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1

Ray, P. K. Low-energy sputtering research. National Aeronautics and Space Administration, Glenn Research Center, 1999.

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2

Ray, P. K. Low-energy sputtering research. National Aeronautics and Space Administration, Glenn Research Center, 1999.

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3

V, Shutthanandan, and NASA Glenn Research Center, eds. Low-energy sputtering research. National Aeronautics and Space Administration, Glenn Research Center, 1999.

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4

V, Shutthanandan, and NASA Glenn Research Center, eds. Low-energy sputtering research. National Aeronautics and Space Administration, Glenn Research Center, 1999.

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5

Barnat, Edward V., and Toh-Ming Lu. Pulsed and Pulsed Bias Sputtering. Springer US, 2003. http://dx.doi.org/10.1007/978-1-4615-0411-5.

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6

Behrisch, Rainer, and Klaus Wittmaack, eds. Sputtering by Particle Bombardment III. Springer Berlin Heidelberg, 1991. http://dx.doi.org/10.1007/3-540-53428-8.

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7

Mantenieks, Maris A. Sputtering threshold energies of heavy ions. National Aeronautics and Space Administration, Glenn Research Center, 1999.

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8

K, Ray Pradosh, and United States. National Aeronautics and Space Administration., eds. Modeling of life limiting phenomena in the discharge chamber of an electron bombardment ion thruster: Final report. Mechanical Engineering Dept., Tuskegee University, 1991.

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9

1955-, Patterson Michael J., and United States. National Aeronautics and Space Administration., eds. Ion beam sputtering in electric propulsion facilities. National Aeronautics and Space Administration, 1991.

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10

A, Teichman Louis, and Langley Research Center, eds. Optical properties of sputtered aluminum on graphite/epoxy composite material. National Aeronautics and Space Administration, Langley Research Center, 1989.

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11

Haasz, A. A. Angle of incidence dependence of light ion physical sputtering of carbon. [s.n.], 1989.

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12

United States. National Aeronautics and Space Administration., ed. Deposition of adherent Ag-Ti duplex films on ceramics in a multiple-cathode sputter deposition system. National Aeronautics and Space Administration, 1992.

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13

Rittner, Mindy N. Sputtering targets and sputtered films: Technology and markets. Business Communications Co., 2002.

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14

Wasa, Kiyotaka. Thin film materials technology: Sputtering of compound materials. William Andrew Pub., 2004.

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15

1943-, Lu T. M., ed. Pulsed and pulsed bias sputtering: Principles and applications. Kluwer Academic, 2003.

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16

Posadowski, Witold Michał. Niekonwencjonalne układy magnetronowe do próżniowego nanoszenia cienkich warstw. Oficyna Wydawnicza Politechniki Wrocławskiej, 2001.

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17

Semenov, A. P. Puchki raspyli︠a︡i︠u︡shchikh ionov: Poluchenie i primenenie. Izd-vo BNT︠S︡ SO RAN, 1999.

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18

J, Mirtich Michael, Curren Arthur N, and United States. National Aeronautics and Space Administration., eds. Ion beam treatment of potential space materials at the NASA Lewis Research Center. National Aeronautics and Space Administration, 1991.

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19

Wasa, Kiyotaka. Handbook of sputter deposition technology: Principles, technology, and applications. Noyes Publications, 1992.

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20

Ellegard, Ole. Sputtering of condensed gases by keV-electrons and ions. Riso National Laboratory, 1986.

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21

Wolfgang, Eckstein. Sputtering, reflection and range values for plasma edge codes. Max-Planck-Institut für Plasmaphysik, 1998.

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22

United States. National Aeronautics and Space Administration., ed. Lubrication with sputtered MoS films: Principles, operation, limitations. National Aeronautics and Space Administration, 1991.

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23

Ray, P. K. Low-energy sputtering studies of boron nitride with xenon ions. National Aeronautics and Space Administration, Lewis Research Center, 1999.

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24

Ray, P. K. Low-energy sputtering studies of boron nitride with xenon ions. National Aeronautics and Space Administration, Lewis Research Center, 1999.

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25

Ray, P. K. Low-energy sputtering studies of boron nitride with xenon ions. National Aeronautics and Space Administration, Lewis Research Center, 1999.

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26

Ray, P. K. Low-energy sputtering studies of boron nitride with xenon ions. National Aeronautics and Space Administration, Lewis Research Center, 1999.

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27

Postawa, Zbigniew. Sputtering of ground state and excited atoms from single crystals. Nakładem Uniwersytetu Jagiellońskiego, 1995.

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28

United States. National Aeronautics and Space Administration., ed. Plasma assisted surface coating/modification processes: An emerging technology. National Aeronautics and Space Administration, 1987.

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29

NATO Advanced Study Institute on Physics, Fabrication, and Applications of Multilayered Structures (1987 Bandol, France). Physics, fabrication, and applications of multilayered structures. Plenum Press, 1988.

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30

International Colloquium on Plasmas and Sputtering (5th 1985 Antibes, France). CIP 85: 5ème Colloque international sur les plasmas et la pulvérisation cathodique, Palais des Congrès d'Antibes, 10 au 14 juin 1985 = 5th International Colloquium on Plasmas and Sputtering. SFV, 1985.

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31

Ėlʹtekov, V. A. Vzaimodeĭstvie atomnykh chastit͡s︡ s tverdym telom: Kompʹi͡u︡ternoe modelirovanie. Izd-vo Moskovskogo universiteta, 1993.

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32

Zaka, Yasin. Properties of intrinsic and doped amorphous silicon produced by R.F. Sputtering. University of Aston.Department of Physics, 1985.

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33

Pampillón Arce, María Ángela. Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets. Springer International Publishing, 2017. http://dx.doi.org/10.1007/978-3-319-66607-5.

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34

Wolf, Andrew Robert. The electrochemistry of amorphous iron bismuth oxide thin films prepared by sputtering. National Library of Canada, 1992.

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35

Cheuk, Roger. Sputtering nickel and nickel-molybdenum as electrocatalysts for the hydrogen evolution reaction. National Library of Canada, 1995.

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36

H, Arenz, ed. The deposition of amorphous silicon films by the technique of magnetron sputtering. Commissionof the European Communities, 1988.

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37

Hayes, John Richard. Validation of a plasma sheath model for use in RF sputtering systems. The Author], 2003.

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38

Behrisch, R. Sputtering by Particle Bombardment II: Sputtering of Alloys and Compounds, Electron and Neutron Sputtering, Surface Topography. Springer, 2014.

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39

National Aeronautics and Space Administration (NASA) Staff. Low-Energy Sputtering Research. Independently Published, 2018.

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40

Sputtering by Particle Bombardment. Springer Berlin Heidelberg, 2007. http://dx.doi.org/10.1007/978-3-540-44502-9.

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41

Handbook of Sputtering Technology. Elsevier, 2012. http://dx.doi.org/10.1016/c2010-0-67037-4.

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42

Magnetron Sputtering [Working Title]. IntechOpen, 2018. http://dx.doi.org/10.5772/intechopen.74092.

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43

98/1 Reactive sputtering. Institute of Physics Pub., 1998.

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44

Sputtering by particle bombardment. Springer-Verlag, 1991.

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45

Behrisch, R. Sputtering by Particle Bombardment I: Physical Sputtering of Single-Element Solids. Springer, 2013.

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46

Eckstein, Wolfgang, and Rainer Behrisch. Sputtering by Particle Bombardment: Experiments and Computer Calculations from Threshold to MeV Energies. Springer London, Limited, 2007.

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47

High Power Impulse Magnetron Sputtering. Elsevier, 2020. http://dx.doi.org/10.1016/c2016-0-02463-4.

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48

Spencer, Alaric Graham. High rate reactive magnetron sputtering. 1989.

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49

Behrisch, R. Sputtering by Particle Bombardment II. Springer, 2013.

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50

Depla, Diederik. Magnetrons, Reactive Gases and Sputtering. Lulu Press, Inc., 2013.

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