Academic literature on the topic 'Pirani Vacuum Gauges'

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Journal articles on the topic "Pirani Vacuum Gauges"

1

Zavarian, Ali Asghar, Ali Arman, S. M. Jamal Ghotbi, et al. "Behaviors of capacitive and Pirani vacuum gauges." Vakuum in Forschung und Praxis 30, no. 5 (2018): 39–44. http://dx.doi.org/10.1002/vipr.201800693.

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2

Seong, Dae Jin, Yong Hyeon Shin, Kwang Hwa Chung, D. H. Kim, Je Sik Shin, and Y. J. Yun. "Enhanced Sensitivity of the Pirani Vacuum Gauge by the AC Driving Method." Key Engineering Materials 277-279 (January 2005): 990–94. http://dx.doi.org/10.4028/www.scientific.net/kem.277-279.990.

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Abstract:
We improved the sensitivity of existing commercial Pirani-vacuum gauges employing the AC method in the vacuum range above 1 Torr. The signals obtained through the use of the AC method yield information related to the specific heat and heat conductivity of gas. The output signal is obtained by two components: the oscillating temperature amplitude, and its phase. The amplitude increases with the decrease of pressure in the vacuum range from the atmosphere to about 1 Torr, which arises from the decrease of the heat capacity with the decrease of gas density. In contrast, the phase decreases monoto
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3

Jousten, Karl. "On the gas species dependence of Pirani vacuum gauges." Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 26, no. 3 (2008): 352–59. http://dx.doi.org/10.1116/1.2897314.

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4

Schelcher, G., E. Lefeuvre, S. Brault, et al. "Micro Pirani vacuum gauges manufactured by a film transfer process." Procedia Engineering 5 (2010): 1136–39. http://dx.doi.org/10.1016/j.proeng.2010.09.311.

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5

Zhang, Le-Min, Bin-Bin Jiao, Shi-Chang Yun, Yan-Mei Kong, and Da-Peng Chen. "Investigation and Optimization of Pirani Vacuum Gauges With Monocrystal Silicon Heaters and Heat Sinks." Journal of Microelectromechanical Systems 26, no. 3 (2017): 601–8. http://dx.doi.org/10.1109/jmems.2017.2680738.

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6

Topalli, Ebru Sagiroglu, Kagan Topalli, Said Emre Alper, Tulay Serin, and Tayfun Akin. "Pirani Vacuum Gauges Using Silicon-on-Glass and Dissolved-Wafer Processes for the Characterization of MEMS Vacuum Packaging." IEEE Sensors Journal 9, no. 3 (2009): 263–70. http://dx.doi.org/10.1109/jsen.2008.2012200.

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7

Lai, Junhua, Yanmei Kong, Binbin Jiao, et al. "Study on Fusion Mechanisms for Sensitivity Improvement and Measurable Pressure Limit Extension of Pirani Vacuum Gauges With Multi Heat Sinks." Journal of Microelectromechanical Systems 29, no. 1 (2020): 100–108. http://dx.doi.org/10.1109/jmems.2019.2954155.

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8

Weng, Ping Kuo, and Jin‐Shown Shie. "Micro‐Pirani vacuum gauge." Review of Scientific Instruments 65, no. 2 (1994): 492–99. http://dx.doi.org/10.1063/1.1145163.

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9

Shie, Jin‐Shown, Bruce C. S. Chou, and Yeong‐Maw Chen. "High performance Pirani vacuum gauge." Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 13, no. 6 (1995): 2972–79. http://dx.doi.org/10.1116/1.579623.

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10

Jitschin, W., and S. Ludwig. "Gepulstes Heißdraht-Vakuummeter mit Pirani-SensorPulsed hot filament vacuum gauge with Pirani sensor." Vakuum in Forschung und Praxis 16, no. 1 (2004): 23–29. http://dx.doi.org/10.1002/vipr.200400015.

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