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Journal articles on the topic 'Pirani Vacuum Gauges'

Author: Grafiati
Published: 4 June 2021
Last updated: 12 February 2022

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1

Zavarian, Ali Asghar, Ali Arman, S. M. Jamal Ghotbi, et al. "Behaviors of capacitive and Pirani vacuum gauges." Vakuum in Forschung und Praxis 30, no. 5 (2018): 39–44. http://dx.doi.org/10.1002/vipr.201800693.

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2

Seong, Dae Jin, Yong Hyeon Shin, Kwang Hwa Chung, D. H. Kim, Je Sik Shin, and Y. J. Yun. "Enhanced Sensitivity of the Pirani Vacuum Gauge by the AC Driving Method." Key Engineering Materials 277-279 (January 2005): 990–94. http://dx.doi.org/10.4028/www.scientific.net/kem.277-279.990.

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We improved the sensitivity of existing commercial Pirani-vacuum gauges employing the AC method in the vacuum range above 1 Torr. The signals obtained through the use of the AC method yield information related to the specific heat and heat conductivity of gas. The output signal is obtained by two components: the oscillating temperature amplitude, and its phase. The amplitude increases with the decrease of pressure in the vacuum range from the atmosphere to about 1 Torr, which arises from the decrease of the heat capacity with the decrease of gas density. In contrast, the phase decreases monoto
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3

Jousten, Karl. "On the gas species dependence of Pirani vacuum gauges." Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 26, no. 3 (2008): 352–59. http://dx.doi.org/10.1116/1.2897314.

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4

Schelcher, G., E. Lefeuvre, S. Brault, et al. "Micro Pirani vacuum gauges manufactured by a film transfer process." Procedia Engineering 5 (2010): 1136–39. http://dx.doi.org/10.1016/j.proeng.2010.09.311.

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5

Zhang, Le-Min, Bin-Bin Jiao, Shi-Chang Yun, Yan-Mei Kong, and Da-Peng Chen. "Investigation and Optimization of Pirani Vacuum Gauges With Monocrystal Silicon Heaters and Heat Sinks." Journal of Microelectromechanical Systems 26, no. 3 (2017): 601–8. http://dx.doi.org/10.1109/jmems.2017.2680738.

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6

Topalli, Ebru Sagiroglu, Kagan Topalli, Said Emre Alper, Tulay Serin, and Tayfun Akin. "Pirani Vacuum Gauges Using Silicon-on-Glass and Dissolved-Wafer Processes for the Characterization of MEMS Vacuum Packaging." IEEE Sensors Journal 9, no. 3 (2009): 263–70. http://dx.doi.org/10.1109/jsen.2008.2012200.

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7

Lai, Junhua, Yanmei Kong, Binbin Jiao, et al. "Study on Fusion Mechanisms for Sensitivity Improvement and Measurable Pressure Limit Extension of Pirani Vacuum Gauges With Multi Heat Sinks." Journal of Microelectromechanical Systems 29, no. 1 (2020): 100–108. http://dx.doi.org/10.1109/jmems.2019.2954155.

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8

Weng, Ping Kuo, and Jin‐Shown Shie. "Micro‐Pirani vacuum gauge." Review of Scientific Instruments 65, no. 2 (1994): 492–99. http://dx.doi.org/10.1063/1.1145163.

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9

Shie, Jin‐Shown, Bruce C. S. Chou, and Yeong‐Maw Chen. "High performance Pirani vacuum gauge." Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 13, no. 6 (1995): 2972–79. http://dx.doi.org/10.1116/1.579623.

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10

Jitschin, W., and S. Ludwig. "Gepulstes Heißdraht-Vakuummeter mit Pirani-SensorPulsed hot filament vacuum gauge with Pirani sensor." Vakuum in Forschung und Praxis 16, no. 1 (2004): 23–29. http://dx.doi.org/10.1002/vipr.200400015.

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11

Woo, Sam-Yong, Han-Wook Song, and In-Mook Choi. "Calibration of a Pirani Vacuum Gauge by Using a Deadweight Piston Gauge." Journal of the Korean Physical Society 51, no. 3 (2007): 916. http://dx.doi.org/10.3938/jkps.51.916.

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12

Zhang, F. T., Z. Tang, J. Yu, and R. C. Jin. "A micro-Pirani vacuum gauge based on micro-hotplate technology." Sensors and Actuators A: Physical 126, no. 2 (2006): 300–305. http://dx.doi.org/10.1016/j.sna.2005.10.016.

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13

Wang, Xuefang, Chuan Liu, Zhuo Zhang, Sheng Liu, and Xiaobing Luo. "A micro-machined Pirani gauge for vacuum measurement of ultra-small sized vacuum packaging." Sensors and Actuators A: Physical 161, no. 1-2 (2010): 108–13. http://dx.doi.org/10.1016/j.sna.2010.04.034.

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14

Jitschin, W., and S. Ludwig. "Gepulstes Pirani-Vakuummeter: Berechnung von Aufheizung und Abkühlung. Pulsed Pirani vacuum gauge: calculation of heating and cooling." Vakuum in Forschung und Praxis 16, no. 6 (2004): 297–301. http://dx.doi.org/10.1002/vipr.200400235.

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15

Wenzel, O., and C. K. Bak. "The Micro Pirani™: A solid-state vacuum gauge with wide range." Vakuum in Forschung und Praxis 10, no. 4 (1998): 298–301. http://dx.doi.org/10.1002/vipr.19980100410.

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16

Jiang, Wei, Xin Wang, and Jinwen Zhang. "A single crystal silicon micro-Pirani vacuum gauge with high aspect ratio structure." Sensors and Actuators A: Physical 163, no. 1 (2010): 159–63. http://dx.doi.org/10.1016/j.sna.2010.08.015.

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17

Mitchell, J., G. R. Lahiji, and K. Najafi. "An Improved Performance Poly-Si Pirani Vacuum Gauge Using Heat-Distributing Structural Supports." Journal of Microelectromechanical Systems 17, no. 1 (2008): 93–102. http://dx.doi.org/10.1109/jmems.2007.912711.

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18

Kim, Gyungtae, Changho Seok, Taehyun Kim, Jae Hong Park, Heeyeoun Kim, and Hyoungho Ko. "The Micro Pirani Gauge with Low Noise CDS-CTIA for In-Situ Vacuum Monitoring." JSTS:Journal of Semiconductor Technology and Science 14, no. 6 (2014): 733–40. http://dx.doi.org/10.5573/jsts.2014.14.6.733.

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19

Zhang, Le-Min, Bin-Bin Jiao, Shi-Chang Yun, Yan-Mei Kong, Chih-Wei Ku, and Da-Peng Chen. "A CMOS Compatible MEMS Pirani Vacuum Gauge with Monocrystal Silicon Heaters and Heat Sinks." Chinese Physics Letters 34, no. 2 (2017): 025101. http://dx.doi.org/10.1088/0256-307x/34/2/025101.

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20

Kubota, Masanori, Yoshio Mita, and Masakazu Sugiyama. "Silicon sub-micron-gap deep trench Pirani vacuum gauge for operation at atmospheric pressure." Journal of Micromechanics and Microengineering 21, no. 4 (2011): 045034. http://dx.doi.org/10.1088/0960-1317/21/4/045034.

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21

Grzebyk, Tomasz, Anna Górecka-Drzazga, Jan A. Dziuban, et al. "Integration of a MEMS-type vacuum pump with a MEMS-type Pirani pressure gauge." Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 33, no. 3 (2015): 03C103. http://dx.doi.org/10.1116/1.4903448.

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22

MA, Y., R. P. W. LAWSON, and A. M. ROBINSON. "HIGH SENSITIVITY AND HIGH DYNAMIC RANGE OPTICAL MICRO-RADIATOR VACUUM SENSOR FABRICTED WITH CMOS TECHNOLOGY." International Journal of Information Acquisition 05, no. 03 (2008): 189–96. http://dx.doi.org/10.1142/s0219878908001594.

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A Complementary Metal Oxide Silicon (CMOS) optical micro-radiator vacuum sensor has been designed, tested and calibrated. The package is comprised of a micromachined radiator and a photodetector. The sensitivity improvement of the system over the conventional Pirani gauge is up to nine magnitudes depending on the operating power of the micro-radiator. To increase sensor's dynamic range, an automated power-switching system has been demonstrated for pressure sensing operated with constant photodetector output. Calibration of the system has been performed by comparison with secondary standards. E
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23

Zhang, Guohe, Junhua Lai, Yanmei Kong, Binbin Jiao, Shichang Yun, and Yuxin Ye. "Study of cavity effect in micro-Pirani gauge chamber with improved sensitivity for high vacuum regime." AIP Advances 8, no. 5 (2018): 055131. http://dx.doi.org/10.1063/1.5025611.

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24

Fekete, Albert-Zsombor, and László Jakab-Farkas. "Development of a Pressure Measuring Unit Based on a Thermal Conductivity Gauge and a Low-Cost Embedded Solution for Mid-Range Vacuum Applications." Műszaki Tudományos Közlemények 9, no. 1 (2018): 79–82. http://dx.doi.org/10.33894/mtk-2018.09.15.

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Abstract This study presents the development of a pressure measuring unit based on a Pirani gauge and a dedicated embedded system, incorporating a simple, low-cost practical solution for significantly reducing the various measurement altering factors, such as drifts, offsets and set point drifts. This is achieved by eliminating the conventional differential analogue signal processing stage and replacing it with a high resolution analog to digital converter. Therefore the goal was to minimize the number of the electronic components whose operation is influenced by variations in ambient temperat
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25

OGIWARA, Norio, Yusuke HIKICHI, and Yoji YOSHINARI. "The Development of a Pirani Vacuum Gauge with a Platinum Wire in the J-PARC 3-GeV Rapid Cycling Synchrotron." Journal of the Vacuum Society of Japan 53, no. 3 (2010): 158–61. http://dx.doi.org/10.3131/jvsj2.53.158.

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26

Moelders, Nicholas, James T. Daly, Anton C. Greenwald, Edward A. Johnson, and Mark P. McNeal. "Localized, In-Situ Vacuum Measurements For MEMS Packaging." MRS Proceedings 782 (2003). http://dx.doi.org/10.1557/proc-782-a5.32.

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ABSTRACTMEMS devices have unique packaging considerations compared to conventional semiconductor devices. They tend to have relatively large die size and many architectures cannot tolerate elevated temperatures. Often these devices require a vacuum environment for efficient operation. While advances have been made in hermetic packaging of MEMS devices, vacuum packaging remains elusive. One significant problem in developing vacuum sealing has been the inability to determine, readily and non-destructively, the vacuum level inside the package. We have previously described the development of a sil
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27

Xu, Wei, Xiaoyi Wang, Xiaofang Pan, Amine Bermak, Yi-Kuen Lee, and Yatao Yang. "A Wafer-Level Packaged CMOS MEMS Pirani Vacuum Gauge." IEEE Transactions on Electron Devices, 2021, 1–7. http://dx.doi.org/10.1109/ted.2021.3103486.

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