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Journal articles on the topic 'RF/microwave ablation'

Author: Grafiati

Published: 2 June 2025

Last updated: 31 July 2025

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1

Schramm, Wolfgang, Deshan Yang, Bradford J. Wood, Frank Rattay, and Dieter Haemmerich. "Contribution of Direct Heating, Thermal Conduction and Perfusion During Radiofrequency and Microwave Ablation." Open Biomedical Engineering Journal 1, no. 1 (2007): 47–52. http://dx.doi.org/10.2174/1874120700701010047.

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Both radiofrequency (RF) and microwave (MW) ablation devices are clinically used for tumor ablation. Several studies report less dependence on vascular mediated cooling of MW compared to RF ablation. We created computer models of a cooled RF needle electrode, and a dipole MW antenna to determine differences in tissue heat transfer. We created Finite Element computer models of a RF electrode (Cooled needle, 17 gauge), and a MW antenna (Dipole, 13 gauge). We simulated RF ablation for 12 min with power controlled to keep maximum tissue temperature at 100 ºC, and MW ablation for 6 min with 75 W of

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Swanson, David K., Wendel J. Smith, Tamer Ibrahim, and Andrew S. Wechsler. "Tissue Temperature Feedback Control of Power the Key to Successful Ablation." Innovations: Technology and Techniques in Cardiothoracic and Vascular Surgery 6, no. 4 (2011): 276–82. http://dx.doi.org/10.1097/imi.0b013e31822b4d22.

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Multiple ablation technologies are used to treat atrial fibrillation during cardiac operations. All such ablation technologies use locally induced temperature extremes (>50°C or −20°C) to kill tissue and create a lesion pattern in the atria which blocks activation pathways that initiate and sustain atrial fibrillation. The technologies used to heat tissue have included radiofrequency (RF), microwave, high-intensity focused ultrasound, and infrared laser. RF accounts for more than 95% of the heating-based ablation technology used by cardiac surgeons. Energy delivery with RF is easier to cont

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Zhou, Zhuhuang, Yue Wang, Shuang Song, Weiwei Wu, Shuicai Wu, and Po-Hsiang Tsui. "Monitoring Microwave Ablation Using Ultrasound Echo Decorrelation Imaging: An ex vivo Study." Sensors 19, no. 4 (2019): 977. http://dx.doi.org/10.3390/s19040977.

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In this study, a microwave-induced ablation zone (thermal lesion) monitoring method based on ultrasound echo decorrelation imaging was proposed. A total of 15 cases of ex vivo porcine liver microwave ablation (MWA) experiments were carried out. Ultrasound radiofrequency (RF) signals at different times during MWA were acquired using a commercial clinical ultrasound scanner with a 7.5-MHz linear-array transducer. Instantaneous and cumulative echo decorrelation images of two adjacent frames of RF data were calculated. Polynomial approximation images were obtained on the basis of the thresholded c

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Lee, Jeong Kyong, Surachate Siripongsakun, Simin Bahrami, Steven S. Raman, James Sayre, and David S. Lu. "Microwave ablation of liver tumors: degree of tissue contraction as compared to RF ablation." Abdominal Radiology 41, no. 4 (2016): 659–66. http://dx.doi.org/10.1007/s00261-016-0725-8.

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5

Briot, Antoine, Germain Brehier, Anaïs Jaillais, et al. "Efficacy of Monopolar Radiofrequency or Microwave Ablation in Intrahepatic Cholangiocarcinoma: A Retrospective Multicenter Study from Association des Gastro-Entérologues Oncologues (AGEO)." Cancers 16, no. 22 (2024): 3838. http://dx.doi.org/10.3390/cancers16223838.

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Background: Several locoregional treatments approaches, including thermoablation, have been tested for the treatment of intrahepatic cholangiocarcinoma (ICC) and have shown encouraging results. However, data are heterogeneous in terms of tumor number, size, and ablation technique. Objective: The aim of this study was to investigate the efficacy and prognostic factors in ICC treated by monopolar radiofrequency (RF) or microwave ablation (MW). Methods: This was a retrospective study including patients treated with RF or MW for ICC in six participating centers. DFS and OS were evaluated by the Ka

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6

Ierardi, Anna Maria, Valeria Savasi, Salvatore Alessio Angileri, et al. "Percutaneous High Frequency Microwave Ablation of Uterine Fibroids: Systematic Review." BioMed Research International 2018 (2018): 1–9. http://dx.doi.org/10.1155/2018/2360107.

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Uterine fibroids are the most common benign pelvic tumor of the female genital tract and tend to increase with age; they cause menorrhagia, dysmenorrhea, pelvic pressure symptoms, back pain, and subfertility. Currently, the management is based mainly on medical or surgical approaches. The nonsurgical and minimally invasive therapies are emerging approaches that to the state of the art include uterine artery embolization (UAE), image-guided thermal ablation techniques like magnetic resonance-guided focused ultrasound surgery (MRgFUS) or radiofrequency ablation (RF), and percutaneous microwave a

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Salman, Muhammad, Anwaar Ellahi, and Syed Wilayat Hussain. "Improvement in Absorption of Microwaves by Incorporating Additives in Silica Phenolic Composite." Key Engineering Materials 778 (September 2018): 200–205. http://dx.doi.org/10.4028/www.scientific.net/kem.778.200.

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A method of adding RAM directly in silica phenolic composite was tested. Due to direct incorporation of RAM, the resultant composite not only can show microwave absorption at normal conditions but can sustain this capability at high heat fluxes. Such RAM added composite becomes more applicable for materials which are exposed to high temperatures. Two different RAM added silica fibre phenolic composites were developed and their RF-absorptions were compared with pure silica fibre phenolic sample. It was found that depending on the type of RAM their RF-absorption can be enhanced. Strength and abl

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8

KORUTH, JACOB S., SRINIVAS DUKKIPATI, SANDEEP GANGIREDDY, et al. "Occurrence of Steam Pops During Irrigated RF Ablation: Novel Insights from Microwave Radiometry." Journal of Cardiovascular Electrophysiology 24, no. 11 (2013): 1271–77. http://dx.doi.org/10.1111/jce.12181.

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9

Mimmo, Antonio, Francesca Pegoraro, Rami Rhaiem, et al. "Microwave Ablation for Colorectal Liver Metastases: A Systematic Review and Pooled Oncological Analyses." Cancers 14, no. 5 (2022): 1305. http://dx.doi.org/10.3390/cancers14051305.

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(1) Background: colorectal liver metastases (CRLM) are the most common extra-lymphatic metastases in colorectal cancer; however, few patients are fit for curative surgery. Microwave ablation (MWA) showed promising outcomes in this cohort of patients. This systematic review and pooled analysis aimed to analyze the oncological results of MWA for CRLM. (2) Methods: Following PRISMA guidelines, PubMed, Scopus, EMBASE, Google Scholar, Science Direct, and the Wiley Online Library databases were searched for reports published before January 2021. We included papers assessing MWA, treating resectable

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10

Janikashvili, Nona, Kumar Jayant, Nino Kikodze, et al. "Immunomodulatory Changes Following Isolated RF Ablation in Colorectal Liver Metastases: A Case Report." Medicines 6, no. 2 (2019): 56. http://dx.doi.org/10.3390/medicines6020056.

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Background: Colorectal cancer (CRC) is the third most common cancer worldwide and the second leading cause of cancer-related deaths in developed countries. The liver is the most prevalent site of metastasis from CRC. Currently, the gold-standard treatment for colorectal liver metastases (CLMs) is surgical resection. However, depending on the pattern of the disease, a significant number of patients may require different approaches alone or in combination with surgery, including thermal ablation (radiofrequency (RFA) or microwave (MWA) ablation) or transarterial liver-directed therapies, althoug

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11

Cheng, Zhigang. "US-guided percutaneous radiofrequency versus microwave ablation for benign thyroid nodules: A prospective multicenter study." Journal of Clinical Oncology 35, no. 15_suppl (2017): e17593-e17593. http://dx.doi.org/10.1200/jco.2017.35.15_suppl.e17593.

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e17593 Background: To evaluate the clinical outcomes between radiofrequency ablation (RFA) and microwave ablation (MWA) in treating benign thyroid nodules (BTNs) with a prospective multicenter study. Methods: The prospective multicenter study achieved the registration of Chinese Clinical Trial Registry (Number: ChiCTR-ONRC-13003087). From January of 2013 to December of 2015, the total number of 1,252 patients with 1351 benign thyroid nodules (BTNs) at eight participating institutions was enrolled in the multicenter study. The ablation devices were applied in the study including RFA system of V

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12

Vasiniotis Kamarinos, Nikiforos, Efsevia Vakiani, Mithat Gonen, et al. "Immediate post-thermal ablation biopsy of colorectal liver metastases to predict oncologic outcomes." Journal of Clinical Oncology 38, no. 15_suppl (2020): 4602. http://dx.doi.org/10.1200/jco.2020.38.15_suppl.4602.

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4602 Background: Thermal ablation (TA) is used as a local cure for selected colorectal liver metastases (CLM) with minimal risk. A critical limitation of TA has been early local tumor progression (LTP). The goal of this study is to establish the role of ablation zone (AZ) biopsy in predicting LTP. Methods: This institutional review board-approved prospective study included patients with CLM of 5cm or less in maximum diameter, with confined liver disease or stable, limited extrahepatic disease. Both radiofrequency(RF) and microwave(MW) ablation modalities were used. A biopsy of the center and m

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13

Bhaskar, Arun, Justine Philippe, Etienne Okada, et al. "Substrate-Induced Dissipative and Non-Linear Effects in RF Switches: Probing Ultimate Performance Based on Laser-Machined Membrane Suspension." Electronics 11, no. 15 (2022): 2333. http://dx.doi.org/10.3390/electronics11152333.

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With the evolution of radio frequency (RF)/microwave technology, there is a demand for circuits that are able to meet highly challenging RF front end specifications. Silicon-on-insulator (SOI) technology is one of the leading platforms for upcoming wireless generation. The degradation of performance due to substrate coupling is a key problem to address for telecommunication circuits, especially for the high throw count switches in RF front ends. In this context, a fast, flexible and local laser ablation technique of the silicon handler allows for the membrane suspension of large millimeter-sca

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14

Setevdorj, Otgonbayar, Bayarmagnai Munkhjargal, Ishdorj Tsedenish, Yerkyebulan Mukhtar, Khuderchuluun Nanjid, and Sergelen Orgoi. "EFFICACY AND SAFETY OF RADIOFREQUENCY ABLATION VERSUS ETHANOL ABLATION." International Journal of Advanced Research 10, no. 09 (2022): 695–705. http://dx.doi.org/10.21474/ijar01/15410.

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Objectives: Multinodular goiter is the most common thyroid disease in Mongolia. Recent guidelines suggest that a nodule without clinical symptoms should be treated with watchful waiting however, some patients require treatment because of cosmetic problems or symptoms. The main treatment remainssurgical resection, however, minimally invasive alternatives are being investigated. Ethanol ablation (EA), laser ablation, microwave ablation, and radiofrequency ablation (RFA) are safe and effective techniques for the treatment of nodular goiter. This retrospective review evaluates two widely used meth

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15

DiFrancesco, Mark, Chris Park, Keith E. Martin, Jason Glithero, Salvatore Privitera, and Bridget P. Cassidy. "Technological Advances in Minimally Invasive Radiofrequency Ablation of Cardiac Tissues." Innovations: Technology and Techniques in Cardiothoracic and Vascular Surgery 5, no. 2 (2010): e138-e146. http://dx.doi.org/10.1097/imi.0b013e3181d76900.

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Ablative techniques have been sought in many circumstances as alternatives to surgical resection/incision. Besides being minimally invasive, potential benefits of ablation include greater speed and improved access to target tissue compared with other surgical techniques. There is a wide variety of ablation technologies currently in use for medical treatment. These include but are not limited to tissue heating by radiofrequency (RF) current, microwaves, laser, and high intensity ultrasound. RF is among the most heavily used because of its relatively low complexity and cost. Ablative techniques

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16

Behara, Murali Ranjani, Dawood Findakly, and Jue Wang. "A meta-analysis of local-regional therapy (LRT) in liver metastases from genitourinary cancers." Journal of Clinical Oncology 41, no. 16_suppl (2023): e16606-e16606. http://dx.doi.org/10.1200/jco.2023.41.16_suppl.e16606.

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e16606 Background: Liver metastases (Mets) from genitourinary cancers are difficult to treat and many of them are resistant to systemic therapy. Local-Regional Therapies (LRT) are becoming popular in treating Liver Mets. In this Meta-analysis, we analyze the outcomes of LRT for Liver Mets from Genitourinary Cancers. Methods: We searched PubMed, Google scholar for case reports, case studies, retrospective studies with patients who underwent LRT like Radiofrequency Ablation (RF), Chemoembolization (CE), Microwave Ablation (MA), Cryoablation for liver metastases for from Genitourinary Cancers inc

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17

Neelakanta, Perambur S., and Bharti Sharma. "de Novo Radio Frequency Ablation Therapy: Application of Unexplored Electromagnetic Spectral Resources of mm-Wave/THz Band in Clinical Ablation Procedures - A Review." June 3, 2013. https://doi.org/10.5281/zenodo.7998.

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Review Focus: General considerations on ablation procedure advocated in clinical contexts using electromagnetic (EM) energy are comprehensively reviewed. Relevant radiofrequency (RF) and/or microwave ablation techniques that have been in vogue and in traditional use across clinical procedures are revisited. Traditionally, RF/microwave ablations have been applied to a variety of pathological states, (in lieu of surgical methods and/or electrocautry procedures) so as to remove unwanted/cancerous tissue layers. Relevantly, new avenues of adopting unexplored electromagnetic (EM) energy falling in

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18

Sauren, Loes, Mark la Meir, Laurent Pison, et al. "Abstract 3252: Thoracoscopic Epicardial Pulmonary Vein Isolation Is A Realistic Alternative For Endocardial Radiofrequency Ablation: Lower Risk Of Arterial Embolism And Shorter Procedure Times." Circulation 116, suppl_16 (2007). http://dx.doi.org/10.1161/circ.116.suppl_16.ii_731-b.

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Background Pulmonary veins isolation (PVI) has become an established treatment for atrial fibrillation (AF). However, post-procedural complications by cerebroembolic events might occur. In order to evaluate the cause of these complications we compared the number of cerebral microemboli during two approaches of PVI; epicardial microwave ablation and percutaneous endocardial radiofrequency ablation in patients with AF. Methods and Results Eight patients underwent a right 3 port mono-lateral thoracoscopic epicardial microwave (MW) ablation on the beating heart of the 4 pulmonary veins and the pos

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19

Elghitany, Nouran, Osama Hetta, Mohamed Gamaleldin, and Asaad Sorial. "Efficacy and safety of ultrasound-guided microwave versus radio frequency ablation of benign thyroid nodules." Egyptian Journal of Radiology and Nuclear Medicine 56, no. 1 (2025). https://doi.org/10.1186/s43055-025-01503-3.

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Abstract Background To compare the two ablation techniques, we assessed 81 benign thyroid nodules of 38 cases who underwent radio frequency ablation (RFA) and 43 cases who underwent microwave ablation (MWA) over a 12-month period. The inclusion criteria involved benign thyroid nodules with compression symptoms or cosmetic problems, cytological confirmation of benignity with no atypical cells, and case refusal or unfit for operation. No predilection for the ultrasound nature of the nodules, whether they were cystic, solid, or complex, or their size or number. Radio frequency ablation was carrie

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Crocetti, Laura, Paola Scalise, Elena Bozzi, Gianvito Candita, and Roberto Cioni. "Thermal ablation of hepatocellular carcinoma." Journal of Medical Imaging and Radiation Oncology, December 14, 2023. http://dx.doi.org/10.1111/1754-9485.13613.

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SummaryPercutaneous treatment of hepatocellular carcinoma (HCC) by means of thermal ablation (TA) has been introduced in clinical guidelines as a potentially curative treatment for the early stages of the disease since the early 2000s. Due to its safety profile and cost‐effectiveness, TA can be offered as a first‐line treatment for patients with HCC smaller than 3 cm. Thermal ablative techniques are in fact widely available at many centres worldwide and include radiofrequency (RF) and microwave (MW) ablation, with the latter increasingly applied in clinical practice in the last decade. Pre‐cli

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Bilgin, Cem, Rebecca Hibbert, Firat Oztepe, et al. "Percutaneous Ablation of Parathyroid Adenomas: A Systematic Review and Meta-Analysis." Journal of Clinical Endocrinology & Metabolism, May 6, 2025. https://doi.org/10.1210/clinem/dgaf270.

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Abstract Background Percutaneous ablation of parathyroid adenomas provides a minimally invasive treatment option for primary hyperparathyroidism. However, the overall performance of this technique remains underexplored. This meta-analysis evaluates the effectiveness and safety of various ablation techniques for parathyroid adenomas. Methods Following PRISMA guidelines, multiple databases, including Ovid MEDLINE and Cochrane, were systematically searched. Studies that provided separate data for radiofreqeuency (RF), microwave (MWA), and ethanol ablation technique were included. Outcomes of inte

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Sorial, Asaad Gamal Asaad, Mohsen Gomaa Hassan Ismail, Gamal Eldine Mohamed Niazi, Haytham Mohamed Nasser, and Ahmed Saied Ibrahim. "Role of image guided thermal ablation in the management of painful metastatic bone tumors." International journal of health sciences, March 22, 2022, 71–76. http://dx.doi.org/10.53730/ijhs.v6ns2.4968.

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Background: Variable palliative options are now made available for patients suffering metastatic bone deposits, which in turn can be very painful, debilitating and crippling, let alone their negative impact on daily life activities, undermining the whole quality of life for affected individuals. With the wide range of available treatment options, comes wide possible drawbacks for each type of treatment. In our study we aim at assessing the safety and efficacy of thermal ablation guided by imaging tools to treat painful bony metastasis and hopefully providing better overall quality of life.&#x0

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Makarov, V. N., and N. A. Boos. "Simulation of combined heating for tumor ablation." Journal of Radio Electronics 2022, no. 9 (2022). http://dx.doi.org/10.30898/1684-1719.2022.9.5.

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In the field of oncology therapy in the last few decades, methods of local thermal destruction have been intensively developed, which is heating a malignant neoplasm to a coagulation temperature and above. Among them, radiofrequency ablation (RFA) and microwave ablation (MWA) are the most common. The main problem of the existing MWA and RFA units is the insufficient degree of tissue coagulation. Depending on the type of tissue, various methods of exposure to an electromagnetic field can be used. In the radio frequency (RF) range, ohmic heating can be used, suitable for highly conductive tissue

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Menda, Jitendra, Lakshman Kumar Vanga, Benjamin Ulmen, et al. "A Dual-RF-Plasma Approach for Controlling the Graphitic Order and Diameters of Vertically-Aligned Multiwall Carbon Nanotubes." MRS Proceedings 858 (2004). http://dx.doi.org/10.1557/proc-858-hh3.11.

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ABSTRACTPlasma enhanced chemical vapor deposition (PECVD) is a unique technique for growing vertically-aligned multiwall carbon nanotubes (VA-MWNTs) at controllable tube densities. This technique is of considerable importance for low temperature growth of VA-MWNTs at desired locations. However, the graphitic order of these MWNTs is inferior to those grown by laser ablation, arc discharge, and thermal CVD techniques. Previously, these VA-MWNTs were grown by a one-plasma approach (DC, microwave etc), either for gas decomposition or substrate biasing. Here, we describe a dual-RF plasma enhanced C

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Shabunin, Alexey, Alexey Karpov, Vladimir Bedin, et al. "Clinical, Morphological Justification and First Experience in the Use of Radiofrequency as well as Microwave Ablation Treatment Methods of Liver Echinococcosis." Iranian Journal of Parasitology, April 8, 2023. http://dx.doi.org/10.18502/ijpa.v18i1.12380.

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Background: The current study considers a new direction of surgical treatment of liver echinococcosis - the use of minimally invasive treatment methods of parasitic cysts. Methods: After clinical and morphological substantiation of the very possibility of carrying out such procedures, 9 microwave ablations (MWA) and 3 radiofrequency ablations (RFA) of cysts were performed in patients with liver echinococcosis from 2017 to 2021 in the surgical clinic of Botkin Hospital, Moscow, Russia. A comparative analysis of treatment results of patients with echinococcal liver cysts (12 patients who u

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Zeng, Xiuhua, Yufeng Zhang, Zhiyao Li, Jian Yang, Lian Gao, and Junhua Zhang. "Scatterer spacing based on Gabor atoms matched from harmonic ultrasound echoes to improve assessment of microwave‐induced thermal lesions." Medical Physics, September 19, 2024. http://dx.doi.org/10.1002/mp.17384.

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AbstractBackgroundMicrowave ablation (MWA) is a minimally invasive alternative for the treatment of unresectable liver tumors. To verify the effectiveness and safety of MWA, it is critical to measure the temperature variation and assess the regions of the microwave‐induced thermal lesions.PurposeRecent studies have indicated that the locations of optimally matched Gabor atoms (LOMGA) from ultrasound radiofrequency (RF) echo signals allow accurate and stable scatterer spacing estimation. Herein, a harmonic‐based LOMGA method is proposed to estimate the scatterer spacing for improving the assess

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Kavousi, Mahsa, Erfan Saadatmand, and Nader Riahi alam. "Physical Parameters Measurement of Breast Equivalent Phantom for Clinical Studies in Radiofrequency Hyperthermia." Frontiers in Biomedical Technologies, June 17, 2019. http://dx.doi.org/10.18502/fbt.v6i1.1100.

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Purpose: Breast cancer is one of the fatal diseases which causes death in women. Microwave hyperthermia is one way to treat cancer cells by irradiating RF waves to the cells and increasing their temperature. In our study, we fabricated breast phantom. Then we placed it in an RF field with a frequency of 13.56 MHz. We measured the temperature difference in several parts of the phantom, eventually. Materials and Methods: We designed a 5cm radius hemisphere geometry which is similar to real breast considering as fat tissue, glandular tissue as a semi-oval embedded in the hemisphere and a 1c

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Gomez, Miguel A., Wei Jia, Steve Blair, and Berardi Sensale-Rodriguez. "Compact bandpass pixelated microwave filters with short-circuited stubs via inverse design." Scientific Reports 15, no. 1 (2025). https://doi.org/10.1038/s41598-025-10666-y.

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Abstract Pixelated RF metasurfaces are poised to revolutionize electromagnetic component design by enabling compact, versatile, high-performance solutions. Building upon our prior work in random metasurface-based filters and inverse design methods, we propose pixelated notch filters by integrating shorted stubs within a top ground plane. Using a combination of established optimization techniques, including direct binary search optimization, genetic algorithms, and a randomization mutation algorithm, we synthesize filters enhanced by parallel short-ended feed schemes, which are shown to improve

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Otgonbayar, Setevdorj, Munkhjargal Bayarmagnai, Tsedenish Ishdorj, and Mukhtar Khuderchuluun Nanjid and Sergelen Orgoi Yerkyebulan. "EFFICACY AND SAFETY OF RADIOFREQUENCY ABLATION VERSUS ETHANOL ABLATION." September 28, 2022. https://doi.org/10.5281/zenodo.7229195.

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<strong>Objectives:</strong> Multinodular goiter is the most common thyroid disease in Mongolia. Recent guidelines suggest that a nodule without clinical symptoms should be treated with watchful waiting however, some patients require treatment because of cosmetic problems or symptoms. The main treatment remainssurgical resection, however, minimally invasive alternatives are being investigated. Ethanol ablation (EA), laser ablation, microwave ablation, and radiofrequency ablation (RFA) are safe and effective techniques for the treatment of nodular goiter. This retrospective review eva

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Fronda, Marco, Eleonora Susanna, Andrea Doriguzzi Breatta, et al. "Combined transarterial chemoembolization and thermal ablation in candidates to liver transplantation with hepatocellular carcinoma: pathological findings and post-transplant outcome." La radiologia medica, June 3, 2024. http://dx.doi.org/10.1007/s11547-024-01830-x.

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Abstract Objectives Evaluating the pathological response and the survival outcomes of combined thermal ablation (TA) and transarterial chemoembolization (TACE) as a bridge or downstaging for liver transplantation (LT) in patients with hepatocellular carcinoma (HCC) > 3 cm. Materials and methods A retrospective review encompassed 36 consecutive patients who underwent combined TA-TACE as bridging or downstaging before LT. Primary objectives included necrosis of the target lesion at explant pathology, post-LT overall survival (OS) and post-LT recurrence-free survival (RFS). For OS and RFS, a c

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Pearton, S. J., F. Ren, A. Katz, B. Tseng, J. R. Lothian, and T. R. Fullowan. "Small Diameter Dry Etched Via Holes in GaAs." MRS Proceedings 300 (1993). http://dx.doi.org/10.1557/proc-300-153.

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ABSTRACTTwo techniques for fabricating through-wafer via holes in 2-4 mil thick GaAs substrates were examined. In the first, Ni or thick photoresist masks were used for patterning 30 μm diameter vias by ECR-rf dry etching using low pressure (10-20 mTorr), low bias (– 150V) BCI3/C12 discharges. Microwave enhancement of these discharges produced faster etch rates but a greater degree of isotropic material removal at a given pressure. Reducing the process pressure produces extremely anisotropic features with high aspect ratio. The BC13-to-C12 ratio must be kept to ≥5:1 to maintain the anisotropy.

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