Relevant bibliographies by topics / Piezoelectric (PZT) actuation

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  1. Journal articles
  2. Dissertations / Theses
  3. Book chapters
  4. Conference papers

Academic literature on the topic 'Piezoelectric (PZT) actuation'

Author: Grafiati
Published: 3 June 2025
Last updated: 22 June 2025

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Journal articles on the topic "Piezoelectric (PZT) actuation"

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Liu, Y.-T., and C.-K. Wang. "A study of the characteristics of a one-degree-of-freedom positioning device using spring-mounted piezoelectric actuators." Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science 223, no. 9 (2009): 2017–27. http://dx.doi.org/10.1243/09544062jmes1422.

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This article presents the actuating performance of a one-degree-of-freedom (DOF) positioning device using spring-mounted piezoelectric (PZT) actuators. To employ a spring with a preset compression, the operational range of a PZT actuator could be simply enlarged, and a sliding table actuated by PZT impact force might feature long stroke and high-precision positioning ability. An experimental set-up consisting of two spring-mounted PZT actuators was configured to examine the actuating characteristics. According to experimental results, a sliding table with a heavy mass of 172 g could be actuated to move with a step motion ranging from 15 nm to 81 μm by only one single actuation of the PZT actuator, and with a maximum travelling speed of 3.47 mm/s by continuous actuation. In addition to experimental examinations, a dynamic model was established and verified as effective in describing the actuating behaviours through numerical examinations.
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Lee, Taik Min, Young Ho Seo, Kyung Hyun Whang, and Doo Sun Choi. "Study on the Lateral Piezoelectric Actuator with Actuation Range Amplifying Structure." Key Engineering Materials 326-328 (December 2006): 289–92. http://dx.doi.org/10.4028/www.scientific.net/kem.326-328.289.

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A novel piezoelectric micro-actuator with actuating range amplification structure has been proposed. This actuator is unique in that the leverage type amplification structure enables large actuating movement with low voltage. In case of general piezoelectric thin film actuator, applied voltage is low and almost zero power is consumed. Its switching time is very fast in comparison with electrostatic actuators and thermal actuators. However, the most drawback of piezoelectric actuator is short actuating range. A 100μm length PZT actuator can only make movement of 100. In this research, we suggest an actuator which can provide geometric amplification of the PZT strain displacement in lateral direction. The lateral piezoelectric MEMS actuator was fabricated and its actuating range was measured. The actuator shows maximum lateral displacement of 1.1μm, and break-down-voltage of the thin film PZT actuator is above 16V.
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Yoon, Kwang Joon, J. D. Lee, K. B. Kim, Hoon Cheol Park, and Nam Seo Goo. "Design and Manufacturing of IDEAL with Stacked Ceramic Layers and Inter-Digitated Electrodes." Key Engineering Materials 306-308 (March 2006): 1175–80. http://dx.doi.org/10.4028/www.scientific.net/kem.306-308.1175.

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This paper is concerned with the development of stacked ceramic thin actuation layer IDEAL (Inter-Digitated Electrode Actuation Layer) using d33 actuation mechanism of piezoelectric ceramic. Most of the thin piezoelectric actuators are operated with d31 actuation mechanism. Many kinds of piezoelectric ceramic actuators are strived now to improve the actuation performance. One of efforts to improve performance of piezoceramic actuators is the research trying to develop an actuator using the piezoelectric coefficient d33. The piezoelectric coefficient d33 is almost twice larger than piezoelectric coefficient d31. Therefore, the induced strain of PZT thin layer with d33 actuation mechanism is bigger than that with d31 actuation mechanism. The AFC and LaRC-MFC used d33 actuation mechanism with surface interdigitated electrode to enhance its actuation performance. But their actuation mechanism is not perfect d33 actuation mechanism since the interdigitated electrodes are placed at the surface of the actuation layer. In this research, the stacked ceramic thin actuation layer with imbedded inter-digitated electrodes is designed and manufactured. The actuation strain of stacked ceramic thin actuation layer is measured and compared with the actuation strain of the LaRC-MFC. The comparison shows that the developed stacked ceramic thin actuation layer can produce 10% more actuation strain than LaRC-MFC at relatively high electric field.
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YEO, C. Y., W. K. SHIM, E. WOUTERSON, TAO LI, and J. MA. "PIEZOELECTRIC MATERIALS FOR IMPEDANCE DRIVEN MICRO-CHANNEL FLOW." Functional Materials Letters 01, no. 03 (2008): 225–28. http://dx.doi.org/10.1142/s1793604708000356.

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This paper presents study of a novel impedance pumping induced by high frequency actuation. PZT (Lead Zirconate Titanate) cantilever beam was being integrated as a form of high frequency actuator to induce flow. The drive test microchannel has the dimension 15 × 3 × 0.4 mm3, and a significant flow rate of 36 μL/s has being measured. Furthermore, flow behavior as functions of actuation amplitude and frequency are presented. It is found that flows were in positive correlations with compression and frequency. The present novel PZT driven micro impedance pump may offer an alternate solution in microfludic systems.
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Liu, Guojun, Yanyan Zhang, Jianfang Liu, et al. "An Unconventional Inchworm Actuator Based on PZT/ERFs Control Technology." Applied Bionics and Biomechanics 2016 (2016): 1–9. http://dx.doi.org/10.1155/2016/2804543.

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An unconventional inchworm actuator for precision positioning based on piezoelectric (PZT) actuation and electrorheological fluids (ERFs) control technology is presented. The actuator consists of actuation unit (PZT stack pump), fluid control unit (ERFs valve), and execution unit (hydraulic actuator). In view of smaller deformation of PZT stack, a new structure is designed for actuation unit, which integrates the advantages of two modes (namely, diaphragm type and piston type) of the volume changing of pump chamber. In order to improve the static shear yield strength of ERFs, a composite ERFs valve is designed, which adopts the series-parallel plate compound structure. The prototype of the inchworm actuator has been designed and manufactured in the lab. Systematic test results indicate that the displacement resolution of the unconventional inchworm actuator reaches 0.038 μm, and the maximum driving force and velocity are 42 N, 14.8 mm/s, respectively. The optimal working frequency for the maximum driving velocity is 120 Hz. The complete research and development processes further confirm the feasibility of developing a new type of inchworm actuator with high performance based on PZT actuation and ERFs control technology, which provides a reference for the future development of a new type of actuator.
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Karthikeyan, A.S, and H.G Hanumantharaju. "Analysis of PZT/PVDF Actuated Cantilever Beams." Journals of Advancement in Machines 4, no. 2 (2019): 37–46. https://doi.org/10.5281/zenodo.3364189.

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Recent advancement in the field of distributed sensor/actuators has led to the development of new structures called “smart structure”. A smart/intelligent structure is able to sense, respond and control its own characteristics and states, so as to significantly improve its operational performance. A structure becomes smart when the load bearing part also called the substrate is composed of conventional structural material and is integrated with the distributed actuation/sensor maybe piezoelectric, shape memory alloys, electrostrictive materials, magnetostrictive materials etc. In the present work, a systematic modelling technique is proposed for static and dynamic analysis of beam coupled with piezoelectric sensors/actuators by using the finite element method if formulation. The sensor/actuator layer made of a piezoelectric/polymer called PZT/PVDF is considered.
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Meshkinzar, Ata, and Ahmed M. Al-Jumaily. "Cylindrical Piezoelectric PZT Transducers for Sensing and Actuation." Sensors 23, no. 6 (2023): 3042. http://dx.doi.org/10.3390/s23063042.

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Piezoelectric transducers have numerous applications in a wide range of sensing and actuation applications. Such a variety has resulted in continuous research into the design and development of these transducers, including but not limited to their geometry, material and configuration. Among these, cylindrical-shaped piezoelectric PZT transducers with superior features are suitable for various sensor or actuator applications. However, despite their strong potential, they have not been thoroughly investigated and fully established. The aim of this paper is to shed light on various cylindrical piezoelectric PZT transducers, their applications and design configurations. Based on the latest literature, different design configurations such as stepped-thickness cylindrical transducers and their potential application areas will be elaborated on to propose future research trends for introducing new configurations that meet the requirements for biomedical applications, the food industry, as well as other industrial fields.
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Chen, Hua Wei, and Ichiro Hagiwara. "Novel Precision PZT-Driven Micropositioning Stage with Large Travel Range." Key Engineering Materials 407-408 (February 2009): 159–62. http://dx.doi.org/10.4028/www.scientific.net/kem.407-408.159.

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One novel long-travel piezoelectric-driven linear micropositioning stage capable of moving in a stepping mode is developed. The stick-slip friction effect between flexure hinge actuation tips with a sliding stage is used to drive the stage step-by-step through an enlarged displacement of piezoelectric actuator. In order to enlarge the travel range, magnifying mechanism is optimally designed by use of flexure hinge and lever beam. Moreover, dynamic model of such stage is proposed by consideration of reset integrator stick-slip model. The simulation results show that the stage has considerable good dynamic properties.
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Ngernchuklin, Piyalak, Arjin Boonruang, Chalearmchai Jeerapan, Pracha Laoauyporn, Sittichai Kanchanasutha, and Jung Ho Ryu. "Electromechanical Displacement of Soft/Hard PZT Bi-Layer Composite Actuator." Key Engineering Materials 659 (August 2015): 96–101. http://dx.doi.org/10.4028/www.scientific.net/kem.659.96.

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PZTs can be classified into two types, i.e., soft and hard PZTs, which are categorized by the piezoelectric and ferroelectric properties such as coercive field, piezoelectric strain, mechanical quality factor etc. It is known that the combination effect of the soft/hard PZT composites can generate large strain/actuation compared to monolithic PZT ceramics. In this study, soft and hard PZT powders were co-pressed into bi-layer disks with various ratios between soft and hard PZT powders, ranging from 0:100~100:0 vol. % (with 10 % increments) and then they were co-sintered. Due to the difference in the planar shrinkage of the two layers and thermal expansion coefficient mismatch, dome-shaped bi-layer composites with various dome heights were obtained. It was shown that the constrained layer either soft PZT or hard PZT affected various properties including the dome geometry, the strain-E-field response, and the displacement hysteresis loop. The electromechanical properties and actuation performance of such bi-layer composite actuators have been investigated and compared to the soft and hard PZT single layer counterparts.
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Guan. "Performance Analysis of a Microfluidic Pump Based on Combined Actuation of the Piezoelectric Effect and Liquid Crystal Backflow Effect." Micromachines 10, no. 9 (2019): 584. http://dx.doi.org/10.3390/mi10090584.

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A novel combined actuation method based on the piezoelectric effect and liquid crystal backflow effect is proposed in this paper. The coupling mechanism of a piezoelectric transducer (PZT) and liquid crystal (LC) in a combined driving mode is analyzed, and the governing equations of electromechanical coupling based on inverse piezoelectric effect and the classical Leslie–Ericksen backflow equation are modified under combined driving method. The new multifield coupling dynamic equations for numerical analysis is established. Experimentally, a sandwiched micropump was manufactured and sealed with wet etching technology on a glass wafer. A testing platform was built to analyze the particles motion and the flow rates were measured with both single PZT or LC actuation and combined actuation. Comparing the results of the numerical analysis and experimental testing of the flow rate and LC molecule motion under different driving voltages and frequencies, the performance of the PZT/LC combined driving is found to be superior to that of the single driving mode (PZT or LC driving) under the same driving conditions. Moreover, the new combined driving mode overcome the disadvantages of single driving mode and enhance the driving efficiency significantly. The simulation results are in good agreement with the experimental data. The maximum flow rate of the micropump achieved was 4.494 μL/min with combined driving method.
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Dissertations / Theses on the topic "Piezoelectric (PZT) actuation"

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Oliveira, Éder Luiz. "Application of piezoelectric materials as sensor and actuator for aeroelastic investigation." Instituto Tecnológico de Aeronáutica, 2014. http://www.bd.bibl.ita.br/tde_busca/arquivo.php?codArquivo=3038.

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This dissertation aims to apply piezoelectric materials as actuator and sensor to perform aeroelastic analysis. Two semi-span wing models based on flat plates with different characteristics were tested using PZT (Lead Zirconate Titanate) as actuator, PVDF (Polyvinylidene Fluoride) as sensor and the results were compared with vibrometer laser results. An aluminum model with a ballast on the wing tip, whose its location can be modified was tested in experimental modal analysis. Using the aluninum model, an investigation about aeroelastic behaviour was conducted in wind tunnel and the V-g/V-f diagram determined. This diagram shows the aeroelastic evolution of the natural frequencies and damping as function of speed (or dynamic pressure). In this aeroelastic analysis, the ability of the PVDF in determining the V-g/V-f diagram was evaluated. A numerical model of composite flat plate was generated considering the piezoelectric instrumentations. The second specimen tested corresponds to composite wing models that are based on laminate composite flat plate. Five models with different fiber orientations were tested in (pure) experimental modal analyses and wind tunnel, hence, the capability of excitation of PZT was verified. Good results were obtained regarding the estimation of natural frequency and damping factor using a single PVDF element. The application of PZT as actuator in the wind tunnel test showed improvement on the data acquisition in terms of noise. However, were observed some characteristics that require careful. As support to experimental tests, several studies were performed.
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Hradil, Aleš. "Návrh mikroaktuátoru s využitím SMART materiálů." Master's thesis, Vysoké učení technické v Brně. Fakulta strojního inženýrství, 2011. http://www.nusl.cz/ntk/nusl-229700.

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The master’s thesis deals with the proposal of microactuator based on SMART material. The thesis opens with the comparison of SMART materials which are suitable for actuator construction from the point of view of a reaction on stimulation in form of deformation. Subsequent part of the thesis is the report theory of piezoelectric effect, it also describes direct and indirect effects and it concerns about the description of piezoelectric materials. The thesis focuses on several principles of piezoactuators and motors. The last part of the thesis includes modeling and simulation of piezoelectric material in program ANSYS 13.0 and dimensioning geometric of actuator with evaluation of impact of parameters on final motion.
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Zai, Marvin Ho-Ming. "Chemical synthesis of lead zirconate titanate thin films for a piezoelectric actuator." Thesis, Imperial College London, 2000. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.367760.

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Dunbabin, Matthew D. "The influence of temperature on PZT sensors & actuators for active vibration control of flexible structures." Thesis, Queensland University of Technology, 2002. https://eprints.qut.edu.au/36162/7/36162_Digitised%20Thesis-4_Redacted.pdf.

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In real operating environments, flexible structures exhibiting dynamic oscillations such as aircraft and spacecraft can experience large changes in temperature during their normal operating cycle, typically in the range -70 to 80 degrees Celsius. The use of piezoelectric actuators and sensors to control these dynamic oscillations have been widely explored at constant temperature, although only limited studies have been conducted on the effect that varying temperature has on the active control of flexible structures. The objective of this research is to study the influence of PZT sensors and actuators for vibration control of flexible structures where nonlinearities in piezoelectric and structural material properties change as the system temperatures vary significantly with time. This involved the development of a set of data based parameters that enabled the accurate modelling of a nonlinear flexible system in which its dynamics are actively controlled via the use of piezoelectric sensors and actuators. These parameters determined the design of a control scheme to actively control the system over a large range of operating temperatures, and give an optimised control performance throughout its operating regime. The work reported in this thesis describes selected methods for rapidly examining a number of the more common nonlinear properties of PZT associated with vibration control. An extensive numerical and experimental investigation is performed which shows that when used in active vibration control applications, the variations in PZT properties with temperature can ultimately affect the ability of the piezoelectric actuator and sensors to suppress vibration in flexible structures. Accurate simulation models of the lightweight piezo-actuated cantilevered structures were developed to evaluate the performance of a number of common vibration control schemes subject to significant temperature variations. This research was then extended to an innovative scaled wing-type structure subjected to temperature variations. A suitable adaptive self-tuning control scheme was developed and investigated numerically and experimentally, illustrating the benefit of adaptive control in this instance. The adaptive control technique was shown numerically and experimentally to provide improved settling times and damping ratios over equivalent fixed gain controllers for the class of structures investigated where limited control authority exists. The experimental investigation of PZT sensors and actuators has provided further understanding of the nonlinear behaviour of various light, flexible structures where temperature effects on the system dynamics and control are significant. This research has unveiled previously unreported nonlinearities and has expanded on traditional nonlinearities. These results can assist with the detailed design of applications involving PZT sensors and actuators in for example the aerospace and automotive industries.
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Ciubotariu, Dragos. "Design, Modeling, Fabrication and Control of PMN-PT Piezoelectric Systems." Thesis, Besançon, 2016. http://www.theses.fr/2016BESA2048/document.

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Ce travail propose l’utilisation d’un nouveau matériau, appelé PMN-PT, qui continue aider la miniaturisation des systèmes complexes, utilisés dans des différentes technologies. Le travail est présenté dans le cadre de collaboration entre deux projets, MIOP et ADMAN. Les besoins tient compte que les actionneurs soient capables de délivrer de haute déplacement tout en conservant la simplicité et la fiabilité du système. L’accent est mis sur la polyvalence de ce matériau piézo-électrique, PMN-PT, en raison de ses propriétés électro-mécanique. Le travail comprend un aperçu sur quoi influence les propriétés électro-mécaniques du PMN-PT. L’accent est mis sur deux différentes, mais très puissants coupes: anisotrope [011] et longitudinale [001], choisi pour grand déplacement et haute dynamique avec un volume petit. Pour le PMN-PT[001], une structure de type poutre a été étudié, avec un modèle amélioré pour prendre en compte les spécificités de matériel. Les déplacements et forces ont été trouvés d’ être supérieur `a un actionneur en PZT, similairement dimensionnée, tandis que avoir des non-linéarités réduites. Ceci est illustré avec une micro pince avec 6DDL. L’étude de PMN-PT [001] coupé longitudinal suit. Cette étude a été fait en utilisant PMNPT comme un actionneur avec une structure simple, facile à intégrer. Les résultats démontrent les améliorations PMN-PT peut apporter à micro-spectrométrie et la correction d’image avec des micromiroirmobiles. Un micro actionneur PMN-PT a été intégré dans une structure compatible avec des MOEMS et présenté<br>This work proposes the use of a novel material, called PMN-PT, that futher aids the miniaturizationof complex systems used in different technologies. The work is presented within the collaborativeframework of two projects, MIOP and ADMAN. The end-needs account for actuators capable ofdelivering high displacement, while maintaining system simplicity and reliability. The focus is onthe versatility of the PMN-PT piezoelectric material, due to its electro-mechanical properties. Thework includes an overview on what influences the electro-mechanical properties focusing on twodifferent, though very potent cuts: anisotropic [011] and longitudinal [001]. They were chosen forgenerating large displacement and high dynamics with small volume. For PMN-PT[001] a cantileverstructure was studied, for which the model was improved taking into account the material specificities.Displacements and forces were found to be superior to a similarly dimensioned PZT actuator, whilsthaving reduced non-linearities. This is exemplified with a 6 DoF capable microgripper. The PMNPT[001] longitudinal cut based actuator study follows. This is done by using PMN-PT as a simple,easy to integrate, bulk actuator. The findings demonstrate the improvements PMN-PT can bringto micro-spectrometry and image correction with micro-mirror displacement. A bulk PMN-PT microactuator was integrated into a MOEMS compatible structure and presented
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Wu, Xiaosong. "A reconfigurable tactile display based on polymer MEMS technology." Diss., Georgia Institute of Technology, 2008. http://hdl.handle.net/1853/22623.

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This research focuses on the development of polymer microfabrication technologies for the realization of two major components of a pneumatic tactile display: a microactuator array and a complementary microvalve (control) array. The concept, fabrication, and characterization of a kinematically-stabilized polymeric microbubble actuator (¡°endoskeletal microbubble actuator¡±) were presented. A systematic design and modeling procedure was carried out to generate an optimized geometry of the corrugated diaphragm to satisfy membrane deflection, force, and stability requirements set forth by the tactile display goals. A refreshable Braille cell as a tactile display prototype has been developed based on a 2x3 endoskeletal microbubble array and an array of commercial valves. The prototype can provide both a static display (which meets the displacement and force requirement of a Braille display) and vibratory tactile sensations. Along with the above capabilities, the device was designed to meet the criteria of lightness and compactness to permit portable operation. The design is scalable with respect to the number of tactile actuators while still being simple to fabricate. In order to further reduce the size and cost of the tactile display, a microvalve array can be integrated into the tactile display system to control the pneumatic fluid that actuates the microbubble actuator. A piezoelectrically-driven and hydraulically-amplified polymer microvalve has been designed, fabricated, and tested. An incompressible elastomer was used as a solid hydraulic medium to convert the small axial displacement of a piezoelectric actuator into a large valve head stroke while maintaining a large blocking force. The function of the microvalve as an on-off switch for a pneumatic microbubble tactile actuator was demonstrated. To further reduce the cost of the microvalve, a laterally-stacked multilayer PZT actuator has been fabricated using diced PZT multilayer, high aspect ratio SU-8 photolithography, and molding of electrically conductive polymer composite electrodes.
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Li, Jun Han, and 李俊翰. "Processing Development and Ferroelectric Properties of PZT Thin-Film Piezoelectric Micro-actuator." Thesis, 2001. http://ndltd.ncl.edu.tw/handle/69746336768936622218.

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碩士<br>國立交通大學<br>材料科學與工程系<br>89<br>The superior piezoelectric properties of ferroelectric materials make it suitable for micro-actuators applications. In this work, sol-gel process was used to deposit the PZT film on a 4” Si wafer by multiple spin-coating. By using micromaching technology, the fabrication process of a piezoelectric micro-actuator based on PZT-film micro-diaphram and cantilever-type structure has been developed. It was found that the adhesion metal in between Pt and Si3N4 or SiO2 has strong influence on phase crystallization and microstructure evolution of PZT films. The deflection of micro-cantilever beam was also evaluated in order to analyze the residual strain and flat effect of PZT beam by changing the layer thickness of Pt/PZT/Pt/Ta/ Si3N4 /Si structure. In addition, the fabrication process and physical characteristics of bi-layer PZT film structure was also developed. Finite element (FEM) simulation was further performed to discuss the difference between single layer and bi-layer PZT-film structure. The piezoelectric response of the PZT-based micro-actuator at static and resonant condition is measured by the Doppler interferometer that further demonstrates that it (PZT-film actuator) works properly.
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Book chapters on the topic "Piezoelectric (PZT) actuation"

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Shevtsov, Sergey N., Arkady N. Soloviev, Ivan A. Parinov, Alexander V. Cherpakov, and Valery A. Chebanenko. "Amplified High-Stroke Flextensional PZT Actuator for Rotorcraft Application." In Piezoelectric Actuators and Generators for Energy Harvesting. Springer International Publishing, 2018. http://dx.doi.org/10.1007/978-3-319-75629-5_4.

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Küppers, H., T. Leuerer, U. Schnakenberg, et al. "PZT thin films for piezoelectric micro-actuator applications." In Transducers ’01 Eurosensors XV. Springer Berlin Heidelberg, 2001. http://dx.doi.org/10.1007/978-3-642-59497-7_234.

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Zhang, Hai Long, and Jing Feng Li. "Fabrication and Evaluation of PZT/Ag Piezoelectric Composites and Graded Actuator." In High-Performance Ceramics III. Trans Tech Publications Ltd., 2007. http://dx.doi.org/10.4028/0-87849-959-8.1913.

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Shields, Joel, and Edward Konefat. "Modeling of Piezoceramic Actuators for Control." In Piezoelectric Actuators - Principles, Design, Experiments and Applications [Working Title]. IntechOpen, 2021. http://dx.doi.org/10.5772/intechopen.96727.

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In this chapter a full electromechanical model of piezoceramic actuators is presented. This model allows for easy integration of the piezo stack with a structural finite element model (FEM) and includes the flow of energy into and out of the piezo element, which is governed by the transducer constant of the piezo element. Modeling of the piezo stack capacitive hysteresis is achieved using backlash basis functions. The piezo model can also be used to predict the current usage of the PZT which depends on the slew rate of the voltage applied to the PZT. Data from laboratory experiments using a load frame and free response tests is used to estimate the PZT model parameters. In addition, a simplified model of a modulated full bridge strain gauge is derived based on test data which includes the effect of intrinsic bridge imbalance. Sensors of this type are often used with feedback control to linearize the behavior of the device. Taken together, the actuator and sensor model can be used for the development of piezo actuated control algorithms.
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Kour, Paramjit, and Sudipta Kishore Pradhan. "Perovskite Ferroelectric." In Multifunctional Ferroelectric Materials. IntechOpen, 2021. http://dx.doi.org/10.5772/intechopen.98382.

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The spectrums of properties exhibited by ferroelectric materials are dielectric, ferroelectric, piezoelectric and pyroelectric effect. This is the makes these materials to have a wide range of useful application. Infrared detectors are used pyroelectric effect of ferroelectric materials. It is used in nonvolatile memories due to have ferroelectric hysteresis. Its piezoelectric properties make them useful for actuator, radio frequency filter, sensor, and transducer. Ferroelectric capacitors are used, their good dielectric behavior. According to the necessity of the system they are available in different form such as single crystals, ceramics, thin film, and polymer, composite. The diversity of properties ferroelectric materials always attracted the attention of engineers and researchers. Size reduction of this material from micro to nanoscale established an enormous consideration to develop nanotechnology. Its vast use of different filed imposed the in detail research in adding to the development of processing and characterization method. This chapter will put some light on some fundamental principle of ferroelectricity, the list of perovskite materials and their application.
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Conference papers on the topic "Piezoelectric (PZT) actuation"

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Wang, Xuchen, Chung-Min Li, Yukio Suzuki, and Shuji Tanaka. "Mechanical Quality Factor Evaluation of Polymer Materials using PZT/Polymer Integrated Piezoelectric Actuator." In 2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS). IEEE, 2024. http://dx.doi.org/10.1109/nems60219.2024.10639927.

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Park, Jung-Ho, Kazuhiro Yoshida, and Shinichi Yokota. "A Piezoelectric Micropump Using Resonance Drive: Proposal of Resonance Drive and Basic Experiments on Pump Characteristics." In ASME 1997 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 1997. http://dx.doi.org/10.1115/imece1997-1285.

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Abstract In this study, a piezoelectric micropump using resonance drive is proposed and fabricated. Fabricated piezoelectric micropump basically consists of a bellows acting as a reciprocating pump chamber, a multilayered PZT actuator for oscillating the bellows and normally closed cantilever type of two check valves. Frequency characteristics of flow rate and pressure are investigated with different amount of additional mass. Furthermore, output characteristics of the pump are investigated when a bellows is attached to the outlet as a varying load. Through those experiments, it is ascertained that the maximum flow rate with no load pressure is about 100mm3/s, the maximum output pressure is about 0.25MPa and the maximum output power of the fabricated pump is about 4mW. As a result, the feasibility of the piezoelectric micropump with resonance drive is confirmed.
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Castillo, Zachary, Brandon Smith, Alex Will-Cole, et al. "An Optically Broadband Piezo-Optomechanical Magnetometer." In CLEO: Science and Innovations. Optica Publishing Group, 2024. http://dx.doi.org/10.1364/cleo_si.2024.sth4c.3.

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We demonstrate optically broadband piezo-optomechanical magnetometry, integrating a Mach-Zehnder interferometer with magnetostrictive material for magnetic responsivity and piezoelectric material for actuation/control, with broadband sensitivity ~1 nt/√hz up to ~500 kHz and ~10 pT/√Hz at mechanical resonance.
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Kommepalli, Hareesh K. R., Andrew D. Hirsh, Christopher D. Rahn, and Srinivas A. Tadigadapa. "Piezoelectric T-Beam Microactuators." In ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference. ASMEDC, 2008. http://dx.doi.org/10.1115/detc2008-49886.

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This paper introduces a novel T-beam actuator fabricated by a piezoelectric MEMS fabrication process. ICP-RIE etching from the front and back of a bulk PZT chip is used to produce stair stepped structures through the thickness with complex inplane shapes. Masked electrode deposition creates active and passive regions in the PZT structure. With a T-shaped crosssection, and bottom and top flange and web electrodes, a cantilevered beam can bend in-plane and out-of-plane with bimorph actuation in both directions. One of these T-beam actuators is fabricated and experimentally tested. An experimentally validated model predicts that the cross-section geometry can be optimized to produce higher displacement and blocking force.
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Kobayashi, Takeshi, Jiunnjye Tsaur, and Ryutaro Maeda. "Development of 1D Optical Micro Scanner Driven by Piezoelectric Actuators." In ASME 2005 Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems collocated with the ASME 2005 Heat Transfer Summer Conference. ASMEDC, 2005. http://dx.doi.org/10.1115/ipack2005-73431.

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1D optical micro scanners driven by piezoelectric actuators have designed, simulated, fabricated and tested. The newly designed micro scanners have a structure that rotation bars, hinges and PZT cantilevers support a square mirror (1mm × 1mm). Flat-structured micro scanners have been fabricated from Pt/PZT/Pt/Ti/SiO2/SOI(Si/SiO2/Si) multi-layered structure through conventional MEMS micro fabrication technologies. The micro scanner driven at 10 V showed an optical scan angle of 1.5 degree for the static actuation (60 Hz) and of 13 degree for the resonant actuation (4825 Hz), respectively.
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Lee, Cheng-Chun, G. Z. Cao, and I. Y. Shen. "Actuation Enhancement of PZT Thin-Film Membrane Actuators via Stress Relief Grooves." In ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference. ASMEDC, 2008. http://dx.doi.org/10.1115/detc2008-49283.

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Lead Zirconate Titanate Oxide (PbZrxTi1−xO3 or PZT) is a piezoelectric material widely used as sensors and actuators. For microactuators, PZT often appears in the form of thin films to maintain proper aspect ratios. A common design is PZT membrane microactuator, whose actuation portion takes a form of a thin diaphragm driven by a PZT thin film. To maximize actuation displacements, finite element analyses are conducted to identify critical design parameters of the PZT film. In the simulation, a constant driving electric field is maintained and boundary conditions of the PZT film are varied. The finite element analyses lead to two important results. First, the actuator displacement increases as the PZT film thickness increases, but saturates at a critical PZT film thickness. Second, when stress relief grooves are introduced and the PZT film surrounding the membrane area is removed, the actuator displacement increases substantially by at least a factor of 5.
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Deshpande, Mandar, and Laxman Saggere. "Development of a Light-Driven Thin-Film Piezoelectric Microactuator." In ASME 2005 International Mechanical Engineering Congress and Exposition. ASMEDC, 2005. http://dx.doi.org/10.1115/imece2005-79819.

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This paper presents the design, fabrication and experimental characterization of a self-contained light-driven microactuator that could find a potential application in a novel retinal prosthesis. The conceived actuator system comprises of a miniaturized solid-state solar cell connected in series with a thin-film piezoelectric microactuator, both fabricated and integrated on a single chip through conventional microfabrication processes. When irradiated with light, the solar cell generates voltage across the thin-film microactuator, which bends and produces mechanical actuation. The novelty of the actuator system lies in its unique integrated design to meet its unique application requirements of producing the output mechanical actuation for input light energy at low illumination levels in the range of 0.1–3 W/m2. The work demonstrates the fabrication feasibility of the miniaturized solar cell and the PZT thin-film microactuator, and characterizes their performance separately. The solar cell is fabricated by creating a p-n junction over a small area on a single crystal p-type silicon substrate. The microactuator is fabricated as a 600 nm sol-gel derived 52/48 PZT thin-film on a silicon diaphragm. The voltage output characteristics of the solar cell, experimentally studied as a function of the incident irradiance, shows an open circuit voltage of 250–300 mV under 0.6–1.6 W/m2 irradiance. The PZT thin-film microactuator, actuated under low voltages of 0–700 mV, showed deflections in the range of 0–16 nm. Finally, the light-driven actuation is demonstrated by connecting the miniaturized solar cell with the PZT thin-film microactuator and measuring deflections of 5–7 nm under low illumination levels of 0.6–1.6 W/m2.
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Kobayashi, T., N. Makimoto, T. Oikawa, A. Wada, H. Funakubo, and R. Maeda. "Linear actuation piezoelectric microcantilever using tetragonal composition PZT thin films." In 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, 2013. http://dx.doi.org/10.1109/memsys.2013.6474266.

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Jiang, X. N., P. W. Rehrig, W. S. Hackenberger, J. Moore, S. Chodimella, and B. Patrick. "Single Crystal Piezoelectric Actuators for Advanced Deformable Mirrors." In ASME 2004 International Mechanical Engineering Congress and Exposition. ASMEDC, 2004. http://dx.doi.org/10.1115/imece2004-60504.

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In this paper, single crystal piezoelectric actuators are developed and demonstrated as a means of increasing actuator authority while maintaining strain precision for adaptive optics used large throw deformable mirror applications. Single crystal (PMN-PT crystal) stack actuators with foot print size of 5 mm × 5 mm and height varied from 16 mm to 21 mm have been designed, fabricated and tested. The actuation stroke larger than 50 μm is obtained under driving electric field of 15 KV/cm for single crystal stack actuators. In-plane actuation stroke is about 25 μm under 8KV/cm for single crystal plate actuators. The characterization results show that the single crystal piezoelectric actuators hold enhanced stroke and coupling coefficient (&amp;gt;0.83) under lower driving field comparing with PZT counterpart, while keep the nature of piezoelectric actuations with high precision, high resolution, fast response under high preload stress. The potential benefits of incorporating these actuators in a deformable mirror (DM) design were demonstrated by system modeling using the Integrated Optical Design Analysis Software (IODA) developed by SRS. The modeling shows that low order aberrations with peak to valley errors as large as 40 microns could be corrected to diffraction limited performance with a reasonable number of actuators and acceptable actuator forces and face sheet stresses. In the case of DM correction with 20 microns of 1st-Order Astigmatism-X error (Peak to valley: 38.74 μm, RMS error: 8.13 μm), the corrected wavefront error was reduced to PV of 0.26 μm and RMS error of 0.024 μm, which suggest promise for large throw DM applications.
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Hall, Asha J., and Jaret C. Riddick. "Active Bend-Twist PZT Actuator for Centimeter-Scale Flapping Wing Micro-Air Vehicle." In ASME 2011 Conference on Smart Materials, Adaptive Structures and Intelligent Systems. ASMEDC, 2011. http://dx.doi.org/10.1115/smasis2011-5085.

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The present study focuses on development of a flapping wing micro-air vehicle (FWMAV) that employs a piezoelectric actuator to drive the leading edge of the wing. An analysis of insect flight indicates that in addition to the bending excitation (flapping), simultaneous excitation of the twisting degree-of-freedom is required to adequately manipulate the control surface. A functionally-modified piezoelectric bimorph composed of Pb(Zr0.55Ti0.45)O3 (PZT) is being used to produce two degree-of-freedom motion, namely the flapping and twisting facilitated by an off-axis layer of piezoelectric segments affixed to the top surface of a traditional bimorph actuator. The modification of the top surface of a traditional PZT bimorph actuator introduces active bend-twist coupling to the flexural response of the resulting layered PZT. This paper presents analytical and experimental investigation of functionally-modified bimorph designs intended for active bend-twist actuation of cm-scale flapping wing devices.
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