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Relevant bibliographies by topics / Resonant microbeams

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Academic literature on the topic 'Resonant microbeams'

Author: Grafiati

Published: 4 June 2021

Last updated: 1 February 2022

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Journal articles on the topic "Resonant microbeams"

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Zook, J. D., D. W. Burns, H. Guckel, J. J. Sniegowski, R. L. Engelstad, and Z. Feng. "Characteristics of polysilicon resonant microbeams." Sensors and Actuators A: Physical 35, no. 1 (October 1992): 51–59. http://dx.doi.org/10.1016/0924-4247(92)87007-4.

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Zook, J. David, David W. Burns, William R. Herb, Henry Guckel, Joon-Won Kang, and Yongchul Ahn. "Optically excited self-resonant microbeams." Sensors and Actuators A: Physical 52, no. 1-3 (March 1996): 92–98. http://dx.doi.org/10.1016/0924-4247(96)80131-2.

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Zhang, Sha, Wen-Ming Zhang, Zhi-Ke Peng, and Guang Meng. "Dynamic Characteristics of Electrostatically Actuated Shape Optimized Variable Geometry Microbeam." Shock and Vibration 2015 (2015): 1–15. http://dx.doi.org/10.1155/2015/867171.

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We mainly analyze the dynamic characteristics of electrostatically actuated shape optimized variable geometry microbeam. A nonlinear dynamic model considering midplane stretching, electrostatic force, and electrical field fringing effects is developed. Firstly, we study the static responses of the optimized microbeams under DC polarization voltage. The generalized differential quadrature method (GDQM) is used. Secondly, the dynamic responses of the shape optimized microbeams driven by DC and AC voltages are investigated using GDQM in conjunction with Levenberg-Marquardt optimization method. The results show that the more gradual change in width, the larger the resonant frequency and the maximum amplitude at resonance. Then we further discuss in detail how do the maximum width, midsection width, and curvature of the width function affect the frequency response of the microbeams. We find that the amplitude and resonant frequency of the dynamic response are not monotonically increasing as the curvature of the width function increases and there exists a critical curvature. This analysis will be helpful in the optimal design of MEMS actuators. Finally, for more consideration, different residual stress, squeeze-film damping, and fringing effect models are introduced into the governing equation of motion and we compare the corresponding dynamic response.

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Alcheikh, N., A. Z. Hajjaj, N. Jaber, and M. I. Younis. "Electrothermally actuated tunable clamped-guided resonant microbeams." Mechanical Systems and Signal Processing 98 (January 2018): 1069–76. http://dx.doi.org/10.1016/j.ymssp.2017.05.049.

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Farokhi, Hamed, and Mergen H. Ghayesh. "Viscoelastic resonant responses of shear deformable imperfect microbeams." Journal of Vibration and Control 24, no. 14 (March 22, 2017): 3049–62. http://dx.doi.org/10.1177/1077546317699345.

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A viscoelastic model for the nonlinear analysis of the coupled transverse, longitudinal, and rotational oscillations of an imperfect shear deformable microbeam is developed, for the first time, based on the modified couple stress theory. An energy dissipation mechanism is developed via use of the Kelvin–Voigt internal energy dissipation mechanism. For the stress and deviatoric part of the symmetric couple stress tensors, the viscous components along with the corresponding work terms are obtained. The size-dependent elastic energy along with the kinetic energy of the viscoelastic microsystem is formulated in terms of the displacement field together with system geometric and physical parameters. The internal energy dissipation is developed via the work done by the viscous components of the stress and the deviatoric part of the symmetric couple stress tensors by means of the Kelvin–Voigt mechanism. These work and energy terms are inserted into Hamilton’s principle together with the work due to an external force in order to obtain three viscoelastically coupled equations governing the transverse, longitudinal, and rotational motions with cubic and quadratic nonlinear terms. A high-dimensional Galerkin approximation method is applied for all the three equations, yielding three sets of second-order coupled ordinary differential equations with cubic and quadratic nonlinearities. Upon application of a transformation, a continuation technique along with the backward differentiation formula (BDF) is employed in order to obtain the time-variant response of the system subject to a harmonic load. Special attention is paid to the effect of the Kelvin–Voigt type viscoelasticity on the system response in the presence of the length-scale parameter.

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Farokhi, Hamed, and Mergen H. Ghayesh. "Nonlinear resonant response of imperfect extensible Timoshenko microbeams." International Journal of Mechanics and Materials in Design 13, no. 1 (July 17, 2015): 43–55. http://dx.doi.org/10.1007/s10999-015-9316-z.

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Farokhi, Hamed, Mergen H. Ghayesh, Alireza Gholipour, and Shahid Hussain. "Resonant responses of three-layered shear-deformable microbeams." Microsystem Technologies 24, no. 5 (March 21, 2018): 2123–36. http://dx.doi.org/10.1007/s00542-018-3850-1.

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Farokhi, Hamed, Mergen H. Ghayesh, and Marco Amabili. "Nonlinear resonant behavior of microbeams over the buckled state." Applied Physics A 113, no. 2 (August 24, 2013): 297–307. http://dx.doi.org/10.1007/s00339-013-7894-x.

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Li, Zhenkun, Yuming He, Jian Lei, Song Guo, and Dabiao Liu. "Experimental and analytical study on the superharmonic resonance of size-dependent cantilever microbeams." Journal of Vibration and Control 25, no. 21-22 (August 25, 2019): 2733–48. http://dx.doi.org/10.1177/1077546319869139.

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The superharmonic resonance (SR) of size-dependent cantilever microbeams is investigated experimentally and analytically. Nickel cantilever microbeams are employed with concentrated harmonic force on the tip. The SR of order two, three, four, five, and six are observed. The frequency–response curves (FRCs) near the SR frequencies as well as the time histories are obtained. The FRCs indicate that the superharmonic resonant frequencies are different from the classical situation. Furthermore, a nonlinear model within the framework of modified couple stress theory is derived to interpret the observations by aid of Hamilton's variation principle. The resulting partial differential equation of motion is discretized into a series of ordinary differential equations (ODEs) by a two-mode Galerkin scheme. The ODEs are then solved analytically with the multi-dimensional Lindstedt–Poincaré method. Analytical results are in good agreement with experimental results in SR of order three. The effects of different nonlinear terms, length scale parameter, and damping coefficients on the nonlinear system are then discussed.

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Attia, P., and P. Hesto. "Dependence of the resonant frequency of micromachined gold microbeams on polarisation voltage." Microelectronics Journal 29, no. 8 (August 1998): 543–46. http://dx.doi.org/10.1016/s0026-2692(98)00006-8.

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Dissertations / Theses on the topic "Resonant microbeams"

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Joesten, William C. "Exploring the relationships between gut bacteria, gut permeability, and bacterial metabolism in the Non Obese Diabetic (NOD) mouse model of Type 1 Diabetes (T1D)." Miami University / OhioLINK, 2019. http://rave.ohiolink.edu/etdc/view?acc_num=miami1574423689823958.

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"Resonant Microbeam High Resolution Vibrotactile Haptic Display." Doctoral diss., 2019. http://hdl.handle.net/2286/R.I.53611.

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abstract: One type of assistive device for the blind has attempted to convert visual information into information that can be perceived through another sense, such as touch or hearing. A vibrotactile haptic display assistive device consists of an array of vibrating elements placed against the skin, allowing the blind individual to receive visual information through touch. However, these approaches have two significant technical challenges: large vibration element size and the number of microcontroller pins required for vibration control, both causing excessively low resolution of the device. Here, I propose and investigate a type of high-resolution vibrotactile haptic display which overcomes these challenges by utilizing a ‘microbeam’ as the vibrating element. These microbeams can then be actuated using only one microcontroller pin connected to a speaker or surface transducer. This approach could solve the low-resolution problem currently present in all haptic displays. In this paper, the results of an investigation into the manufacturability of such a device, simulation of the vibrational characteristics, and prototyping and experimental validation of the device concept are presented. The possible reasons of the frequency shift between the result of the forced or free response of beams and the frequency calculated based on a lumped mass approximation are investigated. It is found that one of the important reasons for the frequency shift is the size effect, the dependency of the elastic modulus on the size and kind of material. This size effect on A2 tool steel for Micro-Meso scale cantilever beams for the proposed system is investigated.
Dissertation/Thesis
Doctoral Dissertation Systems Engineering 2019

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(11013732), Devin M. Kalafut. "Multistability in microbeams: Numerical simulations and experiments in capacitive switches and resonant atomic force microscopy systems." Thesis, 2021.

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Microelectromechanical systems (MEMS) depend on mechanical deformation to sense their environment, enhance electrical circuitry, or store data. Nonlinear forces arising from multiphysics phenomena at the micro- and nanoscale -- van der Waals forces, electrostatic fields, dielectric charging, capillary forces, surface roughness, asperity interactions -- lead to challenging problems for analysis, simulation, and measurement of the deforming device elements. Herein, a foundation for the study of mechanical deformation is provided through computational and experimental studies of MEMS microcantilever capacitive switches. Numerical techniques are built to capture deformation equilibria expediently. A compact analytical model is developed from principle multiphysics governing operation. Experimental measurements support the phenomena predicted by the analytical model, and finite element method (FEM) simulations confirm device-specific performance. Altogether, the static multistability and quasistatic performance of the electrostatically-actuated switches are confirmed across analysis, simulation, and experimentation.

The nonlinear multiphysics forces present in the devices are critical to the switching behavior exploited for novel applications, but are also a culprit in a common failure mode when the attractive forces overcome the restorative and repulsive forces to result in two elements sticking together. Quasistatic operation is functional for switching between multistable states during normal conditions, but is insufficient under such stiction-failure. Exploration of dynamic methods for stiction release is often the only option for many system configurations. But how and when is release achieved? To investigate the fundamental mechanism of dynamic release, an atomic force microscopy (AFM) system -- a microcantilever with a motion-controlled base and a single-asperity probe tip, measured and actuated via lasers -- is configured to replicate elements of a stiction-failed MEMS device. Through this surrogate, observable dynamic signatures of microcantilever deflection indicate the onset of detachment between the probe and a sample.

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"Control for Resonant Microbeam Vibrotactile Haptic Displays." Master's thesis, 2018. http://hdl.handle.net/2286/R.I.49233.

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abstract: The world’s population is currently 9% visually impaired. Medical sciences do not have a biological fix that can cure this visual impairment. Visually impaired people are currently being assisted with biological fixes or assistive devices. The current assistive devices are limited in size as well as resolution. This thesis presents the development and experimental validation of a control system for a new vibrotactile haptic display that is currently in development. In order to allow the vibrotactile haptic display to be used to represent motion, the control system must be able to change the image displayed at a rate of at least 30 frames/second. In order to achieve this, this thesis introduces and investigates the use of three improvements: threading, change filtering, and wave libraries. Through these methods, it is determined that an average of 40 frames/second can be achieved.
Dissertation/Thesis
Masters Thesis Engineering 2018

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Book chapters on the topic "Resonant microbeams"

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Ledingham, K. "Resonance Ionisation Mass Spectrometry (RIMS)." In Quantitative Microbeam Analysis, 431–58. CRC Press Taylor & Francis Group 6000 Broken Sound Parkway NW, Suite 300 Boca Raton, FL 33487-2742: CRC Press, 2017. http://dx.doi.org/10.1201/9780203741528-20.

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Ledingham, K. W. D. "Resonance Ionisation Mass Spectrometry (RIMS)." In Quantitative Microbeam Analysis, 431–58. Routledge, 2017. http://dx.doi.org/10.1201/9780203741528-19.

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Joshi, Anand Y., and Ajay M. Patel. "Sensing the Presence and Amount of Microbes Using Double Walled Carbon Nanotubes." In Advancing Medicine through Nanotechnology and Nanomechanics Applications, 78–117. IGI Global, 2017. http://dx.doi.org/10.4018/978-1-5225-1043-7.ch004.

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The principle of mass detection using nano biosensors is based on the fact that the resonant frequency is very much sensitive to the mass of the bio-molecule, as with mass changes stiffness varies. The change of the attached mass on the CNT causes a shift to the resonant frequency. The key issue of mass detection is in quantifying the shift in the resonant frequency due to the mass of the attached molecule.This study, explores the vibration responses of the cantilever single and double-walled carbon nanotube with various attached microbes on the tip with an aim of developing a sensor. The biological objects studied include Alanine with Amino terminal residue, Deoxyadeonosine with free residue, Coronaviridae, Bartonella bacilliformis etc.. This sensor will be utilized to facilitate the identification of bacteria or virus that may be attached to CNT.

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Conference papers on the topic "Resonant microbeams"

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Zook, J. David, David W. Burns, Jeffrey N. Schoess, and Henry Guckel. "Optically resonant microbeams." In Photonics West '95. SPIE, 1995. http://dx.doi.org/10.1117/12.209010.

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Emam, Samir A., Mahmoud E. Khater, and Emil H. Gad. "A Static and Nonlinear Dynamic Analysis of Resonant Microbeams." In ASME 2007 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference. ASMEDC, 2007. http://dx.doi.org/10.1115/detc2007-34376.

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An investigation into the response of microbeams to DC and AC electric actuation is presented. The beam is modeled according to the Euler-Bernoulli beam theory and small strains and moderate rotation approximations are assumed. The governing equation is a nonlinear integral-partial-differential equation in space and time. The model accounts for mid-plane stretching, applied axial load, DC electrostatic forces, and AC harmonic forces. A reduced-order model based on the Galerkin discretization technique is introduced to simulate the behavior of microswitches and resonant sensors. The static behavior of the microbeam under electrostatic forces is studied and compared to the results available in the literature. The dynamic behavior of resonant microbeams under AC harmonic forces is investigated. An analytical solution for the vibration modes and natural frequencies of the microbeam around its statically deflected position is obtained. A shooting method is used to numerically integrate the nonlinear discretized equations and obtain periodic orbits of the response. The stability of these periodic orbits is investigated using Floquet theory. The sensitivity of the device to small-amplitude excitations is also investigated.

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Schmid, S., P. Wagli, and C. Hierold. "Biosensor based on All-Polymer Resonant Microbeams." In 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, 2009. http://dx.doi.org/10.1109/memsys.2009.4805378.

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Burns, D. W., J. D. Zook, R. D. Horning, H. Guckel, and W. R. Herb. "A DIGITAL PRESSURE SENSOR BASED ON RESONANT MICROBEAMS." In 1994 Solid-State, Actuators, and Microsystems Workshop. San Diego, CA USA: Transducer Research Foundation, Inc., 1994. http://dx.doi.org/10.31438/trf.hh1994.50.

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Burns, D. W., J. D. Zook, R. D. Horning, H. Guckel, and W. R. Herb. "A DIGITAL PRESSURE SENSOR BASED ON RESONANT MICROBEAMS." In 1994 Solid-State, Actuators, and Microsystems Workshop. San Diego, CA USA: Transducer Research Foundation, Inc., 1994. http://dx.doi.org/10.31438/trf.hh1994.50.

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Ilyas, Saad, Nizar Jaber, and Mohammad I. Younis. "Static and Dynamic Amplification Using Strong Mechanical Coupling." In ASME 2016 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 2016. http://dx.doi.org/10.1115/imece2016-66104.

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Amplifying the signal-to-noise ratio of resonant sensors is vital toward the effort to miniaturize devices into the sub-micro and nano regimes. In this work, we demonstrate theoretically and experimentally amplification through mechanically coupled microbeams. The device is composed of two identical clamped-clamped beams, made of polyimide, connected at their middle through a third beam, which acts as a mechanical coupler. Each of the clamped-clamped microbeams and the coupler are designed to be actuated separately, hence providing different possibilities of actuation and sensing. The coupled system is driven into resonance near its first resonance mode and its dynamics is explored via frequency sweeps. The results show significant amplification in the resonator’s amplitude when the signal is measured at the midpoint of the coupler, compared to the response of the individual uncoupled beams. The static pull-in characteristics of the system are also studied. It is shown that the compliant mechanical coupler can serve as a low-power RF switch actuated at low voltage loads.

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Rhoads, Jeffrey F., Barry E. DeMartini, Steven W. Shaw, and Kimberly L. Turner. "A SISO, Multi-Analyte Sensor Based on a Coupled Microresonator Array." In ASME 2006 International Mechanical Engineering Congress and Exposition. ASMEDC, 2006. http://dx.doi.org/10.1115/imece2006-13693.

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This work details a preliminary analytical and experimental investigation of a new class of resonant, single input - single output (SISO) microsensors, which are capable of detecting multiple analytes. The key feature of these sensors is that they exploit vibration localization in a set of N microbeams, coupled indirectly through a common shuttle mass, to allow for the detection of N distinct resonance shifts (induced by the presence of up to N distinct analytes) using solely the shuttle mass' response. The work includes a brief overview of the proposed sensor design, the formulation and subsequent analysis of a representative lumped-mass model of the sensor, and details of a recently-completed simulated mass detection experiment, which verified the feasibility of the proposed sensor design. Where appropriate, practical design issues, essential to sensor development, are described.

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Zielke, Mark A., Andrew Morrill, Barry Demartini, Martin Moskovits, and Kimberly Turner. "Polymer Coated Tin Oxide Nanowires for Improved Sensitivity of MEMS Chemical Sensors Based on Microbeams." In ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference. ASMEDC, 2008. http://dx.doi.org/10.1115/detc2008-49843.

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MEMS mass sensors are an important field of study for chemical and biological sensing. We utilize the massive surface area to volume ratio of tin oxide nanowires to improve the sensing characteristics of resonant cantilever gas sensors. The nanowires are grown onto released silicon cantilevers via the vapor liquid solid method, a type of chemical vapor deposition. Through intelligent catalyst placement the nanowires are grown selectively onto predefined surfaces of the cantilever. The increased surface area of our nanowire coatings provides greatly increased active binding area for analytes, while high quality factors are still achieved with this method. Our experiments actively monitor the removal of a silane self assembled monolayer from the sensor surface. Current nanowire coated sensors show a tenfold increase in sensitivity when compared to the bare sensors. We have functionalized the nanowires with a variety of polymer coatings. These functionalized sensors also show a substantial increase in sensitivity to the analytes. By varying the polymer coating applied to the nanowires, a sensor array can be generated that achieves gas recognition while having incorporated the increased sensitivity of the nanowire coatings.

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Masri, Karim M., Nizar R. Jaber, and Mohammad I. Younis. "The Dynamics of a Doubly Clamped Microbeam Near the Primary Resonance: Experimental and Analytical Investigation." In ASME 2015 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference. American Society of Mechanical Engineers, 2015. http://dx.doi.org/10.1115/detc2015-47141.

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We present experimental and analytical investigation of the dynamics of a doubly clamped microbeam near its primary resonance. The microbeam is excited electrostatically by an electrode on the first half of the beam. These microbeams are fabricated using polyimide as structural layer coated with nickel from top and chromium and gold layers from bottom. A noise signal is applied to experimentally detect the natural frequencies. Then, frequency sweep tests are generated for various values of DC bias revealing hardening, transition, and softening behavior of the microbeam. We report for the first time the transition from lower stable state, to unstable state, and then to large stable state experimentally. A multi-mode Galerkin method is used to develop a reduced order model (ROM) of the beam. Shooting method is used to find the periodic motion and is utilized to generate frequency response curves. The curves show good agreement with the experimental results with hardening behavior at lower DC voltage then softening at higher voltage loads and dynamic pull-in.

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Tella, Sherif, Nouha Alcheikh, and Mohammad I. Younis. "Electrothermally Actuated Microbeams With Varying Stiffness." In ASME 2017 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference. American Society of Mechanical Engineers, 2017. http://dx.doi.org/10.1115/detc2017-67517.

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We present axially loaded clamped-guided microbeams that can be used as resonators and actuators of variable stiffness, actuation, and anchor conditions. The applied axial load is implemented by U-shaped electrothermal actuators stacked at one of the beams edges. These can be configured and wired in various ways, which serve as mechanical stiffness elements that control the operating resonance frequency of the structures and their static displacement. The experimental results have shown considerable increase in the resonance frequency and mid-point deflection of the microbeam upon changing the end conditions of the beam. These results can be promising for applications requiring large deflection and high frequency tunability, such as filters, memory devices, and switches. The experimental results are compared to multi-physics finite-element simulations showing good agreement among them.

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