Journal articles: 'Semiconductor metal oxide gas sensors'

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Nikolic, Maria Vesna, Vladimir Milovanovic, Zorka Z. Vasiljevic, and Zoran Stamenkovic. "Semiconductor Gas Sensors: Materials, Technology, Design, and Application." Sensors 20, no. 22 (November 23, 2020): 6694. http://dx.doi.org/10.3390/s20226694.

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This paper presents an overview of semiconductor materials used in gas sensors, their technology, design, and application. Semiconductor materials include metal oxides, conducting polymers, carbon nanotubes, and 2D materials. Metal oxides are most often the first choice due to their ease of fabrication, low cost, high sensitivity, and stability. Some of their disadvantages are low selectivity and high operating temperature. Conducting polymers have the advantage of a low operating temperature and can detect many organic vapors. They are flexible but affected by humidity. Carbon nanotubes are chemically and mechanically stable and are sensitive towards NO and NH3, but need dopants or modifications to sense other gases. Graphene, transition metal chalcogenides, boron nitride, transition metal carbides/nitrides, metal organic frameworks, and metal oxide nanosheets as 2D materials represent gas-sensing materials of the future, especially in medical devices, such as breath sensing. This overview covers the most used semiconducting materials in gas sensing, their synthesis methods and morphology, especially oxide nanostructures, heterostructures, and 2D materials, as well as sensor technology and design, application in advance electronic circuits and systems, and research challenges from the perspective of emerging technologies.

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Dey, Ananya. "Semiconductor metal oxide gas sensors: A review." Materials Science and Engineering: B 229 (March 2018): 206–17. http://dx.doi.org/10.1016/j.mseb.2017.12.036.

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Leitgeb, Verena, Katrin Fladischer, Frank Hitzel, Florentyna Sosada-Ludwikowska, Johanna Krainer, Robert Wimmer-Teubenbacher, and Anton Köck. "SPM—SEM Investigations of Semiconductor Nanowires for Integrated Metal Oxide Gas Sensors." Proceedings 2, no. 13 (December 4, 2018): 701. http://dx.doi.org/10.3390/proceedings2130701.

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Integration of metal oxide nanowires in metal oxide gas sensors enables a new generation of gas sensor devices, with increased sensitivity and selectivity. For reproducible and stable performance of next generation sensors, the electric properties of integrated nanowires have to be well understood, since the detection principle of metal oxide gas sensors is based on the change in electrical conductivity during gas exposure. We study two different types of nanowires that show promising properties for gas sensor applications with a Scanning Probe Microscope—Scanning Electron Microscope combination. Electron Beam Induced Current and Kelvin Probe Force Microscopy measurements with a lateral resolution in the nanometer regime are performed. Our work offers new insights into the dependence of the nanowire work function on its composition and size, and into the local interaction between electron beam and semiconductor nanowires.

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Govardhan, K., and A. Nirmala Grace. "Metal/Metal Oxide Doped Semiconductor Based Metal Oxide Gas Sensors—A Review." Sensor Letters 14, no. 8 (August 1, 2016): 741–50. http://dx.doi.org/10.1166/sl.2016.3710.

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Chizhov, Artem, Marina Rumyantseva, and Alexander Gaskov. "Light Activation of Nanocrystalline Metal Oxides for Gas Sensing: Principles, Achievements, Challenges." Nanomaterials 11, no. 4 (March 31, 2021): 892. http://dx.doi.org/10.3390/nano11040892.

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The review deals with issues related to the principle of operation of resistive semiconductor gas sensors and the use of light activation instead of thermal heating when detecting gases. Information on the photoelectric and optical properties of nanocrystalline oxides SnO2, ZnO, In2O3, and WO3, which are the most widely used sensitive materials for semiconductor gas sensors, is presented. The activation of the gas sensitivity of semiconductor materials by both UV and visible light is considered. When activated by UV light, the typical approaches for creating materials are (i) the use of individual metal oxides, (ii) chemical modification with nanoparticles of noble metals and their oxides, (iii) and the creation of nanocomposite materials based on metal oxides. In the case of visible light activation, the approaches used to enhance the photo- and gas sensitivity of wide-gap metal oxides are (i) doping; (ii) spectral sensitization using dyes, narrow-gap semiconductor particles, and quantum dots; and (iii) addition of plasmon nanoparticles. Next, approaches to the description of the mechanism of the sensor response of semiconductor sensors under the action of light are considered.

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Archanjo, Bráulio S., Pablo F. Siles, Camilla K. B. Q. M. Oliveira, Daniel L. Baptista, and Bernardo R. A. Neves. "Characterization of Metal Oxide-Based Gas Nanosensors and Microsensors Fabricated via Local Anodic Oxidation Using Atomic Force Microscopy." Advances in Materials Science and Engineering 2013 (2013): 1–13. http://dx.doi.org/10.1155/2013/898565.

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This work reports on nanoscale and microscale metal oxide gas sensors, consisting of metal-semiconductor-metal barriers designed via scanning probe microscopy. Two distinct metal oxides, molybdenum and titanium oxides, were tested at different temperatures using CO2and H2as test gases. Sensitivities down to ppm levels are demonstrated, and the influence of dry and humid working atmospheres on these metal oxide conductivities was studied. Furthermore, the activation energy was evaluated and analyzed within working sensor temperature range. Finally, full morphological, chemical, and structural analyses of the oxides composites are provided allowing their identification as MoO3and Ti.

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Höfner, Sebastian, Andreas Schütze, Michael Hirth, Jochen Kuhn, and Benjamin Brück. "Calibration of Metal Oxide Semiconductor Gas Sensors by High School Students." International Journal of Online and Biomedical Engineering (iJOE) 17, no. 04 (April 6, 2021): 4. http://dx.doi.org/10.3991/ijoe.v17i04.19215.

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A wide range of pollutants cannot be perceived with human senses, which is why the use of gas sensors is indispensable for an objective assessment of air quality. Since many pollutants are both odorless and colorless, there is a lack of awareness, in particular among students. The project SUSmobil (funded by DBU – Deutsche Bundesstiftung Umwelt) aims to change this. In three modules on the topic of gas sensors and air quality, the students (a) learn the functionality of a metal oxide semiconductor (MOS) gas sensor, (b) perform a calibration process and (c) carry out environmental measurements with calibrated sensors. Based on these introductory experiments, the students are encouraged to develop their own environmental questions. In this paper, the student experiment for the calibration of a MOS gas sensor for ethanol is discussed. The experiment, designed as an HTML-based learning, addresses both theoretical and practical aspects of a typical sensor calibration process, consisting of data acquisition, feature extraction and model generation. In this example, machine learning is used for generating the evaluation model as existing physical models are not sufficiently exact.

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Baraton, Marie-Isabelle. "Metal Oxide Semiconductor Nanoparticles for Chemical Gas Sensors." IEEJ Transactions on Sensors and Micromachines 126, no. 10 (2006): 553–59. http://dx.doi.org/10.1541/ieejsmas.126.553.

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Latifah Husni, Nyayu, Ade Silvia, Siti Nurmaini, and Irsyadi Yani. "Metal Oxides Semiconductor Sensors for Odor Classification." International Journal of Reconfigurable and Embedded Systems (IJRES) 6, no. 3 (November 1, 2017): 133. http://dx.doi.org/10.11591/ijres.v6.i3.pp133-149.

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<span>The performance of gas sensor will differ and vary due to the surrounding environment changing, the way of implementation, and the position of the sensors to the source. To reach a good result on gas sensors implementation, a performance test on sensors is needed. The results of the tests are useful for characterizing the properties of the particular material or device. This paper discusses the performances of metal oxides semiconductor (MOS) sensors. The sensors are tested to determine the sensors' time response, sensors' peak duration, sensors' sensitivity, and sensors' stability of the sensor when applied to the various sources at different range. Three sources were used in experimental test, namely: ethanol, methanol, and acetone. The gas sensors characteristics are analyzed in open sampling method in order to see the sensors' sensitivity to the uncertainty disturbances, such as wind. The result shows that metal oxides semiconductor sensor was responsive to the 3 sources not only in static but also dynamic conditions. The expected outcome of this study is to predict the MOS sensors' performance when they are applied in robotic implementation. This performance was considered as the training datasets of the sensor for odor classification in this research. From the experiments, It was got, in dynamic experiment, the senrors has average of precision of 93.8-97%, the accuracy 93.3-96.7%, and the recall 93.3-96.7%. This values indicates that the sensors were selective to the odor they sensed.</span>

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Tarttelin Hernández, Paula, Stephen M. V. Hailes, and Ivan P. Parkin. "Cocaine by-product detection with metal oxide semiconductor sensor arrays." RSC Advances 10, no. 47 (2020): 28464–77. http://dx.doi.org/10.1039/d0ra03687k.

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Metal oxide semiconductor gas sensors based on SnO₂ and Cr₂O₃ were modified with zeolites H-ZSM-5, Na-A and H–Y to create a gas sensor array to detect cocaine by-product, methyl benzoate. SVMs were later used with a 4 sensor array to classify 9 gases of interest.

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Marikutsa, Artem, Marina Rumyantseva, Elizaveta A. Konstantinova, and Alexander Gaskov. "The Key Role of Active Sites in the Development of Selective Metal Oxide Sensor Materials." Sensors 21, no. 7 (April 6, 2021): 2554. http://dx.doi.org/10.3390/s21072554.

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Development of sensor materials based on metal oxide semiconductors (MOS) for selective gas sensors is challenging for the tasks of air quality monitoring, early fire detection, gas leaks search, breath analysis, etc. An extensive range of sensor materials has been elaborated, but no consistent guidelines can be found for choosing a material composition targeting the selective detection of specific gases. Fundamental relations between material composition and sensing behavior have not been unambiguously established. In the present review, we summarize our recent works on the research of active sites and gas sensing behavior of n-type semiconductor metal oxides with different composition (simple oxides ZnO, In2O3, SnO2, WO3; mixed-metal oxides BaSnO3, Bi2WO6), and functionalized by catalytic noble metals (Ru, Pd, Au). The materials were variously characterized. The composition, metal-oxygen bonding, microstructure, active sites, sensing behavior, and interaction routes with gases (CO, NH3, SO2, VOC, NO2) were examined. The key role of active sites in determining the selectivity of sensor materials is substantiated. It was shown that the metal-oxygen bond energy of the MOS correlates with the surface acidity and the concentration of surface oxygen species and oxygen vacancies, which control the adsorption and redox conversion of analyte gas molecules. The effects of cations in mixed-metal oxides on the sensitivity and selectivity of BaSnO3 and Bi2WO6 to SO2 and VOCs, respectively, are rationalized. The determining role of catalytic noble metals in oxidation of reducing analyte gases and the impact of acid sites of MOS to gas adsorption are demonstrated.

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Filipovic, Lado, and Siegfried Selberherr. "Thermo-Electro-Mechanical Simulation of Semiconductor Metal Oxide Gas Sensors." Materials 12, no. 15 (July 28, 2019): 2410. http://dx.doi.org/10.3390/ma12152410.

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There is a growing demand in the semiconductor industry to integrate many functionalities on a single portable device. The integration of sensor fabrication with the mature CMOS technology has made this level of integration a reality. However, sensors still require calibration and optimization before full integration. For this, modeling and simulation is essential, since attempting new, innovative designs in a laboratory requires a long time and expensive tests. In this manuscript we address aspects for the modeling and simulation of semiconductor metal oxide gas sensors, devices which have the highest potential for integration because of their CMOS-friendly fabrication capability and low operating power. We analyze recent advancements using FEM models to simulate the thermo-electro-mechanical behavior of the sensors. These simulations are essentials to calibrate the design choices and ensure low operating power and improve reliability. The primary consumer of power is a microheater which is essential to heat the sensing film to appropriately high temperatures in order to initiate the sensing mechanism. Electro-thermal models to simulate its operation are presented here, using FEM and the Cauer network model. We show that the simpler Cauer model, which uses an electrical circuit to model the thermo-electrical behavior, can efficiently reproduce experimental observations.

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Duykova, M. V., S. E. Shkonda, S. A. Kazakov, and M. A. Grevtsev. "MANUFACTURING AND RESEARCH OF METAL OXIDE SEMICONDUCTOR GAS SENSORS FOR AMMONIA." NAUCHNOE PRIBOROSTROENIE 30, no. 4 (November 30, 2020): 52–62. http://dx.doi.org/10.18358/np-30-4-i5262.

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Ammonia-sensitive materials based on tin dioxide have been developed and synthesized. The degree of structural defects was evaluated, and the acid-base surface centers of synthesized materials were studied using the indicator method. The relationship between the chemisorption properties of synthesized gas-sensitive sensor layers (gas response to the concentration effect of ammonia) and the structure of the sensor material is discovered and analyzed. The novelty of the research is the integrated approach presented in this paper to the creation, development and manufacture of sensors for ammonia by synthesizing a material with pre-set properties using several methods of surface modernization simultaneously.

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Seesaard, Thara, Chadinee Thippakorn, Teerakiat Kerdcharoen, and Sumana Kladsomboon. "A hybrid electronic nose system for discrimination of pathogenic bacterial volatile compounds." Analytical Methods 12, no. 47 (2020): 5671–83. http://dx.doi.org/10.1039/d0ay01255f.

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Gao, Xing, and Tong Zhang. "An overview: Facet-dependent metal oxide semiconductor gas sensors." Sensors and Actuators B: Chemical 277 (December 2018): 604–33. http://dx.doi.org/10.1016/j.snb.2018.08.129.

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Smith, Richard, Leon M. Cavanagh, and Russell Binions. "Ultra Violet Irradiation of Metal Oxide Semiconductor Gas Sensors." ECS Transactions 41, no. 20 (December 16, 2019): 29–40. http://dx.doi.org/10.1149/1.3687435.

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Choi, Hee-Jung, Soon-Hwan Kwon, Won-Seok Lee, Kwang-Gyun Im, Tae-Hyun Kim, Beom-Rae Noh, Sunghoon Park, Semi Oh, and Kyoung-Kook Kim. "Ultraviolet Photoactivated Room Temperature NO2 Gas Sensor of ZnO Hemitubes and Nanotubes Covered with TiO2 Nanoparticles." Nanomaterials 10, no. 3 (March 4, 2020): 462. http://dx.doi.org/10.3390/nano10030462.

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Prolonged exposure to NO2 can cause lung tissue inflammation, bronchiolitis fibrosa obliterans, and silo filler’s disease. In recent years, nanostructured semiconducting metal oxides have been widely used to fabricate gas sensors because of their unique structure and surface-to-volume ratio compared to layered materials. In particular, the different morphologies of ZnO-based nanostructures significantly affect the detection property of NO2 gas sensors. However, because of the large interaction energy of chemisorption (1–10 eV), metal oxide-based gas sensors are typically operated above 100 °C, overcoming the energy limits to attain high sensitivity and fast reaction. High operating temperature negatively affects the reliability and durability of semiconductor-based sensors; at high temperature, the diffusion and sintering effects at the metal oxide grain boundaries are major factors causing undesirable long-term drift problems and preventing stability improvements. Therefore, we demonstrate NO2 gas sensors consisting of ZnO hemitubes (HTs) and nanotubes (NTs) covered with TiO2 nanoparticles (NPs). To operate the gas sensor at room temperature (RT), we measured the gas-sensing properties with ultraviolet illumination onto the active region of the gas sensor for photoactivation instead of conventional thermal activation by heating. The performance of these gas sensors was enhanced by the change of barrier potential at the ZnO/TiO2 interfaces, and their depletion layer was expanded by the NPs formation. The gas sensor based on ZnO HTs showed 1.2 times higher detection property than those consisting of ZnO NTs at the 25 ppm NO2 gas.

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Kocemba, Ireneusz, Sławomir Szafran, Jacek Rynkowski, and Tadeusz Paryjczak. "Relationship between the Catalytic and Detection Properties of SnO2 and Pt/SnO2 Systems." Adsorption Science & Technology 20, no. 9 (November 2002): 897–905. http://dx.doi.org/10.1260/02636170260555804.

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Semiconductor gas sensors based on metal oxides have been widely accepted as an important tool for the detection of different gases in air. An understanding of all the mechanisms related to such detection is essential in order to improve the sensitivity and selectivity of these gas detectors. This paper considers the mechanism of detection by semiconductor oxide gas sensors in terms of catalytic reactions described by Rideal–Eley and Langmuir–Hinshelwood mechanisms. Some relationships were discussed between the catalytic and detection properties of SnO2 and Pt/SnO2 systems used on the one hand as catalysts of low-temperature CO oxidation and on the other hand as sensors of CO in air.

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Constantinoiu, Izabela, and Cristian Viespe. "ZnO Metal Oxide Semiconductor in Surface Acoustic Wave Sensors: A Review." Sensors 20, no. 18 (September 8, 2020): 5118. http://dx.doi.org/10.3390/s20185118.

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Surface acoustic wave (SAW) gas sensors are of continuous development interest to researchers due to their sensitivity, short detection time, and reliability. Among the most used materials to achieve the sensitive film of SAW sensors are metal oxide semiconductors, which are highlighted by thermal and chemical stability, by the presence on their surface of free electrons and also by the possibility of being used in different morphologies. For different types of gases, certain metal oxide semiconductors are used, and ZnO is an important representative for this category of materials in the field of sensors. Having a great potential for the development of SAW sensors, the discussion related to the development of the sensitivity of metal oxide semiconductors, especially ZnO, by the synthesis method or by obtaining new materials, is suitable and necessary to have an overview of the latest results in this domain.

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Zhang, Jian, Ziyu Qin, Dawen Zeng, and Changsheng Xie. "Metal-oxide-semiconductor based gas sensors: screening, preparation, and integration." Physical Chemistry Chemical Physics 19, no. 9 (2017): 6313–29. http://dx.doi.org/10.1039/c6cp07799d.

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Yuliarto, Brian, Gilang Gumilar, and Ni Luh Wulan Septiani. "SnO2Nanostructure as Pollutant Gas Sensors: Synthesis, Sensing Performances, and Mechanism." Advances in Materials Science and Engineering 2015 (2015): 1–14. http://dx.doi.org/10.1155/2015/694823.

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A significant amount of pollutants is produced from factories and motor vehicles in the form of gas. Their negative impact on the environment is well known; therefore detection with effective gas sensors is important as part of pollution prevention efforts. Gas sensors use a metal oxide semiconductor, specifically SnO2nanostructures. This semiconductor is interesting and worthy of further investigation because of its many uses, for example, as lithium battery electrode, energy storage, catalyst, and transistor, and has potential as a gas sensor. In addition, there has to be a discussion of the use of SnO2as a pollutant gas sensor especially for waste products such as CO, CO2, SO2, and NOx. In this paper, the development of the fabrication of SnO2nanostructures synthesis will be described as it relates to the performances as pollutant gas sensors. In addition, the functionalization of SnO2as a gas sensor is extensively discussed with respect to the theory of gas adsorption, the surface features of SnO2, the band gap theory, and electron transfer.

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Liu, Haotian, Li Zhang, King Li, and Ooi Tan. "Microhotplates for Metal Oxide Semiconductor Gas Sensor Applications—Towards the CMOS-MEMS Monolithic Approach." Micromachines 9, no. 11 (October 29, 2018): 557. http://dx.doi.org/10.3390/mi9110557.

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The recent development of the Internet of Things (IoT) in healthcare and indoor air quality monitoring expands the market for miniaturized gas sensors. Metal oxide gas sensors based on microhotplates fabricated with micro-electro-mechanical system (MEMS) technology dominate the market due to their balance in performance and cost. Integrating sensors with signal conditioning circuits on a single chip can significantly reduce the noise and package size. However, the fabrication process of MEMS sensors must be compatible with the complementary metal oxide semiconductor (CMOS) circuits, which imposes restrictions on the materials and design. In this paper, the sensing mechanism, design and operation of these sensors are reviewed, with focuses on the approaches towards performance improvement and CMOS compatibility.

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Phanichphant, Sukon. "Semiconductor Metal Oxides as Hydrogen Gas Sensors." Procedia Engineering 87 (2014): 795–802. http://dx.doi.org/10.1016/j.proeng.2014.11.677.

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Martinelli, Eugenio, Davide Polese, Alexandro Catini, Arnaldo D’Amico, and Corrado Di Natale. "Self-adapted temperature modulation in metal-oxide semiconductor gas sensors." Sensors and Actuators B: Chemical 161, no. 1 (January 2012): 534–41. http://dx.doi.org/10.1016/j.snb.2011.10.072.

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Binions, Russell, Ayo Afonja, Sheena Dungey, Dewi W. Lewis, Ivan P. Parkin, and David E. Williams. "Discrimination Effects in Zeolite Modified Metal Oxide Semiconductor Gas Sensors." IEEE Sensors Journal 11, no. 5 (May 2011): 1145–51. http://dx.doi.org/10.1109/jsen.2010.2084079.

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Hayashi, Daigo, Sigeru Omatu, and Hideo Araki. "Odor Measurement and Classification Using Metal Oxide Semiconductor Gas Sensors." Proceedings of the ISCIE International Symposium on Stochastic Systems Theory and its Applications 2014 (May 5, 2014): 331–36. http://dx.doi.org/10.5687/sss.2014.331.

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Patil, Sunil Jagannath, Arun Vithal Patil, Chandrakant Govindrao Dighavkar, Kashinath Shravan Thakare, Ratan Yadav Borase, Sachin Jayaram Nandre, Nishad Gopal Deshpande, and Rajendra Ramdas Ahire. "Semiconductor metal oxide compounds based gas sensors: A literature review." Frontiers of Materials Science 9, no. 1 (February 7, 2015): 14–37. http://dx.doi.org/10.1007/s11706-015-0279-7.

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Liang, Xi Feng, and Li Hao Liu. "Design on the Amplifier Circuit of Metal-Oxide Semiconductor Gas-Sensitive Sensor." Applied Mechanics and Materials 220-223 (November 2012): 1939–42. http://dx.doi.org/10.4028/www.scientific.net/amm.220-223.1939.

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Metal-oxide semiconductor gas-sensitive sensors have various advantages as the basic devices of gas detection systems, such as high sensitivity, fast responsibility and low cost, etc. They are widely applied to many fields. Amplifier circuit is an important section of gas detection system. A new type of amplifier circuit including a three-stage operational amplifier was designed in the paper which can effectively eliminate the influence of the follow-up circuit on the sensor output. Theory analysis and experimental simulations were performed. The results show that the output voltage signals have a linear relation with the concentrations of the detected gas.

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Sauerwald, Tilman, Tobias Baur, Martin Leidinger, Wolfhard Reimringer, Laurent Spinelle, Michel Gerboles, Gertjan Kok, and Andreas Schütze. "Highly sensitive benzene detection with metal oxide semiconductor gas sensors – an inter-laboratory comparison." Journal of Sensors and Sensor Systems 7, no. 1 (April 5, 2018): 235–43. http://dx.doi.org/10.5194/jsss-7-235-2018.

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Abstract. For detection of benzene, a gas sensor system with metal oxide semiconductor (MOS) gas sensors using temperature-cycled operation (TCO) is presented. The system has been tested in two different laboratories at the concentration range from 0.5 up to 10 ppb. The system is equipped with three gas sensors and advanced temperature control and read-out electronics for the extraction of features from the TCO signals. A sensor model is used to describe the sensor response in dependence on the gas concentration. It is based on a linear differential surface reduction (DSR) at a low temperature phase, which is linked to an exponential growth of the sensor conductance. To compensate for cross interference to other gases, the DSR is measured at three different temperatures (200, 250, 300 ∘C) and the calculated features are put into a multilinear regression (partial least square regression – PLSR) for the quantification of benzene at both laboratories. In the tests with the first set-up, benzene was supplied in defined gas profiles in a continuous gas flow with variation of humidity and various interferents, e.g. toluene and carbon monoxide (CO). Depending on the gas background and interferents, the quantification accuracy is between ±0.2 and ±2 ppb. The second gas mixing system is based on a circulation of the carrier gas stream in a closed-loop control for the benzene concentration and other test gases based on continuously available reference measurements for benzene and other organic and inorganic compounds. In this system, a similar accuracy was achieved for low background contaminations and constant humidity; the benzene level could be quantified with an error of less than 0.5 ppb. The transfer of regression models for one laboratory to the other has been tested successfully.

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Šutka, Andris, and Kārlis A. Gross. "Spinel ferrite oxide semiconductor gas sensors." Sensors and Actuators B: Chemical 222 (January 2016): 95–105. http://dx.doi.org/10.1016/j.snb.2015.08.027.

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Guz, Łukasz. "Technical aspects of SAW gas sensors application in environmental measurements." MATEC Web of Conferences 252 (2019): 06007. http://dx.doi.org/10.1051/matecconf/201925206007.

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The development of semiconductor technology and computer methods allows for the improvements in air pollutions measurement techniques. Besides the traditional techniques of air pollution measurement such as chromatography or dynamic olfactometry, the electronic nose (EN) gains increasing attention in this area. EN is a device which imitates the human olfactory sense. The main component of the device is an array of many nonspecific gas sensors. In this article, the most frequently used types of gas sensors in scientific studies were shortly characterised as: metal oxide semiconductors (MOS), conducting polymers, quartz microbalances (QCM) and surface acoustic wave (SAW) sensors, and others. Both their advantages and disadvantages were summarised. Technical aspects of measurements using SAW gas sensors arrays were presented, as well as measurement circuits were described.

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Chang, Sheng-Po, Ren-Hao Yang, and Chih-Hung Lin. "Development of Indium Titanium Zinc Oxide Thin Films Used as Sensing Layer in Gas Sensor Applications." Coatings 11, no. 7 (July 3, 2021): 807. http://dx.doi.org/10.3390/coatings11070807.

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InTiZnO gas sensors with different oxygen ratios were fabricated by RF sputtering at room temperature. The sensing responses for five different gases, including ethanol, isopropanol (IPA), acetone (ACE), CO, and SO2, were reported. The InTiZnO gas sensor with the MSM (metal–semiconductor–metal) structure generated a higher sensing response when the O2/Ar ratio was increased to 10%. It also revealed high selectivity among these gases and good repeatability. Moreover, the UV light-activated InTiZnO gas sensors were also studied, which could reduce the operating temperature from 300 °C to 150 °C and did not seem to damage the sensing film, demonstrating long-term stability. The high response and selectivity revealed that InTiZnO thin films possess high potential to be applied in gas sensing technology.

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Qomaruddin, Cristian Fàbrega, Andreas Waag, Andris Šutka, Olga Casals, Hutomo Suryo Wasisto, and Joan Daniel Prades. "Visible Light Activated Room Temperature Gas Sensors Based on CaFe2O4 Nanopowders." Proceedings 2, no. 13 (December 4, 2018): 834. http://dx.doi.org/10.3390/proceedings2130834.

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Gas sensors based on CaFe2O4 nanopowders, which are p–type metal oxide semiconductor (MOX), have been fabricated and assessed for ethanol gas monitoring under visible light activation at room temperature. Regardless of their inferior sensitivity compared to thermally activated counterparts, the developed sensors have shown responsive sensing behavior towards ethanol vapors confirming the ability of using visible light for sensor activation. LEDs with different wavelengths (i.e., 465–590 nm) were employed. The highest sensitivity (3.7%) was reached using green LED activation that corresponds to the band gap of CaFe2O4.

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Lin, Tingting, Xin Lv, Zhineng Hu, Aoshu Xu, and Caihui Feng. "Semiconductor Metal Oxides as Chemoresistive Sensors for Detecting Volatile Organic Compounds." Sensors 19, no. 2 (January 9, 2019): 233. http://dx.doi.org/10.3390/s19020233.

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Volatile organic compounds (VOCs), which originate from painting, oil refining and vehicle exhaust emissions, are hazardous gases that have significant effects on air quality and human health. The detection of VOCs is of special importance to environmental safety. Among the various detection methods, chemoresistive semiconductor metal oxide gas sensors are considered to be the most promising technique due to their easy production, low cost and good portability. Sensitivity is an important parameter of gas sensors and is greatly affected by the microstructure, defects, catalyst, heterojunction and humidity. By adjusting the aforementioned factors, the sensitivity of gas sensors can be improved further. In this review, attention will be focused on how to improve the sensitivity of chemoresistive gas sensors towards certain common VOCs with respect to the five factors mentioned above.

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Sun, Dongjin, Yifan Luo, Marc Debliquy, and Chao Zhang. "Graphene-enhanced metal oxide gas sensors at room temperature: a review." Beilstein Journal of Nanotechnology 9 (November 9, 2018): 2832–44. http://dx.doi.org/10.3762/bjnano.9.264.

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Owing to the excellent sensitivity to gases, metal-oxide semiconductors (MOS) are widely used as materials for gas sensing. Usually, MOS gas sensors have some common shortages, such as relatively poor selectivity and high operating temperature. Graphene has drawn much attention as a gas sensing material in recent years because it can even work at room temperature, which reduces power consumption. However, the low sensitivity and long recovery time of the graphene-based sensors limit its further development. The combination of metal-oxide semiconductors and graphene may significantly improve the sensing performance, especially the selectivity and response/recovery rate at room temperature. In this review, we have summarized the latest progress of graphene/metal-oxide gas sensors for the detection of NO2, NH3, CO and some volatile organic compounds (VOCs) at room temperature. Meanwhile, the sensing performance and sensing mechanism of the sensors are discussed. The improved experimental schemes are raised and the critical research directions of graphene/metal-oxide sensors in the future are proposed.

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Khajavizadeh, Lida, Anita Lloyd Spetz, and Mike Andersson. "CO Detection Investigation at High Temperature by SiC MISFET Metal/Oxide Gas Sensors." Proceedings 56, no. 1 (January 21, 2021): 41. http://dx.doi.org/10.3390/proceedings2020056041.

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In order to investigate the necessary device improvements for high-temperature CO sensing with SiC metal insulator semiconductor field effect transistor (MISFET)-based chemical gas sensors, devices employing, as the gas-sensitive gate contact, a film of co-deposited Pt/Al2O3 instead of the commonly used catalytic metal-based contacts were fabricated and characterized for CO detection at elevated temperatures and different CO and O2 levels. It can be concluded that the sensing mechanism at elevated temperatures correlates with oxygen removal from the sensor surface rather than the surface CO coverage as observed at lower temperatures. The long-term stability performance was also shown to be improved compared to that of previously studied devices.

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Burgués, Javier, and Santiago Marco. "Low Power Operation of Temperature-Modulated Metal Oxide Semiconductor Gas Sensors." Sensors 18, no. 2 (January 25, 2018): 339. http://dx.doi.org/10.3390/s18020339.

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Yang, Bingxin, Nosang V. Myung, and Thien‐Toan Tran. "1D Metal Oxide Semiconductor Materials for Chemiresistive Gas Sensors: A Review." Advanced Electronic Materials 7, no. 9 (July 2, 2021): 2100271. http://dx.doi.org/10.1002/aelm.202100271.

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Schultealbert, Caroline, Johannes Amann, Tobias Baur, and Andreas Schütze. "Measuring Hydrogen in Indoor Air with a Selective Metal Oxide Semiconductor Sensor." Atmosphere 12, no. 3 (March 11, 2021): 366. http://dx.doi.org/10.3390/atmos12030366.

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Hydrogen is a ubiquitous but often neglected gas. In analytical measurements hydrogen—as a harmless gas—often is not considered so no studies on hydrogen in indoor air can be found. For metal oxide semiconductor (MOS) gas sensors that are increasingly pushed into the application as TVOC (total volatile organic compounds) sensors, hydrogen is a severe disturbance. On the other hand, hydrogen can be an intentional choice as indicator for human presence similar to carbon dioxide. We present a field-study on hydrogen in indoor air using selective MOS sensors accompanied by an analytical reference device for hydrogen with an accuracy of 10 ppb. Selectivity is achieved by siloxane treatment combined with temperature cycled operation and training with a complex lab calibration using randomized gas mixtures, yielding an uncertainty of 40–60 ppb. The feasibility is demonstrated by release tests with several gases inside a room and by comparison to the reference device. The results show that selective MOS sensors can function as cheap and available hydrogen detectors. Fluctuations in hydrogen concentration without human presence are measured over several days to gain insight in this highly relevant parameter for indoor air quality. The results indicate that the topic needs further attention and that the usage of hydrogen as indicator for human presence might be precluded by other sources and fluctuations.

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Graf, Markus, Diego Barrettino, Stefano Taschini, Christoph Hagleitner, Andreas Hierlemann, and Henry Baltes. "Metal Oxide-Based Monolithic Complementary Metal Oxide Semiconductor Gas Sensor Microsystem." Analytical Chemistry 76, no. 15 (August 2004): 4437–45. http://dx.doi.org/10.1021/ac035432h.

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Helwig, A., G. Müller, G. Sberveglieri, and M. Eickhoff. "On the Low-Temperature Response of Semiconductor Gas Sensors." Journal of Sensors 2009 (2009): 1–17. http://dx.doi.org/10.1155/2009/620720.

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The present paper compares three different kinds of semiconductor gas sensing materials: metal oxides (MOX), hydrogen-terminated diamond (HD), and hydrogenated amorphous silicon (a-Si:H). Whereas in MOX materials oxygen is the chemically reactive surface species, HD and a-Si:H are covalently bonded semiconductors with hydrogenterminated surfaces. We demonstrate that these dissimilar semiconductor materials exhibit the same kind of low-temperature gas response. This low-temperature response-mechanism is mediated by a thin layer of adsorbed water with the semiconductor materials themselves acting as pH sensors. In this adsorbate-limited state the gas sensitivity is limited to molecular species that can easily dissolve in and subsequently undergo electrolytic dissociation. At higher temperatures, where a closed layer of adsorbed water can no longer exist, the gas response is limited by direct molecule-semiconductor interactions. In this latter mode of operation, MOX gas sensors respond to adsorbed gases according to their different oxidising or reducing properties. Hydrogenated amorphous silicon (a-Si:H), on the other hand, exhibits a significantly different cross sensitivity profile, revealing that gas-surface interactions may largely be restricted to analyte molecules with lone-pair and electron-deficient three-centre orbitals.

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Han, Tae-Hee, So-Young Bak, Sangwoo Kim, Se Hyeong Lee, Ye-Ji Han, and Moonsuk Yi. "Decoration of CuO NWs Gas Sensor with ZnO NPs for Improving NO2 Sensing Characteristics." Sensors 21, no. 6 (March 17, 2021): 2103. http://dx.doi.org/10.3390/s21062103.

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This paper introduces a method for improving the sensitivity to NO2 gas of a p-type metal oxide semiconductor gas sensor. The gas sensor was fabricated using CuO nanowires (NWs) grown through thermal oxidation and decorated with ZnO nanoparticles (NPs) using a sol-gel method. The CuO gas sensor with a ZnO heterojunction exhibited better sensitivity to NO2 gas than the pristine CuO gas sensor. The heterojunction in CuO/ZnO gas sensors caused a decrease in the width of the hole accumulation layer (HAL) and an increase in the initial resistance. The possibility to influence the width of the HAL helped improve the NO2 sensing characteristics of the gas sensor. The growth morphology, atomic composition, and crystal structure of the gas sensors were analyzed using field-emission scanning electron microscopy (FE-SEM), energy-dispersive X-ray spectroscopy, and X-ray diffraction, respectively.

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Deorsola, Fabio A., P. Mossino, Ignazio Amato, Bruno DeBenedetti, A. Bonavita, G. Micali, and G. Neri. "Gas Sensing Properties of TiO₂ and SnO₂ Nanopowders Obtained through Gel Combustion." Advances in Science and Technology 45 (October 2006): 1828–33. http://dx.doi.org/10.4028/www.scientific.net/ast.45.1828.

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Nanostructured semiconductor metal oxides have played a central role in the gas sensing research field, because of their high sensitivity, selectivity and low response time. Among all the processes, developed for the synthesis of nanostructured metal oxides, gel combustion seems to be the most promising route due to low-cost precursors and simplicity of the process. It combines chemical gelation and combustion, involving the formation of a gel from an acqueous solution and an exothermic redox reaction, yielding to very porous and softly agglomerated nanopowders. In this work, nanostructured tin oxide, SnO2, and titanium oxide, TiO2, have been synthesized through gel combustion. Powders showed nanometric particle size and high specific surface area. The so-obtained TiO2 and SnO2 nanopowders have been used as sensitive element of resistive λ sensor and ethanol sensor respectively, realized depositing films of nanopowders dispersed in water onto alumina substrates provided with Pt contacts and heater. TiO2-based sensors showed at high temperature good response, fast response time, linearity in a wide range of O2 concentration and long-term stability. SnO2-based sensors have shown high sensitivity to low concentrations of ethanol at moderate temperature.

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Behzadi Pour, Ghobad, Leila Fekri Aval, and Parisa Esmaili. "Performance of gas nanosensor in 1-4 per cent hydrogen concentration." Sensor Review 39, no. 4 (July 15, 2019): 622–28. http://dx.doi.org/10.1108/sr-06-2018-0155.

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Purpose This study aims to investigate the fabrication of hydrogen gas sensor based on metal–oxide–semiconductor (MOS) microstructure. The palladium nanoparticles (PdNPs) as gate metal have been deposited on the oxide film using spin coating. Design/methodology/approach The PdNPs and the surface of oxide film were analyzed using Transmission electron microscopy. The capacitance-voltage (C-V) curves for the MOS sensor in 1, 2 and 4 per cent hydrogen concentration and in 100 KHz frequency at the room temperature were reported. Findings The response times for 1, 2 and 4 per cent hydrogen concentration were 2.5 s, 1.5 s and 1 s, respectively. The responses (R per cent) of MOS sensor to 1, 2 and 4 per cent hydrogen concentration were 42.8, 47.3 and 52.6 per cent, respectively. Originality/value The experimental results demonstrate that the MOS hydrogen gas sensor based on the PdNPs gate, shows the fast response and recovery compared to other hydrogen gas sensors based on the Pd.

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Noh, Jinhong, Soon-Hwan Kwon, Sunghoon Park, Kyoung-Kook Kim, and Yong-Jin Yoon. "TiO2 Nanorods and Pt Nanoparticles under a UV-LED for an NO2 Gas Sensor at Room Temperature." Sensors 21, no. 5 (March 5, 2021): 1826. http://dx.doi.org/10.3390/s21051826.

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Because the oxides of nitrogen (NOx) cause detrimental effects on not only the environment but humans, developing a high-performance NO2 gas sensor is a crucial issue for real-time monitoring. To this end, metal oxide semiconductors have been employed for sensor materials. Because in general, semiconductor-type gas sensors require a high working temperature, photoactivation has emerged as an alternative method for realizing the sensor working at room temperature. In this regard, titanium dioxide (TiO2) is a promising material for its photocatalytic ability with ultraviolet (UV) photonic energy. However, TiO2-based sensors inevitably encounter a problem of recombination of photogenerated electron-hole pairs, which occurs in a short time. To address this challenge, in this study, TiO2 nanorods (NRs) and Pt nanoparticles (NPs) under a UV-LED were used as an NO2 gas sensor to utilize the Schottky barrier formed at the TiO2-Pt junction, thereby capturing the photoactivated electrons by Pt NPs. The separation between the electron-hole pairs might be further enhanced by plasmonic effects. In addition, it is reported that annealing TiO2 NRs can achieve noteworthy improvements in sensing performance. Elucidation of the performance enhancement is suggested with the investigation of the X-ray diffraction patterns, which implies that the crystallinity was improved by the annealing process.

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Baur, Tobias, Johannes Amann, Caroline Schultealbert, and Andreas Schütze. "Field Study of Metal Oxide Semiconductor Gas Sensors in Temperature Cycled Operation for Selective VOC Monitoring in Indoor Air." Atmosphere 12, no. 5 (May 19, 2021): 647. http://dx.doi.org/10.3390/atmos12050647.

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More and more metal oxide semiconductor (MOS) gas sensors with digital interfaces are entering the market for indoor air quality (IAQ) monitoring. These sensors are intended to measure volatile organic compounds (VOCs) in indoor air, an important air quality factor. However, their standard operating mode often does not make full use of their true capabilities. More sophisticated operation modes, extensive calibration and advanced data evaluation can significantly improve VOC measurements and, furthermore, achieve selective measurements of single gases or at least types of VOCs. This study provides an overview of the potential and limits of MOS gas sensors for IAQ monitoring using temperature cycled operation (TCO), calibration with randomized exposure and data-based models trained with advanced machine learning. After lab calibration, a commercial digital gas sensor with four different gas-sensitive layers was tested in the field over several weeks. In addition to monitoring normal ambient air, release tests were performed with compounds that were included in the lab calibration, but also with additional VOCs. The tests were accompanied by different analytical systems (GC-MS with Tenax sampling, mobile GC-PID and GC-RCP). The results show quantitative agreement between analytical systems and the MOS gas sensor system. The study shows that MOS sensors are highly suitable for determining the overall VOC concentrations with high temporal resolution and, with some restrictions, also for selective measurements of individual components.

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Krivetskiy, Valeriy, Matvey Andreev, and Alexander Efitorov. "Selective Detection of Hydrocarbons in Real Atmospheric Conditions by Single MOX Sensor in Temperature Modulation Mode." Proceedings 14, no. 1 (June 19, 2019): 47. http://dx.doi.org/10.3390/proceedings2019014047.

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Selective detection of hydrocarbons – methane and propane – in urban air for industrial safety properties by single metal oxide semiconductor gas sensor has been demonstrated. As sensors were fabricated on the basis of nanocrystalline SnO2 and alumina micro-hotplates. Sensor working temperature modulation has been applied during raw sensor data collection. Pre-processing of acquired data – scaling, baseline extraction and exclusion of non-valid data points has been demonstrated to be critical procedures before application of machine learning algorithms. The achieved accuracy of 86% for correct gas identification in 40-200 ppm range has been demonstrated.

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Yu, Sujing, Dongzhi Zhang, Yu Zhang, Wenjing Pan, Benjamin Edem Meteku, Fangdu Zhang, and Jingbin Zeng. "Green light-driven enhanced ammonia sensing at room temperature based on seed-mediated growth of gold-ferrosoferric oxide dumbbell-like heteronanostructures." Nanoscale 12, no. 36 (2020): 18815–25. http://dx.doi.org/10.1039/d0nr05530a.

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Deluca, Marco, Robert Wimmer-Teubenbacher, Lisa Mitterhuber, Johanna Mader, Karl Rohracher, Marco Holzer, and Anton Köck. "In-Situ Temperature Measurement on CMOS Integrated Micro-Hotplates for Gas Sensing Devices." Sensors 19, no. 3 (February 7, 2019): 672. http://dx.doi.org/10.3390/s19030672.

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Metal oxide gas sensors generally need to be operated at elevated temperatures, up to and above 400 °C. Following the need for miniaturization of gas sensors and implementation into smart devices such as smartphones or wireless sensor nodes, recently complementary metal-oxide-semiconductor (CMOS) process-based micro electromechanical system (MEMS) platforms (micro-hotplates, µhps) have been developed to provide Joule heating of metal oxide sensing structures on the microscale. Heating precision and possible spatial temperature distributions over the µhp are key issues potentially affecting the performance of the overall gas sensor device. In this work, we use Raman spectroscopy to directly (in-situ and in-operando) measure the temperature of CMOS-based µhps during the application of electric current for Joule heating. By monitoring the position of the Raman mode of silicon and applying the theoretical framework of anharmonic phonon softening, we demonstrate that state-of-the-art µhps are able to reach the set temperature with an error below 10%, albeit with significant spatial temperature variations on the hotplate. This work demonstrates the potential of Raman spectroscopy for in-situ and in-operando temperature measurements on Si-based devices, an aspect of high relevance for micro- and nano-electronic device producers, opening new possibilities in process and device control.

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Qomaruddin, Qomaruddin, Olga Casals, Andris Šutka, Tony Granz, Andreas Waag, Hutomo Suryo Wasisto, Joan Daniel Prades, and Cristian Fàbrega. "Visible Light-Driven p-Type Semiconductor Gas Sensors Based on CaFe2O4 Nanoparticles." Sensors 20, no. 3 (February 5, 2020): 850. http://dx.doi.org/10.3390/s20030850.

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In this work, we present conductometric gas sensors based on p-type calcium iron oxide (CaFe2O4) nanoparticles. CaFe2O4 is a metal oxide (MOx) with a bandgap around 1.9 eV making it a suitable candidate for visible light-activated gas sensors. Our gas sensors were tested under a reducing gas (i.e., ethanol) by illuminating them with different light-emitting diode (LED) wavelengths (i.e., 465–640 nm). Regardless of their inferior response compared to the thermally activated counterparts, the developed sensors have shown their ability to detect ethanol down to 100 ppm in a reversible way and solely with the energy provided by an LED. The highest response was reached using a blue LED (465 nm) activation. Despite some responses found even in dark conditions, it was demonstrated that upon illumination the recovery after the ethanol exposure was improved, showing that the energy provided by the LEDs is sufficient to activate the desorption process between the ethanol and the CaFe2O4 surface.

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Journal articles on the topic 'Semiconductor metal oxide gas sensors'

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