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1

May, Gary S., and Costas J. Spanos. Fundamentals of Semiconductor Manufacturing and Process Control. John Wiley & Sons, Inc., 2006. http://dx.doi.org/10.1002/0471790281.

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2

J, Spanos Costas, ed. Fundamentals of semiconductor manufacturing and process control. J. Wiley & Sons, 2006.

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3

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (1st 1990 Danvers, Mass.). IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop: Theme, "World class manufacturing" : ASMC '90 proceedings. Institute of Electrical and Electronics Engineers, 1990.

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4

IEEE/SEMI, Advanced Semiconductor Manufacturing Conference and Workshop (13th 2002 Boston Mass ). ASMC 2002: The 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference [and Workshop : Advancing the science of semiconductor manufacturing excellence] : April 30-May 2, Seaport Hotel, Boston, MA, USA. IEEE, 2002.

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5

Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing (1st 1995 Reno, Nev.). Proceedings of the Symposium om Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing. Edited by Meyyappan M, Economou D. J. 1958-, Butler S. W. 1963-, Electrochemical Society. Dielectric and Technology Division., and Electrochemical Society Electronics Division. Electrochemical Society, 1995.

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6

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (3rd 1992 Cambridge, Mass.). IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop: ASMC '92 proceedings, September 30-October 1, 1992, Cambridge, Massachusetts. Institute of Electrical and Electronics Engineers, 1992.

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7

International, Symposium on Process Control Diagnostics and Modeling in Semiconductor Manufacturing (2nd 1997 Montréal Québec). Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing. Electrochemical Society, 1997.

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8

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (10th 1999 Boston, Mass.). 1999 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop: ASMC 99 proceedings : September 8-10, 1999, Boston, Massachusetts, USA. IEEE, 1999.

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9

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (4th 1993 Boston, Mass.). IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop: Theme, "Factory of the future" : ASMC '93 proceedings, October 18-19, 1993, Boston, Massachusetts. Institute of Electrical and Electronics Engineers], 1993.

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10

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (7th 1996 Cambridge, Mass.). IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference and Workshop: ASMC 96 proceedings : theme, Innovative approaches to growth in the semiconductor industry, November 12-14, 1996, Cambridge, Massachusetts. Institute of Electrical and Electronics Engineers, 1996.

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11

IEEE/SEMI, Advanced Semiconductor Manufacturing Conference and Workshop (10th 1999 Boston Massachusetts). ASMC 99: 10th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : [proceedings] : September 8-10, 1999, the Fairmont Copley Plaza, Boston, Massachusetts, USA. IEEE, 1999.

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12

Czitrom, Veronica. Statistical case studies for industrial process improvement. Society for Industrial and Applied Mathematics, 1997.

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13

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (6th 1995 Cambridge, Mass.). IEEE/SEMI 1995 Advanced Semiconductor Manufacturing Conference and Workshop: Theme, "Semiconductor manufacturing : economic solutions for the 21st century" : ASMC 95 proceedings, November 13-15, 1995, Cambridge, Massachusetts. Institute of Electrical and Electronics Engineers, 1995.

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14

W, Tobin Kenneth, Emami Iraj, and Society of Photo-optical Instrumentation Engineers., eds. Process and materials characterization and diagnostics in IC manufacturing: 27-28 February 2003, Santa Clara, California, USA. SPIE, 2003.

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15

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (2nd 1991 Boston, Mass.). IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop: ASMC '91 proceedings : October 21-23, 1991, Boston Massachusetts. The Institute of Electrical and Electronics Engineers, 1991.

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16

IEEE/SEMI, Advanced Semiconductor Manufacturing Conference and Workshop (9th 1998 Boston Massachusetts). 1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop: Theme--Semiconductor manufacturing: meeting the challenges of the global marketplace : ASMC 97 : proceedings : September 23-25, 1998, Boston, Massachusetts. IEEE, 1998.

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17

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (11th 2000 Boston, Massachusetts). ASMC 2000 Proceedings: 2000 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : September 12-14, 2000, Boston, Massachusetts, USA. IEEE, 2000.

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18

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (12th 2001 Munich, Germany). ASMC 2001: The 12th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference [and Workshop : Advancing the science of semiconductor manufacturing excellence] : April 23-24, International Conference Center, Munich Germany / sponsored by: [IEEE] Electron Devices Society ... [et al.]. IEEE, 2001.

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19

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (8th 1997 Cambridge, Mass.). 1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop: Theme--the quest for semiconductor manufacturing excellence: leading the charge into the 21st century, September 10-12, 1997, Cambridge, Massachusetts : ASMC 97 proceedings. IEEE Service Center, 1997.

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20

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (8th 1997 Cambridge, Mass.). 1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop: ASMC 97 proceedings : September 10-12, 1997, Cambridge, Massachusetts. Institute of Electrical and Electronics Engineers, 1997.

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21

T, Swihart Mark, Allendorf Mark Donald, Meyyapan M, Electrochemical Society. High Temperature Materials Division, and Electrochemical Society. Dielectric Science and Technology Division, eds. Fundamental gas-phase and surface chemistry of vapor-phase deposition II and Process control, diagnostics and modeling in semiconductor manufacturing IV: Proceedings of the international symposium. Electrochemical Society, 2001.

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22

Bobbitt, Charles E. Supplier mold compound preform manufacturing process characterization. Addison-Wesley Pub., 1992.

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23

Sponton, Luca. From manufacturing variabiity to process-aware circuit simulation. Hartung-Gorre, 2009.

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24

1939-, Ohmi Tadahiro, ed. Scientific wet process technology for innovative LSI/FPD manufacturing. Taylor & Francis, 2006.

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25

G, Law Clarence, Pollard Richard, Engineering Foundation (U.S.), and National Science Foundation (U.S.), eds. Processing of electronic materials: Proceedings of the First International Conference held at Santa Barbara, California, USA, February 23-28, 1987. American Institute of Chemical Engineers, 1987.

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26

Willard, Conley, Semiconductor Equipment and Materials International., and Society of Photo-Optical Instrumentation Engineers., eds. Technologies for microlithography manufacturing: 11 July 1995, San Francisco, California. Semiconductor Equipment and Materials International, 1995.

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27

1951-, Ueno Takumi, and Ito Toshio 1952-, eds. Microlithography fundamentals in semiconductor devices and fabrication technology. Marcel Dekker, 1998.

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28

Michael, Liehr, ed. Ultraclean semiconductor processing technology and surface chemical cleaning and passivation: Symposium held April 17-19, 1995, San Francisco, California, U.S.A. Materials Research Society, 1995.

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29

John, Lowell, Chen Ray T, Mathur Jagdish P, and Society of Photo-optical Instrumentation Engineers., eds. Optical characterization techniques for high-performance microelectronic device manufacturing II: 25-26 October 1995, Austin, Texas. SPIE, 1995.

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30

S, Jones K., Pearton S. J, Kanber H, and Materials Research Society, eds. III-V electronic and photonic device fabrication and performance: Symposium held April 12-15, 1993, San Francisco, California, U.S.A. Materials Research Society, 1993.

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31

Rafael, Reif, and Symposium on Environmental, Safety, and Health (ESH) Issues in IC Production (1996 : Boston, Mass.), eds. Environmental, safety, and health issues in IC production: Symposium held December 4-5, 1996, Boston, Massachusetts, U.S.A. Materials Research Society, 1997.

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32

H, Carter Calvin, and Materials Research Society. Meeting Symposium D., eds. Diamond, SiC and nitride wide bandgap semiconductors: Symposium held April 4-8, 1994, San Francisco, California, U.S. Materials Research Society, 1994.

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33

Sheats, James R., and Bruce W. Smith. Microlithography: Science and technology. Marcel Dekker, 1998.

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34

Kazuaki, Suzuki, and Smith Bruce W. 1959-, eds. Microlithography: Science and technology. 2nd ed. CRC Press, 2007.

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35

May, Gary S., and Costas J. Spanos. Fundamentals of Semiconductor Manufacturing and Process Control. Wiley & Sons, Incorporated, John, 2006.

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36

May, Gary S., and Costas J. Spanos. Fundamentals of Semiconductor Manufacturing and Process Control. Wiley & Sons, Incorporated, John, 2008.

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37

May, Gary S., and Costas J. Spanos. Fundamentals of Semiconductor Manufacturing and Process Control. Wiley & Sons, Incorporated, John, 2006.

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38

May, Gary S., and Costas J. Spanos. Fundamentals of Semiconductor Manufacturing and Process Control. Wiley & Sons, Incorporated, John, 2006.

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39

Wong, Alfred K. Design and Process Integration for Microelectronic Manufacturing 4. Society of Photo Optical, 2006.

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40

Bridgmon, Adolfo. Semiconductor IC : What Is the Difference Between IC and Chip?: Semiconductor Ic Manufacturing Process. Independently Published, 2021.

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41

Meyyappan, M. Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing I (Proceedings). Electrochemical Society, 1995.

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42

Institute Of Electrical and Electronics Engineers and Semiconductor Equipment and Materials Internation. IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference and Workshop : ASMC 96 proceedings : Theme, Innovative approaches to growth in the semiconductor ... 12-14, 1996, Cambridge, Massachusetts. Institute of Electrical and Electronics Engineers, 1996.

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43

Ieee/Semi Advanced Semiconductor Manufacturing Conference and Workshop: Asmc '91 Proceedings. 2nd ed. Ieee, 1991.

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44

IEEE Electron Devices Society, IEEE Components, and Manufacturing Technology Society. Semiconductor Manufacturing Conference & Workshop (Asmc): 2001 IEEE/Semi Advanced. Institute of Electrical & Electronics Enginee, 2001.

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45

Institute Of Electrical and Electronics Engineers and Germany) SEMI Advanced Semiconductor Manufacturing Conference and Workshop (12th : 2001 : Munich. Semiconductor Manufacturing Conference & Workshop (Asmc): 2001 Ieee/Semi Advanced. Institute of Electrical & Electronics Enginee, 2001.

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46

IEEE/SEMI 1995 Advanced Semiconductor Manufacturing Conference and Workshop: Theme, "Semiconductor manufacturing : Economic solutions for the 21st century" ... 13-15, 1995, Cambridge, Massachusetts. IEEE Service Center [distributor], 1995.

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47

Institute Of Electrical and Electronics Engineers and IEEE Electron Devices Society. 1995 Advanced Semiconductor Manufacturing Conference and Workshop (IEEE Conference Publications. Ch Series). Institute of Electrical & Electronics Enginee, 1995.

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48

Institute Of Electrical and Electronics Engineers and Mass.) SEMI Advanced Semiconductor Manufacturing Conference and Workshop (8th : 1997 : Cambridge. Advanced Semiconductor Mft Conference Workshop. Institute of Electrical & Electronics Enginee, 1997.

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49

Institute Of Electrical and Electronics Engineers and IEEE Electron Devices Society. 1998 Ieee/Semi Advanced Semiconductor Manufacturing Conference & Workshop: Asmc 98 Proceedings September 23-25, 1998 Boston, Massachusetts, USA. Institute of Electrical & Electronics Enginee, 1998.

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50

Nasyriq, Mohd Syamsul. Semiconductor Materials and Technology. Trans Tech Publications, Limited, 2020.

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