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Journal articles on the topic 'Pyrolyzed photoresist film (PPF)'

Author: Grafiati

Published: 4 June 2025

Last updated: 1 August 2025

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1

Řeháček, Vlastimil, Ivan Hotový, Marian Vojs, Mário Kotlár, Thomas Kups, and Lothar Spiess. "Pyrolyzed Photoresist Film Electrodes for Application in Electroanalysis." Journal of Electrical Engineering 62, no. 1 (2011): 49–53. http://dx.doi.org/10.2478/v10187-011-0008-0.

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Pyrolyzed Photoresist Film Electrodes for Application in Electroanalysis Pyrolyzed photoresist film (PPF) electrodes for application in electroanalysis were prepared on alumina substrates. These electrodes were characterized for their electrical, microstructural (by Raman spectroscopy) and electrochemical properties. As a support, the PPF electrodes were tested for simultaneous determination of Pb(II), Cd(II) and Zn(II) in an aqueous solution on in-situ formed bismuth film by square wave voltammetry (SWV). The dependence of the stripping responses on the concentration of target metals was line

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2

Sánchez-Molas, David, Joana Cases-Utrera, Philippe Godignon, and F. Javier del Campo. "Mercury detection at microfabricated pyrolyzed photoresist film (PPF) disk electrodes." Sensors and Actuators B: Chemical 186 (September 2013): 293–99. http://dx.doi.org/10.1016/j.snb.2013.06.017.

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3

Feng, Chenyin, Christopher L. Frewin, Md Rubayat-E. Tanjil, et al. "A Flexible a-SiC-Based Neural Interface Utilizing Pyrolyzed-Photoresist Film (C) Active Sites." Micromachines 12, no. 7 (2021): 821. http://dx.doi.org/10.3390/mi12070821.

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Carbon containing materials, such as graphene, carbon-nanotubes (CNT), and graphene oxide, have gained prominence as possible electrodes in implantable neural interfaces due to their excellent conductive properties. While carbon is a promising electrochemical interface, many fabrication processes are difficult to perform, leading to issues with large scale device production and overall repeatability. Here we demonstrate that carbon electrodes and traces constructed from pyrolyzed-photoresist-film (PPF) when combined with amorphous silicon carbide (a-SiC) insulation could be fabricated with rep

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4

Gross, Andrew J., and Alison J. Downard. "Regeneration of Pyrolyzed Photoresist Film by Heat Treatment." Analytical Chemistry 83, no. 6 (2011): 2397–402. http://dx.doi.org/10.1021/ac103264v.

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5

González-Guerrero, Maria José, Juan Pablo Esquivel, David Sánchez-Molas, et al. "Membraneless glucose/O2 microfluidic enzymatic biofuel cell using pyrolyzed photoresist film electrodes." Lab on a Chip 13, no. 15 (2013): 2972. http://dx.doi.org/10.1039/c3lc50319d.

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6

Nipoti, Roberta, Fulvio Mancarella, Francesco Moscatelli, R. Rizzoli, and S. Zampolli. "Carbon-Cap for Ohmic Contacts on n-Type Ion Implanted 4H-SiC." Materials Science Forum 679-680 (March 2011): 504–7. http://dx.doi.org/10.4028/www.scientific.net/msf.679-680.504.

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In this study a pyrolyzed photoresist film that has been used for protecting the implanted surface of a 4H-SiC wafer during post implantation annealing at 1800-1950 °C has preserved on the wafer surface and used for the fabrication of ohmic contact pads on P+ implanted areas. The carbon film has been patterned by using a RIE O2-based plasma. A specific contact resistance of 9  10 5 cm2 has been obtained on P+ 1  1020 cm 3 implanted 4H-SiC. Micro-Raman characterizations show that the carbon cap is formed of a nano-crystalline graphitic phase.

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7

Rehacek, Vlastimil, Ivan Hotovy, and Marian Vojs. "Bismuth Film Voltammetric Sensor on Pyrolyzed Photoresist/Alumina Support for Determination of Heavy Metals." Electroanalysis 26, no. 5 (2014): 898–903. http://dx.doi.org/10.1002/elan.201400020.

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8

Kwon, Soongeun, Hak-Jong Choi, Hyung Cheoul Shim, et al. "Hierarchically Porous, Laser-Pyrolyzed Carbon Electrode from Black Photoresist for On-Chip Microsupercapacitors." Nanomaterials 11, no. 11 (2021): 2828. http://dx.doi.org/10.3390/nano11112828.

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We report a laser-pyrolyzed carbon (LPC) electrode prepared from a black photoresist for an on-chip microsupercapacitor (MSC). An interdigitated LPC electrode was fabricated by direct laser writing using a high-power carbon dioxide (CO2) laser to simultaneously carbonize and pattern a spin-coated black SU-8 film. Due to the high absorption of carbon blacks in black SU-8, the laser-irradiated SU-8 surface was directly exfoliated and carbonized by a fast photo-thermal reaction. Facile laser pyrolysis of black SU-8 provides a hierarchically macroporous, graphitic carbon structure with fewer defec

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9

Rehacek, V., I. Hotovy, M. Vojs, T. Kups, and L. Spiess. "Nafion-coated bismuth film electrodes on pyrolyzed photoresist/alumina supports for analysis of trace heavy metals." Electrochimica Acta 63 (February 2012): 192–96. http://dx.doi.org/10.1016/j.electacta.2011.12.075.

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10

Puyo, Maxime, Pierre Fau, Myrtil L. Kahn, David Mesguich, Jérôme Launay, and Katia Fajerwerg. "Removable Composite Electrode Made of Silver Nanoparticles on Pyrolyzed Photoresist Film for the Electroreduction of 4-Nitrophenol." Langmuir 35, no. 44 (2019): 14194–202. http://dx.doi.org/10.1021/acs.langmuir.9b02405.

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11

Mantese, J. V., A. L. Micheli, A. H. Hamdi, and R. W. Vest. "Metalorganic Deposition (MOD): A Nonvacuum, Spin-on, Liquid-Based, Thin Film Method." MRS Bulletin 14, no. 10 (1989): 48–53. http://dx.doi.org/10.1557/s0883769400061492.

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There are many methods of depositing thin film materials: thermal evaporation, sputtering, electron or laser beam evaporation, chemical vapor deposition (CVD), and molecular beam epitaxy (MBE). A good survey of many of the deposition methods appears in the 1988 November and December issues of the MRS BULLETIN. One method not included in that survey, however, is metalorganic deposition (MOD), a powerful method for depositing a variety of materials.Metalorganic deposition is not to be confused with metalorganic chemical vapor deposition (MOCVD), which is a gaseous deposition method. MOD is a non

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12

Nasraoui, Rihab, Jean-François Bergamini, Soraya Ababou-Girard, and Florence Geneste. "Sequential anodic oxidations of aliphatic amines in aqueous medium on pyrolyzed photoresist film surfaces for the covalent immobilization of cyclam derivatives." Journal of Solid State Electrochemistry 15, no. 1 (2010): 139–46. http://dx.doi.org/10.1007/s10008-010-1075-z.

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13

Dotan, Tali, Yoo Kyung Go, Jesus Miguel Lopez Baltazar, and Ariel L. Furst. "Engineering Electrode Surfaces Using Electroactive Bacteria Pyrolysis." ECS Meeting Abstracts MA2025-01, no. 48 (2025): 2490. https://doi.org/10.1149/ma2025-01482490mtgabs.

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Pyrolysis is the thermal decomposition of organic matter in the absence of oxygen 1. This high-temperature process has been shown to produce carbon structures from photoresist since the 1990s. Using this technique, the photoresist is thermally reacted at high temperatures of 600 to 1100°C, forming a film with electrochemically active surfaces, providing glassy carbon-like properties. It has been demonstrated that better electrocatalytic behavior is obtained with carbon films prepared at the higher pyrolysis temperatures due to a differences in composition 1. Additionally, pyrolysis has also be

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14

Kim, Taejung, Wootaek Cho, and Heungjoo Shin. "Etching-Free Wafer-Level Fabrication of Suspended Mesh-Type Nanoheaters." ECS Meeting Abstracts MA2023-01, no. 52 (2023): 2628. http://dx.doi.org/10.1149/ma2023-01522628mtgabs.

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Recently, various strategies have been demonstrated to reduce the operating power of electrothermal devices by implementing a miniaturized Joule-heating-based heater. To operate the heaters with low power, the miniaturized heating element must be well-insulated by spacing it apart from the substrate. The conventional microfabrication methods for implementing small-size (e.g., sub-micrometer to micrometer scales) and suspended heater architecture have relied on the etching process [1], which requires accurate and delicate process control. Moreover, the etching process becomes more complicated t

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15

Liang, Vivian, Raymond Chan, and Oliver Chyan. "Preparation and Characterization of Electrolessly Deposited Platimum and Palladium Nanoparticles on Pyrolyzed Photoresist Films on Silicon Substrates." Volume 1, Issue 1 1, no. 1 (2002). http://dx.doi.org/10.33697/ajur.2002.004.

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The effects of metal depositions on pyrolyzed photoresist films (PPF) grown on silicon substrates were investigated. A silicon chip, spin-coated with a positive photoresist was pyrolyzed through heating to form a PPF, or a conductive carbon film. For increasing periods of time, nanometersized metal particles of platinum and palladium were spontaneously deposited on conductive carbon films by immersion in solutions of 0.049% HF containing 100 ppm, 200 ppm, and 500 ppm concentrations of metal ions Pt2+ or Pd2+. Following each hour of deposition, the electrochemical behavior of the metal-deposite

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16

Jorudas, J., H. Rehman, G. Fedorov, et al. "Pyro lyzed photoresist thin film: effect of electron beam patterning on DC and THz conductivity." Lithuanian Journal of Physics 63, no. 3 (2023). http://dx.doi.org/10.3952/physics.2023.63.3.6.

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   Pyrolyzed photoresist films (PPFs), which are formed via vacuum annealing of a photoresist without a catalyst, can be employed for fabrication of graphitic nanostructures by using conventional lithographic techniques. Such approach allows for reduction of technological steps required for fabrication of conductive micro- and nanoelectrodes for different applications. However, the operation frequency range of PPF electrodes is still unknown. Here, we report the results of the comparative study of PPF structures fabricated by electron beam lithography prior and after the anne

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17

Marian, Baah, Obraztsov Petr, Paddubskaya Alesia, et al. "Electrical, Transport and Optical Properties of Multifunctional Graphitic Films Synthesized on Dielectric Surfaces by Nickel Nanolayer Assisted Pyrolysis." January 8, 2020. https://doi.org/10.1021/acsami.9b18906.

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We demonstrate that predepositing on the dielectric surface a nanometrically thin nickel film is sufficient to transform amorphous pyrolyzed photoresist film (PPF) into a graphitic film (GRF) enriched with nickel particles. The GRF shows three orders of magnitude higher carrier mobility than that of amorphous PPF, while its electrical conductivity doubles after etching away the nickel remains. The pronounced 2D peak in the Raman spectrum, almost dispersionless absorbance in the spectral range of 750 – 2000 nm, and saturable absorption coefficient indicate that GRF possesses graphene-like

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18

Marian, Baah, Obraztsov Petr, Paddubskaya Alesia, et al. "Electrical, transport and optical properties of multifunctional graphitic films synthesized on dielectric surfaces by nickel nanolayer assisted pyrolysis." January 8, 2020. https://doi.org/10.5281/zenodo.5022114.

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We demonstrate that predepositing on the dielectric surface a nanometrically thin nickel film is  sufficient to transform amorphous pyrolyzed photoresist film (PPF) into a graphitic film (GRF)  enriched with nickel particles. The GRF shows three orders of magnitude higher carrier mobility  than that of amorphous PPF, while its electrical conductivity doubles after etching away the nickel  remains. The pronounced 2D peak in the Raman spectrum, almost dispersionless absorbance in  the spectral range of 750 – 2000 nm, and saturable absorption coefficient indicate th

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19

Kaplas, Tommi, Masoud Babaeian, Benjamin Cromey, et al. "Strong optical nonlinearity of ultrathin graphitic films synthesized on dielectric substrates." December 15, 2019. https://doi.org/10.1016/j.apsusc.2019.143766.

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We propose and demonstrate a scalable technique to grow a thin polycrystalline graphitic film directly onto a fused silica substrate. The technique is based on the pyrolysis of a photoresist in the presence of a sacrificial 10 nm thick nickel catalyst layer. The synthesized graphitic film with a thickness of about 50 nm possesses almost constant 40% absorptance over visual and near infrared spectral regions. By using Raman characterization, third harmonic generation spectroscopy, and the Z-scan technique we perform a comparative study of the films pyrolyzed with and without a Ni catalyst. We s

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20

Jorudas, Justinas, Hamza Rehman, Georgy Fedorov, et al. "Pyrolyzed Photoresist Thin Film: Effect of Electron Beam Patterning on Dc and Thz Conductivity." SSRN Electronic Journal, 2023. http://dx.doi.org/10.2139/ssrn.4365896.

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