/10.1155/2017/6084309.

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Wireless Structural Health Monitoring (WSHM) is a less expensive but efficient mode of health monitoring. However, it needs frequent change of batteries since remote WSHM consumes large power. The best scientific solution to this problem is to employ energy harvesters integrated along with the vibration sensors in the same substrate so that the battery is recharged by the energy harvested during vibrations caused by the passing vehicles in bridges. In this work, an attempt has been made to design an energy harvester and a micro accelerometer integrated chip. Civil structures have low natural frequencies and therefore low bandwidth design is adopted to maximize the harvested energy and accelerometer sensitivity. The other special feature of the proposed design is its ability to provide further increase in energy harvesting by the parallel operation of an array of energy harvesters with closely spaced natural frequencies. The studies show that the natural frequencies of the harvesters should be less than that of the structure in healthy condition. Simulation studies conducted on these devices show that it is possible to harvest a maximum power of 2.283 mW/g. The integrated micro accelerometer is also capable of giving a sensitivity of 27.67 V/g with appreciable improvement in other performance indices.

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Zhang, Jin Tao, You Long Yu, Yun Long Zhang, Kun Li, and Xiang Chun Xi. "High Precision Fiber DFB Laser Micro-Accelerometer." Advanced Materials Research 852 (January 2014): 296–99. http://dx.doi.org/10.4028/www.scientific.net/amr.852.296.

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A distributed feedback (DFB)-laser-based micro-accelerometer is proposed and experimentally demonstrated. The results show that it is characteristic of higher precision than the piezoelectric vibrator. A minimum signal of 9.11×10-4g at 130Hz is acquired.

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34

Ghemari, Zine, Saad Salah, and Rabah Bourenane. "Resonance Effect Decrease and Accuracy Increase of Piezoelectric Accelerometer Measurement by Appropriate Choice of Frequency Range." Shock and Vibration 2018 (June 27, 2018): 1–8. http://dx.doi.org/10.1155/2018/5370438.

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A suitable piezoelectric accelerometer mathematical model is proposed to extract a relationship of motion relative frequency as a function of natural frequency. This relationship helps to select appropriate accelerometer frequency range that minimizes measurement error and improves accuracy. It also allows deducing a formula relating the damping rate and the measurement error of the accelerometer. To protect the accelerometer from failure, the resonance phenomenon effect must be minimized. In order to achieve this objective, physical principle is modeled to find a precise relationship which can determine the accelerometer appropriate frequency range. The developed model was simulated and the obtained results have showed that the selection of the frequency range has minimized the measurement error, increased the accelerometer accuracy, and reduced the resonance effect. Finally a comparative study was conducted to show the importance of the obtained results compared to recent literatures.

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Ghemari, Zine, Salah Saad, Abdelwaheb Amrouche, and Abdelaziz Lakehal. "New model of piezoelectric accelerometer relative movement modulus." Transactions of the Institute of Measurement and Control 37, no. 8 (September 24, 2014): 932–41. http://dx.doi.org/10.1177/0142331214549572.

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36

Moffett, M. B., D. H. Trivett, P. J. Klippel, and P. D. Baird. "A piezoelectric, flexural-disk, neutrally buoyant, underwater accelerometer." IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control 45, no. 5 (September 1998): 1341–46. http://dx.doi.org/10.1109/58.726460.

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Levinzon, F. A. "Noise of piezoelectric accelerometer with integral FET amplifier." IEEE Sensors Journal 5, no. 6 (December 2005): 1235–42. http://dx.doi.org/10.1109/jsen.2005.859256.

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Ghosh, Abhishek Kumar, Sonny F. Burniston, Daniel Krentzel, Abhishek Roy, Adil Shoaib Sheikh, Talha Siddiq, Paula Mai Phuong Trinh, et al. "A Novel Fetal Movement Simulator for the Performance Evaluation of Vibration Sensors for Wearable Fetal Movement Monitors." Sensors 20, no. 21 (October 23, 2020): 6020. http://dx.doi.org/10.3390/s20216020.

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Fetal movements (FM) are an important factor in the assessment of fetal health. However, there is currently no reliable way to monitor FM outside clinical environs. While extensive research has been carried out using accelerometer-based systems to monitor FM, the desired accuracy of detection is yet to be achieved. A major challenge has been the difficulty of testing and calibrating sensors at the pre-clinical stage. Little is known about fetal movement features, and clinical trials involving pregnant women can be expensive and ethically stringent. To address these issues, we introduce a novel FM simulator, which can be used to test responses of sensor arrays in a laboratory environment. The design uses a silicon-based membrane with material properties similar to that of a gravid abdomen to mimic the vibrations due to fetal kicks. The simulator incorporates mechanisms to pre-stretch the membrane and to produce kicks similar to that of a fetus. As a case study, we present results from a comparative study of an acoustic sensor, an accelerometer, and a piezoelectric diaphragm as candidate vibration sensors for a wearable FM monitor. We find that the acoustic sensor and the piezoelectric diaphragm are better equipped than the accelerometer to determine durations, intensities, and locations of kicks, as they have a significantly greater response to changes in these conditions than the accelerometer. Additionally, we demonstrate that the acoustic sensor and the piezoelectric diaphragm can detect weaker fetal movements (threshold wall displacements are less than 0.5 mm) compared to the accelerometer (threshold wall displacement is 1.5 mm) with a trade-off of higher power signal artefacts. Finally, we find that the piezoelectric diaphragm produces better signal-to-noise ratios compared to the other two sensors in most of the cases, making it a promising new candidate sensor for wearable FM monitors. We believe that the FM simulator represents a key development towards enabling the eventual translation of wearable FM monitoring garments.

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Kobayashi, Takeshi, Hironao Okada, Takashi Masuda, Ryutaro Maeda, and Toshihiro Itoh. "A Digital Output Accelerometer Using MEMS-based Piezoelectric Accelerometer Connected to Parallel CMOS Circuit." Procedia Engineering 5 (2010): 1071–74. http://dx.doi.org/10.1016/j.proeng.2010.09.295.

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Fu, Jun, Yu Qin, Xu Hong Yu, Yan Chen, and Xue Ting Shi. "Analysis of Bridge Health Monitoring System for Hongfenghu Bridge Based on Limited Sensors." Applied Mechanics and Materials 193-194 (August 2012): 1247–52. http://dx.doi.org/10.4028/www.scientific.net/amm.193-194.1247.

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GuiYang Hongfenghu bridge health monitoring system was designed in this paper. The strain of girder was monitored by FBG sensors and cable force was monitored by piezoelectric accelerometer, meanwhile vertical motion of girder was monitored by vibration accelerometer and inclinator was applied to tower offset monitoring. Then, the information of multi-heterogeneity sensors was integrated to remote monitor by optical fiber transmission.

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Roh, Taehoun, Hong Goo Yeo, Cheeyoung Joh, Yongrae Roh, Kyungseop Kim, Hee-seon Seo, and Hongsoo Choi. "Fabrication and Underwater Testing of a Vector Hydrophone Comprising a Triaxial Piezoelectric Accelerometer and Spherical Hydrophone." Sensors 22, no. 24 (December 13, 2022): 9796. http://dx.doi.org/10.3390/s22249796.

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A vector hydrophone is an underwater acoustic sensor that can detect the direction of a sound source. Wide-band characteristics and high sensitivity enhance the performance of underwater surveillance systems in complex environments. A vector hydrophone comprising a triaxial piezoelectric accelerometer and spherical hydrophone was fabricated and tested in the air and underwater. The vector hydrophone was designed to exceed the quantitative figures of merit (i.e., receiving voltage sensitivity and bandwidth) of commercially available hydrophones. Accelerometer performance was enhanced by placing a pair of piezoelectric single crystals on each axis and modifying the seismic mass material. The receiving voltage sensitivity of the omnidirectional hydrophone was approximately −160 dB relative to 1 V/μPa with the amplifier in water; the sensitivity of the accelerometer exceeded 300 mV/g in air and −215 dB relative to 1 V/μPa underwater over the frequency range of interest. The receiving directivity of the vector hydrophone was validated underwater, which confirmed that it could detect the direction of a sound source.

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42

Lee, Min-Ku, Seung-Ho Han, Jin-Ju Park, and Gyoung-Ja Lee. "A Theoretical and Empirical Investigation of Design Characteristics in a Pb(Zr,Ti)O3-Based Piezoelectric Accelerometer." Sensors 20, no. 12 (June 23, 2020): 3545. http://dx.doi.org/10.3390/s20123545.

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A theoretical and experimental study on the design-to-performance characteristics of a compression-mode Pb(Zr,Ti)O3-based piezoelectric accelerometer is presented. Using the metamodeling to approximate the relationship between the design variables and the performances, the constituent components were optimized so that the generated electric voltage, representing sensitivity, could be maximized at different set values of the resonant frequency (25–40 kHz). Four kinds of optimized designs were created and fabricated into the accelerometer modules for empirical validation. The accelerometer modules fabricated according to the optimized designs were highly reliable with a broad range of resonant frequency as well as sufficiently high values of charge sensitivity. The fixed (or mounted) resonant frequency was between 16.1–30.1 kHz based on the impedance measurement. The charge sensitivity decreased from 296.8 to 79.4 pC/g with an increase of the resonant frequency, showing an inverse relation with respect to the resonant frequency. The design-dependent behaviors of the sensitivity and resonant frequency were almost identical in both numerical analysis and experimental investigation. This work shows that the piezoelectric accelerometer can be selectively prepared with best outcomes according to the requirements for the sensitivity and resonant frequency, fundamentally associated with trade-off relation.

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Kvasnikov, Volodymyr, and Anatolij Perederko. "Removal of temperature drift of zero of piezoelectric accelerometer." Technology audit and production reserves 1, no. 1(51) (December 24, 2019): 41–44. http://dx.doi.org/10.15587/2312-8372.2020.199068.

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44

Bialas, K. "Piezoelectric accelerometer in reduction of vibrations in mechanical systems." IOP Conference Series: Materials Science and Engineering 400 (September 18, 2018): 022012. http://dx.doi.org/10.1088/1757-899x/400/2/022012.

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45

Sato, Ken, Kohichi Okamoto, Yoshiaki Fuda, and Tetsuo Yoshida. "Analysis of Sensitivity of Accelerometer Using Multilayer Piezoelectric Ceramics." Japanese Journal of Applied Physics 33, Part 1, No. 9B (September 30, 1994): 5378–80. http://dx.doi.org/10.1143/jjap.33.5378.

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46

Shen, Zhiyuan, Chin Yaw Tan, Kui Yao, Lei Zhang, and Yi Fan Chen. "A miniaturized wireless accelerometer with micromachined piezoelectric sensing element." Sensors and Actuators A: Physical 241 (April 2016): 113–19. http://dx.doi.org/10.1016/j.sna.2016.02.022.

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47

Spineanu, Andreea, Philippe Bénabès, and Richard Kielbasa. "A digital piezoelectric accelerometer with sigma-delta servo technique." Sensors and Actuators A: Physical 60, no. 1-3 (May 1997): 127–33. http://dx.doi.org/10.1016/s0924-4247(97)01386-1.

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48

Lin, Edward R. "Airbag Helmet: Design and Analysis of Helmet Piezoelectric Accelerometer." Journal of Physics: Conference Series 1593 (July 2020): 012038. http://dx.doi.org/10.1088/1742-6596/1593/1/012038.

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49

Tanaka, Haruo, and Ryoji Aoyagi. "Analysis of Piezoelectric Bending Accelerometer Using the Equivalent Circuit." Japanese Journal of Applied Physics 35, Part 1, No. 5B (May 30, 1996): 3035–37. http://dx.doi.org/10.1143/jjap.35.3035.

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50

Feriadi, Indra, Fajar Aswin, and M. Iqbal Nugraha. "Analisis Sistem Pengukuran Getaran Mems Accelerometer ADXL345." Manutech : Jurnal Teknologi Manufaktur 9, no. 02 (May 15, 2019): 63–67. http://dx.doi.org/10.33504/manutech.v9i02.48.

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Vibration measurement technology using conventional sensors such as piezoelectric (PZT) Accelerometer is still expensive. Currently, many low-cost vibration measuring devices have been developed by using Micro Electro Mechanical System (MEMS) technology. This study aims to analyze the results of vibration measurement system MEMS Accelerometer ADXL345 with PZT Accelerometer. This research applies design and develop approach with comparative data analysis technique, that is comparing data of result of measurement of MEMS Accelerometer ADXL345 to PZT Accelerometer Vibroport80. The construction comprises the ADXL345 sensor connected to the Arduino Mega 2560 microcontroller operated by Widows operating system and programming language Arduino IDE 1.08. Testing of measurements at Bearing speeds of 500, 1000, and 1500 RPM with length of time measurements at 5, 10, and 20 seconds respectively. The analysis of the test results shows that the MEMS Accelerometer ADXL345 of vibration measurement system can measure, process and display vibration measurement data larger 3% than PZT Accelerometer and can provide the best measurement accuracy at 20 seconds measurement length of time.

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