Academic literature on the topic 'Pressure sensor'

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Journal articles on the topic "Pressure sensor"

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Zhu, Ziyi, Shougang Zhang, and Jun Ruan. "Research on Pressure Sensor of Circular Monocrystalline Silicon Chassis." Journal of Physics: Conference Series 2800, no. 1 (July 1, 2024): 012009. http://dx.doi.org/10.1088/1742-6596/2800/1/012009.

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Abstract Traditional sensors, such as pressure, piezoelectric or piezoresistive, mostly use square silicon-based materials as chassis and use Wheatstone bridge circuits to measure pressure and resistance values. Nowadays, reducing the size of sensors is also a problem to be solved in the increasingly wide range of sensor applications. In this paper, a circular monocrystalline silicon base pressure sensor is designed and its performance is studied. We applied COMSOL software to model the circular chassis base pressure sensor, tested the deformation of the circular chassis base pressure sensor under different access volttimes and pressures, analyzed its sensitivity and other performance, and compared the above performance with the rectangular monocrystalline silicon chassis base pressure sensor. The experimental results show that the circular monocrystalline silicon chassis pressure sensor has excellent electrostriction performance, and the variation of the potential and potential difference in the measuring area is more obvious than that of the rectangular monocrystalline silicon chassis pressure sensor. This paper provides a reference for sensor makers.
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Lee, Kang-Ho, Yeong-Eun Kwon, Hyukjin Lee, Yongkoo Lee, Joonho Seo, Ohwon Kwon, Shin-Won Kang, and Dongkyu Lee. "Active Body Pressure Relief System with Time-of-Flight Optical Pressure Sensors for Pressure Ulcer Prevention." Sensors 19, no. 18 (September 6, 2019): 3862. http://dx.doi.org/10.3390/s19183862.

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A body pressure relief system was newly developed with optical pressure sensors for pressure ulcer prevention. Unlike a conventional alternating pressure air mattress (APAM), this system automatically regulates air flow into a body supporting mattress with adaptive inflation (or deflation) duration in response to the pressure level in order to reduce skin stress due to prolonged high pressures. The system continuously quantifies the body pressure distribution using time-of-flight (ToF) optical sensors. The proposed pressure sensor, a ToF optical sensor in the air-filled cell, measures changes in surface height of mattress when pressed under body weight, thereby indirectly indicating the interface pressure. Non-contact measurement of optical sensor usually improves the durability and repeatability of the system. The pressure sensor was successfully identified the 4 different-predefined postures, and quantitatively measured the body pressure distribution of them. Duty cycle of switches in solenoid valves was adjusted to 0–50% for pressure relief, which shows that the interface pressure was lower than 32 mmHg for pressure ulcer prevention.
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Gao, Xin, Piotr Mackowiak, Biswajit Mukhopadhyay, Oswin Ehrmann, Klaus Dieter Lang, and Ha Duong Ngo. "Wireless Pressure Sensor System." Applied Mechanics and Materials 530-531 (February 2014): 75–78. http://dx.doi.org/10.4028/www.scientific.net/amm.530-531.75.

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This system consists of a pressure silicon sensor, calibration module and wireless module. The pressure sensor used in this work is a piezoresistive silicon sensor that developed by Technical University Berlin. After calibration of the sensors output signals, the XBee-chip was used for wireless transmission. The three components with peripheral circuits and batteries were integrated in a 50mm × 50mm PCB. The system was then tested in a climate chamber at different temperatures and pressures. Programs for signal receiving and processing were developed in Matlab-environment. The experimental results show that this system works well for the short range (15m indoor).
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Samoei, Victor K., Ahalapitiya H. Jayatissa, and Keiichiro Sano. "Flexible Pressure Sensor Based on Carbon Black/PVDF Nanocomposite." Chemical Science International Journal 33, no. 2 (February 7, 2024): 1–10. http://dx.doi.org/10.9734/csji/2024/v33i2885.

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A piezoresistive flexible pressure sensor was fabricated using carbon black and Poly (vinylidene fluoride) (CB/PVDF) composite. The conductive CB/PVDF composite was prepared by a wet-cast method and deposited onto a flexible polyethylene (PE) substrate. The surface morphology, crystal structure, and material properties were studied using SEM and X-ray diffraction methods. This flexible pressure sensor was tested in a wide pressure range of about 0 - 76 kPa, and its response time was less than 0.43 s. The sensitivity, response time, and recovery time were studied for different pressures and vibration modes. The repeatability and reproducibility characteristics of the sensors were studied, and it was found that the sensors exhibited excellent characteristics. The sensor was subjected to different loading and unloading pressures, and the resistance of the sensor remained stable, indicating that the sensor had a high degree of reproducibility. Owing to its flexible properties and the materials used, the proposed device can be applied in the next generation of smart sensors for biomedical, robotic, and automotive sensing applications.
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Szczerba, Zygmunt, Piotr Szczerba, Kamil Szczerba, and Krzysztof Pytel. "Acceleration-Insensitive Pressure Sensor for Aerodynamic Analysis." Energies 16, no. 7 (March 27, 2023): 3040. http://dx.doi.org/10.3390/en16073040.

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This paper presents a method for preparing a pressure sensor that is insensitive to acceleration along with experimental evidence of its efficacy in aerodynamic analysis. A literature review and preliminary studies revealed the undesirable effect of acceleration on sensors that are located on moving elements, as evidenced by deviations from actual pressure values for piezoresistive pressure sensors that are made using MEMS technology. To address this, the authors developed a double-membrane sensor geometry that eliminated this imperfection; a method of implementing two solo pressure sensors as a new geometry-designed sensor was also proposed. Experimental tests of this suggested solution were conducted; these measurements are presented here. The results indicated that this new sensor concept could be used to measure the dynamic pressures of rotating and moving objects in order to obtain measurement results that are more reliable and closer to the true values that are derived from aerodynamic analyses. The published results confirm the reliability of the proposed device.
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Grossöhmichen, Martin, Rolf Salcher, Klaus Püschel, Thomas Lenarz, and Hannes Maier. "Differential Intracochlear Sound Pressure Measurements in Human Temporal Bones with an Off-the-Shelf Sensor." BioMed Research International 2016 (2016): 1–10. http://dx.doi.org/10.1155/2016/6059479.

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The standard method to determine the output level of acoustic and mechanical stimulation to the inner ear is measurement of vibration response of the stapes in human cadaveric temporal bones (TBs) by laser Doppler vibrometry. However, this method is reliable only if the intact ossicular chain is stimulated. For other stimulation modes an alternative method is needed. The differential intracochlear sound pressure between scala vestibuli (SV) and scala tympani (ST) is assumed to correlate with excitation. Using a custom-made pressure sensor it has been successfully measured and used to determine the output level of acoustic and mechanical stimulation. To make this method generally accessible, an off-the-shelf pressure sensor (Samba Preclin 420 LP, Samba Sensors) was tested here for intracochlear sound pressure measurements. During acoustic stimulation, intracochlear sound pressures were simultaneously measurable in SV and ST between 0.1 and 8 kHz with sufficient signal-to-noise ratios with this sensor. The pressure differences were comparable to results obtained with custom-made sensors. Our results demonstrated that the pressure sensor Samba Preclin 420 LP is usable for measurements of intracochlear sound pressures in SV and ST and for the determination of differential intracochlear sound pressures.
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Xu, Dandan, Ling Duan, Suyun Yan, Yong Wang, Ke Cao, Weidong Wang, Hongcheng Xu, Yuejiao Wang, Liangwei Hu, and Libo Gao. "Monolayer MoS2-Based Flexible and Highly Sensitive Pressure Sensor with Wide Sensing Range." Micromachines 13, no. 5 (April 22, 2022): 660. http://dx.doi.org/10.3390/mi13050660.

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Flexible pressure sensors play an important role in flexible robotics, human-machine interaction (HMI), and human physiological information. However, most of the reported flexible pressure sensors suffer from a highly nonlinear response and a significant decrease in sensitivity at high pressures. Herein, we propose a flexible novel iontronic pressure sensor based on monolayer molybdenum disulfide (MoS2). Based on the unique structure and the excellent mechanical properties as well as the large intercalation capacitance of MoS2, the prepared sensor holds an ultra-high sensitivity (Smax = 89.75 kPa−1) and a wide sensing range (722.2 kPa). Further, the response time and relaxation time of the flexible sensor are only 3 ms, respectively, indicating that the device can respond to external pressure rapidly. In addition, it shows long-term cycling stability (over 5000 cycles with almost no degradation) at a high pressure of 138.9 kPa. Finally, it is demonstrated that the sensor can be used in physiological information monitoring and flexible robotics. It is anticipated that our prepared sensor provide a reliable approach to advance the theory and practicality of the flexible sensor electronics.
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Kim, Soo-Wan, Geum-Yoon Oh, Kang-In Lee, Young-Jin Yang, Jeong-Beom Ko, Young-Woo Kim, and Young-Sun Hong. "A Highly Sensitive and Flexible Capacitive Pressure Sensor Based on Alignment Airgap Dielectric." Sensors 22, no. 19 (September 28, 2022): 7390. http://dx.doi.org/10.3390/s22197390.

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Flexible capacitive pressure sensors with a simple structure and low power consumption are attracting attention, owing to their wide range of applications in wearable electronic devices. However, it is difficult to manufacture pressure sensors with high sensitivity, wide detection range, and low detection limits. We developed a highly sensitive and flexible capacitive pressure sensor based on the porous Ecoflex, which has an aligned airgap structure and can be manufactured by simply using a mold and a micro-needle. The existence of precisely aligned airgap structures significantly improved the sensor sensitivity compared to other dielectric structures without airgaps. The proposed capacitive pressure sensor with an alignment airgap structure supports a wide range of working pressures (20–100 kPa), quick response time (≈100 ms), high operational stability, and low-pressure detection limit (20 Pa). Moreover, we also studied the application of pulse wave monitoring in wearable sensors, exhibiting excellent performance in wearable devices that detect pulse waves before and after exercise. The proposed pressure sensor is applicable in electronic skin and wearable medical assistive devices owing to its excellent functional features.
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Pan, Jin, Shiyu Liu, Hongzhou Zhang, and Jiangang Lu. "A Flexible Temperature Sensor Array with Polyaniline/Graphene–Polyvinyl Butyral Thin Film." Sensors 19, no. 19 (September 23, 2019): 4105. http://dx.doi.org/10.3390/s19194105.

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Thermal-resistance temperature sensors generally employ temperature-sensitive materials as active layers, which are always deposited on a flexible substrate to improve flexibility. Such a temperature sensor is usually integrated in wearable devices with other sensors, such as pressure sensors and stretchable sensors. In prior works, the temperature and pressure sensors are usually located in different layers in a multifunction sensor, which results in a complicated fabrication process, as well as a large thickness of devices. Meanwhile, many temperature sensors are based on large areas of non-transparent materials, leading to difficulties in integrating display applications. In this paper, we demonstrate a flexible temperature sensor based on polyaniline/graphene (GPANI)–polyvinyl butyral (PVB) thin film and indium tin oxides (ITO)- polyethylene terephthalate (PET) substrates. The GPANI particles embedded in PVB film not only contribute to temperature detection, but also response to external pressures, due to weak deformations. In addition, the thin composite film (2.7 μm) highly improved the transparency. By optimizing the device structure, the sensor integrates temperature and pressure detection into one single layer, which shows a wide temperature range of 25–80 °C, a pressure range of 0–30 kPa, and a high transparency (>80%). The temperature sensor offers great potential for applications in emerging wearable devices and electronic skins.
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Lan, Tianhao, Zhenjin Xu, Qibin Zhuang, Xin Liu, Yang Zhao, Xiaohui Du, Jianyi Zheng, and Dezhi Wu. "A flexible high-performance air pressure sensor for harsh environments." Journal of Physics: Conference Series 2982, no. 1 (April 1, 2025): 012037. https://doi.org/10.1088/1742-6596/2982/1/012037.

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Abstract Owing to their flexibility and high adaptability, flexible pressure sensors have bright application prospects in biomedicine, consumer electronics and human-computer interaction etc. However, it is still a great challenge to detect negative pressures with high reliability for the current flexible pressure sensors, especially in harsh environments. To this end, this paper proposes a flexible capacitive barometric pressure sensor based on nanofiber membranes as sensitive elements by structural design, fabrication and packaging. The experiment results demonstrate that such sensor was capable of sensing wide barometric pressure ranging from −101kPa to 400kPa and high reliability with sensing error less than 1%FS under wide temperatures from −40 to 150 °C and vibration with 3˜10 g. As such, the proposed scheme sheds new lights on the high-reliability pressure sensors under extreme conditions.
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Dissertations / Theses on the topic "Pressure sensor"

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Trolliet, Alexia. "Pressure Sensor Miniaturization." Thesis, KTH, Skolan för informations- och kommunikationsteknik (ICT), 2014. http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-175784.

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As far as the Printed Circuit Boards (PCB) manufacture industry is concerned, for high production volumes, solder paste is applied on the connection pads through customized stencils. This is a very productive method, yet if the design has to be updated, cost is increasing as the stencil should be changed. For higher exibility, such as in rapid prototyping, jet-printing machines similar to Mycronic MY500 are used. In these equipments, solder paste is jet-printed on the circuit board. The shooting is done by a piston moving on the vertical axis at high speed, hence projecting solder paste onto the connection pads of the PCB. In order to improve the understanding of the jetting process, it is important to collect data on pressure uctuations in the jetting head. To do so, this project is using a strain gauge to sense the strain applied by the piston on the nozzle. The gauge is connected in a Wheatstone bridge, and the differential signal is extracted and amplified a first time with an instrumentation amplifier. The remaining amplification is then performed with the help of an operational amplifier so that the signal matches the Analog to Digital Converter (ADC) levels. Finally, the converted results are transmitted to a personal computer for further analysis.
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Ibrahim, Amr. "Remotely interrogated MEMS pressure sensor." Thesis, University of Glasgow, 2012. http://theses.gla.ac.uk/4149/.

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This thesis considers the design and implementation of passive wireless microwave readable pressure sensors on a single chip. Two novel-all passive devices are considered for wireless pressure operation. The first device consists of a tuned circuit operating at 10 GHz fabricated on SiO2 membrane, supported on a silicon wafer. A pressure difference across the membrane causes it to deflect so that a passive resonant circuit detunes. The circuit is remotely interrogated to read off the sensor data. The chip area is 20 mm2 and the membrane area is 2mm2 with thickness of 4 µm. Two on chip passive resonant circuits were investigated: a meandered dipole and a zigzag antenna. Both have a physical length of 4.25 mm. the sensors show a shift in their resonant frequency in response to changing pressure of 10.28-10.27 GHz for the meandered dipole, and 9.61-9.58 GHz for the zigzag antenna. The sensitivities of the meandered dipole and zigzag sensors are 12.5 kHz and 16 kHz mbar, respectively. The second device is a pressure sensor on CMOS chip. The sensing element is capacitor array covering an area of 2 mm2 on a membrane. This sensor is coupled with a dipole antenna operating at 8.77 GHz. The post processing of the CMOS chip is carried out only in three steps, and the sensor on its own shows a sensitivity of 0.47fF/mbar and wireless sensitivity of 27 kHz/mbar. The MIM capacitors on membrane can be used to detune the resonant frequency of an antenna.
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Wang, Xingwei. "Optical Fiber Tip Pressure Sensor." Thesis, Virginia Tech, 2004. http://hdl.handle.net/10919/35490.

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<p> Miniature pressure sensors which can endure harsh environments are a highly sought after goal in industrial, medical and research fields. Microelectromechanical systems (MEMS) are the current methods to fabricate such small sensors. However, they suffer from low sensitivity and poor mechanical properties. </p><p> To fulfill the need for robust and reliable miniature pressure sensors that can operate under high temperatures, a novel type of optical fiber tip sensor only 125μm in diameter is presented in this thesis. The essential element is a piece of hollow fiber which connects the fiber end and a diaphragm to form a Fabry-P&eacute;rot cavity. The all-fused-silica structure fabricated directly on a fiber tip has little temperature dependence and can function very well with high resolution and accuracy at temperatures up to 600ï °C. In addition to its miniature size, its advantages include superior mechanical properties, biocompatibility, immunity to electromagnetic interference, disposability and cost-effective fabrication. </p><p> The principle of operation, design analysis, fabrication implementation and performance evaluation of the sensor are discussed in detail in the following chapters.</p><br>Master of Science
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Swoboda, Marek Lec Ryszard Joseph Jeffrey. "Implantable arterial blood pressure sensor /." Philadelphia, Pa. : Drexel University, 2004. http://hdl.handle.net/1860/2968.

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Tuinea-Bobe, Cristina L. "A stretchable pressure sensor for early detection of pressure ulcers." Thesis, University of Ulster, 2010. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.528378.

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Dutoit, Bertrand Michel. "Flat electromagnetic force-feedback pressure sensor /." Lausanne, 2001. http://library.epfl.ch/theses/?nr=2437.

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Palmer, Jason. "Precise pressure sensor temperature compensation algorithms." Diss., Online access via UMI:, 2007.

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Van, den Heever Thomas Stanley. "A zinc oxide nanowire pressure sensor." Thesis, Stellenbosch : University of Stellenbosch, 2010. http://hdl.handle.net/10019.1/5369.

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Thesis (MScEng (Electrical and Electronic Engineering))--University of Stellenbosch, 2010.<br>Thesis presented in partial fulfilment of the requirements for the degree Master of Science in Engineering at the University of Stellenbosch<br>ENGLISH ABSTRACT: Measurement of pressure with zinc oxide (ZnO) nanowires was investigated. ZnO exhibits the piezoelectric effect, generating a voltage when pressure is applied to the material. This relationship between pressure and output voltage was used to make a pressure sensor. A study of the physical and mathematical working of the piezoelectric effect in ZnO nanowires was done. Simulations were conducted by means of specialised software to test the theory. The simulations gave results as the theory had predicted. ZnO nanowires were grown using various methods. Vapour liquid solid (VLS) was found to be the best method to grow uniform and dense arrays of ZnO nanowires. Statistical methods were employed to obtain the optimal parameters for the growth of ZnO nanowires through the VLS method. After the growth of the ZnO nanowires a pressure sensor was built. The manufacturing of the pressure sensor consisted of different steps. The sensors were tested to verify that they worked as described in theory and as shown in the simulations. The output voltage was lower than the simulated value due to imperfections and losses throughout the system. The output voltage versus applied pressure graphs did coincide with the bulk ZnO materials as well as related products, such as force sensing resistors. The output voltage is too low, but there are various methods by which the output voltage can be increased. These methods are discussed. The finished sensor can be used to continuously monitor pressure on a plane.<br>AFRIKAANSE OPSOMMING: Die meting van druk deur sink oksied (ZnO) nanodrade was ondersoek. ZnO toon die piëzo-elektriese effek - spanning word gegenereer wanneer druk op die materiaal aangewend word. Hierdie verhouding tussen druk en uitsetspanning is gebruik om ’n druksensor te vervaardig. ’n Studie van die fisiese en wiskundige werking van die piëzo-elektriese effek in ZnO nanodrade is gedoen. Simulasies deur middel van gespesialiseerde sagteware is uitgevoer om die teorie te bevestig. Die simulasies het resultate getoon soos deur die teorie beskryf word. ZnO nanodrade is gegroei deur verskillende metodes. Verdamping vloeistof vastestof (VVV) is as die beste metode gevind om uniforme en digte skikkings van ZnO nanodrade te kry. Statistiese metodes is aangewend om die optimale parameters vir die groei van ZnO nanodrade deur middel van die VVV metode te kry. Na afloop van die groei van die ZnO nanodrade is ’n druksensor vervaardig. Die vervaardigingsproses het uit verskillende stappe bestaan, ten einde die bou van ’n werkende druksensor uit die ZnO nanodrade te realiseer. Die sensors is getoets om te bevestig dat dit werk, soos beskryf deur die teorie en gewys in die simulasies. Die uitsetspanning was laer as wat verwag was as gevolg van onvolmaakthede en verliese in die hele stelsel. Die uitsetspanning teenoor druk grafieke van die sensor het ooreengestem met die van die grootmaat materiale, asook verwante produkte soos druk sensitiewe weerstande. Die uitset spanning is baie laag en daar bestaan verskillende maniere waarop die uitsetspanning verhoog kan word. Hierdie metodes word bespreek.
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Clavijo, William. "Nanowire Zinc Oxide MOSFET Pressure Sensor." VCU Scholars Compass, 2014. http://scholarscompass.vcu.edu/etd/625.

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Fabrication and characterization of a new kind of pressure sensor using self-assembly Zinc Oxide (ZnO) nanowires on top of the gate of a Metal-Oxide-Semiconductor Field-Effect Transistor (MOSFET) is presented. Self-assembly ZnO nanowires were fabricated with a diameter of 80 nm and 800 nm height (80:8 aspect ratio) on top of the gate of the MOSFET. The sensor showed a 110% response in the drain current due to pressure, even with the expected piezoresistive response of the silicon device removed from the measurement. The pressure sensor was fabricated through low temperature bottom up ultrahigh aspect ratio ZnO nanowire growth using anodic alumina oxide (AAO) templates. The pressure sensor has two main components: MOSFET and ZnO nanowires. Silicon Dioxide growth, photolithography, dopant diffusion, and aluminum metallization were used to fabricate a basic MOSFET. In the other hand, a combination of aluminum anodization, alumina barrier layer removal, ZnO atomic layer deposition (ALD), and wet etching for nanowire release were optimized to fabricate the sensor on a silicon wafer. The ZnO nanowire fabrication sequence presented is at low temperature making it compatible with CMOS technology.
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Magát, Martin. "Senzory tlaku využívající moderní nanotechnologie." Doctoral thesis, Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií, 2014. http://www.nusl.cz/ntk/nusl-233655.

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This thesis describes utilization of a nanotechnology in new pressure sensors. Detailed analysis of individual principles are carrying on. And simulations and experimental models of sensors are developed. More detailed description is provided for new capacitive pressure sensor, which is manufactured using nanotechnology, including its model and analysis in order to improve its properties. The work deals with the emission pressure sensor which uses the principle of cold emissions, including analysis comparison of the measured values of the emission current from the applied nanotubes field and analysis to improve emissions performance.
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Books on the topic "Pressure sensor"

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P, Skobelev O., and Rzevski G. 1932-, eds. Pressure sensor dynamics. Samara: IBT, 1993.

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(firm), Sensortechnics. Pressure sensor handbook. Puchheim: Sensortechnics, 1991.

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Dean, G. J. Optical pressure sensor. Manchester: UMIST, 1996.

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Motorola. Pressure sensor device data. Phoenix, AZ: Motorola, 1994.

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Morin, André. Feasibility of a modulating grid optical pressure sensor. [Montréal]: Transportation Development Centre, Transport Canada, 2002.

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Teymoori, Roshanak. La1-xSrxMnO3 as a candidate for a room temperature pressure sensor. St. Catharines, Ont: Brock University, Dept. of Physics, 2003.

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Geological Survey (U.S.), ed. New pressure-based water-level sensor used by the U.S. Geological Survey. Stennis Space Center, Miss: U.S. Geological Survey, 1992.

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Geological Survey (U.S.), ed. New pressure-based water-level sensor used by the U.S. Geological Survey. Stennis Space Center, Miss: U.S. Geological Survey, 1992.

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L, Wilbourn Sammy, and Geological Survey (U.S.), eds. Proceedings of a U.S. Geological Survey Pressure-Sensor Workshop, Denver, Colorado, July 28-31, 1992. Denver, Colo: U.S. Dept. of the Interior, U.S. Geological Survey, 1994.

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L, Wilbourn Sammy, and Geological Survey (U.S.), eds. Proceedings of a U.S. Geological Survey Pressure-Sensor Workshop, Denver, Colorado, July 28-31, 1992. Denver, Colo: U.S. Dept. of the Interior, U.S. Geological Survey, 1994.

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Book chapters on the topic "Pressure sensor"

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Baumann, Peter. "Pressure Sensors." In Selected Sensor Circuits, 131–50. Wiesbaden: Springer Fachmedien Wiesbaden, 2022. http://dx.doi.org/10.1007/978-3-658-38212-4_5.

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Seneviratne, Pradeeka. "Textile Pressure Sensor." In Beginning e-Textile Development, 121–47. Berkeley, CA: Apress, 2020. http://dx.doi.org/10.1007/978-1-4842-6261-0_5.

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Erben, Andreas, Alexander Geist, Immanuel Voigt, Björn Senf, Thomas Mäder, Janine Glänzel, Steffen Ihlenfeldt, and Welf-Guntram Drossel. "Smart Pressure Film Sensor for Machine Tool Optimization and Characterization of the Dynamic Pressure Field on Machine Surfaces." In Lecture Notes in Production Engineering, 179–91. Cham: Springer International Publishing, 2023. http://dx.doi.org/10.1007/978-3-031-34486-2_14.

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AbstractKnowledge of thermal interactions with the environment is essential for improving the performance of machine tools. Therefore, it is necessary to detect and quantify the convective heat flows at machine tool surfaces, that occur in the workspace as a result of cutting fluid use or outside the machine due to active air flow. Thin-film sensors made of shape memory alloys with integrated small temperature sensors are suitable for detecting very fine pressure differences and can be used to estimate convective heat transfer. By measuring the pressure differences, the dynamic pressure field at the surface can be determined. Since the pressure field correlates with the flow field, conclusions can be drawn about the flow velocity. This leads to more profound and extended possibilities to match flow fields from CFD simulations with measured data. At the same time, the surface temperature is also recorded by this sensor. Reference measurements of the temperature in the free flow are used to characterize the heat transfer. By knowing the pressures, temperatures and the correlating flow velocity near the wall, the heat transfer coefficient can be determined. Against this background, this paper demonstrates the behavior of shape memory alloys as fluid pressure sensors and addresses the development of such sensors for machine tools. For this purpose, sensor units are to be developed that can be placed as a sensor network (composite of several sensors on one surface) inside and outside the workspace.
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Matsui, Takeshi. "Automotive High-Pressure Sensor." In Advanced Microsystems for Automotive Applications 98, 231. Berlin, Heidelberg: Springer Berlin Heidelberg, 1998. http://dx.doi.org/10.1007/978-3-662-39696-4_22.

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Matsui, Takeshi. "Automotive High-Pressure Sensor." In Advanced Microsystems for Automotive Applications 98, 231. Berlin, Heidelberg: Springer Berlin Heidelberg, 1998. http://dx.doi.org/10.1007/978-3-642-72146-5_22.

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Császár, Csaba. "Polymer Thick-Film Pressure Sensor." In Multichip Modules with Integrated Sensors, 315–19. Dordrecht: Springer Netherlands, 1996. http://dx.doi.org/10.1007/978-94-009-0323-4_33.

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Gussmann, V. "Monolithic Integrated Pressure Sensor ICs." In Advanced Microsystems for Automotive Applications 2000, 39–45. Berlin, Heidelberg: Springer Berlin Heidelberg, 2000. http://dx.doi.org/10.1007/978-3-642-18146-7_4.

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González Ruiz, Pilar, Kristin De Meyer, and Ann Witvrouw. "The Pressure Sensor Fabrication Process." In Poly-SiGe for MEMS-above-CMOS Sensors, 75–99. Dordrecht: Springer Netherlands, 2013. http://dx.doi.org/10.1007/978-94-007-6799-7_4.

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Wan, Yun, and Pin Wan. "A Novel Ceramic Pressure Sensor." In Key Engineering Materials, 772–74. Stafa: Trans Tech Publications Ltd., 2007. http://dx.doi.org/10.4028/0-87849-410-3.772.

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Mohd Noor, Anas, Zulkarnay Zakaria, and Norlaili Saad. "Intraocular MEMS Capacitive Pressure Sensor." In Lecture Notes in Mechanical Engineering, 493–501. Singapore: Springer Singapore, 2021. http://dx.doi.org/10.1007/978-981-16-0866-7_42.

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Conference papers on the topic "Pressure sensor"

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Han, Jeahyeong, Shunzhou Yang, and Mark A. Shannon. "Peeling Mode Capacitive Pressure Sensor for Sub-KPA Pressure Measurements." In ASME 2006 International Mechanical Engineering Congress and Exposition. ASMEDC, 2006. http://dx.doi.org/10.1115/imece2006-15521.

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Capacitive pressure sensors measure changes in pressure typically by the deflection of a flexible conducting membrane towards a fixed electrode. The deflection in the membrane produces a quadratic change in capacitance, which often yields higher sensitivity to changes in pressure compared to piezo-resistive pressure sensors, which measures the resistance changes proportional to the applied pressure. However, residual stresses in the membrane can provide a substantial resistance to deformation compared to the driving force created by the applied pressure, which decreases the sensitivity at low pressures and produces a nonlinear signal. If the membrane is made compliant enough to increase sensivitiy, pull-in of the membrane can occur, reducing the effective pressure range of the capacitive manometer type pressure sensor. Hence, these type of sensors are typically not used to measure very low pressure differences over several hundred Pascals. To overcome this limitation, a capacitive pressure sensor was developed that operates in a peeling mode while under applied electrostatic actuation, which counters the residual stresses. The changes in capacitance can be detected if the pressure is just enough to overcome the interfacial electrostatic pressure. This type of pressure sensor can potentially be used for very low differential pressure differences, well below 100 Pa, over ~ 1 kPa range.
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Belovolov, M. I., M. M. Bubnov, and S. L. Semjonov. "High Sensitive Fiber Interferometric Pressure Sensor." In The European Conference on Lasers and Electro-Optics. Washington, D.C.: Optica Publishing Group, 1996. http://dx.doi.org/10.1364/cleo_europe.1996.cwf57.

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Fiber Fabry-Perot Interferometric sensors (FFPI-sensor) have been shown to possess high sensitivity for the measurement of different parameters. We present the operation of a new extrinsic FFPI-sensor modified for the pressure measurements with high sensitivity and effectively reduced the thermal crosstalk.
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Clendenin, Jason, Matt Gordon, and Steve Tung. "Pressure Sensitivity of a Thermal Shear Stress Sensor." In ASME/JSME 2003 4th Joint Fluids Summer Engineering Conference. ASMEDC, 2003. http://dx.doi.org/10.1115/fedsm2003-45066.

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This paper reports on the pressure sensitivity testing of MEMS thermal shear stress sensors. The MEMS sensor is a micromachined, vacuum-cavity insulated, thermal shear stress sensor for underwater applications. This paper is focused on the combined experimental and numerical study carried out to examine the effects of changing environmental pressure on the MEMS-based shear stress sensors. Four different sensors were tested experimentally and numerically. The silicon nitride diaphragms for each sensor are 4-μm thick. The length of each diaphragm is 210-μm while the widths are 210-μm, 150-μm, 100-μm, and 75-μm respectively. It is found that reducing the surface area size and increasing the thickness of the sensor diaphragms are effective in minimizing the pressure sensitivity.
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Vujanic, Aleksandar, and Nadja Adamovic. "Silicon Micromachined Fiber-Optic Pressure Sensor." In ASME 2000 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 2000. http://dx.doi.org/10.1115/imece2000-1105.

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Abstract In this paper, we present a fiber optic pressure sensor capable for operation in critical environments. Special attention is given to the sensor design, so that the sensor fabrication is as simple as possible and can be accomplished using standard micromachining processes (wet etching of silicon). Presented pressure sensor employs the principle of light intensity modulation induced by bending of a membrane with boss. Under the influence of pressure a sidewall of boss screens certain area of the fiber-end and modulates the reflected optical signal. A number of design specialties and novel ideas for overcoming the limitations of standard wet etching of silicon are presented. The used fabrication procedure enables, with slight modification of the etching time, fabrication of sensors applicable for measuring various pressure ranges.
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Hajjaj, Amal Z., Md Abdullah Al Hafiz, Nouha Alcheikh, and Mohammad I. Younis. "Scalable Pressure Sensor Based on Electrothermally Operated Resonator." In ASME 2017 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference. American Society of Mechanical Engineers, 2017. http://dx.doi.org/10.1115/detc2017-67785.

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We experimentally demonstrate a new pressure sensor that offers the flexibility of being scalable to small sizes up to the nano regime. Unlike conventional pressure sensors that rely on large diaphragms and big-surface structures, the principle of operation here relies on convective cooling of the air surrounding an electrothermally heated resonant structure, which can be a beam or a bridge. This concept is demonstrated using an electrothermally tuned and electrostatically driven MEMS resonator, which is designed to be deliberately curved. We show that the variation of pressure can be tracked accurately by monitoring the change in the resonance frequency of the resonator at a constant electrothermal voltage. We show that the range of the sensed pressure and the sensitivity of detection are controllable by the amount of the applied electrothermal voltage. Theoretically, we verify the device concept using a multi-physics nonlinear finite element model. The proposed pressure sensor is simple in principle and design and offers the possibility of further miniaturization to the nanoscale.
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Manzo, Maurizio, and Omar Cavazos. "A Wireless Photonic Intraocular Pressure Sensor." In ASME 2017 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 2017. http://dx.doi.org/10.1115/imece2017-70740.

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In this paper, we propose analytical and numerical experiments to investigate the feasibility of a wireless photonic sensor for measuring the intraocular pressure (IOP). The sensing element is a polymeric cavity embedded into a thin layer of biocompatible material integrated to a soft contact lens. The sensor concept is based on the morphology dependent resonance (MDR) phenomenon. Changes in the eye pressure perturb the micro-cavity morphology, leading to a shift in the optical modes. The IOP is measured by monitoring the shift of optical resonances. The sensor-light coupling is made through the evanescent field by using an optical prism. Therefore, the sensor can be powered and monitored wirelessly by using frustrated total internal reflection (FTIR) of a polymeric dielectric cavity. Usually, micro-optical cavities exhibit a very high quality factor Q; thus, sensors based on MDR phenomenon exhibit high resolution. Therefore, by recording tiny variations of IOP is possible to gain more knowledge about the start, comportment, and evolution of glaucoma disease.
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Sohi, Ali Najafi, Mohammad Shavezipur, Patricia Nieva, and Amir Khajepour. "Modeling of a Multifunctional Pressure-Temperature Sensor." In ASME 2009 International Mechanical Engineering Congress and Exposition. ASMEDC, 2009. http://dx.doi.org/10.1115/imece2009-12930.

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Development of new sensors with precise and innovative measurement mechanisms is a key in underpinning the competitiveness of industries like automotive, aviation, and power generation. Due to progresses made in micromachining technologies, fabrication of such sensors for multifunctional applications and their integration with readout circuits is easily achievable. In this paper a new multifunctional sensor for the simultaneous measurement of pressure and temperature is proposed and modeled. It uses membranes and beams as active bodies and capacitance measurement as readout system. The sensor can be fabricated with available CMOS-compatible foundry processes. The results of the finite element simulations are presented for pressures up to 1 MPa and temperature changes up to 250 °C.
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Andarawis, E., E. Berkcan, and B. Kashef. "Remotely Powered, Hermetic RF MEMS Pressure Sensor." In ASME 2008 International Mechanical Engineering Congress and Exposition. ASMEDC, 2008. http://dx.doi.org/10.1115/imece2008-68992.

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We have recently successfully developed a remote powered wireless MEMS pressure sensors for sensing pressure in remote locations without wiring or tether. The sensor is hermetically sealed, self-powered using RF energy, and has the ability to auto-compensate to remove various error sources. This constitutes a highly innovative approach to remote sensing while removing major limitations of RFID like sensors.
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Saint-Mard, Michel, Alexis Kozlowski, Adrien Hertay, and Patrick Hendrick. "Beyond the Error: Unveiling Uncertainties in Pressure Sensor Measurements." In ASME Turbo Expo 2024: Turbomachinery Technical Conference and Exposition. American Society of Mechanical Engineers, 2024. http://dx.doi.org/10.1115/gt2024-125684.

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Abstract In every sensor lies inherent uncertainty. It is crucial to distinguish between error, accuracy, and uncertainty. Error reflects the discrepancy between an exact and measured value, a difference often elusive due to the inaccessibility of the ‘exact’ value. Uncertainty denotes the range of plausible values attributed to a measurement. For accuracy, understanding the nature of uncertainty and defining the confidence interval is essential. Statistically, broader confidence intervals imply greater uncertainty. For instance, for a normal distribution, 68.3%, 95.4%, and 99.7% confidence intervals are typically represented by σ1, σ2, and σ3, respectively. Many datasheets cite accuracy in terms of average values, with a variation roughly equivalent to σ1. Calibrating sensors involves many components, including reference pressure sensors and temperature sensors, power supplies, interface cards, and acquisition equipment. Each has its inherent uncertainties which cumulatively influence the tested sensor. It is not known but most of the uncertainty (50% to 80%) is attributed to the test bench used to calibrate/test the sensor. That is what we will show in this paper. There are several methodologies to evaluate uncertainties. Primarily, two main methods can be distinguished: • Type A: This approach focuses on repetitive measurements of a single component. It is thorough and often yields more precise uncertainties specific to that element. However, its detailed nature can be time-consuming. • Type B: This method leans on datasheets provided by manufacturers. It is faster, but can lead to broader uncertainties, especially if based on generalizations drawn from large component batches. When manufacturer data is lacking or insufficient, resorting to Type A becomes necessary. Regarding pressure sensors, their operation is defined by a linear equation linking the applied pressure with the output and supply voltage. Using a model to represent this relationship inherently introduces another layer of uncertainty. It is worth noting that no model can perfectly match every data point, hence certain deviations will always exist. The objective is to determine the sensor’s transfer function using the least squares method, which provides a clear understanding of its performance under varying conditions.
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Chang, Sung-Pil, Jeong-Bong Lee, and Mark G. Allen. "An 8x8 Robust Capacitive Pressure Sensor Array." In ASME 1998 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 1998. http://dx.doi.org/10.1115/imece1998-1293.

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Abstract In this work, robust substrates, such as stainless steel, have been studied as substrates for micromachined devices. The use of robust substrates may allow for the co-fabrication of micromachined devices and sensor packages. Lamination process techniques combined with traditional micromachining processes have been investigated as suitable fabrication technologies. To illustrate these principles, a capacitive pressure sensor array has been designed, fabricated, and characterized using a stainless steel substrate, Kapton polyimide film as a suspended movable plate, and an electroplated nickel fixed back electrode. The net capacitance change of this sensor over the applied pressure range (0 to 34 kPa) was approximately 0.14 pF. Multivibrator circuitry has been integrated with pressure sensors in a hybrid fashion and used for frequency-modulated output measurements. An important attribute of this design is that only the steel substrate and the pressure sensor inlet is exposed to the flow; i.e., the sensor is self-packaged.
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Reports on the topic "Pressure sensor"

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Taylor. L51724 Fiber Optic Pressure Sensor Development. Chantilly, Virginia: Pipeline Research Council International, Inc. (PRCI), January 1995. http://dx.doi.org/10.55274/r0010368.

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Fiber optic sensors have been under development in industrial and government laboratories around the world for over a decade The commercial market for fiber sensors for measuring parameters such as temperature, displacement, and liquid level is now estimated to exceed $50 M/year Aside from the commercial interest, the U S. Department of Defense has vigorously pursued the development of fiber gyroscopes and hydrophones In spite of the high level of research and devleopment activity, however, fiber sensors were not successfully applied in the relatively harsh environment of engine combustion chambers prior to 1991. The goal of this development is to demonstrate the utilization of a new fiber optic sensor technology in engines used for natural gas transmission. Presently, there is no way to continuously measure pressure in these engines over extended periods of operation. Reliable fiber optic sensor networks supplying data to computerized control systems for on-line engine balancing could lead to major reductions in the emission of NO, and other harmful combustion products. Fuel economies in the millions of dollars per year for companies in the natural gas transmission industry could also be realized.
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Steele, Thomas R. Interferometric Optical High Pressure Sensor. Fort Belvoir, VA: Defense Technical Information Center, January 1992. http://dx.doi.org/10.21236/ada245100.

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Suarez, Reynold, Tom R. Heimbigner, Joel B. Forrester, James C. Hayes, and Lance S. Lidey. Pressure Sensor Calibration using VIPA Hardware. Office of Scientific and Technical Information (OSTI), October 2008. http://dx.doi.org/10.2172/1086929.

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Zdenek, Jeffrey S., and Ralph A. Anthenien. Ion Based High-Temperature Pressure Sensor. Fort Belvoir, VA: Defense Technical Information Center, January 2004. http://dx.doi.org/10.21236/ada453070.

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Claus, Ana, Borzooye Jafarizadeh, Azmal Huda Chowdhury, Neziah Pala, and Chunlei Wang. Testbed for Pressure Sensors. Florida International University, October 2021. http://dx.doi.org/10.25148/mmeurs.009771.

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Currently, several studies and experiments are being done to create a new generation of ultra-low-power wearable sensors. For instance, our group is currently working towards the development of a high-performance flexible pressure sensor. However, with the creation of new sensors, a need for a standard test method is necessary. Therefore, we opted to create a standardized testbed to evaluate the pressure applied to sensors. A pulse wave is generated when the heart pumps blood causing a change in the volume of the blood vessel. In order to eliminate the need of human subjects when testing pressure sensors, we utilized polymeric material, which mimics human flesh. The goal is to simulate human pulse by pumping air into a polymeric pocket which s deformed. The project is realized by stepper motor and controlled with an Arduino board. Furthermore, this device has the ability to simulate pulse wave form with different frequencies. This in turn allows us to simulate conditions such as bradycardia, tachycardia, systolic pressure, and diastolic pressure.
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Eaton, W. P., and J. H. Smith. Planar surface-micromachined pressure sensor with a sub-surface, embedded reference pressure cavity. Office of Scientific and Technical Information (OSTI), September 1996. http://dx.doi.org/10.2172/373935.

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DUNCAN, SEXTON, BALL, DOUGLAS, and OHL. A SENSOR FOR MEASURING PRESSURE IN A SEALED CONTAINER. Office of Scientific and Technical Information (OSTI), February 2001. http://dx.doi.org/10.2172/820846.

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Lee, S. B., C. M. Yu, D. R. Ciarlo, and S. K. Sheem. Micromachined Fabry-Perot interferometric pressure sensor for automotive combustion engine. Office of Scientific and Technical Information (OSTI), September 1994. http://dx.doi.org/10.2172/212541.

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Kennedy, Jermaine L. Fiber-Optic Sensor with Simultaneous Temperature, Pressure, and Chemical Sensing Capabilities. Office of Scientific and Technical Information (OSTI), March 2009. http://dx.doi.org/10.2172/949037.

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Fleming, Austin, and Ashley Lambson. Laboratory and In-Pile Testing of a Fiber-optic Pressure Sensor. Office of Scientific and Technical Information (OSTI), November 2022. http://dx.doi.org/10.2172/1908526.

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