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1

Vigna, Benedetto, Paolo Ferrari, Flavio Francesco Villa, Ernesto Lasalandra, and Sarah Zerbini, eds. Silicon Sensors and Actuators. Cham: Springer International Publishing, 2022. http://dx.doi.org/10.1007/978-3-030-80135-9.

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2

Jain, Vipul, and Payam Heydari. Automotive Radar Sensors in Silicon Technologies. New York, NY: Springer New York, 2013. http://dx.doi.org/10.1007/978-1-4419-6775-6.

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3

Jain, Vipul. Automotive Radar Sensors in Silicon Technologies. New York, NY: Springer New York, 2013.

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4

Kopsalis, Ioannis. Surface Effects in Segmented Silicon Sensors. Hamburg: Staats- und Universitätsbibliothek Hamburg, 2017.

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5

F, Wolffenbuttel R., ed. Silicon sensors and circuits: On-chip compatibility. London: Chapman & Hall, 1996.

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6

Yu, Chen Liang, and United States. National Aeronautics and Space Administration., eds. SiC-based gas sensors. [Washington, D.C: National Aeronautics and Space Administration, 1997.

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7

M, Meijer G. C., ed. The piezojunction effect in silicon integrated circuits and sensors. Boston: Kluwer Academic Publishers, 2002.

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8

Amorphous silicon carbide thin films: Deposition, characterization, etching, and piezoresistive sensors applications. Hauppauge, N.Y: Nova Science Publishers, 2011.

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9

Pike, Andrew Charles. Design of chemoresistive silicon sensors for application in gas monitoring. [s.l.]: typescript, 1996.

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10

Institute of Physics (Great Britain). Instrument Science and Technology Group., ed. Silicon based sensors: From a meeting of the Instrument Science and Technology Group of the Institute of Physics 8 December 1986 London. Bristol: Institute of Physics, 1986.

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11

Yu, Chen Liang, and United States. National Aeronautics and Space Administration., eds. Electronic and interfacial properties of Pd/6H-SiC Schottky diode gas sensors. [Washington, DC]: National Aeronautics and Space Administration, 1996.

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12

United States. National Aeronautics and Space Administration., ed. Properties of thin films for high temperature flow sensors: Final report for the period ended August 20, 1990. [Washington, DC: National Aeronautics and Space Administration, 1991.

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13

United States. National Aeronautics and Space Administration., ed. Properties of thin films for high temperature flow sensors: Final report for the period ended August 20, 1990. [Washington, DC: National Aeronautics and Space Administration, 1991.

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14

Mahmoud, Kamal-Eldin Mohamed. Non-linear A/D converters for integrated silicon smart sensors =: Niet-lineaire A/D omzetters voor smart geïntegreerde silicium sensoren. Delft, Netherlands: Delft University Press, 1994.

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15

United States. National Aeronautics and Space Administration., ed. Fiber-optic temperature sensor using a thin-film Fabry-Perot interferometer. [Cleveland, Ohio]: Dept. of Electrical Engineering and Applied Physics, Case Western Reserve University, 1997.

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16

United States. National Aeronautics and Space Administration., ed. Fiber-optic temperature sensor using a thin-film Fabry-Perot interferometer. [Cleveland, Ohio]: Dept. of Electrical Engineering and Applied Physics, Case Western Reserve University, 1997.

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17

Laconte, J. Micromachined thin-film sensors for SOI-CMOS co-integration. New York: Springer, 2011.

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18

T, Henderson H., and United States. National Aeronautics and Space Administration., eds. Liquid metal micro heat pipes for space radiator applications: Final report. Cincinnati, Ohio: University of Cincinnati, 1995.

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19

United States. National Aeronautics and Space Administration., ed. Final technical report on The development of silicon carbide based hydrogen and hydrocarbon sensors: NASA grant no. NCC3-378. Cleveland, Ohio: Case Western Reserve University, 1994.

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20

Ukraine) International Workshop on Semiconductor-on-Insulator Materials and Devices (6th 2010 Kiev. Nanoscaled semiconductor-on-insulator materials, sensors and devices: Selected, peer reviewed papers from the 6th International Workshop on Semiconductor-on-Insulator Materials and Devices, 24-28 October, 2010 Kyiv, Ukraine. Durnten-Zurich, Switzerland: Trans Tech Publications, 2011.

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21

Glenn, Behelm, and Lewis Research Center, eds. Silicon-etalon fiber-optic temperature sensor. [Cleveland, Ohio: National Aeronautics and Space Administration, Lewis Research Center, 1989.

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22

Glenn, Beheim, and Lewis Research Center, eds. Silicon-etalon fiber-optic temperature sensor. [Cleveland, Ohio: National Aeronautics and Space Administration, Lewis Research Center, 1989.

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23

Glenn, Behelm, and Lewis Research Center, eds. Silicon-etalon fiber-optic temperature sensor. [Cleveland, Ohio: National Aeronautics and Space Administration, Lewis Research Center, 1989.

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24

Evolution of silicon sensor technology in particle physics. Berlin: Springer, 2009.

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25

Hartmann, Frank. Evolution of Silicon Sensor Technology in Particle Physics. Cham: Springer International Publishing, 2017. http://dx.doi.org/10.1007/978-3-319-64436-3.

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26

Silicon-on-sapphire circuits and systems: Sensor and biosensor interfaces. New York: McGraw Hill, 2010.

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27

Culurciello, Eugenio. Silicon-on-sapphire circuits and systems: Sensor and biosensor interfaces. New York: McGraw-Hill, 2010.

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28

Culurciello, Eugenio. Silicon-on-sapphire circuits and systems: Sensor and biosensor interfaces. New York: McGraw Hill, 2010.

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29

O'Halloran, Geraldine Miriam. Capacitive humidity sensor based on porous silicon =: Capacitieve vochtsensor op basis van porous silicium. Delft, Netherlands: Delft University Press, 1999.

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30

Hout, Sebastiaan Roderick In't. High-Temperature Silicon Sensors. Delft Univ Pr, 1996.

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31

STEFANOV. Physics of Silicon Image Sensors. Institute of Physics Publishing, 2022.

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32

Trautweiler, Stephan F. Silicon Hot Film Flow Sensors. Physical Electronics Laboratory, Zurich, Switzerland, 1997.

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33

Silicon Sensors (Microelectronics and Signal Processing). Academic Pr, 1989.

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34

Putten, Michael J. A. M. Van. Flow Measurements With Thermal Silicon Sensors. Delft Univ Pr, 2000.

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35

Automotive Radar Sensors in Silicon Technologies. Springer, 2012.

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36

Heydari, Payam, and Vipul Jain. Automotive Radar Sensors in Silicon Technologies. Springer, 2014.

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37

Silicon Based Sensors (Iop Short Meetings No 3). Inst of Physics Pub Inc, 1987.

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38

Wolffenbuttel, R. F. Silicon Sensors and Circuits: On-Chip Compatibility. Springer, 1995.

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39

Ferrari, Paolo, Benedetto Vigna, Flavio Francesco Villa, Ernesto Lasalandra, and Sarah Zerbini. Silicon Sensors and Actuators: The Feynman Roadmap. Springer International Publishing AG, 2021.

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40

Kallepalli, Lakshmi Narayana Deepak, ed. Applications of Silicon Photonics in Sensors and Waveguides. InTech, 2018. http://dx.doi.org/10.5772/intechopen.71590.

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41

Meijer, Gerard C. M., and Fabiano Fruett. Piezojunction Effect in Silicon Integrated Circuits and Sensors. Springer London, Limited, 2006.

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42

Nguyen, Nam-Trung, Toan Dinh, and Dzung Viet Dao. Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors. Springer, 2018.

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43

Fruett, Fabiano. The Piezojunction Effect in Silicon Integrated Circuits and Sensors. Springer, 2010.

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44

The Piezojunction Effect in Silicon Integrated Circuits and Sensors. Boston: Kluwer Academic Publishers, 2003. http://dx.doi.org/10.1007/b101922.

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45

Friedrichs, Peter, Gerhard Pensl, Lothar Ley, and Tsunenobu Kimoto. Silicon Carbide, Volume 2 Vol. 2: Power Devices and Sensors. Wiley & Sons, Limited, John, 2011.

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46

Friedrichs, Peter, Gerhard Pensl, Lothar Ley, and Tsunenobu Kimoto. Silicon Carbide, Volume 2 Vol. 2: Power Devices and Sensors. Wiley & Sons, Incorporated, John, 2011.

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47

Non-Linear A/d Converters for Integrated Silicon Smart Sensors. Delft Univ Pr, 1994.

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48

Phan, Hoang-Phuong. Piezoresistive Effect of P-Type Single Crystalline Sic: Silicon Carbide Mechanical Sensors for Harsh Environments. Springer, 2017.

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49

Bhattacharya, Enakshi. Biosensing with Silicon: Fabrication and Miniaturization of Electrochemical and Cantilever Sensors. Springer International Publishing AG, 2022.

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50

Hammes, P. C. A. Infrared Matrix Sensor Using Pvdf on Silicon: Theory, Design, Fabrication and Testing of Pyroelectric Sensors Using Dvdf. Delft Univ Pr, 1994.

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