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Dissertations / Theses on the topic 'Supercritical deposition'

Author: Grafiati

Published: 3 June 2025

Last updated: 31 July 2025

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1

Peng, Qing. "Nanoscale Engineering Materials with Supercritical Fluid and Atomic Layer Deposition." NCSU, 2009. http://www.lib.ncsu.edu/theses/available/etd-07062009-222243/.

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With the development of material science and technology, modification of substrates, which have random geometry and high aspect ratio three dimensional (3D) complex structures, with desired functional, reactive and stable coatings becomes important and challenging. The ability to fabricate mono- or multi-layers of functional materials with precisely controlled dimensions, finely tuned composition and molecular structures, attracts significant interests in materials science and is the key to construct such devices and structures at nano- and micro- scale with desired properties. In this study,

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2

Wilson, James W. "Development and optimisation of supercritical fluid deposition of semiconductor films." Thesis, University of Southampton, 2010. https://eprints.soton.ac.uk/167623/.

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This thesis is concerned with the deposition, and characterisation, of semiconductor thin films and microstructures deposited from a supercritical uid. Thin films of CdS, GaP, InP, InAs, and Ge were deposited using supercritical CO2 and CO2-solvent mixtures. Ge was deposited into macropores etched into crystalline silicon substrates. A variety of reactors were designed in order to achieve the successful deposition of the materials. The surface morphology and crystallinity of the films were characterised by scanning electron microscopy and X-ray diffraction. The chemical composition of the film

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3

Karanikas, Christos Fotios. "Supercritical fluid deposition of thin metal films kinetics, mechanics and applications /." Amherst, Mass. : University of Massachusetts Amherst, 2009. http://scholarworks.umass.edu/dissertations/AAI3359900/.

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4

McMasters, Brian Philip. "Effect of Fuel Chemical Composition on Pyrolytic Reactivity and Deposition Propensity under Supercritical Conditions." University of Dayton / OhioLINK, 2014. http://rave.ohiolink.edu/etdc/view?acc_num=dayton1398682863.

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5

Karakama, Keigo. "Methods for the characterization of deposition and transport of magnetite particles in supercritical water." Thesis, University of British Columbia, 2011. http://hdl.handle.net/2429/39772.

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Generation IV CANDU Supercritical Water Reactor (SCWR) is being developed to use a light water coolant at high temperature and pressure beyond the critical point of water (374⁰C and 22.1 MPa). The dramatic decrease in the solubility of magnetite in supercritical water suggests that the precipitation of magnetite particles will occur in the reactor core which can deposit on the fuel cladding or be transported to the steam turbine. A once-through flow system was modified to develop experimental techniques for studying the deposition and transport of magnetite particles in supercritical water ont

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6

Hodes, Marc Scott. "Measurements and modeling of deposition rates from near-supercritical, aqueous, sodium sulfate and potassium sulfate solutions to a heated cylinder." Thesis, Massachusetts Institute of Technology, 1998. http://hdl.handle.net/1721.1/46259.

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Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998.<br>Includes bibliographical references (leaves 365-373).<br>In the Supercritical Water Oxidation (SCWO) process, a technology emerging for the disposal of hazardous organic wastes, organic compounds containing heteroatoms such as S, Cl and P are oxidized to the corresponding acid. In order to reduce corrosion, bases are therefore often injected into the reactor. The salts that are formed upon neutralization (sulfates, chlorides, phosphates, etc.) have low solubility in supercritical water (SCW) and co

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7

Stimpson, Curtis K. "The Composition and Morphology of Coal Ash Deposits Collected in an Oxy-Fuel, Pulverized Coal Reactor." BYU ScholarsArchive, 2012. https://scholarsarchive.byu.edu/etd/3225.

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Coal ash deposits were collected in a 160 kWth, down-fired oxy-coal reactor under staged and unstaged conditions for four different coals (PRB, Gatling, Illinois #6, and Mahoning). Concentration measurements of carbon, oxygen, sodium, magnesium, aluminum, silicon, phosphorus, sulfur, chlorine, potassium, calcium, titanium, chromium, manganese, iron, nickel, strontium, and barium were gathered from each deposit sample using scanning electron microscopy and energy dispersive spectroscopy (SEM-EDS). Backscattered electron micrographs for each deposit sample were analyzed to gather morphological d

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8

Jiang, Hua. "Effect of Changes in Flow Geometry, Rotation and High Heat Flux on Fluid Dynamics, Heat Transfer and Oxidation/Deposition of Jet Fuels." University of Dayton / OhioLINK, 2011. http://rave.ohiolink.edu/etdc/view?acc_num=dayton1300553102.

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9

Tetsi, Emmanuel. "Développement de films minces à base de nanoparticules diélectriques et optimisatisation des conditions de dépôt pour fabriquer des condensateurs de découplage utilisés dans des assemblages à haute densité de modules électroniques." Thesis, Bordeaux, 2019. http://www.theses.fr/2019BORD0113/document.

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Dans le cadre de l’intégration tridimensionnelle (3D) associée à l’utilisation d’un nombre croissant de circuits intégrés (CIs), le besoin en condensateurs de découplage à forte densité de capacité (≥ 1 μF.cm-2), capables d’opérer sur une gamme de fréquences de plus en plus étendue, est crucial afin de limiter les fluctuations de tension d’alimentation au niveau des CIs. Le principal frein au développement de ces condensateurs réside dans l’obtention de couches minces (≤ 100 nm) à partir de matériaux ayant une forte permittivité relative (ε_r > 200 à 1 GHz), des technologies compatibles ave

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10

Durand, Véronique. "Développement d’un nouveau procédé de synthèse de membranes inorganiques ou composites par voie CO2 supercritique pour la séparation de gaz." Thesis, Montpellier 2, 2011. http://www.theses.fr/2011MON20175.

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L'utilisation de membranes pour la séparation/purification de mélanges de gaz permet d'envisager la mise en œuvre de procédés continus et faiblement énergivores. Les performances des membranes étant directement reliées à la méthode utilisée pour leur synthèse/modification, une nouvelle génération de membranes est attendue à partir de la méthode originale de dépôt « dynamique » développée et mise au point dans ce travail, en milieu CO2 supercritique (CO2SC). Les propriétés des fluides supercritiques, intermédiaires entre celles d'un liquide et d'un gaz (densité et diffusivité élevées, viscosité

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11

Brunner, David R. "The Composition and Distribution of Coal-Ash Deposits Under Reducing and Oxidizing Conditions From a Suite of Eight Coals." BYU ScholarsArchive, 2011. https://scholarsarchive.byu.edu/etd/2642.

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Eighteen elements, including: carbon, oxygen, sodium, magnesium, aluminum, silicon, phosphorus, sulfur, chlorine, potassium, calcium, titanium, chromium, manganese, iron, nickel, strontium, and barium were measured using a scanning electron microscope with energy dispersive spectroscopy from deposits. The deposits were collected by burning eight different coals in a 160 kWth, staged, down-fired, swirl-stabilized combustor. Both up-stream and down-stream deposits from an oxidizing region (equivalence ratio 0.86) and reducing region (equivalence ratio 1.15) were collected. Within the deposits, t

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12

Filipovic, Danijela. "Deposition of sodium chloride from supercritical water." Thesis, 1999. http://hdl.handle.net/2429/10236.

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Supercritical water oxidation (SCWO) is a new technology that promises successful destruction of organic material from hazardous aqueous wastes without harmful emissions. SCWO is made possible due to the special properties of supercritical water (SCW). The very same properties of SCW are also responsible for the low solubility of inorganic salts (coming from processed waste streams or formed during reaction) and consequent salt precipitation and fouling of the system. There are several proposed or implemented systems that attempt to solve the fouling problem by either removing the salt

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13

Blackburn, Jason Mitchell. "Chemical fluid deposition: Reactive deposition of thin metal films from supercritical carbon dioxide solutions." 2001. https://scholarworks.umass.edu/dissertations/AAI3027180.

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The fabrication of microelectronics with increasing complexity and decreasing dimensions is placing stringent requirements on the deposition of metal films. These requirements include the conformal coverage of complex topographies, complete filling of narrow (<100 nm), high aspect ratio features, reduction in process temperatures, and reduction of environmentally objectionable wastes from current processing technologies. Physical deposition techniques, such as sputtering, are essentially line of sight methods and thus, uniform coating of the walls and the bottom of high aspect ratio features i

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14

Chen, An-Pang, and 陳安邦. "Supercritical CO2 Assisted Electroless Deposition for Metallization on Silicon Wafer." Thesis, 2015. http://ndltd.ncl.edu.tw/handle/56kdtb.

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碩士<br>元智大學<br>光電工程學系<br>104<br>In this study, we developed the supercritical carbon dioxide (sc-CO2) assisted electroless nickel deposition technology to deposit Ni-P alloy films on the surface of silicon wafers. The material characteristics of Ni-P deposited by supercritical carbon dioxide assisted process were studied by surface scanning electron microscope (SEM), and X-ray diffraction (XRD), and energy dispersive spectrum (EDS). The anti-corrosive ability and the hardness of Ni-P films were respectively measured by the potentiodynamic polarization method and by the nanoindenter. The N

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15

Huang, Ko-ji, and 黃科智. "The Applications of Supercritical Fluids Deposition Technology on Porous Silicon." Thesis, 2007. http://ndltd.ncl.edu.tw/handle/85463491543188706789.

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碩士<br>中國文化大學<br>材料科學與奈米科技研究所<br>95<br>In the this study, using P-type silicon, N-type silicon, N-epi on P-sub silicon to make Photoluminescence (PL) analysis, in the nanostructure porous silicon offer different UV lights(wavelength 254nm and 365nm) that characteristic has color switch. In electrical characteristics, it was found out the most suitable porous silicon. Using AgNO3 and CuSO4 with NaBH4 was tested the best concentrations. Used scanning electron microscope(SEM), energy dispersive spectrometer (EDS) to analyze coating metal Ag and Cu by the SCF method that metal pellet are pulled int

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16

Peng, Qing. "Nanoscale engineering materials by supercritical fluid and atomic layer deposition." 2009. http://www.lib.ncsu.edu/theses/available/etd-07062009-222243/unrestricted/etd.pdf.

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17

Chen, Mei-yin, and 陳美吟. "Preparation of Platinum-based Catalyst Layer by Supercritical Fluid Deposition." Thesis, 2012. http://ndltd.ncl.edu.tw/handle/41150169489228846388.

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碩士<br>中原大學<br>化學研究所<br>100<br>This research employs supercritical deposition (SCFD) for the preparation of platinum-based catalyst layer on a gas diffusion layer (GDL) which resembles an electrode in proton exchange membrane fuel cell (PEMFC). The common criteria for a good catalyst are a narrow nanoscale support, high dispersion on substrate, reduction of aggregation of metal particles, and low cost. 　　The effects of reaction factors (reduction temperature, time, and addition of methanol) on metal loading and dispersion on substrate were determined by factorial experimental design. The result

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18

Karanikas, Christos F. "Supercritical Fluid Deposition of Thin Metal Films: Kinetics, Mechanics and Applications." 2009. http://scholarworks.umass.edu/open_access_dissertations/47.

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In order to meet the demands of the continuous scaling of electronic devices, new technologies have been developed over the years. As we approach the newest levels of miniaturization, current technologies, such as physical vapor deposition and chemical vapor deposition, are reaching a limitation in their ability to successfully fabricate nano sized electronic devices. Supercritical fluid deposition (SFD) is a demonstrated technology that provides excellent step coverage for the deposition of metals and metal oxides within narrow, high aspect ratio features. This technique shows the potential

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19

Sahle-Demessie, Endalkachew. "Deposition of chemicals in semi-porous solids using supercritical fluid carriers." Thesis, 1994. http://hdl.handle.net/1957/35608.

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20

Karanikas, Christos Fotios. "Supercritical fluid deposition of thin metal films: Kinetics, mechanics and applications." 2008. https://scholarworks.umass.edu/dissertations/AAI3359900.

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In order to meet the demands of the continuous scaling of electronic devices, new technologies have been developed over the years. As we approach the newest levels of miniaturization, current technologies, such as physical vapor deposition and chemical vapor deposition, are reaching a limitation in their ability to successfully fabricate nano sized electronic devices. Supercritical fluid deposition (SFD) is a demonstrated technology that provides excellent step coverage for the deposition of metals and metal oxides within narrow, high aspect ratio features. This technique shows the potential t

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21

Tan, Khoon-Wei, and 陳坤威. "Porous ATO Cathodes Formed by Supercritical CO2 forSilver Electro-deposition on glass." Thesis, 2011. http://ndltd.ncl.edu.tw/handle/27751343888201149749.

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碩士<br>國立中山大學<br>光電工程學系研究所<br>99<br>Porous antimony-doped tin oxide (ATO) cathodes formed by supercritical CO2 (SCCO2) treatment for silver electro-deposition devices were proposed. The porous ATO cathode with a thickness of 1.4μm was formed by coating the nano-particle ATO solution on ITO glass. The porous structure of the cathodes was obtained by applying SCCO2 treatment at 60oC on the spin-coated ATO thin films. A layer of electrolyte(formed by AgI, NaI and DMSO)was enclosed by two electrodes to to form a so-called“sandwich” structure. After the fabrication process, white paint was spray on

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22

Sarfraz, Adnan [Verfasser]. "Nucleobases in supercritical fluids : solubility, molecular beam expansion, and surface deposition / von Adnan Sarfraz." 2009. http://d-nb.info/1004760892/34.

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23

Yu, Chih-lung, and 尤智隆. "Research on Thin Film Deposition of Organic Light Emitting Diode by Using Supercritical Fluid." Thesis, 2007. http://ndltd.ncl.edu.tw/handle/12146032204928002350.

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碩士<br>國立中正大學<br>化學工程所<br>95<br>This study is to investigate the technique of supercritical fluid deposition to form thin film of organic light emitting diode (OLED). Using the elevating substrate temperature as a driving force of heterogeneous nucleation in supercritical carbon dioxide (SCCO2) saturation solution, the growing mechanism changed from island mode to a continuous layer. In the operation of semi-flow type, the higher substrate temperature might be able to enhance nucleation of OLED, but reducing the amount of adsorption on the substrate. It has a better coverage rate and island

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24

Huang, Chun-Huan, and 黃俊寰. "The Fabrication and Characterization of Organic Light Emitting Thin Film by Supercritical Deposition Technique." Thesis, 2010. http://ndltd.ncl.edu.tw/handle/29373587063729915370.

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碩士<br>國立中正大學<br>化學工程研究所<br>99<br>Abstract Our research based on the supercritical deposition technique, using supercritical carbon dioxide as solvent to deposit Alq3 (tris-(8-hydroxy-quinoline) aluminum) light emitting thin film on the ITO (indium tin oxide) substrate. In order to apply this technique in organic light emitting diode devices, we apply heating substrate as driving force, and follow the better deposition parameters our obstetrician finding out, and try to fix or improve some parameters. Finally a series of measuring and studying will be proceed to the thin film we fabricated,

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25

Khan, Mohammad Sultan. "Deposition of sodium carbonate and sodium sulfate in supercritical water oxidation systems and its mitigation." Thesis, 2005. http://hdl.handle.net/2429/16952.

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Supercritical water oxidation (SCWO) is a technique to destroy wet organic waste. The oxidation reaction takes place at high temperature (T > 374°C) and pressure (P > 22 MPa). Organics are miscible with water at these conditions but inorganic salts, such as Na₂SO₄ and Na₂CO₃, are not soluble and crystallize on the reactor surface leading to the problem of heat exchanger fouling. Solubility and deposition of these salts on a tubular heat exchanger (reactor) surface have been studied in this work. Experiments were performed to determine solubility of these salts in binary phase and in ternary ph

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26

Chiou, Duo-You, and 邱東佑. "Parameter studies on the thin film of Organic Light Emitting Diode by Supercritical Fluids Deposition Technology." Thesis, 2008. http://ndltd.ncl.edu.tw/handle/15841682218265760954.

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碩士<br>國立中正大學<br>化學工程所<br>96<br>Abstract This study is to investigate the operating parameters for manufacturing the thin film of organic light emitting diode (OLED) under supercritical fluids. By elevating substrate temperature as the driving force, OLED dissolved in supercritical carbon dioxide (SCCO2) becomes over-saturated leading to precipitate and form a thin film on the substrate. Basically, the driving force is determined by the temperature difference between reactor and substrate. To obtain a better thin film, the temperatures for the reactor and the substrate are 35 and 60℃, respec

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27

Fisher, Scott M. "The construction of palladium and palladium-alloy supported membranes for hydrogen separation using supercritical fluid deposition." 2004. https://scholarworks.umass.edu/dissertations/AAI3118298.

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The separation of hydrogen from other light gases is of particular importance to the chemical process industry. Membrane based processes offer a cost effective alternative to traditional processing while allowing the combination of separation and reaction in a single unit. Dense palladium or palladium alloy films are a natural choice for hydrogen separation due to their potential infinite selectivity for hydrogen. In this dissertation we investigated the construction of palladium-based supported hydrogen separation membranes using Supercritical Fluid Deposition (SFD). Compared to other deposit

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28

Hunde, Ephrem T. "Reactive deposition of pure and alloyed cobalt and nickel thin films from supercritical carbon dioxide solutions." 2004. https://scholarworks.umass.edu/dissertations/AAI3136740.

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The need for faster and smaller integrated circuits and other devices is necessitating deposition of interconnect materials in increasingly narrow high aspect ratio features, a demand that can not be fully realized by current techniques. Traditional metal deposition techniques such as plating and CVD have limitations for yielding uniform and conformal coverage. Although plating techniques offer high reactant concentrations, high surface tension and sluggish liquid-phase mass transport preclude uniform deposition in complex geometries. Moreover, the plating techniques generate large quantities

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29

Barua, Dipak. "Deposition of metal and metal oxide thin films from metal organic precursors in supercritical carbon dioxide solution." 2005. http://www.lib.ncsu.edu/theses/available/etd-04222005-000549/unrestricted/etd.pdf.

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30

Li, Hui-Ying, and 黎蕙瑛. "Li+-Storage Performance of SnO2/Graphene, CoCO3/Graphene Composites Synthesized Using Supercritical CO2 Fluid and Na+-Storage Performance of Bilayer V2O5 Synthesized Using Anodic Deposition." Thesis, 2017. http://ndltd.ncl.edu.tw/handle/yf68q2.

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博士<br>國立中央大學<br>材料科學與工程研究所<br>105<br>Supercritical CO2 (SCCO2) fluid, which has gas-like diffusivity, extremely low viscosity, and near-zero surface tension, is used to synthesize SnO2 nanoparticles (a 3-nm diameter is achievable), which are uniformly dispersed and tightly anchored on graphene nanosheets (GNSs). Comparatively, the conventional process (in the absence of SCCO2) produces aggregated SnO2 clusters. This study also tunes the SCCO2 pressure (and thus its fluid density) and vacuum the autoclave before injecting into CO2. The results show that these factors crucially affect the distri

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