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Journal articles on the topic 'PVD magnetron sputtering'

Author: Grafiati

Published: 4 June 2021

Last updated: 1 February 2022

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1

Monaghan, D., and RD Arnell. "Novel PVD films by unbalanced magnetron sputtering." Vacuum 43, no. 1-2 (1992): 77–81. http://dx.doi.org/10.1016/0042-207x(92)90189-4.

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2

V, Srikumaran. "D.C. Magnetron Sputtering Coating on Trenches." Journal of Manufacturing Engineering 16, no. 1 (2021): 029–31. http://dx.doi.org/10.37255/jme.v16i1pp029-031.

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The development and application of plasma processing such as plasma assisted CVD and PVD become highly important in various industrial fields such as microelectronics, sensors, solar cells, automobiles, cutting tools, etc. In PVD different process are used such as Vacuum Evaporation, Electron Beam evaporation, Sputtering etc. But all processes have common limitation of one as such deposition is inline sight. It is difficult to achieve uniform coating on complex surfaces, holes and trenches. The width dimension and higher aspect ratio (Depth: width >1) of trenches generally in compatible wit

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3

Supriadi, Sugeng, Annisa Ovilia, Nurul Ilmaniar, and Bambang Suharno. "Formation of TiO₂ Thin Film on Antibacterial Metal Injection Molding Stainless Steel Orthodontic Bracket 17-4 PH Using Physical Vapor Deposition Method." Key Engineering Materials 846 (June 2020): 169–74. http://dx.doi.org/10.4028/www.scientific.net/kem.846.169.

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This study aims to equip orthodontic bracket SS 17-4 PH fabricated using metal injection molding with antibacterial properties. This can be achieved by applying TiO2 coating on the surface of brackets using magnetron sputtering PVD method. This method is chosen due to its compatibility to be used on bulk metal and its ability to control thin-film stoichiometry. Samples were prepared using the series of following steps which comprised of metal injection molding, binder elimination with solvent and thermal debinding, sintering in vacuum and argon atmosphere, electropolishing, and magnetron sputt

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4

Rodrı́guez, R. J., J. A. Garcı́a, R. Martinez, et al. "Tribological metal-carbon coatings deposited by PVD magnetron sputtering." Applied Surface Science 235, no. 1-2 (2004): 53–59. http://dx.doi.org/10.1016/j.apsusc.2004.05.124.

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5

Kononov, Dmitry M., Alexei V. Zhdanov, and Valentin V. Morozov. "Receiving and Research of Diamond-Like PVD-Coating." Advanced Materials Research 1088 (February 2015): 391–94. http://dx.doi.org/10.4028/www.scientific.net/amr.1088.391.

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The article deals with producing diamondlike-PVD-coatings based on carbon: a-C and a-C:H and MeN/CNx. These types of coatings were prepared by magnetron sputtering materials in vacuum. The results of experimental studies of their mechanical and tribological properties and recommendations for use in industry

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6

Jeong, Woon-Jo. "A Study on the Deposition of Hydroxyapatite Nano Thin Films Fabricated by Radio-Frequency Magnetron Sputtering for Biomedical Applications." Journal of Nanoscience and Nanotechnology 20, no. 7 (2020): 4114–19. http://dx.doi.org/10.1166/jnn.2020.17582.

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We have developed a HA nano-coating technology suitable for dental and orthopedic implants using RF magnetron sputtering method which can achieve excellent adhesion to titanium compared with other various PVD coating technologies. As a result, the HA thin film prepared by RF magnetron sputtering has a thickness of about 1.6 [μm] and its adhesion force to base metal is about 11.93 [N] or more and Ca/P ratio is about 1.64, which is suitable for dental and orthopedic implants.

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7

Mehran, Q. M., A. R. Bushroa, and M. A. Fazal. "Evaluation of CrAlN multilayered coatings deposited by PVD magnetron sputtering." Journal of Adhesion Science and Technology 29, no. 19 (2015): 2076–89. http://dx.doi.org/10.1080/01694243.2015.1054577.

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8

Kucharska, Barbara, and Anna Wróbel-Knysak. "The mechanical properties of AlSi coatings made by PVD technology." Mechanik 90, no. 1 (2017): 66–67. http://dx.doi.org/10.17814/mechanik.2017.1.15.

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The mechanical properties (microhardness and scratch test) of AlSi coatings made by PVD magnetron sputtering method from alloys with 7-20%Si were compared. Higher concentration of Si increased deformation resistance of the coating, expressed by depth of scratch. Improved mechanical properties had coatings from alloys modified by TiBAl refiner.

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9

Gaedike, Bastian, Svenja Guth, Frank Kern, Andreas Killinger, and Rainer Gadow. "Deposition of 3YSZ-TiC PVD Coatings with High-Power Impulse Magnetron Sputtering (HiPIMS)." Applied Sciences 11, no. 6 (2021): 2753. http://dx.doi.org/10.3390/app11062753.

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Optimized coating adhesion and strength are the advantages of high-power impulse magnetron sputtering (HiPIMS) as an innovative physical vapor deposition (PVD) process. When depositing electrically non-conductive oxide ceramics as coatings with HiPIMS without dual magnetron sputtering (DMS) or mid-frequency (MF) sputtering, the growing coating leads to increasing electrical insulation of the anode. As a consequence, short circuits occur, and the process breaks down. This phenomenon is also known as the disappearing anode effect. In this study, a new approach involving adding electrically condu

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10

Hovsepian, Papken Eh, Arutiun P. Ehiasarian, Anthony Deeming, and Christian Schimpf. "VmeCN Based Nanoscale Multilayer PVD Coatings Deposited by the Combined High Power Impulse Magnetron Sputtering/Unbalanced Magnetron Sputtering Technology." Plasma Processes and Polymers 4, S1 (2007): S897—S901. http://dx.doi.org/10.1002/ppap.200732201.

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11

Tului, Mario, Alessandra Bellucci, Augusto Albolino, and Giuseppe Migliozzi. "Zinc oxide targets for magnetron sputtering PVD prepared by plasma spray." Surface and Coatings Technology 205, no. 4 (2010): 1070–73. http://dx.doi.org/10.1016/j.surfcoat.2010.03.034.

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12

KUCHARSKA, Barbara, Anna WRÓBEL-KNYSAK, and Andrzej BĄKOWSKI. "AlSi ALLOYS FOR MAGNETRON DEPOSITION OF THE COATINGS ON CAR EXHAUST MUFFERS – FORECAST OF TECHNOLOGICAL WEAR." Tribologia, no. 5 (October 31, 2017): 23–27. http://dx.doi.org/10.5604/01.3001.0010.5896.

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In the production of car exhaust system parts, for protection against corrosion and high-temperature oxidation, alumina and AlSi alloy hot-dip coatings are currently especially effective. The authors of this study are conducting investigations into the application of AlSi alloys made by the traditional casting technology to the fabrication of AlSi PVD coatings by the magnetron sputtering method. For the purposes of the present study, three discs of AlSi alloys were subjected to magnetron sputtering. The assessment of the wear of the discs was made by microscopic observations, by mapping the ge

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13

Posadowski, Witold, Artur Wiatrowski, and Grzegorz Kapka. "Effect of pulsed magnetron sputtering process for the deposition of thin layers of nickel and nickel oxide." Materials Science-Poland 36, no. 1 (2018): 69–74. http://dx.doi.org/10.1515/msp-2017-0092.

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Abstract Magnetron sputtered nickel and nickel oxide films have been studied for various applications. We may find, among others, these films in electrochromic display devices, in resistive type gas sensors, as metal electrodes in electronic devices, in solar thermal absorbers. Pure nickel films deposited using PVD technique possess good corrosion and wear resistant properties. Magnetron sputtering has several advantages in film deposition (in comparison to other methods) such as relatively low heating temperature of the deposited substrate during sputtering process, high energy of sputtered a

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14

Dobrzański, Leszek Adam, and Krzysztof Lukaszkowicz. "Comparison of Structure and Properties of the PVD, Hybrid (Galvanic + PVD), and Galvanic Coatings Deposited onto the Brass Substrate." Materials Science Forum 591-593 (August 2008): 860–64. http://dx.doi.org/10.4028/www.scientific.net/msf.591-593.860.

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The properties of thin hard coatings and consequently their functionality are influenced by microstructural characteristics such as mechanical properties. A variety of interlayers has been used in hybrid coatings for various purposes. The paper presents investigation results of the structure, erosion and corrosion resistance, and mechanical properties of the galvanic Ni/Cr, hybrid Ni/Cr + Zr/ZrN (galvanic + PVD) and monolithic nitride coatings deposited by PVD technique (dc magnetron sputtering) onto brass (CuZn40Pb2) substrates. The ceramic PVD coatings or layers are the Cr-, Ti-, TiAl-, Zr-n

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15

Huang, Ying, Shao Ni Sun, Yu Feng Wu, Sheng Ge Ma, and Yi Zhou. "Ti-N-C Films Deposited by Ion Beam Assisted MF Twin Targets Unbalanced Magnetron Sputtering." Materials Science Forum 546-549 (May 2007): 1729–34. http://dx.doi.org/10.4028/www.scientific.net/msf.546-549.1729.

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Using Hall ion source assisted MF twin targets unbalanced magnetron sputtering, series of Ti/TiN, Ti/TiN/Ti(C,N) and Ti/TiN/Ti(C,N)/TiC hard anti-wear films are deposited on different materials like stainless and high speed steels by changing atmosphere, bias mode, sputtering and ion beam assisted currents. The color, crystal structure, hardness and binding force of film are tested and analyzed, respectively. Experimental results show that color of film is sensitive to atmosphere, slight change of atmosphere can influence the coating’s color seriously. The preferred orientation of Ti(C,N) film

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16

Abd El-Fattah, Hanan A., Iman El-Mahallawi, Mostafa H. Shazly, and Waleed A. Khalifa. "Microstructure Evolution of NiTi Magnetron Sputtered Thin Film on Different Substrates." Key Engineering Materials 835 (March 2020): 68–74. http://dx.doi.org/10.4028/www.scientific.net/kem.835.68.

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Understanding the microstructure evolution of metal thin films on various substrates is essential for developing thin films that need specific requirements. The microstructure of thin films has been identified to be related to the mobility of the adatoms during growth. Recently, the theory of non-classical crystallisation of thin films has been introduced to explain the structure formation in chemical vapor deposition (CVD) and physical vapor deposition (PVD) processes. Much work has been conducted on CVD deposited thin films, while little data appears on PVD techniques. The effect of substrat

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17

Cloud, A. N., A. Aryasomayajula, D. G. Bhat, and M. H. Gordon. "Determining substrate temperature in an AC inverted cylindrical magnetron sputtering PVD system." Surface and Coatings Technology 202, no. 8 (2008): 1564–67. http://dx.doi.org/10.1016/j.surfcoat.2007.07.007.

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18

Upadhyay, R. K., and L. A. Kumaraswamidhas. "Friction and wear response of nitride coating deposited through PVD magnetron sputtering." Tribology - Materials, Surfaces & Interfaces 10, no. 4 (2016): 196–205. http://dx.doi.org/10.1080/17515831.2016.1260791.

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19

Hosokawa, Akira, Koji Shimamura, and Takashi Ueda. "Cutting characteristics of PVD-coated tools deposited by Unbalanced Magnetron Sputtering method." CIRP Annals 61, no. 1 (2012): 95–98. http://dx.doi.org/10.1016/j.cirp.2012.03.010.

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20

Bobzin, K., T. Brögelmann, C. Kalscheuer, and M. Thiex. "Self-lubricating triboactive (Cr,Al)N+Mo:S coatings for fluid-free applications." Journal of Materials Science 56, no. 27 (2021): 15040–60. http://dx.doi.org/10.1007/s10853-021-06255-9.

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AbstractWithin this study, self-lubricating and triboactive (Cr,Al)N+Mo:S coatings were developed and investigated for the deposition on components in a low-temperature physical vapor deposition (PVD) hybrid process. Therefore, direct current magnetron sputtering (dcMS) and high power pulse magnetron sputtering (HPPMS) PVD were combined by using an industrial coating machine. Hereby, it was possible to deposit dense and smooth triboactive, self-lubricating nitride coatings with different chemical compositions and architectures on 16MnCr5E samples. Two coating architectures, a matrix monolayer

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21

Hovsepian, P. Eh, A. P. Ehiasarian, and U. Ratayski. "CrAlYCN/CrCN nanoscale multilayer PVD coatings deposited by the combined High Power Impulse Magnetron Sputtering/Unbalanced Magnetron Sputtering (HIPIMS/UBM) technology." Surface and Coatings Technology 203, no. 9 (2009): 1237–43. http://dx.doi.org/10.1016/j.surfcoat.2008.10.033.

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22

Haider, Julfikar, and M. S. J. Hashmi. "Improving the Deposition Rate of Multicomponent Coating by Controlling Substrate Table Rotation in a Magnetron Sputtering Process." Advanced Materials Research 83-86 (December 2009): 977–84. http://dx.doi.org/10.4028/www.scientific.net/amr.83-86.977.

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Physical Vapour Deposition (PVD) technology, particularly magnetron sputtering process, enjoys the competitive advantages of depositing different new generation coatings (e.g., multicomponent, multilayer, graded, composite etc.) on three-dimensional objects (substrate) with excellent mechanical and tribological properties. In an industrial-scale sputtering chamber with a limited number of active magnetron sources (target) on the chamber wall, the density of coating species from different sources would not be uniform everywhere around the chamber. As a result, at a constant speed of rotating su

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23

CHEN, L. C., C. T. WU, J. J. WU, and K. H. CHEN. "GROWTH, CHARACTERIZATION, AND PROPERTIES OF CARBON NITRIDE WITH AND WITHOUT SILICON ADDITION." International Journal of Modern Physics B 14, no. 02n03 (2000): 333–48. http://dx.doi.org/10.1142/s0217979200000340.

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Carbon nitride and silicon carbon nitride have been grown by microwave plasma chemical vapor deposition, electron-cyclotron-resonance plasma chemical vapor deposition, magnetron sputtering and ion beam sputtering. Depending on the specific process details, a wide range of microstructure and morphologies has been demonstrated. Effects of Si addition to CN network on the structure of the deposited materials were studied. While Si involvement in CVD process was crucial for crystal growth, excessive Si incorporation led to formation of amorphous phase in PVD process. Various optical constants incl

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24

Tverdokhlebov, Sergey Ivanovich, Evgeniy Viktorovich Shesterikov, and Alena Igorevna Malchikhina. "Formation Hybrid Method of Multilayer Biocoatings, Based on PVD Technology." Advanced Materials Research 872 (December 2013): 241–47. http://dx.doi.org/10.4028/www.scientific.net/amr.872.241.

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Hybrid method of obtaining calcium-phosphate coatings is presented in this article. Physical and chemical, mechanical and tribological hybrid coatings research makes it possible to determine the coatings formation modes satisfying medical and technical requirements. This multilayer coating consists of an oxide underlayer formed by gas thermal oxidation and calcium phosphate layer formed by RF magnetron sputtering at a frequency of 13.56 MHz. Experiments were carried out in different modes. Calcium-phosphate coatings formed in mixture of argon and oxygen at 1:1 ratio pressure of 0.3 Pa have the

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25

Lungevics, J., A. Leitans, J. Rudzitis, N. Bulahs, P. Nazarovs, and V. Kovalenko. "Tribological Properties of PVD Carbon-Copper Composite Films Reinforced by Titanium." Latvian Journal of Physics and Technical Sciences 53, no. 1 (2016): 66–74. http://dx.doi.org/10.1515/lpts-2016-0007.

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Abstract Carbon-copper composite coatings reinforced with titanium were deposited using high power magnetron sputtering technique. Tribological and metrological tests were performed using Taylor Hobson Talysurf Intra 50 measuring equipment and CSM Instruments ball-on-disk type tribometer. Friction coefficient and wear rate were determined at 2N, 4N, 6N loads. It was revealed that friction coefficient decreased at a higher Ti concentration, which was particularly expressed at bigger applied loads. However, wear volume values tended to increase in the beginning, till Ti concentration reached abo

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26

Hovsepian, P. Eh, A. P. Ehiasarian, A. Deeming, and C. Schimpf. "Novel TiAlCN/VCN nanoscale multilayer PVD coatings deposited by the combined high-power impulse magnetron sputtering/unbalanced magnetron sputtering (HIPIMS/UBM) technology." Vacuum 82, no. 11 (2008): 1312–17. http://dx.doi.org/10.1016/j.vacuum.2008.03.064.

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27

Vahl, Alexander, Salih Veziroglu, Bodo Henkel, et al. "Pathways to Tailor Photocatalytic Performance of TiO2 Thin Films Deposited by Reactive Magnetron Sputtering." Materials 12, no. 17 (2019): 2840. http://dx.doi.org/10.3390/ma12172840.

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TiO2 thin films are used extensively for a broad range of applications including environmental remediation, self-cleaning technologies (windows, building exteriors, and textiles), water splitting, antibacterial, and biomedical surfaces. While a broad range of methods such as wet-chemical synthesis techniques, chemical vapor deposition (CVD), and physical vapor deposition (PVD) have been developed for preparation of TiO2 thin films, PVD techniques allow a good control of the homogeneity and thickness as well as provide a good film adhesion. On the other hand, the choice of the PVD technique eno

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28

Geiser, Jürgen, and Sven Blankenburg. "Monte Carlo Simulations Of Elastic Scattering With Applications To Dc And High Power Pulsed Magnetron Sputtering For Ti3SIC2." Communications in Computational Physics 11, no. 5 (2012): 1618–42. http://dx.doi.org/10.4208/cicp.210211.270511a.

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AbstractWe simulate the particle transport in a thin film deposition process made by PVD (physical vapor deposition) and present several models for projectile and tar-get collisions in order to compute the mean free path and the differential cross section (angular distribution of scattered projectiles) of the scattering process. A detailed description of collision models is of the highest importance in Monte Carlo simulations of high power impulse magnetron sputtering and DC sputtering. We derive an equation for the mean free path for arbitrary interactions (cross sections) that includes the r

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29

Betiuk, Marek. "Cylindrical Magnetron with Dynamic Magnetic Field." Solid State Phenomena 237 (August 2015): 61–67. http://dx.doi.org/10.4028/www.scientific.net/ssp.237.61.

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The formation of anti-wear coatings on the inner surface of steel cylinders and pipes presents a difficult process-related problem for PA PVD methods. This problem is associated with a strictly limited geometry of the reaction space and dimensions of plasma sputtering-sources. Among the main factors behind physical and chemical phenomena occurring the reaction space, formed within a low-temperature plasma and at its boundaries with a solid object, there are type, concentration, unobstructed path for reacting substances, as well as values and geometry of electrical/magnetic/thermal fields [1-5]

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30

Hidalgo, Joaquin A., and Cecilia M. Ocampo. "EIS and Microstructural Studies of TiN Coatings Deposited by PVD d.c. Magnetron Sputtering." ECS Transactions 6, no. 13 (2019): 35–41. http://dx.doi.org/10.1149/1.2811694.

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31

Vetter, J., J. Müller, and G. Erkens. "Domino Platform: PVD Coaters for Arc Evaporation and High Current Pulsed Magnetron Sputtering." IOP Conference Series: Materials Science and Engineering 39 (September 11, 2012): 012004. http://dx.doi.org/10.1088/1757-899x/39/1/012004.

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32

von Bargen, Roland, Julien Kovac, Axel von Hehl, Andreas Mehner, and Hans Werner Zoch. "Influence of PVD Target Power on the Age Hardening Behaviour of Al-4Zr Micro Sheets." Materials Science Forum 794-796 (June 2014): 864–69. http://dx.doi.org/10.4028/www.scientific.net/msf.794-796.864.

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High strength aluminium alloys with improved stability at elevated temperatures for micro components, which are needed e.g. in the automotive or the micro electronics industry, require new alloys and advanced production processes regarding primary shaping, heat treatment and cold forming. Their development is part of the Collaborative Research Centre 747 Micro Cold Forming of the German Research Foundation. Especially heat treatment is a necessary step in the manufacturing process chain to adjust the mechanical properties of semi-finished micro components to cold forming and finally the usage

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33

Atapour, Masoud, Vahid Rajaei, Stefano Trasatti, Maria Pia Casaletto, and Gian Luca Chiarello. "Thin Niobium and Niobium Nitride PVD Coatings on AISI 304 Stainless Steel as Bipolar Plates for PEMFCs." Coatings 10, no. 9 (2020): 889. http://dx.doi.org/10.3390/coatings10090889.

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In this paper, Nb, NbN, and Nb/NbN thin films were successfully deposited on AISI 304 stainless steel (304 SS) as the bipolar plate (BPP) for proton-exchange membrane fuel cell (PEMFC) by employing a radio-frequency (RF) magnetron sputtering system. Corrosion assessments in simulated PEMFC operating conditions (1 M H2SO4 + 2 mg/kg HF, 70 °C) revealed that the Nb and NbN coatings significantly improved the corrosion resistance of the 304 SS substrates. The Nb and NbN deposited samples at 350 °C exhibited superior corrosion resistance compared to those coated at 25 °C. Potentiostatic tests were

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34

Lofaj, František, and Margita Kabátová. "HARDNESS OF HYBRID PVD-PECVD W-C:H COATINGS VS. SUBSTRATE TYPE." Acta Polytechnica CTU Proceedings 27 (June 11, 2020): 62–66. http://dx.doi.org/10.14311/app.2020.27.0062.

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The effects of substrate on the measurement of hardness (and indentation modulus) - penetration depth profiles were investigated on hybrid PVD-PECVD W-C:H coatings made with the additions of C2H2 or CH4 using High Power Impulse Magnetron Sputtering (HiPIMS) method. The substrates involved 100Cr6 bearing steel, Al2024 aluminum alloy and (111) Si wafer. Although no clear influence of the substrate type on hardness and indentation modulus of the coatings at different acetylene and hydrogen additions was observed, when both measured properties were combined in HITEIT ratio, significant shift of HI

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35

Wang, Yu-Hsiang, Kazi Hasibur Rahman, Chih-Chao Wu, and Kuan-Chung Chen. "A Review on the Pathways of the Improved Structural Characteristics and Photocatalytic Performance of Titanium Dioxide (TiO2) Thin Films Fabricated by the Magnetron-Sputtering Technique." Catalysts 10, no. 6 (2020): 598. http://dx.doi.org/10.3390/catal10060598.

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Titanium dioxide (TiO2) thin films are used for a broad range of applications such as wastewater treatment, photocatalytic degradation activity, water splitting, antibacterial and also in biomedical applications. There is a wide range of synthesis techniques for the deposition of TiO2 thin films, such as chemical vapor deposition (CVD) and physical vapor deposition (PVD), both of which are well known deposition methods. Layer by layer deposition with good homogeneity, even thickness and good adhesive nature is possible by using the PVD technique, with the products being used for photocatalytic

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36

Incerti, L., A. Rota, S. Valeri, et al. "Nanostructured self-lubricating CrN-Ag films deposited by PVD arc discharge and magnetron sputtering." Vacuum 85, no. 12 (2011): 1108–13. http://dx.doi.org/10.1016/j.vacuum.2011.01.022.

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37

Baptista, A., F. J. G. Silva, J. Porteiro, J. L. Míguez, G. Pinto, and L. Fernandes. "On the Physical Vapour Deposition (PVD): Evolution of Magnetron Sputtering Processes for Industrial Applications." Procedia Manufacturing 17 (2018): 746–57. http://dx.doi.org/10.1016/j.promfg.2018.10.125.

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38

Jatisukamto, Gaguk. "Pengaruh Dimensi Atom Target D.C. Magnetron Sputtering Terhadap Sifat Mekanis Baja AISI 410." Jurnal Energi dan Teknologi Manufaktur (JETM) 1, no. 01 (2018): 7–10. http://dx.doi.org/10.33795/jetm.v1i01.11.

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Micro machining technology uses AISI 410 steel as tools and surgical equipment. AISI 410 steel is hardenable so it is relatively easy to repair its mechanical properties. The weakness of heat treatment in AISI 410 steel for small dimensioned components causes distortion. Therefore, in this research, an effort to improve the mechanical properties of AISI 410 steel using physical vapor deposition (PVD) technique. The method of this research is to deposition Ti-N, Cr-N, W-N and Al-N with D.C magnetron sputtering technique. The sputtering process is carried out at room temperature by bombarding th

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39

Yu, D. H., Cheng Yong Wang, X. L. Cheng, and Yue Xian Song. "TiAlSiN Coatings Prepared by Hybrid PVD Technology for High Speed Milling of Hardened Steel." Advanced Materials Research 69-70 (May 2009): 423–27. http://dx.doi.org/10.4028/www.scientific.net/amr.69-70.423.

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TiAlSiN coatings with different Al content were prepared by hollow cathode discharge ion plating (HCDIP) and medium frequency magnetron sputtering ion plating (MFMSIP) hybrid physical vapor deposition (PVD) coating system. The composition, microstructure, mechanical properties of these coatings were systematically investigated by means of EDX, XRD, SEM, nanoindentation, scratch and tribological tests. It was found that the coatings had (111) or (200) preferred orientation with addition of Al. Proper content of Al led to increase of microhardness and adhesion. The flank wear of carbide end mill

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40

Stuart, Bryan W., and George E. Stan. "Physical Vapour Deposited Biomedical Coatings." Coatings 11, no. 6 (2021): 619. http://dx.doi.org/10.3390/coatings11060619.

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This Special Issue was devoted to developments made in Physical Vapour Deposited (PVD) biomedical coatings for various healthcare applications. The scrutinized PVD methods were Radio-Frequency Magnetron Sputtering (RF-MS), Cathodic Arc Evaporation, Pulsed Electron Deposition and its variants, Pulsed Laser Deposition, and Matrix Assisted Pulsed Laser Evaporation (MAPLE), due to their great promise especially in the dentistry and orthopaedics. These methods have yet to gain traction for industrialization and large-scale application in biomedicine. A new generation of implant coatings can be made

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41

BOICIUC, Simona. "CuO Films Obtained by Oxidation of Cu Layers Deposited by the PVD Process - Magnetron Sputtering." Annals of “Dunarea de Jos” University of Galati. Fascicle IX, Metallurgy and Materials Science 43, no. 3 (2020): 15–20. http://dx.doi.org/10.35219/mms.2020.3.03.

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The experimental research carried out and described in this paper aimed to obtain thin films from copper oxides and their characterization from the structural point of view and the optical and electrical properties. To obtain the copper films, a PVD spray deposition system was used, consisting of a vacuum chamber with a capacity of 2 liters, a planar magnetron with ferrite magnets (40x22x9) neodymium (15x8), a vacuum pump with sliding blades, a variable source of direct current of voltage 100 - 600 volts. The atmosphere used for plasma maintenance during deposition was argon rarefied in a pr

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Ali, Raja Shehryar, Syed Sajjad Hussain, Saira Riaz, and Shahzad Naseem. "Structural, Optical and Electrical Characterization of Fe3O4 Thin Films Prepared using PVD Magnetron Sputtering (RF)." Materials Today: Proceedings 2, no. 10 (2015): 5543–47. http://dx.doi.org/10.1016/j.matpr.2015.11.083.

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Abreu, C. S., J. Matos, A. Cavaleiro, et al. "Tribological characterization of TiO 2 /Au decorative thin films obtained by PVD magnetron sputtering technology." Wear 330-331 (May 2015): 419–28. http://dx.doi.org/10.1016/j.wear.2015.01.069.

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Qadir, Muhammad, Yuncang Li, Arne Biesiekierski, and Cuie Wen. "Surface Characterization and Biocompatibility of Hydroxyapatite Coating on Anodized TiO2 Nanotubes via PVD Magnetron Sputtering." Langmuir 37, no. 16 (2021): 4984–96. http://dx.doi.org/10.1021/acs.langmuir.1c00411.

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Hong, Chun Fu, Jian Zhong Wang, Wei Yan, et al. "The Microstructure and Tribological Behavior of Ti/a-C and Ti/a-C:H Films Prepared by Magnetron Sputtering." Applied Mechanics and Materials 420 (September 2013): 123–28. http://dx.doi.org/10.4028/www.scientific.net/amm.420.123.

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This paper reports two films, Ti/a-C and Ti/a-C:H, prepared on the Ti-6Al-4V alloys by magnetron sputtering in PVD and CVD process, respectively. The morphology and microstructure were characterized by Raman spectroscopy, scanning electron microscopy and transmission electron microscopy. Both films show nanosized Ti clusters incorporated into the amorphous carbon matrix. Mechanical properties of the films were investigated by nanoindentation and ball-on-disk tribo-test. Ti/a-C film shows a hardness as high as 40.9 GPa, while that of Ti/a-C:H is 12.2 GPa. Both films show reduced friction and hi

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Khlifi, Kaouthar, Hafedh Dhifelaoui, Lassaad Zoghlami, and Ahmed Ben Cheikh Larbi. "Multi-Cycle Nanoindentation Studies on TiN/TiAlN Nano-Multilayer Coating: Effects of Mechanical Properties and Coating Structure." Applied Mechanics and Materials 798 (October 2015): 367–71. http://dx.doi.org/10.4028/www.scientific.net/amm.798.367.

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TiAlN/TiN nanomultilayer coating was deposited on 100C6 steel (AISI 52100) substrate with the PVD technique using magnetron sputtering. Morphological examination showed the presence of domes and craters which are uniformly distributed over the entire surface.Microstructural observations revealed a columnar structure. Mechanical properties, plastic and elastic deformation resistance of TiAlN/TiN multilayer coating were studied using conventional indentation method. Multi-cycle nanoindentation technique, with variation of loading rate, was used to analyze the failure modes and mechanical behavio

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Severin, Stefanie, Muhammad Naveed, and Sabine Weiß. "Effect of HPPMS Pulse-Frequency on Plasma Discharge and Deposited AlTiN Coating Properties." Advances in Materials Science and Engineering 2017 (2017): 1–18. http://dx.doi.org/10.1155/2017/4850908.

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Coatings like TiAlN (titanium content more than 50%) or AlTiN (aluminium content more than 50%) are well established as hard and wear-resistant tool coatings, often prepared by physical vapour deposition (PVD) like arc evaporation or direct current magnetron sputtering (dcMS). With increasing challenges of operating conditions, there is a constant need for improvement of mechanical properties to withstand extreme loading conditions. This can be obtained by a higher amount of ionized sputtered metal atoms during the deposition process. To increase the metal ion flux a high-power pulse magnetron

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Chang, Wei Jie, Hao Zhang, Ying Ying Chen, et al. "Tribological Performances of CrSiN Coatings Deposited by High Power Pulse Magnetron Sputtering." Solid State Phenomena 281 (August 2018): 540–45. http://dx.doi.org/10.4028/www.scientific.net/ssp.281.540.

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The coatings deposited by physical vapor deposition (PVD) technique have found a wide industrial application as protective coatings for their attractive properties such as high hardness, good wear resistance and chemical stability. In order to explore the triboligical performances of CrSiN coatings, CrSiN coatings were prepared o the surface of 316 stainless steel by high power pulse magnetron sputtering (HPPMS) in this paper. Sliding wear tests of CrSiN coatings against Si3N4 ceramic balls and titanium balls have been carried out on a friction abrasion testing machine under reciprocating slid

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Karapepas, Christos, Daisy Nestler, and Guntram Wagner. "Influence of Sputtering Temperature and Layer Thickness on the Electrical Performance of Thin Film Strain Sensors Consisting of Nickel-Carbon Composite." Key Engineering Materials 809 (June 2019): 413–18. http://dx.doi.org/10.4028/www.scientific.net/kem.809.413.

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Hybrid laminates consisting of fibre-reinforced thermoplastic films and metallic thin sheets are successively replacing thermoset based systems due to their obvious advantages of higher formability and aptitude for mass production. In order to monitor the material under operating conditions, hybrid laminates need to be equipped with smart sensor units. Artifact-free integration of commercial strain gauges into hybrid laminates is almost impossible. Therefore, a new thin film strain sensor based on a PVD sputtering process was developed.The aim of this work was to evaluate the influence of the

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Strano, Matteo, Paolo Albertelli, Elio Chiappini, and Stefano Tirelli. "Experimental Evaluation of Innovative Tools for Ti-6Al-4V Turning." Key Engineering Materials 554-557 (June 2013): 1941–52. http://dx.doi.org/10.4028/www.scientific.net/kem.554-557.1941.

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Titanium alloys, mainly because of their poor thermal conductivity, need to be cut at relatively low cutting speeds, with obvious negative consequences on the profitability of machining. An important amount of research activities has been done in order to increase productivity in titanium machining operations: high performance coatings and innovative technologies to improve inserts resistance to wear represent promising solutions. In this work, the cutting performance in Ti6Al4V rough turning of an innovative TiAlN coating obtained by Physical Vapor Deposition (PVD) magnetron sputtering and th

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