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Dissertations / Theses on the topic 'Silica films'

Author: Grafiati

Published: 8 June 2024

Last updated: 31 July 2025

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1

Campbell-Rance, Debbie. "Electrodeposited Silica Thin Films." VCU Scholars Compass, 2010. http://scholarscompass.vcu.edu/etd/2123.

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Sol-gel derived silica thin film synthesis has gained prominence because of the mild processing conditions and widespread understanding of the chemistry of the process. Traditionally, silicate films are prepared by spin- and dip-coating but these materials lack the desired porosity for sensing, separations and catalysis applications. Electrochemical deposition was proposed to improve the porosity of silicate films. The main aims of this work were threefold. First we wanted to elucidate what parameters influenced film formation during electrodeposition. Then we wanted to understand how th

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2

Spaargaren, Susan Marianne Rosemary. "Radiation effects on silica based waveguides." Thesis, Imperial College London, 1997. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.267942.

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3

Klichko, Yaroslav Vladimirovich. "Functional mesoporous silica films for nanosystems applications." Diss., Restricted to subscribing institutions, 2009. http://proquest.umi.com/pqdweb?did=1998520791&sid=1&Fmt=2&clientId=1564&RQT=309&VName=PQD.

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4

Kokan, Julie Runyan. "Processing of low permittivity silica thin films." Thesis, Georgia Institute of Technology, 1994. http://hdl.handle.net/1853/20032.

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5

Geite, Patrik. "Medical Implant Applications of Mesoporous Silica Films." Thesis, Linköpings universitet, Nanostrukturerade material, 2019. http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-154463.

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A literature review of medical implant applications of mesoporous silica films was written, highlighting the advantages and limitations of different film synthesis methods. Both films synthesized through the EISA sol-gel method and particulate films, including those synthesized through the direct growth method, were reviewed and discussed. All films were found to have their strengths and weaknesses, however, the films synthesized through the direct growth method was found to be the most promising type for coating implants. In addition to the literature review, copper-doped mesoporous silica fi

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6

Wooten, Mary K. "NANOFILTRATION MEMBRANES FROM ORIENTED MESOPOROUS SILICA THIN FILMS." UKnowledge, 2014. http://uknowledge.uky.edu/cme_etds/28.

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The synthesis of mesoporous silica thin films using surfactant templating typically leads to an inaccessible pore orientation, making these films not suitable for membrane applications. Recent advances in thin film synthesis provide for the alignment of hexagonal pores in a direction orthogonal to the surface when templated on chemically neutral surfaces. In this work, orthogonal thin film silica membranes are synthesized on alumina supports using block copolymer poly(ethylene glycol)-block-poly(propylene glycol)-block-poly(ethylene glycol) (P123) as the template. The orthogonal pore structure

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7

Bragg, Donald. "Photocatalytic Oxidation of Carbon Monoxide Using Sputter Deposited Molybdenum Oxide Thin Films on a Silicon Dioxide Substrate." Fogler Library, University of Maine, 2007. http://www.library.umaine.edu/theses/pdf/BraggD2007.pdf.

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8

Basnig, Deomila. "Élaboration de films minces de silice pour des applications en chimie analytique." Electronic Thesis or Diss., Université de Lorraine, 2021. http://www.theses.fr/2021LORR0102.

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Un film orienté à base de silice mésoporeuse sur une électrode FTO a été préparé par une approche d'auto-assemblage assistée par électrochimie (EASA). Un potentiel de -1,5 V a été appliqué à l'électrode FTO contenant un précurseur de silice préhydrolysée (par exemple, l'orthosilicate de tétraéthyle), en présence d'un modèle (par exemple, le bromure de cétrimonium) et d'un électrolyte. Cette approche permet de générer des nanocanaux de silice alignés verticalement avec des tailles de pores ajustables entre 2 et 3 nm, selon le modèle. Ce travail a montré le comportement voltammétrique et la séle

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9

CHAKRAVARTY, SRINIVAS L. N. "DEVELOPMENT OF SCRATCH RESISTANT PECVD SILICA-LIKE FILMS." University of Cincinnati / OhioLINK, 2000. http://rave.ohiolink.edu/etdc/view?acc_num=ucin973542599.

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10

Moskowitz, Steven. "Atomic force miscroscopy [sic] study of SiO₂/Si(111)--(7x7) grown via atomic oxygen plasma /." Thesis, Connect to this title online; UW restricted, 2005. http://hdl.handle.net/1773/11556.

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11

Sawtell, David Arthur Gregory. "Plasma enhanced chemical vapour deposition of silica thin films." Thesis, University of Manchester, 2011. https://www.research.manchester.ac.uk/portal/en/theses/plasma-enhanced-chemical-vapour-deposition-of-silica-thin-films(2c75bbd8-8d89-42f2-b926-b464e619b4aa).html.

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Atmospheric pressure chemical vapour deposition is an industrially significant process for forming functional thin films. There is a great opportunity for increased scientific understanding with the aim of improving current processes and helping to formulate new ones. This work is concerned with developing a methodology to assist this ongoing concern. A combination of spectroscopic and chemometric techniques are used to investigate several chemical vapour deposition processes. The first investigation concerns the spatial concentration mapping of key by-products during the thermal chemical vapo

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12

Steinthal, Michael Gregory 1964. "Laser densification of sol-gel-derived silica coatings." Thesis, The University of Arizona, 1989. http://hdl.handle.net/10150/277183.

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Sol-gel derived silica coatings were deposited on soda-lime-silica by dip-coating. An absorbing metallic layer was sputtered onto the surface of the gel to couple near-infrared radiation from a Nd:YAG laser into the transparent coating. Laser energy was utilized to heat the ceramic coating on a substrate which has a lower glass transition temperature than the coating. Scanning the sample across the beam's path resulted in the formation of a 50 mum wide channel. The characteristics of a channel were altered by varying laser power, sol-gel coating thickness, and scanning speeds. Profilometry and

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13

Yang, Hong. "Forms of mesoporous silica, fibers, films, curved shapes and patterns." Thesis, National Library of Canada = Bibliothèque nationale du Canada, 1998. http://www.collectionscanada.ca/obj/s4/f2/dsk1/tape10/PQDD_0006/NQ41535.pdf.

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14

MaCarthy, Orla. "Selective area doping of porous silica films for optical applications." Thesis, Imperial College London, 1998. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.299318.

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15

Abbas, Bassam. "Linear and nonlinear optical phenomena in thin sol-gel organic-inorganic films." Thesis, University of Reading, 1999. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.298744.

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16

De, Witt Joanna Christine. "Switching the reflection in chiral nematic mesoporous silica and organosilica films." Thesis, University of British Columbia, 2012. http://hdl.handle.net/2429/43781.

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17

Robertson, Joseph William F. "Fabrication, analysis and patterning of sol-gel based silica ultrathin films." Diss., The University of Arizona, 2004. http://hdl.handle.net/10150/280795.

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A novel approach to sol-gel thin film fabrication has been developed which leads to the production of ultrathin ∼2 nm to 100 nm thick silica and conductively-doped silica films on metal and semiconductor substrates. The research described herein focuses on the development, characterization and potential application of these thin films in current technology. These ultrathin films were fabricated by a sol-gel procedure, which utilized highly diluted silica precursor compounds. The [H₂O]:[Si] ratio ranged from 50 to 1000, far above the typical values (4-10) used in sol-gel film preparation. This

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18

Ghaffari, Kasra. "Optical interferometric measurement of in-plane residual stresses in SiO₂ films on silicon substrates." Diss., Georgia Institute of Technology, 1995. http://hdl.handle.net/1853/16815.

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19

De, Paz-Simon Héloise. "Sol-gel photopolymerization of inorganic precursors and application for mesoporous silica films elaboration." Thesis, Mulhouse, 2013. http://www.theses.fr/2013MULH6112/document.

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Alors que le procédé sol-gel a été fortement étudié il existe peu d’études concernant le procédé sol-gel photoinduit. Le principe repose sur la libération in situ d’espèces acides ou basiques photogénérées capables d’amorcer les réactions d’hydrolyse et de condensation caractéristiques du procédé sol-gel. L’alternative photoinduite est particulièrement adaptée pour préparer des films minces et possède de nombreux avantages tel qu’une formulation de départ stable, sans solvant et photolatente ainsi que des vitesses de réactions plus importantes. À partir de précurseurs inorganiques simples, nou

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20

Mårtensson, Niklas. "Optical Properties of Silica-Copper Oxide Thin Films Prepared by Spin Coating." Thesis, Linköpings universitet, Tillämpad optik, 2011. http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-71188.

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Optical properties of copper oxide nanoparticles in a silica matrix thin film have been investigated. Films were prepared on Si substrates from a sol-gel by spin coating. Four samples with different thicknesses, from 14,5-109 nm, were fabricated. Optical properties were measured with Variable Angle Spectroscopic Ellipsometry. The aim of the project was to gain further understanding of these films that are interesting in applications for solar absorbers as solar selective coatings. Ellipsometricangles Ψ and Δ were measured in the wavelength range from 250-1700 nm. A dispersion model was develop

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21

Björk, Emma M. "Mesoporous Building Blocks : Synthesis and Characterization of Mesoporous Silica Particles and Films." Doctoral thesis, Linköpings universitet, Nanostrukturerade material, 2013. http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-99858.

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Catalyst supports, drug delivery systems, hosts for nanoparticles, and solar cells are just some examples of the wide range of exciting applications for mesoporous silica. In order to optimize the performance of a specific application, controlling the material’s morphology and pore size is crucial. For example, short and separated particles are beneficial for drug delivery systems, while for molecular sieves, the pore size is the key parameter. In this thesis, mesoporous silica building blocks, crystallites, with hexagonally ordered cylindrical pores were synthesized, with the aim to understan

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22

WAGH, VIJAY HEMANT. "VAPOR PHASE SILANATION OF PLASMA-POLYMERIZED SILICA-LIKE FILMS BY 3-AMINOPROPYLTRIETHOXYSILANE." University of Cincinnati / OhioLINK, 2005. http://rave.ohiolink.edu/etdc/view?acc_num=ucin1121884987.

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23

TURNER, ROBERT HAINES. "MOLECULAR STRUCTURE OF INTERFACES FORMED WITH PLASMA POLYMERIZED SILICA-LIKE PRIMER FILMS." University of Cincinnati / OhioLINK, 2001. http://rave.ohiolink.edu/etdc/view?acc_num=ucin997298644.

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24

Ye, Fangmao. "Single molecule studies of meso/macro porous silica materials and gradient films." Diss., Manhattan, Kan. : Kansas State University, 2009. http://hdl.handle.net/2097/1699.

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25

Leuty, Gary Martin. "Structure and Dynamics of Fluoromethane Films Adsorbed on Graphite and Silica Substrates." OpenSIUC, 2010. https://opensiuc.lib.siu.edu/theses/402.

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Molecular Dynamics (MD) simulation methods were used to perform simulations of the adsorption of multilayer films of three fluoromethane compounds -- nonpolar CF4 and its polar relatives, CF3Cl and CF3Br -- onto two chemically and structurally different substrates: graphite and hydroxylated α-quartz (a form of silica). The purpose of the simulations was to determine how differences in polarity and substrate type affect the structure of film layers at the adsorption surface, as well as to compare how these factors affect the mobility of molecules near the surface as they move along or away from

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26

Motos, Blanca. "Silices fonctionnalisées contenant des espèces ioniques pour la catalyse hétérogène." Thesis, Montpellier, Ecole nationale supérieure de chimie, 2011. http://www.theses.fr/2011ENCM0015.

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La catalyse hétérogène est en plein développement pour des raisons économiques, de santé et de protection environnementale. Les travaux de cette thèse s'intéressent à la préparation des silices fonctionnalisées par des sous-structures ioniques pour leur application en catalyse hétérogène. D'abord, des matériaux mésoporeux fonctionnalisés par des entités di-aryl imidazoliums ont été préparés par des réactions de post-greffage. En plus, films de type PMO contenant des entités di-aryl imidazoliums ont été synthétisés en présence d'un surfactant anionique. Ensuite, complexes carbéniques N-hétérocy

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27

Kang, Laeugu. "Study of HFO₂ as a future gate dielectric and implementation of polysilicon electrodes for HFO₂ films /." Full text (PDF) from UMI/Dissertation Abstracts International, 2000. http://wwwlib.umi.com/cr/utexas/fullcit?p3004301.

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28

Cao, Yuanmei. "Antireflective Polyimide Based Films." University of Akron / OhioLINK, 2012. http://rave.ohiolink.edu/etdc/view?acc_num=akron1335501090.

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29

LORENZI, ROBERTO. "Silica based functional materials: - Charge transport in nanostructured SnO2: SiO2 thin films. - Second harmonic generation in niobium potassium silicate glasses. - Tapered silica optical microfibres for gas sensors." Doctoral thesis, Università degli Studi di Milano-Bicocca, 2010. http://hdl.handle.net/10281/10933.

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"Charge transport in nanostructured SnO2:SiO2 thin films": Silica based nanostructured thin films grown on silicon substrates are promising materials for novel light emitter devices. In particular, tin dioxide is a wide band gap n-type semiconductor (Eg=3.6 eV) with an expected band-to-band emission centered in the ultraviolet (344 nm) region of the electromagnetic spectrum. Our group succesfully demonstrated UV emission from such systems, but at the beginning of my work many issues in charge transport processes needed to be explained. Aim of this project was to clarify electric transport a

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30

Yilmaz, Emre. "Sensitization Of Sol-gel Derived Titania-silica Photocatalytic Thin Films With Ascorbic Acid." Master's thesis, METU, 2012. http://etd.lib.metu.edu.tr/upload/12614226/index.pdf.

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The photocatalytic activity of semiconductor metal oxides can be improved by the addition of sensitizer which enhances the band gap by considerable red shift of the absorption edge of semiconductor. In the present study, the effect of ascorbic acid as sensitizer on the photocatalytic activity of titania-silica binary mixtures was studied. The SiO2-TiO2 mixtures having 50wt%Ti:Si composition were prepared with sol-gel method. The surface area and porosity of the samples were modified by using various amounts of polyethylene glycol (PEG) as template. The thin films of the samples were obtained b

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31

Korkmaz, Erdural Beril. "Photocatalytic Antimicrobial And Self-cleaning Properties Of Titania-silica Mixed Oxide Thin Films." Phd thesis, METU, 2012. http://etd.lib.metu.edu.tr/upload/12615137/index.pdf.

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In this study photocatalytic antibacterial and self-cleaning activities of TiO2-SiO2 thin films as a function of TiO2/SiO2 ratios were investigated. TiO2-SiO2 mixed oxides were synthesized by sol-gel method and coated over soda-lime glass plates by dip coating technique. Escherichia coli was used as a model microorganism for the photocatalytic antibacterial tests. Degradation rate of methylene blue (MB) molecules was used to characterize photocatalytic self-cleaning activities of thin film surfaces. The maximum antibacterial activity was achieved over 92 wt% SiO2 containing thin films. Howe

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32

Taylor, Mark Philip. "Studies of the reaction of silane and hydrogen peroxide forming silica thin films." Thesis, University of Bristol, 1996. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.337161.

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33

Moloney, John, Thomas McDermott, Taslima Akter, et al. "Molecular simulation of the fabrication and permselective characterisation of thin nanoporous silica films." Diffusion fundamentals 16 (2011) 21, S. 1-3, 2011. https://ul.qucosa.de/id/qucosa%3A13753.

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34

Hudgins, Robert Anthony. "Photonic Applications of Rare Earth Doped TEOS Based Silica Thin Films and Waveguides." University of Cincinnati / OhioLINK, 2003. http://rave.ohiolink.edu/etdc/view?acc_num=ucin1054758007.

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35

Moloney, John, Thomas McDermott, Taslima Akter, et al. "Molecular simulation of the fabrication and permselective characterisation of thin nanoporous silica films." Universitätsbibliothek Leipzig, 2015. http://nbn-resolving.de/urn:nbn:de:bsz:15-qucosa-184768.

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36

Syme, Derric Benjamin. "Microfabrication and Characterization of Freestanding and Integrated Carbon Nanotube Thin Films." BYU ScholarsArchive, 2019. https://scholarsarchive.byu.edu/etd/7376.

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This work chronicles the fabrication of two unique thin films using carbon nanotubes. The first is a carbon film made primarily from vertically grown carbon nanotubes (CNTs) and rolled into lateral alignment. The second is an insulating film created by CNTs as a scaffolding to create a porous silica layer. Each topic represents a different method of utilizing CNTs for thin-film fabrication.Investigation of an entirely carbon thin film, comprised of aligned and laterally oriented carbon nanotubes was performed. The thin film was strengthened by deposition of amorphous carbon for a total thi

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37

Heineman, Dawn Laurel. "Optimization of ALD grown titania thin films for the infiltration of silica photonic crystals." Thesis, Available online, Georgia Institute of Technology, 2004:, 2004. http://etd.gatech.edu/theses/available/etd-05142004-143254/unrestricted/heineman%5Fdawn%5Fl%5F200407%5Fms.pdf.

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Thesis (M.S.)--School of Materials Science and Engineering, Georgia Institute of Technology, 2005. Directed by Christopher Summers.<br>Summers, Christopher, Committee Chair ; Snyder, Robert, Committee Member ; Wang, Zhong Lin, Committee Member. Includes bibliographical references.

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38

Fuhrich, Alexander Benedikt [Verfasser]. "Ultra-thin Germania and Germania-Silica films : Growth, structure and reactivity / Alexander Benedikt Fuhrich." Berlin : Freie Universität Berlin, 2019. http://d-nb.info/1199937002/34.

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39

Oblitas, Torrico Ruben Felipe Arturo [UNESP]. "Preparação e caracterização de híbridos orgânico-inorgânicos à base de epoxí-silica." Universidade Estadual Paulista (UNESP), 2016. http://hdl.handle.net/11449/139461.

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Submitted by RUBEN FELIPE ARTURO OBLITAS TORRICO null (ro1485@my.bristol.ac.uk) on 2016-06-08T13:51:30Z No. of bitstreams: 1 Dissertacao.pdf: 2188934 bytes, checksum: 633201227bb5f6a322e3d0dec8645d34 (MD5)<br>Rejected by Ana Paula Grisoto (grisotoana@reitoria.unesp.br), reason: Solicitamos que realize uma nova submissão seguindo as orientações abaixo: No campo “Versão a ser disponibilizada online imediatamente” foi informado que seria disponibilizado o texto completo porém no campo “Data para a disponibilização do texto completo” foi informado que o texto completo deverá ser disponibiliz

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Eker, Zeynep. "Preparation And Characterization Of Titania-silica-gold Thin Films Over Ito Substrates For Laccase Immobilization." Master's thesis, METU, 2009. http://etd.lib.metu.edu.tr/upload/3/12611022/index.pdf.

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The aim of this study was to immobilize the redox enzyme laccase over TiO2-SiO2-Au thin film coated ITO glass substrates in order to prepare electrochemically active surfaces for biosensor applications. Colloidal TiO2-SiO2-Au solution was synthesized by sol-gel route and thin film was deposited onto the substrates by dipcoating method. The cysteamine was utilized as a linker for immobilization of enzyme covalently through gold active sites. Preliminary studies were conducted by using invertase as model enzyme and Pyrex glasses as substrates. The effect of immobilization parameters such as im

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41

BENGU, BASAK. "THE MOLECULAR STRUCTURE OF INTERFACES FORMED BETWEEN PLASMA POLYMERIZED SILICA-LIKE FILMS AND EPOXY ADHESIVES." University of Cincinnati / OhioLINK, 2007. http://rave.ohiolink.edu/etdc/view?acc_num=ucin1195657609.

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42

Li, Xin. "MULTISCALE DYNAMIC MONTE CARLO / CONTINUUM MODELING OF DRYING AND CURING IN SOL-GEL SILICA FILMS." Lexington, Ky. : [University of Kentucky Libraries], 2008. http://hdl.handle.net/10225/950.

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Thesis (Ph. D.)--University of Kentucky, 2008.<br>Title from document title page (viewed on December 11, 2008). Document formatted into pages; contains: xii, 143 p. : ill. (some col.). Includes abstract and vita. Includes bibliographical references (p. 137-142).

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43

Boffelli, Marco <1987&gt. "Defects related cathodoluminescence of N-doped silica thin films prepared by radio frequency magnetron sputtering." Master's Degree Thesis, Università Ca' Foscari Venezia, 2012. http://hdl.handle.net/10579/1703.

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Lo scopo principale di questo lavoro è lo studio dettagliato di film sottili di N-SiO2, depositati mediante RF magnetron sputtering. Per studiare la natura della popolazione dei difetti nei film di SiO2 è stata utilizzata la spettroscopia da catodoluminescenza, mentre la caratterizzazione fisica è stata ottenuta attraverso misure RBS, XPS e IBIL. Allo scopo di studiare l’evoluzione termica dei film depositati, i campioni ottenuti sono trattati termicamente in un range di temperature da 50°C a 1200°C, con step di 50°C.

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Lewandowski, Adrián Leandro. "The Atomic Structure of Ultrathin Germania Films." Doctoral thesis, Humboldt-Universität zu Berlin, 2019. http://dx.doi.org/10.18452/20874.

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Die Herstellung von ultradünnen Germaniumdioxidfilmen auf Metallsubstraten ist erstmals erfolgreich gelungen. Die Filmstruktur konnte mittels oberflächensensitiven Techniken mit atomarer Präzision und chemischer Sensitivität aufgelöst werden. Zur Untersuchung werden STM-Bilder analysiert und durch niederenergetische Elektronenbeugung (LEED), eine dynamischen LEED-Studie und extern ausgeführte Dichtefunktionaltheorieberechnungen (DFT) ergänzt. In dieser Arbeit werden atomar aufgelöste Rastertunnelmikroskopiebilder (STM) von ultradünnen Germaniumdioxid- und Siliziumdioxidfilmen direkt vergl

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45

Foster, Evan Wayne. "Self-assembly of extended, high-density gold nanoparticle monolayers on silicon dioxide /." view abstract or download file of text, 2006. http://proquest.umi.com/pqdweb?did=1188875831&sid=1&Fmt=2&clientId=11238&RQT=309&VName=PQD.

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Thesis (Ph. D.)--University of Oregon, 2006.<br>Typescript. Includes vita and abstract. Includes bibliographical references (leaves 173-182). Also available for download via the World Wide Web; free to University of Oregon users.

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46

Del, Campo Menoyo Javier. "Compatibilisation of polyimide-silica ceramers and interfacial interactions with carbon fibres in high-temperature matrix composites." Thesis, Loughborough University, 1997. https://dspace.lboro.ac.uk/2134/27080.

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When the inorganic domain sizes in a composite are reduced to a level such that a "molecular composite" is formed, the hybrid materials are commonly referred to as "ceramers". Hybrid materials span from inorganically modified organic polymers to inorganic g1asses slightly modified by organic polymers. The incorporation of an inorganic phase into an organic polymer is done almost exclusively by the "sol-gel" process.

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47

Kaya, Sarp. "Structural and catalytic investigations on vanadium oxide nanoparticles supported on silica films grown an a Mo(112) substrate." Doctoral thesis, Humboldt-Universität zu Berlin, Mathematisch-Naturwissenschaftliche Fakultät I, 2007. http://dx.doi.org/10.18452/15639.

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Die breite Anwendung von Modellsystemen, um heterogene katalytische Prozesse zu verstehen, basiert darauf, die Lücke der strukturellen Komplexität zu überbrücken zwischen heutigen technischen Katalysatoren, bestehend aus einem Metalloxid sowie einem darauf geträgerten Metall, sowie kristallinen Metallen und planaren Metall/Oxid-Systemen, welche dazu benutzt werden, Struktur-Reaktivitäts-Beziehungen mittels einer Fülle von Surface Science-Methoden zu untersuchen. In der vorliegenden Arbeit liegt das Hauptaugenmerk auf so genannten Vanadiumoxid-‚Monolagen’-Katalysatoren, die insbesondere für Oxi

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48

Guillemin, Yann. "Électrogénération sol-gel de films minces siliceux mésostructurés : méthylation, variations structurales, contrôle morphologique et microlithographie." Thesis, Université de Lorraine, 2012. http://www.theses.fr/2012LORR0249/document.

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Grâce à un mécanisme coopératif d'auto-assemblage électro-assisté ("Electro-Assisted Self-Assembly" : EASA), l'électrogénération de couches minces sol-gel à partir d'un sol constitué d'alcoxysilanes et d'un tensioactif cationique (bromure de cétyltriméthylammonium : CTAB) permet l'accès à des films mésostructurés présentant des mésopores orientés perpendiculairement au support. Des films mésostructurés à base de silice méthylée présentant une porosité organisée et "verticalement" orientée ont été électrogénérés en réalisant la co-condensation en une étape d'un alcoxysilane et d'un organo-alcox

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hung, chien chi, and 簡吉鴻. "Silica、Zirconia and Zirconium Silicate Thin Films Prepared by Magnetron Sputtering." Thesis, 2001. http://ndltd.ncl.edu.tw/handle/85817605148903407982.

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Abstract:

碩士<br>國立東華大學<br>材料科學與工程研究所<br>89<br>The developments of future gate oxide of MOS device for ULSI technology and next-generation capacitor of DRAM devices for memory storage require new dielectric materials. There is significant interest in using ZrO2 for the fabrication of charge storage insulators in the next generation memories. In this study, thin films of zirconia, silica, and zirconium silicate were deposited on Si(100) and glass substrates by R.F. magnetron sputtering from zirconia, silica and zirconium silicate composite ceramic targets instead of metal targets. This research

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WANG, CHEN-JUI, and 王貞芮. "The study of copper-silica nanocomposite films." Thesis, 2005. http://ndltd.ncl.edu.tw/handle/54097224380372810920.

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Abstract:

碩士<br>國立臺灣科技大學<br>材料科技研究所<br>93<br>This thesis uses the magnetron co-sputter to deposit Cu-SiO2 composite films, and probe electricity in the composite films of different copper content. The first part of experiment studies composition and structure of the as-deposited and annealed Cu-SiO2 films, using XPS. The second part of experiment studies the change of crystallite size in the Cu-SiO2 films, using XRD, TEM, and UV-Visible spectroscopy. The third part of experiment studies electrical properties of the Cu-SiO2 films using Ti/ Cu-SiO2/Ti sandwich structure. Both Cu and Cu2O crystallite appea

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