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1

Barragán, Patrick R. "An efficient drive, sensing, and actuation system using PZT stack actuator cells." Thesis, Massachusetts Institute of Technology, 2012. http://hdl.handle.net/1721.1/70462.

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Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering; and, (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2012.<br>Cataloged from PDF version of thesis.<br>Includes bibliographical references (p. 81-82).<br>The PZT cellular actuator developed in the MIT d'Arbeloff Laboratory utilizes small-strain, high-force PZT stack actuators in a mechanical flexure system to produce a larger-strain, lower-force actuator useful in robotic systems. Many functionalities for these cellular actuators are developed which can ha
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2

Potami, Raffaele. "Optimal sensor/actuator placement and switching schemes for control of flexible structures." Worcester, Mass. : Worcester Polytechnic Institute, 2008. http://www.wpi.edu/Pubs/ETD/Available/etd-042808-124333/.

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Dissertation (Ph.D.)--Worcester Polytechnic Institute.<br>Keywords: hybrid system, PZT actuators, performance enchancement, actuator placement, actuator switching. Includes bibliographical references (leaves 102-108).
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3

Esteban, Jaime. "Analysis of the sensing region of a PZT actuator-sensor." Diss., This resource online, 1996. http://scholar.lib.vt.edu/theses/available/etd-06062008-162447/.

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4

Snis, Niklas. "Actuators for autonomous microrobots." Doctoral thesis, Uppsala universitet, Institutionen för teknikvetenskaper, 2008. http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-8720.

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This thesis presents actuators used in autonomous microsystems. Characteristic for all actuators presented is the low drive voltage and the low power consumption. Different motion mechanisms have been studied and applied in various locomotion modules for microrobots. High resolution movement of a monolithic piezoceramic PZT rotational arm module, using a quasi-static motion mechanism, was demonstrated in a 10x10x20 mm3 autonomous robot. The rotational arm comprises multilayer PZT bimorphs and is fabricated by a wet-building technology. The multilayer approach enables operation of the modules a
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5

Oliveira, Éder Luiz. "Application of piezoelectric materials as sensor and actuator for aeroelastic investigation." Instituto Tecnológico de Aeronáutica, 2014. http://www.bd.bibl.ita.br/tde_busca/arquivo.php?codArquivo=3038.

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This dissertation aims to apply piezoelectric materials as actuator and sensor to perform aeroelastic analysis. Two semi-span wing models based on flat plates with different characteristics were tested using PZT (Lead Zirconate Titanate) as actuator, PVDF (Polyvinylidene Fluoride) as sensor and the results were compared with vibrometer laser results. An aluminum model with a ballast on the wing tip, whose its location can be modified was tested in experimental modal analysis. Using the aluninum model, an investigation about aeroelastic behaviour was conducted in wind tunnel and the V-g/V-f dia
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6

Zai, Marvin Ho-Ming. "Chemical synthesis of lead zirconate titanate thin films for a piezoelectric actuator." Thesis, Imperial College London, 2000. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.367760.

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7

Hradil, Aleš. "Návrh mikroaktuátoru s využitím SMART materiálů." Master's thesis, Vysoké učení technické v Brně. Fakulta strojního inženýrství, 2011. http://www.nusl.cz/ntk/nusl-229700.

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The master’s thesis deals with the proposal of microactuator based on SMART material. The thesis opens with the comparison of SMART materials which are suitable for actuator construction from the point of view of a reaction on stimulation in form of deformation. Subsequent part of the thesis is the report theory of piezoelectric effect, it also describes direct and indirect effects and it concerns about the description of piezoelectric materials. The thesis focuses on several principles of piezoactuators and motors. The last part of the thesis includes modeling and simulation of piezoelectric
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8

Dunbabin, Matthew D. "The influence of temperature on PZT sensors & actuators for active vibration control of flexible structures." Thesis, Queensland University of Technology, 2002. https://eprints.qut.edu.au/36162/7/36162_Digitised%20Thesis-4_Redacted.pdf.

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In real operating environments, flexible structures exhibiting dynamic oscillations such as aircraft and spacecraft can experience large changes in temperature during their normal operating cycle, typically in the range -70 to 80 degrees Celsius. The use of piezoelectric actuators and sensors to control these dynamic oscillations have been widely explored at constant temperature, although only limited studies have been conducted on the effect that varying temperature has on the active control of flexible structures. The objective of this research is to study the influence of PZT sensors and
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9

Wu, Xiaosong. "A reconfigurable tactile display based on polymer MEMS technology." Diss., Georgia Institute of Technology, 2008. http://hdl.handle.net/1853/22623.

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This research focuses on the development of polymer microfabrication technologies for the realization of two major components of a pneumatic tactile display: a microactuator array and a complementary microvalve (control) array. The concept, fabrication, and characterization of a kinematically-stabilized polymeric microbubble actuator (¡°endoskeletal microbubble actuator¡±) were presented. A systematic design and modeling procedure was carried out to generate an optimized geometry of the corrugated diaphragm to satisfy membrane deflection, force, and stability requirements set forth by the tac
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10

ASCIONE, ALESSIA. "Synthetic models for the analysis and control of composite and sandwich aerospace structures in critical conditions." Doctoral thesis, Politecnico di Torino, 2019. http://hdl.handle.net/11583/2751494.

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11

Dolay, Aurélien. "Développement et caractérisations de fibres piézoélectriques à âme métallique pour applications aéronautiques." Phd thesis, Université de Valenciennes et du Hainaut-Cambresis, 2013. http://tel.archives-ouvertes.fr/tel-00991950.

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Pour les applications aéronautiques, les fibres en céramique piézoélectrique à âme métallique permettent d'imaginer des solutions pour avoir des dispositifs actifs et des capteurs complétement intégrés dans des structures, telles que les composites renforcés par des fibres.La démarche de cette étude est d'élaborer et de caractériser de telles fibres qui présentent de nombreux avantages : l'activation en mode radial permet d'utiliser de faibles tensions de commandes, l'utilisation d'un cœur et d'une matrice conducteurs permet de s'affranchir du dépôt d'électrodes et de garantir leur continuité,
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12

Nishimoto, Michael Yoshiya. "Thermal processing of multilayer PLZT actuators." Thesis, Georgia Institute of Technology, 1999. http://hdl.handle.net/1853/19637.

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13

Porfiri, Maurizio. "Synthesis of electric networks interconnecting PZT actuators to efficiently damp mechanical vibrations." Thesis, Virginia Tech, 2000. http://hdl.handle.net/10919/36485.

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The aim of this thesis is to show that it is possible to damp mechanical vibrations in a given frame, constituted by Euler beam governed by the equations of an elastica, by means of piezoelectric actuators glued on every beam and interconnected each other via electrical networks.Since we believe that the most efficient way to damp mechanical vibrations by means of electrical networks, is to realize a strong modal coupling between the electrical and the mechanical motion, we will synthesize a distributed circuit analog to the Euler beam.We will approach this synthesis problem following the blac
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14

Singh, Nitish. "Equilibrium of a shallow arch subjected to PZT actuators and a deadweight load." Thesis, This resource online, 1996. http://scholar.lib.vt.edu/theses/available/etd-12172008-063435/.

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15

Mendes, da Costa Rodrigues Gonçalo. "Adaptive optics with segmented deformable bimorph mirrors." Doctoral thesis, Universite Libre de Bruxelles, 2010. http://hdl.handle.net/2013/ULB-DIPOT:oai:dipot.ulb.ac.be:2013/210166.

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The degradation of astronomical images caused by atmospheric turbulence will be much more severe in the next generation of terrestrial telescopes and its compensation will require deformable mirrors with up to tens-of-thousands of actuators.<p>Current designs for these correctors consist of scaling up the proven technologies of flexible optical plates deformed under the out-of-plane action of linear actuators. This approach will lead to an exponential growth of cost with the number of actuators, and in very complex mechanisms.<p><p>This thesis proposes a new concept of optical correction which
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16

Wu, Zhi Gang. "Design, analysis and experiment of novel compliant micromanipulators with grippers driven by PZT actuators." Thesis, University of Macau, 2017. http://umaclib3.umac.mo/record=b3691021.

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17

Stebner, Aaron P. "Development, Characterization, and Application of Ni19.5Ti50.5Pd25Pt5 High-Temperature Shape Memory Alloy Helical Actuators." Akron, OH : University of Akron, 2007. http://rave.ohiolink.edu/etdc/view?acc%5Fnum=akron1194994008.

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Thesis (M.S.)--University of Akron, Dept. of Mechanical Engineering, 2007.<br>"December, 2007." Title from electronic thesis title page (viewed 02/22/2008) Advisor, D. Dane Quinn; Co-Advisor, Graham Kelly; Department Chair, Celal Batur; Dean of the College, George K. Haritos; Dean of the Graduate School, George R. Newkome. Includes bibliographical references.
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18

Moghani, Taraneh. "Controller switching policy in flexible plates using PZT actuators subject to spatiotemporal variations of disturbances." Link to electronic thesis, 2004. http://www.wpi.edu/Pubs/ETD/Available/etd-0430104-114246.

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19

Akella, Sriram. "Design and test of lead-zirconate-titanate flexural plate wave based actuators." [Tampa, Fla.] : University of South Florida, 2005. http://purl.fcla.edu/fcla/etd/SFE0001001.

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20

Srivastava, Manu M. "Effect of microstructure on electromechanical properties of PLZT multilayer actuators." Thesis, Georgia Institute of Technology, 1999. http://hdl.handle.net/1853/18931.

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21

Robbins, Jesse. "An Investigation into the Cyclic Electric Fatigue of Ferroelectric Ceramics as Actuators: High Temperature and Low Pressure." University of Akron / OhioLINK, 2009. http://rave.ohiolink.edu/etdc/view?acc_num=akron1240861885.

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22

BALMA, DAVIDE. "Technological process for the fabrication of a MEMS microswitch actuated by a PZT thin film." Doctoral thesis, Politecnico di Torino, 2012. http://hdl.handle.net/11583/2497266.

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The research in the field of microrelay is now oriented to MEMS devices. They offer the possibility of high integration and low cost, exploiting semiconductor technologies. About MEMS microrelay, piezoelectric actuation offers the advantages of low power consumption, low actuation voltage, low actuation time and long life time. Actuators and microrelays based on piezoelectric thin films are usually made of silicon, exploiting SOI wafers. The aim of this thesis is the fabrication of a silicon nitride microrelay, exploiting the low residual stress of a 2 μm thick silicon nitride film, actuated b
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23

Stiltner, Brandon Chase. "Macro Fiber Composite Actuated Control Surfaces with Applications Toward Ducted Fan Vehicles." Thesis, Virginia Tech, 2011. http://hdl.handle.net/10919/34441.

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In most man-made flight, vehicle control is achieved by deflecting flaps. However, in nature, morphing surfaces are found on both flying and swimming creatures. Morphing is used in nature because it is a more efficient form of control. This thesis investigates using morphing flaps to control a class of UAVs known as ducted fan vehicles. Specifically, this thesis discusses both the challenges and benefits of using morphing control surfaces.<p> To achieve morphing, a piezoelectric device known as Macro Fiber Composites is used. These devices are embedded in the skin of the vehicles control surfa
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24

Ciubotariu, Dragos. "Design, Modeling, Fabrication and Control of PMN-PT Piezoelectric Systems." Thesis, Besançon, 2016. http://www.theses.fr/2016BESA2048/document.

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Ce travail propose l’utilisation d’un nouveau matériau, appelé PMN-PT, qui continue aider la miniaturisation des systèmes complexes, utilisés dans des différentes technologies. Le travail est présenté dans le cadre de collaboration entre deux projets, MIOP et ADMAN. Les besoins tient compte que les actionneurs soient capables de délivrer de haute déplacement tout en conservant la simplicité et la fiabilité du système. L’accent est mis sur la polyvalence de ce matériau piézo-électrique, PMN-PT, en raison de ses propriétés électro-mécanique. Le travail comprend un aperçu sur quoi influence les p
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25

Cueff, Matthieu. "Micro-actionneurs piézoélectriques." Phd thesis, Université de Grenoble, 2011. http://tel.archives-ouvertes.fr/tel-00716847.

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Le Titano-Zirconate de Plomb, ou PZT est un matériau piézoélectrique présentant de très bonnes performances pour l'actionnement des microsystèmes. Dans ce travail de thèse, nous nous proposons de répondre à la problématique de l'intégration du PZT par dépôt sol-gel. Dans une première partie, nous présenterons l'état de l'art des MEMS piézoélectriques et du PZT. Dans une seconde partie, nous montrerons comment obtenir des couches minces de PZT orientées (100) et (1111) de façon homogène, pour une des épaisseurs de 100 nm à 2µm. Dans une troisième partie, nous comparerons les propriétés ferroéle
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26

Nicholson, Douglas E. "Thermomechanical behavior of high-temperature shape memory alloy Ni-Ti-Pd-Pt actuators." Master's thesis, University of Central Florida, 2011. http://digital.library.ucf.edu/cdm/ref/collection/ETD/id/4814.

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To date the commercial use of shape memory alloys (SMAs) has been mostly limited to binary NiTi alloys with transformation temperatures approximately in the -100 to 100 &"186;C range. In an ongoing effort to develop high-temperature shape memory alloys (HTSMAs), ternary and quaternary additions are being made to binary NiTi to form NiTi-X (e.g., X: Pd, Pt, Au and Hf) alloys. Stability and repeatability can be further increased at these higher temperatures by limiting the stress, but the tradeoff is reduced work output and stroke. However, HTSMAs operating at decreased stresses can still be use
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27

Pavageau, Franklin. "Actionneurs piézoélectriques MEMS transparents." Electronic Thesis or Diss., Université Grenoble Alpes, 2024. http://www.theses.fr/2024GRALT018.

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La fonctionnalisation de surface de type verre ou souple avec des dispositifs actionneurs MEMS piézoélectriques transparents permettrait l’émergence de nouvelles applications, notamment dans les domaines de l’haptique tactile ou des interfaces homme-machine. Toutefois, il existe des problématiques liées au budget thermique du recuit de cristallisation du PZT (typiquement 700°C), matériau piézoélectrique actionneur roi. En effet, les substrats de verre standard atteignent leur point de déformation vers 450°C. De plus, les électrodes transparentes, en particulier l’ITO, peuvent voir leur résisti
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28

Tebaldi, Adriano [UNESP]. "Detecção de falhas estruturais usando sensores e atuadores piezelétricos e algoritmos genéticos." Universidade Estadual Paulista (UNESP), 2004. http://hdl.handle.net/11449/90837.

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Made available in DSpace on 2014-06-11T19:24:47Z (GMT). No. of bitstreams: 0 Previous issue date: 2004-03-22Bitstream added on 2014-06-13T18:21:16Z : No. of bitstreams: 1 tebaldi_a_me_ilha.pdf: 2161680 bytes, checksum: 3d261c29fd3aac533dd79cedd2e48b90 (MD5)<br>Fundação de Amparo à Pesquisa do Estado de São Paulo (FAPESP)<br>A tecnologia de materiais inteligentes se tornou uma área de crescente interesse para o desenvolvimento de estruturas que podem incorporar atuadores e sensores capazes de detectar falhas. Extensivas investigações têm sido focadas na tecnologia que integra materiais inteli
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Tebaldi, Adriano. "Detecção de falhas estruturais usando sensores e atuadores piezelétricos e algoritmos genéticos /." Ilha Solteira : [s.n.], 2004. http://hdl.handle.net/11449/90837.

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Orientador: Vicente Lopes Júnior<br>Banca: Paulo Carlos Kaminski<br>Banca: Walter Katsumi Sakamoto<br>Resumo: A tecnologia de materiais inteligentes se tornou uma área de crescente interesse para o desenvolvimento de estruturas que podem incorporar atuadores e sensores capazes de detectar falhas. Extensivas investigações têm sido focadas na tecnologia que integra materiais inteligentes no monitoramento das condições de sistemas. Vários estudos têm sido realizados na área de identificação de sistemas mecânicos e há uma tendência de introduzir otimização em projetos de monitoramento de sinais qu
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Chou, Zong-B0, and 周宗柏. "Investigation of PZT Actuator Applied in Microfluidic System." Thesis, 2006. http://ndltd.ncl.edu.tw/handle/66906246960367536140.

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碩士<br>大葉大學<br>機械工程研究所碩士班<br>94<br>With the development of ink-jet printing technology, the ejector is not only used in the traditional printing requirement, but applied in a lot of emerging fields, such as new organic/polymer lighting emitting display, liquid crystal display, optical communication devices, and MEMS devices etc. In many kinds of inkjet printing technology, an important type of inkjet printing technology is the piezoelectric driven printing technology. In this report, a PZT actuator is applied to a proposed sub-micron droplet ejector. In order to assure the workability of the ej
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31

Chen, Shih-Chang, and 陳世昌. "Investigation of the PZT Actuator in the Micropump Application." Thesis, 2006. http://ndltd.ncl.edu.tw/handle/68235783353966076306.

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博士<br>國立彰化師範大學<br>機電工程學系<br>94<br>Abstract The lead zirconate titanate (PZT) material acted as an actuator in some microfluidic applications is very suitable. In this dissertation, the PZT bulk actuator is applied to the liquid micropump and microejector. The induced shear deformation of the PZT actuator is employed to deflect and vibrate a diaphragm of a fluid chamber. This shear-type actuator is fabricated by a novel poling design with the poling electrode pair on the same surface. The actuator is made with lateral polarization parallel to the plane, in contrast to the conventional actuator
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32

Chiang, Chih-Shun, and 江志順. "Fabrication and performance of PZT ThinFilms as an Actuator in MEMS." Thesis, 2002. http://ndltd.ncl.edu.tw/handle/37qh9v.

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碩士<br>逢甲大學<br>機械工程學所<br>90<br>In recent years, the superior piezoelectric performance of lead-zirconate-titanate, PZT:( Pb(ZrxTi1-x)O3 ), ceramics materials is applied for micro-electro-mechanical-systems extensively, including micro-actuators、micro-sensor、micro-pump, etc. In this work, sol-gel method was used to fabricate PZT piezoelectric thin film, according to various fabrication parameters (thickness、viscosity、sintering method、sintering temperature、heating rate), and the properties of PZT thin film are evaluated. To measure the displacement of PZT/Membrane and piezoelectric strain constan
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33

Chen, Chi-Fan, and 陳喆凡. "A Novel PZT Actuator Based on the Innovative Pre-stress Mechanism." Thesis, 2007. http://ndltd.ncl.edu.tw/handle/66005758117982801118.

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碩士<br>國立彰化師範大學<br>機電工程學系<br>95<br>In this thesis, a novel redesign of the prestress mechanism of the stack-type piezoelectric ceramic actuator is provided. Belleville (disc) springs which have a specific height-to-thickness ratio are embedded at the two sides inside the housing for generating a constant preload/output force and operated in a special condition. The zero-spring-rate preload mechanism is not only used to handle the tensile stress but also used in both the constant force actuation mode and elastic suspension mode. The feasibility of the concept of the output force and vibration is
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34

Li, Jun Han, and 李俊翰. "Processing Development and Ferroelectric Properties of PZT Thin-Film Piezoelectric Micro-actuator." Thesis, 2001. http://ndltd.ncl.edu.tw/handle/69746336768936622218.

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碩士<br>國立交通大學<br>材料科學與工程系<br>89<br>The superior piezoelectric properties of ferroelectric materials make it suitable for micro-actuators applications. In this work, sol-gel process was used to deposit the PZT film on a 4” Si wafer by multiple spin-coating. By using micromaching technology, the fabrication process of a piezoelectric micro-actuator based on PZT-film micro-diaphram and cantilever-type structure has been developed. It was found that the adhesion metal in between Pt and Si3N4 or SiO2 has strong influence on phase crystallization and microstructure evolution of PZT films.
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Chou, Yao-Min, and 周耀閔. "Modified BVD Model of PZT Actuator by Time Domain Method for Micropump Application." Thesis, 2009. http://ndltd.ncl.edu.tw/handle/91297389750950454500.

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碩士<br>國立成功大學<br>電機工程學系碩博士班<br>97<br>The field of micro-electro-mechanical systems (MEMs) and microfabrication has produced micro-total-analysis systems (μTAS), which are widely used in medicine, diagnostics, and biological and chemical research. For the development of high precision drug delivery systems, micropumps with a lead zirconate titanate (PZT) actuator, which has a fast response time and high resolution, are most likely to be applied in implementations. To improve the performance of PZT micropumps utilized in the microfluidics field, suitable models are required to enable the optimiza
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36

Lin, Wen-Tai, and 林文泰. "Simulation of Dynamic Characteristics for a PZT Actuator Based on Electromechanical Equivalent Circuit." Thesis, 2006. http://ndltd.ncl.edu.tw/handle/20048227992277152881.

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碩士<br>國立高雄第一科技大學<br>機械與自動化工程所<br>94<br>Abstract In this thesis, the electromechanical property of a piezoelectric (PZT) element was studied based on Martin equivalent circuit in which the input port is the excitation voltage and the output ports are the generating forces of PZT element. The equivalent circuits for both single-layer and multi-layer of PZT elements were derived and discussed. Furthermore, the equivalent circuit of multi-layer of PZT element was verified through both numerical and experimental methods. In numerical method, the simulation of the equivalent circuit was carried out
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37

Hong, Yong-Tai, and 洪永泰. "Deposition of Insulation Layers onto Fine Electrodes of PZT Multilayer Actuator via Electrophoretic Technique." Thesis, 1997. http://ndltd.ncl.edu.tw/handle/94119523873418288725.

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碩士<br>逢甲大學<br>材料科學研究所<br>85<br>Multilayer piezoelectric actuators have been utilized as various electromechanical devices in the area of precision or automatic control industry, which have a substantial impact on technological advances. Multilayer piezoelectric actuators processing is similar to that of multilayer ceramic capacitors, except that additional steps are required to deposit the insulation layers on the end surface of inh electrodes to interconnect every other inner electrodes f
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Hsu, Yuan-Lung, and 許元朧. "Study of an Innovative Magnetical PZT Actuator in the Bi-cell Proton Exchange Membrane Fuel Cell Stack." Thesis, 2017. http://ndltd.ncl.edu.tw/handle/374mty.

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博士<br>國立臺灣大學<br>機械工程學研究所<br>106<br>Previous studies demonstrated a piezoelectric proton exchange membrane fuel cell (PZT–PEMFC) stack design composed of three bi-cells in series, with a maximum net power density of 0.1608 W cm-2. The present study developed a modified bi-cell design with lower volume and weight by using gold-plated aluminum 6061. A groove-designed PZT actuator enclosed with poly-di-methyl-siloxane (PDMS) curing for 30 min can reduce uneven air feeding. Such an actuator can also improve the performance of both sides of a bi-cell, with only a 0.7 % difference in the open circuit
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39

Lin, Yu-Cheng, and 林育丞. "Small-Form-Factor Holographic Optical Element with The Optimization Design of Dual-Stage Seesaw Arm PZT Actuator and the Application in Blood Coagulation Measurement." Thesis, 2014. http://ndltd.ncl.edu.tw/handle/72139486642836513241.

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博士<br>國立交通大學<br>機械工程系所<br>103<br>Many small-form-factor optical pickup unit based on the swing arm design utilize single piezoelectricity or slim plate of metal to perform focusing action. Technological obstacles to the use of rotary-type swing arm actuators to actuate optical pickup modules in small-form-factor (SFF) disk drives stem from a hinge’s skewed actuation subsequently inducts off-axis aberrations and deteriorates optical quality. This research describes a dual-stage seesaw-swivel actuator for optical pickup actuation. A bimorph bender made of piezoelectric materials, PbZrTiO3 (PZTs)
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40

Wu, Ming-Feng, and 吳明峰. "PZT Actuated Four-Leg Crawling Robot." Thesis, 2004. http://ndltd.ncl.edu.tw/handle/20121748339840267567.

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碩士<br>國立屏東科技大學<br>機械工程系<br>92<br>The main objective of this thesis is to present a PZT driven four-leg crawling robot. Due to the energy efficient and high accuracy, the piezoelectric actuators are widely applied in MEMS and micro-robotics. In this study, four cantilever beams with two PZT layers are used as the driver of robot-insect leg. First, applying the CAD/CAE method to analyze and simulate the response of piezoelectric materials. Next, the piezoelectric oscillator circuit, CPLD controller and optical sensor are integrated to demonstrate the motion of the four-leg robot-insect. The re
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Yang, Chih Jen, and 楊志仁. "PZT Actuated Mechanism Design and Analysis." Thesis, 2003. http://ndltd.ncl.edu.tw/handle/82086487549308098963.

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碩士<br>國立屏東科技大學<br>機械工程系<br>91<br>The main objective of this thesis is to study the PZT cantilever actuator. A copper based cantilever beam with PZT is used for analysis, including the static response, harmonic response and transient response are studied in detail. The FEM simulative results are compared to the experimental and theoretic values as well. The applications to PZT drive walk-mechanism and rotate-mechanism are also shown in this article.
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Bing-LiangChen and 陳柄良. "Failure Analysis for Peristaltic Micropumps with PZT Actuators." Thesis, 2011. http://ndltd.ncl.edu.tw/handle/35743708160154552878.

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Chiang, Po-Han, and 江柏漢. "Finite-Amplitude Gas Oscillation Driven by PZT Acoustic Actuators." Thesis, 2008. http://ndltd.ncl.edu.tw/handle/71993266227900238776.

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碩士<br>國立臺灣科技大學<br>機械工程系<br>96<br>Forced nonlinear acoustic oscillations at the resonant frequency of closed tube are studied. The presented studies almost used mechanical transmission to drive the gas to resonate and produce high acoustic pressure at low resonant frequency in a closed tube. The thesis constructed a miniaturized acoustic device that drove the gas to resonate at high frequency in a close tube. So we could observe nonlinear acoustic oscillations at high frequency. The excitation source of the miniaturized acoustic device was PZT actuator. It animated a piston to cause gas perturb
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Dao, Trong-Hien, and 陶宗賢. "Study on A PZT-actuated Diaphragm Micro Airpump." Thesis, 2007. http://ndltd.ncl.edu.tw/handle/59705160200135314050.

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碩士<br>國立高雄第一科技大學<br>工程科技研究所<br>95<br>Recently, the piezoelectric (PZT) actuated pump is developed for the applications in biotechnology, chemistry, medicine and engineering industries. Compared with other actuating methods based on such as electrostatic principle, magnetostrictive material, and shape memory alloy, the PZT actuation exhibits good reliability, energy efficiency, and moderated displacement. It can provide a solution to the matter of a supplying a small amount of air to the application in micro fuel cell. In this thesis, the PZT bimorph actuator used in a micro fuel cell is stu
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Hsieh, Cheng-Shung, and 謝政順. "Low-Temperature Sintered PZT-Based Ceramics and Their Applications on Actuators." Thesis, 1999. http://ndltd.ncl.edu.tw/handle/68593061319873530480.

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碩士<br>大葉大學<br>電機工程研究所<br>87<br>PZT-based ceramics, modified with Bi2O3, Fe2O3, CuO, MnO2 and Ba(Cu0.5W0.5)O3, were prepared by conventional mixed-oxide technique, with sintering temperature at 930℃ for 90 minutes. The dielectric constant measured at 1KHz is about 900 and the tangent loss is smaller than 0.1%. It has been shown that these additives were helpful in both lowing the sintering temperature and improving the dielectric properties. Microstructural and compositional analyses of the low-temperature sintered PZT-based ceramics have been carried out using XRD and SEM observation. We also
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Zhuang, Quan-Lin, and 莊坤霖. "Development of PZT Microcantilever Type Actuators by Mechanical–Chemical Machining Method." Thesis, 2008. http://ndltd.ncl.edu.tw/handle/52597437970484870740.

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碩士<br>國立中興大學<br>機械工程學系所<br>96<br>In the reported literature fabrication process of PZT micro sensors and actuators were minute and complicated. For example, PZT suspended microstructures could be fabricated by sacrificial layers. Even though sacrificial etching is the standard semiconductor process, it is not suitable to fabricate PZT sensors and actuators for two reasons. First, sintering process of PZT layers should be heated at 650℃, and underneath photoresist could not sustain. Also, etching of PZT layers are extremely difficult because the etch rates of Pb, Zr, and Ti of PZT are quite dif
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Chien, Chia-Nan, and 簡嘉男. "A Valveless Micro Impedance Pump Drive by PZT Actuation." Thesis, 2006. http://ndltd.ncl.edu.tw/handle/94597912508643316574.

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碩士<br>大葉大學<br>機械工程研究所碩士班<br>94<br>This paper presents the fabrication and preliminary experimental studies of flow performance on a valveless micro impedance pump actuated by the shear mode PZT actuator, a novel method of pumping fluid on the microscale. The micro impedance pump was constructed of three nickel electroforming components, two glass tubes, a PZT actuator and a glass substrate. The three electroforming components include a bottom structure plate, a channel plate and a vibration plate. The AZ-type positive photoresist was used as the electroforming mould, which was patterned by UV
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Gross, Steven Joseph. "Micromachined switches and cantilever actuators based on piezoelectric lead irconate titanate (PZT)." 2004. http://www.etda.libraries.psu.edu/theses/approved/WorldWideIndex/ETD-592/index.html.

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Jeng, Jiun-yuan, and 鄭竣元. "Simulation and analysis of a PZT actuated valve-less micro-pump." Thesis, 2008. http://ndltd.ncl.edu.tw/handle/99397200415375215155.

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碩士<br>雲林科技大學<br>機械工程系碩士班<br>96<br>The main function of a micro-pump system is to control minuteness flow rate exactly. In this study, a valve-less type of micro-pump is designed and fabrication. It uses diffuser/nozzle structure to replace the conventional cantilever beam type of valve. The PZT is used as actuator because of its high actuator force and high excitation frequency, but its disadvantage is low displacement. The micro-channel is made of SU-8 25 photo-resists by UV-LIGA process. The valve-less micro-pump actuated by PZT is simulated by CFDRC software. The main purpose of this study
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Cheng, Yung-Hwa, та 程永華. "Design, Fabrication, and Control of μ-compliant Gripper Actuated by PZT". Thesis, 1999. http://ndltd.ncl.edu.tw/handle/93581935292685324224.

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碩士<br>國立成功大學<br>機械工程學系<br>87<br>In this thesis, a compliant micro mechatronic system, which is different from traditional MEMS, combining the compliant mechanism, polymer materials, LIGA-like technology and PZT actuator is developed. Starting from the selection of system configuration, a complete micro compliant gripper system is designed and fabricated. A systematic design process is developed and employed for realizing the gripper mechatronic system. A fabrication process combining the traditional mechanical technology and Laser excimer technology is proposed in considering the efficiency a
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