Academic literature on the topic 'SiGe source and drain'

Create a spot-on reference in APA, MLA, Chicago, Harvard, and other styles

Select a source type:

Consult the lists of relevant articles, books, theses, conference reports, and other scholarly sources on the topic 'SiGe source and drain.'

Next to every source in the list of references, there is an 'Add to bibliography' button. Press on it, and we will generate automatically the bibliographic reference to the chosen work in the citation style you need: APA, MLA, Harvard, Chicago, Vancouver, etc.

You can also download the full text of the academic publication as pdf and read online its abstract whenever available in the metadata.

Journal articles on the topic "SiGe source and drain"

1

Lauwers, A., M. J. H. van Dal, P. Verheyen, et al. "Study of silicide contacts to SiGe source/drain." Microelectronic Engineering 83, no. 11-12 (2006): 2268–71. http://dx.doi.org/10.1016/j.mee.2006.10.017.

Full text
APA, Harvard, Vancouver, ISO, and other styles
2

Claeys, C., M. Bargallo Gonzalez, G. Eneman, et al. "Leakage Current Control in Recessed SiGe Source/Drain Junctions." Journal of The Electrochemical Society 154, no. 9 (2007): H814. http://dx.doi.org/10.1149/1.2756370.

Full text
APA, Harvard, Vancouver, ISO, and other styles
3

Wang, You, Yu Mao, Qizheng Ji, Ming Yang, Zhaonian Yang, and Hai Lin. "Electrostatic Discharge Characteristics of SiGe Source/Drain PNN Tunnel FET." Electronics 10, no. 4 (2021): 454. http://dx.doi.org/10.3390/electronics10040454.

Full text
Abstract:
Gate-grounded tunnel field effect transistors (ggTFETs) are considered as basic electrostatic discharge (ESD) protection devices in TFET-integrated circuits. ESD test method of transmission line pulse is used to deeply analyze the current characteristics and working mechanism of Conventional TFET ESD impact. On this basis, a SiGe Source/Drain PNN (P+N+N+) tunnel field effect transistors (TFET) was proposed, which was simulated by Sentaurus technology computer aided design (TCAD) software. Simulation results showed that the trigger voltage of SiGe PNN TFET was 46.3% lower, and the failure current was 13.3% higher than Conventional TFET. After analyzing the simulation results, the parameters of the SiGe PNN TFET were optimized. The single current path of the SiGe PNN TFET was analyzed and explained in the case of gate grounding.
APA, Harvard, Vancouver, ISO, and other styles
4

Zhong, Min, Yu Hang Zhao, Shou Mian Chen, Ming Li, Shao Hai Zeng, and Wei Zhang. "TCAD Study of the Raised SiGe Source/Drain in 40nm PMOS." Key Engineering Materials 645-646 (May 2015): 70–74. http://dx.doi.org/10.4028/www.scientific.net/kem.645-646.70.

Full text
Abstract:
An embedded SiGe layer was applied in the source/drain areas (S/D) of a field-effect transistor to boost the performance in the p channels. Raised SiGe S/D plays a critical role in strain engineering. In this study, the relationship between the SiGe overfilling and the enhancement of channel stress was investigated. Systematic technology computer aided design (TCAD) simulations of the SiGe overfill height in a 40 nm PMOS were performed. The simulation results indicate that a moderate SiGe overfilling induces the highest stress in the channel. Corresponding epitaxial growth experiments were done and the obtained experimental data was in good agreement with the simulation results. The effect of the SiGe overfilling is briefly discussed. The results and conclusions presented within this paper might serve as useful references for the optimization of the embedded SiGe stressor for 40 nm logic technology node and beyond.
APA, Harvard, Vancouver, ISO, and other styles
5

Miyanami, Yuki, Kazunobu Ota, Takashi Shinyama, et al. "Novel Process Development for Bilayer Embedded SiGe Source/Drain Formation." ECS Transactions 3, no. 7 (2019): 501–8. http://dx.doi.org/10.1149/1.2355847.

Full text
APA, Harvard, Vancouver, ISO, and other styles
6

Yang, Zhaonian, Yuan Yang, Ningmei Yu, and Juin Liou. "Improving ESD Protection Robustness Using SiGe Source/Drain Regions in Tunnel FET." Micromachines 9, no. 12 (2018): 657. http://dx.doi.org/10.3390/mi9120657.

Full text
Abstract:
Currently, a tunnel field-effect transistor (TFET) is being considered as a suitable electrostatic discharge (ESD) protection device in advanced technology. In addition, silicon-germanium (SiGe) engineering is shown to improve the performance of TFET-based ESD protection devices. In this paper, a new TFET with SiGe source/drain (S/D) regions is proposed, and its ESD characteristics are evaluated using technology computer aided design (TCAD) simulations. Under a transmission line pulsing (TLP) stressing condition, the triggering voltage of the SiGe S/D TFET is reduced by 35% and the failure current is increased by 17% in comparison with the conventional Si S/D TFET. Physical insights relevant to the ESD enhancement of the SiGe S/D TFET are provided and discussed.
APA, Harvard, Vancouver, ISO, and other styles
7

Zhong, Min, Shou Mian Chen, and David Wei Zhang. "Investigation of In Situ Boron-Doping in SiGe Source/Drain Layer Growth for PMOS Devices." Journal of Nanomaterials 2015 (2015): 1–6. http://dx.doi.org/10.1155/2015/537696.

Full text
Abstract:
Embedded SiGe (eSiGe) source/drain (S/D) was studied to enhance PMOS performance. Detailed investigations concerning the effect of GeH4and B2H6gas flow rate on the resultant Boron-doping of the SiGe layer (on a 40 nm patterned wafer) were carried out. Various SiGeB epitaxial growth experiments were realized under systematically varying experimental conditions. Key structural and chemical characteristics of the SiGeB layers were investigated using Secondary Ion Mass Spectroscopy (SIMS), nanobeam diffraction mode (NBD), and Transmission Electron Microscopy (TEM) itself. Furthermore,Ion/Ioffperformances of 40 nm PMOS transistors are also measured by the Parametric Test Systems for the semiconductor industry. The results indicate that the ratio between GeH4and B2H6gas flow rates influences not only the Ge and Boron content of the SiGeB layer, but also the PMOS channel strain and the morphology of the eSiGe S/D regions which directly affect PMOS performance. In addition, the mechanism of Boron-doping during SiGe layer growth on the pattern wafer is briefly discussed. The results and discussion presented within this paper are expected to contribute to the optimization of eSiGe stressor, aimed for advanced CMOS devices.
APA, Harvard, Vancouver, ISO, and other styles
8

Qin, Changliang, Huaxiang Yin, Guilei Wang, et al. "Study of sigma-shaped source/drain recesses for embedded-SiGe pMOSFETs." Microelectronic Engineering 181 (September 2017): 22–28. http://dx.doi.org/10.1016/j.mee.2017.07.001.

Full text
APA, Harvard, Vancouver, ISO, and other styles
9

Raghunathan, Shyam, Tejas Krishnamohan, and Krishna C. Saraswat. "Novel SiGe Source/Drain for Reduced Parasitic Resistance in Ge NMOS." ECS Transactions 33, no. 6 (2019): 871–76. http://dx.doi.org/10.1149/1.3487617.

Full text
APA, Harvard, Vancouver, ISO, and other styles
10

Qi, Y., J. Peng, H. C. Lo, et al. "In-Situ Boron Doped SiGe Epitaxy Optimization for FinFET Source/Drain." ECS Transactions 75, no. 8 (2016): 265–72. http://dx.doi.org/10.1149/07508.0265ecst.

Full text
APA, Harvard, Vancouver, ISO, and other styles
More sources

Dissertations / Theses on the topic "SiGe source and drain"

1

Isheden, Christian. "Source and drain engineering in SiGe-based pMOS transistors." Doctoral thesis, Stockholm, 2005. http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-96.

Full text
APA, Harvard, Vancouver, ISO, and other styles
2

Christensen, Björn. "Fabrication and characterization of gate last Si MOSFETs with SiGe source and drain." Thesis, KTH, Skolan för informations- och kommunikationsteknik (ICT), 2017. http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-211547.

Full text
Abstract:
The continuous evolution of digital technology we enjoy today is the result of ever shrinking, faster and cheaper transistors that make up the ubiquitous integrated circuits of our devices. Over the decades, the industry has gone from purely geometrical scaling to innovative solutions like high-k dielectrics combined with metal gates and FinFETs. A possible future is the use of high mobility materials such as Germanium for the active areas of a transistor instead of Silicon. As a step towards building devices on Ge, we characterize a gate last process with epitaxial deposition of Si0.75Ge0.25 source and drain areas on bulk Si wafers. Devices fabricated are proof-of-concept PMOSFETs and NMOSFETs with channel widths of 10 µm and 40 µm and channel lengths between 0.6 µm and 50 µm. The gate electrode of the fabricated devices is insitu doped polycrystalline Silicon. The devices are electrically characterized through I-V measurements and exhibit a yield of 95%.<br>Den konstanta utvecklingen av digital teknik som vi åtnjuter idag drivs av den ständiga utvecklingen av transistorer. Dessa blir mer kompakta, snabbare och kostar mindre för varje generation och bygger upp de integrerade kretsar som driver all vår vardagsteknik. Under ett tidsspann på flera decennier har krympningen gått från enbart geometrisk skalning till mer innovativa lösningar. Gate-oxiden har gått från rent kiseldioxid till material med lägre relativ permittivitet vilket möjliggjort en tunnare ekvivalent elektrisk tjocklek än vad som varit möjligt för kiseloxid. FinFet eller så kallade ’tri-gate’ transistorer har ersatt den plana varianten för att öka den ledande arean utan att enheterna sväller ut över substratet. En framtida möjlighet är även att använda material med högre mobilitet för elektroner och hål än kisel där en möjlig kandidat är Germanium. Som ett steg mot målet at bygga Germanium-transistorer tillverkar vi här gate last transistorer med source och drain i in-situ dopad kisel-germanium. Dessa konceptenheter används för att definiera och utveckla tillverkningsprocessen och tillverkas i flera omgångar. Varje skiva innehåller transistorer med en bredd på 40 µm och 10 µm. Kanallängden på transistorerna går mellan 0.6 µm och 50 µm för båda bredderna och av varje enhet finns 101 stycken per kiselskiva (100 mm diameter). Gate-elektroden består i samtliga fall av in-situ dopat poly-kristallint kisel. Enheterna karaktäriseras därefter genom elektriska mätningar och mätdata analyseras och sammanställs. Det visas genom dessa mätningar att ett utfall om över 95% fungerande enheter kan uppnås med processen.
APA, Harvard, Vancouver, ISO, and other styles
3

Daubriac, Richard. "Caractérisation de techniques d'implantations ioniques alternatives pour l'optimisation du module source-drain de la technologie FDSOI 28nm." Thesis, Toulouse, INSA, 2018. http://www.theses.fr/2018ISAT0031/document.

Full text
Abstract:
Durant ces dernières années, l’apparition de nouvelles architectures (FDSOI, FinFETs ou NW-FETs) et l’utilisation de nouveaux matériaux (notamment SiGe) ont permis de repousser les limites des performances des dispositifs MOS et de contourner l’effet canal court inhérent à la miniaturisation des composants. Cependant, pour toutes ces nouvelles architectures, la résistance de contact se dégrade au fil des nœuds technologiques. Celle-ci dépend fortement de deux paramètres physiques : la concentration de dopants actifs proches de la surface du semi-conducteur et de la hauteur de barrière Schottky du contact siliciuré. De multiples procédés avancés ont été proposé pour améliorer ces deux paramètres physiques (pré-amorphisation, recuit laser, ségrégation de dopants, etc…). Afin d’optimiser les conditions expérimentales de ces nouvelles techniques de fabrication, il est primordial de pouvoir caractériser avec fiabilité leur impact sur les deux grandeurs physiques citées. Dans le cadre de cette thèse, deux thématiques dédiées à l’étude de chacun des paramètres sont abordées, explicitant les méthodes de caractérisation développées ainsi que des exemples concrets d’applications. La première partie concerne l’étude de la concentration de dopants actifs proches de la surface du semi-conducteur. Dans cet axe, nous avons mis en place une méthode d’Effet Hall Différentiel (DHE). Cette technique combine gravures successives et mesures par effet Hall conventionnel afin d’obtenir le profil de concentration de dopants actifs en fonction de la profondeur. Nous avons développé et validé une méthode de gravure chimique et de mesure électrique pour des couches ultra-minces de SiGe et de Si dopées. Les profils de concentration générés ont une résolution en profondeur inférieure à 1 nm et ont permis d’étudier de façon approfondie dans les premiers nanomètres proches de la surface de couches fabriquées grâce à des techniques d’implantation et de recuit avancées comme par exemple, la croissance en phase solide activée par recuit laser. La deuxième partie porte sur la mesure de hauteurs de barrière Schottky pour des contacts siliciurés. Durant cette étude, nous avons transféré une technique se basant sur des diodes en tête bêche pour caractériser l’impact de la ségrégation de différentes espèces à l’interface siliciure/semi-conducteur sur la hauteur de barrière Schottky d’un contact en siliciure de platine. Cette méthode de mesure associée à des simulations physiques a permis d’une part, d’extrairer avec fiabilité des hauteurs de barrières avec une précision de 10meV et d’autre part, d’effectuer une sélection des meilleures conditions de ségrégation de dopants pour la réduction de la hauteur de barrière Schottky. Pour conclure, ce projet a rendu possible le développement de méthodes de caractérisation pour l’étude de matériaux utilisés en nanoélectronique. De plus, nous avons pu apporter des éclaircissements concernant l’impact de techniques d’implantation ionique alternatives sur des couches de Si et SiGe ultrafines, et ce, dans le but de réduire la résistance de contact entre siliciure et semi-conducteur dans le module source-drain de transistors ultimes<br>During the past few decades, the emergence of new architectures (FDSOI, FinFETs or NW-FETs) and the use of new materials (like silicon/germanium alloys) allowed to go further in MOS devices scaling by solving short channel effect issues. However, new architectures suffer from contact resistance degradation with size reduction. This resistance strongly depends on two parameters: the active dopant concentration close to the semi-conductor surface and the Schottky barrier height of the silicide contact. Many solutions have been proposed to improve both of these physical parameters: pre-amorphisation, laser annealing, dopant segregation and others. In order to optimize the experimental conditions of these fabrication techniques, it is mandatory to measure precisely and reliably their impact on cited parameters.Within the scope of this thesis, two parts are dedicated to each lever of the contact resistance, each time precising the developed characterization method and concrete application studies. The first part concerns the study of the active dopant concentration close to the semi-conductor surface. In this axis, we developed a Differential Hall Effet method (DHE) which can provide accurate depth profiles of active dopant concentration combining successive etching processes and conventional Hall Effect measurements. To do so, we validated layer chemical etching and precise electrical characterization method for doped Si and SiGe. Obtained generated profiles have a sub-1nm resolution and allowed to scan the first few nanometers of layers fabricated by advanced ion implantation and annealing techniques, like solid-phase epitaxy regrowth activated by laser annealing. In the second part, we focused on the measurement of Schottky barrier height of platinum silicide contact. We transferred a characterization method based on back-to-back diodes structure to measure platinum silicide contacts with different dopant segregation conditions. The electrical measurements were then fitted with physical models to extract Schottky barrier height with a precision of about 10meV. This combination between measurements and simulations allowed to point out the best ion implantation and annealing conditions for Schottky barrier height reduction.To conclude, thanks to this project, we developed highly sensitive characterization methods for nanoelectronics application. Moreover, we brought several clarifications on the impact of alternative ion implantation and annealing processes on Si and SiGe ultra-thin layers in the perspective of contact resistance reduction in FDSOI source-drain module
APA, Harvard, Vancouver, ISO, and other styles
4

Ogier, Jean-Luc. "Optimisation de structures et de technologies pour la réalisation de drain-source de transistors MOS submicroniques." Université Joseph Fourier (Grenoble), 1993. http://www.theses.fr/1993GRE10167.

Full text
Abstract:
Afin de reduire les effets de canaux courts et de porteurs chauds, nous avons etudie differentes solutions technologiques concernant les drain/source de transistors metal oxyde silicium (mos) submicroniques. Cette etude a ete realisee dans le cadre de filieres cmos (mos complementaires) submicroniques (0. 7-0. 5-0. 35 micron). Concernant le transistor nmos, notre etude vise a reduire les phenomenes de degradations par porteurs chauds qui affectent la fiabilite du dispositif. Nous nous interessons uniquement a la partie faiblement dopee du drain (ldd). Nous presentons dans un premier temps les resultats concernant la comparaison ldd arsenic/phosphore pour une technologie 0. 5 micron. Nous abordons ensuite l'etude d'une structure ldd implantee avec un fort angle de tilt dans le cadre d'un procede 0. 35 micron. Pour le transistor pmos, nous presentons differents essais visant a reduire la profondeur des jonctions de drain/source et nous traitons l'aspect degradation par porteurs chauds avec l'etude de la structure ldd pmos. Cette etude s'est concretisee par l'adoption de choix technologiques sur les filieres du cnet et de ses partenaires (matra-mhs, centre commun cnet-st)
APA, Harvard, Vancouver, ISO, and other styles
5

Zhang, Zhikuan. "Source/drain engineering for extremely scaled MOSFETs /." View abstract or full-text, 2005. http://library.ust.hk/cgi/db/thesis.pl?ELEC%202005%20ZHANG.

Full text
APA, Harvard, Vancouver, ISO, and other styles
6

Hakanen, Jani. "Modeling of nanostructures with complex source and drain." Thesis, Linköping University, The Department of Physics, Chemistry and Biology, 2004. http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-4285.

Full text
Abstract:
<p>In this thesis we report on calculations for open quantum mechanical and certain microwave systems. The models refer to a quantum point contact and an electron cavity. We model this open system with an imaginary potential as source and drain, and use the finite difference method to make our calculations. We report on general features of the model we have found, and compare our calculations with measurements made on microwave cavities.</p>
APA, Harvard, Vancouver, ISO, and other styles
7

Waite, Andrew Michael. "Elevated source/drain MOSFETs for deep submicron VLSI." Thesis, University of Southampton, 1999. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.299702.

Full text
APA, Harvard, Vancouver, ISO, and other styles
8

Zhang, Zhikuan. "A novel MOSFET's with source/drain on insulator /." View Abstract or Full-Text, 2002. http://library.ust.hk/cgi/db/thesis.pl?ELEC%202002%20ZHANG.

Full text
APA, Harvard, Vancouver, ISO, and other styles
9

Luo, Jun. "Integration of metallic source/drain contacts in MOSFET technology." Doctoral thesis, KTH, Integrerade komponenter och kretsar, 2010. http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-13136.

Full text
Abstract:
The continuous and aggressive downscaling of conventional CMOS devices has been driving the vast growth of ICs over the last few decades. As the CMOS downscaling approaches the fundamental limits, novel device architectures such as metallic source/drain Schottky barrier MOSFET (SB-MOSFET) and SB-FinFET are probably needed to further push the ultimate downscaling. The ultimate goal of this thesis is to integrate metallic Ni1-xPtx silicide (x=0~1) source/drain into SB-MOSFET and SB-FinFET, with an emphasis on both material and processing issues related to the integration of Ni1-xPtx silicides towards competitive devices. First, the effects of both carbon (C) and nitrogen (N) on the formation and on the Schottky barrier height (SBH) of NiSi are studied. The presence of both C and N is found to improve the poor thermal stability of NiSi significantly. The present work also explores dopant segregation (DS) using B and As for the NiSi/Si contact system. The effects of C and N implantation into the Si substrate prior to the NiSi formation are examined, and it is found that the presence of C yields positive effects in helping reduce the effective SBH to 0.1-0.2 eV for both conduction polarities. In order to unveil the mechanism of SBH tuning by DS, the variation of specific contact resistivity between silicide and Si substrates by DS is monitored. The formation of a thin interfacial dipole layer at silicide/Si interface is confirmed to be the reason of SBH modification. Second, a systematic experimental study is performed for Ni1-xPtx silicide (x=0~1) films aiming at the integration into SB-MOSFET. A distinct behavior is found for the formation of Ni silicide films. Epitaxially aligned NiSi2-y films readily grow and exhibit extraordinary morphological stability up to 800 oC when the thickness of deposited Ni (tNi) &lt;4 nm. Polycrystalline NiSi films form and tend to agglomerate at lower temperatures for thinner films for tNi≥4 nm. Such a distinct annealing behavior is absent for the formation of Pt silicide films with all thicknesses of deposited Pt. The addition of Pt into Ni supports the above observations. Surface energy is discussed as the cause responsible for the distinct behavior in phase formation and morphological stability. Finally, three different Ni-SALICIDE schemes towards a controllable NiSi-based metallic source/drain process without severe lateral encroachment of NiSi are carried out. All of them are found to be effective in controlling the lateral encroachment. Combined with DS technology, both n- and p-types of NiSi source/drain SB-MOSFETs with excellent performance are fabricated successfully. By using the reproducible sidewall transfer lithography (STL) technology developed at KTH, PtSi source/drain SB-FinFET is also realized in this thesis. With As DS, the characteristics of PtSi source/drain SB-FinFET are transformed from p-type to n-type. This thesis work places Ni1-xPtx (x=0~1) silicides SB-MOSFETs as a competitive candidate for future CMOS technology.<br>QC20100708<br>NEMO, NANOSIL, SINANO
APA, Harvard, Vancouver, ISO, and other styles
10

Gudmundsson, Valur. "Fabrication, characterization, and modeling of metallic source/drain MOSFETs." Doctoral thesis, KTH, Integrerade komponenter och kretsar, 2011. http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-49184.

Full text
Abstract:
As scaling of CMOS technology continues, the control of parasitic source/drain (S/D) resistance (RSD) is becoming increasingly challenging. In order to control RSD, metallic source/drain MOSFETs have attracted significant attention, due to their low resistivity, abrupt junction and low temperature processing (≤700 °C). A key issue is reducing the contact resistance between metal and channel, since small Schottky barrier height (SBH) is needed to outperform doped S/D devices. A promising method to decrease the effective barrier height is dopant segregation (DS). In this work several relevant aspects of Schottky barrier (SB) contacts are investigated, both by simulation and experiment, with the goal of improving performance and understanding of SB-MOSFET technology:First, measurements of low contact resistivity are challenging, since systematic error correction is needed for extraction. In this thesis, a method is presented to determine the accuracy of extracted contact resistivity due to propagation of random measurement error.Second, using Schottky diodes, the effect of dopant segregation of beryllium (Be), bismuth (Bi), and tellurium (Te) on the SBH of NiSi is demonstrated. Further study of Be is used to analyze the mechanism of Schottky barrier lowering.Third, in order to fabricate short gate length MOSFETs, the sidewall transfer lithography process was optimized for achieving low sidewall roughness lines down to 15 nm. Ultra-thin-body (UTB) and tri-gate SB-MOSFET using PtSi S/D and As DS were demonstrated. A simulation study was conducted showing DS can be modeled by a combination of barrier lowering and doped Si extension.Finally, a new Schottky contact model was implemented in a multi-subband Monte Carlo simulator for the first time, and was used to compare doped-S/D to SB-S/D for a 17 nm gate length double gate MOSFET. The results show that a barrier of ≤ 0.15 eV is needed to comply with the specifications given by the International Technology Roadmap for Semiconductors (ITRS).<br>QC 20111206
APA, Harvard, Vancouver, ISO, and other styles
More sources

Books on the topic "SiGe source and drain"

1

Wang, Guilei. Investigation on SiGe Selective Epitaxy for Source and Drain Engineering in 22 nm CMOS Technology Node and Beyond. Springer Singapore, 2019. http://dx.doi.org/10.1007/978-981-15-0046-6.

Full text
APA, Harvard, Vancouver, ISO, and other styles
2

Li, Zhiqiang. The Source/Drain Engineering of Nanoscale Germanium-based MOS Devices. Springer Berlin Heidelberg, 2016. http://dx.doi.org/10.1007/978-3-662-49683-1.

Full text
APA, Harvard, Vancouver, ISO, and other styles
3

International Symposium on Advanced Gate Stack, Source/Drain and Channel Engineering for Si-based CMOS (3rd 2007 Chicago, Ill.). Advanced gate stack, source/drain and channel engineering for Si-based CMOS 3: New materials, processes and equipment. Edited by Öztürk Mehmet C, Electrochemical Society. Electronics and Photonics Division., Electrochemical Society. Dielectric Science and Technology Division., Electrochemical Society. High Temperature Materials Division., and Electrochemical Society Meeting. Electrochemical Society, 2007.

Find full text
APA, Harvard, Vancouver, ISO, and other styles
4

International, Symposium on Advanced Gate Stack Source/Drain and Channel Engineering for Si-based CMOS (2nd 2006 Cancún Mexico). Advanced gate stack, source/drain, and channel engineering for Si-based CMOS 2: New materials, processes and equipment. Electrochemical Society, 2006.

Find full text
APA, Harvard, Vancouver, ISO, and other styles
5

International Symposium on Advanced Gate Stack, Source/Drain and Channel Engineering for Si-based CMOS (3rd 2007 Chicago, Ill.). Advanced gate stack, source/drain and channel engineering for Si-based CMOS 3: New materials, processes and equipment. Edited by Öztürk Mehmet C, Electrochemical Society. Electronics and Photonics Division., Electrochemical Society. Dielectric Science and Technology Division., Electrochemical Society. High Temperature Materials Division., and Electrochemical Society Meeting. Electrochemical Society, 2007.

Find full text
APA, Harvard, Vancouver, ISO, and other styles
6

Wang, Guilei. Investigation on SiGe Selective Epitaxy for Source and Drain Engineering in 22 nm CMOS Technology Node and Beyond. Springer, 2019.

Find full text
APA, Harvard, Vancouver, ISO, and other styles
7

Li, Zhiqiang. The Source/Drain Engineering of Nanoscale Germanium-based MOS Devices. Springer, 2018.

Find full text
APA, Harvard, Vancouver, ISO, and other styles
8

Maguire, Paul Damien Mary. The characteristics of field effect transistors with Schottky barrier source and drain electrodes. 1986.

Find full text
APA, Harvard, Vancouver, ISO, and other styles
9

(Editor), Evgeni P. Gusev, Lih-Juann Chen (Editor), Hiroshi Iwai (Editor), et al., eds. Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS: New Materials, Processes, and Equipment 2005: Proceedings Of The International Symposium. Electrochemical Society, 2005.

Find full text
APA, Harvard, Vancouver, ISO, and other styles
10

Pinho, Patricia de Santana. Mapping Diaspora. University of North Carolina Press, 2018. http://dx.doi.org/10.5149/northcarolina/9781469645322.001.0001.

Full text
Abstract:
Brazil, like some countries in Africa, has become a major destination for African American tourists seeking the cultural roots of the black Atlantic diaspora. Drawing on over a decade of ethnographic research as well as textual, visual, and archival sources, Patricia de Santana Pinho investigates African American roots tourism, a complex, poignant kind of travel that provides profound personal and collective meaning for those searching for black identity and heritage. It also provides, as Pinho’s interviews with Brazilian tour guides, state officials, and Afro-Brazilian activists reveal, economic and political rewards that support a structured industry. Pinho traces the origins of roots tourism to the late 1970s, when groups of black intellectuals, artists, and activists found themselves drawn especially to Bahia, the state that in previous centuries had absorbed the largest number of enslaved Africans. African Americans have become frequent travelers across what Pinho calls the "map of Africanness" that connects diasporic communities and stimulates transnational solidarities while simultaneously exposing the unevenness of the black diaspora. Roots tourism, Pinho finds, is a fertile site to examine the tensions between racial and national identities as well as the gendered dimensions of travel, particularly when women are the major roots-seekers.
APA, Harvard, Vancouver, ISO, and other styles

Book chapters on the topic "SiGe source and drain"

1

Mohapatra, E., T. P. Dash, J. Jena, S. Das, J. Nanda, and C. K. Maiti. "Performance Analysis of Si-Channel Nanosheet FETs with Strained SiGe Source/Drain Stressors." In Advances in Electrical Control and Signal Systems. Springer Singapore, 2020. http://dx.doi.org/10.1007/978-981-15-5262-5_23.

Full text
APA, Harvard, Vancouver, ISO, and other styles
2

Wang, Guilei. "Epitaxial Growth of SiGe Thin Films." In Investigation on SiGe Selective Epitaxy for Source and Drain Engineering in 22 nm CMOS Technology Node and Beyond. Springer Singapore, 2019. http://dx.doi.org/10.1007/978-981-15-0046-6_3.

Full text
APA, Harvard, Vancouver, ISO, and other styles
3

Wang, Guilei. "SiGe S/D Integration and Device Verification." In Investigation on SiGe Selective Epitaxy for Source and Drain Engineering in 22 nm CMOS Technology Node and Beyond. Springer Singapore, 2019. http://dx.doi.org/10.1007/978-981-15-0046-6_4.

Full text
APA, Harvard, Vancouver, ISO, and other styles
4

Wang, Guilei. "Pattern Dependency of SiGe Layers Selective Epitaxy Growth." In Investigation on SiGe Selective Epitaxy for Source and Drain Engineering in 22 nm CMOS Technology Node and Beyond. Springer Singapore, 2019. http://dx.doi.org/10.1007/978-981-15-0046-6_5.

Full text
APA, Harvard, Vancouver, ISO, and other styles
5

Thakur, Anchal, and Rohit Dhiman. "A Threshold Voltage Model for SiGe Source/Drain Silicon-Nanotube-Based Junctionless Field-Effect Transistor." In Energy Systems in Electrical Engineering. Springer Singapore, 2020. http://dx.doi.org/10.1007/978-981-15-7937-0_6.

Full text
APA, Harvard, Vancouver, ISO, and other styles
6

Wang, Guilei. "Introduction." In Investigation on SiGe Selective Epitaxy for Source and Drain Engineering in 22 nm CMOS Technology Node and Beyond. Springer Singapore, 2019. http://dx.doi.org/10.1007/978-981-15-0046-6_1.

Full text
APA, Harvard, Vancouver, ISO, and other styles
7

Wang, Guilei. "Strained Silicon Technology." In Investigation on SiGe Selective Epitaxy for Source and Drain Engineering in 22 nm CMOS Technology Node and Beyond. Springer Singapore, 2019. http://dx.doi.org/10.1007/978-981-15-0046-6_2.

Full text
APA, Harvard, Vancouver, ISO, and other styles
8

Wang, Guilei. "Conclusions and Prospects." In Investigation on SiGe Selective Epitaxy for Source and Drain Engineering in 22 nm CMOS Technology Node and Beyond. Springer Singapore, 2019. http://dx.doi.org/10.1007/978-981-15-0046-6_6.

Full text
APA, Harvard, Vancouver, ISO, and other styles
9

Patel, Jyoti, Priyanka Suman, Alemienla Lemtur, and Dheeraj Sharma. "Performance Booster Electrical Drain SiGe Nanowire TFET (EDD-SiGe-NW-TFET) with DC Analysis and Optimization." In Information and Communication Technology for Intelligent Systems. Springer Singapore, 2018. http://dx.doi.org/10.1007/978-981-13-1747-7_55.

Full text
APA, Harvard, Vancouver, ISO, and other styles
10

Hellings, Geert, and Kristin De Meyer. "Source/Drain Junctions in Germanium: Experimental Investigation." In High Mobility and Quantum Well Transistors. Springer Netherlands, 2013. http://dx.doi.org/10.1007/978-94-007-6340-1_2.

Full text
APA, Harvard, Vancouver, ISO, and other styles

Conference papers on the topic "SiGe source and drain"

1

LEE, Doohwan, Masao SAKURABA, Junichi MUROTA та Toshiaki TSUCHIYA. "0.1 μm pMOSFETs with SiGe-Channel and B-Doped SiGe Source/Drain Layers". У 2002 International Conference on Solid State Devices and Materials. The Japan Society of Applied Physics, 2002. http://dx.doi.org/10.7567/ssdm.2002.c-9-1.

Full text
APA, Harvard, Vancouver, ISO, and other styles
2

Radamson, H. H., J. Hallstedt, and M. Ostling. "Integration of Selective SiGe Epitaxy for Source/Drain Application in MOSFETs." In 2006 International SiGe Technology and Device Meeting. IEEE, 2006. http://dx.doi.org/10.1109/istdm.2006.246504.

Full text
APA, Harvard, Vancouver, ISO, and other styles
3

Choi, Munkang, Victor Moroz, Lee Smith, and Oleg Penzin. "14 nm FinFET Stress Engineering with Epitaxial SiGe Source/Drain." In 2012 International Silicon-Germanium Technology and Device Meeting (ISTDM). IEEE, 2012. http://dx.doi.org/10.1109/istdm.2012.6222469.

Full text
APA, Harvard, Vancouver, ISO, and other styles
4

Yee-Chia Yeo. "Enhancing CMOS Transistor Performance Using Lattice-Mismatched Materials in Source/Drain Regions." In 2006 International SiGe Technology and Device Meeting. IEEE, 2006. http://dx.doi.org/10.1109/istdm.2006.246557.

Full text
APA, Harvard, Vancouver, ISO, and other styles
5

Jianqin Gao, Jun Tan, Haifeng Zhou, Jingxun Fang, and Albert Pang. "Research of silicon cap for epitaxy sige in source/drain regions." In 2015 China Semiconductor Technology International Conference (CSTIC). IEEE, 2015. http://dx.doi.org/10.1109/cstic.2015.7153413.

Full text
APA, Harvard, Vancouver, ISO, and other styles
6

Augendre, E., S. Maitrejean, B. De Salvo, et al. "Impact of source/drain silicon cap on FDSOI SiGe pMOSFET performance." In 2015 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S). IEEE, 2015. http://dx.doi.org/10.1109/s3s.2015.7333544.

Full text
APA, Harvard, Vancouver, ISO, and other styles
7

Fukuda, M., Y. Shimamune, M. Nakamura, et al. "Stress variability control by defects suppression of SiGe Source/Drain using novel SiGe epitaxial growth technique." In 2009 International Conference on Solid State Devices and Materials. The Japan Society of Applied Physics, 2009. http://dx.doi.org/10.7567/ssdm.2009.a-3-5l.

Full text
APA, Harvard, Vancouver, ISO, and other styles
8

Togo, M., J. W. Lee, L. Pantisano, et al. "Phosphorus doped SiC Source Drain and SiGe channel for scaled bulk FinFETs." In 2012 IEEE International Electron Devices Meeting (IEDM). IEEE, 2012. http://dx.doi.org/10.1109/iedm.2012.6479064.

Full text
APA, Harvard, Vancouver, ISO, and other styles
9

Peng, Min-Ru, Mu-Chun Wang, Liang-Ru Ji, et al. "Characteristics and hot-carrier effects of strained pMOSFETs with SiGe channel and embedded SiGe source/drain stressor." In 2013 IEEE International Nanoelectronics Conference (INEC). IEEE, 2013. http://dx.doi.org/10.1109/inec.2013.6466020.

Full text
APA, Harvard, Vancouver, ISO, and other styles
10

Mu-Chun Wang, Min-Ru Peng, Liang-Ru Ji, et al. "Strained pMOSFETs with SiGe channel and embedded SiGe source/drain stressor under heating and hot-carrier stresses." In 2013 2nd International Symposium on Next-Generation Electronics (ISNE 2013). IEEE, 2013. http://dx.doi.org/10.1109/isne.2013.6512370.

Full text
APA, Harvard, Vancouver, ISO, and other styles

Reports on the topic "SiGe source and drain"

1

Atkinson, Dan, and Alex Hale, eds. From Source to Sea: ScARF Marine and Maritime Panel Report. Society of Antiquaries of Scotland, 2012. http://dx.doi.org/10.9750/scarf.09.2012.126.

Full text
Abstract:
The main recommendations of the panel report can be summarised under four headings: 1. From Source to Sea: River systems, from their source to the sea and beyond, should form the focus for research projects, allowing the integration of all archaeological work carried out along their course. Future research should take a holistic view of the marine and maritime historic environment, from inland lakes that feed freshwater river routes, to tidal estuaries and out to the open sea. This view of the landscape/seascape encompasses a very broad range of archaeology and enables connections to be made without the restrictions of geographical or political boundaries. Research strategies, programmes From Source to Sea: ScARF Marine and Maritime Panel Report iii and projects can adopt this approach at multiple levels; from national to site-specific, with the aim of remaining holistic and cross-cutting. 2. Submerged Landscapes: The rising research profile of submerged landscapes has recently been embodied into a European Cooperation in Science and Technology (COST) Action; Submerged Prehistoric Archaeology and Landscapes of the Continental Shelf (SPLASHCOS), with exciting proposals for future research. Future work needs to be integrated with wider initiatives such as this on an international scale. Recent projects have begun to demonstrate the research potential for submerged landscapes in and beyond Scotland, as well as the need to collaborate with industrial partners, in order that commercially-created datasets can be accessed and used. More data is required in order to fully model the changing coastline around Scotland and develop predictive models of site survival. Such work is crucial to understanding life in early prehistoric Scotland, and how the earliest communities responded to a changing environment. 3. Marine &amp; Maritime Historic Landscapes: Scotland’s coastal and intertidal zones and maritime hinterland encompass in-shore islands, trans-continental shipping lanes, ports and harbours, and transport infrastructure to intertidal fish-traps, and define understanding and conceptualisation of the liminal zone between the land and the sea. Due to the pervasive nature of the Marine and Maritime historic landscape, a holistic approach should be taken that incorporates evidence from a variety of sources including commercial and research archaeology, local and national societies, off-shore and onshore commercial development; and including studies derived from, but not limited to history, ethnology, cultural studies, folklore and architecture and involving a wide range of recording techniques ranging from photography, laser imaging, and sonar survey through to more orthodox drawn survey and excavation. 4. Collaboration: As is implicit in all the above, multi-disciplinary, collaborative, and cross-sector approaches are essential in order to ensure the capacity to meet the research challenges of the marine and maritime historic environment. There is a need for collaboration across the heritage sector and beyond, into specific areas of industry, science and the arts. Methods of communication amongst the constituent research individuals, institutions and networks should be developed, and dissemination of research results promoted. The formation of research communities, especially virtual centres of excellence, should be encouraged in order to build capacity.
APA, Harvard, Vancouver, ISO, and other styles
2

Clausen, Jay, D. Moore, L. Cain, and K. Malinowski. VI preferential pathways : rule or exception. Engineer Research and Development Center (U.S.), 2021. http://dx.doi.org/10.21079/11681/41305.

Full text
Abstract:
Trichloroethylene (TCE) releases from leaks and spills next to a large government building occurred over several decades with the most recent event occurring 20 years ago. In response to a perceived conventional vapor intrusion (VI) issue a sub-slab depressurization system (SSDS) was installed 6 years ago. The SSDS is operating within design limits and has achieved building TCE vapor concentration reductions. However, subsequent periodic TCE vapor spikes based on daily HAPSITE™ measurements indicate additional source(s). Two rounds of smoke tests conducted in 2017 and 2018 involved introduction of smoke into a sanitary sewer and storm drain manholes located on effluent lines coming from the building until smoke was observed exiting system vents on the roof. Smoke testing revealed many leaks in both the storm sewer and sanitary sewer systems within the building. Sleuthing of the VI source term using a portable HAPSITE™ indicate elevated vapor TCE levels correspond with observed smoke emanation from utility lines. In some instances, smoke odors were perceived but no leak or suspect pipe was identified suggesting the odor originates from an unidentified pipe located behind or enclosed in a wall. Sleuthing activities also found building roof materials explain some of the elevated TCE levels on the 2nd floor. A relationship was found between TCE concentrations in the roof truss area, plenum space above 2nd floor offices, and breathing zone of 2nd floor offices. Installation of an external blower in the roof truss space has greatly reduced TCE levels in the plenum and office spaces. Preferential VI pathways and unexpected source terms may be overlooked mechanisms as compared to conventional VI.
APA, Harvard, Vancouver, ISO, and other styles
We offer discounts on all premium plans for authors whose works are included in thematic literature selections. Contact us to get a unique promo code!

To the bibliography