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Dissertations / Theses on the topic 'PVD magnetron sputtering'

Author: Grafiati
Published: 4 June 2021
Last updated: 1 February 2022

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1

Todoran, Alexandru Mihai. "Magnetron sputtering in inverted cylindrical configuration : 3D deposition on moving substrate." Thesis, Grenoble, 2014. http://www.theses.fr/2014GRENI082.

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Les travaux présentés dans cette thèse constituent une étude sur la possibilité de déposer par pulvérisation plasma des couches minces de TiN sur des fils d'acier inoxydable en défilement. Les aspects technologiques tels que la conception et la construction d'une ligne prototype capable de nettoyer et déposer sur toute la circonférence des substrats cylindriques en mouvement sont présentés. Le développement de procédé dans la chambre de nettoyage par micro-ondes a permis l'amélioration des performances du plasma en termes de densité et de température d'électronique, ce qui a conduit à une amél
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2

Dietzel, Yvette. "Beschichtung von textilen Flächen mit den PVD-Technologien reaktives Vakuumbogen-Verdampfen und reaktives Magnetron-Sputtern : PVD-Beschichtung von textilen Flächen." Doctoral thesis, Saechsische Landesbibliothek- Staats- und Universitaetsbibliothek Dresden, 2004. http://nbn-resolving.de/urn:nbn:de:swb:14-1103790814484-00373.

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Gegenstand der wissenschaftlichen Arbeit ist der technologische Nachweis für die Erzeugbarkeit haftfester metallischer und keramischer Schichten auf textilen Flächengebilden mit den PVD-Technologien reaktives Magnetron-Sputtern und reaktives Vakuumbogen-Verdampfen. Basis für die Realisierung der experimentellen Untersuchungen sind sowohl vorhandene industrielle PVD-Beschichtungsanlagen, die im Batchbetrieb arbeiten, als auch Rollcoater als Bindeglied zwischen einer Labor- und einer Industrieanlage. Kern des Vorhabens sind umfangreiche Batchbeschichtungen auf Basis einer breit angelegten Experi
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3

Frodelius, Jenny. "Characterization of Ti2AlC coatings deposited with High Velocity Oxy-Fuel and Magnetron Sputtering Techniques." Licentiate thesis, Linköpings universitet, Tunnfilmsfysik, 2008. http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-11422.

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This Thesis presents two different deposition techniques for the synthesis of Ti2AlC coatings. First, I have fabricated Ti2AlC coatings by high velocity oxy-fuel (HVOF) spraying. Analysis with scanning electron microscopy (SEM) show dense coatings with thicknesses of ~150 µm when spraying with a MAXTHAL 211TM Ti2AlC powder of size ~38 µm in an H2/O2 gas flow. The films showed good adhesion to stainless steel substrates as determined by bending tests and the hardness was 3-5 GPa. X-ray diffraction (XRD) detected minority phases of Ti3AlC2, TiC, and AlxTiy alloys. The use of a larger powder size
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4

Frodelius, Jenny. "Characterization of Ti2AlC coatings deposited with High Velocity Oxy-Fuel and Magnetron Sputtering Techniques." Licentiate thesis, Linköping University, Linköping University, Thin Film Physics, 2008. http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-11422.

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<p>This Thesis presents two different deposition techniques for the synthesis of Ti<sub>2</sub>AlC coatings. First, I have fabricated Ti<sub>2</sub>AlC coatings by high velocity oxy-fuel (HVOF) spraying. Analysis with scanning electron microscopy (SEM) show dense coatings with thicknesses of ~150 µm when spraying with a MAXTHAL 211<sup>TM </sup>Ti<sub>2</sub>AlC powder of size ~38 µm in an H<sub>2</sub>/O<sub>2</sub> gas flow. The films showed good adhesion to stainless steel substrates as determined by bending tests and the hardness was 3-5 GPa. X-ray diffraction (XRD) detected minority phase
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5

Trinh, David Huy. "Synthesis and Characterisation of Magnetron Sputtered Alumina-Zirconia Thin Films." Licentiate thesis, Linköping : Linköping University, 2006. http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-7513.

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6

Anjum, Sadaf Saad. "Fabrication of smart intercalated polymer-SMA nanocomposite." Thesis, Cranfield University, 2015. http://dspace.lib.cranfield.ac.uk/handle/1826/9384.

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Mimicking nature gives rise to many important facets of biomaterials. This study is inspired by nature and reports on the fabrication of an intercalated polymer-NiTi nanocomposite that mimics the structural order of urethral tissue performing micturition. PTFE is chosen due to its hydrophobicity, low surface energy, and thermal and chemical stability. NiTi has been selected as a prime candidate for this research due to its excellent mechanical stability, corrosion resistance, energy absorbance, shape memory and biocompatibility. Nanoscale engineering of intercalated nanocomposites is done by P
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7

Wilhelmsson, Ola. "Synthesis and Characterization of Ternary Carbide Thin Films." Doctoral thesis, Uppsala : Acta Universitatis Upsaliensis Acta Universitatis Upsaliensis, 2007. http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-8265.

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8

Victor, Jean-Louis. "Étude de revêtements thermochromes à base de VO2 élaborés par voie PVD/HiPIMS." Thesis, Bordeaux, 2019. http://www.theses.fr/2019BORD0275.

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Le dioxyde de vanadium (VO2) est un matériau thermochrome capable de changer de propriétés optiques avec la température suite à un changement de phase cristallographique associé à une transition de Mott. Cette capacité lui permet de moduler les flux thermiques en tant que revêtement de parois ou de vitrages. Il peut ainsi servir à réguler la température d’un habitacle ou encore être utilisé dans le domaine de la discrétion infrarouge. Le dioxyde de vanadium passe d’un état semi-conducteur vers un état métallique aux alentours de 68 °C. Cette température de transition, trop élevée pour l'obtent
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9

Lewin, Erik. "Design of carbide-based nanocomposite coatings." Doctoral thesis, Uppsala : Acta Universitatis Upsaliensis, 2009. http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-109427.

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10

Ondráček, Michal. "Tvorba motivů tenkovrstvými metodami." Master's thesis, Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií, 2014. http://www.nusl.cz/ntk/nusl-220968.

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The master’s thesis deals with the theory of thin film technology, especially creating these layers. The work includes the distribution of vacuum deposition techniques for physical (PVD) and chemical (CVD). The main aim is to create a theme in different ways of implementation by using magnetron sputtering device, and these motives evaluated in terms of the quality of sputtering.
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11

Palmquist, Jens-Petter. "Carbide and MAX-Phase Engineering by Thin Film Synthesis." Doctoral thesis, Uppsala : Acta Universitatis Upsaliensis : Univ.-bibl. [distributör], 2004. http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-3972.

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12

Hégr, Ondřej. "Charakterizace nanostruktur deponovaných vysokofrekvenčním magnetronovým naprašováním." Doctoral thesis, Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií, 2008. http://www.nusl.cz/ntk/nusl-233428.

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This thesis deals with the analysis of nano-structured layers deposited by high-frequency magnetron sputtering on the monocrystalline silicon surface. The content of the work focuses on the magnetron sputtering application as an alternative method for passivation and antireflection layers deposition of silicon solar cells. The procedure of pre-deposite silicon surface cleaning by plasma etching in the Ar/H2 gas mixture atmosphere is suggested. In the next step the silicon nitride and aluminum nitride layers with hydrogen content in Ar/N2/H2 gas mixture by magnetron sputtering are deposited. On
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13

Dale, Ashley S. "Developing an approach to improve beta-phase properties in ferroelectric pvd-hfp thin films." Thesis, 2020. http://hdl.handle.net/1805/22686.

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Indiana University-Purdue University Indianapolis (IUPUI)<br>Improved fabrication of poly(vinylindenefluoride)-hexafluoropropylene (PVDF-HFP) thin films is of particular interest due to the high electric coercivity found in the beta-phase structure of the thin film. We show that it is possible to obtain high-quality, beta-phase dominant PVDF-HFP thin films using a direct approach to Langmuir-Blodgett deposition without the use of annealing or additives. To improve sample quality, an automated Langmuir-Blodgett thin film deposition system was developed; a custom dipping trough was fabricated, a
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14

ŠRAM, Vlastimil. "Funkční tenké vrstvy pro aplikace využívající pokročilé oxidační procesy." Master's thesis, 2013. http://www.nusl.cz/ntk/nusl-156307.

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This diploma thesis aims to optimalization the process of magnetron sputtering and creating of thin layers for use in advanced oxidation processes. During the work was created range of TiOx layers. For this process was used physical method of sputtering called PVD. The photocatalytic activity of the deposited films was tested by degradation of organic dyes Acid Orange 7. Furthermore, the layer was analyzed on surface morphology (SEM) and the layer thickness (profilometry). Study of created layers was focused on the link between the characteristics of each layer, deposition parameters and photo
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15

KRAJČOVIČ, Jan. "Vytváření tenkých vrstev pro aplikace pokročilých oxidačních procesů s využitím kovových dopantů." Master's thesis, 2014. http://www.nusl.cz/ntk/nusl-170232.

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The aim of this diploma thesis is deposition of TiO2 thin films onto different types and sizes of substrates, and some of these layers dope by iron or silver. During the work was range of TiO2 layers created using a method of physical vapor deposition namely magnetron sputtering. For these processes was chosen the Dreva ARC 400 Hard Material Coating Plant device. The main aim of these depositions was to attempt to create TiO2 thin films on a substrates of larger surface than its in average laboratory processes usual. For this purpose were TiO2 layers deposited onto square glass plates of side
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16

Dietzel, Yvette [Verfasser]. "Beschichtung von textilen Flächen mit den PVD-Technologien reaktives Vakuumbogen-Verdampfen und reaktives Magnetron-Sputtern : PVD-Beschichtung von textilen Flächen / Yvette Dietzel." 2005. http://d-nb.info/973878320/34.

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17

Kirkpatrick, Scott. "Anomalous current and voltage fluctuations in high power impulse magnetron sputtering." 2009. http://proquest.umi.com/pqdweb?did=1825368181&sid=2&Fmt=2&clientId=14215&RQT=309&VName=PQD.

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Thesis (Ph.D.)--University of Nebraska-Lincoln, 2009.<br>Title from title screen (site viewed January 5, 2010). PDF text: xxiv, 292 p. : ill. (some col.) ; 11 Mb. UMI publication number: AAT 3365710. Includes bibliographical references. Also available in microfilm and microfiche formats.
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18

Li, Jigang. "Electrical and optical properties of silver films deposited by high power impulse magnetron sputtering." 2008. http://proquest.umi.com/pqdweb?did=1574158131&sid=2&Fmt=2&clientId=14215&RQT=309&VName=PQD.

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Thesis (Ph.D.)--University of Nebraska-Lincoln, 2008.<br>Title from title screen (site viewed Jan. 15, 2009). PDF text: 136 p. : ill. (chiefly col.) ; 3 Mb. UMI publication number: AAT 3315317. Includes bibliographical references. Also available in microfilm and microfiche formats.
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19

HSU, YONG-WEI, and 許詠崴. "A method of PID closed-loop control was used for asymmetric bipolar DC pulsed magnetron sputtering system to deposit WO3-Nb2O5 mixed films." Thesis, 2015. http://ndltd.ncl.edu.tw/handle/hcs6cz.

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20

(8771429), Ashley S. Dale. "DEVELOPING AN APPROACH TO IMPROVE BETA-PHASE PROPERTIES IN FERROELECTRIC PVDF-HFP THIN FILMS." Thesis, 2020.

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Improved fabrication of poly(vinylindenefluoride)-hexafluoropropylene (PVDF-HFP) thin films is of particular interest due to the high electric coercivity found in the beta-phase structure of the thin film. We show that it is possible to obtain high-quality, beta-phase dominant PVDF-HFP thin films using a direct approach to Langmuir-Blodgett deposition without the use of annealing or additives. To improve sample quality, an automated Langmuir-Blodgett thin film deposition system was developed; a custom dipping trough was fabricated, a sample dipping mechanism was designed and constructed, and t
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