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Academic literature on the topic 'Pirani Vacuum Gauges'
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Journal articles on the topic "Pirani Vacuum Gauges"
Zavarian, Ali Asghar, Ali Arman, S. M. Jamal Ghotbi, et al. "Behaviors of capacitive and Pirani vacuum gauges." Vakuum in Forschung und Praxis 30, no. 5 (2018): 39–44. http://dx.doi.org/10.1002/vipr.201800693.
Full textSeong, Dae Jin, Yong Hyeon Shin, Kwang Hwa Chung, D. H. Kim, Je Sik Shin, and Y. J. Yun. "Enhanced Sensitivity of the Pirani Vacuum Gauge by the AC Driving Method." Key Engineering Materials 277-279 (January 2005): 990–94. http://dx.doi.org/10.4028/www.scientific.net/kem.277-279.990.
Full textJousten, Karl. "On the gas species dependence of Pirani vacuum gauges." Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 26, no. 3 (2008): 352–59. http://dx.doi.org/10.1116/1.2897314.
Full textSchelcher, G., E. Lefeuvre, S. Brault, et al. "Micro Pirani vacuum gauges manufactured by a film transfer process." Procedia Engineering 5 (2010): 1136–39. http://dx.doi.org/10.1016/j.proeng.2010.09.311.
Full textZhang, Le-Min, Bin-Bin Jiao, Shi-Chang Yun, Yan-Mei Kong, and Da-Peng Chen. "Investigation and Optimization of Pirani Vacuum Gauges With Monocrystal Silicon Heaters and Heat Sinks." Journal of Microelectromechanical Systems 26, no. 3 (2017): 601–8. http://dx.doi.org/10.1109/jmems.2017.2680738.
Full textTopalli, Ebru Sagiroglu, Kagan Topalli, Said Emre Alper, Tulay Serin, and Tayfun Akin. "Pirani Vacuum Gauges Using Silicon-on-Glass and Dissolved-Wafer Processes for the Characterization of MEMS Vacuum Packaging." IEEE Sensors Journal 9, no. 3 (2009): 263–70. http://dx.doi.org/10.1109/jsen.2008.2012200.
Full textLai, Junhua, Yanmei Kong, Binbin Jiao, et al. "Study on Fusion Mechanisms for Sensitivity Improvement and Measurable Pressure Limit Extension of Pirani Vacuum Gauges With Multi Heat Sinks." Journal of Microelectromechanical Systems 29, no. 1 (2020): 100–108. http://dx.doi.org/10.1109/jmems.2019.2954155.
Full textWeng, Ping Kuo, and Jin‐Shown Shie. "Micro‐Pirani vacuum gauge." Review of Scientific Instruments 65, no. 2 (1994): 492–99. http://dx.doi.org/10.1063/1.1145163.
Full textShie, Jin‐Shown, Bruce C. S. Chou, and Yeong‐Maw Chen. "High performance Pirani vacuum gauge." Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 13, no. 6 (1995): 2972–79. http://dx.doi.org/10.1116/1.579623.
Full textJitschin, W., and S. Ludwig. "Gepulstes Heißdraht-Vakuummeter mit Pirani-SensorPulsed hot filament vacuum gauge with Pirani sensor." Vakuum in Forschung und Praxis 16, no. 1 (2004): 23–29. http://dx.doi.org/10.1002/vipr.200400015.
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