Academic literature on the topic 'SIOS NMM-1'
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Journal articles on the topic "SIOS NMM-1"
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Schuler, A., T. Hausotte, and Z. Sun. "Micro- and nanocoordinate measurements of micro-parts with 3-D tunnelling current probing." Journal of Sensors and Sensor Systems 4, no. 1 (2015): 199–208. http://dx.doi.org/10.5194/jsss-4-199-2015.
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Abstract. Measurement tasks of modern micro- and nanometrology are posing a problem for current measurement instruments with decreasing structure sizes and rising aspect ratios. There is an open requirement for nanometre-resolving 3-D capable sensors and corresponding 3-D positioning systems to operate the sensors for 3-D measurements. A 3-D probing system based on electrical interaction is presented which is operated on a nanopositioning system type SIOS NMM-1. Furthermore, we demonstrate the progress and new possibilities for 3-D measurements with the nanopositioning and nanomeasurement machine NMM-1 and also with the application of a rotary kinematic chain. In addition new 3-D measurement routines for the NMM-1, also for micro-tactile probing systems as well as current plans, are shown.
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Ferdov, S., V. Kostov-Kytin, and O. Petrov. "Improved powder diffraction patterns for synthetic paranatisite and natisite." Powder Diffraction 17, no. 3 (2002): 234–37. http://dx.doi.org/10.1154/1.1483323.
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Synthetic analogues of the minerals natisite and for the first time of paranatisite were prepared hydrothermally at 200 °C in the system Na2O–TiO2–SiO2–H2O. The obtained powder x-ray diffraction (XRD) patterns were interpreted by the Powder Data Interpretation (PDI) software package. As a result improved indexing and unit cell parameters refinements of these two phases were achieved. Synthetic natisite is tetragonal, space group—P4/nmm, a=0.649 67(8) nm, c=0.508 45(11) nm, V=0.214 50(10) nm3, Z=2, Dcal=3.13 g.cm−1, F30=37.48, M20=52.79. Synthetic paranatisite is orthorhombic, space group—Pmma, a=0.983 86(29) nm, b=0.919 23(19) nm, c=0.481 84(12) nm, V=0.435 78(19) nm3, Z=1, Dcal=3.01 g.cm−1, F30=16.42, M20=29.21.
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Myronyuk, I. F., V. I. Mandzyuk, V. M. Sachko, and Yu O. Kyluk. "The Morphology and Conductive Properties of Composite Material SiO2 – C." Фізика і хімія твердого тіла 16, no. 4 (2015): 700–705. http://dx.doi.org/10.15330/pcss.16.4.700-705.
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The article explores the structure, morphology and conductive properties of composite material SiO2 – C using XRD, SAXS, low-temperature nitrogen adsorption, and impedance spectroscopy methods. It is set that SiO2 – C composite obtained by thermolytic decomposition of D-lactose, previously chemisorbed on fumed silica nanoparticles surface, has an open porous structure, in which mesopores of 6-12 nm in size are dominate. At weight ratio SiO2/C = 5/1 nanocrystallites of carbon phase in form of lamellar sheets of 0,4 × 0,4 × 5,0 nm3 in size contact with entire silica surface that results in composite material conductivity is 49 Оhm-1·m-1.
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Khouri, Issa F., Saliba M. Rima, Francesco Turturro, et al. "Bortezomib and BEAM-Rituximab Reduced-Intensity Conditioning for High-Risk Lymphoma Patients Who Are Not Eligible for Nonmyeloablative Allogeneic Stem Cell Transplantation." Blood 120, no. 21 (2012): 4157. http://dx.doi.org/10.1182/blood.v120.21.4157.4157.
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Abstract Abstract 4157 Background: We previously reported promising results with nonmyeloablative (NMA) allogeneic transplantation for indolent non-Hodgkin's lymphomas (NHL) (Khouri et al, Blood 2012; 119:6373). This strategy is however less effective in aggressive, bulky, chemoresistant, or heavily pre-treated lymphomas. The BEAM-rituximab is a commonly used regimen in transplantation for NHL. Bortezomib has synergistic activity with rituximab, is effective against many NHL subtypes with moderate non-hematologic toxicity; in addition, animal models suggest that pre-transplant bortezomib may reduce the risk of GVHD. We hypothesized that the addition of bortezomib to the conditioning would enhance initial disease control and that remission could be later sustained via the GVL effect of the graft, with lesser GVHD. Methods: We included pts up to 70 yrs, with relapsed/refractory NHL, acceptable organ function, having a matched donor, and who were not eligible for NMA transplantation. Bortezomib was designed to be given iv in an escalated dose of 1.0, 1.3, and 1.6 mg/m2 days-13, -6, - 1 and + 2. Rituximab was given at a dose of 375 mg/m2 on day -13 and 1000 mg/m2 on days -6, +1, and +8, as previously described. BEAM consisted of carmustine 300 mg/m2day-6, cytarabine 100 mg/m2 and etoposide 100 mg/m2 twice/day, days -5 to -2, and melphalan100 mg/m2 on day-1. Tacrolimus and methotrexate was used for GVHD prophylaxis. In addition, thymoglobulin of 1 mg/kg was given on days -2, and -1 in pts receiving an unrelated donor. Results: The study included 35 pts [Aggressive DLBCL=20, Indolent (CLL/FL with aggressive features =15)]. All pts had relapsed disease after the best conventional therapy (-ies) available. Median age was 53 (range, 22–65) years. Median prior treatments were 3 (range, 1–7). At transplant, 14 pts (51%) had refractory disease and 23 (66%) were PET+. Twenty-two pts (63%) received their transplants from HLA-compatible siblings (Sibs) and 13 (37%) from unrelated donors (MUDs). Bortezomib could not be escalated beyond the initial 1.0 mg/m2 per dose due to toxicity (2 of 3 pts treated at 1.3 mg/m2 died of sepsis related to C.Difficile; since then all pts received flagyl prophylaxis till engraftment). Blood was the source of donor graft in 97% of pts. All pts engrafted donor cells. Median donor T cells at day 30 were 100%. With a median follow-up time of 24.5 months (range, 5–49), the OS for the aggressive and indolent histologies were 58% and 44%, respectively (p=0.5); PFS rates were 32% in both. Determinants of outcomes were related to donor type, and age. In pts <50 yrs, the 2-yrs OS rates for Sibs and MUDs were 76% and 67%, respectively (p=0.4) (Fig 1). In pts >50 yrs, the 2-years OS and PFS for sibs were 62% and 45%, respectively, vs 0% for the MUDs (Fig 1). There was no difference in pts and disease characteristics, or histology distribution between the 4 groups. In pts < 50 yrs, 2-year treatment-related mortality in Sibs and MUDs was 22% and 17% (p=0.9); whereas the incidence was significantly higher in >50 yrs pts receiving MUDs (62% vs 37%, p=0.03). This difference may be related to a higher incidence in acute 2–4 GVHD in >50 yrs pts receiving MUDs transplants (62% vs 33% in pts >50yrs receiving Sibs transplants). In <50 yrs pts, the incidence of acute 2–4 GVHD in the Sibs and MUDs transplants were 44% and 33%, respectively (p=0.8). Eighteen pts died: causes were related to infection [(n=6, (2 of which in the setting of GVHD)], acute GVHD (n=3), chronic GVHD (n=4), progression (n=3) and unknown (n=2). Conclusions: Our results suggest that in pts with high-risk NHL and who were not eligible for NMA allogeneic transplantation, the bortezomib-BEAM-rituximab conditioning has promising PFS rates of 40% at 2-years in pts younger than 50 yrs. Alternative strategies are needed for pts >50 yrs, receiving an unrelated donor transplant. Results warrant further study and refinement. Disclosures: Khouri: Millenium Pharmaceuticals: Research Funding.
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Shevtsov, Andrey, Haixiang Han, Anatolii Morozov, et al. "Protective Spinel Coating for Li1.17Ni0.17Mn0.50Co0.17O2 Cathode for Li-Ion Batteries through Single-Source Precursor Approach." Nanomaterials 10, no. 9 (2020): 1870. http://dx.doi.org/10.3390/nano10091870.
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The Li1.17Ni0.17Mn0.50Co0.17O2 Li-rich NMC positive electrode (cathode) for lithium-ion batteries has been coated with nanocrystals of the LiMn1.5Co0.5O4 high-voltage spinel cathode material. The coating was applied through a single-source precursor approach by a deposition of the molecular precursor LiMn1.5Co0.5(thd)5 (thd = 2,2,6,6-tetramethyl-3,5-heptanedionate) dissolved in diethyl ether, followed by thermal decomposition at 400 °C inair resulting in a chemically homogeneous cubic spinel. The structure and chemical composition of the coatings, deposited on the model SiO2 spheres and Li-rich NMC crystallites, were analyzed using powder X-ray diffraction, electron diffraction, high angle annular dark-field scanning transmission electron microscopy (HAADF-STEM), and energy-dispersive X-ray (EDX) mapping. The coated material containing 12 wt.% of spinel demonstrates a significantly improved first cycle Coulombic efficiency of 92% with a high first cycle discharge capacity of 290 mAhg−1. The coating also improves the capacity and voltage retention monitored over 25 galvanostatic charge–discharge cycles, although a complete suppression of the capacity and voltage fade is not achieved.
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Bräuchle, Sebastian, and Hubert Huppertz. "Synthesis and structural characterization of the new rare-earth borosilicates Pr3BSi2O10 and Tb3BSi2O10." Zeitschrift für Naturforschung B 70, no. 12 (2015): 929–34. http://dx.doi.org/10.1515/znb-2015-0143.
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AbstractThe rare-earth borosilicates RE3BSi2O10 (RE = Pr, Tb) were synthesized under high-temperature conditions of 1600 °C in a radio frequency furnace from praseodymium oxide, terbium oxide, silicon dioxide, silicon nitride, boron trioxide, and boric acid. The structure determinations based on powder diffraction data revealed that both phases RE3BSi2O10 (RE = Pr, Tb) are isotypic to Gd3BSi2O10 [L. Chi, H. Chen, X. Lin, H. Zhuang, J. Huang, Jiegou Huaxue1998, 17, 297]. The compounds crystallize in the orthorhombic space group Pbca (no. 61) with eight formula units and the lattice parameters a = 982.9(2), b = 714.2(2), c = 2314.4(4) pm, V = 1.6247(4) nm3, Rp = 0.0231, and Rwp = 0.0354 (all data) for Pr3BSi2O10 and a = 960.5(5), b = 692.1(3), c = 2272.4(1) pm, V = 1.5106(2) nm3 for Tb3BSi2O10. The lattice parameters of Tb3BSi2O10 could be determined, but a final refinement of the powder data has not proved satisfactory. The structure of Pr3BSi2O10 exhibits eight- (Pr1) and ninefold coordinated rare-earth cations (Pr2 and 3). Layers of ortho-silicate anions [SiO4]4– and borosilicate anions [BSiO6]5– are arranged alternatingly along the c axis and the RE cations are located in between.
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Mishra, Indu B., Diana Khusnutdinova, and William T. Petuskey. "Surface Composition of TiO2-Zn Nanotubes by NanoSIMS." MRS Advances 1, no. 46 (2016): 3151–56. http://dx.doi.org/10.1557/adv.2016.426.
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ABSTRACTTitania nanotubes were prepared by anodic oxidation of Ti. The titania surfaces were partially coated with Zn by reacting zinc acetate with the nanotubes and then annealed. [1] An annealed nanotube cluster was placed carefully on a silicon wafer using tweezers. Secondary electron images were acquired by bombarding with Cs+ and observing the ejected OZn- and OTi- respectively. The SIMS analysis was done in ultra-high vacuum (∼ 10-10 Torr). The location of before and after the SIMS analysis was confirmed by scanning electron microscopy (SEM). Specific areas with various orientations (vertical and horizontal orientations) of the nanotubes were selected for the NanoSIMS 50L analysis. The NanoSIMS 50L is made by Ametek Cameca, Gennevillieres, France and is capable of doing in situ isotopic analysis of surfaces at high spatial resolution (25 nm2). The average ZnO/TiO was ∼1.8%, confirming the actual content of Zn used during synthesis of the nanotubes. Qualitatively, the TiO/ZnO ratio increased with increasing depth implying that ZnO concentration was decreasing as we probed into the nanotubes.
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Pan Feng, 潘峰, 陈松林 Chen Songlin, 李海波 Li Haibo, 马平 Ma Ping, and 王震 Wang Zhen. "Laser-induced damage of 1 064 nm antireflection/532 nm high-reflection bichromatic coatings." High Power Laser and Particle Beams 23, no. 1 (2011): 75–78. http://dx.doi.org/10.3788/hplpb20112301.0075.
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Weber, W. J., R. K. Eby, and R. C. Ewing. "Accumulation of structural defects in ion-irradiated Ca2Nd8(SiO4)6O2." Journal of Materials Research 6, no. 6 (1991): 1334–45. http://dx.doi.org/10.1557/jmr.1991.1334.
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Ion irradiations of the rare-earth orthosilicate, Ca2Nd8(SiO4)6O2, have been carried out using both alpha particles (emitted from a 238PuO2 source) and 3 MeV argon ions. The unit cell exhibits anisotropic expansion under irradiation, consistent with expectations based on the polyhedral connectivity within the structure. A least-squares analysis of the interatomic distances suggests that the unit-cell expansions are primarily due to changes in oxygen-oxygen distances and cation separations between neighboring polyhedra rather than to bonds within polyhedra. The irradiation-induced change in unit-cell volume is proportional to 1 – exp (BD), where B is an annealing rate constant and D is the dose, in agreement with a model for the accumulation of isolated point defects in the structure. The volume expansion saturates at 2.56% and 1.40% for the alpha and argon irradiations, respectively. Analysis of the results suggests that a significant fraction of the defects produced in the argon-ion displacement cascades are lost to in-cascade recombination. Differential scanning calorimetry of powder irradiated with 3 MeV argon ions to 20 ions/nm2 reveals an exothermic recovery peak at 350 °C with an activation energy of 1.3 ± 0.1 eV and average stored energy release of 28.2 J/g. There is no evidence for amorphization of this material under alpha or argon irradiation.
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Fukuda, Koichiro, Tomoyuki Iwata, and Eric Champion. "Crystal structure of lanthanum oxyorthosilicate, La2SiO5." Powder Diffraction 21, no. 4 (2006): 300–303. http://dx.doi.org/10.1154/1.2383066.
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The crystal structure of La2SiO5 was refined from laboratory X-ray powder diffraction data (CuKα1) using the Rietveld method. The crystal structure is monoclinic (space group P21∕c,Z=4) with lattice dimensions a=0.93320(2) nm, b=0.75088(1) nm, c=0.70332(1) nm, β=108.679(1)°, and V=0.46687(1) nm3. The final reliability indices were Rwp=7.14%, RP=5.52%, and RB=3.83%. There are two La sites in the structural model, La1 and La2. La1 is ninefold coordinated to oxygen, forming a tricapped trigonal prism with a mean La1-O distance of 0.263 nm. The La2O7 coordination polyhedron is a distorted capped octahedron with a mean La2-O distance of 0.251 nm. The La1O9 polyhedra share faces and the La2O7 polyhedra share edges, forming two sets of sheets that alternate parallel to the (100) plane. These sheets are linked through SiO4 tetrahedra and non-silicon-bonded oxygen atoms to form a three-dimensional structure. This compound is isomorphous with the low-temperature (X1) phases of R2SiO5 (R=Y and Gd). The volumes of RO9 polyhedra steadily increase with increasing ionic radius of R, from Y3+ to Gd3+ to La3+, which causes substantial volumetric expansion of the crystals.
Dissertations / Theses on the topic "SIOS NMM-1"
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Brlica, Pavel. "Stanovení nejistoty měření nano-CMM." Master's thesis, Vysoké učení technické v Brně. Fakulta strojního inženýrství, 2018. http://www.nusl.cz/ntk/nusl-377646.
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The topic of this master thesis is the issue of measurement uncertainty of nano-CMM, specifically SIOS NMM-1 machine. Theoretical part of the thesis consists of basic measurement uncertainty definitions, description of approaches to CMM measurement uncertainty and differences between classical CMM and nano-CMM. For measurement uncertainty calculation of nano-CMM, two method are chosen and adapted – substitution method and Monte Carlo method. These are applied in practical part for measurement uncertainty calculation of SIOS NMM-1 machine. Part of the practical part is performed measurement on machine in laboratory at the Czech Metrology institute in Brno. The outcome of this thesis is determination of measurement uncertainty of SIOS NMM-1.
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Češek, Jakub. "Návrh vhodného etalonu délky pro oblast nanometrologie na pracovištích ČMI Brno a CEITEC Brno." Master's thesis, Vysoké učení technické v Brně. Fakulta strojního inženýrství, 2019. http://www.nusl.cz/ntk/nusl-402562.
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The thesis deals with the design of a suitable length standard for nanometrology. This length standard will be used for metrological traceability of the Rigaku nano3DX located at CEITEC Brno and the SIOS NMM-1 device which is located at ČMI Brno. The first part is focused on the description of these measuring instruments, the analysis of their metrological traceability requirements and the requirements for the material length standard. The second part is devoted to the concrete possibilities of the etalon design, 3D printing of the prototype of the standard and verification of its dimensional compatibility. At the end of the thesis, the evaluation and selection of the appropriate standard design is made.
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Kožiol, Martin. "Návrh vhodného etalonu délky pro nano-CT měřicí přístroj." Master's thesis, Vysoké učení technické v Brně. Fakulta strojního inženýrství, 2020. http://www.nusl.cz/ntk/nusl-417542.
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The diploma thesis deals with the design of three length standards, which will serve to ensure metrological traceability between Rigaku nano3DX, SIOS NMM-1, Zeiss UPMC Carat 850 and other devices located at ÚVSSR BUT and CEITEC Brno. The first part of the thesis focuses on the theoretical acquaintance with concepts closely related to the issue of ensuring metrological traceability. In addition, this section deals with computed tomography and the description of individual devices. The second part of the thesis is devoted to design, production process and testing of individual standards. The last part describes the ensuring the calibration of the smallest standard, the so-called Nano standard and the calculation of the uncertainty of measuring its calibrated length. At the end of the thesis, the outputs of these activities are evaluated.
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Shih, Yu-Hsien, and 施郁嫻. "(1) Ionic outgassing from underlayer materials and photoresist upon irradiation at 13.5 nm (2) Preparation and characterization of Al2O3-modified SiO2 mesoporous materials." Thesis, 2009. http://ndltd.ncl.edu.tw/handle/ab3srs.
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碩士國立高雄大學
應用化學系碩士班
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(1) Extreme ultraviolet lithography (EUVL) using 13.5-nm radiation as the light source is likely candidate for the next generation lithography beyond the 22 nm technology node. Under high vacuum conditions, outgassing species from EUV photoresist upon irradiation at 13.5-nm will result in the degradation of EUV optics. Previous outgassing studies of EUV photoresist focused on neutral fragment studies. This work examines relative rates of ionic outgassing, and measures pressure-rise, characterizes outgassed ions and measures decay rates of F+, CH3+, and C2H5+ from photoresist and underlayer materials upon irradiation at 13.5-nm using quadrupole mass spectrometry (QMS) without turning on the ionizer of QMS. Measurements were conducted at the BL08A - LSGM beamline of NSRRC. Test samples include PMMA, round-robin resist, and twenty-three of underlayer materials. The result suggests that F+ is the most abundant outgassing species in most cases, except PMMA, which contains no fluorine. PMMA gives off the most abundant CH3+ and pressure-rise, and the most pressure-rise is an evidence of its abundant neutral outgassing. In addition, most underlayer materials give off less extent of overall ionic and neutral outgassing than the round-robin resist. The extent of F+ outgassing is linearly dependent on the ratio of F photoabsorption to the overall EUV photoabsorption of the sample. However, the extent of CmHn+ outgassing shows no dependency on the hydrocarbon portion of photoabsorption. This work derives the Dill’s parameter C of reactions leading to ionic outgassing by monitoring ion intensities as a function of the exposure dose using the QMS method. (2) This work pressed commercial microporous SiO2 samples to generate mesoporous structures by a pelleting machine. In order to increase surface reactivity of SiO2, four Al2O3 precursors were processed by the impregnation and calcination steps to synthesize Al2O3- modified the SiO2 templates. Those mesoporous templates utilized the CH4 chemical vapor deposition (CVD) method to synthesize mesoporous carbon. After CVD, these carbon/template composite were treated by 6% HF solution for the removal of the template. The SiO2, Al2O3 - modified SiO2, and resulting mesoporous carbon materials were characterized by power X-ray diffraction (XRD) to analyze their lattice structure, surface area and porosity analyzer to analyze surface and porosity, and thermogravimetric analyzer (TGA) to analyze thermal stability and the carbon growth yield. The results suggest that the SiO2 structure stays the same after being pressed at 600 kg cm-2 and calcinated at 900°C. The surface area and pore volume decrease with the increment of impregnation as a result that the impregnated molecules choke micropores. When a Al2O3 precusor uses water as the solution, the modified templates have a similar surface area, form mesopores with a broad pore-size distribution, and give a lower reactivity for the carbon formation. The mesoporous carbon grown in a wafer-free condition has a higher carbon formation rate. The result of the TGA analysis indicates that the maximum combustion rate is identical at about 750°C for all carbon materials generated by different experimental conditions of this work. The best conditions of this work to generate mesoporous carbon with a surface area >1000 m2 g-1 and pore volume 2.5 cm3 g-1 is by growing carbon materials covering over about one half the surface area of the modified template by the water-free process.
Book chapters on the topic "SIOS NMM-1"
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"Experimental Study of Lubricating Property at Grinding Wheel/Workpiece Interface Under NMQL Grinding." In Enhanced Heat Transfer Mechanism of Nanofluid MQL Cooling Grinding. IGI Global, 2020. http://dx.doi.org/10.4018/978-1-7998-1546-4.ch012.
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Nanofluid is the suspension formed by lubricating oil and nanoparticles with particles sizes of 1~100 nm, and common nanoparticles include metal nanoparticles (Cu, Ag, etc.), oxide nanoparticles (Al2O3, SiO2, ZrO2, etc.), carbides (CNT, diamond), and MoS2 nanoparticles, etc. Different nanoparticles exhibit various physicochemical properties (e.g., structure and shape), which can influence their tribological characteristics. In this work, six nanofluids, namely, MoS2, SiO2, diamond, carbon nanotubes (CNTs), Al2O3, and ZrO2, were used as minimum quantity lubrication grinding fluids to select the kind of nanoparticles with optimum lubrication performance in grinding nickel alloy GH4169. Experimental results concluded the following: 1) Nanoparticles with spherical or sphere-like molecular structure and nanofluids with high viscosity demonstrate superior lubrication performances. 2) The polishing effect of nanodiamond particles enhances their surface morphology. 3) The lubricating property of the six nanofluids is described in the following order: ZrO2 < CNTs < ND < MoS2 < SiO2 < Al2O3.
Conference papers on the topic "SIOS NMM-1"
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Yang, Y., Chun-Teh Li, S. M. Sadeghipour, M. Asheghi, H. Dieker, and M. Wuttig. "Thermal Characterization of Dielectric and Phase Change Materials for the Optical Recording Applications." In ASME 2005 Summer Heat Transfer Conference collocated with the ASME 2005 Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems. ASMEDC, 2005. http://dx.doi.org/10.1115/ht2005-72679.
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Advances in the phase change optical recording technology strongly depend on the optical and thermal optimizations of the metal/ZnS-SiO2/phase change multilayer structure, which requires accurate modeling and thermal characterization of PC media structure. In the present work, the thermal conductivities of the amorphous and crystalline Ge4Sb1Te5 (GST) phase change; and ZnS-SiO2 dielectric layers of thickness in the range of 50 nm to 300 nm have been measured using the transient thermoreflectance technique. The data are between a factor of 2–4 different from the previously measured values for thin film and bulk samples. The thermal boundary resistance at metal/ZnS-SiO2 interface is found to be around 7×10−8 m2W−1. This might have serious implications for the future phase change recording application which attempts to achieve the high writing speeds by decreasing the thickness of ZnS-SiO2 dielectric layer. This paper was also originally published as part of the Proceedings of the ASME 2005 Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems.
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Terekhov, Vladimir, Eugene Terukov, Yurii Undalov, et al. "THE NANOCRYSTALS SIZE ESTIMATION USING RAMAN SPECTROSCOPY IN A-SIOX:H FILMS AFTER CRYSTALLIZATION OF SILICON NANOCLUSTERS." In International Forum “Microelectronics – 2020”. Joung Scientists Scholarship “Microelectronics – 2020”. XIII International conference «Silicon – 2020». XII young scientists scholarship for silicon nanostructures and devices physics, material science, process and analysis. LLC MAKS Press, 2020. http://dx.doi.org/10.29003/m1577.silicon-2020/126-130.
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The a-SiOx thin films with silicon nanoclusters are currently being actively studied by various laboratories due to the possibility of efficient control of their optical properties, both at the stage of formation and using technological treatments. The presence of excess silicon in such films leads to the growth of nanocrystals during high-temperature annealing, which affects the optical properties of SiOx films, including photoluminescence. Therefore, in this work, we studied the formation of silicon nanocrystals in a-SiOx films during Pulse Photon Annealing (PPA). X-ray diffraction studies of SiOx films with different silicon contents have shown that, upon PPA annealing, arrays of silicon nanocrystals of significantly different average sizes are formed. Moreover, according to the Raman spectroscopy data, PPA does not lead to complete ordering of the structural network of silicon atoms, and some of the atoms, apparently located in small clusters of ~1 nm, retain deviations from interatomic distances and bond angles.
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Burson, Kristen M., Mahito Yamamoto, and William G. Cullen. "High Resolution Microscopy of SiO2 and the Structure of SiO2-Supported Graphene." In ASME 2011 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference. ASMEDC, 2011. http://dx.doi.org/10.1115/detc2011-48737.
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Graphene has attracted great interest due to its exceptional electrical, mechanical, and chemical properties since its discovery in 2004. Since its first realization, the substrate of choice for graphene exfoliation has been Si wafer with approximately 300 nm thick SiO2 dielectric layer, because it allows 1) direct optical detection of monolayer flakes, and 2) a convenient back gate with dielectric for controlling carrier density in the graphene. However, the amorphous structure of SiO2 and its associated surface roughness has led to ongoing controversy in determining the structure of SiO2-supported graphene. The conductivity of graphene allows scanning tunneling microscopy (STM) to be used to measure its topography, generally allowing its structure to be atomically resolved. In contrast, the insulating SiO2 must be probed with atomic force microscopy (AFM), and this is often done using ambient tapping-mode AFM. STM measurements of graphene on SiO2 generally show greater roughness and finer corrugation than is seen in AFM measurements of SiO2, and this has been interpreted as evidence for “intrinsic” corrugation of the graphene. However, when the energetics of adhesion and elasticity are considered, the idea of intrinsic structure becomes quite controversial for graphene supported on a substrate. Here we show that UHV non-contact AFM (NC-AFM) measurement of SiO2 reveals structure unresolved in previous measurements, and shows both greater roughness and smaller lateral feature size than seen for graphene measured by STM. High-resolution measurement of the SiO2 topography enables an analysis based on the energetics of graphene bending and adhesion, showing that the graphene structure is highly conformal to the SiO2 beneath it. The topographies reported here contrast the atomically-flat crystalline surfaces used in benchmark NC-AFM measurements. They pose unique challenges for measurement resolution, and highlight the very different physical mechanisms which determine resolution in STM vs. NC-AFM. We discuss these issues and our recent efforts at quantitative modeling of the imaging process, with particular focus on the role of van der Waals forces and their contribution to the image signal.
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Zhang, Shu, Yizhang Yang, Katayun Barmak, Yoed Rabin, and Mehdi Asheghi. "MEMS Based High Sensitivity Calorimetry." In ASME 2004 International Mechanical Engineering Congress and Exposition. ASMEDC, 2004. http://dx.doi.org/10.1115/imece2004-62332.
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The fundamental study of phase transformations continues to be a key for successful implementation of metals and alloys in micro- and nano-scale structures in integrated circuitry and magnetic recording devices and systems. The thermodynamic and thermokinetic properties of extremely thin layers can be altered due to the relative effect of boundaries and interfaces on the volume of the material. Calorimetry at the nano-scale requires measurement sensitivity on the order of 1 nJ or better, which requires improved thermal design, development of thermal modeling, and development of experimental measurement techniques. In this report, the specific heat of 144 nm thick CoFe layer is measured, using frequency-domain Joule heating and thermometry (3ω-technique), on Cu/SiO2 and Cu/SiO2/CoFe suspended bridges. Analyses of the heat transfer in suspended structures are performed to establish guidelines for design and fabrication of small-scale differential scanning calorimeters.
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Park, Sung, Derek Nowak, and Tom Albrecht. "Nanoscale Chemical Mapping of Semiconductor Devices and Materials via PiFM." In ISTFA 2018. ASM International, 2018. http://dx.doi.org/10.31399/asm.cp.istfa2018p0330.
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Abstract Nanoscale microscopy is an important technique in analyzing current semiconductor processes and devices. Many of the current microscopy techniques can render high resolution images of morphology and, in some cases, elemental information. However, techniques are still needed to give definitive nanoscale mapping of compound materials utilized in semiconductor processes such as Si3N4, SiO2, SiGe, and low-k materials. Photo-induced force microscopy (PiFM) combines IR spectroscopy with atomic force microscopy (AFM) to provide concurrent information on topography and chemical mapping. PiFM measures the attractive dipole-dipole photo-response between the tip and the sample and does not rely on repulsive force arising from absorption-based sample expansion. As such, PiFM works well with many of the inorganic semiconductor compounds (with low thermal expansion coefficients) as well as organic materials (with high thermal expansion coefficients) [1]. In this study, various examples of nanoscale chemical mapping of semiconductor samples (surfaces processed via directed self-assembly (DSA), strain in SiGe/SiO2 structure, photoresist, etc.) will be presented, all demonstrating ~ 10 nm spatial resolution
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Zhou, Robin, Andrew Hughes, Jane L. Liesveld, and Michael R. King. "Nanoparticle-Coated Microtubes for the Manipulation of Cancer Cells." In ASME 2010 8th International Conference on Nanochannels, Microchannels, and Minichannels collocated with 3rd Joint US-European Fluids Engineering Summer Meeting. ASMEDC, 2010. http://dx.doi.org/10.1115/fedsm-icnmm2010-30168.
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The development of novel methods for the isolation of primary stem and progenitor cells is important for the treatment of blood cancers, tissue engineering, and basic research in the biomedical sciences. Our lab has previously shown that microtubes coated with P-selectin protein can be used to capture and enrich hematopoietic stem and progenitor cells from a mixture of cells perfused through the tube at physiologically-relevant shear stresses[1][2], and that using a surface coating of colloidal silica nanoparticles (12 nm diameter, 30% by weight SiO2) increased cell capture and decreased rolling velocity[3]. Here we show that 50 nm colloidal silica nanoparticle coatings may similarly increase cell capture, and that these protocols are effective for enrichment of human adult CD34-positive HSCs from primary apheresis and bone marrow aspirate samples. Future research may include long-term colony-forming assays to confirm stem cell activity of enriched cells, and transplantation in immune-deficient mice.
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Li, Chun-Teh, Yizhang Yang, Sadegh M. Sadeghipour, and Mehdi Asheghi. "Thermal Conductivity Measurement of the ZnS-SiO2 Dielectric Films for Optical Data Storage Applications." In ASME 2004 International Mechanical Engineering Congress and Exposition. ASMEDC, 2004. http://dx.doi.org/10.1115/imece2004-62150.
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The amorphous/crystalline phase formation during writing or erasure of the written marks, in the rewritable phase change (PC) optical recording media, is controlled by the temperature distribution in the media and its variation with time. Temperature distribution, on the other hand, strongly depends on the thermal properties of its constituent layers in particular the ZnS-SiO2 dielectric layer that separates the phase change media from the substrate and aluminum heat sink. The reported values for the thermal conductivity of thin dielectric layers are however limited in the literature. In this manuscript, we report thermal conductivity data for dielectric layers of thickness near 50, 100 and 225 nm using the steady sate Joule-heating and electrical resistance thermometry technique. The boundary resistance at the interface is estimated to be near 7.0×10−8 m2 K W−1, which would limit the thermal time constant for cooling of PC layer and potentially impact data rate and jitter in optical recording technology.
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Park, Keunhan, Graham L. W. Cross, Zhuomin M. Zhang, and William P. King. "Heat Transfer Between a Heated Microcantilever and the Substrate." In ASME/JSME 2007 Thermal Engineering Heat Transfer Summer Conference collocated with the ASME 2007 InterPACK Conference. ASMEDC, 2007. http://dx.doi.org/10.1115/ht2007-32536.
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This paper describes the heat transfer from a heated microcantilever to the substrate and the resultant temperature distributions. A four-point probe platinum resistive thermometer having a 140 nm lateral resolution has been fabricated on the SiO2-coated silicon substrate. The estimated temperature coefficient of resistance (TCR) of the thermometer is 0.0011 K−1, approximately one third of the bulk value. When the heated cantilever scans over the thermometer, up to 70% of the cantilever power is transferred to the substrate through the air, heating up the substrate. The maximum substrate temperature rise measured with the thermometer is around 7 K. From the force-displacement experiment, the effective contact thermal conductance was estimated to be around 40 ± 20 nW/K. The obtained results will help further understanding of thermal behavior of the heated cantilever during the scanning and its effect on the substrate.
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Gitis, Norm, Vishal Khosla, Ilja Hermann, and Michael Vinogradov. "Non-Destructive High-Resolution Stiffness Mapping of Composite Engineered Surfaces." In STLE/ASME 2008 International Joint Tribology Conference. ASMEDC, 2008. http://dx.doi.org/10.1115/ijtc2008-71178.
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Experimental evaluation of hardness, adhesion and Young’s modulus has been performed on polyimide polymeric coatings used in LCD displays and on composite polymer-based materials used in automobiles and aircraft. A novel Universal Nano+Micro Tester UNMT-1 with a nano-analyzer module NA-2 has been utilized. It measures scratch-hardness of coatings and thin films, utilizing the same nano-tip for both scratching and nano-imaging under the constant load. It measures scratch-adhesion with the same diamond tip for both scratching and nano-imaging under the continuously-increasing load. It evaluates homogeneity of films and composite materials by simultaneous Young’s modulus and topography nano-mapping, with a diamond nano-tip in a tapping mode, while frequency and phase of its vibrations are analyzed. The Young’s modulus maps allowed us to evaluate the distribution of SiO/Si02 particles embedded in araldite, with varying SiO/Si02 concentration. While the topography images could not distinguish between the particles and polymeric matrix, the nano-mechanical maps revealed the effects of particle concentration and agglomeration on the local modulus of the material and the relationship between the SiO/Si02 uniformity and uniformity in modulus. The nano-scratches of 60-nm polyimide coatings at progressively increasing and constant loads generated adhesion and scratch-hardness data, respectively. Within the applied loads of 20 to 100 μN, we observed and determined both the critical load, at which the coating was delaminated from the glass substrate, and a corresponding lateral delamination force. The mutually complimentary nano-images and force graphs coincided nicely.
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Li, Deyu, Min Yue, Arun Majumdar, Rong Fan, Yiying Wu, and Peidong Yang. "Design and Fabrication of Silica Nanotube Arrays and Nanofluidic Devices." In ASME 2003 International Mechanical Engineering Congress and Exposition. ASMEDC, 2003. http://dx.doi.org/10.1115/imece2003-43982.
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Silica nanotube arrays have been fabricated from vertical silicon nanowire templates prepared by Vapor-Liquid-Solid (VLS) epitaxial growth. The silicon nonowire arrays are uniformly oxidized by a dry oxidation process in a tube furnace heated to 1000 °C and filled with pure O2, which gives SiO2 sheaths with continuous silicon wire cores inside. A dry etch process with XeF2 as etchant removes the silicon cores, thus silica nanotube arrays are obtained. The resulting silica nanotubes are more than 10 μm long with an inner diameter range from 10 to 200 nm. A nonofluidic device has been fabricated based on individual silica nanotubes. The nanotube is drop-casted onto a silica substrate from a solution and after the solution is dried out, a 200 nm thick chrome layer is sputter deposited. A 3 μm wide Cr gate structure is patterned across the silica nanotube. Photoresist is patterned to define the hydrophilic (silica) and hydrophobic (photoresist) regions. The hydrophilic regions form a reservoir at each side of the nanotube, thus giving us a nanofluidic device. Ion current flow through the nanotube has been measured in 1 M KCl solution and the measured current matches the theoretical estimation reasonably well.