Academic literature on the topic 'Sensitivity of piezoceramic sensors'

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Journal articles on the topic "Sensitivity of piezoceramic sensors"

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Okojie, Robert S., Roger D. Meredith, Clarence T. Chang, and Ender Savrun. "High Temperature Dynamic Pressure Measurements Using Silicon Carbide Pressure Sensors." Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT) 2014, HITEC (January 1, 2014): 000047–52. http://dx.doi.org/10.4071/hitec-ta25.

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Un-cooled, MEMS-based silicon carbide (SiC) static pressure sensors were used for the first time to measure pressure perturbations at temperatures as high as 600 °C during laboratory characterization, and subsequently evaluated in a combustor rig operated under various engine conditions to extract the frequencies that are associated with thermoacoustic instabilities. One SiC sensor was placed directly in the flow stream of the combustor rig while a benchmark commercial water-cooled piezoceramic dynamic pressure transducer was co-located axially but kept some distance away from the hot flow stream. In the combustor rig test, the SiC sensor detected thermoacoustic instabilities across a range of engine operating conditions, amplitude magnitude as low as 0.5 psi at 585 °C, in good agreement with the benchmark piezoceramic sensor. The SiC sensor experienced low signal to noise ratio at higher temperature, primarily due to the fact that it was a static sensor with low sensitivity.
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Ono, Kanji. "Rayleigh Wave Calibration of Acoustic Emission Sensors and Ultrasonic Transducers." Sensors 19, no. 14 (July 16, 2019): 3129. http://dx.doi.org/10.3390/s19143129.

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Acoustic emission (AE) sensors and ultrasonic transducers were characterized for the detection of Rayleigh waves (RW). Small aperture reference sensors were characterized first using the fracture of glass capillary tubes in combination with a theoretical displacement calculation, which utilized finite element method (FEM) and was verified by laser interferometer. For the calibration of 18 commercial sensors and two piezoceramic disks, a 90° angle beam transducer was used to generate RW pulses on an aluminum transfer block. By a substitution method, RW receiving sensitivity of a sensor under test was determined over the range of frequency from 22 kHz to 2 MHz. Results were compared to the sensitivities to normally incident waves (NW) and to other guided waves (GW). It was found that (1) NW sensitivities are always higher than RW sensitivities, (2) differences between NW and RW receiving sensitivities are dependent on frequency and sensor size, (3) most sensors show comparable RW and GW receiving sensitivities, especially those of commonly used AE sensors, and (4) the receiving sensitivities of small aperture (1 mm diameter) sensors behave differently from larger sensors.
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Zhao, Jinlei, Tengfei Bao, Shanying Chen, and Tribikram Kundu. "Smart Aggregate-Piezoceramic Patch Combination for Health Monitoring of Concrete Structures." Journal of Sensors 2016 (2016): 1–7. http://dx.doi.org/10.1155/2016/3270916.

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A new method combining an embedded smart aggregate and surface mounted piezoceramic patches is introduced for health monitoring of concrete structures. The smart aggregate is embedded in a concrete beam as an actuator (or transmitter), and piezoceramic patches are attached on the surface of the concrete beam as sensors. Two tests using the smart aggregate and the piezoceramic patches are conducted. The first test investigates the sensitivity of the recorded signal amplitude-frequency relation on the piezoceramic patches. To explain the significant amplitude fluctuations in the results, the possibility of resonance occurring in the piezoceramic patches in a certain frequency range is verified through finite element modeling. In the second test, a damage index is proposed to evaluate the health of concrete structures and a three-point bending test is conducted to induce damage in the concrete beam. It is observed that, with increasing severity of damage in the concrete beam, the recorded signal amplitude at the patches decreases gradually while the value of the damage index increases significantly. The experimental results show that the proposed method is an effective tool for health monitoring of concrete structures.
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Kulshreshtha, K., B. Jurgelucks, F. Bause, J. Rautenberg, and C. Unverzagt. "Increasing the sensitivity of electrical impedance to piezoelectric material parameters with non-uniform electrical excitation." Journal of Sensors and Sensor Systems 4, no. 1 (June 12, 2015): 217–27. http://dx.doi.org/10.5194/jsss-4-217-2015.

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Abstract. To increase the robustness and functionality of piezoceramic ultrasonic sensors, e.g. for flow, material concentration or non-destructive testing, their development is often supported by computer simulations. The results of such finite-element-based simulations are dependent on correct simulation parameters, especially the material data set of the modelled piezoceramic. In recent years several well-known methods for estimation of such parameters have been developed that require knowledge of the sensitivity of a measured behaviour of the material with respect to the parameter set. One such measurable quantity is the electrical impedance of the ceramic. Previous studies for radially symmetric sensors with holohedral electrode setups have shown that the impedance shows little or no sensitivity to certain parameters and simulations reflect this behaviour making parameter estimation difficult. In this paper we have used simulations with special ring-shaped electrode geometry and non-uniform electrical excitation in order to find electrode geometries, with which the computed impedance displays a higher sensitivity to the changes in the parameter set. We find that many such electrode geometries exist in simulations and formulate an optimisation problem to find the local maxima of the sensitivities. Such configurations can be used to conduct experiments and solve the parameter estimation problem more efficiently.
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Engel, A., A. Stemmer, M. Lezius, and U. Aebi. "Scanning sensor microscopy of biological membranes." Proceedings, annual meeting, Electron Microscopy Society of America 48, no. 3 (August 12, 1990): 108–9. http://dx.doi.org/10.1017/s042482010015808x.

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The attractive features of nm-sized sensors scanned over a surface by piezoceramic elements and kept in close contact by a servo system are their high spatial resolution and sensitivity as well as the possiblity to operate them in different environments. The first sensor ever used is a sharp metal tip which picks up a tunnel current iT when approached towards the surface of a conductor. As iT changes by an order of magnitude for a variation of the tunnel gap s by 0.1 nm, a precise control of s is possible and used in the scanning tunneling microscope (STM) to map surface topographies at atomic scale. The possibility to probe atomic dimensions in this way led to the development of the scanning force microscope (SFM) which determines the deflection of a flexible cantilever while scanned over a surface. Measuring this deflection by a light optical system then provided a SFM that can be operated in buffer solutions.
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Szewieczek, Artur, Christian Willberg, Daniel Schmidt, and Michael Sinapius. "Virtual sensors for SHM using isogeometric piezoelectric finite elements." International Journal of Structural Integrity 6, no. 6 (December 7, 2015): 704–13. http://dx.doi.org/10.1108/ijsi-11-2014-0064.

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Purpose – A design of sensor networks for structural health monitoring (SHM) with guided waves poses a hard challenge. Therefore different approaches are possible. A known one is the usage of probability of detection (POD) criteria. Here, areas of potential impact sensitivity are calculated for every sensor which leads to a POD. The number of sensors is increased until a demanded POD is reached. However, these calculations are usually based on finite element methods and underlie different assumptions and approximations which can cause different inaccuracies. These limitations are avoided by using an experimental data basis for virtual sensors in this paper. The paper aims to discuss these issues. Design/methodology/approach – An air-coupled ultrasound scanning technique is used for guided wave investigations. Recorded displacements of a structure surface are used as stimulation of virtual sensors which can be designed by software and positioned within available data field. For the calculation of sensor signals an isogeometric finite element model is used. The virtually bonded layer of the virtual piezoceramic sensor interpolates with non-uniform rational B-Splines (NURBS) the measured nodal data for each time step. This interpolation corresponds to a displacement boundary condition and is used to calculate the electrical potential at the free surface of the sensor. Findings – Experimental data based on air-coupled ultrasound scanning technique can be used for elimination of disadvantages in numerical simulations by developing sensor networks for SHM. In combination with a transfer matrix method (TM) a three-dimensional displacement of specimen surface for complex composites can be calculated. To obtain the sensor signal a surface-bonded sensor is modeled by an isogeometric finite element approach. A good accordance is found between calculated virtual sensor signal and its experimental verification. Research limitations/implications – Some deviations between calculated signal and its experimental verification are mainly justified by different spectral transfer functions between wave field scanning technique and signal recording of applied sensors. Furthermore, sensor influence on wave propagation is neglected in the presented method. Originality/value – In this paper, the principle of virtual sensors is applied on anisotropic multilayered lamina by using isogeometric finite elements for piezoelectric sensors. This enables any sensor dimension, layout and position on complex composites. Furthermore a bonding layer between specimen and sensor is considered. The method allows a detailed analysis of sensor behavior on a specimen surface and the design and optimization of entire sensor networks for SHM.
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Chrysochoidis, Nikolaos A., Antigoni K. Barouni, and Dimitris A. Saravanos. "Delamination detection in composites using wave modulation spectroscopy with a novel active nonlinear acousto-ultrasonic piezoelectric sensor." Journal of Intelligent Material Systems and Structures 22, no. 18 (December 2011): 2193–206. http://dx.doi.org/10.1177/1045389x11428363.

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A novel structural health monitoring (SHM) methodology, based on nonlinear wave modulation spectroscopy, is presented for the detection of delamination cracks in composites. The basic element is a novel active nonlinear acousto-ultrasonic piezoelectric sensor enabling low-cost and wide-frequency operational bandwidth. The active sensor configuration involves two piezoceramic wafer actuators, each one excited with a low- and high-frequency signal respectively, and a piezoceramic sensor, all permanently bonded on the tested structure. Experiments are conducted on two sets of composite strips containing delamination cracks of different sizes. Measured results illustrate first the efficiency of the nonlinear ultrasonics methodology to detect delamination cracks, as well as, the potential and benefits of the new active sensor. The sensitivity of the active sensor response to the crack size and the applied high-frequency carrier signals at the actuators, vary at various frequency and voltage levels indicating the appropriate testing setup. Additionally repeatability of proposed SHM methodology is studied.
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Hong, Yong, Gao Ping Wang, Seung Ho Hwang, Hyun Sik Kim, and Dong Pyo Hong. "Detection of Various Damages Based on Piezoceramic Optical Fiber Sensor." Key Engineering Materials 413-414 (June 2009): 367–72. http://dx.doi.org/10.4028/www.scientific.net/kem.413-414.367.

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A piezoelectric ultrasonic sensing system based on an optical fiber has been developed for detection of various damages. The ultrasonic wave generated from a piezoelectric actuator is guided and propagated in the optical fiber and then sensed by a piezoelectric sensor located at the other end of the fiber. The sensed signal can be influenced by environmental and physical changes around the optical fiber. In this study, the sensitivity of the optical fiber sensor is experimentally studied. Various patterns of damage, such as cracks, loosen bolts, holes, are more common forms in real structures. In particular, detection method of the damage with respect to various depths of the crack is presented in this paper.
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Sethi, V., MA Franchek, and G. Song. "Active multimodal vibration suppression of a flexible structure with piezoceramic sensor and actuator by using loop shaping." Journal of Vibration and Control 17, no. 13 (January 17, 2011): 1994–2006. http://dx.doi.org/10.1177/1077546310393440.

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This paper represents active multimodal vibration control of a flexible beam structure with piezoceramic (PZT) actuators and sensors using the loop shaping method. With surface-bonded PZT patch actuators and sensors, the flexible beam has both sensing and actuating capacities. Due to its flat auto spectrum in the specified frequency range, the Schroeder wave is used as an excitation signal for the non-parametric identification of the flexible beam structure. The identified open loop model is then used for the closed loop design by using the loop shaping method based on the extended sensitivity charts. A loop shaping compensator is designed to achieve multimodal vibration suppression. Numerical results showed a reduction of 8 decibels for the first mode and 12–14 decibels for the second and third modes. Experimental results closely match the simulation results. Furthermore, the results of loop shaping method are compared with those of the methods of linear quadratic regulator and pole-placement control, which are designed based on state space models via the parametric identification of the flexible beam. Comparisons show that the loop shaping method is easier to design since a parametric identification is not required and requires less control effort while maintaining the effectiveness in vibration suppression.
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Chang, Shun Hsyung, Igor Zhilyaev, Maria Shevtsova, Ping Chen Wu, Yuang Tung Cheng, and Jiing Kae Wu. "Structural Optimization of MEMS-Based Hydrophones with Perforated Active Membrane." Applied Mechanics and Materials 300-301 (February 2013): 597–603. http://dx.doi.org/10.4028/www.scientific.net/amm.300-301.597.

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This paper presents some results of finite element (FE) analysis performed for membrane-type piezoceramic transducer for underwater acoustics applications. We studied the miniaturized sensor with perforated holes in the active PZT membrane, intermediate, and protective plates. In this investigation an influence of the polyimide plate viscous damping, the membranes dimensions and the relative area of the perforated holes on the frequency response of sensitivity was studied for the broadening and flattening the operating frequency band. An optimization of these key parameters using the genetic algorithm working with the device’s FE model was demonstrated.
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Dissertations / Theses on the topic "Sensitivity of piezoceramic sensors"

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Majzner, Jiří. "Elektronický šum piezokeramických snímačů akustické emise." Doctoral thesis, Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií, 2008. http://www.nusl.cz/ntk/nusl-233423.

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In our work the analysis of electrical and noise characteristics of piezoceramic acoustic emission sensors is accomplished. The objective of our work is to analyze and optimize the signal-to-noise ratio. The starting point is the explanation of the noise origin in the acoustic emission sensors. The voltage fluctuation is caused by the dipole vibrations due to their interaction with phonons. The frequencies of dipoles vibrations have statistical distribution and the total energy of these vibrations is proportional to the temperature. The statistical distribution of vibration frequencies leads to the origination of the 1/f type noise spectral density. The interaction between the phonons and electric dipoles is characterized by the imaginary part of susceptibility which is related to the transformation of electric energy to the mechanical energy of vibrations. This process is irreversible and this forms important theoretical question whether the Callen-Welton fluctuation dissipation theorem could be used for the description of fluctuation processes in the acoustic emission sensors. In our work the influence of the real and imaginary part of the susceptibility on the noise and electrical characteristics is solved, the dissipation of electrical energy characterized by the imaginary part of susceptibility is described and the connection between the imaginary part of susceptibility and the noise power spectral density is discussed. Due to the fact that these processes originate in the interaction between electrical dipoles and phonons, we give account of the temperature dependencies of equivalent series resistance and power spectral density of noise voltage, respectively. Piezoceramics stiffness contribute significantly to the resonance creation hence the pressure influence on the sensor noise characteristics was studied. The signal-to-noise ration improvement requires the piezoceramic sample diameter increase for its constant thickness. The ratio of the noise spectral density and sensitivity is independent on the sample thickness. The noise voltage is proportional to the square root of spectral density and frequency bandwidth that is why for the high signal-to-noise ratio it is necessary to minimize the signal amplifier frequency bandwidth. The noise voltage power spectral density increases with the temperature while the activation energy is 20 meV for the temperature 300 K, and 80 meV for the temperature 400 K, respectively. The power spectral density of planar oscillations decreases with increasing pressure and simultaneously the resonant frequency increases. The bandwidth of the normalized spectral density increases with the pressure for the planar oscillations while is invariable for the thickness oscillations. For the examination of the influence of the piezoceramic electrical polarization on the electrical and noise characteristics the experimental study of these dependencies was accomplished for samples without polarization, and samples polarized by electric field EP = 500V/mm and 1000V/mm, respectively. The samples without polarization show the noise of 1/f type only which corresponds to the Callen-Welton fluctuation dissipation theorem. The polarization leads to the generation of planar and thickness oscillations and the power spectral density of voltage fluctuation on the electrodes is proportional to the temperature, and inversely proportional to the imaginary part of permittivity, to the sample area S, and the frequency f.
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Vaughan, Robert George. "Sensitivity of sensors for characterizing chaos." Thesis, Monterey, California. Naval Postgraduate School, 1991. http://hdl.handle.net/10945/28526.

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Approved for public release; distribution is unlimited.
Chaos describes a class of motions of a deterministic system whose time history is sensitive to initial conditions. Because of the sensitivity of initial conditions, the response of a dynamical system may result in instabilities. Hence, a study of nonlinear response of structures under the expected frequencies of excitation becomes important. Chaotic behavior, for example, may be found in the vibration response of large flexible space structures including trusses, booms, and radio antennas. Methods of quantifying chaos have been applied to flexible beams both analytically and experimentally. This research effort investigates the effects of sensors, strain gages and accelerometers, in studying chaotic motions. A long flexible beam is used to model the chaotic behavior, which is also mathematically modeled as Duffing's Equation. Time histories are recorded and analyzed using pseudo-phase space, Fourier spectrums, Poincare sections, Lyapunov exponents and fractal correlation dimensions. Comparison of the two sensors is also performed.
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Fogg, Brian Russell. "Weighted sensitivity optical fiber sensors : theory and applications /." Thesis, This resource online, 1992. http://scholar.lib.vt.edu/theses/available/etd-10102009-020314/.

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Huber, Lindenberger Samuel [Verfasser], and Oliver [Akademischer Betreuer] Paul. "Active stabilization of the magnetic sensitivity in CMOS Hall sensors." Freiburg : Universität, 2017. http://d-nb.info/1129080196/34.

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Turnbull, Ross G. "Sensitivity enhancement in micro-electromechanical systems for sensor applications." Thesis, University of Oxford, 2010. http://ora.ox.ac.uk/objects/uuid:6d863c2f-532f-40fc-b34a-0f877225c8bc.

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Micro-mechanical sensors are typically fabricated both in large numbers and economically using the photolithographic processes that were originally developed in the integrated circuit industry. The magnitude of a change in resonant frequency of a micro-me chanical structure can be used to quantify a change in mass of such a device. Hence, when packaged with integrated measurement, actuation and control electronics, it is possible to deliver a low-cost and small system in a package using fabrication techniq ues that are both mature and widely available. A micro-mechanical resonator has been designed for this project and samples of the prototype resonator were used to investigate various methods for detecting a change in resonant frequency using discrete elec tronic components. The system that has been designed can eventually be integrated with a small micro-mechanical structure to create a mass sensor. Resonators have been fabricated at QinetiQ as part of the Europractice Foundry Access Program and characteri sation of typical devices is described in this thesis. A popular method for controlling the behaviour of resonant micro-mechanical sensors is a force feedback technique designed to increase the effective quality factor of the resonant system. In this thesis, an increase in the effective quality factor of the prototype system has been demonstrated. When the resonator operates in air at atmospheric pressure, an improvement in the effective quality factor of two orders of magnitude was achievable. This meant that it was possible to assess the potential benefits offered by the force feedback technique by testing the various detection schemes that have been implemented at the natural quality factor and also at a high effective quality factor. A prototype control system has been built using simple digital electroni cs, a key component of which is a direct digital frequency synthesis chip used to provide a stable and accurate driving frequency. Methods for determining a change in the resonant frequency of a micro-mechanical resonator using this control system have be en investigated. A method has been developed for determining the magnitude of a shift in resonance when the frequency of the excitation force is fixed. This thesis contains a description of the technique and also results demonstrating the corresponding de tection capability of the prototype sensor.
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Thomas, M. D. "Investigation into the factors controlling the sensitivity of oxygen optical sensors." Thesis, Swansea University, 1998. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.639196.

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The main objective of this thesis is to establish the main factors which control the sensitivity of thin-film oxygen optical sensors. In Chapter 1 the main sensing principles and the main classes of oxygen-sensitive lumophores are described. Numerous examples are given describing the major developments in oxygen sensors. Finally, research areas of interest are outlined. Chapter 2 describes the experimental methods and the chemicals used in this work. In Chapter 3 the incorporation of the lumophore tris (4,7-diphenyl-1,10-phenanthroline) ruthenium (II) ditetraphenylborate, [Ru(dpp)32+ (Ph4B-)2], in different polymer-plasticizer matrices is described. The sensitivity of the sensor depends upon the nature of the polymer matrix and plasticizer. A detailed study of a highly plasticized system utilising the polymer poly(methyl methancrylate), PMMA, is reported. In Chapter 4, the properties of two highly plasticized oxygen sensors are investigated using [Ru(dpp)32+ (Ph4B-)2], and dichlorobis (4,7-diphenyl-1, 10-phenanthroline) iridium (III) tetraphenylborate, [Ir(dpp)2Cl2+ (Ph4B-)] in the most sensitive polymer and plasticizer combination reported in Chapter 3, i.e. cellulose acetate butyrate polymer-tri-n-butyl phosphate plasticizer (CAB-TBP). In Chapter 5 the oxygen quenching and natural lifetime of tris (2,2'-bipyridyl) ruthenium (II) ditetraphenylborate, [Ru(bpy)32+(Ph4B-)2], is studied in a variety of neat plasticizers, in unplasticized and TBP plasticized CAB and PMMA oxygen sensors. The compatibility of the polymer and plasticizer is considered in relation to the oxygen sensitivity of the sensors. In Chapter 6, a pyrene lumophore is used as a polarity probe and as an oxygen sensor. The polarity of the encapsulating medium and the sensitivity of the sensors is studied. Reasons for the lack of correlation between the increase in sensitivity and the polarity of the encapsulating medium, measured using pyrene as the probe, are discussed.
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Zhao, Yue. "Low-Photoluminescence Hollow Waveguide Platforms for High-sensitivity Integrated Optical Sensors." BYU ScholarsArchive, 2012. https://scholarsarchive.byu.edu/etd/2978.

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This dissertation presents research on the fabrication of optofluidic sensor platforms, which consist of integrated hollow waveguides and solid waveguides. Antiresonant reflecting optical waveguides (ARROWs) filled with liquids or gases, can be used for high-sensitivity sensing in applications of biotechnology, chemical synthesis, and analytical chemistry. The fabrication method developed for integrated ARROW sensing platforms utilizes standard microfabrication processes and materials. Dielectric cladding layers are deposited on a silicon wafer using plasma-enhanced chemical vapor deposition (PECVD) or sputtering. A sacrificial material is then patterned over the bottom cladding layers by photolithography. Additional dielectric layers are deposited around the core, forming the structure of the waveguides. Integrated solid-core waveguides can be easily created by etching a ridge into the topmost dielectric cladding layer. The hollow core waveguides are then formed by wet etching the sacrificial core material. The coupling efficiency between solid core and hollow core waveguides is extremely important for the platform's overall sensitivity. Efficiencies can be enhanced from 18% to 67% by adjusting the thickness of the thick top oxide. Experimental results prove that optical throughput was improved by 17.1× with this improved interface transmission. Sputtered films were investigated as an alternative to for producing cladding layers. The experimental results reveal that sputtered layers show poor adhesion and mechanical strength which make them unreliable for hollow waveguides with small dimension. High-sensitivity ARROW platforms were obtained by employing hybrid layers (PECVD SiO2 and sputtered Ta2O5) as claddings and building waveguides on self-aligned pedestals. The photolumiscence background was only 1/10 that of previous devices made with SiO2/SiN and the average signal-to-noise ratio was improved by 12×.
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Babinet, Cyril. "Next generation of current sensors for aeronautics preliminary designs /." Thesis, Atlanta, Ga. : Georgia Institute of Technology, 2008. http://hdl.handle.net/1853/29709.

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Thesis (M. S.)--Mechanical Engineering, Georgia Institute of Technology, 2008.
Committee Co-Chair: Dr. Jianmin Qu; Committee Co-Chair: Dr. Mohammed Cherkaoui; Committee Member: Dr. Christophe Giraud-Audine; Committee Member: Dr. Nico Declercq. Part of the SMARTech Electronic Thesis and Dissertation Collection.
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Ma, Ning. "CHARACTERIZATION OF CARBON NANOTUBES BASED RESISTIVE AND CAPACITIVE GAS SENSORS." UKnowledge, 2007. http://uknowledge.uky.edu/gradschool_diss/558.

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A preliminary gas detection study was conducted on as-grown multi-walled carbon nanotubes and anodized aluminum oxide (MWNTs/AAO) template. The material demonstrated room temperature gas sensitivity and p-type semiconductor characteristics. Plasma-etched MWNTs/AAO templates were employed to construct capacitive gas sensors. The capacitances of the sensors were sensitive to both reducing and oxidizing gases at room temperature. Single-walled carbon nanotubes (SWNTs) dispersed in binder andamp;aacute;-terpineol were applied on sensor platforms to form resistive gas sensors. The sensors demonstrated excellent sensitivity to low concentrations of reducing and oxidizing gases at room temperature, which suggests the p-type semiconducting behavior of SWNTs. The sensor recovery was found to be incomplete at room temperature in flow of nitrogen and air, thus possible solutions were investigated to enhance sensor performance. The sensor operating principles and suggestions for possible future work are discussed. The room temperature and air background functionality of the sensor suggest that SWNT is a promising gas sensing material for application in ambient conditions.
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Anderås, Emil. "Advanced MEMS Pressure Sensors Operating in Fluids." Doctoral thesis, Uppsala universitet, Fasta tillståndets elektronik, 2012. http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-173182.

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Today’s MEMS technology allows manufacturing of miniaturized, low power sensors that sometimes exceeds the performance of conventional sensors. The pressure sensor market today is dominated by MEMS pressure sensors. In this thesis two different pressure sensor techniques are studied. The first concerns ways to improve the sensitivity in the most commonly occurring pressure sensor, namely such based on the piezoresistive technique. Since the giant piezoresistive effect was observed in silicon nanowires, it was assumed that a similar effect could be expected in nano-thin silicon films. However, it turned out that the conductivity was extremely sensitive to substrate bias and could therefore be controlled by varying the backside potential. Another important parameter was the resistivity time drift. Long time measurements showed a drastic variation in the resistance. Not even after several hours of measurement was steady state reached. The drift is explained by hole injection into the buried oxide as well as existence of mobile charges. The piezoresistive effect was studied and shown to be of the same magnitude as in bulk silicon. Later research has shown the existence of such an effect where the film thickness has to be less than around 20 nm.  The second area that has been studied is the pressure sensitivity of in acoustic resonators. Aluminium nitride thin film plate acoustic resonators (FPAR) operating at the lowest-order symmetric (S0), the first-order asymmetric (A1) as well as the first-order symmetric (S1) Lamb modes have been theoretically and experimentally studied in a comparative manner. The S0 Lamb mode is identified as the most pressure sensitive FPAR mode. The theoretical predictions were found to be in good agreement with the experiments. Additionally, the Lamb modes have been tested for their sensitivities to mass loading and their ability to operate in liquids, where the S0 mode showed good results. Finally, the pressure sensitivity in aluminium nitride thin film bulk wave resonators employing c- and tilted c-axis texture has been studied. The c-axis tilted FBAR demonstrates a substantially higher pressure sensitivity compared to its c-axis oriented counterpart.
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Books on the topic "Sensitivity of piezoceramic sensors"

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Sharapov, Valeriy. Piezoceramic Sensors. Berlin, Heidelberg: Springer Berlin Heidelberg, 2011. http://dx.doi.org/10.1007/978-3-642-15311-2.

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Piezoceramic sensors. Heidelberg: Springer, 2011.

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Williams, Martin Allen. 0-3 piezoceramic-polymer composites for hydrostatic sensors. Manchester: University of Manchester, 1994.

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Vaughan, Robert George. Sensitivity of sensors for characterizing chaos. Monterey, Calif: Naval Postgraduate School, 1991.

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Sharapov, Valeriy. Piezoceramic Sensors. Springer, 2011.

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A, Murphy K., and United States. National Aeronautics and Space Administration., eds. Single mode variable-sensitivity fiber optic sensors. [Washington, DC: National Aeronautics and Space Administration, 1992.

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A, Murphy K., and United States. National Aeronautics and Space Administration., eds. Single mode variable-sensitivity fiber optic sensors. [Washington, DC: National Aeronautics and Space Administration, 1992.

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A, Murphy K., and United States. National Aeronautics and Space Administration., eds. Single mode variable-sensitivity fiber optic sensors. [Washington, DC: National Aeronautics and Space Administration, 1992.

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Brock, Fred V., and Scott J. Richardson. Meteorological Measurement Systems. Oxford University Press, 2001. http://dx.doi.org/10.1093/oso/9780195134513.001.0001.

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This book treats instrumentation used in meteorological surface systems, both on the synoptic scale and the mesoscale, and the instrumentation used in upper air soundings. The text includes material on first- and second-order differential equations as applied to instrument dynamic performance, and required solutions are developed. Sensor physics are emphasized in order to explain how sensors work and to explore the strengths and weaknesses of each design type. The book is organized according to sensor type and function (temperature, humidity, and wind sensors, for example), though several unifying themes are developed for each sensor. Functional diagrams are used to portray sensors as a set of logical functions, and static sensitivity is derived from a sensor's transfer equation, focusing attention on sensor physics and on ways in which particular designs might be improved. Sensor performance specifications are explored, helping to compare various instruments and to tell users what to expect as a reasonable level of performance. Finally, the text examines the critical area of environmental exposure of instruments. In a well-designed, properly installed, and well-maintained meteorological measurement system, exposure problems are usually the largest source of error, making this chapter one of the most useful sections of the book.
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Book chapters on the topic "Sensitivity of piezoceramic sensors"

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Sharapov, Valeriy. "Piezoceramic Accelerometers." In Piezoceramic Sensors, 381–408. Berlin, Heidelberg: Springer Berlin Heidelberg, 2011. http://dx.doi.org/10.1007/978-3-642-15311-2_13.

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Sharapov, Valeriy. "Piezomagnetic Sensors." In Piezoceramic Sensors, 253–87. Berlin, Heidelberg: Springer Berlin Heidelberg, 2011. http://dx.doi.org/10.1007/978-3-642-15311-2_8.

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Sharapov, Valeriy. "General Information About Piezoelectric Sensors." In Piezoceramic Sensors, 1–24. Berlin, Heidelberg: Springer Berlin Heidelberg, 2011. http://dx.doi.org/10.1007/978-3-642-15311-2_1.

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Sharapov, Valeriy. "Transducers with Non-destructive Control." In Piezoceramic Sensors, 317–32. Berlin, Heidelberg: Springer Berlin Heidelberg, 2011. http://dx.doi.org/10.1007/978-3-642-15311-2_10.

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Sharapov, Valeriy. "Sensors of Korotkoff Sounds." In Piezoceramic Sensors, 333–56. Berlin, Heidelberg: Springer Berlin Heidelberg, 2011. http://dx.doi.org/10.1007/978-3-642-15311-2_11.

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Sharapov, Valeriy. "Electro-acoustic Transducers." In Piezoceramic Sensors, 357–80. Berlin, Heidelberg: Springer Berlin Heidelberg, 2011. http://dx.doi.org/10.1007/978-3-642-15311-2_12.

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Sharapov, Valeriy. "Resonant Piezoceramic Sensors." In Piezoceramic Sensors, 409–51. Berlin, Heidelberg: Springer Berlin Heidelberg, 2011. http://dx.doi.org/10.1007/978-3-642-15311-2_14.

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Sharapov, Valeriy. "Sensors with Piezoelements in Scheme Electric Filters." In Piezoceramic Sensors, 453–69. Berlin, Heidelberg: Springer Berlin Heidelberg, 2011. http://dx.doi.org/10.1007/978-3-642-15311-2_15.

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Sharapov, Valeriy. "Piezoceramic Scanners for Probe Nanomicroscopes." In Piezoceramic Sensors, 471–89. Berlin, Heidelberg: Springer Berlin Heidelberg, 2011. http://dx.doi.org/10.1007/978-3-642-15311-2_16.

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Sharapov, Valeriy. "Monomorph Piezoceramic Elements." In Piezoceramic Sensors, 25–69. Berlin, Heidelberg: Springer Berlin Heidelberg, 2011. http://dx.doi.org/10.1007/978-3-642-15311-2_2.

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Conference papers on the topic "Sensitivity of piezoceramic sensors"

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Hong, Jin-Seok, Kihong Shin, Choong-Hwi Lee, and Jae-Eung Oh. "Active Control of Radiated Sound From a Vibrating Plate." In ASME 2001 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference. American Society of Mechanical Engineers, 2001. http://dx.doi.org/10.1115/detc2001/vib-21481.

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Abstract In this paper, an experimental study is described for active control of radiation sound from a vibrating plate under a harmonic excitation at a specific point. Two piezoceramic actuators are used to provide control inputs to the structure. The notion of control sensitivity of the plate bending moment is introduced to find the locations of piezoceramic actuators. Each piezoceramic actuator is located at the position that has the largest control sensitivity in order to maximize the control performance. The measurement sensors are two accelerometers whose outputs are processed through an array of linear filters. The impulse response of each filter is constructed from the vibro-acoustic path transfer function by accelerometers and microphones. The active structural acoustic control system is designed to estimate and reduce the radiated sound pressure on the basis of this transfer function. A 2 by 2 Filtered-x LMS algorithm is used, and is implemented on a TMS320C30 DSP board for the real-time control.
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Fan, Zhaoyan, Robert X. Gao, and David O. Kazmer. "Design and Evaluation of a Modulator Circuit for a Self-Energized Wireless Sensor." In ASME 2008 International Mechanical Engineering Congress and Exposition. ASMEDC, 2008. http://dx.doi.org/10.1115/imece2008-67848.

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This paper presents the design, simulation, and experimental verification of an electronic modulator circuit, which is a critical functional component for an acoustic wireless sensor that can simultaneously measure temperature and pressure within an injection mold. Through a stack of piezoceramic rings, the sensor is powered by energy harvested from the mold pressure differential. Based on the concept of nonlinear network theory, the amount of energy for pressure and temperature modulation is quantitatively defined by calculating the current and voltage thresholds of the modulator circuit. Results from the analytical model have shown that by optimizing the parameters of the circuit, the sensor can be properly powered by energy harvested from the molding process for data acquisition and transmission. The simulation result was then experimentally verified using a prototyped circuit. Pressure measurement resolution of 0.12% of the full scale (100 MPa) and temperature sensitivity of 4.8 kHz/°C were obtained from the experiments.
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Shevtsov, Sergey, Shun-Hsyung (Stephen) Chang, Valery Kalinchuk, Igor Zhilyaev, and Maria Shevtsova. "Multiobjective Pareto-Based Optimization of pMUT Hydrophone With Piezoelectric Active Diaphragm." In ASME 2014 12th Biennial Conference on Engineering Systems Design and Analysis. American Society of Mechanical Engineers, 2014. http://dx.doi.org/10.1115/esda2014-20281.

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The design of high-sensitive hydrophones is one of the research interests in underwater acoustics. Due to progress of micro- and nanotechnology the most attention of researchers is attracted by the transducers that use the micro-electromechanical system (MEMS) concept. Piezoelectric micro-machined ultrasonic transducers (pMUTs) present a new approach to sound detection and generation that can overcome the shortcomings of conventional transducers. For accurate ultrasound field measurement, small size hydrophones which are smaller than the acoustic wavelength are required for providing an omnidirectional response and avoid spatial averaging. This paper presents some results of multiobjective optimization for membrane-type piezoceramic MEMS based transducers. We investigate the miniaturized membrane-type sensor with perforated holes in the active PZT and intermediate membranes, with the protective plates and a vacuum chamber. An influence of the protective plate elastic and viscous properties, the dimensions and the relative area of the perforated holes on the sensitivity’s frequency response of the hydrophone was studied for the broadening and equalizes the operating frequency band. We optimize these key parameters using the Pareto approach with the finite element (FE) model of coupled piezoelectric-acoustic problem. Finally, the set of optimized hydrophone structures and some examples of obtained sensitivity frequency response are demonstrated.
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Yoo, JinHyeong, James B. Restorff, and Marilyn Wun-Fogle. "Non-Contact Tension Sensing Using Fe-Ga Alloy Strip." In ASME 2015 Conference on Smart Materials, Adaptive Structures and Intelligent Systems. American Society of Mechanical Engineers, 2015. http://dx.doi.org/10.1115/smasis2015-8909.

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This paper describes a proof-of-concept non-contact strain sensor, using a magnetostrictive Fe-Ga alloy (Galfenol). Magnetostrictive materials demonstrate dimensional changes in response to a magnetic field. In contrast with typical piezoceramic materials, Galfenol is the most ductile of the current transduction materials and appears to have an excellent ability to withstand mechanical shock and tension. Galfenol also exhibits the inverse (Villari) effect: both the magnetization and permeability change in response to an applied stress. Galfenol has low hysteresis loses, less than ∼10% of its transduction potential over a range of −20 to +80 °C. The magnetization’s response to stress depends strongly on both magnetic field bias and alloy composition. Galfenol’s Villari effect can be used in various sensor configurations together with either a giant magnetoresistance (GMR) sensor, Hall Effect sensor or pickup coil to sense the magnetization / permeability changes in Galfenol when stressed. The sensor described in this paper utilizes the permeability change, which is not time dependent and can measure static loads. The design reported here targets low force, low frequency applications, such as inclination measurements and stress monitoring. The sensor was able to measure both static and dynamic stress. The static sensitivity was +3.64 Oe/kN for the Hall sensor close to the bias magnet and −1.49 Oe/kN for the Hall sensor at the other end of the Galfenol strip. We conclude that a Galfenol strain sensor is a viable candidate for bolt stress monitoring in critical applications.
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Conrad, David, and Andrei Zagrai. "Active Detection of Structural Damage in Aluminum Alloy Using Magneto-Elastic Active Sensors (MEAS)." In ASME 2011 Conference on Smart Materials, Adaptive Structures and Intelligent Systems. ASMEDC, 2011. http://dx.doi.org/10.1115/smasis2011-5219.

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Many structural damage detection methods utilize piezoelectric sensors. While these sensors are efficient in supporting many structural health monitoring (SHM) methodologies, there are a few key disadvantages limiting their use. The disadvantages include the brittle nature of piezoceramics and their dependence of diagnostic results on the quality of the adhesive used in bonding the sensors. One viable alternative is the utilization of Magneto-Elastic Active Sensors (MEAS). Instead of mechanically creating elastic waves, MEAS induce eddy currents in the host structure which, along with an applied magnetic field, generate mechanical waves via the Lorentz force interaction. Since elastic waves are generated electromagnetically, MEAS do not require direct bonding to the host structure and its elements are not as fragile as PWAS. This work explores the capability of MEAS to detect damage in aluminum alloy. In particular, methodologies of detecting fatigue cracks in thin plates were explored. Specimens consisted of two identical aluminum plates featuring a machined slot to create a stress riser for crack formation. One specimen was subjected to cyclic fatigue load. MEAS were used to transmit elastic waves of different characteristics in order to explore several SHM methodologies. Experiments have shown that the introduction of fatigue cracks created measurable amplitude changes in the waves passing through the fatigued region of the aluminum plate. The phase indicated sensitivity to load conditions, but manifestation in the cracked region lacked stability. Nonlinear effects were studied using plate thickness resonance, which revealed birefringence due to local stresses at the site of the fatigue crack. The resonance spectrum has also shown a frequency decrease apparently due to stiffness loss. Preliminary results suggest opportunities for fatigue damage detection using MEAS. Application of MEAS for the diagnosis of complex structures is currently being investigated.
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Rupitsch, Stefan J. "Simulation-based characterization of piezoceramic materials." In 2016 IEEE SENSORS. IEEE, 2016. http://dx.doi.org/10.1109/icsens.2016.7808757.

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Hanagud, S., C. C. Won, and M. W. Obal. "Optimal Placement of Piezoceramic Sensors and Actuators." In 1988 American Control Conference. IEEE, 1988. http://dx.doi.org/10.23919/acc.1988.4790034.

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SUNG, CHIA-CHI, VASUNDARA VARADAN, XIAO-QI BAO, and VIJAY VARADAN. "Active control of torsional vibration using piezoceramic sensors andactuators." In 31st Structures, Structural Dynamics and Materials Conference. Reston, Virigina: American Institute of Aeronautics and Astronautics, 1990. http://dx.doi.org/10.2514/6.1990-1130.

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Gall, Monika, and Bärbel Thielicke. "Life-span investigations of piezoceramic patch sensors and actuators." In The 14th International Symposium on: Smart Structures and Materials & Nondestructive Evaluation and Health Monitoring, edited by Marcelo J. Dapino. SPIE, 2007. http://dx.doi.org/10.1117/12.714756.

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Newbury, Kenneth, and Donald Leo. "Structural dynamics of stiffened plates with piezoceramic sensors and actuators." In 41st Structures, Structural Dynamics, and Materials Conference and Exhibit. Reston, Virigina: American Institute of Aeronautics and Astronautics, 2000. http://dx.doi.org/10.2514/6.2000-1496.

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Reports on the topic "Sensitivity of piezoceramic sensors"

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Liou, Sy-Hwang. Magnetic Sensors with Picotesla Magnetic Field Sensitivity at Room Temperature. Fort Belvoir, VA: Defense Technical Information Center, June 2008. http://dx.doi.org/10.21236/ada495594.

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Liou, Sy-Hwang, and Yongming Zhang. High Sensitivity Magnetoresisitive Sensors for both DC and EMI Magnetic Field Mapping. Fort Belvoir, VA: Defense Technical Information Center, May 2012. http://dx.doi.org/10.21236/ada571859.

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Poje, A. C. Optimal Deployment of Drifting Acoustic Sensors: Sensitivity of Lagrangian Coherent Structure Boundaries to Model Uncertainty. Fort Belvoir, VA: Defense Technical Information Center, September 2006. http://dx.doi.org/10.21236/ada613108.

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Poje, A. C. Optimal Deployment of Drifting Acoustic Sensors: Sensitivity of Lagrangian Coherent Structure Boundaries to Model Uncertainty. Fort Belvoir, VA: Defense Technical Information Center, September 2007. http://dx.doi.org/10.21236/ada573214.

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