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Journal articles on the topic 'Rigorous coupled wave analysis (RCWA)'

Author: Grafiati

Published: 3 June 2025

Last updated: 31 July 2025

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1

Pechprasarn, Suejit, Acharawan Panlomso, Suttipong Aiam-Um, et al. "Rigorous Coupled Wave Analysis for Plasmonic Nanoparticles." Applied Mechanics and Materials 866 (June 2017): 341–44. http://dx.doi.org/10.4028/www.scientific.net/amm.866.341.

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Electromagnetic simulation packages for nanoparticles have become of interest for science and engineering community because of interesting properties of nanomaterials, such as, plasmonics and localized field enhancement. There are several approaches to calculate electromagnetic wave responses including time domain and frequency domain; each approach does have its own pros and cons. In this paper, we discuss basic principle of Rigorous coupled wave analysis (RCWA) and some key issues of 2D Rigorous Coupled Wave Analysis (RCWA) for nanoparticle simulation, such as, the computing demands (long co

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2

Kazanskiy, N. L., and P. G. Serafimovich. "Cloud Computing for Rigorous Coupled-Wave Analysis." Advances in Optical Technologies 2012 (July 2, 2012): 1–7. http://dx.doi.org/10.1155/2012/398341.

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Design and analysis of complex nanophotonic and nanoelectronic structures require significant computing resources. Cloud computing infrastructure allows distributed parallel applications to achieve greater scalability and fault tolerance. The problems of effective use of high-performance computing systems for modeling and simulation of subwavelength diffraction gratings are considered. Rigorous coupled-wave analysis (RCWA) is adapted to cloud computing environment. In order to accomplish this, data flow of the RCWA is analyzed and CPU-intensive operations are converted to data-intensive operat

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3

Pham, Hoang-Lam, Thomas Alcaire, Sebastien Soulan, Delphine Le Cunff, and Jean-Hervé Tortai. "Efficient Rigorous Coupled-Wave Analysis Simulation of Mueller Matrix Ellipsometry of Three-Dimensional Multilayer Nanostructures." Nanomaterials 12, no. 22 (2022): 3951. http://dx.doi.org/10.3390/nano12223951.

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Mueller matrix ellipsometry (MME) is a powerful metrology tool for nanomanufacturing. The application of MME necessitates electromagnetic computations for inverse problems of metrology determination in both the conventional optimization process and the recent neutral network approach. In this study, we present an efficient, rigorous coupled-wave analysis (RCWA) simulation of multilayer nanostructures to quantify reflected waves, enabling the fast simulation of the corresponding Mueller matrix. Wave propagations in the component layers are characterized by local scattering matrices (s-matrices)

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4

Gou, Jun, Hilal Cansizoglu, Cesar Bartolo-Perez, et al. "Rigorous coupled-wave analysis of absorption enhancement in vertically illuminated silicon photodiodes with photon-trapping hole arrays." Nanophotonics 8, no. 10 (2019): 1747–56. http://dx.doi.org/10.1515/nanoph-2019-0164.

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AbstractIn this paper, we present a rigorous coupled-wave analysis (RCWA) of absorption enhancement in all-silicon (Si) photodiodes with integrated hole arrays of different shapes and dimensions. The RCWA method is used to analyze the light propagation and trapping in the photodiodes on both Si-on-insulator (SOI) and bulk Si substrates for the datacom wavelength at about 850 nm. Our calculation and measurement results show that funnel-shaped holes with tapered sidewalls lead to low back-reflection. A beam of light undergoes a deflection subsequent to the diffraction in the hole array and gener

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5

Chen, De Wei. "Rigorous Coupled Wave Analysis of Surface Plasmon Resonance Sensor Based on Metallic Grating." Advanced Materials Research 211-212 (February 2011): 465–68. http://dx.doi.org/10.4028/www.scientific.net/amr.211-212.465.

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Since the development almost a decade ago of the first biosensor based on surface plasmon resonance (SPR), the use of this technique has increased steadily. In this study, we theoretically investigated the sensing character of SPR sensor with reflection type metallic with Rigorous Coupled Wave Analysis (RCWA) method, and the mechanism is analyzed by the field distribution. It is found that the sensitivity of negative diffraction order, which goes higher quickly as the resonant angle increases, is much greater than that of positive diffraction order.

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6

Fariz, Alvin, and Rahmat Hidayat. "Calculation of spectra and plasmon wave distribution in one-dimensional periodic structure." Journal of Physics: Conference Series 2243, no. 1 (2022): 012088. http://dx.doi.org/10.1088/1742-6596/2243/1/012088.

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Abstract Surface Plasmon Resonance (SPR) is a resonance phenomenon between electromagnetic waves and electrons, which is formed on the interface between metal and dielectric surface. SPR waves can be generated by using a coupler element, such as prisms and gratings. In this study, we analyzed the effect of groove filling in nanograting structures using computation work based on Rigorous Coupled Wave Analysis (RCWA) method. The structure periodicity is 700 nm with a groove depth of around 350 nm. The reflectance spectra calculation by the RCWA method produces the appearance of SPR dip for an em

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7

Jin, Xiao Min, Douglas Alan Cattarusa, and Michael James Marshall. "Study of Top Triangular Nano-Grating on Solar Cell Using Rigorous Coupled Wave Analysis." Advanced Materials Research 571 (September 2012): 427–32. http://dx.doi.org/10.4028/www.scientific.net/amr.571.427.

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This paper presents the simulation results of top nano-grating on solar cell using rigorous coupled wave analysis (RCWA) method. However, compared to other simulation results, we calculated weighted total transmission of solar cell according to Sun spectrum and Silicon photo detector responsivity. Our optimization shows that the top grating with period 200nm, width 40nm, and height 150nm is the optimization structure. This case has 0.45544 total weighted transmission powers and is about 70.9% improvement compared to the non-grating case.

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8

Su, Wei, Gai Ge Zheng, and Xiang Yin Li. "Photonic Crystal Biosensor Using Surface Plasmon Resonance Effect." Advanced Materials Research 669 (March 2013): 246–49. http://dx.doi.org/10.4028/www.scientific.net/amr.669.246.

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We have proposed a biosensor using a one-dimensional (1D) photonic crystal with surface plasmon resonance (SPR) effect. The wavelength interrogation method has been used to study the performance of the sensor. Numerical simulations based on rigorous coupled wave analysis (RCWA) method show that the sensitivity of the optimized sensor is 137 nm/RIU (per refractive index unit).

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9

Chengzhe, Chai, Han Yueming, and Zhao Lei. "P‐2.6: A method for accurately measuring the refractive index modulation of volume holographic grating." SID Symposium Digest of Technical Papers 54, S1 (2023): 498–99. http://dx.doi.org/10.1002/sdtp.16340.

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In this paper, we propose a method to accurately measure the refractive index modulation of VHG. By adjusting the position of the photon detector in real time, we can accurately measure the variation of the diffracted light intensity with the angle of the incident light, and combining the Rigorous Coupled Wave Analysis (RCWA) fitting, the refractive index modulation of the grating can be measured.

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10

Lokar, Ziga, Benjamin Lipovsek, Marko Topic, and Janez Krc. "Performance analysis of rigorous coupled-wave analysis and its integration in a coupled modeling approach for optical simulation of complete heterojunction silicon solar cells." Beilstein Journal of Nanotechnology 9 (August 28, 2018): 2315–29. http://dx.doi.org/10.3762/bjnano.9.216.

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A variety of light management structures have been introduced in solar cells to improve light harvesting and further boost their conversion efficiency. Reliable and accurate simulation tools are required to design and optimize the individual structures and complete devices. In the first part of this paper, we analyze the performance of rigorous coupled-wave analysis (RCWA) for accurate three-dimensional optical simulation of solar cells, in particular heterojunction silicon (HJ Si) solar cells. The structure of HJ Si solar cells consists of thin and thick layers, and additionally, micro- and n

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11

Yang, Canran, Yishi Weng, Ran Wei, Yuchen Gu, and Yuning Zhang. "28‐1: Study of the diffraction properties of gradient period polarization volume gratings." SID Symposium Digest of Technical Papers 55, S1 (2024): 244–47. http://dx.doi.org/10.1002/sdtp.17046.

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Augmented reality (AR) displays are gaining attention as next‐ generation intelligent display technologies. To further address the demand for a wide field of view (FOV) in AR displays, gradient period polarization volume holographic gratings (PVGs) are proposed as coupling devices for diffractive waveguides. Here, a novel modeling method for gradient period PVGs are proposed by incorporating grating stacking and scattering analysis utilizing rigorous coupled‐wave analysis (RCWA) theory. The diffraction efficiency and polarization response were extensively explored using this simulation model.

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12

Liang, Guoyu, and Wang Bo. "Microstructural characteristics of sandwiched T-shaped metamaterials for three-port splitting." Laser Physics 32, no. 11 (2022): 116201. http://dx.doi.org/10.1088/1555-6611/ac9525.

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Abstract This paper presents a polarization-insensitive sandwiched three-port beam splitting grating at normal incidence. The grating adopts a sandwiched structure. Based on the rigorous coupled-wave analysis (RCWA) and the simulated annealing algorithm, the grating parameters are optimized to obtain the diffraction efficiencies of 32.83% at 0th order and 32.87% at ±1st orders for transverse electric polarization, and 32.63% at 0th order and 32.39% at ±1st orders for transverse magnetic polarization. Meanwhile, the calculation results of the finite element method are in general agreement with

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13

Colomina-Martínez, Jaume, Juan Carlos Bravo, Joan Josep Sirvent-Verdú, et al. "Numerical Estimation of Bending in Holographic Volume Gratings by Means of RCWA and Deep Learning." Applied Sciences 14, no. 22 (2024): 10356. http://dx.doi.org/10.3390/app142210356.

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In this paper, we introduce a novel approach to model bending phenomena on holographic volume gratings based on Rigorous Coupled Wave Analysis (RCWA), in which the bending as a phase in the dielectric permittivity expansion is introduced, and the Shooting Method (SM) is employed to solve the resulting system of equations. Further validation of our model is conducted by comparing its predictions to those obtained from reference Finite-Difference Time-Domain (FDTD) simulations and Coupled Wave Theory (CWT, referring to Kubota’s model that includes the bending phenomenon). Furthermore, we propose

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14

Cai, Er Fei, Yong Qing Huang, Xiao Feng Duan, and Xiao Min Ren. "Design and Analysis of Optical-Communication-Band Sub-Wavelength Grating Polarizer." Advanced Materials Research 683 (April 2013): 207–10. http://dx.doi.org/10.4028/www.scientific.net/amr.683.207.

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According to the requirement of the optical communication devices, sub-wavelength grating polarizer was studied based on rigorous coupled-wave analysis (RCWA) and designed with SOI materials. The paper analyzes the grating parameters such as the period, depth, fill groove that influence the diffraction efficiency of the grating. The TM mode diffraction efficiency is more than 95%, and the TE mode diffraction efficiency is less than 5%, the pyramidal sub-wavelength polarizer grating has good polarizer performance than others shapes in the optical communication band of 1550nm. In this paper, we

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15

Berriel, S. Novia, Corbin Feit, Nick Keller, Nicholas G. Rudawski, and Parag Banerjee. "In situ spectroscopic ellipsometry and rigorous coupled wave analysis for real time profile evolution of atomic layer deposited films inside SiO₂ nanotrenches." Journal of Vacuum Science & Technology A 40, no. 6 (2022): 062403. http://dx.doi.org/10.1116/6.0001937.

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Rigorous coupled wave analysis (RCWA) is conducted on in situ spectroscopic ellipsometry data to understand profile evolution during film deposition inside nanotrenches. Lithographically patterned SiO2 nanotrenches are used as test structures. The nanotrenches are 170 nm wide at the top with a taper angle of 4.5° and are 300 nm in depth. Atomic layer deposition of ZnO is used as a model process where the thickness (cycles) of the film is varied from 0 (0 cycles) to 46 nm (300 cycles). The analysis predicts transient behavior in deposition affecting film conformality and changes to the trench t

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16

Bellucci, Stefano, Volodymyr Fitio, Tatiana Smirnova, Iryna Yaremchuk, Oleksandr Vernyhor, and Yaroslav Bobitski. "Spectral and Angular Characteristics of the High-Contrast Dielectric Grating under the Resonant Interaction of a Plane Wave and a Gaussian Beam." Materials 15, no. 10 (2022): 3529. http://dx.doi.org/10.3390/ma15103529.

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The resonant interaction of a plane wave and a one-dimensional Gaussian beam with a high-contrast dielectric grating was analyzed. Rigorous coupled wave analysis (RCWA) was used to numerically model the diffraction of a plane wave by the grating. RCWA, a discrete Fourier transform at the fulfillment (of the conditions) of the sampling theorem, was used to study diffraction of the Gaussian beam. The grating can be considered as a one-dimensional photonic crystal along which the waveguide mode propagates under resonance. The corresponding photonic crystal has both allowed and forbidden photonic

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17

Gabirondo-López, Jon, Iñigo González de Arrieta, Marcos Soldera, et al. "Directional spectral emissivity characterization and modeling of laser-patterned steel surfaces." EPJ Web of Conferences 309 (2024): 13003. http://dx.doi.org/10.1051/epjconf/202430913003.

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We present preliminary results on the fabrication of patterned surfaces by Direct Laser Interference Patterning and the characterization and theoretical interpretation of their infrared emissivities. The upgraded experimental method is capable of studying the full directional emission of samples under a controlled atmosphere at high temperatures. The effects of surface patterning can be quantitatively studied and modeled using a numerical method based on rigorous coupled-wave analysis (RCWA), a technique usually employed for periodic surfaces. The results show that laser interference patternin

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18

Lin, Zefan, Bo Wang, and Chen Fu. "Stack-based grating for wideband polarization splitter in terahertz." Physica Scripta 96, no. 12 (2021): 125540. http://dx.doi.org/10.1088/1402-4896/ac4549.

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Abstract A novel wideband terahertz polarization beam splitter with special diffraction orders working at terahertz band is described in this paper. The polarizer can achieve high diffraction efficiency and uniformity in the 2.50–2.56 THz band. Based on rigorous coupled-wave analysis (RCWA) and simulated annealing algorithm, we proposed an efficient algorithm to optimize the polarizer. After calculations, 98.45% single-port high-efficiency reflection for transverse electric (TE) polarization and 42.33%/42.57% highly uniform dual-port beam splitting for transverse magnetic (TM) polarization wer

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19

Chen, Yuda, Jin Wang, Yihan Wang, Xingxue Li, Ge Jin, and Changhe Zhou. "A 1 × 2 Two-Dimensional Slanted Grating Based on Double-Layer Cylindrical Structure." Applied Sciences 13, no. 4 (2023): 2270. http://dx.doi.org/10.3390/app13042270.

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Diffraction gratings play an increasingly important role in various planar optical systems, such as near-eye display systems for virtual reality (VR) and augmented reality (AR). The slanted gratings have more advantages than other elements. A 1 × 2 transmission two-dimensional (2D) slanted grating based on a double-layer cylindrical structure was proposed in this paper. In the initial phase of this study, this kind of grating was proposed and designed. We used rigorous coupled-wave analysis (RCWA) and simulated annealing algorithm (SA) to optimize the grating parameters. The effects of the gra

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20

David, Christin. "TiO2 Self-Assembled, Thin-Walled Nanotube Arrays for Photonic Applications." Materials 12, no. 8 (2019): 1332. http://dx.doi.org/10.3390/ma12081332.

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Two-dimensional arrays of hollow nanotubes made of TiO 2 are a promising platform for sensing, spectroscopy and light harvesting applications. Their straightforward fabrication via electrochemical anodization, growing nanotube pillars of finite length from a Ti foil, allows precise tailoring of geometry and, thus, material properties. We theoretically investigate these photonic crystal structures with respect to reduction of front surface reflection, achievable field enhancement, and photonic bands. Employing the Rigorous Coupled Wave Analysis (RCWA), we study the optical response of photonic

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21

Zhu, Wenhua, Bo Wang, Chenhao Gao, et al. "Research on reflective three-output by packaged grating under second Bragg angle." Modern Physics Letters B 33, no. 25 (2019): 1950305. http://dx.doi.org/10.1142/s0217984919503056.

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This paper designed a novel three-output reflective packaged grating. The optimized parameters such as the period and depth of the high-efficiency three-output grating with an incident wavelength of 1550 nm can be calculated by rigorous coupled-wave analysis (RCWA). According to the optimized result, the grating can diffract the incident light energy into three orders with an efficiency of nearly 33% under the premise of second Bragg angle incidence and the given duty ratio of 0.5. The diffraction efficiency of the packaged grating is improved compared to the surface-relief three-output gratin

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22

Fitio, Volodymyr, Iryna Yaremchuk, Andriy Bendziak, Michal Marchewka, and Yaroslav Bobitski. "Diffraction of a Gaussian Beam with Limited cross Section by a Volume Phase Grating under Waveguide Mode Resonance." Materials 14, no. 9 (2021): 2252. http://dx.doi.org/10.3390/ma14092252.

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In this work, the diffraction of a Gaussian beam on a volume phase grating was researched theoretically and numerically. The proposed method is based on rigorous coupled-wave analysis (RCWA) and Fourier transform. The Gaussian beam is decomposed into plane waves using the Fourier transform. The number of plane waves is determined using the sampling theorem. The complex reflected and transmitted amplitudes are calculated for each RCWA plane wave. The distribution of the fields along the grating for the reflected and transmitted waves is determined using inverse Fourier transform. The powers of

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23

Tomić, Dubravko, and Zvonimir Šipuš. "Symmetry Breaking as a Basis for Characterization of Dielectric Materials." Sensors 25, no. 2 (2025): 532. https://doi.org/10.3390/s25020532.

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This paper introduces a novel method for measuring the dielectric permittivity of materials within the microwave and millimeter wave frequency ranges. The proposed approach, classified as a guided wave transmission system, employs a periodic transmission line structure characterized by mirror/glide symmetry. The dielectric permittivity is deduced by measuring the transmission properties of such structure when presence of the dielectric material breaks the inherent symmetry of the structure and consequently introduce a stopband in propagation characteristic. To explore the influence of symmetry

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Lee, Chih Kung, C. L. Lin, D. Z. Lin, et al. "Developing a Nanowriter System: Simulation and Experimental Set-Up of a Plasmonic-Based Lens Design." Materials Science Forum 505-507 (January 2006): 1–6. http://dx.doi.org/10.4028/www.scientific.net/msf.505-507.1.

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The aim of this article is to introduce a nanowriter system that could lead to a sub-micrometer spot size using a visible light source under ambient conditions. The key component of the system is a focusing optical head, which incorporates a plasmonic-based lens instead of a conventional lens. Based on knowledge of the physical origin of extraordinary transmission and directional beaming, we theorize that the directional beaming phenomenon can be explained simply as a surface plasmon (SP) diffraction along the corrugations as long as the multiple scattering effects are taken into account to mo

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25

Meudt, Maik, Andreas Henkel, Maximilian Buchmüller, and Patrick Görrn. "A Theoretical Description of Node-Aligned Resonant Waveguide Gratings." Optics 3, no. 1 (2022): 60–69. http://dx.doi.org/10.3390/opt3010008.

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Waveguide gratings are used for applications such as guided-mode resonance filters and fiber-to-chip couplers. A waveguide grating typically consists of a stack of a single-mode slab waveguide and a grating. The filling factor of the grating with respect to the mode intensity profile can be altered via changing the waveguide’s refractive index. As a result, the propagation length of the mode is slightly sensitive to refractive index changes. Here, we theoretically investigate whether this sensitivity can be increased by using alternative waveguide grating geometries. Using rigorous coupled-wav

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26

Xiong, Xue Hui, La Min Zhan, and Xuan Ke. "Effects of Grating Slant Angle on Surface Plasmon Resonance and its Applications for Sensors." Applied Mechanics and Materials 536-537 (April 2014): 342–45. http://dx.doi.org/10.4028/www.scientific.net/amm.536-537.342.

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In this study, we emphasized on effects of grating slant angle of tilted dielectric gratings (TG) on surface plasmon resonance (SPR). The momentum conservation for an optical wave exciting an SPR via TG is different from unslant gratings. The coupling condition induces the period along the grating surface (in the direction x) be decided not only by grating period but also by slant angle. The results calculated by rigorous coupled-wave analysis theory (RCWA) indicate that the resonant wavelength and the refractive index sensitivity are strongly dependent on the period in the direction x (noted

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Hilaire Tchoffo, Faustin, Fabrice Kwefeu Mbakop, and Noël Djongyang. "Study of one-dimensional of W/SiO2 grating selective thermal emitter for thermophotovoltaic applications." International Journal of Basic and Applied Sciences 12, no. 1 (2023): 1–8. http://dx.doi.org/10.14419/ijbas.v12i1.32130.

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In this paper, a one-dimensional multilayer is optimized for potential applications as thermophotovoltaic (TPV) selective emitter. The effect of the diffraction orders and plane of incidence on the spectral emittance of the proposed TPV emitter is calculated numerically by using the rigorous coupled-wave analysis (RCWA). The emittance spectrum of the proposed TPV selective emitter shows three close to unity emission peaks which are explained by the surface plasmon polariton (SPP), gap plasmon polariton (GPP) and magnetic polariton (MP) excitation. The strong emittance at short wavelengths occu

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28

Bošnjaković, Dejan, Nerea Sebastián, and Irena Drevenšek-Olenik. "Magnetically Tunable Liquid Crystal-Based Optical Diffraction Gratings." Polymers 12, no. 10 (2020): 2355. http://dx.doi.org/10.3390/polym12102355.

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We present a theoretical analysis of optical diffractive properties of magnetically tunable optical transmission gratings composed of periodically assembled layers of a polymer and a ferromagnetic liquid crystal (LC). The orientational structure of the LC layers as a function of an applied magnetic field is calculated by minimization of the Landau-de Gennes free energy for ferromagnetic LCs, which is performed numerically and also analytically by using the one-constant approximation and the approximations of the high and the low magnetic fields. Optical diffractive properties of the associated

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29

Li, Hongtao, Bo Wang, Hao Pei, et al. "Reflective three-port high-efficiency grating with two dielectric layers based on a sandwiched configuration." International Journal of Modern Physics B 30, no. 12 (2016): 1650072. http://dx.doi.org/10.1142/s0217979216500727.

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In this paper, we describe a novel reflective sandwiched three-port grating with two dielectric layers. The two-layer sandwiched grating can separate incident wave into the [Formula: see text] and the 0th-order with high-efficiency beam splitting and good splitting ratios for both transverse electric (TE) and transverse magnetic (TM) polarizations. The grating parameters can be optimized by using rigorous coupled-wave analysis (RCWA) with a special duty cycle of 0.6. With the optimized results, efficiencies more than 32% in the [Formula: see text]st-orders and the 0th-order can be obtained. Fu

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Gao, Yang, Qi Xia, Guang Lan Liao, and Tie Lin Shi. "Sensitivity Analysis of a Bioinspired Refractive Index Based Gas Sensor." Advanced Materials Research 268-270 (July 2011): 235–40. http://dx.doi.org/10.4028/www.scientific.net/amr.268-270.235.

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Nano-structures on the wing of Morpho butterflies generate bright blue color, and this color is sensitive to ambient gas, or more specifically, the refractive index of ambient gas. It was found that even slight change of the refractive index can lead to obvious change of the color. Such phenomenon has caught much attention and was employed as a sensing principle for detecting gas. In the present study, a typical nano-structure on the wing of Morpho butterflies is mimicked and simplified for constructing a refractive index based gas sensor. Moreover, partial derivative of the optical reflection

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Ye, Haokun, Jianping Zhang, Shangnan Zhao, Mingxin Liu, and Xin Zhang. "Analysis and Prediction of Image Quality Degradation Caused by Diffraction of Infrared Optical System Turning Marks." Photonics 10, no. 8 (2023): 937. http://dx.doi.org/10.3390/photonics10080937.

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This paper addresses the issue of reduced image quality due to annular turning marks formed by single-point diamond turning (SPDT) during the processing of metal-based mirrors and infrared lenses. An ideal single-point diamond turning marks diffraction action model to quantitatively analyze the impact of turning marks diffraction on imaging quality degradation is proposed. Based on this model, a fast estimation algorithm for the optical modulation transfer function of the system under turning marks diffraction (TMTF) is proposed. The results show that the TMTF algorithm achieves high computati

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Shao, Ren Jin, Yan Ye, Xiao Xuan Dong, Yun Zhou, Su Shen, and Lin Sen Chen. "Color Filters Based on the Subwavelength Triangular-Lattice Cylinder Arrays in Metal-Dielectric Films." Key Engineering Materials 562-565 (July 2013): 737–43. http://dx.doi.org/10.4028/www.scientific.net/kem.562-565.737.

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Abstract: Color filter incorporating a subwavelength triangular-lattice cylinder arrays in metal-dielectric films on quartz substrate was proposed. The device consists of a quartz substrate, a triangular-lattice cylinder arrays in both dielectric layer of ZnS and a metallic layer of aluminum (Al). The broadband transmission characteristic of the proposed device in the visible wavelength range was investigated in detail by the rigorous coupled wave analysis (RCWA). Specially by discussing the effects of the structure parameters to the resonant wavelength, typical optimized structure parameters

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Yang, Wenhe, Shuxin Yao, Jing Cao, and Nan Lin. "Mitigating the Impact of Asymmetric Deformation on Advanced Metrology for Photolithography." Applied Sciences 14, no. 11 (2024): 4440. http://dx.doi.org/10.3390/app14114440.

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Controlling overlay in lithography is crucial for improving the yield of integrated circuit manufacturing. The process disturbances can cause undesirable morphology changes of overlay targets (such as asymmetric grating), which can significantly impact the accuracy of overlay metrology. It is essential to decouple the overlay target asymmetry from the wafer deformation, ensuring that the overlay metrology is free from the influence of process-induced asymmetry (e.g., grating asymmetry and grating imbalance). Herein, we use an asymmetric grating as a model and show that using high-diffraction-o

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Tao, Zilong, Jun Zhang, Jie You, et al. "Exploiting deep learning network in optical chirality tuning and manipulation of diffractive chiral metamaterials." Nanophotonics 9, no. 9 (2020): 2945–56. http://dx.doi.org/10.1515/nanoph-2020-0194.

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AbstractDeep-learning (DL) network has emerged as an important prototyping technology for the advancements of big data analytics, intelligent systems, biochemistry, physics, and nanoscience. Here, we used a DL model whose key algorithm relies on deep neural network to efficiently predict circular dichroism (CD) response in higher-order diffracted beams of two-dimensional chiral metamaterials with different parameters. To facilitate the training process of DL network in predicting chiroptical response, the traditional rigorous coupled wave analysis (RCWA) method is utilized. Notably, these T-li

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Oubeniz, Hammou, Abdelhaq Belkacem, Hicham Mangach, Muamer Kadic, Abdenbi Bouzid, and Younes Achaoui. "Controlled Dispersion and Transmission-Absorption of Optical Energy through Scaled Metallic Plate Structures." Materials 16, no. 18 (2023): 6146. http://dx.doi.org/10.3390/ma16186146.

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The dispersive feature of metals at higher frequencies has opened up a plethora of applications in plasmonics. Besides, Extraordinary Optical Transmission (EOT) reported by Ebbesen et al. in the late 90’s has sparked particular interest among the scientific community through the unprecedented and singular way to steer and enhance optical energies. The purpose of the present paper is to shed light on the effect of the scaling parameter over the whole structure, to cover the range from the near-infrared to the visible, on the transmission and the absorption properties. We further bring specific

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Lee, ChaBum. "Total Internal Reflection-Based High Efficiency Grating Design for a Metal-Free Polarizing Filter Applications Using Hybrid Optimization Procedure." Advances in Optical Technologies 2014 (February 10, 2014): 1–7. http://dx.doi.org/10.1155/2014/393010.

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This paper presents a fast and rigorous design method for grating-based metal-free polarizing filter applications using two-step hybrid optimization techniques. Grating structures utilizing the total internal reflection in a lamellar configuration were used to achieve metal-free solution, which is a key technology in the chirped pulse amplification for high power laser system. Here two polarizing filters were designed: polarization sensitive and polarization insensitive. Those polarization performances were characterized by the rigorous coupled-wave analysis (RCWA), and the design parameters o

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Kim, Sung Chul. "Simulation of Rough Surface of CIGS (CuInGaSe) Solar Cell by RCWA (Rigorous Coupled Wave Analysis) Considering the Incoherency of Light." Journal of the Optical Society of Korea 18, no. 2 (2014): 180–83. http://dx.doi.org/10.3807/josk.2014.18.2.180.

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Fan, Xiangrui, Shengyao Wang, Dongdong Xu, and Gaige Zheng. "Ultra-Thin and Lithography-Free Transmissive Color Filter Based on Doped Indium Gallium Zinc Oxide with High Performance." Micromachines 13, no. 8 (2022): 1228. http://dx.doi.org/10.3390/mi13081228.

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A kind of ultra-thin transmissive color filter based on a metal-semiconductor-metal (MSM) structure is proposed. The displayed color can cover the entire visible range and switches after H2 treatment. An indium gallium zinc oxide (IGZO) semiconductor was employed, as the concentration of charge carriers can be controlled to adjust the refractive index and achieve certain colors. The color modulation in the designed structure was verified using the rigorous coupled wave analysis (RCWA) method. The angular independence of the relative transmission could reach up to 60°, and polarization-insensit

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Gao, Xu Min, Zheng Shi, Xin Li, Shu Min He, Hong Bo Zhu, and Yong Jin Wang. "An Electromechanical Tunable Grating on Silicon-on-Insulator Platform." Key Engineering Materials 609-610 (April 2014): 1277–82. http://dx.doi.org/10.4028/www.scientific.net/kem.609-610.1277.

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We report here the design and fabrication of an electromechanical tunable grating on silicon-on-insulator (SOI) wafer. The tunable grating consists of a submicron electrostatic comb actuator and an expandable freestanding grating. Rigorous coupled-wave analysis (RCWA) method is utilized to analyze the optical responses of freestanding grating with different periods and filling factors. Obvious shift of the resonant peaks is obtained by changing the grating period and the grating filling factor. The electromechanical tunable grating is realized on the silicon device layer by a combination of el

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Ntemogiannis, Dimitrios, Maria Tsarmpopoulou, Alkeos Stamatelatos, et al. "ZnO Matrices as a Platform for Tunable Localized Surface Plasmon Resonances of Silver Nanoparticles." Coatings 14, no. 1 (2024): 69. http://dx.doi.org/10.3390/coatings14010069.

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In this study, the localized surface plasmon resonances (LSPRs) of Ag nanoparticles (NPs) embedded in ZnO dielectric matrices were studied. Initially, continuous Ag thin films were deposited on Corning glass substrates via magnetron sputtering, followed by post annealing, resulting in the formation of self-assembled nanoparticles. In some cases, a heated substrate holder was employed to induce NP formation during the deposition. The morphology of nanoparticles was studied using atomic force microscopy (AFM). Ultraviolet–visible spectroscopy (UV-Vis) probed the LSPRs. Subsequently, a 70 nm thic

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S, Saravanan, and Dubey RS. "Enhancement of Ultrathin Amorphous Silicon Solar Cells Perfor-mance Using Dual Gratings." European Journal of Advances in Engineering and Technology 5, no. 2 (2018): 113–17. https://doi.org/10.5281/zenodo.10702263.

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<strong>ABSTRACT </strong> We analytically explore the high optical performance of an ultrathin amorphous silicon (a-Si) solar cell by rigorous coupled wave analysis (RCWA) method. By studying the absorption spectrum and field intensity profiles, we have investigated the importance of the grating structure via scattering and diffraction mechanism. A significant improvement is observed with the cell efficiency (η) as high as ~19% and the current density (Jsc) about ~29.47mA/cm<sup>2</sup> within 50nm thick a-Si absorber region for the perpendicular polarization case (TE). In addition, this

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Bhardwaj, Priyanka, Manidipa Roy, and Sanjay Kumar Singh. "Gold Coated VO2 Nanogratings Based Plasmonic Switches." Trends in Sciences 19, no. 1 (2022): 1721. http://dx.doi.org/10.48048/tis.2022.1721.

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This paper presents 2 dimensional (2D) and 1 dimensional (1D) gold (Au) coated VO2 (Vanadium Dioxide) nanogratings based tunable plasmonic switch. VO2 is a phase changing material and hence exhibits phase transition from semiconductor to metallic phase approximately at 67 ºC or 340 K (critical temperature) which can be achieved by exposure to IR radiation, application of voltage, heating, etc. and there is a huge contrast between optical properties of its metallic and insulating phases and hence that can be utilized to implement VO2 based optical switches. These VO2 based gratings couple the i

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Ghmari, Faouzi, and Ilhem Mezni. "Study of the Absorptance of Si-gratings and of arrays of SiO2-filled trenches on Si-grating substrate." JOURNAL OF ADVANCES IN PHYSICS 12, no. 2 (2016): 4278–90. http://dx.doi.org/10.24297/jap.v12i2.161.

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The purpose of this paper is to study the radiative properties of two model structures. The first model (A-1) is a rectangular grating of silicon (Si). The second one (A-2) is obtained from A-1 by filling their trenches by SiO2. These patterned wafers are characterized by three geometrical parameters, the period d, the filling factorand the thickness h. To derive and compute the radiative properties we use a rigorous coupled wave analysis (RCWA) method. Our attention is focused on the absorptance of these structures when they are illuminated by a monochromatic plane wave. We investigate the ef

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Tsarmpopoulou, Maria, Alexandros G. Chronis, Mihail Sigalas, Alkeos Stamatelatos, Panagiotis Poulopoulos, and Spyridon Grammatikopoulos. "Calculation of the Localized Surface Plasmon Resonances of Au Nanoparticles Embedded in NiO." Solids 3, no. 1 (2022): 55–65. http://dx.doi.org/10.3390/solids3010005.

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The present article examined the influence of size and periodicity of simulated gold (Au) nanoparticles (NPs) embedded in Nickel Oxide (NiO) matrix on localized plasmonic resonances (LSPRs). The scope of this work is to comparatively study the theoretical outcomes exhibited against the experimental results delivered from previous works, including a significant number of simulations and testing of numerous NPs diameter values. A comparison between Au and NiO NPs over silver (Ag) and NiO NPs is also reported to investigate whether the nature of noble metal affects its behavior in terms of LSPRs.

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Bošnjaković, Dejan, Mathias Fleisch, Xinzheng Zhang, and Irena Drevenšek-Olenik. "Electrically Tuneable Optical Diffraction Gratings Based on a Polymer Scaffold Filled with a Nematic Liquid Crystal." Polymers 13, no. 14 (2021): 2292. http://dx.doi.org/10.3390/polym13142292.

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We present an experimental and theoretical investigation of the optical diffractive properties of electrically tuneable optical transmission gratings assembled as stacks of periodic slices from a conventional nematic liquid crystal (E7) and a standard photoresist polymer (SU-8). The external electric field causes a twist-type reorientation of the LC molecules toward a perpendicular direction with respect to initial orientation. The associated field-induced modification of the director field is determined numerically and analytically by minimization of the Landau–de Gennes free energy. The opti

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Wang, Haoran, Biwen Li, Liangbin Hu, and Fan Zhang. "Manufacturing Anti-Reflective Subwavelength Structures on ZnS Using Femtosecond Laser Bessel Beam with Burst Mode." Biomimetics 9, no. 11 (2024): 655. http://dx.doi.org/10.3390/biomimetics9110655.

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Increasing the transmittance of zinc sulfide (ZnS) infrared windows can effectively improve the imaging quality of infrared detection. In this study, an anti-reflective subwavelength structure (ASS) was manufactured on ZnS using a femtosecond burst Bessel laser with the goal of achieving high transmittance in the mid-infrared range. The period and depth parameters of the ASS were initially determined using the effective medium approximation (EMA) theory and subsequently optimized using the rigorous coupled-wave analysis (RCWA) method to eliminate surface Fresnel anti-reflections. The depth of

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Tsarmpopoulou, Maria, Dimitrios Ntemogiannis, Alkeos Stamatelatos, et al. "Silver Nanoparticles’ Localized Surface Plasmon Resonances Emerged in Polymeric Environments: Theory and Experiment." Micro 4, no. 2 (2024): 318–33. http://dx.doi.org/10.3390/micro4020020.

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Considering that the plasmonic properties of metallic nanoparticles (NPs) are strongly influenced by their dielectric environment, comprehension and manipulation of this interplay are crucial for the design and optimization of functional plasmonic systems. In this study, the plasmonic behavior of silver nanoparticles encapsulated in diverse copolymer dielectric environments was investigated, focusing on the analysis of the emerging localized surface plasmon resonances (LSPRs) through both experimental and theoretical approaches. Specifically, two series of nanostructured silver ultrathin films

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Gong, Chengxuan, and Gaige Zheng. "Selective Properties of Mid-Infrared Tamm Phonon-Polaritons Emitter with Silicon Carbide-Based Structures." Micromachines 13, no. 6 (2022): 920. http://dx.doi.org/10.3390/mi13060920.

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Electromagnetic (EM) absorbers and emitters have attracted much interest because of their versatile applications. A photonic heterostructure composed of silicon carbide (SiC) layer/germanium (Ge) cavity/distributed Bragg reflector (DBR) has been proposed. Selective emission properties have been investigated through rigorous coupled wave analysis (RCWA) method. The results illustrate that Tamm phonon-polaritons can be excited, and the magnetic field is partially centralized at the junction of Ge cavity and SiC film, aimed to improve the interactions of photon–phonon. The absorptivity/emissivity

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Barrios, Carlos Angulo. "Modeling of a Graphene Nanoribbon–based Microfluidic Surface Plasmon Resonance Biosensor." Plasmonics 17, no. 2 (2021): 745–52. http://dx.doi.org/10.1007/s11468-021-01573-9.

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AbstractA surface plasmon resonance (SPR) biosensor based on a graphene nanoribbon array in a microfluidic flow cell operating in a flow-over format is studied. The optical response of the biosensor is numerically obtained by using rigorous couple wave analysis (RCWA). The performance of the biosensor is described in terms of the limit of detection, which is calculated as a function of key nanoribbon dimensional parameters, such as strip thickness and width, and fill fraction (nanoribbon width to array period ratio). The analysis shows that there are specific values of the fill fraction that o

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Reynolds, Cole, and Vitaly Kocharovsky. "Degenerate bound states in the continuum in a grating waveguide: Method of infinite-grating eigenmodes vs numerical Rigorous Coupled Wave Analysis (RCWA)." Journal of Physics: Conference Series 2894, no. 1 (2024): 012005. http://dx.doi.org/10.1088/1742-6596/2894/1/012005.

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Abstract We reveal the origin and describe properties of degenerate bound states in the continuum which appear when a conventional symmetry-protected bound state in the continuum meets a leaking waveguide eigenmode. A degenerate bound state in the continuum emerges due to a destructive interference of two crossing, non-leaking odd-parity and leaking even-parity, infinite-grating eigenmodes experiencing parity symmetry breaking at their crossing point.

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