Relevant bibliographies by topics / Surface acoustic wave (SAW) sensor

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  2. Dissertations / Theses
  3. Books
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Academic literature on the topic 'Surface acoustic wave (SAW) sensor'

Author: Grafiati
Published: 4 June 2021
Last updated: 17 February 2022

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Journal articles on the topic "Surface acoustic wave (SAW) sensor"

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Joshi, S. G. "Surface-acoustic-wave (SAW) flow sensor." IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control 38, no. 2 (March 1991): 148–54. http://dx.doi.org/10.1109/58.68472.

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Jeng, Ming-Jer, Mukta Sharma, Ying-Chang Li, Yi-Chen Lu, Chia-Yu Yu, Chia-Lung Tsai, Shiang-Fu Huang, Liann-Be Chang, and Chao-Sung Lai. "Surface Acoustic Wave Sensor for C-Reactive Protein Detection." Sensors 20, no. 22 (November 19, 2020): 6640. http://dx.doi.org/10.3390/s20226640.

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A surface acoustic wave (SAW) sensor was investigated for its application in C-reactive protein (CRP) detection. Piezoelectric lithium niobate (LiNbO3) substrates were used to study their frequency response characteristics in a SAW sensor with a CRP sensing area. After the fabrication of the SAW sensor, the immobilization process was performed for CRP/anti-CRP interaction. The CRP/anti-CRP interaction can be detected as mass variations in the sensing area. These mass variations may produce changes in the amplitude of sensor response. It was clearly observed that a CRP concentration of 0.1 μg/mL can be detected in the proposed SAW sensor. A good fitting linear relationship between the detected insertion loss (amplitude) and the concentrations of CRP from 0.1 μg/mL to 1 mg/mL was obtained. The detected shifts in the amplitude of insertion loss in SAW sensors for different CRP concentrations may be useful in the diagnosis of risk of cardiovascular diseases.
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Mukhin, Nikolay V. "Microfluidic Acoustic Metamaterial SAW Based Sensor." Journal of the Russian Universities. Radioelectronics 22, no. 4 (October 1, 2019): 75–81. http://dx.doi.org/10.32603/1993-8985-2019-22-4-75-81.

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Introduction. Microacoustic sensors based on surface acoustic wave (SAW) devices allow the sensor integration into a wafer based microfluidic analytical platforms such as lab-on-a-chip. Currently exist various approaches of application of SAW devices for liquid properties analysis. But this sensors probe only a thin interfacial liquid layer. The motivation to develop the new SAW-based sensor is to overcome this limitation. The new sensor introduced here uses acoustic measurements, including surface acoustic waves (SAW) and acoustic methamaterial sensor approaches. The new sensor can become the starting point of a new class of microsensor. It measures volumetric properties of liquid analytes in a cavity, not interfacial properties to some artificial sensor surface as the majority of classical chemical and biochemical sensors.Objective. The purpose of the work is to find solutions to overcome SAW-based liquid sensors limitations and the developing of a new sensor that uses acoustic measurements and includes a SAW device and acoustic metamaterial.Materials and methods. A theoretical analysis of sensor structure was carried out on the basis of numerical simulation using COMSOL Multiphysics software. Lithium niobate (LiNbO3) 127.86° Y-cut with wave propagation in the X direction was chosen as a substrate material. Microfluidic structure was designed as a set of rectangular shape channels. A method for measuring volumetric properties of liquids, based on SAW based fluid sensor concept, comprising the steps of: (a) providing sensor structure with the key elements: a SAW resonator, a high-Q set of liquid-filled cavities and intermediate layer with artificial elastic properties between them; (b) measuring of resonance frequency shift, associated with the resonance in liquid-filled cavity, in the response of weakly coupled resonators of SAW resonator loaded by periodic microfluidic structure; (c) determination of volumetric properties of the fluid on the basis of a certain relationship between the speed of sound in liquid, the resonant frequency of the set of liquid-filled cavities, and the geometry design of the cavity.Results. The new sensor approach is introduced. The eigenmodes of the sensor structure with a liquid analyte are carried out. The characteristic of sensor structure is determined. The key elements of introduced microfluidic sensor are a SAW structure, an acoustic metamaterial with a periodic set of microfluidic channels. The SAW device acts as electromechanical transducer. It excites surface waves propagating in the X direction lengthwise the periodic structure and detects the acoustic load generated by the microfluidic structure resonator. The origin of the sensor signal is a small frequency change caused by small variations of acoustic properties of the analyte within the set of microfluidic channels.Conclusion. The principle of the new microacoustic sensor, which can become the basis for creating a new class of microfluidic sensors, is shown.
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Li, Yuanyuan, Wenke Lu, Changchun Zhu, Qinghong Liu, Haoxin Zhang, and Chenchao Tang. "Circuit Design of Surface Acoustic Wave Based Micro Force Sensor." Mathematical Problems in Engineering 2014 (2014): 1–9. http://dx.doi.org/10.1155/2014/701723.

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Pressure sensors are commonly used in industrial production and mechanical system. However, resistance strain, piezoresistive sensor, and ceramic capacitive pressure sensors possess limitations, especially in micro force measurement. A surface acoustic wave (SAW) based micro force sensor is designed in this paper, which is based on the theories of wavelet transform, SAW detection, and pierce oscillator circuits. Using lithium niobate as the basal material, a mathematical model is established to analyze the frequency, and a peripheral circuit is designed to measure the micro force. The SAW based micro force sensor is tested to show the reasonable design of detection circuit and the stability of frequency and amplitude.
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Länge, Kerstin. "Bulk and Surface Acoustic Wave Sensor Arrays for Multi-Analyte Detection: A Review." Sensors 19, no. 24 (December 6, 2019): 5382. http://dx.doi.org/10.3390/s19245382.

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Bulk acoustic wave (BAW) and surface acoustic wave (SAW) sensor devices have successfully been used in a wide variety of gas sensing, liquid sensing, and biosensing applications. Devices include BAW sensors using thickness shear modes and SAW sensors using Rayleigh waves or horizontally polarized shear waves (HPSWs). Analyte specificity and selectivity of the sensors are determined by the sensor coatings. If a group of analytes is to be detected or if only selective coatings (i.e., coatings responding to more than one analyte) are available, the use of multi-sensor arrays is advantageous, as the evaluation of the resulting signal patterns allows qualitative and quantitative characterization of the sample. Virtual sensor arrays utilize only one sensor but combine it with enhanced signal evaluation methods or preceding sample separation, which results in similar results as obtained with multi-sensor arrays. Both array types have shown to be promising with regard to system integration and low costs. This review discusses principles and design considerations for acoustic multi-sensor and virtual sensor arrays and outlines the use of these arrays in multi-analyte detection applications, focusing mainly on developments of the past decade.
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Giffney, Timothy J., Y. H. Ng, and K. C. Aw. "A Surface Acoustic Wave Ethanol Sensor with Zinc Oxide Nanorods." Smart Materials Research 2012 (December 26, 2012): 1–4. http://dx.doi.org/10.1155/2012/210748.

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Surface acoustic wave (SAW) sensors are a class of piezoelectric MEMS sensors which can achieve high sensitivity and excellent robustness. A surface acoustic wave ethanol sensor using ZnO nanorods has been developed and tested. Vertically oriented ZnO nanorods were produced on a ZnO/128∘ rotated Y-cut LiNbO3 layered SAW device using a solution growth method with zinc nitrate, hexamethylenetriamine, and polyethyleneimine. The nanorods have average diameter of 45 nm and height of 1 μm. The SAW device has a wavelength of 60 um and a center frequency of 66 MHz at room temperature. In testing at an operating temperature of 270 with an ethanol concentration of 2300 ppm, the sensor exhibited a 24 KHz frequency shift. This represents a significant improvement in comparison to an otherwise identical sensor using a ZnO thin film without nanorods, which had a frequency shift of 9 KHz.
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Pan, Yong, Qin Molin, Tengxiao Guo, Lin Zhang, Bingqing Cao, Junchao Yang, Wen Wang, and Xufeng Xue. "Wireless passive surface acoustic wave (SAW) technology in gas sensing." Sensor Review 41, no. 2 (March 22, 2021): 135–43. http://dx.doi.org/10.1108/sr-03-2020-0061.

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Purpose This paper aims to give an overview about the state of wireless passive surface acoustic wave (SAW) gas sensor used in the detection of chemical vapor. It also discusses a variety of different architectures including delay line and array sensor for gas detection, and it is considered that this technology has a good application prospect. Design/methodology/approach The authors state the most of the wireless passive SAW methods used in gas sensing, such as CO2, CO, CH4, C2H4, NH3, NO2, et al., the sensor principles, design procedures and technological issues are discussed in detail; their advantages and disadvantages are also summarized. In conclusion, it gives a prospect of wireless passive SAW sensor applications and proposes the future research field might lie in the studying of many kinds of harmful gases. Findings In this paper, the authors will try to cover most of the important methods used in gas sensing and their recent developments. Although wireless passive SAW sensors have been used successfully in harsh environments for the monitoring of temperature or pressure, the using in chemical gases are seldom reported. This review paper gives a survey of the present state of wireless passive SAW sensor in gas detection and suggests new and exciting perspectives of wireless passive SAW gas sensor technology. Research limitations/implications The authors will review most of the methods used in wireless passive SAW sensor and discuss the current research status and development trend; the potential application in future is also forecasted. Originality/value The authors will review most of the methods used in wireless passive SAW sensor and discuss the current research status and development trend; the potential application in future is also forecasted.
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Wang, Wei Na, and Qing Fan. "Tire Pressure Monitoring System and Wireless Passive Surface Acoustic Wave Sensor." Applied Mechanics and Materials 536-537 (April 2014): 333–37. http://dx.doi.org/10.4028/www.scientific.net/amm.536-537.333.

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The TPMS can not only save fuel and protect the tire, but also make the driver more safety. Tire safety is attracting the driver's attention, the United States had developed laws to enforce the TPMS installation in the car and the deadline is in 2008. In this paper, the basic structure and the implement method of TPMS are introduced. The active sensors are already used in most of the TPMS applications. The SAW theory and some wireless passive SAW pressure and temperature sensors which suit for the TPMS application are illustrated, because the passive sensor is becoming the focus in the TPMS research field. Passive SAW sensor is the good choice for TPMS, according to its wireless, passive, zero age rate, small size etc. The wireless passive SAW TPMS is one of the most important research direction. In this paper, some kinds of passive SAW sensor are introduced, which are used in TPMS.
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Hu, Baofa, Zhiwei Li, Yuanjie Wan, Peng Zhou, Chunquan Zhang, and Haisheng San. "3D Printed Pressure Sensor Based on Surface Acoustic Wave Resonator." Measurement Science Review 21, no. 3 (June 1, 2021): 76–81. http://dx.doi.org/10.2478/msr-2021-0011.

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Abstract This paper reports a 3-dimentional (3D) pressure sensor based on surface acoustic wave (SAW) resonators. The SAW resonators were designed and fabricated on 128°Y-X LiNbO3 substrate using the MEMS technology. The pressure sensing structure was 3D-printed using polyactic acid plastic, and two SAW resonators were integrated in the 3D-printed chamber structure for both temperature and pressure sensing. The SAW-based gas pressure sensors demonstrate a sensitivity of 589 ppm/MPa at the pressure range of 100-600 kPa and temperature of 40 °C.
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Ying, Zhi Hua, Jia Hu, Cong Ping Wu, Yi Qing Yang, Liang Zheng, and Kai Xin Song. "Bilayer Structure Based Surface Acoustic Wave Sensor for Formaldehyde Detection." Advanced Materials Research 664 (February 2013): 986–89. http://dx.doi.org/10.4028/www.scientific.net/amr.664.986.

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This study contributes to the measurements of formaldehyde at room temperature. A bilayer structure based surface acoustic wave (SAW) sensor has been fabricated and experimentally studied. The coating materials carbon nanotubes (CNTs) and poly (4-vinylphenol) (P4VP) were deposited by a spray-painting method onto SAW sensors configured as 433.92MHz two-port resonator-based oscillators. The results display high sensitivity and entirely reversibility. The response and recovery times of the bilayer structure are very short, and the response values are obviously greater than plus of the two single layers. Some sensing mechanisms between analytes and the bilayer structure SAW sensor will be discussed preliminarily.
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Dissertations / Theses on the topic "Surface acoustic wave (SAW) sensor"

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Fisher, Brian. "Surface Acoustic Wave (SAW) Cryogenic Liquid and Hydrogen Gas Sensors." Doctoral diss., University of Central Florida, 2012. http://digital.library.ucf.edu/cdm/ref/collection/ETD/id/5208.

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This research was born from NASA Kennedy Space Center's (KSC) need for passive, wireless and individually distinguishable cryogenic liquid and H2 gas sensors in various facilities. The risks of catastrophic accidents, associated with the storage and use of cryogenic fluids may be minimized by constant monitoring. Accidents involving the release of H2 gas or LH2 were responsible for 81% of total accidents in the aerospace industry. These problems may be mitigated by the implementation of a passive (or low-power), wireless, gas detection system, which continuously monitors multiple nodes and reports temperature and H2 gas presence. Passive, wireless, cryogenic liquid level and hydrogen (H2) gas sensors were developed on a platform technology called Orthogonal Frequency Coded (OFC) surface acoustic wave (SAW) radio frequency identification (RFID) tag sensors. The OFC-SAW was shown to be mechanically resistant to failure due to thermal shock from repeated cycles between room to liquid nitrogen temperature. This suggests that these tags are ideal for integration into cryogenic Dewar environments for the purposes of cryogenic liquid level detection. Three OFC-SAW H2 gas sensors were simultaneously wirelessly interrogated while being exposed to various flow rates of H2 gas. Rapid H2 detection was achieved for flow rates as low as 1ccm of a 2% H2, 98% N2 mixture. A novel method and theory to extract the electrical and mechanical properties of a semiconducting and high conductivity thin-film using SAW amplitude and velocity dispersion measurements were also developed. The SAW device was shown to be a useful tool in analysis and characterization of ultrathin and thin films and physical phenomena such as gas adsorption and desorption mechanisms.?
Ph.D.
Doctorate
Electrical Engineering and Computer Science
Engineering and Computer Science
Electrical Engineering
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Wilson, William. "Multifunctional Orthogonally-Frequency-Coded Saw Strain Sensor." VCU Scholars Compass, 2013. http://scholarscompass.vcu.edu/etd/3157.

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A multifunctional strain sensor based on Surface Acoustic Wave (SAW) Orthogonal Frequency Coding (OFC) technology on a Langasite substrate has been investigated. Second order transmission matrix models have been developed and verified. A new parameterizable library of SAW components was created to automate the layout process. Using these new tools, a SAW strain sensor with OFC reflectors was designed, fabricated and tested. The Langasite coefficients of velocity for strain (γS = 1.699) and Temperature (γT = 2.562) were experimentally determined. The strain and temperature characterization of this strain sensor, along with the coefficients of velocity, have been used to demonstrate both the ability to sense strain and the capability for temperature compensation. The temperature-compensated SAW OFC strain sensor has been used to detect anomalous strain conditions that are indicators of fastener failures during structural health monitoring of aircraft panels with and without noise on a NASA fastener failure test stand. The changes in strain that are associated with single fastener failures were measured up to a distance of 80 cm between the sensor and the removed fastener. The SAW OFC strain sensor was demonstrated to act as an impact sensor with and without noise on the fastener failure test stand. The average measured signal to noise ratio (SNR) of 50, is comparable to the 29.1 SNR of an acoustic emission sensor. The simultaneous use of a high pass filter for impact detection, while a low pass filter is used for strain or fastener failure, demonstrates the multifunctional capabilities of the SAW OFC sensor to act as both as a fastener failure detector and as an impact detector.
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Friedlander, Jeffrey B. "Wireless Strain Measurement with Surface Acoustic Wave Sensors." The Ohio State University, 2011. http://rave.ohiolink.edu/etdc/view?acc_num=osu1306874020.

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Parmar, Biren Jagadish. "Development Of Point-Contact Surface Acoustic Wave Based Sensor System." Thesis, Indian Institute of Science, 2006. http://hdl.handle.net/2005/279.

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Surface Acoustic Waves (SAW) fall under a special category of elastic waves that need a material medium to propagate. The energy of these waves is confined to a limited depth below the surface over which they propagate, and their amplitudes decay with increasing depth. As a consequence of their being a surface phenomenon, they are easily accessible for transduction. Due to this reason, a lot of research has been carried out in the area, which has resulted in two very popular applications of SAW - SAW devices and in Non-Destructive Testing and Evaluation. A major restriction of SAW devices is that the SAW need a piezoelectric medium for generation, propagation and reception. This thesis reports the attempt made to overcome this restriction and utilize the SAW on non-piezoelectric substrates for sensing capabilities. The velocity of the SAW is known to be dependent purely on the material properties, specifically the elastic constants and material density. This dependence is the motivation for the sensor system developed in the present work. Information on the survey of the methods suitable for the generation and reception of SAW on non-piezoelectric substrates has been included in the thesis. This is followed by the theoretical and practical details of the method chosen for the present work - the point source/point receiver method. Advantages of this method include a simple and inexpensive fabrication procedure, easy customizability and the absence of restrictions due to directivity of the SAW generated. The transducers consist of a conically shaped PZT element attached to a backing material. When the piezoelectric material on the transmitter side is electrically excited, they undergo mechanical oscillations. When coupled to the surface of a solid, the oscillations are transferred onto the solid, which then acts as a point source for SAW. At the receiver, placed at a distance from the source on the same side, the received mechanical oscillations are converted into an electrical signal as a consequence of the direct piezoelectric effect. The details of the fabrication and preliminary trials conducted on metallic as well as non-metallic samples are given. Various applications have been envisaged for this relatively simple sensor system. One of them is in the field of pressure sensing. Experiments have been carried out to employ the acoustoelastic property of a flexible diaphragm made of silicone rubber sheet to measure pressure. The diaphragm, when exposed to a pressure on one side, experiences a varying strain field on the surface. The velocity of SAW generated on the stressed surface varies in accordance with the applied stress, and the consequent strain field generated. To verify the acoustoelastic phenomenon in silicone rubber, SAW velocities have been measured in longitudinal and transverse directions with respect to that of the applied tensile strain. Similar measurements are carried out with a pressure variant inducing the strain. The non-invasive nature of this setup lends it to be used for in situ measurement of pressure. The second application is in the field of elastography. Traditional methods of diagnosis to detect the presence of sub-epidermal lesions, some tumors of the breast, liver and prostate, intensity of skin irritation etc have been mainly by palpation. The sensor system developed in this work enables to overcome the restrictive usage and occasional failure to detect minute abnormal symptoms. In vitro trials have been conducted on tissue phantoms made out of poly (vinyl alcohol) (PVA-C) samples of varying stiffnesses. The results obtained and a discussion on the same are presented.
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Ippolito, Samuel James, and sipp@ieee org. "Investigation of Multilayered Surface Acoustic Wave Devices for Gas Sensing Applications: Employing piezoelectric intermediate and nanocrystalline metal oxide sensitive layers." RMIT University. Electrical and Computer Engineering, 2006. http://adt.lib.rmit.edu.au/adt/public/adt-VIT20070227.123029.

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In this thesis, the author proposes and develops novel multilayered Surface Acoustic Wave (SAW) devices with unique attributes for gas sensing applications. The design, simulation, fabrication and gas sensing performance of three multilayered SAW structures has been undertaken. The investigated structures are based on two substrates having high electromechanical coupling coefficient: lithium niobate (LiNbO3) and lithium tantalate (LiTaO3), with a piezoelectric zinc oxide (ZnO) intermediate layer. Sensitivity towards target gas analytes is provided by thin film indium oxide (InOx) or tungsten trioxide (WO3). The high performance of the gas sensors is achieved by adjusting the intermediate ZnO layer thickness. Sensitivity calculations, undertaken with perturbation theory illustrate how the intermediate ZnO layer can be employed to modify the velocity-permittivity product of the supported SAW modes, resulting in highly sensitive conductometric SAW gas sensors. The work contained within this thesis addresses a broad spectrum of issues relating to multilayered SAW gas sensors. Topics include finite-element modelling, perturbation theory, micro-fabrication, metal oxide deposition, material characterisation and experiential evaluation of the layered SAW sensors towards nitrogen dioxide (NO2), hydrogen (H2) and ethanol gas phase analytes. The development of two-dimensional (2D) and three dimensional (3D) finite-element models provides a deep insight and understanding of acoustic wave propagation in layered anisotropic media, whilst also illustrating that the entire surface of the device can and should be used as the active sensing area. Additionally, the unique and distinctive surface morphology of the layered structures are examined by Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM). The crystalline structure and orientation of the ZnO and WO3 layers are also examined by X-ray Diffraction Spectroscopy (XRD). The novel multilayered SAW structures a re shown to be highly sensitive, capable of sensing NO2 and ethanol concentration levels in the parts-per-billion and parts-per-million range, respectively, and H2 concentrations below 1.00% in air. The addition of platinum or gold catalyst activator layers on the WO3 sensitive layer is shown to improve sensitivity and dynamic performance, with response magnitudes up to 50 times larger than bare WO3. The gas sensing performance of the investigated structures provide strong evidence that high sensitivity can be achieved utilising multilayered SAW structures for conductometric gas sensing applications.
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Srinivasan, Krishnan. "Nanomaterial Sensing Layer Based Surface Acoustic Wave Hydrogen Sensors." Scholar Commons, 2005. https://scholarcommons.usf.edu/etd/873.

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This thesis addresses the design and use of suitable nanomaterials and surface acoustic wave sensors for hydrogen detection and sensing. Nanotechnology is aimed at design and synthesis of novel nanoscale materials. These materials could find uses in the design of optical, biomedical and electronic devices. One such example of a nanoscale biological system is a virus. Viruses have been given a lot of attention for assembly of nanoelectronic materials. The tobacco mosaic virus (TMV) used in this research represents an inexpensive and renewable biotemplate that can be easily functionalized for the synthesis of nanomaterials. Strains of this virus have been previously coated with metals, silica or semiconductor materials with potential applications in the assembly of nanostructures and nanoelectronic circuits. Carbon nanotubes are another set of well-characterized nanoscale materials which have been widely investigated to put their physical and chemical properties to use in design of transistors, gas sensors, hydrogen storage cells, etc. Palladium is a well-known material for detection of hydrogen. The processes of absorption and desorption are known to be reversible and are known to produce changes in density, elastic properties and conductivity of the film. Despite these advantages, palladium films are known to suffer from problems of peeling and cracking in hydrogen sensor applications. They are also required to be cycled for a few times with hydrogen before they give reproducible responses. The work presented in this thesis, takes concepts from previous hydrogen sensing techniques and applies them to two nanoengineered particles (Pd coated TMV and Pd coated SWNTs) as SAW resonator sensing materials. Possible sensing enhancements to be gained by using these nanomaterial sensing layers are investigated. SAW resonators were coated with these two different nano-structured sensing layers (Pd-TMV and Pd-SWNT) which produced differently useful hydrogen sensor responses. The Pd-TMV coated resonator responded to hydrogen with nearly constant increases in frequency as compared to the Pd-SWNT coated device, which responded with concentration-dependent decreases in frequency of greater magnitude upon hydrogen exposure. The former behavior is more associated with acousto-electric phenomena in SAW devices and the later with mass loading. The 99% response times were 30-40 seconds for the Pd-TMV sensing layer and approximately 150 seconds for the Pd-SWNT layer. Both the films showed high robustness and reversibility at room temperature. When the Pd film was exposed to hydrogen it was observed that it produced decreases in frequency to hydrogen challenges, conforming to mass loading effect. It was also observed that the Pd film started degrading with repeated exposure to hydrogen, with shifts after each exposure going smaller and smaller.
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Manoosingh, Lane Leslie. "Design of a chemical agent detector based on polymer coated surface acoustic wave (SAW) resonator technology." [Tampa, Fla.] : University of South Florida, 2004. http://purl.fcla.edu/fcla/etd/SFE0000412.

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Fechete, Alexandru Constantin, and e54372@ems rmit edu au. "Layered Surface Acoustic Wave Based Gas Sensors Utilising Nanostructured Indium Oxide Thin Layer." RMIT University. Electrical and Computer Engineering, 2009. http://adt.lib.rmit.edu.au/adt/public/adt-VIT20091105.141111.

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Planar two-dimensional (2-D) nanostructured indium oxide (InOx) and one-dimensional (1-D) tin oxide (SnO2) semiconductor metal-oxide layers have been utilised for gas sensing applications. Novel layered Surface Acoustic Wave (SAW) based sensors were developed consisting of InOx/SiOxNy/36°YXLiTaO3, InOx/SiNx/SiO2/36°YXLiTaO3 and InOx/SiNx/36°YXLiTaO3 The 1 µm intermediate layers of silicon oxynitride (SiOxNy), silicon nitride (SiNx) and SiO2/SiNx matrix were deposited on lithium tantalate (36°YXLiTaO3) substrates by r.f. magnetron sputtering, electron-beam evaporation and plasma enhanced chemical vapour deposition (PECVD) techniques, respectively. As a gas sensitive layer, a 100 nm thin layer of InOx was deposited on the intermediate layers by r.f. magnetron sputtering. The targeted gases were ozone (O3) and hydrogen (H2). An intermediate layer has multiple functions: protective role for the interdigital transducers' electrodes as well as an isolating effect from InOx sensing layer, thereby improving the sensor performance. The developed SAW sensors' exhibited high response magnitudes with repeatable, reversible and stable responses towards O3 and H2. They are capable of sensing concentrations as low as 20 parts-per-billion for O3 and 600 parts-per-million for H2. Additionally a conductometric type novel sensing structure of SnO2/36°YX LiTaO3 was also developed by depositing a thin layer of SnO2 nanorods by PECVD. The gas sensing performance exhibited repeatable, reversible, stable responses towards NO2 and CO. The surface morphology, crystalline structure and preferred orientation of the deposited layers were investigated by Scanning Electron Microscopy (SEM) and X-ray Diffraction (XRD). A polycrystalline, oxygen deficient non-stoichiometric InOx with grain sizes of 20-40 nm was revealed. The 1-D nanostructures were characterised by Transmission Electron Microscopy (TEM) showing nanorods with needle-like shape , diameters of 10-20 nm a t the top and 30-40 nm at the base as well as a preferential growth orientation of [ ] on the LiTaO3 substrate. The developed sensors are promising for O3, H2 and CO sensing.
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Onen, Onursal. "Analytical Modeling, Perturbation Analysis and Experimental Characterization of Guided Surface Acoustic Wave Sensors." Scholar Commons, 2013. http://scholarcommons.usf.edu/etd/4555.

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In this dissertation, guided surface acoustic wave sensors were investigated theoretically and experimentally in detail for immunosensing applications. Shear horizontal polarized guided surface acoustic wave propagation for mass loading sensing applications was modeled using analytical modeling and characterized by perturbation analysis. The model verification was performed experimentally and a surface acoustic wave immunosensor case study was presented. The results of the immunosensing were also investigated using the perturbation analysis. Guided surface acoustic wave propagation problem was investigated in detail for gravimetric (or mass loading) guided wave sensors, more specifically for immunosensors. The analytical model was developed for multilayer systems taking viscoelasticity into account. The closed form algebraic solutions were obtained by applying appropriate boundary conditions. A numerical approach was used to solve dispersion equation. Detailed parametric investigation of dispersion curves was conducted using typical substrate materials and guiding layers. Substrate types of ST-cut quartz, 41° YX lithium Niobate and 36° YX lithium tantalate with guiding layers of silicon dioxide, metals (chromium and gold), and polymers (Parylene-C and SU-8) were investigated. The effects of frequency and degree of viscoelasticity were also studied. The results showed that frequency only has effect on thickness with same shaped dispersion curves. Dispersion curves were found to be unaffected by the degree of viscoelasticity. It was also observed that when there was a large shear velocity difference between substrate and guiding layer, a transition region with a gradual decrease in phase velocity was obtained. However, when shear velocities were close, a smooth transition was observed. Furthermore, it was observed that, large density differences between substrate and guiding layer resulted in sharp and with nearly constant slope transition. Smooth transition was observed for the cases of minimal density differences. Experimental verification of the model was done using multi-layer photoresists. It was shown that with modifications, the model was able to represent the cases studied. Perturbation equations were developed with first order approximations by relating the slope of the dispersion curves with sensitivity. The equations were used to investigate the sensitivity for material selection (substrate, guiding layer, and mass perturbing layer) and degree of viscoelasticity. The investigations showed that the sensitivity was increased by using guiding layers with lower shear velocities and densities. Among the guiding layers investigated, Parylene C showed the highest sensitivity followed by gold and chrome. The perturbation investigations were also extended to viscoelasticity and to protein layers for immunosensing applications. It was observed that, viscous behavior resulted in slightly higher sensitivity; and sensitivity to protein layers was very close to sensitivity for polymers. The optimum case is found to be ST-cut quartz with Parylene-C guiding layer for protein layer sensing. Finally, an immunosensing case study was presented for selective capture of protein B-cell lymphoma 2 (Bcl-2), which is elevated in many cancer types including ovarian cancer. The immunosensor was designed, fabricated, and experimentally characterized. An application-specific surface functionalization scheme with monoclonal antibodies, ODMS, Protein A/G and Pluronic F127 was developed and applied. Characterization was done using the oscillation frequency shift of with sensor used as the feedback element of an oscillator circuit. Detection of Bcl-2 with target sensitivity of 0.5 ng/ml from buffer solutions was presented. A linear relation between frequency shift and Bcl-2 concentration was observed. The selectivity was shown with experiments by introducing another protein, in addition to Bcl-2, to the buffer. It was seen that similar detection performance of Bcl-2 was obtained even with presence of control protein in very high concentrations. The results were also analyzed with perturbation equations.
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Westafer, Ryan S. "Investigation of phononic crystals for dispersive surface acoustic wave ozone sensors." Diss., Georgia Institute of Technology, 2011. http://hdl.handle.net/1853/41165.

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The object of this research was to investigate dispersion in surface phononic crystals (PnCs) for application to a newly developed passive surface acoustic wave (SAW) ozone sensor. Frequency band gaps and slow sound already have been reported for PnC lattice structures. Such engineered structures are often advertised to reduce loss, increase sensitivity, and reduce device size. However, these advances have not yet been realized in the context of surface acoustic wave sensors. In early work, we computed SAW dispersion in patterned surface structures and we confirmed that our finite element computations of SAW dispersion in thin films and in one dimensional surface PnC structures agree with experimental results obtained by laser probe techniques. We analyzed the computations to guide device design in terms of sensitivity and joint spectral operating point. Next we conducted simulations and experiments to determine sensitivity and limit of detection for more conventional dispersive SAW devices and PnC sensors. Finally, we conducted extensive ozone detection trials on passive reflection mode SAW devices, using distinct components of the time dispersed response to compensate for the effect of temperature. The experimental work revealed that the devices may be used for dosimetry applications over periods of several days.
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Books on the topic "Surface acoustic wave (SAW) sensor"

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Gruhl, Friederike J. Oberflächenmodifikation von Surface Acoustic Wave (SAW) Biosensoren für biomedizinische Anwendungen. Karlsruhe: KIT Scientific Publishing, 2010.

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Lewis, M. F. A study of group-type single-phase unidirectional saw transducers on LiNbO₃ and quartz. Malvern, Worcs: Procurement Executive, Ministry of Defence, RSRE, 1985.

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IEEE standard terms and definitions for surface acoustic wave (SAW) devices. New York: IEEE, 1993.

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Jayarajah, Christine Nelun. Characterization of interfacial gene transcription with on-line acoustic wave sensor network and surface analysis techniques. 2005.

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Book chapters on the topic "Surface acoustic wave (SAW) sensor"

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Caliendo, C., E. Verona, and A. D’Amico. "Surface Acoustic Wave (SAW) Gas Sensors." In Gas Sensors, 281–306. Dordrecht: Springer Netherlands, 1992. http://dx.doi.org/10.1007/978-94-011-2737-0_8.

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Du, Xiaofen, and Russell Rouseff. "Comparison of Fast Gas Chromatography−Surface Acoustic Wave Sensor (FGC-SAW) and Capillary GC-MS for Determining Strawberry and Orange Juice Volatiles." In ACS Symposium Series, 177–89. Washington, DC: American Chemical Society, 2012. http://dx.doi.org/10.1021/bk-2012-1098.ch013.

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Hashimoto, Ken-ya. "Simulation of SH-type SAW Devices." In Surface Acoustic Wave Devices in Telecommunications, 237–70. Berlin, Heidelberg: Springer Berlin Heidelberg, 2000. http://dx.doi.org/10.1007/978-3-662-04223-6_8.

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Nelissen, Hubertus F. M., Menno R. de Jong, Fokke Venema, Martinus C. Feiters, and Roeland J. M. Nolte. "Cyclodextrins as Receptors on Surface Acoustic Wave Devices." In Sensor Technology in the Netherlands: State of the Art, 219–22. Dordrecht: Springer Netherlands, 1998. http://dx.doi.org/10.1007/978-94-011-5010-1_35.

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Länge, Kerstin, Friederike J. Gruhl, and Michael Rapp. "Surface Acoustic Wave (SAW) Biosensors: Coupling of Sensing Layers and Measurement." In Microfluidic Diagnostics, 491–505. Totowa, NJ: Humana Press, 2012. http://dx.doi.org/10.1007/978-1-62703-134-9_31.

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Wagner, Jens, Manfred von Schickfus, and Siegfried Hunklinger. "Highly sensitive vapor sensor using an inductively coupled surface acoustic wave sensor." In Transducers ’01 Eurosensors XV, 1738–41. Berlin, Heidelberg: Springer Berlin Heidelberg, 2001. http://dx.doi.org/10.1007/978-3-642-59497-7_411.

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Marquis, B. T., D. J. Frankel, W. E. Bruehs, and J. F. Vetelino. "A Study of Metallic Corrosion Using a Surface Acoustic Wave Sensor." In Review of Progress in Quantitative Nondestructive Evaluation, 625–32. Boston, MA: Springer US, 1997. http://dx.doi.org/10.1007/978-1-4615-5947-4_82.

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Gruhl, F. J., B. E. Rapp, M. Rapp, and K. Länge. "Surface Acoustic Wave (SAW) Biosensor Chip System - a Promising Alternative for Biomedical Applications." In IFMBE Proceedings, 73–76. Berlin, Heidelberg: Springer Berlin Heidelberg, 2009. http://dx.doi.org/10.1007/978-3-642-03887-7_20.

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Islam, T., U. Mittal, A. T. Nimal, and M. U. Sharma. "High Frequency Surface Acoustic Wave (SAW) Device for Toxic Vapor Detection: Prospects and Challenges." In Sensing Technology: Current Status and Future Trends II, 217–41. Cham: Springer International Publishing, 2013. http://dx.doi.org/10.1007/978-3-319-02315-1_11.

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Toma, K., T. Arakawa, and K. Mitsubayashi. "CHAPTER 5. Rapid and Repeated Measurement of Mite Allergens Using a Surface Acoustic Wave (SAW) Immunosensor." In Immunosensors, 86–100. Cambridge: Royal Society of Chemistry, 2019. http://dx.doi.org/10.1039/9781788016162-00086.

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Conference papers on the topic "Surface acoustic wave (SAW) sensor"

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Hempel, Jochen, Elena Zukowski, Michael Berndt, Sohaib Anees, Jürgen Wilde, and Leonhard M. Reindl. "Strain Transfer Analysis of Integrated Surface Acoustic Wave Sensors." In ASME 2013 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems. American Society of Mechanical Engineers, 2013. http://dx.doi.org/10.1115/ipack2013-73258.

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This paper presents a strain transfer investigation for Surface Acoustic Wave (SAW) strain sensors. For evaluation, a SAW strain sensor is assembled with a pre-tested bond material for potentially high strain transfer on a test holder. The setup is stressed with an axially homogeneous strain up to 500 ppm. The strain transfer ratio is computed from the applied load, the reference measurements with foil strain gauge, and the measured SAW strain sensor signal. The strain transfer performance of the bond material is also investigated with respect to the temperature dependency in the range between 22 °C and 85 °C. At this elevated temperatures an average strain transfer ratio of 0.606 ± 0.7% was measured. Mechanical load cycling tests up to 1000 cycles are used for the evaluation of the elastic fatigue of the bond material. The effects of mechanical load cycling and aging of the bond layer are analyzed with the SAW strain sensor response. After 1000 mechanical load cycles the transferred strain into the SAW strain sensor is 0.582 ± 0.153%. Finally, the experimental results are compared with the results of a 3D FEM simulation which are deviating less than 10%.
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Chu, Jian, Ioana Voiculescu, Ziqian Dong, and Fang Li. "Passive Impedance-Loaded Surface Acoustic Wave (SAW) Sensor for Soil Condition Monitoring." In ASME 2020 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 2020. http://dx.doi.org/10.1115/imece2020-23746.

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Abstract This paper presents an innovative system to monitor the physical soil conditions needed for modern agriculture. The current technique to measure soil properties relies on taking samples from place to place and takes them for laboratory testing. To build up and monitor a data-based system for a large area, such a method is costly and time-consuming. This paper reported our recent work on the development of a passive impedance-loaded surface acoustic wave (SAW) sensor for a low-cost soil condition monitoring system. The SAW sensor will eventually be connected to an antenna and a impedance-based sensor for autonomous soil nutrient sensing. In this research, first, the coupling-of-modes (COM) analysis was performed to simulate the SAW device. The sensors were fabricated with E-beam lithography techniques and tested with different external load resistances. We investigated how the sensor signal changed with the external resistance loading. The experimental results were verified by comparing them with simulation results.
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Yan, Yang, Yudong Wang, and Fang Li. "Surface Acoustic Wave Sensors for Temperature and Strain Measurements." In ASME 2020 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 2020. http://dx.doi.org/10.1115/imece2020-24340.

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Abstract It is highly desired to develop an inexpensive, wireless embedded sensor system that can provide high-bandwidth measurements of temperature and pressure inside a pipeline for rocket propulsion test applications. The fuel is generally liquid hydrogen and liquid oxygen, which must be kept at cryogenic temperatures. The environment places additional requirements on the design of sensors that is beyond the scope of most available products. Surface acoustic wave (SAW) technology has received considerable attention for harsh environment applications. The ultimate goal of our research is to develop a SAW sensor system for temperature and pressure sensing in the cryogenic environment. In this paper, the temperature testing of the SAW sensor was finished from 30 to 80°C. The strain testing was performed at room temperature. The results have shown that the temperature coefficient of the delay (TCD) at the room temperature is around 74.4 ppm/°C. The Strain coefficient of delay (SCD) of the testing result is 0.38 ppm/με at room temperature.
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Islam, T., U. Mittal, A. T. Nimal, and M. U. Sharma. "Surface Acoustic Wave (SAW) vapour sensor using 70 MHz SAW oscillator." In 2012 Sixth International Conference on Sensing Technology (ICST 2012). IEEE, 2012. http://dx.doi.org/10.1109/icsenst.2012.6461651.

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Fourati, Najla, Jean-Marie Fougnion, Lionel Rousseau, Patrick Lepeut, Olivier Franc¸ais, Patrick Boutin, Christophe Vedrine, Jean-Jacques Bonnet, Bruno Mercier, and Christine Pernelle. "Surface Acoustic Love Waves Sensor for Chemical and Electrochemical Detection." In ASME 8th Biennial Conference on Engineering Systems Design and Analysis. ASMEDC, 2006. http://dx.doi.org/10.1115/esda2006-95461.

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The present work is an experimental study of shear horizontal surface acoustic wave (SH-SAW) miniaturized sensors which offer a high potential for electrochemical applications in liquid environments and in real-time. Our devices consist of a 42° rotYX lithium tantalate (LiTaO3) substrate coated with an SU8 photoresist polymer in order to produce acoustic waveguides supporting a Love–wave. The sensors architecture and fabrication techniques are presented. Standard techniques employing continuous wave system and pulse mode measurements have shown the propagation of both surface skimming bulk waves (SSBW) and leaky SH-SAW (LSAW) on 42°rot YXLiTaO3. A numerical calculation using a simple balanced summation waves model is presented. Taking into account waves reflections and our measured velocity values, the simulation is in accordance with measurement. A copper’s electrodeposition experiment was performed to estimate the sensitivity of SAW devices. The measured sensitivity of 0.38 cm2.g−1 is discussed in the framework of previously published works concerning Love wave devices.
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Jha, Shashank S., and R. D. S. Yadava. "A new surface acoustic wave (SAW) delay line sensor." In PROCEEDING OF INTERNATIONAL CONFERENCE ON RECENT TRENDS IN APPLIED PHYSICS AND MATERIAL SCIENCE: RAM 2013. AIP, 2013. http://dx.doi.org/10.1063/1.4810696.

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Lee, Kun-Lin, and Ioana Voiculescu. "Study of Low-Frequency Narrow Bandwidth Surface Acoustic Wave Sensor for Liquid Applications." In ASME 2019 International Mechanical Engineering Congress and Exposition. American Society of Mechanical Engineers, 2019. http://dx.doi.org/10.1115/imece2019-11618.

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Abstract Surface acoustic wave (SAW) devices have been applied as telecommunication filter for decades. Due to its simple interdigitated transducer (IDT) layout and geometry-dependent frequency, the SAW filter operates at the designed frequency and its working bandwidth could be designed to fulfill specific applications. Researchers also use SAW devices for sensing the mass or pressure in air. Furthermore, SAW device can be employed in liquid environments. The main focus of this paper is to present a Love mode device for liquid sensing. The Love mode device included a shear-horizontal surface acoustic wave (SH-SAW) delay-line configuration with a photoresist waveguide, which was deposited on split-electrode IDT and reflectors. The substrate was ST-cut quartz, and the SH-SAW propagated between the waveguide and the piezoelectric substrate. Using the Love mode device, we monitored the frequency shift corresponding to a water drop. We demonstrate that the insertion loss level is not critical for S-parameter transmission signal readout. The signal quality within the resonant narrowband is very important for water sensing. In this study, two types of SH-SAW devices were fabricated and tested; SH-SAW resonator and SH-SAW delay-line. We also demonstrate single and split electrodes electrode configurations to generate acoustic waves. Four different waveguide thickness values were tested to prove the benefit of thick polymer waveguide. This research also offers a standard method to fabricate SAW on ST-quartz for liquid application. In the future, we plan to integrate the Love mode device with a cell-culturing chamber to obtain a biosensor.
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Liu, Sai, Pengtao Wang, Minghao Song, and Hongwei Sun. "Investigation of Nanofibrous Film Coating Effect on Surface Acoustic Wave Sensors." In ASME 2010 International Mechanical Engineering Congress and Exposition. ASMEDC, 2010. http://dx.doi.org/10.1115/imece2010-39390.

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Electrospinning is reported in this paper as a new coating approach for surface acoustic wave (SAW) sensor in order to enhance its chemical detection capability. Ultrafine (100–300 nm) polyethylene oxide (PEO) fibrous film with controlled thickness and porosity were electrospun-coated on the surface of a ST-X quartz based SAW sensor. Compared to the conventional solid thin film coating techniques, the nanofiber-coated SAW sensor shows a higher sensitivity and faster response. A theoretical analysis was performed to characterize the SAW sensor response with nanofibrous film coating. The nanofibrous film provides a high surface area to volume ratio, which can not only offer more adsorption sites for vapor molecules, but also shortens the diffusion length of vapor molecules into polymer material. It is concluded that the nanofiber film holds a great potential in enhancing SAW sensor performance for trace level detection of chemical analytes.
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Жгун, S. Zhgun, Швецов, A. Shvetsov, Лобов, G. Lobov, Ванг, and Dzh Vang. "Application of surface acoustic waves for wireless sensors." In XXIV International Conference. Москва: Infra-m, 2016. http://dx.doi.org/10.12737/23198.

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Tigli, Onur, and Mona E. Zaghloul. "A Novel Circular SAW (Surface Acoustic Wave) Device in CMOS." In 2007 IEEE Sensors. IEEE, 2007. http://dx.doi.org/10.1109/icsens.2007.4388439.

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Reports on the topic "Surface acoustic wave (SAW) sensor"

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Joshua Caron. SURFACE ACOUSTIC WAVE MERCURY VAPOR SENSOR. Office of Scientific and Technical Information (OSTI), June 1998. http://dx.doi.org/10.2172/807870.

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JOSHUA CARON. SURFACE ACOUSTIC WAVE MERCURY VAPOR SENSOR. Office of Scientific and Technical Information (OSTI), September 1998. http://dx.doi.org/10.2172/7107.

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Pandey, R. K. Growth of Device Quality Bulk Single Crystal of Pb-K-Niobate (PKN) for SAW (Surface Acoustic Wave)-Devices and Electro-Optical Applications. Fort Belvoir, VA: Defense Technical Information Center, December 1985. http://dx.doi.org/10.21236/ada179716.

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Lockrem, L. L. Evaluation of a gas chromatograph with a novel surface acoustic wave detector (SAW GC) for screening of volatile organic compounds in Hanford waste tank samples. Office of Scientific and Technical Information (OSTI), January 1998. http://dx.doi.org/10.2172/362485.

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