Relevant bibliographies by topics / Sensor microsystems

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  1. Journal articles
  2. Dissertations / Theses
  3. Books
  4. Book chapters
  5. Conference papers
  6. Reports

Academic literature on the topic 'Sensor microsystems'

Author: Grafiati
Published: 4 June 2021
Last updated: 3 February 2022

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Journal articles on the topic "Sensor microsystems"

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Popovic, R. S., and J. A. Flanagan. "Sensor microsystems." Microelectronics Reliability 37, no. 9 (September 1997): 1401–9. http://dx.doi.org/10.1016/s0026-2714(97)00012-7.

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MOKWA, WILFRIED. "ADVANCED SENSORS AND MICROSYSTEMS ON SOI." International Journal of High Speed Electronics and Systems 10, no. 01 (March 2000): 147–53. http://dx.doi.org/10.1142/s0129156400000180.

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In the recent decade microsystem technologies (MST) have become a very important field. A lot of miniaturized sensors and microsystems based on silicon technologies have been developed and are in production now. Airbag control for example is mostly based on silicon acceleration sensors. Besides the existing products new products are emerging like drug delivery systems, labs on chip for DNA-analysis or electronic noses. Using SOI new sensor and actuator concepts have become possible. Dielectric insulation offers new possibilities concerning mechanical, thermal or electrical behavior. Microsensors for high temperature application including CMOS electronics are under development. This paper concentrates on SOI with silicon dioxide as insulating material. It will give examples of sensing and actuating devices based on SIMOX and on bonded wafer technology. In addition an example of a more complex microsystem, a retina implant system, will be given.
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Esashi, Masayoshi, and Shuji Tanaka. "Integrated Microsystems." Advances in Science and Technology 81 (September 2012): 55–64. http://dx.doi.org/10.4028/www.scientific.net/ast.81.55.

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Technology called MEMS (Micro Electro Mechanical Systems) or microsystems are heterogeneous integration on silicon chips and play important roles as sensors. MEMS as switches and resonators fabricated on LSI are needed for future multi-band wireless systems. MEMS for safety systems as event driven tactile sensor network for nursing robot are developed. Wafer level packaging for MEMS and open collaboration to reduce the cost for the development are discussed.
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Reutskaya, O. G., and Y. M. Pleskachevsky. "MEASUREMENT OF CO AND NO2 GAS CONCENTRATION'S BY MULTISENSOR MICROSYSTEM IN THE MODE OF PULSE HEATING." Devices and Methods of Measurements 8, no. 2 (June 9, 2017): 160–67. http://dx.doi.org/10.21122/2220-9506-2017-8-2-160-167.

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The most promising for mass use in gas analysis equipment are semiconductor gas sensors due to their high reliability, easy operation and relatively low cost. Power consumption in the single-sensor mode, constant heating is from 250 to 600 W average and in pulsed mode heating – ≤ 20 W. The aim of this work was to study the effectiveness of the pulsed heating for multisensor microsystems consisting of two sensors on the substrate of the nanostructured aluminum oxide, compared with the mode of constant heating.For sensitive layers were chosen compositions: SnO2+Pt+Pd at the first sensor of the microsystem and In2O3+Al2O3+Pt on the second. Measuring the sensor response in the pulse heating mode was carried out as follows. Power on each sensor microsystem was installed 1.3 mW. Then the short-term heating (theat.. = 5 s) was performed at the power 61 mW. The detected gases CO and NO2 with the concentration 200 ppm and 4 ppm, correspondingly, were submitted to the microsystem after 15 minutes. The resistance values for each of the sensor were fixed. According to the results determine the sensitivity (sensor response) the maximum value is after 60 s for the sensor with a sensing layer SnO2+Pt+Pd when exposed to CO was 670 %, and for the sensor with In2O3+Al2O3+Pt – 380 %.Advantages of using pulsed heating from the point of view of a power consumption multisensor microsystem mW-range and high performance sensors on substrates of nanostructured alumina were established.
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Peterson, K. A., K. D. Patel, C. K. Ho, B. R. Rohrer, C. D. Nordquist, B. D. Wroblewski, and K. B. Pfeifer. "LTCC Microsystems and Microsystem Packaging and Integration Applications." Journal of Microelectronics and Electronic Packaging 3, no. 3 (July 1, 2006): 109–20. http://dx.doi.org/10.4071/1551-4897-3.3.109.

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Low Temperature Cofired Ceramic (LTCC) has proven to be an enabling medium for microsystem technologies, because of its desirable electrical, physical, and chemical properties coupled with its capability for rapid prototyping and scalable manufacturing of components. LTCC is viewed as an extension of hybrid microcircuits, and in that function it enables development, testing, and deployment of silicon microsystems. However, its versatility has allowed it to succeed as a microsystem medium in its own right, with applications in non-microelectronic meso-scale devices and in a range of sensor devices. Applications include silicon microfluidic ‘chip-and-wire’ systems and fluid grid array (FGA)/microfluidic multichip modules using embedded channels in LTCC, and cofired electro-mechanical systems with moving parts. Both the microfluidic and mechanical system applications are enabled by sacrificial volume materials (SVM), which serve to create and maintain cavities and separation gaps during the lamination and cofiring process. SVMs consisting of thermally fugitive or partially inert materials are easily incorporated. Screeding is an incorporation technique we describe that improves uniformity and eliminates processing steps. Recognizing the premium on devices that are cofired rather than assembled, we report on functional-as-released and functional-as-fired moving parts, including an impeller that has been exercised over thirty million cycles, and a cofired pressure sensor that requires only pressure source and electrical connections. Additional applications for cofired transparent windows, some as small as an optical fiber, are also described. The applications described help pave the way for widespread application of LTCC to biomedical, control, analysis, characterization, and radio frequency (RF) functions for macro-meso-microsystems.
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Wu, H., A. Emadi, G. de Graaf, J. Leijtens, and R. F. Wolffenbuttel. "Self-Powered Sun Sensor Microsystems." Procedia Chemistry 1, no. 1 (September 2009): 1363–66. http://dx.doi.org/10.1016/j.proche.2009.07.340.

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Kayal, M., and M. Pastre. "Automatic calibration of Hall sensor microsystems." Microelectronics Journal 37, no. 12 (December 2006): 1569–75. http://dx.doi.org/10.1016/j.mejo.2006.04.013.

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Bermudez, Juliette F., Juan F. Saldarriaga, and Johann F. Osma. "Portable and Low-Cost Respirometric Microsystem for the Static and Dynamic Respirometry Monitoring of Compost." Sensors 19, no. 19 (September 24, 2019): 4132. http://dx.doi.org/10.3390/s19194132.

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Composting is considered an option for the disposal of organic waste; however, the development of portable and low-cost systems for its monitoring is of high interest. Therefore, in this study, respirometric microsystems were designed and tested including two integrated oxygen sensors for the measurement of compost samples under static and dynamic conditions with high portability and ease of use. The cost of each sensor was calculated as 2 USD, while the cost of the whole respirometric microsystem was calculated as 6 USD. The electronic system for real-time monitoring was also designed and implemented. The designed systems were tested for over 6 weeks for the determination of compost quality using real samples. The respirometric microsystem was compared to a commercial respirometry system and a standard laboratory test using hierarchical analysis which included costs, portability accuracy, analysis time, and integration of new technologies. The analysis showed a global score of 6.87 for the respirometric microsystem compared to 6.70 for the standard laboratory test and 3.26 for the commercial system.
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French, Paddy. "In-Vivo Microsystems: A Review." Sensors 20, no. 17 (September 1, 2020): 4953. http://dx.doi.org/10.3390/s20174953.

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In-vivo sensors yield valuable medical information by measuring directly on the living tissue of a patient. These devices can be surface or implant devices. Electrical activity in the body, from organs or muscles can be measured using surface electrodes. For short term internal devices, catheters are used. These include cardiac catheter (in blood vessels) and bladder catheters. Due to the size and shape of the catheters, silicon devices provided an excellent solution for sensors. Since many cardiac catheters are disposable, the high volume has led to lower prices of the silicon sensors. Many catheters use a single sensor, but silicon offers the opportunity to have multi sensors in a single catheter, while maintaining small size. The cardiac catheter is usually inserted for a maximum of 72 h. Some devices may be used for a short-to-medium period to monitor parameters after an operation or injury (1–4 weeks). Increasingly, sensing, and actuating, devices are being applied to longer term implants for monitoring a range of parameters for chronic conditions. Devices for longer term implantation presented additional challenges due to the harshness of the environment and the stricter regulations for biocompatibility and safety. This paper will examine the three main areas of application for in-vivo devices: surface devices and short/medium-term and long-term implants. The issues of biocompatibility and safety will be discussed.
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Bartsch de Torres, H., C. Rensch, M. Fischer, A. Schober, M. Hoffmann, and J. Müller. "Thick film flow sensor for biological microsystems." Sensors and Actuators A: Physical 160, no. 1-2 (May 2010): 109–15. http://dx.doi.org/10.1016/j.sna.2010.04.010.

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Dissertations / Theses on the topic "Sensor microsystems"

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Calavia, Boldú Raúl. "Gas sensor microsystems based on nanostructured layers via anodic oxidation." Doctoral thesis, Universitat Rovira i Virgili, 2012. http://hdl.handle.net/10803/96314.

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En aquesta tesi es detalla la metodologia per obtindre sensors de gasos basats en òxid de tungstè nanoestructurat sobre suports micromecanitzats de silici. Aquesta nanoestructuració s’ha fet mitjançant una capa d’alúmina porosa como a motlle, pel que s’ha desenvolupat una metodologia per a compatibilitzar l'anodització de l’alumini, i altres metalls com el tungstè, amb els processos estàndards del silici. S’han desenvolupat dos tipus de capes nanoestructurades, nanotubs i nanopunts de WO3. Els nanotubs s’han obtingut depositant mitjançant polvorització catòdica reactiva la capa sensible sobre alúmina porosa recobrint les parets dels pors. Els nanopunts s’han obtingut anoditzant una bicapa d’alumini i tungstè, on la primera anodització crea la alúmina porosa i la segona fa créixer els nanopunts d’òxid de tungstè en la base dels pors. S’ha analitzat la composició, morfologia i funcionament com a sensors de gasos d’ambdós materials nanoestructurats i s’han comparat els resultats amb sensors basats en materials sense nanoestructuració.
En esta tesis se detalla la metodologia para obtener sensores de gases basados en óxido de tungsteno nanoestructurado sobre soportes micromecanizados de silicio. Dicha nanoestructuración se ha obtenido empleando una capa de alúmina porosa como molde, por lo que se desarrolla una metodología para compatibilizar la anodización del aluminio, y otros metales como el tungsteno, con los procesos estándares del silicio. Se han desarrollado dos tipos de capas nanoestructuradas, nanotubos y nanopuntos de WO3. Los nanotubos se han obtenido depositando por pulverización catódica reactiva la capa sensible sobre alúmina porosa recubriendo las paredes de sus poros. Los nanopuntos se han obtenido anodizando una bicapa de aluminio y tungsteno, donde la primera anodización crea la alúmina porosa y la segunda hace crecer los nanopuntos de óxido de tungsteno en la base de los poros. Se ha analizado la composición, morfología y funcionamiento como sensores de gases en ambos casos y se han comparado los resultados con los de sensores sin nanoestructuración.
This thesis shows the methodology to obtain nanostructured tungsten oxide layer as sensing material on silicon micromachined gas sensor devices. A porous anodised alumina layer was used as pattern to obtain it, so a technique has been developed to make compatible the anodising of aluminium and other metals like tungsten with the standard silicon processes. Two different nanostructuring approaches were developed, nanotube and nanodot based tungsten oxide layers. The WO3 nanotube layer has been obtained by the tungsten oxide deposition using reactive sputtering on the porous alumina layer. As a result a continuous sensing layer coats the pores without clogging them. WO3 nanodot layers were obtained by the anodising of an aluminium and tungsten bilayer, where the first anodising process grows the porous alumina layer and the second one generates the tungsten oxide nanodots in the end of the pores. Compositional and morphological studies and the study of their behaviour as gas sensors where conducted for the two nanomaterials. The results have been compared with the flat tungsten oxide layers on micromachined gas sensors.
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Khaji, Zahra. "Extending Microsystems to Very High Temperatures and Chemically Harsh Environments." Doctoral thesis, Uppsala universitet, Mikrosystemteknik, 2016. http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-302658.

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Aiming at applications in space exploration as well as for monitoring natural hazards, this thesis focuses on understanding and overcoming the challenges of extending the applicability of microsystems to temperatures above 600°C as well as chemically harsh environments. Alumina and zirconia high-temperature co-fired ceramics (HTCC) with platinum as the conductor material, have in this thesis, been used to manufacture a wide range of high-temperature tolerant miniaturized sensors and actuators, including pressure and flow sensors, valves, a combustor, and liquid monopropellant microthrusters. Interfacing for high temperatures is challenging. One solution is to transfer the signal wirelessly. Here, therefor, wireless pressure sensors have been developed and characterized up to 1000°C. It is usually unwanted that material properties change with temperature, but by using smart designs, such changes can be exploited to sense physical properties as in the gas flow sensor presented, where the temperature-dependent electrical conductivity of zirconia has been utilized. In the same manner, various properties of platinum have been exploited to make temperature sensors, heaters and catalytic beds. By in-situ electroplating metals after sintering, even more capabilities were added, since many metals that do not tolerate HTCC processing can be added for additional functionality. An electroplated copper layer that was oxidized and used as an oxygen source in an alumina combustor intended for burning organic samples prior to sample analysis in a lab on a chip system, and a silver layer used as a catalyst in order to decompose hydrogen peroxide in a microthuster for spacecraft attitude control, are both examples that have been explored here. Ceramics are both high-temperature tolerant and chemically resistant, making them suitable for both thrusters and combustors. The corresponding applications benefit from miniaturization of them in terms of decreased mass, power consumption, integration potential, and reduced sample waste. Integrating many functions using as few materials as possible, is important when it comes to microsystems for harsh environments. This thesis has shown the high potential of co-fired ceramics in manufacturing microsystems for aggressive environments. However, interfacing is yet a major challenge to overcome.
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Jeong, Seung Hee. "Soft Intelligence : Liquids Matter in Compliant Microsystems." Doctoral thesis, Uppsala universitet, Mikrosystemteknik, 2016. http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-281281.

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Soft matter, here, liquids and polymers, have adaptability to a surrounding geometry. They intrinsically have advantageous characteristics from a mechanical perspective, such as flowing and wetting on surrounding surfaces, giving compliant, conformal and deformable behavior. From the behavior of soft matter for heterogeneous surfaces, compliant structures can be engineered as embedded liquid microstructures or patterned liquid microsystems for emerging compliant microsystems. Recently, skin electronics and soft robotics have been initiated as potential applications that can provide soft interfaces and interactions for a human-machine interface. To meet the design parameters, developing soft material engineering aimed at tuning material properties and smart processing techniques proper to them are to be highly encouraged. As promising candidates, Ga-based liquid alloys and silicone-based elastomers have been widely applied to proof-of-concept compliant structures. In this thesis, the liquid alloy was employed as a soft and stretchable electrical and thermal conductor (resistor), interconnect and filler in an elastomer structure. Printing-based liquid alloy patterning techniques have been developed with a batch-type, parallel processing scheme. As a simple solution, tape transfer masking was combined with a liquid alloy spraying technique, which provides robust processability. Silicone elastomers could be tunable for multi-functional building blocks by liquid or liquid-like soft solid inclusions. The liquid alloy and a polymer additive were introduced to the silicone elastomer by a simple mixing process. Heterogeneous material microstructures in elastomer networks successfully changed mechanical, thermal and surface properties. To realize a compliant microsystem, these ideas have in practice been useful in designing and fabricating soft and stretchable systems. Many different designs of the microsystems have been fabricated with the developed techniques and materials, and successfully evaluated under dynamic conditions. The compliant microsystems work as basic components to build up a whole system with soft materials and a processing technology for our emerging society.
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Bolaños, Quiñones Vladimir Andres. "Rolled-up Microtubular Cavities Towards Three-Dimensional Optical Confinement for Optofluidic Microsystems." Doctoral thesis, Universitätsbibliothek Chemnitz, 2015. http://nbn-resolving.de/urn:nbn:de:bsz:ch1-qucosa-178248.

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This work is devoted to investigate light confinement in rolled-up microtubular cavities and their optofluidic applications. The microcavities are fabricated by a roll-up mechanism based on releasing pre-strained silicon-oxide nanomembranes. By defining the shape and thickness of the nanomembranes, the geometrical tube structure is well controlled. Micro-photoluminescence spectroscopy at room temperature is employed to study the optical modes and their dependence on the structural characteristics of the microtubes. Finite-difference-time-domain simulations are performed to elucidate the experimental results. In addition, a theoretical model (based on a wave description) is applied to describe the optical modes in the tubular microcavities, supporting quantitatively and qualitatively the experimental findings. Precise spectral tuning of the optical modes is achieved by two post-fabrication methods. One method employs conformal coating of the tube wall with Al2O3 monolayers by atomic-layer-deposition, which permits a mode tuning over a wide spectral range (larger than one free-spectral-range). An average mode tuning to longer wavelengths of 0.11nm/ Al2O3-monolayer is obtained. The other method consists in asymmetric material deposition onto the tube surface. Besides the possibility of mode tuning, this method permits to detect small shape deformations (at the nanometer scale) of an optical microcavity. Controlled confinement of resonant light is demonstrated by using an asymmetric cone-like microtube, which is fabricated by unevenly rolling-up circular-shaped nanomembranes. Localized three-dimensional optical modes are obtained due to an axial confinement mechanism that is defined by the variation of the tube radius and wall windings along the tube axis. Optofluidic functions of the rolled-up microtubes are explored by immersing the tubes or filling their core with a liquid medium. Refractive index sensing of liquids is demonstrated by correlating spectral shift of the optical modes when a liquid interacts with the resonant light of the microtube. In addition, a novel sensing methodology is proposed by monitoring axial mode spacing changes. Lab-on-a-chip methods are employed to fabricate an optofluidic chip device, allowing a high degree of liquid handling. A maximum sensitivity of 880 nm/refractive-index-unit is achieved. The developed optofluidic sensors show high potential for lab-on-a-chip applications, such as real-time bio/chemical analytic systems.
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Arrijuria, Olivier. "Contribution à l'intégration de centrales inertielles : outils d'aide à la conception et à l'optimisation." Thesis, Bordeaux 1, 2008. http://www.theses.fr/2008BOR13673/document.

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Le travail présenté dans ce mémoire concerne la réalisation d’un microsystème intégrant une centrale inertielle permettant la détection de mouvements. Le microsystème étudié est composé d’un accéléromètre capacitif associé à son électronique de traitement. L’accéléromètre capacitif a conduit à l’élaboration d’un outil logiciel afin de le pré-dimensionner. Ce pré-dimensionnement a été effectué en fonction des spécifications de l’application et de la technologie de fabrication. Cet outil intègre des modèles fluidiques et électrostatiques en vue de calculer des paramètres du modèle de l’accéléromètre pour une simulation système. L’électronique de traitement de l’accéléromètre capacitif a été conçue autour d’un convertisseur ”Sigma-Delta”. L’architecture ”Sigma-Delta” a nécessité des modifications pour pouvoir être adaptée au capteur. Nous avons alors développé, sous ”Matlab-Simulink”, une bibliothèque de composants permettant d’ajuster le fonctionnement du convertisseur. Une fois l’architecture optimisée et les caractéristiques des composants connues, la conception de l’architecture ”Sigma-Delta” est ainsi réalisable sous le logiciel CADENCE
The aim of this thesis is the realisation of microsystem for movements detection. This microsystem is composed of capacitive accelerometers and of their electronics. The conception of capacitive accelerometers has induced developement of a software for the first dimensionnement of sensors. This software computes parameters of capacitive accelerometers thanks to electrostatic models, flow models, specifications of application and fabrication process. The electronics of capacitive accelerometer is a ”Sigma-Delta” convertor. The adaptation of convertor leads to developement of components libraries for ”Matlab-Simulink”. The simulation systems allows to fit parametres convertor for the application. After that,the conception of convertor under CADENCE software is then possible
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Waltisperger, Guy. "Architectures intégrées de gestion de l'énergie pour les microsystèmes autonomes." Phd thesis, Université de Grenoble, 2011. http://tel.archives-ouvertes.fr/tel-00601784.

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Augmenter la durée de vie d'une pile, voire s'en passer est aujourd'hui devenu une obligation pour les microsystèmes. En effet, à cette échelle, le remplacement des piles et leur rejet dans l'environnement sont problématiques. La voie préconisée pour répondre à cet enjeu est d'utiliser des sources d'énergie renouvelables (solaire, thermique et mécanique). Pour cela, nous proposons de développer une plateforme de récupération d'énergie multi-sources/multi-charges (MANAGY) capable de s'adapter à son environnement pour en extraire le maximum d'énergie et répondre à des applications diverses. L'architecture est constituée de chemins directs et de chemins indirects où l'énergie provenant des sources est d'abord transférée dans une unité de stockage avant d'être réutilisée par les charges du microsystème. L'utilisation de cette nouvelle architecture permet d'optimiser le transfert d'énergie entre sources et charges et améliore le rendement du système de 33%. Avant de développer une architecture multi-sources, nous avons cherché à améliorer le rendement de la source photovoltaïque (PV) qui, au vu de l'état de l'art, a la densité de puissance la plus élevée. La recherche du rendement maximum de la source PV revient à la recherche du point de puissance maximum (MPPT). Il existe pour chaque condition d'irradiance, de température, et d'énergie extraites un couple tension-courant permettant à la source de fournir un maximum de puissance (MPP). Grâce à l'utilisation de deux chemins de puissance, nous arrivons simultanément à créer une boucle de régulation faible puissance agissant sur le rapport cyclique du système de gestion d'énergie (MPPT) et une boucle de régulation de la tension de sortie agissant sur le transfert de l'énergie. La modélisation du système nous a permis de spécifier ses performances. Pour atteindre les performances requises, des architectures innovantes ont été réalisées qui ont fait l'objet de trois brevets. De plus, des blocs ne sont activés qu'aux instants de changement d'état du système et sont conçus, quand cela a été possible, avec des transistors fonctionnant en mode faible inversion. Toutes ces optimisations permettent au système de fonctionner sur une large plage de variation de l'éclairement (de conditions intérieures supérieures à 500 lux à extérieures) avec un rendement proche de 90%.
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Arthaud, Yoann. "Conception d'un microsystème d'aide au monitoring per-opératoire dans la chirurgie de l'oreille moyenne." Phd thesis, Université de Grenoble, 2011. http://tel.archives-ouvertes.fr/tel-00829091.

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Certains problèmes d'audition trouvent leur origine dans des anomalies de transmission de l'énergie des vibrations acoustique par la chaîne des osselets de l'oreille moyenne. Il se pratique aujourd'hui des opérations chirurgicales visant à la reconstruire. Un outil permettant d'évaluer la qualité de transmission des vibrations par de la chaîne ossiculaire pendant l'opération apporterait une aide substantielle au praticien afin dans le but d'optimiser la configuration des osselets. Les travaux présentés dans ce manuscrit traitent de la conception d'un capteur microsystème adapté à la mesure de l'amplitude de vibrations des osselets. Nous y avons particulièrement développé les travaux de modélisation de la structure mécanique du capteur. Il s'agit d'une structure communément employée pour les capteurs tactiles dont nous modélisons le comportement en régime harmonique. Dans une la deuxième partie nous présentons une étude d'optimisation du capteur en vue de son utilisation " tenu en main " par le chirurgien. Celle-ci repose notamment sur l'utilisation d'un modèle électrique équivalent de l'oreille moyenne et d'un logiciel d'optimisation multicritères. Nous présentons dans cette partie un concept de filtre mécanique des basses fréquences par l'utilisation des propriétés viscoélastiques des matériaux polymères. La dernière partie traite des travaux de réalisation des différents composants d'un capteur basé sur les matériaux polymères. Les travaux de réalisation et de test de membranes en résine SU8 y sont présentés ainsi que l'intégration de jauges en matériaux électroactifs chargés en nanoparticules. L'utilisation d'une technique de moule perdu pour réaliser la structure mécanique du capteur est discutée.
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Pauchard, Alexandre. "Silicon sensor microsystem for ultraviolet detection /." Lausanne, 2000. http://library.epfl.ch/theses/?nr=2152.

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Salette, Arnaud. "Développement de capteurs intégrés pour micropompes MEMS : applications biomédicales." Phd thesis, Université de Grenoble, 2012. http://tel.archives-ouvertes.fr/tel-00952312.

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Les Dispositifs Médicaux d'Injection (DMI) se développent de plus en plus. De nouveaux dispositifs apportent des innovations en terme de performances et d'utilisation par rapport aux seringues classiques. Le DMI développé par Eveon est un dispositif bio-inspiré possédant des capteurs, une micropompe, un flacon et une aiguille. Il permet une injection automatique, précise au microlitre garantissant une faible perte de liquide médicamenteux grâce aux techniques de miniaturisation utilisées dans la fabrication des microsystèmes. En effet, une micropompe à membrane en silicium intégrant des capteurs a été réalisée par des procédés issus de la microélectronique. Deux types d'actionneurs ont été couplés à la membrane : un actionneur bimétallique intégré et un actionneur piezoélectrique externe. Dans le cas de l'actionneur bimétallique, des thermo-résistances ont été conçues, fabriquées et caractérisées pour permettre de mesurer le profil thermique de la membrane lors de l'actionnement avec une erreur de 5%. Dans le cas de l'actionneur piezoélectrique externe, des piezorésistances ont été intégrées selon l'axe radial de la membrane afin de contrôler le profil de contraintes dans la membrane, asservir l'actionneur en fonction de la contre-pression et maximiser les caractéristiques de la pompe. Afin d'assurer la délivrance d'une dose précise de médicament, un capteur de débit est intégré dans les canaux microfluidiques de la micropompe. Ce capteur innovant permet de détecter des débits de liquide dans la gamme spécifiée par les dispositifs médicaux d'injection, à savoir une plage de débit allant de 0.5mL/min à 4mL/min.
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Yang, Chao. "Impedance extraction microsystem for nanostructured electrochemical sensor arrays." Diss., Connect to online resource - MSU authorized users, 2008.

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Thesis (Ph. D.)--Michigan State University. Dept. of Electrical Engineering, 2008.
Title from PDF t.p. (viewed on July 2, 2009) Includes bibliographical references (p. 147-155). Also issued in print.
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Books on the topic "Sensor microsystems"

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Leone, Alessandro, Angiola Forleo, Luca Francioso, Simona Capone, Pietro Siciliano, and Corrado Di Natale, eds. Sensors and Microsystems. Cham: Springer International Publishing, 2018. http://dx.doi.org/10.1007/978-3-319-66802-4.

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Malcovati, Piero, Andrea Baschirotto, Arnaldo d'Amico, and Corrado Natale, eds. Sensors and Microsystems. Dordrecht: Springer Netherlands, 2010. http://dx.doi.org/10.1007/978-90-481-3606-3.

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Di Natale, Corrado, Vittorio Ferrari, Andrea Ponzoni, Giorgio Sberveglieri, and Marco Ferrari, eds. Sensors and Microsystems. Cham: Springer International Publishing, 2014. http://dx.doi.org/10.1007/978-3-319-00684-0.

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Neri, Giovanni, Nicola Donato, Arnaldo d'Amico, and Corrado Di Natale, eds. Sensors and Microsystems. Dordrecht: Springer Netherlands, 2011. http://dx.doi.org/10.1007/978-94-007-1324-6.

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D’Amico, Arnaldo, Corrado Di Natale, Lucia Mosiello, and Giovanna Zappa, eds. Sensors and Microsystems. Boston, MA: Springer US, 2012. http://dx.doi.org/10.1007/978-1-4614-0935-9.

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Di Francia, G., C. Di Natale, B. Alfano, S. De Vito, E. Esposito, G. Fattoruso, F. Formisano, E. Massera, M. L. Miglietta, and T. Polichetti, eds. Sensors and Microsystems. Cham: Springer International Publishing, 2020. http://dx.doi.org/10.1007/978-3-030-37558-4.

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Di Francia, Girolamo, and Corrado Di Natale, eds. Sensors and Microsystems. Cham: Springer International Publishing, 2021. http://dx.doi.org/10.1007/978-3-030-69551-4.

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Martellucci, Sergio, Arthur N. Chester, and Anna Grazia Mignani, eds. Optical Sensors and Microsystems. Boston, MA: Springer US, 2000. http://dx.doi.org/10.1007/b115495.

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Italian Conference on Sensors and Microsystems (14th 2009 Pavia, Italy). Sensors and microsystems: AISEM 2009 proceedings. Edited by Malcovati P. (Piero). Dordrecht: Springer Verlag, 2010.

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Italian Conference on Sensors and Microsystems (14th 2009 Pavia, Italy). Sensors and microsystems: AISEM 2009 proceedings. Edited by Malcovati P. (Piero). Dordrecht: Springer Verlag, 2010.

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Book chapters on the topic "Sensor microsystems"

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Hornung, Mark R., and Oliver Brand. "Proximity Sensor." In Microsystems, 83–105. Boston, MA: Springer US, 1999. http://dx.doi.org/10.1007/978-1-4615-4997-0_7.

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Kjellman, J., N. Hosseini, Jeong Hwan Song, T. Tongnyuy, S. Dwivedi, B. Troia, B. Figeys, et al. "Integrated Photonic Microsystems." In Sensor Systems Simulations, 427–47. Cham: Springer International Publishing, 2019. http://dx.doi.org/10.1007/978-3-030-16577-2_15.

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Minne, S. C., S. R. Manalis, and C. F. Quate. "Silicon Process Flow: ZnO actuator and piezoresistive sensor." In Microsystems, 141–57. Boston, MA: Springer US, 1999. http://dx.doi.org/10.1007/978-1-4615-5167-6_8.

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Guenthner, Stefan, Bernhard Schmid, and Alexander Kolbe. "From Sensors to Sensor Systems." In Advanced Microsystems for Automotive Applications 2010, 279–88. Berlin, Heidelberg: Springer Berlin Heidelberg, 2010. http://dx.doi.org/10.1007/978-3-642-16362-3_27.

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Zhou, Zhaoying, Rong Zhu, Xu Fu, and Ganghua Zhang. "Microelectromechanical Sensor-Based System." In Microsystems and Nanotechnology, 619–51. Berlin, Heidelberg: Springer Berlin Heidelberg, 2012. http://dx.doi.org/10.1007/978-3-642-18293-8_17.

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Eichholz, Jörg, and Torgny Brogårdh. "Experience from the Development of a Silicon-Based MEMS Six-DOF Force–Torque Sensor." In Microsystems, 1–23. New York, NY: Springer New York, 2012. http://dx.doi.org/10.1007/978-1-4419-9985-6_1.

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Zhu, Hong, Jianmin Miao, Minoru Noda, Huaping Xu, and Masanori Okuyama. "Uncooled Infrared Image Sensor of Dielectric Bolometer Mode Using Ferroelectric BST Thin Film Prepared by Metal Organic Decomposition." In Microsystems, 231–56. Boston, MA: Springer US, 2002. http://dx.doi.org/10.1007/978-1-4757-5791-0_12.

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Dixon, Richard, and Jérémie Bouchaud. "2020 Auto Sensor Vision." In Advanced Microsystems for Automotive Applications 2010, 357–63. Berlin, Heidelberg: Springer Berlin Heidelberg, 2010. http://dx.doi.org/10.1007/978-3-642-16362-3_34.

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Matsui, Takeshi. "Automotive High-Pressure Sensor." In Advanced Microsystems for Automotive Applications 98, 231. Berlin, Heidelberg: Springer Berlin Heidelberg, 1998. http://dx.doi.org/10.1007/978-3-662-39696-4_22.

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Matsui, Takeshi. "Automotive High-Pressure Sensor." In Advanced Microsystems for Automotive Applications 98, 231. Berlin, Heidelberg: Springer Berlin Heidelberg, 1998. http://dx.doi.org/10.1007/978-3-642-72146-5_22.

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Conference papers on the topic "Sensor microsystems"

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"SESSION 19 - Sensor Microsystems." In 2004 Symposium on VLSI Circuits. Digest of Technical Papers. IEEE, 2004. http://dx.doi.org/10.1109/vlsic.2004.1346594.

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Ohlckers, P., A. Kropachev, and J. Kunsch. "3.3 - New Microsystems-Based IR Gas Sensing Technology." In SENSOR+TEST Conferences 2011. AMA Service GmbH, Von-Münchhausen-Str. 49, 31515 Wunstorf, Germany, 2011. http://dx.doi.org/10.5162/irs11/i3.3.

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Husak, M., A. Boura, and J. Jakovenko. "Wireless sensor network control system." In Microsystems (ASDAM). IEEE, 2010. http://dx.doi.org/10.1109/asdam.2010.5667022.

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Thiel, David V., and Peter C. Lisner. "Sensor networks and microsystems: get smarter!" In Smart Materials, Nano-, and Micro-Smart Systems, edited by Said F. Al-Sarawi. SPIE, 2005. http://dx.doi.org/10.1117/12.581899.

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Ohnishi, N., W. Satoh, K. Morimoto, J. Fukuda, and H. Suzuki. "Automatic on-chip sequential processing for bio-microsystems." In TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference. IEEE, 2009. http://dx.doi.org/10.1109/sensor.2009.5285974.

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Sari, Ibrahim, Tuna Balkan, and Haluk Kulah. "A Wideband Electromagnetic Micro Power Generator for Wireless Microsystems." In TRANSDUCERS '07 & Eurosensors XXI. 2007 14th International Conference on Solid-State Sensors, Actuators and Microsystems. IEEE, 2007. http://dx.doi.org/10.1109/sensor.2007.4300122.

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Goedecke, N., R. Toelke, F. Heer, and A. Hierlemann. "Microsystem for Single-Cell Metabolomics." In TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference. IEEE, 2007. http://dx.doi.org/10.1109/sensor.2007.4300233.

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"Session 11: MEMS, sensor & microsystems packaging." In 2009 4th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT). IEEE, 2009. http://dx.doi.org/10.1109/impact.2009.5382115.

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Rendek, K., M. Daricek, E. Vavrinsky, M. Donoval, and D. Donoval. "Biomedical signal amplifier for EMG wireless sensor system." In Microsystems (ASDAM). IEEE, 2010. http://dx.doi.org/10.1109/asdam.2010.5667015.

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Husak, M., and J. Jakovenko. "Use of barometric sensor for vertical velocity measurement." In Microsystems (ASDAM). IEEE, 2010. http://dx.doi.org/10.1109/asdam.2010.5667020.

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Reports on the topic "Sensor microsystems"

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MANGINELL, RONALD P., MATTHEW MOORMAN, CHRIS COLBURN, LAWRENCE F. ANDERSON, TIMOTHY J. GARDNER, DEBORAH L. MOWERY-EVANS, PAUL G. CLEM, and STEPHEN B. MARGOLIS. A Novel Microcombustor for Sensor and Thermal Energy Management Applications in Microsystems. Office of Scientific and Technical Information (OSTI), January 2003. http://dx.doi.org/10.2172/808610.

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