Dissertations / Theses on the topic 'Pressure vessels'
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Lim, C. S. "Plastic limit pressures for pressure vessels with defects at openings." Thesis, Cardiff University, 1986. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.234339.
Full textKianbakhsh, Pejman. "Recycling polymer composite hydrogen pressure vessels." Thesis, University of Nottingham, 2011. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.546472.
Full textTenace, Michael A. "Optimal design of fibre composite pressure vessels." Thesis, University of Ottawa (Canada), 1990. http://hdl.handle.net/10393/5819.
Full textLittle, Andrew P. F. "The performance of corrugated carbon fibre pressure vessels under external pressure." Thesis, University of Portsmouth, 2000. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.323284.
Full textSetlock, Robert J. "Hydrostatic pressure retainment." Ohio : Ohio University, 2004. http://www.ohiolink.edu/etd/view.cgi?ohiou1091108803.
Full textHovsepian, Sarah. "Digital material skins : for reversible reusable pressure vessels." Thesis, Massachusetts Institute of Technology, 2012. http://hdl.handle.net/1721.1/72807.
Full textCataloged from PDF version of thesis.
Includes bibliographical references (p. 50-51).
Spacecraft missions have traditionally sacrificed fully functional hardware and entire vehicles to achieve mission objectives. Propellant tanks are typically jettisoned at different stages in a spacecraft mission and left to burn in the atmosphere after one use, creating a substantial amount of waste and redundancy which leads to high operational costs. Spaceflight programs cannot continue to rely on current methods of discarding hardware, since the cost to transport materials from Earth is extremely high. Significant improvements need to be made in recovery and reuse of valuable hardware, to be able to lower costs per mission and increase the number of missions. Strategies need to focus on avoiding complete loss of hardware. This thesis proposes a new class of materials called digital material skins, that will revolutionize the fabrication and assembly of everyday functional objects to spacecraft structural applications, by embedding the intelligence not in the fabrication tools but in the materials themselves, to create reusable and recyclable materials. A workflow for digital material skins is also demonstrated, based on existing fabrication tools to rethink the entire lifecycle of functional skins from design to fabrication to disassembly. When a child builds a structure out of Legos, precision lies not in the human assembler but in the material, component geometry, and linking mechanism to dictate how and where each material interlocks within the larger material system. A digital material skin is made of discrete units with a finite set of parts and joints used to construct a functional structural skin for airtight,waterproof, high or low pressure applications.The surface is enclosed or the surface is open. Digital material skins are used to construct any shape or interior volume that is regular or amorphous. A digital material skin is an exterior structure which relies on an interior digital material structure for support, or a digital material skin is self-supported with few or no interior support. Parts and links are arranged and configured in a regular pattern to create a surface larger than the units themselves. The skin is part of a larger assembly or part of a single unitary structure of any size or shape. The skin may have a thickness that is smaller or larger than any dimension. The skin is made of one or more layers of one material or multi-material units. The joints are reversible, allowing transfer of forces from one unit to adjacent units to create a continuous bulk material. The work will develop a prototype of a digital material skin concept for pressure vessel skins, and adumbrate a new design methodology that considers the entire lifecycle of digital material skins.
by Sarah Hovsepian.
S.M.
Kandaz, Murat. "Computer Aided Design And Structural Analysis Of Pressure Vessels." Master's thesis, METU, 2006. http://etd.lib.metu.edu.tr/upload/2/12607261/index.pdf.
Full textRohrauer, Greg. "Ultra-high-pressure composite vessels with efficient stress distributions." Thesis, National Library of Canada = Bibliothèque nationale du Canada, 1999. http://www.collectionscanada.ca/obj/s4/f2/dsk1/tape8/PQDD_0015/NQ43586.pdf.
Full textCASTRO, ARISTAGORAS MORAES DE. "STRESS ANALYSIS NOZZLES IN PRESSURE VESSELS WITH CONICAL CAPS." PONTIFÍCIA UNIVERSIDADE CATÓLICA DO RIO DE JANEIRO, 1992. http://www.maxwell.vrac.puc-rio.br/Busca_etds.php?strSecao=resultado&nrSeq=25613@1.
Full textO presente trabalho tem por objetivo o estudo de tensões críticas em bocais cilíndricos soldados a vasos de pressão, também cilíndricos, com tampas de geometria cônica submetidos a pressão interna e a um carregamento axial externo. O problema é atacado analiticamente através da teoria de cascas de revolução, particularizada para cascas finas axissimétricas. É utilizado o método de flexibilidade para imposição da continuidade dos esforços e deslocamentos nas junções bocal/tampa e tampa/vaso. Foi desenvolvido um programa de computador que fornece as tensões máximas que ocorrem no bocal, bem como as resultantes de tensão, momentos, deslocamentos e rotações ao longo da estrutura. Observou-se que para uma dada configuração do sistema (diâmetros do bocal e vaso, e ângulos da tampa cônica) existe uma relação ótima entre as espessuras do bocal e da tampa, para a qual o fator de concentração de tensões é mínimo. Esta relação é independente da rasão entre os carregamentos axial e a pressão.
The present work is concerned whit critical stresses due to the combined affect of axial loads and intornal pressure in nossles welded to cilindrical pressure vessels whit conical hoads. The problem is treatod analytically through, axisimetric, thin ahell theory. The method of flexibility is employed to enforce the continuity of loads, moments, displacements and rotations at the junctions. A computer code has been developed for the calculation of the critical atresses in the nozzle, as well as the stresses resultants, moments, displacements, and the rotations along the atracture. It has been observed that for a griven configuration (nozzle and vessel diameters and angle of the conical head), there is an optimum between the nozzle and head thickness for which the stress concentration factor is minimum. This ratio is independent of the relation between the axial hoad and internal pressure.
Zhao, Yingzi, and 趙瑩子. "Acute and chronic impact of pressure on vascular responsiveness." Thesis, The University of Hong Kong (Pokfulam, Hong Kong), 2014. http://hdl.handle.net/10722/207185.
Full textpublished_or_final_version
Pharmacology and Pharmacy
Doctoral
Doctor of Philosophy
Nadarajah, Chithranjan. "A design study of nozzles and attachments in pressure vessels." Thesis, University of Strathclyde, 1993. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.338935.
Full textCharles, Ian David. "Ratchetting strains in pressurised pipes." Thesis, Coventry University, 1992. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.302999.
Full textEllis, M. B. D. "Fracture mechanics in a 2.25Cr-1Mo pressure vessel steel." Thesis, University of Cambridge, 1986. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.382220.
Full textHu, Jianbing. "Modeling and simulation of high pressure composite cylinders for hydrogen storage." Diss., Rolla, Mo. : Missouri University of Science and Technology, 2009. http://scholarsmine.mst.edu/thesis/pdf/Hu_09007dcc805d8846.pdf.
Full textVita. The entire thesis text is included in file. Title from title screen of thesis/dissertation PDF file (viewed April 9, 2009) Includes bibliographical references.
King, Benjamin. "Welding and post weld heat treatment of 2.25%Cr-1%Mo steel." Access electronically, 2005. http://www.library.uow.edu.au/adt-NWU/public/adt-NWU20060404.095844/index.html.
Full textSoboyejo, Winston Oluwole. "The propagation of defects under fatigue loading." Thesis, University of Cambridge, 1988. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.257906.
Full textFowler, Hamish. "The influence of warm prestressing and proof loading on the cleavage fracture toughness of ferritic steels." Thesis, University of Bristol, 1998. http://hdl.handle.net/1983/39f337c6-2760-4f16-99bf-85fa841d63b1.
Full textSidorenko, Igor. "Pressure effects on fluidized bed behaviour." Monash University, Dept. of Chemical Engineering, 2003. http://arrow.monash.edu.au/hdl/1959.1/9541.
Full textWatt, Gerald. "An investigation of the use of metal matrix composites for pressure vessels." Thesis, University of Surrey, 2018. http://epubs.surrey.ac.uk/845776/.
Full textDyess, Mark Vernon. "OPTIMIZATION OF THE MATERIAL SELECTION PROCESS FOR CRYOGENIC COMPOSITE OVERWRAPPED PRESSURE VESSELS." MSSTATE, 2008. http://sun.library.msstate.edu/ETD-db/theses/available/etd-03272008-163646/.
Full textBalasubramaniam, Krishna. "A finite element procedure for assessing continuous flaws in clad pressure vessels." Thesis, Imperial College London, 1985. http://hdl.handle.net/10044/1/11800.
Full textDurrant, J. C. "The design and analysis of pressure vessels using the finite element method." Thesis, University of Nottingham, 1999. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.368008.
Full textMasu, Leonard Mbevi. "The effect of cross bore geometry on the strength of pressure vessels." Thesis, University of Leeds, 1989. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.369175.
Full textOng, L. S. "The effect of high internal pressure on cylindrical vessels with geometric imperfections." Thesis, University of Strathclyde, 1985. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.371964.
Full textViehrig, Hans-Werner, Eberhard Altstadt, Mario Houska, Gudrun Mueller, Andreas Ulbricht, Joerg Konheiser, and Matti Valo. "Investigation of decommissioned reactor pressure vessels of the nuclear power plant Greifswald." Helmholtz-Zentrum Dresden - Rossendorf, 2018. http://nbn-resolving.de/urn:nbn:de:bsz:d120-qucosa-235681.
Full textOlsen, Gregory Dana. "Experimental investigation into catastrophic failure of pressure vessels due to hypervelocity impact /." Full text (PDF) from UMI/Dissertation Abstracts International, 2001. http://wwwlib.umi.com/cr/utexas/fullcit?p3008411.
Full textSterjovski, Zoran. "Investigation of postweld heat treatment of quenched and tempered pressure vessel steels." Access electronically, 2003. http://www.library.uow.edu.au/adt-NWU/public/adt-NWU20031127.160623/index.html.
Full textJones, Daniel Thomas. "The advanced winding patterns and analysis for dome-ended filament wound pressure vessels." Thesis, University of Nottingham, 1997. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.362907.
Full textADAME, WALLACE MOREIRA. "ON THE ANALYSIS BEHAVIOUR OF CYLINDRICAL PRESSURE VESSELS CONSIDERING PLATE TO SHELL JUNCTION." PONTIFÍCIA UNIVERSIDADE CATÓLICA DO RIO DE JANEIRO, 2018. http://www.maxwell.vrac.puc-rio.br/Busca_etds.php?strSecao=resultado&nrSeq=36065@1.
Full textCOORDENAÇÃO DE APERFEIÇOAMENTO DO PESSOAL DE ENSINO SUPERIOR
PROGRAMA DE EXCELENCIA ACADEMICA
Este trabalho apresenta a análise numérica de vasos de pressão cilíndricos modelados por cascas e placas axissimétricas submetidas a carregamento de pressão interna uniformemente distribuída, utilizando-se a técnica de elementos finitos. São consideradas análises de junções entre superfícies com diferentes espessuras, tais como paredes finas (razão entre o raio e a espessura superior a 10) e moderadamente espessas (razão entre o raio e a espessura inferior a 5). Os campos de deslocamento considerados são os referentes aos elementos planos axissimétricos. A partir deste modelo são avaliadas as tensões na transição entre as superfícies e os resultados comparados com soluções analíticas simplificadas. Conclui-se que a solução analítica aproximada é aceitável para uma grande faixa de valores envolvendo placas e cascas de espessuras moderadamente espessas, enquanto que, para paredes finas, a análise por elementos finitos é necessária para verificação do comportamento das tensões na junção. Testes numéricos utilizando o programa ANSYS são apresentados para demonstrar o desempenho de análises lineares axissimétricas, empregando elementos quadráticos em comparação com as soluções analíticas e avaliando também as limitações do modelo analítico na região da descontinuidade geométrica do modelo proposto.
This work presents the numerical analysis of cylindrical pressure vessels, modeled using axisymmetric shells and plates elements under internal pressure loads. The numerical analysis considers surface joints for various surface thickness ratios, from thin (ratio between radius and thickness greater than 10) to thick (ratio between radius and thickness less than 5) shells. Element displacement fields of axisymmetric plane elements are used to evaluate the stress state at the surfaces junctions, and the obtained results are compared to simplified analytical solutions. It is concluded that analytical approximate results present an acceptable solution for a large range of plates to shells geometries up to moderately thick shells, whereas for thin shells the finite element solution is necessary to be considered in order to accurately verify the stresses at plate to shell junction. Numerical tests applying ANSYS program are presented to demonstrate the performance of linear axisymmetric analysis applying quadratic elements in comparison to the analytical solutions also evaluating the limitations of the analytical model in the region of the geometric discontinuity of the proposed model.
Rojek, Jan. "Effect of voids in thick-walled pressure vessels : Experimental observations and numerical modelling." Thesis, Université Paris sciences et lettres, 2020. http://www.theses.fr/2020UPSLM015.
Full textThe topic of this thesis is the influence of voids on the mechanical properties of carbon fibre reinforced polymers used in high performance applications, such as pressure vessels for hydrogen storage. Manufactured through filament winding, these thick-walled structures can show a significant void content. The effect of these voids on the strength of pressure vessels and, more in general, on the strength of composite structures subjected to multiaxial loads, is not thoroughly understood. The work presented in this thesis is carried out in the context of an existing model of tensile failure of unidirectional composites developed at MINES ParisTech. The objective of the work presented here is to take into account additional factors, such as void content. X-ray tomography and optical microscopy observations are carried out to characterize voids in a carbon-epoxy pressure vessel. In another experimental study, mechanical tests are performed on carbon-epoxy specimens with different levels of void content. The influence of a biaxial load (longitudinal tension and through-thickness compression) is evaluated using a custom-designed experimental setup.At the microscopic scale, tests on notched epoxy specimens are carried out to investigate microscopic void growth and the mechanical behaviour of the resin under a multiaxial stress state. Finally, a numerical approach to modelling failure of a thick-walled cylinder is proposed in the framework of the multiscale fibre break model, taking into account the experimental observations
Shum, Pak W. "A critical analysis of the acoustic emmission technique for NDE of pressure vessels." Thesis, This resource online, 1992. http://scholar.lib.vt.edu/theses/available/etd-09192009-040341/.
Full textEndersby, Stephen. "Numerical analysis of a thick cylinder in the presence of cracked crossbore and axial holes." Thesis, Northumbria University, 1997. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.245277.
Full textChapman, Benjamin James. "Continuous fibre reinforced thermoplastic pipes." Thesis, University of Newcastle Upon Tyne, 1999. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.285377.
Full textBagshaw, Nick. "A study of leak rates through narrow cracks." Thesis, University of Sheffield, 2000. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.366150.
Full textSILVA, MARIA C. A. T. da. "Introducao a analise de vasos de pressao em concreto protendido multicavidade." reponame:Repositório Institucional do IPEN, 1986. http://repositorio.ipen.br:8080/xmlui/handle/123456789/9867.
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Dissertacao (Mestrado)
IPEN/D
Instituto de Pesquisas Energeticas e Nucleares - IPEN/CNEN-SP
OLIVEIRA, CARLOS A. de. "Um modelo para a analise estrutural de flanges de vasos de pressao nucleares." reponame:Repositório Institucional do IPEN, 1987. http://repositorio.ipen.br:8080/xmlui/handle/123456789/9871.
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Dissertacao (Mestrado)
IPEN/D
Instituto de Pesquisas Energeticas e Nucleares - IPEN/CNEN-SP
Rogers, Craig A. "An axisymmetric linear/high-order finite element for filament wound composite structures." Diss., Virginia Polytechnic Institute and State University, 1987. http://hdl.handle.net/10919/52316.
Full textPh. D.
Harris, David Malcolm. "The effect of pre-exposing the microbial population on gas production using the Pressure Transducer Technique." Thesis, University of Reading, 1998. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.242337.
Full textManu, Christopher Corneliu. "Finite element analysis of stress rupture in pressure vessels exposed to accidental fire loading." Thesis, Kingston, Ont. : [s.n.], 2008. http://hdl.handle.net/1974/1295.
Full textGrigorian, H. "Nonlinear sensitivity analysis and its application to the optimal shape design of pressure vessels." Thesis, Swansea University, 1991. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.637180.
Full textMilososka, Katarina, and Louise Nylander. "Value Stream Mapping of GKN Aerospace Applied Composites production of pressure vessels and radomes." Thesis, Linköpings universitet, Kommunikations- och transportsystem, 2015. http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-119939.
Full textMyles, John Robert. "Electronic Speckle Pattern Interferometry (ESPI) NDE of cracks in pressure vessels with FEA modelling." Master's thesis, University of Cape Town, 1997. http://hdl.handle.net/11427/6922.
Full textThis dissertation describes the results of an attempt to simulate the Electronic Speckle Pattern Interferometric fringe patterns observed around a crack or combination of cracks in a pressure vessel by finite element methods. Electronic Speckle Pattern Interferometry (ESPI) is a coherent optical measurement technique that produces a contour map of the surface displacement of an object when it is stressed. The sensitivity of the techniques is of the order of half the Wavelength of light. The objective of the study was to determine a procedure for the modelling of interferometric fringes by finite elements. The finite element model may then be used to study the effects of crack geometry on fringe patterns and produce a library of reference fringe patterns for comparison with experimental fringe patterns found for unknown flaws. The approach to the problem was to simulate the fringe patterns for a crack free cylinder and compare these with these observed experimentally. The FE model modulus of elasticity was than to be calibrated to minimise uncertainty in the exact value of the elastic modulus. Once the model was calibrated, various cracks and combinations of cracks were introduced into both the physical cylinders and the FE model and fringe patterns obtained were compared. The experimental results for the cracks and combinations of cracks were compared with the finite element predictions at a range of loads.
Pierola, Javier. "Three dimensional stress intensity factor for large arrays of radial internal surface cracks in a cylindrical pressure vessel." FIU Digital Commons, 1993. http://digitalcommons.fiu.edu/etd/2514.
Full textVecchi, Rodrigo de. "Regulamentos tecnicos de apoio para atendimento a NR 13." [s.n.], 2009. http://repositorio.unicamp.br/jspui/handle/REPOSIP/264073.
Full textDissertação (mestrado) - Universidade Estadual de Campinas, Faculdade de Engenharia Mecanica
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Resumo: Procurou-se neste trabalho, reunir uma grande quantidade de normas técnicas de inspeção, de projeto e de ensaios não destrutivos a fim de serem sugeridos e principalmente fornecer dados e critérios necessários para a realização segura e apropriada dos exames e testes tidos como mandatórios ou alternativos na NR13. Para isto foi necessária uma pesquisa detalhada do acervo de normas técnicas existentes em nosso país e também em outros países, a fim de obter informações que pudessem ser confrontadas com casos específicos e reais, cujos dados foram coletados com profissionais qualificados e certificados. Três aspectos foram analisados: os requisitos da norma NR13, que é compulsória e tem abrangência geral, critérios específicos utilizados por normas de enfoque singular, ou seja, para uma única linha de equipamento, de teste ou de inspeção e a experiência prática que trouxe a realidade encontrada em muitos estabelecimentos através do resultado de inspeções realizadas para garantir a segurança na operação de vasos de pressão e caldeiras. Vale frisar que tais inspeções fazem parte de nosso acervo técnico pessoal e estão devidamente registradas no CREA através de mais de 600 ART's recolhidas em 8 diferentes estados brasileiros. Também foram apresentados alguns acidentes gerados, talvez, pela execução errônea de testes e inspeções, seguidos por sugestões que poderiam evitar a ocorrência dos mesmos. Os resultados desse trabalho são de grande importância nos futuros estudos e revisões normativas.
Abstract: It was intended to group a large amount of technical standards that treat about Boilers and Pressure Vessel design and inspections and also non destructive examinations in order to suggest and supply data and criteria to perform appropriate and safe inspections and examinations mentioned as mandatory or alternative at NR13. It was necessary an extensive research into Brazilian and foreign standards to collect information which could be confronted with real and specific cases described by qualified and certificated professionals. Three aspects have been analyzed: NR13 requirements which are mandatory and have only a global sight, criteria used in specific situations for unique kind of equipment, test or examination and practical experience that brought the reality of many companies through the result of inspections performed to guarantee a safe operation of pressure vessels and boilers. It is important to emphasize that these inspections belong to a personal technical performance and are registered at CREA through more than 600 ART's paid in 8 different Brazilian states. It was also presented some accidents probably caused by wrong execution of tests and inspections, followed by suggestions which could avoid them. The results obtained from this job are very important in future studies and revisions of normative standards.
Mestrado
Termica e Fluidos
Mestre em Engenharia Mecânica
Ramirez, G. "Monitoring and prediction of damage in filament wound composite pipes under pressure loading /." Digital version accessible at:, 1999. http://wwwlib.umi.com/cr/utexas/main.
Full textEdgar, Christopher Austin. "Improvements to the pool critical assembly benchmark using 3-D discrete ordinate transport with adaptive difference." Thesis, Georgia Institute of Technology, 2013. http://hdl.handle.net/1853/49087.
Full textPenso, Jorge A. "Fundamental study of failure mechanisms of pressure vessels under thermo-mechanical cycling in multiphase environments /." The Ohio State University, 2001. http://rave.ohiolink.edu/etdc/view?acc_num=osu1486399451963218.
Full textHeath, Melissa. "Heat Transfer Regimes during Charging of Pressure Vessels with Compressed Gas at Low Reynolds Numbers." Thesis, Griffith University, 2018. http://hdl.handle.net/10072/378153.
Full textThesis (PhD Doctorate)
Doctor of Philosophy (PhD)
School of Eng & Built Env
Science, Environment, Engineering and Technology
Full Text
Bradley, Frederick Joseph. "Thermal shock resistance parameters for the industrial lining problem." Thesis, University of British Columbia, 1985. http://hdl.handle.net/2429/25568.
Full textApplied Science, Faculty of
Mining Engineering, Keevil Institute of
Graduate
Garza, Tanya Cruz. "Single crystal silicon as a macro-world structural material : application to compact, lightweight high pressure vessels." Thesis, Massachusetts Institute of Technology, 2011. http://hdl.handle.net/1721.1/62875.
Full textThis electronic version was submitted by the student author. The certified thesis is available in the Institute Archives and Special Collections.
Cataloged from student submitted PDF version of thesis.
Includes bibliographical references (p. 163-166).
Single crystal silicon has promising inherent structural properties which are attractive for weight sensitive applications. Single crystal silicon, however, is a brittle material which makes the usable strength that can be obtained from silicon devices dependent on flaws or cracks that can arise during fabrication in a sample that begins relatively free of defects. This research explores the use of micro-machined, single crystal silicon (Si) for high-strength macro-scale application and determines its practical advantages when compared to conventional approaches. The major contributions of this thesis includes evaluation of wafer-scale silicon for macro-world applications, identification of cellular pressure vessels as a promising wafer-scale silicon device, identification of design criteria for brittle pressure vessels and quantified metrics for a competitive silicon pressure vessel design, identification of DRIE failure mechanisms, elucidation of the role of wafer-level strength variation related to surface morphology variation in wafer-scale structures, and identification of promising strength recovery techniques and promising avenues to explore for further strength improvements. High pressure vessels for aerospace applications with volumes of 10's of cc's were designed under the premise that the superior strength-to-density ratio of Si and post- processing strength recovering techniques can compensate for fabrication technology limitations that constrain the vessel shape and for the brittle nature of the material. A combination of literature review, analysis, and numerical simulations suggest that there are single crystal silicon fabrication technology compromised pressure vessel designs that can have lower structural mass to pressurant mass ratios than conventional pressure vessel designs at design pressures above about 6000 psi. A honeycomb geometry offered the best results of those studied. The honeycomb silicon pressure vessel offers the possibility of integrated micro-valves, regulators and sensors. Such vessels would be useful for nano and pico satellites and for launch vehicles. Fabrication processes and strength recovering techniques were explored experimentally to understand and improve the usable strength of microfabricated single crystal silicon macro-structures. It was found that silicon strength will vary across a DRIE etched wafer as a result of submicron sidewall roughness variation independent 3 of larger geometric parameter variation. Secondary anisotropic SF6 plasma etching and surface migration were shown to be a promising combination for recovery of microfabricated silicon strength while oxidation and oxide removal offer less promise. Long SF6 smoothing etches revealed significantly varied sidewall roughness from that hidden by overhanging silicon which affects correlations of surface morphology to device strength. An analytical model was developed that correlates silicon strength data found experimentally to the silicon pressure vessel design. The model predicts that reasonable improvements to usable silicon strength need to be made to make a silicon pressure vessel design competitive with conventional designs. Further work on strength uniformity across wafer and strength recovery is recommended to improve the usable strength of wafer-scale, DRIE single crystal silicon devices.
by Tanya Cruz Garza.
Ph.D.